Turnover device for frame double-sided marking

Abstract

The invention discloses a turnover device for frame double-face marking, and belongs to the field of semiconductor production equipment. The turnover device comprises a side plate, a turnover power mechanism, a frame track, a first spring, a clamping piece, an unlocking piece and an unlocking power piece, the turnover power mechanism and the unlocking power piece are installed on the side plate, the frame track is installed on the turnover power mechanism, the clamping piece is installed on the frame track, the first spring is installed on the clamping piece, and the unlocking piece is installed on the unlocking power piece. The unlocking piece is matched with the unlocking power piece and the clamping piece, the frame rail is used for guiding the frame, the first spring is used for applying acting force towards the frame to the clamping piece, the unlocking power piece is used for driving the unlocking piece to apply acting force away from the frame to the clamping piece, and the unlocking piece is separably matched with the unlocking power piece. The problem that in the prior art, an air cylinder of a locking frame turns over together, and consequently the pipeline path is complex during turning over is solved.

Description

Technical Field

[0001] The invention belongs to the field of semiconductor production equipment, in particular to a flipping device for double-sided marking of a frame. Background Art

[0002] In the prior art, the double-sided marking machine for semiconductor frames uses a cylinder to lock the frame and then marks or cleans the first side of the frame. When marking the second side of the frame, the frame needs to be flipped over and then marked on the second side. During the flipping process of the frame, the cylinder used to lock the frame needs to be flipped together, and the cylinder is connected to the pipeline, which leads to the problem of complex pipeline path during flipping. Summary of the invention

[0003] Purpose of the invention: to provide a flipping device for double-sided marking of a frame, which locks the frame through a first spring. When flipping, the first spring flips with the frame. The first spring does not require an external pipeline, which greatly simplifies the structure of the flipping device.

[0004] The technical solution of the present invention is: the flip device for double-sided marking of a frame comprises: a side plate, a flip power mechanism, a frame track, a first spring, a clamping member, an unlocking member and an unlocking power member.

[0005] The flipping power mechanism and the unlocking power member are respectively installed on the side plates, the frame track is installed on the flipping power mechanism, the clamping member is installed on the frame track, the first spring is installed on the clamping member, and the unlocking member cooperates with the unlocking power member and the clamping member.

[0006] The frame rail is used to guide the frame, and the first spring is used to apply a force on the clamping member toward the frame.

[0007] The unlocking power member is used to drive the unlocking member to exert a force on the clamping member away from the frame, and the unlocking member and the unlocking power member can be separated and matched.

[0008] In a further embodiment, the frame rail further includes: an unlocking sliding cavity, and the unlocking member is disposed in the unlocking sliding cavity.

[0009] The unlocking member is provided with a clamping groove and an unlocking surface, and the unlocking power member is used to drive the unlocking member to slide in the unlocking sliding cavity, so that the clamping groove or the unlocking surface moves to a position that cooperates with the clamping member.

[0010] When the clamping groove moves to a position matching with the clamping member, the first spring drives the clamping member to move to a position for clamping the frame.

[0011] When the unlocking surface moves to a position cooperating with the clamping member, the unlocking member drives the clamping member to move to a position separated from the frame.

[0012] In a further embodiment, the flipping device further comprises: a bearing, which is mounted on one side of the clamping member, and the bearing cooperates with the clamping groove or unlocking surface of the unlocking member, and the matching resistance between the unlocking member and the clamping member can be reduced by the bearing.

[0013] In a further embodiment, the clamping member includes: a clamping portion, a connecting portion and a mounting portion.

[0014] The connecting portion connects the clamping portion and the mounting portion, the clamping portion is arranged on one side of the frame rail, the mounting portion is arranged on the other side of the frame rail, and the first spring is installed between the frame rail and the mounting portion.

[0015] In a further embodiment, the flipping device comprises: a first clamping member and a second clamping member.

[0016] The clamping portion of the first clamping member is disposed at an upper position of the frame rail, and the clamping member of the second clamping member is disposed at a lower position of the frame rail.

[0017] The clamping part of the second clamping member is provided with an insertion rod, which is inserted into the frame. The insertion rod can further reduce the frame movement rate.

[0018] In a further embodiment, the flipping device further includes: a second spring, a fixed block is provided on one side of the frame track, a sliding block is provided on one side of the unlocking member, and the second spring is arranged between the fixed block and the sliding block.

[0019] The unlocking power piece cooperates with a side of the sliding block away from the fixed block.

