Quartz boat carrying mechanism with efficient feeding and discharging functions and carrying control method

Abstract

The invention provides a quartz boat carrying mechanism with efficient feeding and discharging functions and a carrying control method. The quartz boat carrying mechanism comprises a main body assembly, a mechanical arm assembly is installed on the front surface of the main body assembly, a clamping jaw assembly is installed at the bottom of the mechanical arm assembly, and a quartz boat assembly is arranged on one side of the clamping jaw assembly; the main body assembly comprises a support, a linear module, a mounting bottom plate and a first motor. The linear module, the manipulator upper arm and the manipulator lower arm work to drive the manipulator clamping jaw to grab the quartz boat and automatically complete feeding and discharging work of the quartz boat, manual carrying of workers is not needed, the labor cost and time are saved, the manual operation risk is reduced, and the production efficiency and the product quality are improved. The manipulator upper arm and the manipulator lower arm work, the mechanical arm is automatically contracted in the carrying process, the space needed in the carrying process is saved, the manipulator adapts to different working environments and space limitations, and the space utilization rate is increased.

Description

Technical Field

[0001] The invention relates to a boat moving machine, in particular to a quartz boat moving mechanism with efficient loading and unloading functions and a moving control method, belonging to the technical field of quartz boat moving machines. Background Art

[0002] Quartz boats are mainly made of silicon dioxide-containing materials (such as crystal, silica or high-purity quartz sand, quartz rods) as raw materials and are melted at high temperatures. The main function of quartz boats is to provide a stable, high-temperature resistant and chemically stable platform or container for carrying and protecting materials or samples working in high temperature or corrosive environments. In the semiconductor manufacturing process, quartz boats are widely used to carry silicon wafers for diffusion, oxidation, annealing and other process treatments. Its high temperature resistance ensures that silicon wafers will not be contaminated or deformed in high temperature environments, thereby ensuring the quality and performance of semiconductor devices.

[0003] As an important industrial container, quartz boat plays a key role in many fields such as semiconductor manufacturing and photovoltaic industry. However, in the actual production process, quartz boats need to be manually carried, and loading and unloading operations face many inconveniences. Due to its special material, regular shape but heavy weight, workers are very likely to feel fatigued during the handling process, and there is even a risk of injury. When loading and unloading, workers need to carefully align the quartz boat and place it in the designated position. This process is not only time-consuming and laborious, but also easily causes damage or contamination of the quartz boat due to improper operation, which in turn affects production efficiency and product quality. For this reason, a quartz boat moving mechanism and a handling control method with efficient loading and unloading functions are proposed. Summary of the invention

[0004] In view of this, the present invention provides a quartz boat moving mechanism and a transport control method with efficient loading and unloading functions to solve or alleviate one of the technical problems existing in the prior art and at least provide a beneficial choice.

[0005] The technical solution of the embodiment of the present invention is implemented as follows: a quartz boat moving mechanism with efficient loading and unloading functions, comprising a main body component, a manipulator component is installed on the front surface of the main body component, a clamping claw component is installed on the bottom of the manipulator component, and a quartz boat component is arranged on one side of the clamping claw component;

[0006] The main assembly includes a bracket, a linear module, a mounting base and a first motor; the linear module is mounted on the front surface of the bracket, the mounting base is fixedly connected to the bottom end of the bracket, and the first motor is mounted on one side of the linear module;

[0007] The manipulator assembly includes a lifting platform, a manipulator upper arm, a second motor, a manipulator lower arm and a third motor; the front surface of the linear module is installed with a lifting platform, the bottom of the lifting platform is installed with a manipulator upper arm, one end of the manipulator upper arm is installed with a second motor, the bottom of the manipulator upper arm is slidably connected with a manipulator lower arm, and one end of the manipulator lower arm is installed with a third motor.

[0008] Further preferably: the clamping jaw assembly comprises a slide and a manipulator clamping jaw;

[0009] The bottom of the slide is evenly and fixedly connected with a robot gripper.

