Device for detecting and cleaning particles on surface of optical element

Abstract

The invention provides an optical element surface particle detection and cleaning device, which comprises a low-vacuum laminar flow environment module, a particle detection module, a particle cleaning module and a displacement table module, and is characterized in that the low-vacuum laminar flow environment module comprises a working chamber and a laminar flow low-vacuum control unit; the particle detection module comprises a first collecting lens, a second collecting lens, a laser emission assembly and a laser feedback detection assembly; the first collecting lens, the second collecting lens and the laser feedback detection assembly are respectively arranged in the working chamber; the particle cleaning module comprises a pulse laser emitting assembly, a beam expander and a convergent lens, and the beam expander and the convergent lens are arranged in the working chamber; and the displacement table module is arranged in the working chamber and is used for bearing the optical element to move in the working chamber so as to realize detection and cleaning of particulate matters on the optical element. According to the invention, in-situ detection and cleaning of the optical element can be realized in the semiconductor equipment, and the problem of secondary pollution after cleaning can be avoided.

Description

Technical Field

[0001] The present invention relates to the technical field of integrated circuit manufacturing and semiconductor equipment, and in particular to a device for detecting and cleaning particles on the surface of an optical element. Background Art

[0002] With the development of semiconductor manufacturing technology, the measurement accuracy of semiconductor equipment such as mask detection, optical component detection and chip manufacturing needs to reach the nanometer level, and the working environment inside the equipment also needs to reach an ultra-clean clean space, and the working environment of some equipment requires a vacuum state. Since samples such as masks and optical components to be processed will inevitably have particle deposition during the transmission process, it is necessary to detect particles on the sample surface before exposure and other processes to determine the location of particles and remove particles on the sample surface to ensure processing accuracy and manufacturing yield.

[0003] In the prior art, in the patent with publication number US20110083696A1, the laser system is completely placed outside the chamber, so that the focal length of the focusing lens is longer, but it is not conducive to reducing the waist spot radius, not conducive to obtaining a very small light spot at the focus to obtain a high power density, not conducive to achieving gas ionization and plasma generation to generate shock waves, and detection and cleaning are separated, which easily increases the probability of contamination. In the patent with publication number US6249932B1, the sample needs to be placed in a specific device for cleaning.

[0004] It can be seen that the laser shock wave cleaning and other technologies currently used for particle removal can effectively remove particles of 10 to 40 nm without damaging the sample. However, there are still problems such as the inability to detect particles in situ and the possibility of re-contamination of samples or contamination of the main chamber of semiconductor equipment after cleaning. Summary of the invention

[0005] The purpose of the present invention is to provide an optical element surface particle detection and cleaning device, which can solve the problem that the existing optical element surface particle cleaning technology cannot detect particles in situ and is prone to re-contamination after cleaning.

[0006] The present invention provides an optical element surface particle detection and cleaning device, comprising:

[0007] A low vacuum laminar flow environment module, comprising a working chamber and a laminar flow low vacuum control unit, wherein the laminar flow low vacuum control unit is used to form a laminar flow low vacuum environment with stable pressure in the chamber;

[0008] A particle detection module, comprising a first condenser, a second condenser, a laser emission component and a laser feedback detection component, wherein the first condenser, the second condenser and the laser feedback detection component are respectively arranged in the working chamber; the first condenser has a first convergence point, the second condenser has a second convergence point, and the first condenser and the second condenser have a third convergence point that overlaps; the laser emission component is used to emit laser light to the first convergence point, and when particles exist on the optical element at the first convergence point, a scattered light beam is generated, and the scattered light beam can pass through the third convergence point and the second convergence point in sequence; the laser feedback detection component can collect scattered light signals;

[0009] A particle cleaning module, comprising a pulse laser emission component, a beam expander and a converging lens, wherein the beam expander and the converging lens are respectively arranged in the working chamber, and the pulse laser emission component is used to emit a pulse laser to the beam expander, and the pulse laser passes through the beam expander and the converging lens in sequence, and generates a shock wave at the focus of the converging lens to remove particles on the optical element;

[0010] The translation stage module is arranged in the working chamber, and is used for carrying the optical element to move in the working chamber, so as to detect and clean the particles on the optical element.

