Air floating bearing device

Abstract

An air floating bearing device is used for manufacturing a display panel and comprises a plurality of strip-shaped air floating platforms which are arranged side by side, and at least one of the strip-shaped air floating platforms comprises a fixed air floating part which is kept unchanged in position in the horizontal direction; the movable air floatation part is configured to be switched between a first position and a second position in the horizontal direction, and when the movable air floatation part is located at the first position, the fixed air floatation part and the movable air floatation part are attached and spliced in the horizontal direction; and when the movable air floatation part is located at the second position, the movable air floatation part is far away from the fixed air floatation part in the horizontal direction.

Description

Technical Field

[0001] The present disclosure relates to the field of semiconductor equipment, and in particular, to an air-floating support device. Background Art

[0002] In the preparation process of semiconductor devices such as OLED display panels, a carrying device is used in conjunction with a robotic arm to carry and transfer an OLED display substrate. For example, a pixel light-emitting layer, a liquid optical clear resin layer, etc. can be formed on the OLED display substrate by various methods such as inkjet printing and inkjet coating. Subsequently, the OLED display substrate needs to be transferred to a curing device for curing to achieve a stable structure of the OLED display substrate layer. Summary of the invention

[0003] The present disclosure provides an air-floating bearing device for manufacturing a display panel, comprising:

[0004] A plurality of strip-shaped air flotation platforms are arranged side by side, and at least one of the plurality of strip-shaped air flotation platforms comprises:

[0005] Fix the air-floating part to keep it in a constant position in the horizontal direction; and

[0006] The movable air-floating portion is configured to switch between a first position and a second position in a horizontal direction,

[0007] When the movable air-floating part is located at the first position, the fixed air-floating part and the movable air-floating part are joined and spliced ​​in the horizontal direction;

[0008] When the movable air floating portion is located at the second position, the movable air floating portion is away from the fixed air floating portion in the horizontal direction.

[0009] In some embodiments, the plurality of strip-shaped air floating platforms include a first strip-shaped air floating platform and a second strip-shaped air floating platform, wherein the first strip-shaped air floating platform and the second strip-shaped air floating platform are arranged side by side along a first direction.

[0010] The first strip-shaped air floating platform comprises:

[0011] The first fixed air-floating part keeps its position unchanged in the horizontal direction;

[0012] a plurality of first movable air-floating portions, configured to be movable relative to the first fixed air-floating portions in a first direction,

[0013] When the plurality of first movable air-floating parts move to the first position close to the first fixed air-floating part, a first strip-shaped interval is formed between the first strip-shaped air-floating platform and the second strip-shaped air-floating platform;

[0014] When the plurality of first movable air-floating portions move away from the first fixed air-floating portion to the second position, the plurality of first movable air-floating portions occupy a portion of the first strip-shaped interval.

[0015] In some embodiments, the plurality of strip-shaped air floating platforms include a third strip-shaped air floating platform, and the first strip-shaped air floating platform to the third strip-shaped air floating platform are sequentially arranged side by side along a first direction.

[0016] The second strip-shaped air floating platform comprises:

[0017] The second fixed air-floating part keeps its position unchanged in the horizontal direction;

[0018] a plurality of second movable air-floating portions, configured to be movable in a first direction relative to the second fixed air-floating portion,

[0019] When the plurality of second movable air-floating parts move to the first position close to the second fixed air-floating part, a second strip-shaped interval is formed between the second strip-shaped air-floating platform and the third strip-shaped air-floating platform;

[0020] When the plurality of second movable air-floating parts move away from the second fixed air-floating part to the second position, the plurality of second movable air-floating parts occupy a portion of the second strip-shaped interval,

[0021] The plurality of first movable air-floating portions and the plurality of second movable air-floating portions are configured to switch between a first position and a second position synchronously.

[0022] In some embodiments, the air-floating bearing device further comprises:

[0023] A plurality of guide mechanisms extend along a first direction, and each guide mechanism is configured to guide a corresponding first movable air-floating part and a corresponding second movable air-floating part to switch between a first position and a second position along the first direction.

[0024] In some embodiments, each guide mechanism comprises:

[0025] A guide rail extending along a first direction; and

[0026] The guide plate is slidably connected to the guide rail, and the corresponding first movable air-floating part and the second movable air-floating part are fixedly connected to the guide plate.

[0027] In some embodiments, the air-floating bearing device further comprises:

[0028] The driving device is configured to drive the plurality of first movable air-floating parts and the plurality of second movable air-floating parts to switch between the first position and the second position synchronously.

[0029] In some embodiments, the air-floating bearing device further comprises:

[0030] a fixed air pipe configured to provide gas to the fixed air-floating portion;

[0031] The spring gas pipe is configured to provide gas to the plurality of movable air-floating parts.

