Repetition frequency excimer laser energy automatic detection circuit

Abstract

The invention discloses a repetition frequency excimer laser energy automatic detection circuit, which comprises an excimer laser detection circuit which is switched on under the irradiation of excimer laser; the laser energy detection circuit is connected with the excimer laser detection circuit and is used for detecting the energy of the primary excimer laser; the external trigger acquisition circuit is connected with the excimer laser detection circuit and is used for outputting an external trigger acquisition signal to the outside; the reset circuit is connected with the laser energy detection circuit and used for resetting the laser energy detection circuit; the single chip microcomputer circuit board has a storage function, is respectively connected with the laser energy detection circuit, the external trigger acquisition circuit and the zero clearing circuit, and is used for acquiring the energy of the excimer laser of the laser energy detection circuit, converting the energy into a digital signal and storing the digital signal after receiving an external trigger acquisition signal of the external trigger acquisition circuit; and after acquisition, the zero clearing circuit is controlled to reset the laser energy detection circuit, so that the functions of peak holding, automatic detection and automatic zero clearing are realized.

Description

[Technical field]

[0001] The invention relates to a repetition frequency excimer laser energy automatic detection circuit. [Background Technology]

[0002] Excimer laser energy detection circuit is mainly used to measure and monitor the laser energy output by the excimer laser to ensure the safety and effectiveness of laser equipment in medical, scientific research and industrial applications.

[0003] However, the existing excimer laser energy detection circuit does not have a peak hold function, and a special peak hold chip needs to be set up to maintain the laser energy peak during the detection process; at the same time, the existing excimer laser energy detection circuit cannot automatically detect and automatically clear; on the other hand, the existing excimer laser energy detection circuit cannot accurately detect 4kHz high repetition rate excimer laser energy. [Summary of the invention]

[0004] The invention overcomes the shortcomings of the prior art and provides a repetition frequency excimer laser energy automatic detection circuit.

[0005] To achieve the above object, the present invention adopts the following technical solutions:

[0006] A repetition frequency excimer laser energy automatic detection circuit, characterized in that: it comprises an excimer laser detection circuit, which is turned on by the excimer laser irradiation;

[0007] A laser energy detection circuit is connected to the excimer laser detection circuit and is used to detect the energy of the excimer laser once;

[0008] The external trigger acquisition circuit is connected to the excimer laser detection circuit and is used to output an external trigger acquisition signal to the outside;

[0009] A zeroing circuit is connected to the laser energy detection circuit and is used to clear the laser energy detection circuit;

[0010] The single-chip microcomputer circuit board has a storage function and is respectively connected to the laser energy detection circuit, the external trigger acquisition circuit and the reset circuit. It is used to collect the energy of the excimer laser of the laser energy detection circuit and convert it into a digital signal for storage after receiving the external trigger acquisition signal of the external trigger acquisition circuit, and control the reset circuit to reset the laser energy detection circuit after the collection.

[0011] The above-mentioned repetition frequency excimer laser energy automatic detection circuit is characterized in that it also includes a display component connected to the single-chip circuit board for displaying the excimer laser energy digital signal.

[0012] The repetition frequency excimer laser energy automatic detection circuit as described above is characterized in that: the single-chip circuit board is provided with an external trigger port connected to the external trigger acquisition circuit, a reset output port connected to the reset circuit, and an AD conversion port connected to the external trigger acquisition circuit.

[0013] The repetition frequency excimer laser energy automatic detection circuit as described above is characterized in that: the excimer laser detection circuit includes a silicon photodiode Q1, the positive terminal of the silicon photodiode Q1 is grounded, the negative terminal of the silicon photodiode Q1 is connected to the external trigger acquisition circuit, and the two ends of the silicon photodiode Q1 are respectively connected to the laser energy detection circuit.

[0014] The above-mentioned repetition frequency excimer laser energy automatic detection circuit is characterized in that: the laser energy detection circuit includes an operational amplifier IC1, pin 1 of the operational amplifier IC1 is connected to the positive terminal of the silicon photodiode Q1, pin 2 of the operational amplifier IC1 is connected to the negative terminal of the silicon photodiode Q1, pin 3 of the operational amplifier IC1 is connected to the +VCC power supply, pin 4 of the operational amplifier IC1 is connected to the -VCC power supply, pin 5 of the operational amplifier IC1 is respectively connected to one end of the energy detection capacitor C2 and the AD conversion port, and the other end of the energy detection capacitor C2 is connected to the negative terminal of the silicon photodiode Q1.