[0011] According to an optical element surface particle detection and cleaning device provided by the present invention, the laminar low vacuum control unit includes a gas input control unit and a gas output control unit respectively arranged at the left and right ends of the working chamber, the gas input control unit includes an air inlet pipeline and a gas distributor, the gas distributor is arranged at a position close to the left side wall in the working chamber, one end of the air inlet pipeline passes through the left side wall of the working chamber and is connected to the gas distributor; the gas output control unit includes an air outlet arranged on the right side wall of the working chamber and a vacuum pump connected to the air outlet.

[0012] According to an optical element surface particle detection and cleaning device provided by the present invention, an air intake stop valve, a mass flow controller and an injection valve are respectively provided on the air intake pipeline; and a pumping speed regulating valve is also provided at the air outlet.

[0013] According to an optical element surface particle detection and cleaning device provided by the present invention, the laser emitting assembly includes a laser and a first reflector, the laser is arranged outside the working chamber, the first reflector is arranged inside the working chamber, and the laser emitted by the laser is reflected by the first reflector and hits the first convergence point.

[0014] According to the optical element surface particle detection and cleaning device provided by the present invention, a first window is further provided on the optical path between the laser and the first reflector, and the first window is installed on the side wall of the working chamber.

[0015] According to an optical element surface particle detection and cleaning device provided by the present invention, the laser feedback detection component includes a second reflector and a photodetector, the second reflector is arranged at the second convergence point, and the scattered light beam emitted to the second convergence point enters the photodetector after being reflected by the second reflector.

[0016] According to an optical element surface particle detection and cleaning device provided by the present invention, the pulse laser emitting component includes a pulse laser and a third reflector, the pulse laser is arranged outside the working chamber, and the third reflector is arranged inside the working chamber, and the laser pulse emitted by the pulse laser is reflected by the third reflector and then emitted into the beam expander.

[0017] According to an optical element surface particle detection and cleaning device provided by the present invention, a second window is further provided on the optical path between the pulse laser and the third reflector, and the second window is installed on the side wall of the working chamber.

[0018] According to an optical element surface particle detection and cleaning device provided by the present invention, the translation stage module includes a multi-axis translation stage and a clamping tool chuck, the clamping tool chuck is arranged on the multi-axis translation stage, and the clamping tool chuck is used to clamp the optical element.

[0019] According to the present invention, an optical element surface particle detection and cleaning device also includes a main control module, which is electrically connected to the laminar low vacuum control unit, the laser emission component, the laser feedback detection component, the pulse laser emission component and the translation stage module respectively.

[0020] The optical element surface particle detection and cleaning device provided by the present invention has a low vacuum laminar flow environment module in which a laminar low vacuum environment with stable pressure is formed in a working chamber through a laminar low vacuum control unit; in a particle detection module, a laser can be emitted to a first convergence point through a laser emission component, and when particles exist on the optical element at the first convergence point, a scattered light beam is generated, and the scattered light beam can pass through a third convergence point and a second convergence point in sequence, and the scattered light signal can be collected through a laser feedback detection component; in a particle cleaning module, a pulsed laser can be emitted to a beam expander through a pulsed laser emission component, and the pulsed laser passes through the beam expander and a converging lens in sequence, and a shock wave is generated at the focus of the converging lens to clear the particles on the optical element; and the optical element can be carried to move in the working chamber through a displacement stage module to realize the detection and cleaning of particles on the optical element. Therefore, the optical element surface particle detection and cleaning device provided by the present invention can be used as a subsystem or module of semiconductor equipment to realize in-situ detection and cleaning of optical elements inside the semiconductor equipment. Since the air pressure inside the working chamber is slightly lower than the ambient air pressure of the main chamber of the semiconductor equipment, air pressure suppression can be formed between the working chamber and the main chamber of the semiconductor equipment, which is beneficial to suppress the escape of particles inside the working chamber to the main chamber of the semiconductor equipment, thereby avoiding the problem of re-contamination of the sample after cleaning. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0022] Figure 1 It is a schematic diagram of the structure of the optical element surface particle detection and cleaning device of the present invention;

[0023] Figure 2 It is a structural schematic diagram of a particle detection module in the optical element surface particle detection and cleaning device of the present invention;

[0024] Figure 3 It is a schematic structural diagram of a particle cleaning module in the optical element surface particle detection and cleaning device of the present invention;

[0025] Figure 4 It is a schematic diagram of the structure of a low vacuum laminar flow environment module in the optical element surface particle detection and cleaning device of the present invention;

[0026] Figure 5 It is a schematic diagram of the structure of the translation stage module in the optical element surface particle detection and cleaning device of the present invention.