[0032] In some embodiments, the air-floating bearing device further comprises:

[0033] Abutments; and

[0034] An adjustable support column is arranged on the base platform to support the plurality of strip-shaped air floating platforms, and the height of the support column is adjustable.

[0035] In some embodiments, the air-floating bearing device further comprises:

[0036] A slide rail extending along a first direction and arranged on one side of the plurality of strip-shaped air floating platforms;

[0037] The clamp is slidably connected to the slide rail and is configured to clamp the load and slide along a first direction to transport the load.

[0038] In some embodiments, the air-floating bearing device further comprises:

[0039] The limiter is arranged at the edge of at least one of the plurality of strip-shaped air floating platforms and is configured to limit the position of the carried object.

[0040] The above solution of the embodiment of the present disclosure can have the following beneficial effects:

[0041] A structure in which multiple strip-shaped air-floating platforms are arranged side by side is adopted, and the lifting rod that moves through the air-floating platform in a direction perpendicular to the air-floating platform in the traditional design is eliminated. The robot arm or other transportation mechanism can directly place the load, such as a display substrate, accurately on the air-floating bearing device, so as to enter the subsequent manufacturing process, reducing the coordinate calibration time of the robot arm or other transportation mechanism, and avoiding the risk of collision of the load during the descent process. At least one of the multiple strip-shaped air-floating platforms includes a movable air-floating part, and the movable air-floating part switches between a first position and a second position in the horizontal direction, so that the air-floating bearing device switches to a chessboard form after carrying the load, such as a display substrate, to compensate for the deformation of the display substrate, which is conducive to the smooth transmission of the load, such as the display substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] The drawings herein are incorporated into the specification and constitute a part of the specification, showing embodiments consistent with the present disclosure, and together with the specification, are used to explain the principles of the present disclosure. Obviously, the drawings described below are only some embodiments of the present disclosure, and for ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work. In the drawings:

[0043] Figure 1 It is a structural schematic diagram of a display substrate carrying device in the related art;

[0044] Figure 2 It is a structural schematic diagram of a display substrate carrying device in the related art from another perspective;

[0045] Figure 3 A schematic diagram of the structure of an air-floating bearing device provided in some embodiments of the present disclosure, wherein the movable air-floating portion is in a first position;

[0046] Figure 4 A schematic diagram of the structure of an air-floating bearing device provided in some embodiments of the present disclosure, wherein the movable air-floating portion is in the second position;

[0047] Figure 5 A schematic structural diagram of an air-floating bearing device from another perspective provided in some embodiments of the present disclosure;

[0048] Figure 6 A structural schematic diagram of an air-floating bearing device from another perspective in some embodiments of the present disclosure;

[0049] Figure 7 A schematic diagram of the structure of an air-floating bearing device provided in some embodiments of the present disclosure;

[0050] Figure 8 for Figure 7 An enlarged view of the local area M. DETAILED DESCRIPTION

[0051] In order to make the purpose, technical solutions and advantages of the present disclosure clearer, the present disclosure will be further described in detail below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present disclosure, rather than all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0052] The terms used in the embodiments of the present disclosure are only for the purpose of describing specific embodiments, and are not intended to limit the present disclosure. The singular forms "a", "said" and "the" used in the embodiments of the present disclosure and the appended claims are also intended to include plural forms, unless the context clearly indicates other meanings, and "multiple" generally includes at least two.

[0053] It should be understood that the term "and / or" used in this article is only a description of the association relationship of associated objects, indicating that there can be three relationships. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / " in this article generally indicates that the associated objects before and after are in an "or" relationship.

[0054] It should be understood that although the terms first, second, third, etc. may be used to describe the embodiments of the present disclosure, they should not be limited to these terms.

[0055] It should also be noted that the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a product or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such product or device. In the absence of more restrictions, the elements defined by the sentence "comprises a" do not exclude the presence of other identical elements in the product or device including the elements.

[0056] In the related art, in the manufacturing process of a display panel, such as an OLED display panel, an OLED display substrate needs to be transferred between different process equipment. Specifically, the OLED display substrate can be transferred between different process equipment by a robotic arm or other transportation mechanism in conjunction with a carrying device, such as an air-floating carrying device.

[0057] Figure 1 is a schematic structural diagram of a display substrate carrying device in the related art, Figure 1 This is a top-down view. Figure 2 is a structural schematic diagram of a display substrate carrying device in the related art from another perspective, Figure 2 is a view from an upward angle. Figure 1 and Figure 2 As shown, the display substrate carrying device in the related art is used, for example, in a curing device. After a printed coating, such as a pixel light-emitting layer, a liquid optical clear resin layer, etc., is formed on the display substrate by using a process such as inkjet printing, the display substrate needs to be transferred to a curing device to cure the printed display substrate so that the properties of the printed coating are stable.