[0015] A repetition frequency excimer laser energy automatic detection circuit as described above is characterized in that: the external trigger acquisition circuit includes a pulse transformer T1, the pin 1 of the pulse transformer T1 is connected to the negative terminal of the silicon photodiode Q1, the pin 2 of the pulse transformer T1 is connected to the other end of the energy detection capacitor C2, the pin 3 of the pulse transformer T1 is respectively connected to one end of the resistor R1, one end of the capacitor C1, and the external trigger port through the resistor R2, and the pin 4 of the pulse transformer T1, the other end of the resistor R1, and the other end of the capacitor C1 are grounded respectively.

[0016] A repetition frequency excimer laser energy automatic detection circuit as described above is characterized in that: the zeroing circuit includes a zeroing switch S1, the pin 1 of the zeroing switch S1 is connected to one end of the energy detection capacitor C2 through a resistor R3, the pin 2 of the zeroing switch S1 is connected to the other end of the energy detection capacitor C2, and the pin 3 of the zeroing switch S1 is connected to the zeroing output port.

[0017] The above-mentioned repetition frequency excimer laser energy automatic detection circuit is characterized in that: a voltage zener diode D1 is connected in parallel at both ends of the capacitor C1, and the cathode end of the voltage zener diode D1 is connected to the external trigger port, and the anode end of the voltage zener diode D1 is grounded.

[0018] The above-mentioned repetition frequency excimer laser energy automatic detection circuit is characterized in that the voltage stabilizing diode D1 is a 5V voltage clamping diode.

[0019] The above-mentioned repetition frequency excimer laser energy automatic detection circuit is characterized in that: the single-chip circuit board is a PIC single-chip circuit, the operational amplifier IC1 is a high-impedance input operational amplifier, and the reset switch S1 is a high-impedance input switch chip.

[0020] The beneficial effects of the present invention are:

[0021] The present invention is provided with a zeroing circuit, and the zeroing switch S1 in the zeroing circuit is a high-impedance input switch chip, and the AD conversion port is a high-impedance input port, which can maintain the energy detection capacitor C2 in the laser energy detection circuit at the peak voltage, realize the self-contained peak holding function, and do not need to set a special peak holding chip; the present invention is provided with an external trigger acquisition circuit, after the single-chip circuit board receives the external trigger acquisition signal of the external trigger acquisition circuit, the energy of the excimer laser of the laser energy detection circuit is automatically acquired and converted into a digital signal for storage, and after the acquisition, the zeroing circuit is automatically controlled to zero the laser energy detection circuit, thereby realizing automatic detection and automatic zeroing, and the detected digital signal data is stored on the single-chip circuit board and displayed on the display component; the present invention can detect 4kHz high repetition rate excimer laser energy. [Drawings]

[0022] Figure 1 is a circuit diagram of the present invention;

[0023] Figure 2 This is a timing diagram of the circuit operation signals of the present invention. [Specific implementation method]

[0024] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the accompanying drawings.

[0025] It should be noted that all directional indications (such as up, down, left, right, front, back...) in the embodiments of the present invention are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly. In addition, the descriptions of "preferred", "sub-preferred", etc. in the present invention are only used for descriptive purposes, and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of indicated technical features. Therefore, the features defined as "preferred" or "sub-preferred" may explicitly or implicitly include at least one such feature.

[0026] like Figure 1 As shown, a repetition frequency excimer laser energy automatic detection circuit includes an excimer laser detection circuit 1, which is turned on by the excimer laser irradiation;

[0027] The laser energy detection circuit 2 is connected to the excimer laser detection circuit 1 and is used to detect the energy of the primary excimer laser;

[0028] The external trigger acquisition circuit 3 is connected to the excimer laser detection circuit 1 and is used to output an external trigger acquisition signal to the outside;

[0029] A zeroing circuit 4 is connected to the laser energy detection circuit 2 and is used to reset the laser energy detection circuit 2;

[0030] The single-chip circuit board 5 has a storage function and is respectively connected to the laser energy detection circuit 2, the external trigger acquisition circuit 3 and the zeroing circuit 4. It is used to collect the energy of the excimer laser of the laser energy detection circuit 2 and convert it into a digital signal for storage after receiving the external trigger acquisition signal of the external trigger acquisition circuit 3, and control the zeroing circuit 4 to reset the laser energy detection circuit 2 after the collection. The single-chip circuit board 5 is a PIC single-chip circuit.

