Machining method for complex features of integrated ceramic part

Abstract

The invention discloses a method for machining complex features of an integrated ceramic part, the integrated ceramic part comprises a segment difference structure, a through hole structure and a sinking groove structure, and the method comprises the following steps: (1) carrying out previous machining by using a five-axis linkage machine tool; (2) a ball-end cutter is adopted for sinking groove allowance cleaning; and (3) a T-shaped cutter is adopted for cutting from the reverse side of the sinking groove, and the R-angle allowance of the root of the ball-end cutter is cleaned. And a ball-end cutter is used for cleaning the allowance of the sinking groove, and a T-shaped cutter is used for cutting from the reverse side of the sinking groove to clean the allowance of the R angle of the root. Meanwhile, by accurately controlling machining parameters such as the cutting depth of the ball-end cutter and the layered machining strategy of the T-shaped cutter and by adopting an electroplating coating and a cutter made of a specific material, the high-precision and high-quality machining effect is achieved, and the machining efficiency and quality of the integrated complex ceramic part are improved.

Description

Technical Field

[0001] The invention relates to the technical field of ceramic processing, and in particular to a processing method for complex features of an integrated ceramic part. Background Art

[0002] In the field of semiconductor parts, considering the difficulty, complexity and cost of actual processing, a complete part is usually split into two different sub-parts, and finally assembled into a whole through gluing, welding and other methods. This can make product processing easier, but the phase accuracy and use strength of the product after actual assembly cannot be guaranteed. Therefore, in order to use it in a more precise and harsh environment, the customer now designs these two sub-parts into a complex one-piece part. In this way, it is inevitable that a certain feature will be interfered with by other features during processing. Therefore, these interfered features are regarded as complex features, and processing them is the difficulty of the entire processing process.

[0003] For example, the disclosed Chinese patent: Ceramic blank with complex intersecting features, ceramic material and processing method thereof, application number CN202310613491.6, the processing method of the ceramic blank with complex intersecting features includes: compiling a processing program for the CNC machine tool according to the ceramic production model parameters and process requirements, and then inputting it into the CNC control system and setting the CNC machine tool processing process parameters; fixing the ceramic blank, and using the CNC machine tool to process the first intersecting feature of the ceramic blank; fixing the ablative filling material, and using the CNC machine tool to process the ablative filling material to match the first intersecting feature; assembling the ablative filling material and the first intersecting feature into a secondary processing component and fixing it on the CNC machine tool, and using the CNC machine tool to process the second intersecting feature on the secondary processing component; heating the secondary processing component after the second intersecting feature is processed at high temperature, and removing the ablative filling material after cooling to obtain a ceramic blank with complex intersecting features.

[0004] The above scheme effectively fills the local hollow structure that appears in the processing technology through the ablative filling material, and solves the problem of edge collapse at the joint of the intersecting body features of the ceramic blank due to the downward cutting force. However, this scheme still cannot efficiently and conveniently handle the interfered features of the parts. In order to solve the feature interference problem, in the current processing method, the cutting direction needs to be changed from the Z direction to a direction perpendicular to the radial direction of the groove. The previous process needs to use a ball-end cutter as a groove allowance cleaning tool to process the required surface of the product groove. When using a ball-end cutter for processing, the cutting angle changes continuously with almost no sudden changes. In this way, the change in cutting is also a continuous change process. In this way, a smooth and high-finish surface can be guaranteed during processing. However, the root R angle allowance cannot be removed using a ball-end cutter, which affects the customer's part assembly and use effect. Therefore, in order to solve the above feature interference problem, a new processing scheme is needed. Summary of the invention

[0005] In order to overcome the problem of difficult processing of interference features of complex ceramic parts in traditional technology, this solution uses the coordinated use of five-axis linkage machine tools, ball-end cutters and T-type cutters. Specifically, a ball-end cutter is used to clean the groove allowance, and a T-type cutter is used to clean the root R angle allowance from the reverse side of the groove. At the same time, by precisely controlling the processing parameters, such as the ball-end cutter cutting depth and the T-type cutter layered processing strategy, as well as the use of electroplated coatings and tools of specific materials, high-precision and high-quality processing effects are achieved, improving the processing efficiency and quality of one-piece complex ceramic parts.

[0006] To achieve the above object, the present invention adopts the following technical solutions: A method for processing complex features of an integrated ceramic part, wherein the integrated ceramic part comprises a step difference, a through hole and a sink structure, the method comprising the following steps: (1) Use five-axis machine tools for front-end processing; (2) Use a ball-end cutter to clean the sink groove; (3) Use a T-shaped cutter to cut from the reverse side of the groove to clean the R angle allowance at the root of the ball-end cutter.

