Strip-shaped multi-filament scanning-coil-free hot electron gun

Abstract

The invention discloses a strip-shaped multi-filament scanning-coil-free hot electron gun, and belongs to the technical field of electron guns, the strip-shaped multi-filament scanning-coil-free hot electron gun comprises an installation box, an installation groove is formed in the installation box, an emission through groove is formed in the side face of the installation box, the emission through groove is communicated with the installation groove, an installation substrate is arranged in the installation groove, and a first filament base and a second filament base are arranged on the installation substrate; the second filament base is arranged below the first filament base, a filament power source is arranged in the installation substrate, a filament system is arranged on the first filament base, one end of the filament system is connected with one end of the filament power source, the other end of the filament system is connected with the other end of the filament power source, and a high-voltage power source is arranged on the installation box and connected with the filament system. The device has the advantages that the membrane material can be bombarded by adopting the electron beam without gas filling or independent focusing system and scanning system, the structure is simple, and the cost is reduced.

Description

Technical Field

[0001] The invention relates to the technical field of electron guns, in particular to a strip-shaped multi-filament scanning coil-free thermal electron gun. Background Art

[0002] The electron gun can generate, accelerate and converge high-energy density electron beams. By bombarding the film material with this electron beam, on the one hand, static charges can be generated on the surface of the film material. This static charge can enhance the adsorption strength between the film material and the evaporation drum, thereby enhancing the heat conduction from the film material to the evaporation drum, cooling the coiled material, and achieving a faster evaporation speed. On the other hand, bombarding the film material with this electron beam can further activate the surface of the film material and improve the adhesion of the film material. Therefore, the electron gun becomes an indispensable processing component in the production process of the film material.

[0003] The traditional cold cathode emission electron curtain is produced by gas bombarding the cathode to generate work function, which causes electrons to escape from the cathode surface. It has low vacuum requirements and can work as long as the vacuum degree of the electron curtain is higher than 1Pa. Power acceleration is achieved by adjusting the gas supply. The electron curtain has no accelerating electric field and filament voltage, only a main high-voltage power supply, and the gas is controlled by solenoid valves and flow meters. The control structure and control principle are simple, and no additional vacuum equipment is required, which greatly reduces the equipment cost. However, the cathode of the cold cathode electron gun is mostly made of aluminum alloy, which has poor high-temperature performance and is easily oxidized on the surface, which inhibits the escape of electrons. During operation, it is affected by the different time and degree of oxidation of the cathode surface. The linear relationship between the gas control amount and the electron gun power is not clear. The application control relies heavily on human thinking and judgment to intervene in the control. The energy of the cold cathode electron curtain is weaker than that of the hot cathode, and the membrane surface treatment effect is weak.

[0004] In a hot cathode emission electron gun, under high vacuum conditions, the tungsten filament is heated to the temperature of escaping electrons through a filament heating power supply, and the electron escape work is obtained, so that the electrons leave the cathode; the electrons are accelerated under the action of a strong electric field of about 1000V, and the filament heating and acceleration voltage have a smooth control over the electron escape, a clear linear proportional relationship, a high degree of automated control, fewer human intervention factors, and the electron gun works smoothly. However, compared with a cold cathode electron gun, a hot cathode electron gun has higher requirements for vacuum. The working vacuum of the electron gun must reach 5E-2Pa or above, and an additional independent vacuum pump is required. In addition to the main high voltage, two more power supplies are required, which has high requirements for the equipment. The equipment structure is complex, and the cathode assembly structure is even more complex. The components are all high-temperature resistant metals, which increases the equipment and operation and maintenance costs.

[0005] In view of the above-mentioned related technologies, it is urgently necessary to design and develop a strip-shaped multi-filament thermal electron gun without scanning coil, which does not require gas to be filled in the electron gun chamber, does not require an independent focusing system to focus the electron beam into a beam, and does not require a scanning system to control the scanning path of the electron beam on the sample surface. In a low-pressure environment, less energy is required to complete the bombardment of the membrane material with an electron beam. It has a simple structure, reduces costs, and can be widely used in the membrane material production process. Summary of the invention

[0006] In order to achieve bombardment of film materials with electron beams without filling gas and without independent focusing system and scanning system, thereby reducing costs, the present application provides a strip-shaped multi-filament non-scanning coil thermal electron gun.