[0058] The display substrate after inkjet printing is transferred to the curing device by the robot arm. Specifically, the display substrate with the printed coating is transferred to the top of the display substrate carrying device 1 by the robot arm. The support lifting rod 3 rises relative to the air floating platform 2 and passes through the through hole on the air floating platform 2 to receive the display substrate 4 transferred by the robot arm. The support lifting rod 3 is arranged in an array on the lifting rod bracket 6. When the support lifting rod 3 carries the display substrate 4, the display substrate 4 is carried in an array-arranged point support mode. Subsequently, the robot arm drives the display substrate to descend so that the display substrate is carried by the support lifting rod 3. After the robot arm is withdrawn, the support lifting rod 3 carries the display substrate 4 and descends, and the display substrate 4 is supported by the air floating platform 2. The free end of the support lifting rod 3 is lower than the upper surface of the air floating platform 2. After the display substrate is cured, the support lifting rod 3 rises, pushes the display substrate 4 off the air floating platform 2, and then the display substrate 4 is transferred to the next process by the robot arm.

[0059] In the related art, since the support lifting rod 3 needs to be inserted through the through hole on the air flotation platform 2, in order to avoid direct contact between the support lifting rod 3 and the inner wall of the through hole to produce fine particles and affect the process, a gas sleeve 5 needs to be added on the lower surface of the air flotation platform 2, which is connected to the gas pipeline 7. The support lifting rod 3 passes through the gas sleeve 5 and is aligned with the through hole on the air flotation platform 2. The gas pipeline 7 supplies gas into the gas sleeve 5, so that the support lifting rod 3 does not have physical contact with the inner wall of the gas sleeve 5 and the inner wall of the through hole on the air flotation platform 2 during the movement, and the display substrate carrying device 1 has a complex structure as a whole. When the display substrate 4 is transferred to the process equipment, it is necessary to adopt a pick-and-place action, and the support lifting rod 3 moves up and down, so that the display substrate is carried by the air flotation platform 2 or sorted from the air flotation platform 2. In this approach, since the support lifting rod 3 is in contact with the display substrate, acceleration will be generated when the support lifting rod 3 moves up and down with the display substrate, which will cause the position of the display substrate to deviate and thus collide, and in severe cases, even cause damage to the display substrate.

[0060] In the OLED display panel preparation process, an inkjet printing device is usually arranged on the production line in sequence with a curing device and an automatic optical inspection device. The OLED display panel is transferred between the process equipment including the inkjet printing device, the curing device and the automatic optical inspection device through a robotic arm. It takes a long time for the robotic arm to pick up and place the OLED display panel, and each time it is transferred to the process equipment, an alignment step of the robotic arm is required to avoid interference between the supporting lifting rod 3 and the robotic arm, which results in low operating efficiency of the OLED display panel preparation process, and there is a risk of collision when the display substrate is carried by the supporting lifting rod 3 and downloaded to the air floating platform 2.

[0061] In order to overcome the above-mentioned problems, the present disclosure provides an air-floating bearing device for the manufacture of display panels, comprising: a plurality of strip-shaped air-floating platforms, arranged side by side, at least one of the plurality of strip-shaped air-floating platforms comprising: a fixed air-floating part, which maintains a constant position in the horizontal direction; and a movable air-floating part, which is configured to switch between a first position and a second position in the horizontal direction, when the movable air-floating part is located at the first position, the fixed air-floating part and the movable air-floating part are joined and spliced ​​in the horizontal direction; when the movable air-floating part is located at the second position, the movable air-floating part is away from the fixed air-floating part in the horizontal direction.

[0062] In the present disclosure, a structure in which multiple strip-shaped air-floating platforms are arranged side by side is adopted, and the lifting rod that moves through the air-floating platform in a direction perpendicular to the air-floating platform in the traditional design is eliminated. The robot arm or other transportation mechanism can directly place the load, such as a display substrate, accurately on the air-floating bearing device, so as to enter the subsequent manufacturing process, reducing the coordinate calibration time of the robot arm or other transportation mechanism, and avoiding the risk of collision of the display substrate during the descent process. At least one of the multiple strip-shaped air-floating platforms includes a movable air-floating part, and the movable air-floating part switches between a first position and a second position in the horizontal direction, so that the air-floating bearing device switches to a chessboard form after carrying the load, such as a display substrate, to compensate for the deformation of the display substrate, which is conducive to the smooth transmission of the load, such as the display substrate.

[0063] The optional embodiments of the present disclosure are described in detail below with reference to the accompanying drawings.

[0064] Figure 3 A schematic structural diagram of an air-floating bearing device provided in some embodiments of the present disclosure, wherein the movable air-floating portion is in a first position. Figure 4 A schematic structural diagram of an air-floating support device provided in some embodiments of the present disclosure, wherein the movable air-floating portion is in the second position.