[0020] When the unlocking power member moves to a predetermined position separated from the sliding block, the second spring drives the clamping groove of the unlocking member to move to a position matched with the clamping member through the sliding block.

[0021] When the unlocking power member drives the sliding block to move to a predetermined position in a direction close to the fixed block, the sliding block drives the unlocking surface of the unlocking member to move to a position cooperating with the clamping member, and the second spring can realize automatic resetting of the unlocking member.

[0022] In a further embodiment, the flipping power mechanism includes: a flipping power source, a flipping power shaft and a synchronous belt mechanism.

[0023] The two synchronous belt mechanisms are respectively installed on the two side plates, the flip power shaft is connected to the two synchronous belt mechanisms, the flip power source is connected to the flip power shaft, and the frame track is installed on the synchronous belt mechanism.

[0024] The flipping power source drives two synchronous belt mechanisms to work via a flipping power shaft. Driving two synchronous belt mechanisms to work via one flipping power shaft improves the working synchronization of the two synchronous belt mechanisms, thereby improving the flipping stability of the frame track.

[0025] In a further embodiment, the flipping device further includes: a width-adjusting screw mechanism and a width-adjusting guide rail mechanism.

[0026] At least one of the side plates is installed on a width-adjusting screw mechanism and a width-adjusting guide rail mechanism, and the width-adjusting screw mechanism is used to drive the side plate to move.

[0027] In a further embodiment, the two side plates are mounted on the width-adjusting screw mechanism and the width-adjusting guide rail mechanism.

[0028] The screw rod of the width-adjusting screw rod mechanism is a bidirectional screw rod.

[0029] In a further embodiment, the flipping device further comprises: a flipping movement mechanism; The width-adjusting screw mechanism and the width-adjusting guide rail mechanism are installed on the flipping and moving mechanism, and the flipping and moving mechanism can drive the flipping device to move as a whole.

[0030] The beneficial effects of the present invention are as follows: the present application utilizes the detachable cooperation of the unlocking member and the unlocking power member to enable the spring and the clamping member to cooperate to lock the frame when the frame is locked. When flipping, only the spring, the clamping member and the unlocking member need to flip together with the frame, and the first spring does not require an external pipeline, which greatly simplifies the structure of the flipping device and solves the problem that the cylinder of the locking frame in the prior art flips together, resulting in a complicated pipeline path when flipping. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 It is a schematic diagram of an embodiment of the flipping device of the present invention in which the width adjustment screw mechanism and the flipping movement mechanism are not provided.

[0032] Figure 2 It is a schematic diagram of an embodiment of the cooperation of the first spring, the clamping member, the unlocking member, the unlocking power member, the second spring, the fixed block and the sliding block of the present invention.

[0033] Figure 3 It is a schematic diagram from another angle of an embodiment of the cooperation of the first spring, the clamping member, the unlocking member, the unlocking power member, the second spring, the fixed block and the sliding block of the present invention.

[0034] Figure 4 It is a schematic diagram of an embodiment of the present invention in which the clamping member is arranged in a frame rail.

[0035] Figure 5 It is a schematic diagram of an embodiment of the flipping device of the present invention provided with a width-adjusting screw mechanism and a flipping movement mechanism.

[0036] The reference numerals shown in the figure are: side panel 1, flipping power mechanism 2, synchronous belt mechanism 21, flipping power shaft 22, flipping power source 23, frame rail 3, unlocking sliding chamber 31, first clamping member 41, bearing 411, second clamping member 42, clamping portion 421, connecting portion 422, mounting portion 423, insert rod 424, unlocking power member 5, unlocking member 6, fixed block 61, sliding block 62, second spring 63, clamping groove 64, unlocking surface 65, first spring 7, width adjustment screw mechanism 8, width adjustment guide rail mechanism 9, flipping moving mechanism 10. DETAILED DESCRIPTION

[0037] In the following description, a large number of specific details are provided to provide a more thorough understanding of the present invention. However, it is apparent to those skilled in the art that the present invention can be implemented without one or more of these details. In other examples, in order to avoid confusion with the present invention, some technical features well known in the art are not described.

[0038] The present application discloses a flipping device for double-sided marking of a frame, which is installed on a marking machine and can cooperate with the marking device, cleaning device, frame conveying device and control equipment such as PLC of the marking machine to realize automatic marking. The frame is locked by a first spring, and the first spring flips with the frame during flipping. The first spring does not require an external pipeline, which greatly simplifies the structure of the flipping device.

[0039] The flipping device for double-sided marking of a frame comprises: a side plate 1, a flipping power mechanism 2, a frame rail 3, a first spring 7, a clamping member, an unlocking member 6 and an unlocking power member 5.