[0007] The present application provides a strip-shaped multi-filament scanning coil-free thermal electron gun adopts the following technical solution: A strip-shaped multi-filament scanning coil-free thermal electron gun comprises an installation box, wherein an installation slot is provided in the installation box, an emission through slot is provided on the side of the installation box, the emission through slot is communicated with the installation slot, an installation base plate is arranged in the installation slot, a filament holder 1 and a filament holder 2 are arranged on the installation base plate, the filament holder 2 is arranged below the filament holder 1, a filament power supply is arranged in the installation base plate, a filament system is arranged on the filament holder 1, one end of the filament system is connected to one end of the filament power supply, and the other end of the filament system is connected to the other end of the filament power supply, and a high-voltage power supply is arranged on the installation box, and the high-voltage power supply is connected to the filament system.

[0008] By adopting the above technical scheme, an installation slot is provided in the installation box, an emission slot is provided on the side of the installation box, the emission slot is connected with the installation slot, an installation substrate is provided in the installation slot, a filament holder one is provided on the installation substrate, a filament holder two is provided on the installation substrate, the filament holder two is provided below the filament holder one, a filament power supply is provided in the installation substrate, a filament system is provided on the filament holder one, one end of the filament system is connected with one end of the filament power supply, and the other end of the filament system is connected with the other end of the filament power supply, a high-voltage power supply is provided on the installation box, and the high-voltage power supply is connected with the filament system, under high vacuum conditions, the cathode is heated by the filament system at the rear to obtain electron escape work function, so that the electrons are separated from the cathode, and the electrons fly to the anode at high speed under the action of the high-voltage accelerating electric field of the high-voltage power supply to form an electron beam, and the electron gun does not need to be filled with gas, and does not need an independent focusing system and scanning system, so as to complete the bombardment of the film material with an electron beam, and has a simple structure and reduces costs.

[0009] Preferably, a sliding hole is provided on the top surface of the mounting box, a sliding groove is provided on the top surface of the mounting substrate, the sliding groove is communicated with the sliding hole, a sliding rod is provided in the sliding hole, the sliding rod is vertically slidably provided in the sliding groove, one end of the filament system close to the sliding rod passes through the filament holder and the mounting substrate and is then inserted into the sliding rod, an interface is provided on the bottom surface of the sliding rod, the filament system is connected to the interface, and the interface can be inserted into the filament power supply.

[0010] By adopting the above technical scheme, a sliding hole is provided on the top surface of the installation box, a sliding groove is provided on the top surface of the installation substrate, the sliding groove is connected with the sliding hole, a sliding rod is provided in the sliding hole, the sliding rod is vertically slidably provided in the sliding groove, one end of the filament system close to the sliding rod passes through a filament seat and the installation substrate and is inserted into the sliding rod, an interface is provided on the bottom surface of the sliding rod, the filament system is connected to the interface, and the interface can be inserted into the filament power supply, when it is necessary to use an electron gun to bombard the film material, the sliding rod is slid to connect the filament system to the filament power supply to realize power supply to the filament system, and when it is not necessary to use an electron gun to bombard the film material, the sliding rod can be slid away from the filament power supply to release the power supply to the filament system, so as to facilitate the control of the working state of the electron gun.

[0011] Preferably, a sliding groove is provided on the side of the installation box, and the sliding groove is connected to the installation groove. A sliding hole is provided on the side wall of the sliding groove, and the sliding hole is connected to the sliding groove. A snap-on groove 1 and a snap-on groove 2 are provided on the side of the sliding rod, and the snap-on groove 2 is located below the snap-on groove 1. A snap-on mechanism is provided on the installation box, and the snap-on mechanism includes a snap-on rod at one end which can be inserted into the snap-on groove 1 or the snap-on groove 2, and the snap-on rod is horizontally slidably arranged in the sliding groove.