[0007] This method uses a five-axis linkage machine tool for front-end processing, which can achieve multi-angle, high-precision processing of complex surfaces. The ball-end cutter is used to clean the groove allowance, and its spherical cutting edge can better fit the complex curved surface and improve the surface quality. The T-type cutter cuts from the reverse side of the groove to clean the root R angle allowance. This method solves the processing problem of areas that are difficult to reach in traditional processing. Cutting from the reverse side of the groove not only avoids interference between the tool and the workpiece, but also effectively removes the root R angle allowance that the ball-end cutter cannot fully process, thereby improving processing accuracy and surface integrity. This three-step combined processing method makes full use of the advantages of different tools, can meet the processing needs of complex ceramic parts, and improves efficiency while ensuring processing quality.

[0008] Preferably, the five-axis linkage machine tool comprises: A workbench, wherein a vacuum suction cup is arranged on the workbench; Three mutually perpendicular linear motion axes, namely the X-axis, Y-axis and Z-axis; The spindle head is mounted on the machine frame and can move along the Z axis; Two rotating axes, one mounted on the table and the other on the spindle head; A tool system, mounted on the spindle head, with replaceable ball-end cutters and T-type cutters.

[0009] Preferably, before front-end processing, the step difference and through hole of the integrated ceramic part are processed first, and the ceramic part is clamped on a five-axis machine tool by a vacuum suction cup.

[0010] Preferably, after clamping, the vacuum suction cup fixture and the ball-end cutter are rotated at a certain angle for alignment processing, so that the ball-end cutter is processed to be tangent to the step difference and does not process the step difference feature. By driving the ceramic part and the ball-end cutter to rotate in coordination with the vacuum suction cup fixture, the processing angle and position can be precisely controlled. The ball-end cutter is processed to be tangent to the step difference to ensure the continuity and accuracy of the groove processing, while avoiding interference with the processed step difference feature. The ball-end cutter and the vacuum suction cup fixture carrying the ceramic part are rotated in coordination at a certain angle so that the ball-end cutter is aligned with the processing point, which not only improves the processing accuracy, but also reduces the risk of interference between the tool and the workpiece. It can better adapt to the processing needs of complex curved surfaces, especially when processing interfered features, it can successfully complete the processing. By precisely controlling the processing angle, the effective cutting area of ​​the ball-end cutter can be maximized, improving the processing efficiency while ensuring the surface quality, which is especially advantageous when processing high-precision and complex-shaped ceramic parts.

[0011] Preferably, the ball-end cutter is an electroplating cutter, which is used to process the curved surface required for the product grooving, and its cutting depth does not exceed 1 / 3 of the radius of the ball-end cutter. Taking into account the geometric characteristics of the ball-end cutter and the distribution of cutting force, when the cutting depth is maintained within the range of 1 / 3 of the radius of the ball-end cutter, it can ensure that the cutting area is concentrated in the best cutting part of the ball-end cutter, that is, the front end area of ​​the spherical part, which can not only improve the processing efficiency, but also significantly improve the processing surface quality. Since the cutting force is more evenly distributed, the vibration and deformation of the tool can be reduced, thereby improving the processing accuracy. At the same time, this shallow cutting depth strategy also helps to extend the tool life and reduce wear. For the processing of hard and brittle materials such as ceramic materials, it is particularly important to control the cutting depth, which can effectively prevent cracks or chipping on the workpiece surface and ensure the processing quality.

[0012] Preferably, the ball-end cutter is provided with an electroplating coating, and the shank of the ball-end cutter is made of No. 45 steel. The electroplating coating generally adopts superhard materials such as diamond or cubic boron nitride, which can significantly improve the wear resistance and hardness of the tool, and is suitable for processing hard and brittle ceramic materials. This coating can reduce tool wear and extend service life while maintaining good cutting performance. No. 45 steel, as the shank material, has high strength and toughness, and can effectively resist bending and torsional forces during processing. Compared with pure carbide tools, this combination design improves the overall tool's resistance to breakage while ensuring the hardness of the tool, and is particularly suitable for the precision processing requirements of ceramic parts.

[0013] Preferably, the T-shaped knife is provided with an electroplating coating, and the knife bar of the T-shaped knife is made of tungsten steel.