[0065] like Figure 3 and Figure 4 As shown, some embodiments of the present disclosure provide an air-floating bearing device 100 for manufacturing a display panel, and the air-floating bearing device 100 includes a plurality of strip-shaped air-floating platforms 10. The plurality of strip-shaped air-floating platforms 10 are arranged side by side. At least one of the plurality of strip-shaped air-floating platforms 10 includes a fixed air-floating portion 11 and a movable air-floating portion 12. Figure 3 As shown, the number of the strip-shaped air floating platforms 10 is, for example, 5, wherein the four strip-shaped air floating platforms 10 on the left have fixed air floating parts 11 and movable air floating parts 12. The strip-shaped air floating platform 10 on the right is an integral structure, for example, a strip-shaped fixed air floating platform.

[0066] The fixed air-floating part 11 remains in a fixed position in the horizontal direction, that is, the fixed air-floating part 11 remains fixed in the horizontal direction. The movable air-floating part 12 is configured to switch between a first position and a second position in the horizontal direction, wherein Figure 3 An example in which the movable air floating part 12 is in the first position is shown. Figure 4 An example is shown in which the movable air floating portion 12 is in the second position.

[0067] When the movable air-floating part 12 is located at the first position, the fixed air-floating part 11 and the movable air-floating part 12 are joined together in the horizontal direction to form a strip-shaped air-floating platform 10. Figure 3 As shown, at this time, multiple strip-shaped air floating platforms 10 are arranged side by side at intervals, and there is a gap G between two adjacent strip-shaped air floating platforms 10. These gaps are used to allow the supporting fingers of the robot arm to pass through, so that the robot arm carries the load L, such as a display substrate, and descends in the vertical direction to directly transfer the load L, such as a display substrate, to the air floating carrying device 100.

[0068] When the movable air floating part 12 is located at the second position, the movable air floating part 12 is away from the fixed air floating part 11 in the horizontal direction. Figure 4 As shown, at this time, the movable air-floating part 12 occupies at least a part of the gap G, and the air-floating bearing device 100 is in a chessboard shape as a whole, so that when the air-floating bearing device 100 carries a load L such as a display substrate, the deformation of the load can be reduced to avoid collision caused by the deformation of the load L.

[0069] In some embodiments, Figure 3 and Figure 4 As shown, the plurality of strip-shaped air floating platforms include a first strip-shaped air floating platform 101 and a second strip-shaped air floating platform 102 , and the first strip-shaped air floating platform 101 and the second strip-shaped air floating platform 102 are arranged side by side along a first direction X.

[0070] The first strip-shaped air floating platform 101 includes a first fixed air floating portion 1011 and a plurality of first movable air floating portions 1012. The first fixed air floating portion 1011 maintains a constant position in the horizontal direction. The plurality of first movable air floating portions 1012 are configured to be movable in a first direction X relative to the first fixed air floating portion 1011.

[0071] When the multiple first movable air floating parts 1012 move close to the first fixed air floating part 1011 to the first position, a first strip-shaped air floating platform 101 and the second strip-shaped air floating platform 101 have a first strip-shaped gap G1; when the multiple first movable air floating parts 1012 move away from the first fixed air floating part 1011 to the second position, the multiple first movable air floating parts 1012 occupy a part of the first strip-shaped gap G1.

[0072] In some embodiments, Figure 3 and Figure 4 As shown, the plurality of strip-shaped air floating platforms 10 further include a third strip-shaped air floating platform 103 , and the first strip-shaped air floating platforms 101 to the third strip-shaped air floating platforms 103 are sequentially arranged side by side along the first direction X.

[0073] The second strip-shaped air floating platform 102 includes: a second fixed air floating part 1021 and a plurality of second movable air floating parts 1022 , which maintain a constant position in the horizontal direction. The plurality of second movable air floating parts 1022 are configured to be movable in the first direction X relative to the second fixed air floating part 1022 .

[0074] When the multiple second movable air floating parts 1022 move close to the second fixed air floating part 1021 to the first position, a second strip-shaped air floating platform 102 and the third strip-shaped air floating platform 103 have a second strip-shaped gap G2; when the multiple second movable air floating parts 1022 move away from the second fixed air floating part 1021 to the second position, the multiple second movable air floating parts 1022 occupy a part of the second strip-shaped gap G2.

[0075] The plurality of first movable air floating portions 1011 and the plurality of second movable air floating portions 1022 are configured to switch between the first position and the second position synchronously.