[0012] By adopting the above technical scheme, a sliding groove is provided on the side of the installation box, the sliding groove is connected with the installation groove, a sliding hole is provided on the side wall of the sliding groove, the sliding hole is connected with the sliding groove, a clamping groove 1 and a clamping groove 2 are provided on the side of the sliding rod, the clamping groove 2 is located below the clamping groove 1, and the clamping rod is horizontally slidably arranged in the sliding groove. When the sliding rod drives the filament system to be inserted into the filament power supply, the sliding clamping rod is slid so that the clamping rod is inserted into the clamping groove 1 to prevent the sliding rod from sliding out of the filament power supply under external force, thereby improving the working stability of the electron gun. When the sliding rod drives the filament system to be separated from the filament power supply, the sliding clamping rod is slid so that the clamping rod is inserted into the clamping groove 2 to prevent the sliding rod from sliding into the filament power supply under external force, thereby affecting the normal working of the electron gun.

[0013] Preferably, a limiting groove is provided on the side wall of the sliding groove, and the clamping mechanism includes a limiting block arranged on the clamping rod and a spring arranged in the limiting groove, the limiting block is horizontally slidably arranged in the limiting groove, one end of the spring abuts against the side wall of the limiting groove away from the mounting substrate, and the other end of the spring abuts against the side of the limiting block away from the mounting substrate.

[0014] By adopting the above technical scheme, a limiting groove is opened on the side wall of the sliding groove, the limiting block is arranged on the clamping rod, the limiting block is horizontally slidably arranged in the limiting groove, and the spring is arranged in the limiting groove. One end of the spring abuts against the side wall of the limiting groove away from the mounting substrate, and the other end of the spring abuts against the side of the limiting block away from the mounting substrate. The spring gives elastic force to the limiting block to approach the sliding rod, and the limiting block drives the clamping rod to approach the clamping groove one or the clamping groove two, thereby improving the stability of the clamping between the clamping rod and the sliding rod.

[0015] Preferably, a lifting mechanism is arranged next to the installation box, and the lifting mechanism includes a base plate, a mounting vertical plate arranged on the base plate, a motor 1 arranged on the mounting vertical plate, a screw 1 fixed on the output shaft of the motor 1, and a slide rod vertically slidably arranged on the mounting vertical plate. A transfer groove is opened on the side surface of the mounting vertical plate, the screw 1 is rotatably arranged in the transfer groove, the slide rod is sleeved on the screw 1, and the slide rod is vertically slidably arranged in the transfer groove. An adapter seat is arranged on the installation box, and the adapter seat is hinged to the slide rod.

[0016] By adopting the above technical scheme, the mounting vertical plate is arranged on the bottom plate, a transfer groove is opened on the side of the mounting vertical plate, a motor is arranged on the mounting vertical plate, a screw is fixed on the output shaft of the motor, a screw is rotatably arranged in the transfer groove, a sliding rod is sleeved on the screw, and the sliding rod is vertically slidably arranged in the transfer groove, an transfer seat is arranged on the mounting box, and the transfer seat is hinged to the sliding rod. When the height of the mounting box needs to be adjusted, the screw is driven by the motor to rotate forward or reversely, and the screw drives the mounting box to move up or down through the sliding rod, so as to facilitate the adjustment of the height of the mounting box.

[0017] Preferably, a sliding groove is provided on the top surface of the base plate, and a supporting mechanism is arranged on the base plate, wherein the supporting mechanism comprises a sliding block slidably arranged in the sliding groove, a connecting seat 1 hinged on the sliding block, a rotating tube 1 rotatably arranged in the connecting seat 1, a stud threadedly sleeved in the rotating tube 1, a rotating tube 2 sleeved on the stud, and a connecting seat 2 hinged on the installation box, and the rotating tube 2 is rotatably arranged in the connecting seat 2.

[0018] By adopting the above technical scheme, a sliding groove is opened on the top surface of the bottom plate, the slider is slidably arranged in the sliding groove, the connecting seat 1 is hinged on the slider, the rotating tube 1 is rotatably arranged in the connecting seat 1, the stud is threadedly sleeved in the rotating tube 1, the rotating tube 2 is sleeved on the stud, the connecting seat 2 is hinged on the installation box, and the rotating tube 2 is rotatably arranged in the connecting seat 2. In the process of adjusting the height of the installation box, the height of the rotating tube 1, the rotating tube 2 and the stud can be adjusted by controlling the rotation of the rotating tube 1, the rotating tube 2 and the stud to adapt to the height of the installation box. The slider, the connecting seat 1, the connecting seat 2, the rotating tube 1, the rotating tube 2 and the stud provide certain support for the installation box, which is beneficial to the stability of the overall working state of the installation box.