[0031] The display component 6 is connected to the single chip circuit board 5 and is used to display the excimer laser energy digital signal. The display component 6 is a liquid crystal screen.

[0032] like Figure 1-2 As shown, the working principle of the circuit in this case is as follows:

[0033] 1. The silicon photodiode Q1 in the excimer laser detection circuit 1 is turned on after being irradiated by the excimer pulse laser. Its conduction capacity is proportional to the light intensity. At this time, the silicon photodiode Q1 will flow a current I Q1 .

[0034] 2. The input terminals of pin 1 and pin 2 of the op amp IC1 in the laser energy detection circuit 2 are high impedance. When the silicon photodiode Q1 is turned on, the current I Q1时 , no current flows into the input of the operational amplifier IC1. Since the silicon photodiode Q1 has current flowing through it, there must be a voltage difference U at both ends. Q1 , pressure difference U Q1 After being amplified by the op amp IC1, the voltage is output from the pin 5 output of the op amp IC1 to charge the energy detection capacitor C2 (capacitance is 0.1uF), and the capacitor voltage rise time is about 1us.

[0035] 3. Since the silicon photodiode Q1 is irradiated by the excimer pulse laser, the irradiation time is usually 5-200ns, which is short, and after the laser irradiation, its conduction capacity gradually decreases. Therefore, the current flowing through the silicon photodiode Q1 and the voltage difference U across its two ends are Q1 will gradually decrease, and the output of IC1 stops charging the energy detection capacitor C2, while making the voltage U C2 Gradually rise to a stable value.

[0036] 4. The reset switch S1 in the reset circuit 4 uses a high impedance input switch chip, and the AD conversion port 53 of the PIC microcontroller circuit 5 is also a high impedance input. Therefore, the voltage of the energy detection capacitor C2 will be maintained at the peak voltage, realizing the built-in peak hold function without the need to set a special peak hold chip.

[0037] 5. When the silicon photodiode Q1 is turned on, the current I Q1 When the external trigger acquisition circuit 3 is triggered, the primary coil of the pulse transformer T1 pin 1 and pin 2 flows through the current I T1 =I Q1 , the secondary of the pulse transformer T1 pin 3 and pin 4 will also generate current, which flows through resistors R1 and R2 and generates a pulse voltage U on resistor R2. R2 , pulse voltage U R2 The rising edge of trigger triggers the external interrupt program of PIC microcontroller circuit 5, that is, sends an external trigger acquisition signal to the external trigger port 51 of PIC microcontroller circuit 5. At this time, PIC microcontroller circuit 5 performs AD conversion in the external interrupt program, and collects the voltage U on the energy detection capacitor C2 through the AD conversion port 53 of PIC microcontroller circuit 5. C2 , and converted into digital signals, and displayed on the LCD screen after numerical correction with the external energy meter, realizing the automatic detection function, and storing the detected digital signal data on the microcontroller circuit board and displaying it on the LCD screen.

[0038] 6. When the PIC microcontroller circuit 5 completes the acquisition, a reset signal is sent to the reset switch S1 of the reset circuit 4 through the reset output port 52, so that the reset switch S1 is closed, the charge on the energy detection capacitor C2 is released, and the voltage of the energy detection capacitor C2 is restored to 0 volts, waiting for the next pulse to arrive, thereby realizing the automatic reset function.

[0039] In this case, the resistor R3 in the zeroing circuit 4 is a current limiting resistor with a resistance of 1-10Ω. The voltage-regulating diode D1 connected in parallel across the capacitor C1 is a 5V voltage clamping diode, which is intended to protect the PIC microcontroller circuit from input voltage exceeding 5V. The zeroing time is about 1us.

[0040] The above are only preferred embodiments of the present invention, and are not intended to limit the patent scope of the present invention. All equivalent structural changes made using the contents of the present invention's specification and drawings under the inventive concept of the present invention, or directly or indirectly applied in other related technical fields, are included in the patent protection scope of the present invention.