[0014] Preferably, the unilateral distance between the tool bar of the T-type knife and the diameter of the effective processing part of the tool is greater than 1.1mm, the thickness of the effective processing part is greater than 4mm, and the tolerance is controlled at ±0.01mm. The unilateral distance of the diameter of the effective processing part is greater than 1.1mm, which ensures that the tool has sufficient strength and rigidity when cleaning the root R angle allowance, reducing the risk of tool deformation. The thickness of the effective processing part is greater than 4mm, which further enhances the rigidity and vibration resistance of the tool. How can extremely high precision requirements be guaranteed when the tolerance is controlled at ±0.01mm? This strict dimensional control ensures consistency and repeatability during the processing, which not only improves the processing accuracy, but also significantly reduces tool vibration and deformation.

[0015] As a preferred method, when using a T-type cutter, the cutting direction is changed from the Z direction to a direction perpendicular to the radial direction of the groove, and the cutter is inserted from the through hole to clear the R angle allowance at the root of the ball-end cutter. This processing strategy utilizes the geometric characteristics of the T-type cutter and the flexibility of the five-axis machine tool. By changing the cutting direction, the T-type cutter can directly contact the root R angle area that the ball-end cutter cannot fully process. The method of inserting from the through hole avoids interference with the machined surface, while providing a better cutting angle and space, which can more effectively clear the allowance and reduce the need for multiple clamping and adjustment. According to the cutting force analysis, cutting in the radial perpendicular direction can also reduce the axial force, reduce the risk of tool deformation, and further improve the processing accuracy and surface quality.

[0016] Preferably, when using a T-type cutter to clean the R angle allowance at the root of a ball-end cutter, a layered processing strategy is adopted, with the cutting depth of each layer not exceeding 0.1 mm to ensure processing accuracy and surface quality.

[0017] This solution has the following beneficial effects.

[0018] The five-axis linkage machine tool is used for front-end processing to achieve precise processing of complex surfaces, reduce the number of processes and the use of fixtures, thereby improving production efficiency and flexibility.

[0019] When the ball end cutter is machining the groove surface, the cutting depth is controlled to ensure that the cutting area is concentrated in the best position, reduce tool vibration and deformation, and thus improve machining accuracy and surface quality.

[0020] The T-shaped cutter cleans the R corner allowance from the reverse side of the groove, overcoming the limitation that the traditional method cannot handle the interfering features and effectively solving the problem of processing complex ceramic parts.

[0021] The combination of layered processing strategy and strict tolerance control ensures the accuracy and stability of the T-knife cleaning process, ultimately achieving high-quality one-piece complex ceramic parts processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 Schematic diagram of the structure of an integrated ceramic part.

[0023] Figure 2 Axonometric view of a one-piece ceramic part.

[0024] Figure 3 It is a schematic diagram of the structure of a ball-end cutter.

[0025] Figure 4 It is a schematic diagram of the structure of the T-type knife.

[0026] In the figure: 1. One-piece ceramic parts, 2. Step difference, 3. Through hole, 4. Sink, 5. Ball head cutter, 6. T-type cutter, 7. Electroplating coating, 8. Root R angle. DETAILED DESCRIPTION

[0027] The present invention is further described below in conjunction with the accompanying drawings and specific embodiments. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions.

[0028] Example 1 The present invention provides a high-precision positioning method for inner and outer diameter machining of ceramic products and a special jig thereof, which realizes high-precision machining positioning through a multi-level precise positioning mechanism.

[0029] like Figure 1 , 2 As shown, the present invention proposes a method for processing complex features of an integrated ceramic part 1 to solve the problem that interference features cannot be processed. The method uses a five-axis linkage machine tool as the core processing equipment, making full use of its multi-degree-of-freedom motion capability to achieve precise processing of complex curved surfaces. The five-axis machine tool is equipped with a vacuum suction cup fixture, which realizes high-precision positioning and clamping of the workpiece through the principle of vacuum adsorption, effectively avoiding the deformation and burr problems of the workpiece that may be caused by mechanical clamping, while greatly improving the clamping efficiency. Figure 3 , 4As shown, during the processing, the ball-end cutter 5 with electroplated diamond coating is first used for front processing. The ball-end cutter 5 uses a 45 steel tool bar with high hardness and good toughness. When the ball-end cutter 5 is processed, the cutting depth is controlled not to exceed 1 / 3 of the tool radius, which not only ensures the processing efficiency, but also ensures the uniform distribution of cutting force and reduces tool vibration and deformation. For the root R angle allowance that is difficult to handle with the ball-end cutter 5, this method uses a T-type cutter 6 to cut from the reverse side of the sink groove 4 for cleaning. The T-type cutter 6 uses a tungsten steel tool bar, which has higher rigidity and wear resistance. The single-side distance of the effective processing part of the T-type cutter 6 is greater than 1.1mm, the thickness is greater than 4mm, and the tolerance is controlled at ±0.01mm. These parameters ensure the stability and accuracy of the T-type cutter 6 when cleaning the root R angle allowance. During processing, the cutting direction is changed to be perpendicular to the radial direction of the sink groove 4 and extended from the through hole 3 to avoid interference problems. In addition, a layered processing strategy is adopted, and the cutting depth of each layer does not exceed 0.1mm, which further ensures the processing accuracy and surface quality. This processing method not only solves the problem of one-piece complex ceramic parts being unable to be processed due to interference features in traditional processes, but also improves processing efficiency and product quality. Compared with the traditional method of splitting parts into sub-components and then assembling them, this method can directly process one-piece parts, effectively ensuring the phase accuracy and use strength of the product, and is particularly suitable for semiconductor parts that need to be used in more precise and harsh environments.