[0019] Preferably, the supporting mechanism includes a second motor arranged in the base plate and a second screw fixed on the output shaft of the second motor, the second screw is rotatably arranged in the sliding groove, and the slider is threadedly sleeved on the second screw.

[0020] By adopting the above technical solution, motor 2 is arranged in the base plate, screw 2 is fixed on the output shaft of motor 2, screw 2 is rotatably arranged in the sliding groove, and the slider is threadedly sleeved on screw 2. By driving screw 2 to rotate forward or reversely by motor 2, the slider can be regulated to slide in the sliding groove, and the slider can drive connecting seat 1 to slide, thereby facilitating more stable support for the installation box.

[0021] Preferably, a moving mechanism is arranged on the bottom plate, and the moving mechanism comprises a supporting screw threadedly sleeved in the bottom plate and a universal pulley for sliding the bottom plate, and the universal pulley is arranged on the supporting screw.

[0022] By adopting the above technical solution, the support screw is threadedly sleeved in the bottom plate, and the universal pulley is arranged on the support screw, which is convenient for sliding the bottom plate and thus for moving the installation box.

[0023] In summary, the present application includes at least one of the following beneficial technical effects: 1. An installation slot is provided in the installation box, an emission slot is provided on the side of the installation box, the emission slot is connected with the installation slot, an installation base plate is provided in the installation slot, a filament holder 1 is provided on the installation base plate, a filament holder 2 is provided on the installation base plate, the filament holder 2 is provided below the filament holder 1, a filament power supply is provided in the installation base plate, a filament system is provided on the filament holder 1, one end of the filament system is connected to one end of the filament power supply, and the other end of the filament system is connected to the other end of the filament power supply, a high-voltage power supply is provided on the installation box, and the high-voltage power supply is connected to the filament system, under high vacuum conditions, the cathode is heated by the filament system at the rear to obtain electron work function, so that the electrons are separated from the cathode, and the electrons fly to the anode at high speed under the action of the high-voltage accelerating electric field of the high-voltage power supply to form an electron beam, the electron gun does not need to be filled with gas, and does not need an independent focusing system and scanning system, and can complete the bombardment of the film material with an electron beam, on the one hand, the design avoids the influence of the cold cathode electron gun filled with gas on the vacuum, on the other hand, it does not need an independent focusing system and scanning system, the structure is simple, and the cost is reduced; 2. A sliding hole is provided on the top surface of the installation box, a sliding groove is provided on the top surface of the installation substrate, the sliding groove is connected with the sliding hole, a sliding rod is provided in the sliding hole, the sliding rod is vertically slidably arranged in the sliding groove, one end of the filament system close to the sliding rod passes through the filament seat and the installation substrate and is inserted into the sliding rod, an interface is provided on the bottom surface of the sliding rod, the filament system is connected with the interface, and the interface can be inserted into the filament power supply, when it is necessary to use an electron gun to bombard the film material, the sliding rod is slid to connect the filament system with the filament power supply to realize power supply to the filament system, and when it is not necessary to use an electron gun to bombard the film material, the sliding rod can be slid away from the filament power supply to release the power supply to the filament system, so as to facilitate the control of the working state of the electron gun; 3. A sliding groove is provided on the side of the installation box, the sliding groove is connected with the installation groove, a sliding hole is provided on the side wall of the sliding groove, the sliding hole is connected with the sliding groove, a clamping groove 1 and a clamping groove 2 are provided on the side of the sliding rod, the clamping groove 2 is located below the clamping groove 1, and the clamping rod is horizontally slidably arranged in the sliding groove. When the sliding rod drives the filament system to be inserted into the filament power supply, the sliding clamping rod is slid so that the clamping rod is inserted into the clamping groove 1 to prevent the sliding rod from sliding out of the filament power supply under external force, thereby improving the working stability of the electron gun. When the sliding rod drives the filament system to separate from the filament power supply, the sliding clamping rod is slid so that the clamping rod is inserted into the clamping groove 2 to prevent the sliding rod from sliding into the filament power supply under external force, thereby affecting the normal working of the electron gun, thereby being beneficial to the stable working of the electron gun. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 It is a schematic diagram of the overall structure of a strip-shaped multi-filament scanning coil-free thermal electron gun in an embodiment of the present application.

