Chemical mechanical polishing equipment and method for inner wall of large-diameter long pipe

Abstract

The invention discloses chemical mechanical polishing equipment and method for the inner wall of a large-diameter long pipe, and belongs to the technical field of chemical mechanical polishing. The chemical mechanical polishing equipment comprises a polishing box body, a water bucket and a polishing solution bucket; a jacket device, a rotary driving device, a linear driving device and a polishing head are arranged in the polishing box body, the water bucket and the polishing liquid bucket are both connected with the polishing head, and a power device is arranged between the water bucket and the polishing head; the clamping sleeve device is used for supporting and clamping a to-be-polished sample piece, the polishing head is fixed in the polishing box body, the rotary driving device can drive the to-be-polished sample piece to rotate in a clamping sleeve, and the linear driving device can drive the to-be-polished sample piece to do linear reciprocating motion. And the polishing head enters the to-be-polished sample piece, and the inner wall of the to-be-polished sample piece is polished for multiple times. According to the equipment, the to-be-polished sample piece can rotate around the axis while the to-be-polished sample piece does linear motion relative to the polishing head, circumferential uniform polishing of the inner wall of the to-be-polished sample piece is achieved, and the polishing uniformity, quality and efficiency are guaranteed.

Description

Technical Field

[0001] The invention relates to the technical field of chemical mechanical polishing, and in particular to chemical mechanical polishing equipment and a method for the inner wall of a large-diameter long tube. Background Art

[0002] With the continuous development of industrial manufacturing, the requirements for the smoothness and flatness of the inner wall of large-diameter long tubes are increasing. This is not only related to the appearance quality of the product, but also directly affects the product's performance, corrosion resistance and life. Therefore, the polishing technology of the inner wall of large-diameter long tubes has become an important link in the manufacturing industry.

[0003] As a common pipeline, large-diameter long tubes are widely used in radiators of large equipment such as aerospace. The roughness of the inner wall directly affects the flow efficiency, resistance loss and overall performance of the fluid (such as water, gas, oil, etc.). Although traditional polishing methods such as manual polishing and mechanical grinding wheel polishing can improve the roughness of the inner wall of large-diameter long tubes to a certain extent, they have problems such as low efficiency, uneven effect and high labor intensity.

[0004] Large-diameter long tubes are widely used, but the existing polishing methods seriously restrict the promotion and use of this workpiece, and it is difficult to meet the needs of various industries for this workpiece. In order to obtain a lower roughness of the inner wall of a large-diameter long tube and improve the polishing efficiency, to improve the polishing efficiency and quality, and to meet the use requirements, it is very important to propose a chemical mechanical polishing equipment and method for the inner wall of a large-diameter long tube. Summary of the invention

[0005] The present invention provides a chemical mechanical polishing device and method for the inner wall of a large-diameter long tube to solve the above problems.

[0006] In order to achieve the above object, the technical solution of the present invention is: A chemical mechanical polishing device for the inner wall of a large-diameter long tube, comprising a polishing box, a water bucket and a polishing liquid bucket; The polishing box is provided with a jacket device, a rotary drive device, a linear drive device and a polishing head, the water bucket and the polishing liquid bucket are both connected to the polishing head, and a power device is provided between the water bucket and the polishing head; The jacket device is used to support and clamp the sample to be polished, the polishing head is fixed in the polishing box, the rotary drive device can drive the sample to be polished to rotate in the jacket, and the linear drive device can drive the sample to be polished to perform linear reciprocating motion, so that the polishing head enters the interior of the sample to be polished and polishes the inner wall of the sample to be polished multiple times through the jet of the polishing head.

[0007] Furthermore, an angle is provided between the polishing head outlet and the inner wall of the sample to be polished; The polishing head is provided with a liquid mixing section, a water inlet section and a liquid inlet section, the liquid mixing section is communicated with the polishing head outlet, the water inlet section and the liquid inlet section are communicated with the liquid mixing section respectively, one end of the water inlet section away from the liquid mixing section is connected to the water bucket through a clean water pipe, and one end of the liquid inlet section away from the liquid mixing section is connected to the polishing liquid bucket through a polishing liquid pipe; The inner diameter of the water inlet section is larger than the inner diameter of the liquid inlet section, and the inner diameter of the clean water pipe is larger than the inner diameter of the polishing liquid pipe; The power device is a water pump, and the water pump is arranged on the clean water pipe.