[0030] In the processing method proposed by the present invention, the five-axis linkage machine tool is the basic equipment, which includes three linear motion axes (X, Y, Z) and two rotation axes. This configuration allows the tool to maintain the optimal cutting angle during the processing process, which is particularly suitable for processing complex three-dimensional surfaces and interference features. The workbench of the machine tool is equipped with a vacuum suction cup fixture, which uses the vacuum adsorption principle to achieve high-precision positioning and clamping of the workpiece. This clamping method not only avoids the deformation and burrs of the workpiece that may be caused by mechanical clamping, but also greatly shortens the clamping time and improves production efficiency.

[0031] The ball-end cutter 5 used in the processing is an electroplated cutter (electroplated coated cutter), and its electroplated coating 7 has a hardness of about 95HRA. This high hardness makes the ball-end cutter 5 particularly suitable for processing hard ceramic materials. The tool bar of the ball-end cutter 5 is made of 45# steel, which provides good strength and toughness and can effectively resist bending and torsion during processing. During the processing, the cutting depth of the ball-end cutter 5 is strictly controlled to not exceed 1 / 3 of the tool radius. This precise control not only ensures processing efficiency, but also ensures uniform distribution of cutting force and reduces tool vibration and deformation.

[0032] For the root R angle allowance that is difficult to handle with the ball-end cutter 5, this method uses a T-type cutter 6. The cutter bar of the T-type cutter 6 is made of tungsten steel, which has high hardness, high strength and good toughness. It can withstand large impacts and loads, is not easy to deform, and has a long service life. The design parameters of the T-type cutter 6 have also been optimized: the single-side distance of the diameter of the effective processing part is greater than 1.1mm, the thickness of the effective processing part is greater than 4mm, and the tolerance is controlled at ±0.01mm. The setting of these parameters ensures that the T-type cutter 6 has sufficient strength and rigidity when cleaning the root R angle allowance, while ensuring high precision of processing.

[0033] Before the front-end processing, the step 2 and through hole 3 of the integrated complex ceramic part are first processed and clamped on the five-axis machine tool through a vacuum suction cup. After clamping, the vacuum suction cup fixture and the ball-end cutter 5 are rotated to make the ball-end cutter 5 accurately machined to the tangent point with the step 2, while avoiding damage to the step 2 feature. After the front-end process is completed, a T-type cutter 6 is used to cut from the reverse side of the sink groove 4, and extends from the through hole 3 to clean the root R angle 8 remaining from the ball-end cutter. This processing path avoids the tool interference problem in the traditional method and realizes efficient processing of the interfered features.

[0034] Specifically, the operation flow of the method for processing the complex features of the integrated ceramic component 1 proposed in this embodiment is as follows: First, according to the requirements of the part drawing, the step 2 and through hole 3 structures are machined on the one-piece complex ceramic part using conventional processing methods. This step lays the foundation for subsequent precision processing and ensures that the basic shape and key features of the part have been formed.

[0035] Next, the pre-processed ceramic parts are clamped on the workbench of the five-axis machine tool through a vacuum suction cup. The vacuum suction cup can not only achieve high-precision part positioning and clamping, but also avoid the deformation and burr problems of the workpiece that may be caused by traditional mechanical clamping. This clamping method significantly improves production efficiency while ensuring processing accuracy and quality.