[0040] The flipping power mechanism 2 and the unlocking power member 5 are respectively installed on the side plate 1, the frame track 3 is installed on the flipping power mechanism 2, the clamping member is installed on the frame track 3, the first spring 7 is installed on the clamping member, and the unlocking member 6 cooperates with the unlocking power member 5 and the clamping member.

[0041] The frame rail 3 is used to guide the frame, and the first spring 7 is used to apply a force to the clamping member toward the frame.

[0042] The unlocking power member 5 is used to drive the unlocking member 6 to exert a force on the clamping member to move away from the frame. The unlocking member 6 and the unlocking power member 5 can be separated and matched, wherein the unlocking power member 5 can be Figure 2 The cylinder shown drives the lever to move, or a power source such as a motor can drive the lever to move.

[0043] Regarding the cooperation among the frame rail 3, the first spring 7, the clamping member, the unlocking member 6 and the unlocking power member 5, as shown in FIG. Figure 2 , 3The frame rail 3 shown in FIG. 4 further includes an unlocking sliding cavity 31 , in which the unlocking member 6 is disposed.

[0044] The unlocking member 6 is provided with a clamping groove 64 and an unlocking surface 65. The unlocking power member 5 is used to drive the unlocking member 6 to slide in the unlocking sliding cavity 31, so that the clamping groove 64 or the unlocking surface 65 moves to a position that cooperates with the clamping member, wherein the clamping groove 64 and the unlocking surface 65 form a concave-convex structure, and the clamping member is driven by the height difference of the concave-convex structure. A slope and rounded corner structure are also provided between the clamping groove 64 and the unlocking surface 65 to ensure the cooperation between the clamping member and the unlocking member 6.

[0045] When the clamping groove 64 moves to a position matching with the clamping member, the first spring 7 drives the clamping member to move to a position for clamping the frame.

[0046] When the unlocking surface 65 moves to a position cooperating with the clamping member, the unlocking member 6 drives the clamping member to move to a position separated from the frame.

[0047] In a further embodiment, the flipping device further includes: a second spring 63 , a fixed block 61 is provided on one side of the frame rail 3 , a sliding block 62 is provided on one side of the unlocking member 6 , and the second spring 63 is arranged between the fixed block 61 and the sliding block 62 .

[0048] The unlocking power member 5 cooperates with a side of the sliding block 62 away from the fixing block 61 .

[0049] When the unlocking power member 5 moves to a predetermined position separated from the sliding block 62 , the second spring 63 drives the clamping groove 64 of the unlocking member 6 to move to a position matched with the clamping member through the sliding block 62 .

[0050] When the unlocking power member 5 drives the sliding block 62 to move to a predetermined position in a direction close to the fixed block 61 , the sliding block 62 drives the unlocking surface 65 of the unlocking member 6 to move to a position that cooperates with the clamping member.

[0051] When the unlocking power member 5 is separated from the sliding block 62, the second spring 63 will drive the clamping groove 64 of the unlocking member 6 to move to a position cooperating with the clamping member through the sliding block 62. At this time, the distance between the unlocking power member 5 and the sliding block 62 needs to be designed according to the conditions for the flipping power mechanism 2 to drive the frame rail 3 to flip, so as to meet the conditions for the flipping power mechanism 2 to drive the frame rail 3 to flip.

[0052] In a further embodiment, the flipping device also includes: a bearing 411, which is installed on one side of the clamping member, and the bearing 411 cooperates with the clamping groove 64 or the unlocking surface 65 of the unlocking member 6. The bearing 411 can reduce the matching resistance between the unlocking member 6 and the clamping member.

[0053] Regarding clamping parts, such as Figure 3The clamping member shown includes a clamping portion 421 , a connecting portion 422 and a mounting portion 423 .

[0054] The connecting portion 422 connects the clamping portion 421 and the mounting portion 423 . The clamping portion 421 is disposed on one side of the frame rail 3 , and the mounting portion 423 is disposed on the other side of the frame rail 3 . The first spring 7 is installed between the frame rail 3 and the mounting portion 423 .

[0055] like Figure 3 The turning device shown includes a first clamping member 41 and a second clamping member 42 .

[0056] The clamping portion 421 of the first clamping member 41 is disposed at an upper position of the frame rail 3 , and the clamping member of the second clamping member 42 is disposed at a lower position of the frame rail 3 .

[0057] The clamping portion 421 of the second clamping member 42 is provided with an inserting rod 424 which is inserted into the frame.