Claims

1. A repetition frequency excimer laser energy automatic detection circuit, characterized in that: It comprises an excimer laser detection circuit (1) which is turned on by the excimer laser irradiation; A laser energy detection circuit (2) is connected to the excimer laser detection circuit (1) and is used to detect the energy of the primary excimer laser; An external trigger collection circuit (3) is connected to the excimer laser detection circuit (1) and is used to output an external trigger collection signal; A zeroing circuit (4) connected to the laser energy detection circuit (2) and used to reset the laser energy detection circuit (2); The single-chip circuit board (5) has a storage function and is respectively connected to the laser energy detection circuit (2), the external trigger acquisition circuit (3) and the zeroing circuit (4), and is used for, after receiving the external trigger acquisition signal from the external trigger acquisition circuit (3), acquiring the energy of the excimer laser of the laser energy detection circuit (2), converting it into a digital signal and storing it, and controlling the zeroing circuit (4) to zero-clear the laser energy detection circuit (2) after acquiring the energy.

2. The repetition frequency excimer laser energy automatic detection circuit according to claim 1, characterized in that: It also includes a display component (6) connected to the single-chip circuit board (5) and used for displaying the excimer laser energy digital signal.

3. The repetition frequency excimer laser energy automatic detection circuit according to claim 1, characterized in that: The single-chip circuit board (5) is provided with an external trigger port (51) connected to the external trigger acquisition circuit (3), a clear output port (52) connected to the clear circuit (4), and an AD conversion port (53) connected to the external trigger acquisition circuit (3).

4. The repetition rate excimer laser energy automatic detection circuit according to claim 3, characterized in that: The excimer laser detection circuit (1) comprises a silicon photodiode Q1, the positive terminal of the silicon photodiode Q1 is grounded, the negative terminal of the silicon photodiode Q1 is connected to an external trigger collection circuit (3), and the two ends of the silicon photodiode Q1 are respectively connected to a laser energy detection circuit (2).

5. The repetition frequency excimer laser energy automatic detection circuit according to claim 4, characterized in that: The laser energy detection circuit (2) comprises an operational amplifier IC1, wherein pin 1 of the operational amplifier IC1 is connected to the positive terminal of a silicon photodiode Q1, pin 2 of the operational amplifier IC1 is connected to the negative terminal of the silicon photodiode Q1, pin 3 of the operational amplifier IC1 is connected to a +VCC power supply, pin 4 of the operational amplifier IC1 is connected to a -VCC power supply, pin 5 of the operational amplifier IC1 is respectively connected to one end of an energy detection capacitor C2 and an AD conversion port (53), and the other end of the energy detection capacitor C2 is connected to the negative terminal of the silicon photodiode Q1.

6. The repetition rate excimer laser energy automatic detection circuit according to claim 5, characterized in that: The external trigger acquisition circuit (3) comprises a pulse transformer T1, wherein a pin 1 of the pulse transformer T1 is connected to the negative terminal of a silicon photodiode Q1, a pin 2 of the pulse transformer T1 is connected to the other end of an energy detection capacitor C2, a pin 3 of the pulse transformer T1 is respectively connected to one end of a resistor R1, one end of a capacitor C1, and an external trigger port (51) via a resistor R2, and a pin 4 of the pulse transformer T1, the other end of the resistor R1, and the other end of the capacitor C1 are respectively grounded.

7. The repetition rate excimer laser energy automatic detection circuit according to claim 6, characterized in that: The zeroing circuit (4) comprises a zeroing switch S1, wherein a pin 1 of the zeroing switch S1 is connected to one end of an energy detection capacitor C2 via a resistor R3, a pin 2 of the zeroing switch S1 is connected to the other end of the energy detection capacitor C2, and a pin 3 of the zeroing switch S1 is connected to a zeroing output port (52).

8. The repetition rate excimer laser energy automatic detection circuit according to claim 6, characterized in that: A voltage stabilizing diode D1 is connected in parallel at both ends of the capacitor C1, and a cathode end of the voltage stabilizing diode D1 is connected to an external trigger port (51), and a cathode end of the voltage stabilizing diode D1 is grounded.

9. The repetition rate excimer laser energy automatic detection circuit according to claim 8, characterized in that: The Zener diode D1 is a 5V voltage clamping diode.

10. The repetition frequency excimer laser energy automatic detection circuit according to claim 7, characterized in that: The single-chip computer circuit board (5) is a PIC single-chip computer circuit, the operational amplifier IC1 is a high-impedance input operational amplifier, and the reset switch S1 is a high-impedance input switch chip.

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