[0008] Further, the rotation drive device includes a rotation drive motor, a driving wheel, a driven wheel and a belt; A workbench is provided in the polishing box, the rotary drive motor is provided on the workbench, the output end of the rotary drive motor is connected to the driving wheel, the driven wheel is sleeved on the outside of the sample to be polished, and the driving wheel is connected to the driven wheel through a belt.

[0009] Furthermore, the jacket device comprises a jacket, the jacket is mounted on the linear drive device, and the sample to be polished is mounted in the jacket via a bearing.

[0010] Furthermore, the linear drive device includes a linear drive motor, a lead screw, a nut, a slider and a guide rail; The lead screw is arranged on one side of the sleeve, the nut is connected to one side of the sleeve, and the nut is installed on the lead screw, the linear drive motor is connected to the lead screw, the guide rail is arranged on the workbench along the horizontal direction, and the bottom of the sleeve is installed on the guide rail through the slider.

[0011] Furthermore, the polishing liquid barrel comprises a stirring drive motor, a barrel body and a stirring rod, wherein the stirring rod is arranged in the barrel body, and the top of the stirring rod is connected to the stirring drive motor arranged on the barrel body; The stirring rod is provided with a plurality of stirring blades; The liquid outlet on the barrel body is connected to an end of the polishing liquid pipe away from the polishing box body.

[0012] Furthermore, a drain port is provided at the bottom of the polishing box, and a drain valve is provided at the drain port.

[0013] Furthermore, the polishing box includes a box body and a box cover that can be buckled on the box body, a sealing strip is provided on the upper edge of the box body, and when the box cover is buckled on the box body, the sealing strip is arranged between the box body and the box cover.

[0014] Furthermore, the linear drive motor is installed on the workbench through a linear drive motor seat, one end of the lead screw is connected to the output end of the linear drive motor through a coupling, and the other end of the lead screw is installed on the workbench through a support; The workbench is provided with a fixing plate, and the rotary drive motor is mounted on the fixing plate via a rotary drive motor seat.

[0015] A method for polishing the inner wall of a large-diameter long tube using the chemical mechanical polishing equipment comprises the following steps: S1: Assemble the linear drive device, then install bearings at both ends of the sample to be polished, install the driven wheel in the middle of the sample to be polished, install the bearing into the jacket, connect the driven wheel with the driving wheel through a belt, fix the jacket with the nut seat on the workbench, buckle the box cover, and complete the installation of the sample to be polished; S2: Start the linear drive motor and the rotary drive motor, and the sample to be polished rotates continuously while performing a linear reciprocating motion relative to the polishing head. Start the stirring drive device, and the polishing liquid in the polishing liquid barrel is stirred by the stirring rod. Start the power device, and the clean water and the polishing liquid are mixed in the polishing head and then sprayed out from the polishing head outlet. When the sample to be polished moves to the point where the polishing head enters the inside of the sample to be polished, the mixture of clean water and the polishing liquid is sprayed from the polishing head to the inner wall of the sample to be polished to polish the sample to be polished. When the polishing head reaches the other end of the sample to be polished from one end of the sample to be polished, one polishing is completed. The linear drive motor reverses and drives the polishing head back to the initial position to achieve secondary polishing. The reciprocating motion of the sample to be polished can achieve multiple polishing of the inner wall of the sample to be polished by the polishing head. S3: After polishing, disconnect the polishing liquid tube from the polishing liquid barrel, and the power device delivers clean water to the polishing head. The rotary drive motor and the linear drive motor drive the sample to be polished to rotate and reciprocate linearly. The clean water sprayed by the polishing head cleans the inner wall of the polished sample. After cleaning, open the box cover and remove the sample.