[0058] like Figure 2 The clamping portion 421 of the first clamping member 41 shown is a planar structure that cooperates with the frame, and the clamping portion 421 of the second clamping member 42 is a planar structure with an insertion rod 424. The planar structure can apply a clamping force to the frame, and the insertion rod 424 can laterally limit the frame to further reduce the frame movement rate.

[0059] exist Figure 5 In the illustrated embodiment, the flipping device further comprises: a width-adjusting screw mechanism 8 and a width-adjusting guide rail mechanism 9 .

[0060] At least one side plate 1 is installed on a width-adjusting screw mechanism 8 and a width-adjusting guide rail mechanism 9 , and the width-adjusting screw mechanism 8 is used to drive the side plate 1 to move.

[0061] In a further embodiment, the two side plates 1 are mounted on the width-adjusting screw mechanism 8 and the width-adjusting guide rail mechanism 9 .

[0062] The screw rod of the width adjustment screw mechanism 8 is a bidirectional screw rod. Figure 5 The width-adjusting screw mechanism 8 shown is a manual width-adjusting mechanism. In other embodiments, a motor may be added to make it an automatic width-adjusting mechanism.

[0063] The flipping device further includes: a flipping movement mechanism 10 .

[0064] The width adjustment screw mechanism 8 and the width adjustment guide rail mechanism 9 are installed on the flip movement mechanism 10. Figure 5 The flipping moving mechanism 10 shown includes an electric cylinder moving mechanism to drive the flipping device as a whole to move in the axial direction of the flipping power shaft 22. The flipping moving mechanism 10 can also include two electric cylinder moving mechanisms to drive the flipping device as a whole to move in two directions.

[0065] Regarding the turning power mechanism 2, Figure 1 and 5 The turning power mechanism 2 shown includes: a turning power source 23 , a turning power shaft 22 and a synchronous belt mechanism 21 .

[0066] Two synchronous belt mechanisms 21 are respectively installed on the two side plates 1 , the turning power shaft 22 is connected to the two synchronous belt mechanisms 21 , the turning power source 23 is connected to the turning power shaft 22 , and the frame rail 3 is installed on the synchronous belt mechanism 21 .

[0067] The turning power source 23 drives the two synchronous belt mechanisms 21 to work via the turning power shaft 22 .

[0068] like Figure 1 The tilting device shown also includes positioning cylinders. Two positioning cylinders are respectively installed on the two side plates 1 , and the positioning cylinders cooperate with the ends of the frame rails 3 .

[0069] The flip power shaft 22 is provided with a planar side wall so that the flip power shaft 22 can drive the synchronous belt mechanism 21 to work while making the synchronous belt mechanism 21 move along the axial direction of the flip power shaft 22. The flip power shaft 22 can also be a spline shaft.

[0070] Working method: Before use, the distance between the two side panels 1 is adjusted by the width-adjusting screw mechanism 8 and the width-adjusting guide rail mechanism 9 so that the distance between the two frame rails 3 matches the frame. The unlocking power member 5 drives the sliding block 62 to move to a predetermined position in the direction close to the fixed block 61, so that the sliding block 62 drives the unlocking surface 65 of the unlocking member 6 to move to a position that matches the clamping member, and then the frame conveying device of the marking machine conveys the frame to between the two frame rails 3.

[0071] Then, when the unlocking power member 5 moves to a predetermined position separated from the sliding block 62, the second spring 63 drives the clamping groove 64 of the unlocking member 6 to move to a position cooperating with the clamping member through the sliding block 62. At this time, the first spring 7 drives the clamping member to move to a position for clamping the frame to clamp the frame.

[0072] Then the flipping moving mechanism 10 drives the side panel 1, the frame rail 3 and the frame to move to the bottom of the marking device. After the marking device marks one side of the frame, the flipping power source 23 drives the two synchronous belt mechanisms 21 to work through the flipping power shaft 22, thereby driving the frame rail 3 and the frame to flip. Then the marking device marks the other side of the frame. Then the flipping moving mechanism 10 drives the side panel 1, the frame rail 3 and the frame to move to a position that cooperates with the frame conveying device.

[0073] Finally, the unlocking power member 5 drives the sliding block 62 to move to a predetermined position in the direction close to the fixed block 61, so that the sliding block 62 drives the unlocking surface 65 of the unlocking member 6 to move to a position cooperating with the clamping member, so that the clamping member is separated from the frame, and the frame conveying device can take out the frame in the flipping device.

[0074] When the frame moves to the turning device corresponding to the cleaning device, the above steps are repeated to clean both sides of the frame.