[0010] Further preferably, the slide is slidably connected to the bottom of the lower arm of the manipulator.

[0011] Further preferably, one side of the manipulator gripper is fixedly connected to a support plate.

[0012] Further preferably, a pad is symmetrically fixedly connected to the bottom of the inner side wall of the support plate.

[0013] Further preferably: the quartz boat assembly includes a quartz boat body and an ear plate;

[0014] Two ear plates are symmetrically fixedly connected to both sides of the quartz boat body.

[0015] Further preferably, the ear plate is arranged on the inner side wall of the support plate.

[0016] Further preferably, the quartz boat body is arranged below the slide table.

[0017] In addition, the present invention also provides a control method for a quartz boat moving mechanism, which is applied to a quartz boat moving mechanism with efficient loading and unloading functions, and includes the following steps:

[0018] Step 1: The manipulator assembly is in the cache position, the lifting platform, the manipulator upper arm, the manipulator lower arm and the slide are all in the initial position. When loading or unloading, the linear module, the manipulator upper arm and the manipulator lower arm work to drive the lifting platform to move, and make the manipulator gripper close to the quartz boat body, lift the ear plate through the support plate, and take away the quartz boat body;

[0019] Step 2: The linear module works to drive the lifting platform to move, so that the robot assembly enters the transition position. At the same time, the upper arm of the robot works to drive the lower arm of the robot to retract.

[0020] Step 3: The manipulator assembly reaches the paddle position, and the manipulator upper arm and the manipulator lower arm work to move the manipulator gripper to place the quartz boat body at the designated position to complete the loading or unloading operation.

[0021] Further preferably: in step one, the linear module, the robot upper arm and the robot lower arm are driven by the first motor, the second motor and the third motor respectively.

[0022] The embodiment of the present invention has the following advantages due to the adoption of the above technical solution:

[0023] 1. The present invention works through a linear module, a manipulator upper arm and a manipulator lower arm to drive the manipulator claw to grab the quartz boat and automatically complete the loading and unloading of the quartz boat without the need for manual handling by staff, thus saving labor costs and time, reducing the risk of manual operation, and improving production efficiency and product quality.

[0024] 2. The present invention works through the upper arm and the lower arm of the manipulator, and automatically retracts the manipulator arm during the transportation process, saving the space required for the transportation process, adapting to different working environments and space limitations, and improving space utilization.

[0025] The above summary is for illustrative purposes only and is not intended to be limiting in any way. In addition to the illustrative aspects, embodiments and features described above, further aspects, embodiments and features of the present invention will be readily apparent by reference to the accompanying drawings and the following detailed description. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or technical descriptions will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0027] Figure 1 It is a structural diagram of the present invention;

[0028] Figure 2 A schematic diagram of the manipulator assembly of the present invention being located at a cache position;

[0029] Figure 3 It is a structural diagram of the upper arm and the lower arm of the manipulator of the present invention;

[0030] Figure 4 It is a structural diagram of the manipulator gripper of the present invention;

[0031] Figure 5 It is a structural diagram of the quartz boat assembly of the present invention;

[0032] Figure 6 It is a schematic diagram of the manipulator assembly of the present invention being located in a transition position;

[0033] Figure 7 This is a schematic diagram of the manipulator assembly of the present invention being located at the paddle position.

[0034] Figure numerals: 10, main body assembly; 11, bracket; 12, linear module; 13, mounting base; 14, first motor; 20, manipulator assembly; 21, lifting platform; 22, manipulator upper arm; 23, second motor; 24, manipulator lower arm; 25, third motor; 30, clamping jaw assembly; 31, slide; 32, manipulator clamping jaw; 33, support plate; 34, pad; 40, quartz boat assembly; 41, quartz boat body; 42, ear plate. DETAILED DESCRIPTION

[0035] The embodiments of the present disclosure are described in detail below with reference to the accompanying drawings.