[0016] The beneficial effects of the present invention are: The present invention discloses a chemical mechanical polishing equipment for the inner wall of a large-diameter long tube. A linear drive device drives the sample to be polished to move linearly so that the polishing head moves from one end inside the sample to be polished to the other end of the sample to be polished. At the same time, a rotary drive device drives the sample to be polished to rotate around an axis. The polishing head performs high-speed jet polishing on the inner wall of the sample to be polished. The linear drive device and the rotary drive device can ensure that the sample to be polished moves linearly relative to the polishing head while the sample to be polished rotates around the axis, thereby achieving circumferential uniform polishing of the inner wall of the sample to be polished, ensuring the uniformity and polishing quality of the polishing, and also ensuring the polishing efficiency. A power device is provided between the water bucket and the polishing head. After clean water is passed into the polishing head, the polishing liquid can be sucked into the polishing head by negative pressure siphon and mixed evenly with the clean water, and then the inner wall of the sample to be polished is polished, ensuring the polishing effect and reliability. The equipment can be adapted to the polishing processing of complex curved surface parts of different types and materials, has strong versatility, and has good consistency of the inner wall of the sample after polishing and high polishing quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 The structure of a chemical mechanical polishing equipment for the inner wall of a large-diameter long tube disclosed in an embodiment of the present invention is shown in FIG. Figure 1 ; Figure 2 The structure of a chemical mechanical polishing equipment for the inner wall of a large-diameter long tube disclosed in an embodiment of the present invention is shown in FIG. Figure 2 ; Figure 3 for Figure 1 A magnified view of part A; Figure 4 It is a schematic structural diagram of a polishing head of a chemical mechanical polishing equipment for the inner wall of a large-diameter long tube disclosed in an embodiment of the present invention; Figure 5 It is a schematic diagram of the connection between a driven wheel of a chemical mechanical polishing equipment for the inner wall of a large-diameter long tube disclosed in an embodiment of the present invention and a sample to be polished; Figure 6 The schematic diagram of the structure of the jacket device of the chemical mechanical polishing equipment for the inner wall of a large-diameter long tube disclosed in the embodiment of the present invention is as follows Figure 1 ; Figure 7 The schematic diagram of the structure of the jacket device of the chemical mechanical polishing equipment for the inner wall of a large-diameter long tube disclosed in the embodiment of the present invention is as follows Figure 2 ; Figure 8 A schematic diagram of the structure of a polishing liquid barrel of a chemical mechanical polishing equipment for the inner wall of a large-diameter long tube disclosed in an embodiment of the present invention (excluding the barrel body); Fig. 9 The present invention is a schematic diagram of the barrel body structure of a chemical mechanical polishing equipment for the inner wall of a large-diameter long tube disclosed in an embodiment of the present invention.

[0019] In the figure: 1. Polishing the box; 11. Drain port; 12. Box body; 13. Box cover; 2. Bucket; 21. Water outlet; 3. polishing liquid barrel; 31. stirring drive motor; 32. barrel body; 321. barrel body; 322. barrel cover; 323. liquid outlet; 33. stirring rod; 34. stirring blade; 35. stirring rod coupling; 4. Jacket device; 41. Jacket; 42. Bearing; 5. Rotation drive device; 51. Rotation drive motor; 52. Driving wheel; 53. Driven wheel; 54. Belt; 55. Rotation drive motor seat; 56. Fixed plate; 6. Linear drive device; 61. Linear drive motor; 62. Lead screw; 63. Screw nut; 631. Screw nut fixing plate; 64. Slider; 65. Guide rail; 66. Linear drive motor seat; 67. Coupling; 68. Support; 7. Polishing head; 71. Water inlet section; 72. Liquid inlet section; 73. Liquid mixing section; 8. Power plant; 9. Clean water pipe; 10. Polishing liquid tube; 14. Sealing strip; 15. Samples to be polished; 16. Drain valve.

[0020] 17. Workbench. DETAILED DESCRIPTION

[0021] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0022] Embodiment 1:

[0023] like Figure 1-2 The figure shows a chemical mechanical polishing equipment for the inner wall of a large-diameter long tube provided in this embodiment, comprising a polishing box 1, a water bucket 2 and a polishing liquid bucket 3; The polishing box 1 is provided with a jacket device 4, a rotary drive device 5, a linear drive device 6 and a polishing head 7, the water bucket 2 and the polishing liquid bucket 3 are both connected to the polishing head 7, and a power device 8 is provided between the water bucket 2 and the polishing head 7; The jacket device 4 is used to support and clamp the sample to be polished 15, the polishing head 7 is fixed in the polishing box 1, the rotary drive device 5 can drive the sample to be polished to rotate in the jacket, and the linear drive device 6 can drive the sample to be polished 15 to perform linear reciprocating motion, so that the polishing head 7 enters the interior of the sample to be polished 15, and the jet of the polishing head 7 polishes the inner wall of the sample to be polished 15 multiple times.