[0076] In the previous embodiment, the number of the plurality of strip-shaped air floating platforms 10 is two or three. The number of the plurality of strip-shaped air floating platforms 10 can also be more, such as Figure 3 , Figure 4 The number of the plurality of strip-shaped air floating platforms 10 is, for example, five, specifically, a first strip-shaped air floating platform 101 , a second strip-shaped air floating platform 102 , a third strip-shaped air floating platform 103 , a fourth strip-shaped air floating platform 104 and a fifth strip-shaped air floating platform 105 .

[0077] The first strip-shaped air floating platform 101, the second strip-shaped air floating platform 102, the third strip-shaped air floating platform 103, the fourth strip-shaped air floating platform 104 and the fifth strip-shaped air floating platform 105 are sequentially arranged side by side along the first direction X. The first strip-shaped air floating platform 101, the second strip-shaped air floating platform 102, the third strip-shaped air floating platform 103, the fourth strip-shaped air floating platform 104 and the fifth strip-shaped air floating platform 105 extend in a direction perpendicular to the first direction X in the horizontal direction.

[0078] Each of the first strip-shaped air floating platform 101, the second strip-shaped air floating platform 102, the third strip-shaped air floating platform 103, and the fourth strip-shaped air floating platform 104 includes a fixed air floating portion 11 and a movable air floating portion 12. Specifically, the first strip-shaped air floating platform 101 includes a first fixed air floating portion 1011 and a plurality of first movable air floating portions 1012, the second strip-shaped air floating platform 102 includes a second fixed air floating portion 1021 and a plurality of second movable air floating portions 1022, the third strip-shaped air floating platform 103 includes a third fixed air floating portion 1031 and a plurality of third movable air floating portions 1032, and the fourth strip-shaped air floating platform 104 includes a fourth fixed air floating portion 1041 and a plurality of fourth movable air floating portions 1042. The number of the plurality of first movable air floating portions 1012, the plurality of second movable air floating portions 1022, the plurality of third movable air floating portions 1032, and the plurality of fourth movable air floating portions 1042 is, for example, four. Figure 3 and Figure 4 The fifth strip-shaped air floating platform 105 is a fixed air floating platform, which keeps a constant position in the horizontal direction.

[0079] In some embodiments, the first fixed air floating part 1011, the second fixed air floating part 1021, the third fixed air floating part 1031, and the fourth fixed air floating part 1041 respectively have multiple groove portions, for example, rectangular grooves, and the multiple first movable air floating parts 1012, the multiple second movable air floating parts 1022, the multiple third movable air floating parts 1032, and the multiple fourth movable air floating parts 1042 respectively have shapes matching the groove portions of the above-mentioned multiple fixed air floating parts, for example, rectangles.

[0080] In some embodiments, the first fixed air floating part 1011, the second fixed air floating part 1021, the third fixed air floating part 1031, and the fourth fixed air floating part 1041 remain unchanged in the horizontal direction. The plurality of first movable air floating parts 1012, the plurality of second movable air floating parts 1022, the plurality of third movable air floating parts 1032, and the plurality of fourth movable air floating parts 1042 are movable in the first direction X between a first position and a second position relative to the first fixed air floating part 1011, the second fixed air floating part 1021, the third fixed air floating part 1031, and the fourth fixed air floating part 1041, respectively.

[0081] When the plurality of first movable air floating parts 1012, the plurality of second movable air floating parts 1022, the plurality of third movable air floating parts 1032, and the plurality of fourth movable air floating parts 1042 are all in the first position, the plurality of first movable air floating parts 1012, the plurality of second movable air floating parts 1022, the plurality of third movable air floating parts 1032, and the plurality of fourth movable air floating parts 1042 are respectively matched with the grooves of the first fixed air floating part 1011, the second fixed air floating part 1021, the third fixed air floating part 1031, and the fourth fixed air floating part 1041. The first strip-shaped air floating platform 101, the second strip-shaped air floating platform 102, the third strip-shaped air floating platform 103, and the fourth strip-shaped air floating platform 104 are all in a spliced ​​state, and are in a long strip shape extending perpendicular to the first direction X. The first strip-shaped air floating platform 101, the second strip-shaped air floating platform 102, the third strip-shaped air floating platform 103, the fourth strip-shaped air floating platform 104, and the fifth strip-shaped air floating platform 105 are sequentially spaced apart by a predetermined gap G. Specifically, there is a first gap G1 between the first strip-shaped air floating platform 101 and the second strip-shaped air floating platform 102, a second gap G2 between the second strip-shaped air floating platform 102 and the third strip-shaped air floating platform 103, a third gap G3 between the third strip-shaped air floating platform 103 and the fourth strip-shaped air floating platform 104, and a fourth gap G4 between the fourth strip-shaped air floating platform 104 and the fifth strip-shaped air floating platform 105.