[0036] In the front-end processing stage, the operator needs to reasonably set the processing parameters of the five-axis linkage machine tool according to the specific structure and processing requirements of the parts. This includes adjusting the motion trajectories of the three linear motion axes (X, Y, Z) and the two rotation axes to ensure that the ball-end cutter 5 can contact the processing surface in the best posture. It is worth noting that the cutting depth of the ball-end cutter 5 should be strictly controlled to not exceed 1 / 3 of the tool radius. This setting can not only ensure processing efficiency, but also effectively reduce tool vibration and deformation.

[0037] During the ball end cutter 5 machining process, the operator needs to pay close attention to the machining conditions, including parameters such as cutting force, vibration and temperature. If any abnormality is found, the machining parameters should be adjusted or the tool should be replaced in time. Especially when machining to the tangent point with step 2, special care should be taken to ensure that the machined step 2 feature is not damaged.

[0038] After the ball-end cutter 5 is processed, the next step is to use the T-type cutter 6 to clean the root R angle 8. The operator needs to insert the T-type cutter 6 from the reverse side of the groove 4 and insert it from the through hole 3. This unique processing path avoids the tool interference problem in the traditional method and realizes efficient processing of the interfered features. When using the T-type cutter 6, a layered processing strategy is adopted, and the cutting depth of each layer does not exceed 0.1mm to ensure processing accuracy and surface quality.

[0039] In practical applications, users should pay attention to the following points: First, due to the characteristics of ceramic materials, the cutting force and feed speed should be controlled during processing to avoid cracking or edge collapse of the workpiece. Second, in order to ensure processing accuracy, the accuracy of the five-axis machine tool should be regularly checked and calibrated, especially after long-term continuous processing. Third, the service life of the T-type knife 6 should be closely monitored and replaced in time to ensure processing quality.

[0040] Furthermore, this solution can expand additional optimization solutions, such as using nano-coating technology on the ball-end cutter 5 and the T-type cutter 6 to further improve the wear resistance and service life of the cutter. In addition, a real-time monitoring system can be introduced to monitor various parameters in the processing process, such as cutting force, temperature, vibration, etc., in real time through sensors, and automatically adjust the processing parameters according to these data to achieve intelligent processing.

[0041] In production practice, this method can be widely used in fields such as semiconductors, aerospace, and medical devices that require high-precision ceramic parts. For example, in semiconductor manufacturing equipment, ceramic parts with complex shapes are often required as wafer carriers or reaction chambers. Traditional component manufacturing and post-assembly methods are difficult to guarantee the accuracy and performance of these parts. However, using this method, one-piece complex ceramic parts can be directly processed, which not only improves the accuracy and strength of the product, but also simplifies the production process and reduces costs. In actual production and processing, computer-aided manufacturing (CAM) software can be combined to optimize the processing path. Through simulation analysis, possible interference problems can be predicted and the processing strategy can be adjusted in advance. In addition, it is possible to consider introducing machine learning algorithms to automatically generate optimal processing parameters and paths by analyzing a large amount of historical processing data to further improve processing efficiency and quality.

[0042] Example 2 In this embodiment, compared with Embodiment 1, a new processing method for interference features of integrated complex ceramic parts is proposed, which realizes efficient and precise processing of complex ceramic parts by combining a multi-axis machining center, a high-precision positioning system and a specially designed tool. This method utilizes the flexibility and precision of a six-axis machining center, combined with laser-assisted machining technology, to overcome the limitations of traditional machining methods in processing interference features.

[0043] The six-axis machining center is the core equipment of this method. It adds a rotation axis to the traditional five-axis machine tool to achieve higher degrees of freedom and flexibility. The six axes include three linear motion axes (X, Y, Z) and three rotation axes (A, B, C). The additional rotation axis allows the tool to approach the workpiece at a more diverse angle, which is particularly suitable for machining one-piece ceramic parts with complex internal structures and interference features1. The positioning accuracy of the six-axis machining center can reach ±0.001mm, and the repeat positioning accuracy can reach ±0.0005mm. This high precision ensures the machining quality of complex surfaces and microstructures. To further improve the machining accuracy and efficiency, this method uses a high-precision magnetic suspension positioning system. The system uses magnetic field force to achieve contactless suspension and positioning of the workpiece, eliminating stress deformation and surface damage that may be caused by traditional mechanical fixtures. The positioning accuracy of the magnetic suspension system can reach the nanometer level, which greatly exceeds the performance of traditional vacuum chucks. In addition, the magnetic suspension system also has a fast response characteristic, which can adjust the position of the workpiece in real time and compensate for small deviations during the machining process, thereby further improving the machining accuracy.