[0024] The sample 15 to be polished is a long tube with a large diameter. The number of the rotary drive device 5, the linear drive device 6 and the polishing head 7 is set according to the number of samples to be polished, so as to polish multiple samples at the same time; The present invention discloses a chemical mechanical polishing equipment for the inner wall of a large-diameter long tube. A linear drive device drives a sample 15 to be polished to move linearly so that a polishing head moves from one end inside the sample 15 to be polished to the other end of the sample 15. At the same time, a rotary drive device drives the sample 15 to be polished to rotate around an axis. The polishing head performs high-speed jet polishing on the inner wall of the sample 15 to be polished. The linear drive device and the rotary drive device can ensure that the sample 15 to be polished moves linearly relative to the polishing head while the sample 15 to be polished rotates around the axis, thereby achieving circumferential uniform polishing of the inner wall of the sample 15 to be polished, ensuring the uniformity and polishing quality of the polishing, and also ensuring the polishing efficiency. A power device is provided between the water bucket and the polishing head. After clean water is passed into the polishing head, the polishing liquid can be sucked into the polishing head by negative pressure siphon and mixed evenly with the clean water, and then the inner wall of the sample 15 to be polished is polished, ensuring the polishing effect and reliability. The equipment can be adapted to the polishing processing of complex curved surface parts of different types and materials, has strong versatility, and has good consistency of the inner wall of the sample after polishing and high polishing quality.

[0025] In a specific embodiment, Figure 4 As shown, an angle is set between the polishing head outlet and the inner wall of the sample 15 to be polished, so as to ensure that the polishing head 7 can perform high-speed jet polishing on the inner wall of the sample 15 to be polished; The polishing head 7 is provided with a liquid mixing section 73, a water inlet section 71 and a liquid inlet section 72, the liquid mixing section is communicated with the polishing head outlet, the water inlet section 71 and the liquid inlet section 72 are respectively communicated with the liquid mixing section 73, the end of the water inlet section 71 away from the liquid mixing section 73 is connected to the water bucket through a clean water pipe 9, and the end of the liquid inlet section 72 away from the liquid mixing section 73 is connected to the polishing liquid bucket 3 through a polishing liquid pipe 10; The inner diameter of the water inlet section 71 is larger than the inner diameter of the liquid inlet section 72, and the inner diameter of the clean water pipe 9 is larger than the inner diameter of the polishing liquid pipe 10; The power device 8 is a water pump, and the water pump is arranged on the clean water pipe 9; The water bucket 2 is filled with clean water, and a plurality of water outlets 21 are installed at the bottom of the water bucket 2. The polishing liquid bucket 33 is filled with polishing liquid, and a plurality of liquid outlets 323 are provided at the bottom of the polishing liquid bucket 3. Polishing liquids of different components can be selected according to the different samples 15 to be polished. In this embodiment, one or more of cerium oxide abrasives, aluminum oxide abrasives, silicon oxide abrasives, silicon carbide abrasives, zirconium oxide abrasives, etc. are added to the polishing liquid, and the corresponding abrasive particle size is selected. The polishing liquid selects green and environmentally friendly chemical components, such as nano-polishing agents, water-based polishing agents, etc., without strong acids and alkalis that are harmful to the environment or human body, and can be directly discharged and recycled. The inner diameter of the water inlet section is larger than that of the liquid inlet section, and the inner diameter of the clean water pipe is larger than that of the polishing liquid pipe, so as to ensure that after the water pump is started, after the clean water passes through the clean water pipe to the polishing head 7 (mixed liquid section), a stronger negative pressure effect can be generated in the mixed liquid section. This negative pressure is the basis of the siphon effect, so that the polishing liquid can be more smoothly and stably sucked into the polishing head 7, and enter the mixed liquid section through the polishing liquid section. After the polishing liquid and the clean water are mixed in the mixed liquid section, a high-speed jet is formed, and is sprayed from the water outlet of the polishing head 7 to the inner wall of the sample 15 to be polished, so as to polish it; The device only needs to set a water pump on the clean water pipe to mix the polishing liquid with the clean water and form a high-speed jet, thereby improving the mixing uniformity of the clean water and the polishing liquid, improving the polishing efficiency and reliability, and also reducing the number of power devices set up, saving processing costs and reducing energy consumption.