[0027] Description of reference numerals:

[0028] 100, particle detection module, 101, laser, 102, first window, 103, first reflector, 104, first condenser, 105, second condenser, 106, second reflector, 107, photodetector;

[0029] 200, particle cleaning module, 201, pulse laser, 202, second window, 203, third reflector, 204, beam expander, 205, converging lens;

[0030] 300, low vacuum laminar flow environment module, 301, air inlet pipeline, 302, air inlet stop valve, 303, mass flow controller, 304, injection valve, 305, gas distributor, 306, film gauge, 307, working chamber, 308, pumping speed regulating valve, 309, vacuum pump;

[0031] 400, a translation stage module, 401, an optical element, 402, a clamping tool chuck, 403, a multi-axis translation stage;

[0032] 500. Main control module. DETAILED DESCRIPTION

[0033] The technical solution of the present invention will be clearly and completely described below in conjunction with the embodiments. Obviously, the described embodiments are part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0034] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0035] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, "multiple" means two or more, unless otherwise clearly and specifically defined. In addition, the terms "installed", "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal connection of two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0036] like Figures 1 to 5 As shown, the optical element surface particle detection and cleaning device according to the embodiment of the present invention includes a particle detection module 100 , a particle cleaning module 200 , a low vacuum laminar flow environment module 300 and a translation stage module 400 .

[0037] The low vacuum laminar flow environment module 300 includes a working chamber 307 and a laminar flow low vacuum control unit. The laminar flow low vacuum control unit is used to form a laminar flow low vacuum environment with stable pressure in the working chamber 307 .

[0038] The particle detection module 100 includes a first condenser 104, a second condenser 105, a laser emission component and a laser feedback detection component, and the first condenser 104, the second condenser 105 and the laser feedback detection component are respectively arranged in the working chamber 307. The first condenser 104 has a first convergence point, the second condenser 105 has a second convergence point, and the first condenser 104 and the second condenser 105 have a third convergence point that overlaps. That is, the first condenser 104 and the second condenser 105 are both double-convergence-point condensers, the first convergence point and the third convergence point are two convergence points of the first condenser 104, the second convergence point and the third convergence point are two convergence points of the second condenser 105, that is, the convergence points of the two condensers overlap at the third convergence point. The laser emitting component is used to emit laser to the first convergence point. When there are particles on the optical element 401 at the first convergence point, a scattered light beam will be generated. The scattered light beam can pass through the third convergence point and the second convergence point in sequence. The laser feedback detection component can collect the scattered light signal.

[0039] Among them, the particle cleaning module 200 includes a pulse laser emission component, a beam expander 204 and a converging lens 205. The beam expander 204 and the converging lens 205 are respectively arranged in the working chamber 307. The pulse laser emission component is used to emit a pulse laser to the beam expander 204. The pulse laser passes through the beam expander 204 and the converging lens 205 in sequence, and generates a shock wave at the focus of the converging lens 205, which is used to remove particles on the optical element 401.

[0040] The translation stage module 400 is disposed in the working chamber 307 , and is used to carry the optical element 401 to move in the working chamber, so as to detect and clean particles on the optical element 401 .

[0041] Therefore, the optical element surface particle detection and cleaning device of the embodiment of the present invention can be used as a subsystem or module of semiconductor equipment to realize in-situ detection and cleaning of optical elements inside the semiconductor equipment. Since the air pressure inside the working chamber is slightly lower than the ambient air pressure of the main chamber of the semiconductor equipment, air pressure suppression can be formed between the working chamber and the main chamber of the semiconductor equipment, which is beneficial to suppress the escape of particles inside the working chamber to the main chamber of the semiconductor equipment, thereby avoiding the problem of re-contamination of the sample after cleaning.

[0042] In some embodiments of the present invention, the optical element surface particle detection and cleaning device further includes a main control module 500, which is electrically connected to the laminar low vacuum control unit, the laser emission component, the laser feedback detection component, the pulse laser emission component and the translation stage module. Figure 1 The dashed lines in the figure represent signal and control lines.