[0044] It is worth noting that the present embodiment adopts an innovative composite tool system. The system includes a retractable spindle head that can accommodate multiple different types of tools. The spindle head can quickly switch different tools according to processing requirements without stopping for replacement, greatly improving processing efficiency. Among them, the ball-end tool 5 adopts a nano-ceramic coating with a hardness of up to 95HRA, and has excellent wear resistance and thermal stability. The T-type tool 6 adopts ultra-hard polycrystalline diamond (PCD) material, and the blade sharpness and wear resistance far exceed traditional tungsten steel tools. This composite tool system can complete roughing, finishing and super finishing in the same process, significantly reducing process conversion time and positioning errors.

[0045] In addition, in order to solve the problem of microcracks that are easy to occur in the processing of ceramic materials, this method introduces laser-assisted processing technology. While the tool is processing, a precisely controlled laser beam is placed in front of the tool to preheat the area to be processed. This preheating process can reduce the brittleness of the ceramic material and improve its plastic deformation ability, thereby reducing the generation of cracks during the processing process. The laser power and focusing parameters can be adjusted in real time according to different ceramic materials and processing requirements to ensure the best processing effect. In terms of processing strategy, this method adopts adaptive layered processing technology. By real-time monitoring of cutting force and vibration signals, the system can automatically adjust the cutting depth and feed speed of each layer to maintain the best processing state. For interfered features, the system will automatically calculate the optimal tool path and posture to ensure that the tool can approach and process these features without interference.

[0046] In addition, this method also integrates online measurement and closed-loop control systems. By installing a high-precision laser scanner on the machining center, the system can measure the geometry and size of the workpiece in real time during the machining process. The measured data is compared with the CAD model in real time. If deviations are found, the system will automatically adjust the machining parameters or compensate the tool path to ensure the final machining accuracy. This closed-loop control strategy greatly improves the reliability and consistency of machining.

[0047] This embodiment realizes efficient and precise machining of complex ceramic parts through the synergy of a six-axis machining center, a high-precision magnetic suspension positioning system, and a composite tool system. As the core equipment, the six-axis machining center has a structure including three linear motion axes (X, Y, Z) and three rotation axes (A, B, C). The main body of the machine tool is made of high-rigidity cast iron material and is stress-relieved to ensure long-term stability. The spindle uses ceramic bearings with a maximum speed of 30,000 rpm and radial runout controlled within 0.001mm. The three linear axes are driven by high-precision ball screws with a positioning accuracy of ±0.002mm / 300mm and a repeat positioning accuracy of ±0.001mm. The three rotation axes are driven by direct-drive motors with a resolution of up to 0.0001°, ensuring precise control of the tool posture during complex surface machining. The high-precision magnetic suspension positioning system consists of four sets of electromagnetic coils and high-sensitivity sensors to form a closed-loop control system. The electromagnetic coils are made of rare earth permanent magnet materials with a magnetic field strength of up to 1.2 T. The sensor uses Hall elements with a resolution of 10 nm. By precisely controlling the current, the system can achieve non-contact suspension and positioning of the workpiece in six degrees of freedom, with an adjustable suspension height range of 0.1-1 mm and a positioning accuracy of up to 50 nm. This non-contact positioning method not only eliminates mechanical stress, but also greatly improves processing accuracy.

[0048] In the composite tool system, the spindle head adopts a modular design, which can quickly replace different types of tools. The ball-end tool 5 adopts a nano-ceramic coating with a coating thickness of 2-3 μm and a hardness of 95HRA. The tool diameter ranges from 0.5mm to 10mm, and the accuracy of the tool tip arc radius is controlled at ±0.002mm. The T-type tool 6 adopts ultra-hard polycrystalline diamond (PCD) material, with a blade sharpness of up to 10 nm and a wear resistance 100 times that of ordinary cemented carbide. The effective processing part diameter single-side distance of the T-type tool 6 is 1.2mm, the thickness is 4.5mm, and the tolerance is controlled at ±0.005mm.

[0049] The laser-assisted processing system integrates a 500W fiber laser with a wavelength of 1064 nm. The laser beam is transmitted through the optical fiber, and after passing through the collimation and focusing system, a spot with a diameter of 0.05-0.5mm can be formed on the surface of the workpiece. The laser power can be continuously adjusted in the range of 0-500W, and the pulse frequency can reach 20 kHz. This precise control enables the system to adapt to different types of ceramic materials and processing requirements.