[0026] In a specific embodiment, Figure 3 As shown, the rotary drive device 5 includes a rotary drive motor 51, a driving wheel 52, a driven wheel 53 and a belt 54; The polishing box 1 is provided with a workbench 17, the rotary drive motor 51 is installed on the workbench 17 through a rotary drive motor seat 55, and the output end of the rotary drive motor 51 is connected to the driving wheel 52. Figure 5As shown, the driven wheel 53 is sleeved on the outside of the sample to be polished 15, and the driving wheel 52 is connected to the driven wheel 53 through a belt 54; the rotating drive motor 51 can drive the driven wheel 53 to rotate through the driving wheel 52 and the belt 54, so as to drive the sample to be polished 15 to rotate around the axis, thereby realizing the circumferential spray polishing of the inner wall of the sample to be polished 15 by the polishing head 7.

[0027] The inner ring of the driven wheel 53 is provided with a rubber ring, and the sample 15 to be polished can be squeezed into the driven wheel, so that the driven wheel is installed on the sample 15 to be polished, and is fixedly connected to the sample 15 to be polished by the friction force of the rubber ring, thereby driving the sample 15 to be polished to rotate.

[0028] In a specific embodiment, Figure 6 As shown, the jacket device 4 includes a jacket 41, the jacket 41 is mounted on the linear drive device 6, and the sample 15 to be polished is mounted in the jacket 41 through a bearing 42; In this embodiment, two jackets 41 are provided, and the two jackets 41 are respectively sleeved on both ends of the sample 15 to be polished along the axial direction of the sample 15 to be polished. A rubber ring is provided on the inner surface of the inner ring of the bearing, so that the sample 15 to be polished can be tightly connected with the inner ring of the bearing, and it is also convenient for the disassembly and assembly of the sample 15 to be polished. The rotating drive motor 51 drives the driving wheel 52 to rotate, and the driving wheel 52 drives the driven wheel 53 through the belt 54 and drives the sample 15 to be polished to rotate around the axis in the jacket; Figure 7 As shown, the jacket is an upper and lower half-body structure, which can be installed on the outer side of the bearing 42 from the upper and lower sides respectively during installation and fixed by bolts. The split jacket structure can improve the operating efficiency of the jacket being installed on and removed from the sample 15 to be polished. The jacket plays a role in supporting and clamping the sample 15 to be polished, and the provided bearing enables the sample 15 to be polished to rotate in the jacket; the jacket is slidably installed on the workbench through the linear drive device 6, and the linear drive device 6 drives the jacket to perform linear reciprocating motion on the workbench, so that the sample also performs linear motion while rotating, thereby ensuring the uniformity of the high jet polishing of the inner wall of the sample by the polishing head 7, ensuring the polishing quality and improving the polishing efficiency; in actual processing, jackets of different sizes can be set according to the size (length, outer diameter) of the sample 15 to be polished, which is convenient for clamping and supporting the sample and facilitating the polishing of samples of different sizes.

[0029] In a specific embodiment, the linear drive device 6 includes a linear drive motor 61, a lead screw 62, a nut 63, a slider 64 and a guide rail 65; The lead screw 62 is disposed on one side of the jacket 41, the nut 63 is connected to one side of the jacket 41, and the nut 63 is mounted on the lead screw 62, the linear drive motor 61 is connected to the lead screw 62, the guide rail 65 is disposed on the workbench 17 in the transverse direction, and the bottom of the jacket 41 is mounted on the guide rail 65 through the slider 64; A nut fixing plate 631 is provided on one side of the sleeve, and the nut is installed on the nut fixing plate. The sleeve and the nut fixing plate are detachably connected by bolts to facilitate the connection and disassembly of the sleeve and the nut fixing plate (nut), that is, it can facilitate the connection and disassembly of the linear drive device 6 with different samples 15 to be polished, thereby improving the convenience of disassembly and assembly of the two; the linear drive motor drives the lead screw to rotate so that the nut moves along the lead screw, and the nut drives the sleeve to move linearly along the guide rail through the nut fixing plate, thereby driving the sample 15 to be polished to move linearly back and forth on the workbench.