[0043] During operation, the main control module 500 controls the translation stage module 400 to receive the optical element 401 at the sample entrance area of ​​the working chamber 307, and sends the optical element 401 to the particle detection area for laser beam scanning. When particles are found, the coordinate position of the particles will be recorded. After the surface scanning of the optical element 401 is completed, the main control module 500 controls the translation stage module 400 to move to the particle cleaning area. The main control module 500 will sequentially send the particles to the vicinity of the laser focus point of the particle cleaning module 200 through the translation stage module 400 according to factors such as the particle coordinates and particle size. The particle cleaning module 200 performs pulse emission to clean the particles out of the surface of the optical element 401. After all particles on the surface of the optical element 401 are cleaned, the main control module 500 will control the translation stage module 400 to carry the optical element 401 back to the particle detection area and perform particle scanning again. If no residual particles are found, the main control module 500 will control the translation stage module 400 to send the optical element 401 back to the sample entrance area of ​​the device working chamber 307.

[0044] In some embodiments of the present invention, the laminar low vacuum control unit includes a gas input control unit and a gas output control unit respectively arranged at the left and right ends of the working chamber 307, the gas input control unit includes an air intake pipeline 301 and a gas distributor 305, the gas distributor 305 is arranged in the working chamber 307 near the left side wall, one end of the air intake pipeline 301 passes through the left side wall of the working chamber 307 and is connected to the gas distributor 305.

[0045] The air intake pipe 301 is provided with an air intake stop valve 302 , a mass flow controller 303 and an injection valve 304 , respectively. The main control module 500 is electrically connected to the air intake stop valve 302 , the mass flow controller 303 and the injection valve 304 , respectively.

[0046] The gas output control unit includes a gas outlet disposed on the right side wall of the working chamber 307 and a vacuum pump 309 connected to the gas outlet. A pumping speed regulating valve 308 is also disposed at the gas outlet. The main control module 500 is electrically connected to the vacuum pump 309 and the pumping speed regulating valve 308, respectively.

[0047] Among them, the gas that is easy to ionize and generate shock waves is introduced into the working chamber 307 through the air inlet pipeline 301, and a laminar flow can be formed in the working chamber 307, so that the detached particles can achieve directional flow and be discharged from the chamber through the air outlet, thereby preventing the particles from contaminating the sample or the main chamber of the semiconductor equipment again. A thin film gauge 306 is also installed on the working chamber 307 to detect the vacuum degree in the working chamber 307. The thin film gauge 306 is electrically connected to the main control module 500, and the vacuum degree data detected by the thin film gauge 306 is transmitted to the main control module 500 as a feedback signal.

[0048] In some embodiments of the present invention, the laser emission assembly includes a laser 101 and a first reflector 103. The laser 101 is disposed outside the working chamber 307, and the first reflector 103 is disposed inside the working chamber 307. The laser emitted by the laser 101 is reflected by the first reflector 103 and hits the first convergence point. The laser 101 is electrically connected to the main control module 500, and the working state of the laser 101 can be controlled by the main control module 500.

[0049] A first window 102 is further disposed on the optical path between the laser 101 and the first reflector 103 . The first window 102 is installed on the side wall of the working chamber 307 .

[0050] A through hole is provided on the first condensing mirror 104 for the laser beam to pass through.

[0051] The laser feedback detection component includes a second reflector 106 and a photodetector 107. The second reflector 106 is disposed at the second convergence point. The scattered light beam directed to the second convergence point enters the photodetector 107 after being reflected by the second reflector 106. The photodetector 107 is electrically connected to the main control module 500. The photodetector 107 feeds back the collected light signal to the main control module 500. The main control module 500 can determine and record the coordinate position of the particle on the surface of the optical element 401 based on the feedback signal.

[0052] The second reflector 106 can realize rapid rotation at the second convergence point. Through the rapid rotation of the second reflector 106, light beams reflected from different angles to the second convergence point can be reflected by the second reflector 106 into the photodetector 107 for collection, thereby ensuring the accuracy of particle detection.

[0053] The particle detection module 100 of this embodiment projects a laser beam onto the surface of the optical element 401. When particles exist on the surface of the optical element 401, the particles scatter the laser beam, and the laser beam is reflected by two condensing mirrors and then collected by the photodetector 107. When the laser beam projects onto the surface of the optical element 401 where no particles exist, the reflected light will not be collected by the photodetector 107.

[0054] That is, the optical element 401 is moved to the first convergence point, the laser emitted by the laser 101 is reflected by the first reflector 103, enters the first condenser 104 through the through hole on the first condenser 104, and hits the first convergence point of the first condenser 104. When there are particles on the surface of the optical element 401 at the first convergence point, the light beam will be scattered, and the scattered light beam will be reflected by the first condenser 104 and emitted to the third convergence point. After passing through the third convergence point, the light beam will be reflected by the second condenser 105 and emitted to the second convergence point, and then enter the photodetector 107 after being reflected by the second reflector 106, and the scattered light signal will be collected by the photodetector 107.