[0075] As described above, although the present invention has been shown and described with reference to specific preferred embodiments, it should not be construed as limiting the present invention itself. Various changes may be made to it in form and detail without departing from the spirit and scope of the present invention as defined in the appended claims.

Claims

1. A turning device for double-sided marking of a frame, characterized in that: include: Side plate, turning power mechanism, frame rail, first spring, clamping member, unlocking member and unlocking power member; The flipping power mechanism and the unlocking power member are respectively mounted on the side plates, the frame track is mounted on the flipping power mechanism, the clamping member is mounted on the frame track, the first spring is mounted on the clamping member, and the unlocking member cooperates with the unlocking power member and the clamping member; The frame rail is used to guide the frame, and the first spring is used to apply a force on the clamping member toward the frame; The unlocking power member is used to drive the unlocking member to exert a force on the clamping member away from the frame, and the unlocking member and the unlocking power member can be separated and matched.

2. The turning device for double-sided marking of a frame according to claim 1, characterized in that: The frame rail further comprises: an unlocking sliding cavity, wherein the unlocking member is disposed in the unlocking sliding cavity; The unlocking member is provided with a clamping groove and an unlocking surface, and the unlocking power member is used to drive the unlocking member to slide in the unlocking sliding cavity, so that the clamping groove or the unlocking surface moves to a position matching with the clamping member; When the clamping groove moves to a position matching with the clamping member, the first spring drives the clamping member to move to a position for clamping the frame; When the unlocking surface moves to a position cooperating with the clamping member, the unlocking member drives the clamping member to move to a position separated from the frame.

3. The turning device for double-sided marking of a frame according to claim 2, characterized in that: Also includes: A bearing is mounted on one side of the clamping member, and the bearing cooperates with the clamping groove or the unlocking surface of the unlocking member.

4. The turning device for double-sided marking of a frame according to claim 1, characterized in that: The clamping member comprises: a clamping portion, a connecting portion and a mounting portion; The connecting portion connects the clamping portion and the mounting portion, the clamping portion is arranged on one side of the frame rail, the mounting portion is arranged on the other side of the frame rail, and the first spring is installed between the frame rail and the mounting portion.

5. The turning device for double-sided marking of a frame according to claim 4, characterized in that: include: a first clamping member and a second clamping member; The clamping portion of the first clamping member is disposed at an upper position of the frame rail, and the clamping member of the second clamping member is disposed at a lower position of the frame rail; The clamping part of the second clamping member is provided with an insertion rod which is inserted into the frame.

6. The turning device for double-sided marking of a frame according to claim 2, characterized in that: Also includes: a second spring, wherein a fixed block is provided on one side of the frame rail, a sliding block is provided on one side of the unlocking member, and the second spring is arranged between the fixed block and the sliding block; The unlocking power member cooperates with a side of the sliding block away from the fixed block; When the unlocking power member moves to a predetermined position separated from the sliding block, the second spring drives the clamping groove of the unlocking member to move to a position matched with the clamping member through the sliding block; When the unlocking power member drives the sliding block to move to a predetermined position in a direction close to the fixed block, the sliding block drives the unlocking surface of the unlocking member to move to a position that cooperates with the clamping member.

7. The turning device for double-sided marking of a frame according to claim 1, characterized in that: The turning power mechanism comprises: a turning power source, a turning power shaft and a synchronous belt mechanism; The two synchronous belt mechanisms are respectively installed on the two side plates, the flip power shaft is connected to the two synchronous belt mechanisms, the flip power source is connected to the flip power shaft, and the frame track is installed on the synchronous belt mechanism; The turning power source drives the two synchronous belt mechanisms to work via the turning power shaft.

8. The turning device for double-sided marking of a frame according to claim 1, characterized in that: It also includes: a width-adjusting screw mechanism and a width-adjusting guide rail mechanism; At least one of the side plates is installed on a width-adjusting screw mechanism and a width-adjusting guide rail mechanism, and the width-adjusting screw mechanism is used to drive the side plate to move.

9. The turning device for double-sided marking of a frame according to claim 8, characterized in that: The two side plates are mounted on the width-adjusting screw mechanism and the width-adjusting guide rail mechanism; The screw rod of the width-adjusting screw rod mechanism is a bidirectional screw rod.

10. The turning device for double-sided marking of a frame according to claim 8, characterized in that: Also includes: Flip moving mechanism; The width-adjusting lead screw mechanism and the width-adjusting guide rail mechanism are installed on the flipping and moving mechanism.

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