[0030] In a specific embodiment, Figure 8 As shown, the polishing liquid barrel 3 includes a stirring drive motor 31, a barrel body 32 and a stirring rod 33. The stirring rod 33 is arranged in the barrel body 32, and the top of the stirring rod 33 is connected to the stirring drive motor 31 arranged on the barrel body 32; The stirring rod 33 is provided with a plurality of stirring blades 34; like Fig. 9 As shown, the liquid outlet 323 on the barrel body 32 is connected to one end of the polishing liquid tube 10 away from the polishing box; the barrel body 32 includes a barrel body 321 and a barrel cover 322 installed on the barrel body, the liquid outlet 323 is arranged at the bottom of the barrel body 32, the stirring drive motor is arranged on the barrel cover and outside the barrel body, the driving end of the motor is connected to the top of the stirring rod through the stirring rod coupling 35, the stirring drive motor drives the stirring rod to rotate through the stirring rod coupling to stir the polishing liquid in the barrel body to ensure the uniformity of the polishing liquid, and the stirring blades provided on the stirring rod can further ensure the uniformity of the polishing liquid, thereby ensuring the polishing effect and quality.

[0031] In a specific embodiment, a drain port 11 is provided at the bottom of the polishing box 1, and a drain valve 16 is provided at the drain port. When the drain valve is opened, waste liquid generated by polishing is discharged through the drain port.

[0032] According to claim 6, a chemical mechanical polishing equipment for the inner wall of a large-diameter long tube is characterized in that the polishing box 1 includes a box body 12 and a box cover 13 that can be buckled on the box body 12, and a sealing strip 14 is provided on the edge of the box body 12. When the box cover 13 is buckled on the box body 12, the sealing strip 14 is arranged between the box body 12 and the box cover 13 to ensure the sealing of the environment during processing. The enclosed space can effectively avoid the influence of external airflow and dust on the polishing quality, and the box cover and the sealing strip can prevent the polishing liquid from splashing during the polishing process.

[0033] In a specific embodiment, the linear drive motor 61 is installed on the workbench through a linear drive motor seat 66, one end of the lead screw is connected to the output end of the linear drive motor through a coupling 67, and the other end of the lead screw is installed on the workbench through a support 68, and the lead screw is installed on the support through a bearing; The workbench is provided with a fixed plate 56, and the rotary drive motor is installed on the fixed plate through a rotary drive motor seat; an I-beam is provided in the polishing box 1, and the workbench 17 is installed on the I-beam; the linear drive motor seat can support and fix the linear drive motor, and the rotary drive motor seat supports and fixes the rotary drive motor.

[0034] Embodiment 2:

[0035] A method for polishing the inner wall of a large-diameter long tube using the chemical mechanical polishing equipment comprises the following steps: S1: Assemble the linear drive device 6, install the bearing into the jacket by pressing, install the driven wheel 53 in the middle of the sample 15 to be polished, and then install the bearings on both ends of the sample 15 to be polished. The inner wall of the bearing is fixed with a rubber ring, and the sample 15 to be polished is squeezed into the rubber ring to fix the sample 15 to be polished. The driven wheel 53 is connected to the driving wheel 52 through the belt 54, and the slider at the bottom of the jacket is installed on the guide rail. Then, the jacket 41 is fixedly connected to the nut seat on the workbench 17 by bolts, and the box cover is buckled to complete the installation of the sample 15 to be polished; S2: Start the linear drive motor and the rotary drive motor, and the sample 15 to be polished rotates continuously while performing a linear reciprocating motion relative to the polishing head 7. Start the stirring drive device, and the polishing liquid in the polishing liquid barrel 3 is stirred by the stirring rod. Start the power device 8. After the clean water passes into the polishing head 7, due to the pressure, the polishing liquid in the polishing barrel is sucked into the polishing head 7. The clean water and the polishing liquid are mixed in the polishing head 7 and then sprayed out from the polishing head outlet at a high speed. When the sample 15 to be polished moves to the polishing head 7 and enters the interior of the sample 15 to be polished, the mixture of clean water and polishing liquid is sprayed by the polishing head 7 to the inner wall of the sample 15 to be polished, and the sample 15 to be polished is polished. When the polishing head 7 reaches the other end of the sample 15 from the initial position at one end of the sample 15 to be polished, one polishing is completed. The linear drive motor is reversed to drive the polishing head 7 back to the initial position, that is, the secondary polishing is completed. The reciprocating motion of the sample 15 to be polished can realize multiple polishing of the inner wall of the sample 15 to be polished by the polishing head 7. S3: After polishing is completed, the connection between the polishing liquid tube and the polishing liquid barrel 3 is disconnected, and the power device 8 transports clean water to the polishing head 7. The rotary drive motor and the linear drive motor drive the sample 15 to be polished to rotate and reciprocate linearly. The clean water sprayed by the polishing head 7 cleans the inner wall of the polished sample to avoid the residual polishing liquid affecting the use of the sample 15 to be polished. After cleaning, open the box cover 13, remove the sample, and complete all the processes.

[0036] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A chemical mechanical polishing equipment for the inner wall of a large-diameter long tube, characterized in that: It comprises a polishing box (1), a water bucket (2) and a polishing liquid bucket (3); The polishing box (1) is provided with a jacket device (4), a rotary drive device (5), a linear drive device (6) and a polishing head (7); the water bucket (2) and the polishing liquid bucket (3) are both connected to the polishing head (7); and a power device (8) is provided between the water bucket (2) and the polishing head (7); The clamping device (4) is used to support and clamp the sample to be polished (15), the polishing head (7) is fixed in the polishing box (1), the rotary drive device (5) can drive the sample to be polished to rotate in the clamping device, and the linear drive device (6) can drive the sample to be polished (15) to perform linear reciprocating motion, so that the polishing head (7) enters the interior of the sample to be polished (15), and the jet of the polishing head (7) polishes the inner wall of the sample to be polished (15) multiple times.

2. The chemical mechanical polishing equipment for the inner wall of a large-diameter long tube according to claim 1, characterized in that: An angle is provided between the polishing head outlet and the inner wall of the sample (15) to be polished; The polishing head (7) is provided with a liquid mixing section (73), a water inlet section (71) and a liquid inlet section (72); the liquid mixing section is in communication with the polishing head outlet; the water inlet section (71) and the liquid inlet section (72) are respectively in communication with the liquid mixing section (73); an end of the water inlet section (71) away from the liquid mixing section (73) is connected to the water bucket via a clean water pipe (9); and an end of the liquid inlet section (72) away from the liquid mixing section (73) is connected to the polishing liquid bucket (3) via a polishing liquid pipe (10); The inner diameter of the water inlet section (71) is greater than the inner diameter of the liquid inlet section (72), and the inner diameter of the clean water pipe (9) is greater than the inner diameter of the polishing liquid pipe (10); The power device (8) is a water pump, and the water pump is arranged on the clean water pipe (9).

3. The chemical mechanical polishing equipment for the inner wall of a large-diameter long tube according to claim 2, characterized in that: The rotary drive device (5) comprises a rotary drive motor (51), a driving wheel (52), a driven wheel (53) and a belt (54); A workbench (17) is provided in the polishing box (1), the rotary drive motor (51) is provided on the workbench (17), the output end of the rotary drive motor (51) is connected to the driving wheel (52), the driven wheel (53) is sleeved on the outside of the sample (15) to be polished, and the driving wheel (52) is connected to the driven wheel (53) via a belt (54).

4. The chemical mechanical polishing equipment for the inner wall of a large-diameter long tube according to claim 3, characterized in that: The jacket device (4) comprises a jacket (41), the jacket (41) being mounted on the linear drive device (6), and the sample to be polished (15) being mounted in the jacket (41) via a bearing (42).