[0055] In some embodiments of the present invention, the pulse laser emission assembly includes a pulse laser 201 and a third reflector 203. The pulse laser 201 is disposed outside the working chamber 307, and the third reflector 203 is disposed inside the working chamber 307. The laser pulse emitted by the pulse laser 201 is reflected by the third reflector 203 and then emitted into the beam expander 204. The pulse laser 201 is electrically connected to the main control module 500, and the working state of the pulse laser 201 can be controlled by the main control module 500.

[0056] A second window 202 is further provided on the optical path between the pulse laser 201 and the third reflector 203 . The second window 202 is installed on the side wall of the working chamber 307 .

[0057] The optical element 401 is moved to the converging lens 205 so that the particle position on the optical element 401 is located near the focus of the converging lens 205. The pulse laser emitted by the pulse laser 201 is emitted by the third reflector 203 and then enters the beam expander 204. The pulse laser is emitted into the converging lens 205 after passing through the beam expander 204, thereby emitting pulses through the converging lens 205. The converging lens 205 focuses the pulse laser beam above or obliquely above the particles on the surface of the optical element 401, and realizes gas ionization in a low vacuum environment under a specific atmosphere and a specific pressure. The gas ionization generates plasma and generates shock waves. The shock waves realize pressure, thrust or rolling force on the particles, driving the particles to detach from the surface of the optical element 401.

[0058] In some embodiments of the present invention, the translation stage module 400 includes a multi-axis translation stage 403 and a clamping tool chuck 402 . The clamping tool chuck 402 is disposed on the multi-axis translation stage 403 , and the clamping tool chuck 402 is used to clamp the optical element 401 .

[0059] The multi-axis translation stage 403 adopts the existing structural form, and can realize the movement in the three directions of X, Y, and Z and the three rotation directions of Rx, Ry, and Rz. The movement of the multi-axis translation stage 403 can realize the scanning of the entire surface of the optical element 401 by the detection laser. The multi-axis translation stage 403 is electrically connected to the main control module 500, and the movement of the multi-axis translation stage 403 can be controlled by the main control module 500.

[0060] Among them, the main control module 500 can record the particle position coordinate information according to the detection results of the particle detection module 100, and use this particle position coordinate information to accurately control the operation of the multi-axis translation stage 403 when performing particle cleaning, and accurately send the particles to the focus of the converging lens 205 of the particle cleaning module 200 for cleaning.

[0061] The clamping tool chuck 402 adopts the existing structure and is used to clamp and fix the optical element 401 on the multi-axis translation stage 403. The clamping tool chuck 402 is electrically connected to the main control module 500, and the clamping and fixing state of the clamping tool chuck 402 and the optical element 401 can be controlled by the main control module 500.

[0062] Among them, the optical element 401 that the translation stage module 400 can carry is not limited to a plane optical element, but can also be an optical element with a curvature surface. The translation stage module 400 can send each point of the curvature surface to the first convergence point of the above-mentioned particle detection module 100 to complete the scanning of the entire curvature surface, and can also send particles at any displacement point on the curvature surface to the focus of the converging lens 205 of the particle cleaning module 200 to complete particle cleaning.

[0063] The working principle of the optical element surface particle detection and cleaning device according to the embodiment of the present invention is as follows:

[0064] Under the control of the main control module 500 , the mass flow controller 303 , the pumping speed regulating valve 308 and the vacuum pump 309 of the low vacuum environment module 300 work together to obtain a laminar low vacuum environment with stable pressure in the working chamber 307 of the low vacuum environment module 300 .

[0065] The translation stage module 400 receives the optical element 401 in the sample entrance area through the clamping tool chuck 402, and sends each point on the surface of the optical element 401 to the detection point (the first convergence point) of the particle detection module 100 by controlling the movement of the multi-axis translation stage 403. After receiving the signal from the photoelectric detector 107 of the particle detection module 100, the main control module 500 identifies and records information such as the particle size and particle position coordinates.

[0066] After completing the particle scanning detection of the element surface 401, the main control module 500 drives the translation stage module 400 to send the optical element 401 to the particle cleaning module 200 area. According to the recorded particle position coordinate information, the main control module 500 controls the movement of the translation stage module 400 to send the particles of the optical element 401 to the core cleaning area of ​​the particle cleaning module 200 (the area near the focus of the converging lens 205). The main control module 500 combines the particle size information and empirical data to accurately adjust the relative position relationship between the particles and the focusing point, and then controls the particle cleaning module 200 to emit pulses to effectively remove the particles.