[0082] In this case, the supporting fingers of the robot arm supporting the load, such as the display substrate, can pass through the gap G and move in the vertical direction to achieve the transfer of the load, such as the display substrate, to the air-floating carrier 100 or pick up from the air-floating carrier 100. Specifically, the number of supporting fingers is, for example, 4, and there is a vacuum adsorption device on it, so that the robot arm can firmly grasp the load. When the load, such as the display substrate, is transferred to the air-floating carrier 100 by the robot arm, the supporting fingers can adsorb the load, such as the display substrate, and the robot arm moves the load above the air-floating carrier 100. Subsequently, the supporting fingers of the robot arm carry the load and descend in the vertical direction, and the four supporting fingers are allowed to enter the first gap G1, the second gap G2, the third gap G3 and the fourth gap G4 respectively. When the load is close to the upper surface of the air-floating carrier 100, the vacuum adsorption device on the supporting fingers stops working, and the four supporting fingers continue to descend in the vertical direction, so that the load is transferred to the air-floating carrier 100 and is supported by multiple strip-shaped air-floating platforms 10. Then, the robot arm is pulled away from under the air-floating carrier 100 .

[0083] When the plurality of first movable air floating parts 1012, the plurality of second movable air floating parts 1022, the plurality of third movable air floating parts 1032, and the plurality of fourth movable air floating parts 1042 are all in the second position, the plurality of first movable air floating parts 1012, the plurality of second movable air floating parts 1022, the plurality of third movable air floating parts 1032, and the plurality of fourth movable air floating parts 1042 are respectively detached from the groove portions of the first fixed air floating part 1011, the second fixed air floating part 1021, the third fixed air floating part 1031, and the fourth fixed air floating part 1041.

[0084] The first strip-shaped air floating platform 101, the second strip-shaped air floating platform 102, the third strip-shaped air floating platform 103, and the fourth strip-shaped air floating platform 104 are all in the unfolded state. The plurality of first movable air floating parts 1012 occupy a part of the first interval G1, the width of the plurality of first movable air floating parts 1012 is, for example, equal to the width of the first interval G1, and the plurality of first movable air floating parts 1012 are, for example, in contact with the second fixed air floating part 1021. Similarly, the plurality of second movable air floating parts 1022, the plurality of third movable air floating parts 1032, and the plurality of fourth movable air floating parts 1042 respectively occupy a part of the second interval G2, the third interval G3, and the fourth interval G4. The widths of the plurality of second movable air floating parts 1022, the plurality of third movable air floating parts 1032, and the plurality of fourth movable air floating parts 104 are, for example, respectively equal to the widths of the second interval G2, the third interval G3, and the fourth interval G4. The plurality of second movable air floating parts 1022, the plurality of third movable air floating parts 1032, and the plurality of fourth movable air floating parts 1042 are, for example, respectively abutted against the third fixed air floating part 1031, the fourth fixed air floating part 1041, and the fifth strip-shaped air floating platform 105.

[0085] In this case, the first strip-shaped air floating platform 101, the second strip-shaped air floating platform 102, the third strip-shaped air floating platform 103, the fourth strip-shaped air floating platform 104 and the fifth strip-shaped air floating platform 105 are in a chessboard shape, which is convenient for air floating support of loads, such as display substrates.

[0086] In the present embodiment, a structure in which a plurality of strip-shaped air-floating platforms are arranged side by side is adopted, and the lifting rod which moves through the air-floating platform in a direction perpendicular to the air-floating platform in the traditional design is eliminated. The robot arm or other transport mechanism can directly place the load, such as a display substrate, accurately on the air-floating bearing device, so as to enter the subsequent manufacturing process, thereby reducing the coordinate calibration time of the robot arm or other transport mechanism and avoiding the risk of collision of the display substrate during the descent process. At least one of the plurality of strip-shaped air-floating platforms includes a movable air-floating part, and the movable air-floating part switches between a first position and a second position in a horizontal direction, so that the air-floating bearing device switches to a chessboard form after carrying the load, such as a display substrate, to compensate for the deformation of the display substrate and facilitate the smooth transmission of the load, such as the display substrate.

[0087] Figure 5 A schematic structural diagram of an air-floating bearing device from another perspective provided in some embodiments of the present disclosure, Figure 6 A structural schematic diagram providing another perspective of the air floating support device in some embodiments of the present disclosure.

[0088] like Figures 3 to 6As shown, in some embodiments, the air-floating bearing device 100 further includes a plurality of guide mechanisms 20, the plurality of guide mechanisms 20 extending along the first direction X, and each guide mechanism 20 is configured to guide a corresponding first movable air-floating portion 1012 and a second movable air-floating portion 1022 to switch between a first position and a second position along the first direction X. Specifically, the number of the guide mechanisms 20 is, for example, four, and each guide mechanism 20 corresponds to a first movable air-floating portion 1012, a second movable air-floating portion 1022, a third movable air-floating portion 1032, and a fourth movable air-floating portion 1042 arranged along the first direction X, and guides them to switch between the first position and the second position synchronously.