5. The chemical mechanical polishing equipment for the inner wall of a large-diameter long tube according to claim 4, characterized in that: The linear drive device (6) comprises a linear drive motor (61), a lead screw (62), a nut (63), a slider (64) and a guide rail (65); The lead screw (62) is arranged on one side of the sleeve (41), the nut (63) is connected to one side of the sleeve (41), and the nut (63) is installed on the lead screw (62), the linear drive motor (61) is connected to the lead screw (62), the guide rail (65) is arranged on the workbench (17) in a transverse direction, and the bottom of the sleeve (41) is installed on the guide rail (65) through the slider (64).

6. The chemical mechanical polishing equipment for the inner wall of a large-diameter long tube according to claim 5, characterized in that: The polishing liquid barrel (3) comprises a stirring drive motor (31), a barrel body (32) and a stirring rod (33); the stirring rod (33) is arranged in the barrel body (32); and the top of the stirring rod (33) is connected to the stirring drive motor (31) arranged on the barrel body (32); The stirring rod (33) is provided with a plurality of stirring blades (34); The liquid outlet (323) on the barrel body (32) is connected to an end of the polishing liquid pipe (10) away from the polishing box body.

7. The chemical mechanical polishing equipment for the inner wall of a large-diameter long tube according to claim 3, characterized in that: The bottom of the polishing box (1) is provided with a liquid discharge port (11), and a liquid discharge valve (16) is provided at the liquid discharge port.

8. The chemical mechanical polishing equipment for the inner wall of a large-diameter long tube according to claim 6, characterized in that: The polishing box (1) comprises a box body (12) and a box cover (13) that can be buckled onto the box body (12); a sealing strip (14) is provided on the upper edge of the box body (12); when the box cover (13) is buckled onto the box body (12), the sealing strip (14) is provided between the box body (12) and the box cover (13).

9. The chemical mechanical polishing equipment for the inner wall of a large-diameter long tube according to claim 5, characterized in that: The linear drive motor (61) is mounted on the workbench (17) via a linear drive motor seat (66); one end of the lead screw is connected to the output end of the linear drive motor via a coupling (67); and the other end of the lead screw is mounted on the workbench via a support (68); A fixing plate (56) is provided on the workbench, and the rotary drive motor is mounted on the fixing plate (56) via a rotary drive motor seat (55).

10. A method for polishing the inner wall of a large-diameter long tube using the chemical mechanical polishing equipment of claim 8, characterized in that: The following steps are involved: S1: Assemble the linear drive device (6), then install bearings at both ends of the sample to be polished (15), install the driven wheel (53) in the middle of the sample to be polished (15), install the bearing into the jacket, connect the driven wheel (53) with the driving wheel (52) through the belt (54), fix the jacket (41) with the nut seat on the workbench (17), buckle the box cover, and complete the installation of the sample to be polished (15); S2: starting the linear drive motor and the rotary drive motor, the sample to be polished (15) continuously rotates while performing a linear reciprocating motion relative to the polishing head (7), starting the stirring drive device, the polishing liquid in the polishing liquid barrel (3) is stirred by the stirring rod, starting the power device (8), the clean water and the polishing liquid are mixed in the polishing head (7) and then ejected from the polishing head outlet, when the sample to be polished (15) moves to the polishing head (7) and enters the interior of the sample to be polished (15), the mixture of clean water and the polishing liquid is ejected from the polishing head (7) to the inner wall of the sample to be polished (15), and the sample to be polished (15) is polished, when the polishing head (7) reaches the other end of the sample to be polished (15) from one end of the sample to be polished (15), one polishing is completed, the linear drive motor is reversed, and the polishing head (7) is driven back to the initial position to achieve secondary polishing, and the reciprocating motion of the sample to be polished (15) can achieve multiple polishing of the inner wall of the sample to be polished (15) by the polishing head (7); S3: After polishing is completed, the connection between the polishing liquid tube and the polishing liquid barrel (3) is disconnected, and the power device (8) transports clean water into the polishing head (7). The rotary drive motor and the linear drive motor drive the sample to be polished (15) to rotate and reciprocate linearly. The clean water sprayed by the polishing head (7) cleans the inner wall of the polished sample. After cleaning, the box cover (13) is opened and the sample is removed.

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