[0036] It should be clear that the following embodiments of the present disclosure are described by specific specific examples, and those skilled in the art can easily understand other advantages and effects of the present disclosure from the contents disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of the present disclosure, rather than all of the embodiments. The present disclosure can also be implemented or applied through other different specific embodiments, and the details in this specification can also be modified or changed in various ways based on different viewpoints and applications without departing from the spirit of the present disclosure. It should be noted that the following embodiments and features in the embodiments can be combined with each other in the absence of conflict. Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in the field without making creative work are within the scope of protection of the present disclosure.

[0037] It should be noted that various aspects of the embodiments within the scope of the appended claims are described below. It should be apparent that the aspects described herein may be embodied in a wide variety of forms, and any specific structure and / or function described herein is merely illustrative. Based on the present disclosure, it should be understood by those skilled in the art that an aspect described herein may be implemented independently of any other aspect, and two or more of these aspects may be combined in various ways. For example, any number of aspects described herein may be used to implement the device and / or practice the method. In addition, other structures and / or functionalities other than one or more of the aspects described herein may be used to implement this device and / or practice this method.

[0038] It should also be noted that the illustrations provided in the following embodiments are only schematic illustrations of the basic concept of the present disclosure. The drawings only show components related to the present disclosure rather than being drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component may be changed arbitrarily, and the component layout may also be more complicated.

[0039] Additionally, in the following description, specific details are provided to facilitate a thorough understanding of the examples. However, it will be understood by those skilled in the art that the aspects described may be practiced without these specific details.

[0040] like Figure 1-Figure 7 As shown, the embodiment of the present invention provides a quartz boat moving mechanism with efficient loading and unloading functions, including a main body component 10, a manipulator component 20 is installed on the front surface of the main body component 10, a clamping claw component 30 is installed on the bottom of the manipulator component 20, and a quartz boat component 40 is arranged on one side of the clamping claw component 30;

[0041] The main assembly 10 includes a bracket 11, a linear module 12, a mounting base 13 and a first motor 14; the linear module 12 is mounted on the front surface of the bracket 11, the mounting base 13 is fixedly connected to the bottom end of the bracket 11, and the first motor 14 is mounted on one side of the linear module 12;

[0042] The manipulator assembly 20 includes a lifting platform 21, a manipulator upper arm 22, a second motor 23, a manipulator lower arm 24 and a third motor 25; the lifting platform 21 is installed on the front surface of the linear module 12, the manipulator upper arm 22 is installed at the bottom of the lifting platform 21, the second motor 23 is installed at one end of the manipulator upper arm 22, the bottom of the manipulator upper arm 22 is slidably connected to the manipulator lower arm 24, and the third motor 25 is installed at one end of the manipulator lower arm 24. The linear module 12, the manipulator upper arm 22 and the manipulator lower arm 24 work to drive the lifting platform 21 to move, and at the same time make the manipulator gripper 32 approach and take away the quartz boat body 41.

[0043] In this embodiment, specifically: the clamping jaw assembly 30 includes a slide 31 and a manipulator clamping jaw 32;

[0044] The bottom of the slide 31 is evenly and fixedly connected with a manipulator gripper 32 , and the manipulator gripper 32 is used to grab the quartz boat.

[0045] In this embodiment, specifically: the slide 31 is slidably connected to the bottom of the robot lower arm 24, and the slide 31 is driven to slide by the operation of the robot lower arm 24.

[0046] In this embodiment, specifically: one side of the manipulator gripper 32 is fixedly connected with a support plate 33 .

[0047] In this embodiment, specifically: a pad 34 is symmetrically fixedly connected to the bottom of the inner side wall of the support plate 33, and the pad 34 is used to support the support plate 33 and play a buffering role.

[0048] In this embodiment, specifically: the quartz boat assembly 40 includes a quartz boat body 41 and an ear plate 42;

[0049] Two ear plates 42 are symmetrically fixedly connected to both sides of the quartz boat body 41 , and the shape and size of the ear plates 42 match the grooves on the surface of the support plate 33 .