[0089] In some embodiments, Figures 3 to 6 As shown, each guide mechanism 20 includes a guide rail 21 and a guide plate 22 .

[0090] The guide rail 21 extends along the first direction X. The guide plate 22 is slidably connected to the guide rail 21, and the corresponding first movable air floating part 1012, second movable air floating part 1022, third movable air floating part 1032, and fourth movable air floating part 1042 are fixedly connected to the guide plate 22. Thus, the guide mechanism 20 can drive the corresponding first movable air floating part 1012, second movable air floating part 1022, third movable air floating part 1032, and fourth movable air floating part 1042 to switch between the first position and the second position synchronously.

[0091] In some embodiments, Figures 3 to 6 As shown, in some embodiments, the air-floating bearing device 100 further includes a driving device 30, which is configured to drive the guide plates 22 of the plurality of guide mechanisms 20 to move, so that the plurality of first movable air-floating parts 1012, the plurality of second movable air-floating parts 1022, the plurality of third movable air-floating parts 1032, and the plurality of fourth movable air-floating parts 1042 can be synchronously switched between the first position and the second position, so as to facilitate the air-floating bearing device 100 to receive a load or carry a load.

[0092] Figure 7 A schematic diagram of the structure of an air-floating bearing device provided in some embodiments of the present disclosure. Figure 8 for Figure 7 An enlarged view of the local area M.

[0093] In some embodiments, Figures 3 to 8As shown, the air flotation carrying device 100 also includes a fixed air pipe 41 and a spring air pipe 42. The fixed air pipe 41 is configured to provide gas to the fixed air flotation part 11 and the fixed strip air flotation platform. Specifically, the strip air flotation platform 10 is densely covered with a plurality of irregularly distributed micron-sized air jet holes, and the gas input from the outside can form a stable and uniform airflow output thereon, so that the carrier is air-floated and carried on the air flotation carrying device 100, and the carrier does not contact the surface of the air flotation carrying device 100. The fixed air pipe 41 is arranged on one side of the plurality of strip air flotation platforms 10, and is connected to the fixed air flotation part 11 and the air inlet at the bottom of the fixed strip air flotation platform to provide gas, such as nitrogen, air, etc. As shown Figures 3 to 8 As shown, the number of fixed air pipes 41 is, for example, 5, which are respectively arranged corresponding to the first fixed air floating part 1011, the second fixed air floating part 1021, the third fixed air floating part 1031, the fourth fixed air floating part 1041 and the fifth strip-shaped air floating platform 105 to provide gas for them.

[0094] The spring air pipe 42 is configured to provide gas to the movable air floating part 12. The spring air pipe 42 is arranged on one side of the plurality of strip-shaped air floating platforms 10 and connected to the air inlet at the bottom of the movable air floating part 12 to provide gas, such as nitrogen, air, etc. Figures 3 to 8 As shown, the number of the spring air tubes 42 is, for example, 4, which are respectively arranged to correspond to the plurality of first movable air floating parts 1021, the plurality of second movable air floating parts 1022, the plurality of third movable air floating parts 1032, and the plurality of fourth movable air floating parts 1042 to provide them with air. Due to the elasticity of the spring air tubes 42, it adapts to the switching of the plurality of first movable air floating parts 1021, the plurality of second movable air floating parts 1022, the plurality of third movable air floating parts 1032, and the plurality of fourth movable air floating parts 1042 between the first position and the second position.

[0095] In some embodiments, Figures 3 to 8 The air-floating bearing device 100 further includes a base and a support. The base is a horizontal support platform, and an adjustable support column 50 is arranged on the base to support the plurality of strip-shaped air-floating platforms 10. The height of the support column is adjustable, thereby adjusting the height of the plurality of strip-shaped air-floating platforms 10 relative to the base, so that the upper surfaces of the plurality of strip-shaped air-floating platforms 10 are located on the same horizontal plane, which is conducive to the load bearing.

[0096] In some embodiments, Figure 7As shown, the air-floating carrier 100 further includes a slide rail 60 and a clamp 70. The slide rail 60 extends along the first direction X and is disposed on one side of the plurality of strip-shaped air-floating platforms 10. The clamp 70 is slidably connected to the slide rail 60 and is configured to clamp a carrier, such as a display substrate, and slide along the first direction X to transfer the carrier. This method can be used to transfer the carrier, i.e., the load, between the air-floating carrier 100 and the process equipment.

[0097] In some embodiments, Figure 7 and Figure 8 As shown, the air-floating carrier 100 further includes a stopper 80 disposed at an edge of at least one of the plurality of strip-shaped air-floating platforms 10 , and configured to limit the position of the carried object to prevent the carried object from shifting on the air-floating carrier 100 .