[0050] It is worth noting that the core of adaptive layered processing technology is a set of highly sensitive sensing systems and intelligent control algorithms. The sensitivity of the cutting force sensor can reach 0.1N, and the frequency response range of the vibration sensor is 0.1-10 kHz. The intelligent control algorithm is based on deep reinforcement learning, which can analyze sensor data in real time and respond within 0.1ms to adjust cutting parameters. The online measurement and closed-loop control system uses a high-precision laser scanner with a scanning accuracy of up to 1 μm and a scanning speed of up to 100,000 points / second. The system can complete a comparison and adjustment within 50 ms by comparing the scanned data and the CAD model in real time, ensuring continuous optimization of the processing process.

[0051] Through the synergy of these components, high-precision machining of complex ceramic parts can be achieved. For example, for a typical semiconductor ceramic component, the internal groove 4 can be up to 15mm deep, only 2mm wide, and the surface roughness requirement is Ra 0.2μm. It is difficult to achieve precision machining of such deep and narrow structures with traditional methods. However, this method successfully improves the machining accuracy to ±0.005mm and the surface roughness reaches Ra 0.1μm through the flexible posture adjustment of the six-axis machining center, combined with the precise cutting of the T-type knife 6 and laser-assisted preheating, which exceeds the industry standard.

[0052] The operation flow of the processing method of the interference feature of the integrated complex ceramic part of this embodiment is as follows: First, according to the requirements of the part drawing, the basic contour, step difference 2 and through hole 3 structure are processed on the one-piece complex ceramic part using conventional processing methods. This step lays the foundation for subsequent precision processing and ensures that the basic shape and key features of the part have been formed. Next, the pre-processed ceramic parts are clamped on the workbench of the six-axis machining center through a high-precision magnetic levitation positioning system. The magnetic levitation positioning system achieves contactless suspension and positioning of the workpiece by precisely controlling the electromagnetic force field. The suspension height can be adjusted in the range of 0.1-1 mm, and the positioning accuracy can reach 50 nm. This contactless clamping method not only avoids the deformation and surface damage of the workpiece that may be caused by traditional mechanical clamping, but also can adjust the position of the workpiece in real time to compensate for slight deviations during the processing process.

[0053] During the machining process, the operator needs to reasonably set the machining parameters of the six-axis machining center according to the specific structure and machining requirements of the parts. This includes adjusting the motion trajectories of the three linear motion axes (X, Y, Z) and the three rotation axes (A, B, C) to ensure that the composite tool system can contact the machining surface in the best posture. It is worth noting that the cutting depth of the ball-end cutter 5 should be strictly controlled and should not exceed 1 / 4 of the tool radius, which can not only ensure the machining efficiency, but also effectively reduce the vibration and deformation of the tool. At the same time, the laser-assisted machining system should preheat the workpiece surface 0.1-0.5 seconds before tool machining, and the laser power and focusing parameters need to be adjusted in real time according to the characteristics of the ceramic material to achieve the best preheating effect.

[0054] During the processing of ball-end cutter 5, adaptive layered processing technology automatically adjusts the cutting depth and feed rate of each layer according to the real-time monitoring of cutting force and vibration signals. For example, when a sudden increase in cutting force is detected, the system will immediately reduce the cutting depth or reduce the feed rate to prevent damage to the workpiece. This intelligent adjustment strategy can usually improve processing efficiency by 20-30%, while significantly reducing the risk of tool wear and workpiece surface defects. After completing the processing of ball-end cutter 5, the system automatically switches to T-type cutter 6 to clean the root R angle allowance. The ultra-hard polycrystalline diamond (PCD) material and precisely designed blade geometry of T-type cutter 6 enable it to effectively clear the narrow space that ball-end cutter 5 cannot reach. When using T-type cutter 6, a layered processing strategy is adopted, and the cutting depth of each layer is controlled within the range of 0.05-0.1mm to ensure processing accuracy and surface quality. Especially when processing interfered features, the system will use the flexibility of the six-axis machining center to automatically calculate the optimal tool path and posture to ensure that T-type cutter 6 can approach and process these features without interference. Throughout the entire processing process, the online measurement and closed-loop control system will continue to work. The high-precision laser scanner scans the workpiece surface in real time at a speed of 100,000 points per second, and the system compares and adjusts the scan data with the CAD model every 50ms. If the processing error is found to exceed the preset threshold (usually ±2μm), the system will immediately adjust the processing parameters or compensate the tool path. This real-time closed-loop control strategy can improve the final processing accuracy to ±0.005mm, which is far superior to traditional processing methods.