[0050] In this embodiment, specifically: the ear plate 42 is disposed on the inner side wall of the supporting plate 33 , and the robot lifts the ear plate 42 through the supporting plate 33 to take away the quartz boat body 41 .

[0051] In this embodiment, specifically: the quartz boat body 41 is disposed below the slide table 31 , and the quartz boat body 41 and the slide table 31 move synchronously.

[0052] In addition, the present invention also provides a control method for a quartz boat moving mechanism, which is applied to a quartz boat moving mechanism with efficient loading and unloading functions, and includes the following steps:

[0053] Step 1, the manipulator assembly 20 is in the cache position, the lifting platform 21, the manipulator upper arm 22, the manipulator lower arm 24 and the slide 31 are all in the initial position, when loading or unloading, the linear module 12, the manipulator upper arm 22 and the manipulator lower arm 24 work, drive the lifting platform 21 to move, and make the manipulator gripper 32 close to the quartz boat body 41, lift the ear plate 42 through the support plate 33, and take away the quartz boat body 41;

[0054] Step 2: The linear module 12 works to drive the lifting platform 21 to move, so that the robot assembly 20 enters the transition position, and at the same time, the robot upper arm 22 works to drive the robot lower arm 24 to retract;

[0055] Step 3: The manipulator assembly 20 reaches the paddle position, and the manipulator upper arm 22 and the manipulator lower arm 24 work to move the manipulator gripper 32 and place the quartz boat body 41 at a designated position, thereby completing the loading or unloading operation.

[0056] In this embodiment, specifically: in step 1, the linear module 12, the robot upper arm 22 and the robot lower arm 24 are driven by the first motor 14, the second motor 23 and the third motor 25 respectively.

[0057] When the present invention is working: Figure 2 As shown, the manipulator assembly 20 is in the cache position, the lifting platform 21, the manipulator upper arm 22, the manipulator lower arm 24 and the slide 31 are all in the initial position. When loading or unloading, the linear module 12, the manipulator upper arm 22 and the manipulator lower arm 24 work to drive the lifting platform 21 to move, and make the manipulator gripper 32 close to the quartz boat body 41, lift the ear plate 42 through the support plate 33, and take away the quartz boat body 41, as shown in FIG. Figure 6 As shown, the linear module 12 works, driving the lifting platform 21 to move, so that the manipulator assembly 20 enters the transition position, and at the same time, the upper arm 22 of the manipulator works, driving the lower arm 24 of the manipulator to retract, as shown in FIG. Figure 7As shown, the manipulator assembly 20 reaches the paddle position, the manipulator upper arm 22 and the manipulator lower arm 24 work to move the manipulator gripper 32 and place the quartz boat body 41 at the designated position to complete the loading or unloading operation.

[0058] The present invention works through the linear module 12, the manipulator upper arm 22 and the manipulator lower arm 24 to drive the manipulator gripper 32 to grab the quartz boat and automatically complete the loading and unloading of the quartz boat without the need for manual handling by staff, thus saving labor costs and time, reducing the risk of manual operation, and improving production efficiency and product quality.

[0059] The present invention works through the manipulator upper arm 22 and the manipulator lower arm 24, and automatically retracts the manipulator arm during the transport process, thereby saving space required for the transport process, adapting to different working environments and space restrictions, and improving space utilization.

[0060] The basic principles of the present disclosure are described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, effects, etc. mentioned in the present disclosure are only examples and not limitations, and it cannot be considered that these advantages, strengths, effects, etc. are required by each embodiment of the present disclosure. In addition, the specific details disclosed above are only for the purpose of illustration and ease of understanding, and are not limiting. The above details do not limit the present disclosure to the necessity of adopting the above specific details to be implemented.

[0061] The above is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art can easily think of various changes or substitutions within the technical scope disclosed by the present invention, which should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.