[0098] Finally, it should be noted that the various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other. For the system or device disclosed in the embodiment, since it corresponds to the method disclosed in the embodiment, the description is relatively simple, and the relevant parts can be referred to the method part description.

[0099] The above embodiments are only used to illustrate the technical solutions of the present disclosure, rather than to limit them. Although the present disclosure has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present disclosure.

Claims

1. An air-floating bearing device for manufacturing a display panel, characterized in that: include: A plurality of strip-shaped air flotation platforms are arranged side by side, and at least one of the plurality of strip-shaped air flotation platforms comprises: Fix the air-floating part to keep it in a constant horizontal position; and The movable air-floating portion is configured to switch between a first position and a second position in a horizontal direction, When the movable air-floating part is located at the first position, the fixed air-floating part and the movable air-floating part are joined together in the horizontal direction; When the movable air floating portion is located at the second position, the movable air floating portion is away from the fixed air floating portion in the horizontal direction.

2. The air-floating bearing device according to claim 1, characterized in that: The plurality of strip-shaped air floating platforms include a first strip-shaped air floating platform and a second strip-shaped air floating platform, wherein the first strip-shaped air floating platform and the second strip-shaped air floating platform are arranged side by side along a first direction. The first strip-shaped air floating platform comprises: The first fixed air-floating part keeps its position unchanged in the horizontal direction; a plurality of first movable air-floating portions, configured to be movable relative to the first fixed air-floating portions in a first direction, When the plurality of first movable air-floating parts move to the first position close to the first fixed air-floating part, a first strip-shaped interval is formed between the first strip-shaped air-floating platform and the second strip-shaped air-floating platform; When the plurality of first movable air-floating portions move away from the first fixed air-floating portion to the second position, the plurality of first movable air-floating portions occupy a portion of the first strip-shaped interval.

3. The air-floating bearing device according to claim 2, characterized in that: The plurality of strip-shaped air floating platforms include a third strip-shaped air floating platform, and the first strip-shaped air floating platform to the third strip-shaped air floating platform are sequentially arranged side by side along a first direction. The second strip-shaped air floating platform comprises: The second fixed air-floating part keeps its position unchanged in the horizontal direction; a plurality of second movable air-floating portions, configured to be movable in a first direction relative to the second fixed air-floating portion, When the plurality of second movable air-floating parts move to the first position close to the second fixed air-floating part, a second strip-shaped interval is formed between the second strip-shaped air-floating platform and the third strip-shaped air-floating platform; When the plurality of second movable air-floating parts move away from the second fixed air-floating part to the second position, the plurality of second movable air-floating parts occupy a portion of the second strip-shaped interval, The plurality of first movable air-floating portions and the plurality of second movable air-floating portions are configured to switch between a first position and a second position synchronously.

4. The air-floating bearing device according to claim 3, characterized in that: The air-floating bearing device further comprises: A plurality of guide mechanisms extend along a first direction, and each guide mechanism is configured to guide a corresponding first movable air-floating part and a corresponding second movable air-floating part to switch between a first position and a second position along the first direction.

5. The air-floating bearing device according to claim 4, characterized in that: Each guide mechanism includes: A guide rail extending along a first direction; and The guide plate is slidably connected to the guide rail, and the corresponding first movable air-floating part and the second movable air-floating part are fixedly connected to the guide plate.

6. The air-floating bearing device according to claim 3, characterized in that: The air-floating bearing device further comprises: The driving device is configured to drive the plurality of first movable air-floating parts and the plurality of second movable air-floating parts to switch between the first position and the second position synchronously.

7. The air-floating bearing device according to any one of claims 1 to 3, characterized in that: The air-floating bearing device further comprises: a fixed air pipe configured to provide gas to the fixed air-floating portion; The spring gas pipe is configured to provide gas to the plurality of movable air-floating parts.

8. The air-floating bearing device according to any one of claims 1 to 3, characterized in that: The air-floating bearing device further comprises: Abutments; and An adjustable support column is arranged on the base platform to support the plurality of strip-shaped air floating platforms, and the height of the support column is adjustable.

9. The air-floating bearing device according to claim 2 or 3, characterized in that: The air-floating bearing device further comprises: A slide rail extending along a first direction and arranged on one side of the plurality of strip-shaped air floating platforms; The clamp is slidably connected to the slide rail and is configured to clamp the load and slide along a first direction to transport the load.

10. The air-floating bearing device according to any one of claims 1 to 3, characterized in that: The air-floating bearing device further comprises: The limiter is arranged at the edge of at least one of the plurality of strip-shaped air floating platforms and is configured to limit the position of the carried object.

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