[0055] In practical applications, due to the characteristics of ceramic materials, the cutting force and feed speed should be strictly controlled during the processing, and the maximum cutting force should be controlled below 50N and the feed speed should not exceed 500mm / min. Secondly, the parameters of the laser-assisted processing system should be set according to the thermophysical properties of different ceramic materials, and a material database should be established in advance so that the system can automatically select the optimal laser power and focusing parameters. In addition, the service life of the T-type knife 6 should be closely monitored, and the tool should be checked every 1-2 hours of processing, and the blade should be replaced in time when the wear exceeds 0.02mm.

[0056] Furthermore, ultrasonic vibration-assisted technology can be introduced during the machining process. By applying high-frequency vibration of 20-60kHz to the tool or workpiece, the cutting force can be significantly reduced, and the machining accuracy and surface quality can be improved. In addition, artificial intelligence algorithms can be introduced to optimize the machining path. By analyzing a large amount of historical machining data, the optimal machining parameters and paths can be automatically generated, further improving machining efficiency and quality.

[0057] In production practice, this method can be widely used in fields that require high-precision ceramic parts, such as semiconductors, aerospace, and medical devices. For example, in semiconductor manufacturing equipment, ceramic parts with complex shapes are often required as wafer carriers or reaction chambers. These parts usually have difficult-to-process features such as deep and narrow grooves and cantilever structures. Traditional component manufacturing and post-assembly methods are difficult to guarantee the accuracy and performance of these parts. However, using this method, one-piece complex ceramic parts can be directly processed, which not only improves the accuracy and strength of the product, but also simplifies the production process and reduces costs. Actual application data show that the semiconductor ceramic parts processed by this method have a processing accuracy of key dimensions of up to ±0.003mm and a surface roughness of up to Ra 0.05μm, which is 50-100% higher than traditional methods, and the production efficiency is increased by 30-40%.

Claims

1. A method for processing complex features of an integrated ceramic part, wherein the integrated ceramic part comprises a step, a through hole and a sink structure, characterized in that: The method comprises the following steps: (1) Use five-axis machine tools for front-end processing; (2) Use a ball-end cutter to clean the sink groove; (3) Use a T-shaped cutter to cut from the reverse side of the groove to clean the R angle allowance at the root of the ball-end cutter.

2. The processing method according to claim 1, characterized in that: The five-axis linkage machine tool comprises: A workbench, wherein a vacuum suction cup is arranged on the workbench; Three mutually perpendicular linear motion axes, namely the X-axis, Y-axis and Z-axis; The spindle head is mounted on the machine frame and can move along the Z axis; Two rotating axes, one mounted on the table and the other on the spindle head; A tool system, mounted on the spindle head, with replaceable ball-end cutters and T-type cutters.

3. The processing method according to claim 2, characterized in that: Before front-end processing, the step difference and through hole of the integrated ceramic part are processed first, and the ceramic part is clamped on the five-axis machine tool using a vacuum suction cup.

4. The processing method according to claim 3, characterized in that: After clamping is completed, the vacuum suction cup fixture drives the ceramic part and the ball-end cutter to rotate and align in coordination, so that the ball-end cutter processes to the point tangent to the step difference without processing the step difference feature.

5. The processing method according to claim 4, characterized in that: A ball-end cutter is used to machine the curved surface required for the product's groove, and the cutting depth of the ball-end cutter shall not exceed 1 / 3 of the radius of the ball-end cutter.

6. The processing method according to any one of claims 1 to 5, characterized in that: The ball-end cutter is provided with an electroplating coating, and the cutter bar of the ball-end cutter is made of No. 45 steel.

7. The processing method according to any one of claims 1 to 5, characterized in that: The T-shaped knife is provided with an electroplating coating, and the knife bar of the T-shaped knife is made of tungsten steel.

8. The processing method according to claim 7, characterized in that: The single-side distance of the diameter of the effective processing part of the T-shaped knife is greater than 1.1 mm, the thickness of the effective processing part is greater than 4 mm, and the tolerance is controlled within ±0.01 mm.

9. The processing method according to claim 1, characterized in that: When using a T-type cutter, change the cutting direction from the Z direction to a direction perpendicular to the radial direction of the groove, and insert it from the through hole to clean the R angle allowance at the root of the ball-end cutter.

10. The processing method according to any one of claims 1 to 5, characterized in that: When using a T-type cutter to clean the R angle allowance at the root of the ball-end cutter, a layered processing strategy is adopted, and the cutting depth of each layer does not exceed 0.1mm to ensure processing accuracy and surface quality.

Images