[0067] After all particles are removed, the main control module 500 controls the translation stage module 400 to return to the particle detection area again, controls the particle detection module 100 to detect the surface of the optical element 401 again, and after confirming that there are no residual particles, sends the optical element 401 to the sample inlet area of ​​the device to complete the particle detection and cleaning process of the optical element 401.

[0068] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. An optical element surface particle detection and cleaning device, characterized in that: include: A low vacuum laminar flow environment module, comprising a working chamber and a laminar flow low vacuum control unit, wherein the laminar flow low vacuum control unit is used to form a laminar flow low vacuum environment with stable pressure in the working chamber; A particle detection module, comprising a first condenser, a second condenser, a laser emission component and a laser feedback detection component, wherein the first condenser, the second condenser and the laser feedback detection component are respectively arranged in the working chamber; the first condenser has a first convergence point, the second condenser has a second convergence point, and the first condenser and the second condenser have a third convergence point that overlaps; the laser emission component is used to emit laser light to the first convergence point, and when particles exist on the optical element at the first convergence point, a scattered light beam is generated, and the scattered light beam can pass through the third convergence point and the second convergence point in sequence; the laser feedback detection component can collect scattered light signals; A particle cleaning module, comprising a pulse laser emission component, a beam expander and a converging lens, wherein the beam expander and the converging lens are respectively arranged in the working chamber, and the pulse laser emission component is used to emit a pulse laser to the beam expander, and the pulse laser passes through the beam expander and the converging lens in sequence, and generates a shock wave at the focus of the converging lens to remove particles on the optical element; The translation stage module is arranged in the working chamber, and is used for carrying the optical element to move in the working chamber, so as to detect and clean the particles on the optical element.

2. The optical element surface particle detection and cleaning device according to claim 1, characterized in that: The laminar low vacuum control unit includes a gas input control unit and a gas output control unit respectively arranged at the left and right ends of the working chamber, the gas input control unit includes an air inlet pipeline and a gas distributor, the gas distributor is arranged at a position close to the left side wall in the working chamber, one end of the air inlet pipeline passes through the left side wall of the working chamber and is connected to the gas distributor; the gas output control unit includes an air outlet arranged on the right side wall of the working chamber and a vacuum pump connected to the air outlet.

3. The optical element surface particle detection and cleaning device according to claim 2, characterized in that: An air intake stop valve, a mass flow controller and an injection valve are respectively arranged on the air intake pipeline; and a pumping speed regulating valve is also arranged at the air outlet.

4. The optical element surface particle detection and cleaning device according to claim 1, characterized in that: The laser emitting assembly comprises a laser and a first reflector. The laser is arranged outside the working chamber, and the first reflector is arranged inside the working chamber. The laser emitted by the laser is reflected by the first reflector and hits the first convergence point.

5. The optical element surface particle detection and cleaning device according to claim 4, characterized in that: A first window is also provided on the optical path between the laser and the first reflector, and the first window is installed on the side wall of the working chamber.

6. The optical element surface particle detection and cleaning device according to claim 1, characterized in that: The laser feedback detection component includes a second reflector and a photoelectric detector. The second reflector is arranged at the second convergence point. The scattered light beam directed to the second convergence point enters the photoelectric detector after being reflected by the second reflector.

7. The optical element surface particle detection and cleaning device according to claim 1, characterized in that: The pulse laser emission component includes a pulse laser and a third reflector. The pulse laser is arranged outside the working chamber, and the third reflector is arranged inside the working chamber. The laser pulse emitted by the pulse laser is reflected by the third reflector and then emitted into the beam expander.

8. The optical element surface particle detection and cleaning device according to claim 7, characterized in that: A second window is also provided on the optical path between the pulse laser and the third reflector, and the second window is installed on the side wall of the working chamber.

9. The optical element surface particle detection and cleaning device according to claim 1, characterized in that: The translation stage module comprises a multi-axis translation stage and a clamping tool chuck. The clamping tool chuck is arranged on the multi-axis translation stage, and the clamping tool chuck is used to clamp the optical element.

10. The optical element surface particle detection and cleaning device according to claim 1, characterized in that: It also includes a main control module, which is electrically connected to the laminar low vacuum control unit, the laser emission component, the laser feedback detection component, the pulse laser emission component and the translation stage module respectively.

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