Claims

1. A quartz boat moving mechanism with efficient loading and unloading functions, comprising a main assembly (10), characterized in that: A manipulator assembly (20) is installed on the front surface of the main body assembly (10), a clamping claw assembly (30) is installed on the bottom of the manipulator assembly (20), and a quartz boat assembly (40) is arranged on one side of the clamping claw assembly (30); The main body component (10) comprises a bracket (11), a linear module (12), a mounting base plate (13) and a first motor (14); the linear module (12) is mounted on the front surface of the bracket (11), the bottom end of the bracket (11) is fixedly connected to the mounting base plate (13), and the first motor (14) is mounted on one side of the linear module (12); The manipulator assembly (20) comprises a lifting platform (21), a manipulator upper arm (22), a second motor (23), a manipulator lower arm (24) and a third motor (25); the lifting platform (21) is installed on the front surface of the linear module (12), the manipulator upper arm (22) is installed at the bottom of the lifting platform (21), one end of the manipulator upper arm (22) is installed with the second motor (23), the bottom of the manipulator upper arm (22) is slidably connected with the manipulator lower arm (24), and one end of the manipulator lower arm (24) is installed with the third motor (25).

2. A quartz boat moving mechanism with efficient loading and unloading functions according to claim 1, characterized in that: The clamping jaw assembly (30) comprises a slide table (31) and a manipulator clamping jaw (32); The bottom of the slide table (31) is evenly and fixedly connected with a manipulator gripper (32).

3. The quartz boat moving mechanism with efficient loading and unloading functions according to claim 2 is characterized in that: The slide table (31) is slidably connected to the bottom of the robot lower arm (24).

4. The quartz boat moving mechanism with efficient loading and unloading functions according to claim 2 is characterized in that: A support plate (33) is fixedly connected to one side of the manipulator gripper (32).

5. The quartz boat moving mechanism with efficient loading and unloading functions according to claim 4 is characterized in that: A backing plate (34) is symmetrically fixedly connected to the bottom of the inner side wall of the support plate (33).

6. The quartz boat moving mechanism with efficient loading and unloading functions according to claim 1, characterized in that: The quartz boat assembly (40) comprises a quartz boat body (41) and an ear plate (42); Two ear plates (42) are symmetrically fixedly connected to both sides of the quartz boat body (41).

7. The quartz boat moving mechanism with efficient loading and unloading functions according to claim 6, characterized in that: The ear plate (42) is arranged on the inner side wall of the supporting plate (33).

8. The quartz boat moving mechanism with efficient loading and unloading functions according to claim 6, characterized in that: The quartz boat body (41) is arranged below the slide table (31).

9. A control method for a quartz boat moving mechanism, applied to a quartz boat moving mechanism with efficient loading and unloading functions as claimed in any one of claims 1 to 8, characterized in that: The following steps are involved: Step 1, the manipulator assembly (20) is in the cache position, the lifting platform (21), the manipulator upper arm (22), the manipulator lower arm (24) and the slide (31) are all in the initial position, when loading or unloading, the linear module (12), the manipulator upper arm (22) and the manipulator lower arm (24) work, drive the lifting platform (21) to move, and make the manipulator gripper (32) close to the quartz boat body (41), lift the ear plate (42) through the support plate (33), and take away the quartz boat body (41); Step 2: The linear module (12) works to drive the lifting platform (21) to move, so that the manipulator assembly (20) enters the transition position, and at the same time, the manipulator upper arm (22) works to drive the manipulator lower arm (24) to retract; Step 3: The manipulator assembly (20) reaches the paddle position, and the manipulator upper arm (22) and the manipulator lower arm (24) work to move the manipulator gripper (32) and place the quartz boat body (41) at a designated position, thereby completing the loading or unloading operation.

10. The control method of a quartz boat moving mechanism according to claim 9, characterized in that: In step one, the linear module (12), the robot upper arm (22) and the robot lower arm (24) are driven by the first motor (14), the second motor (23) and the third motor (25) respectively.

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