[0025] Figure 2 It is a schematic diagram of the internal structure of the placement box in the embodiment of the present application.

[0026] Figure 3 yes Figure 2 A partial enlarged view of point A in the middle.

[0027] Figure 4 It is a schematic diagram of the internal structure of the base plate in the embodiment of the present application.

[0028] Description of reference numerals: 1. Installation box; 11. Adapter; 12. Installation slot; 13. Emission slot; 14. Installation base plate; 141. Filament holder 1; 142. Filament holder 2; 143. Sliding slot; 15. Filament power supply; 16. Filament system; 17. High voltage power supply; 18. Sliding hole; 19. Sliding rod; 191. Interface; 192. Snap-on slot 1; 193. Snap-on slot 2; 110. Sliding slot; 111. Sliding hole; 112. Limiting slot; 2. Snap-on mechanism; 21. Card-joining rod; 22, limit block; 23, spring; 3, lifting mechanism; 31, bottom plate; 311, sliding groove; 32, mounting vertical plate; 321, adapter groove; 33, motor 1; 34, sliding rod; 4, supporting mechanism; 41, motor 2; 42, screw 2; 43, slider; 44, connecting seat 1; 45, rotating tube 1; 46, stud; 47, rotating tube 2; 48, connecting seat 2; 5, moving mechanism; 51, supporting column; 52, supporting screw; 53, universal pulley. DETAILED DESCRIPTION

[0029] The following is combined with Figure 1-4 This application is described in further detail.

[0030] The present application embodiment discloses a strip-shaped multi-filament non-scanning coil thermal electron gun. Figure 1 and Figure 2 As shown, the strip-shaped multi-filament non-scanning coil thermal electron gun comprises a mounting box 1 , a clamping mechanism 2 , a lifting mechanism 3 , a supporting mechanism 4 and a moving mechanism 5 .

[0031] Reference Figure 1 As shown, the lifting mechanism 3 includes a base plate 31, a mounting vertical plate 32, a motor 33, a screw rod 1 and a slide rod 34. The base plate 31 is horizontally arranged, and the mounting vertical plate 32 is welded and fixed on the top surface of the base plate 31. The length direction of the mounting vertical plate 32 is perpendicular to the top surface of the base plate 31. A transfer groove 321 is opened on the side surface of the mounting vertical plate 32, and the length direction of the transfer groove 321 is the same as the length direction of the mounting vertical plate 32.

[0032] Reference Figure 1As shown, motor 1 33 is fixed on the top surface of the mounting vertical plate 32, screw 1 is welded and fixed on the output shaft of motor 1 33, screw 1 is rotatably set in the adapter groove 321, the length direction of screw 1 is the same as the length direction of the adapter groove 321, the slide rod 34 is threadedly sleeved on the screw 1, the slide rod 34 is vertically slidably set in the adapter groove 321, the length direction of the slide rod 34 is parallel to the ground, and the length direction of the slide rod 34 is perpendicular to the length direction of the mounting vertical plate 32.

[0033] Reference Figure 1 and Figure 2 As shown, an adapter seat 11 is provided on the installation box 1, and the adapter seat 11 is hinged with the slide rod 34. When the height of the installation box 1 needs to be adjusted, the motor 33 drives the screw rod 1 to rotate forward or reversely, and the screw rod 1 drives the installation box 1 to move up or down through the slide rod 34, so as to facilitate the adjustment of the height of the installation box 1.

[0034] Reference Figure 1 and Figure 2 As shown, the length direction of the installation box 1 is parallel to the ground, and the length direction of the installation box 1 is perpendicular to the length direction of the slide bar 34. A mounting groove 12 is provided in the installation box 1, and the length direction of the installation groove 12 is the same as the length direction of the installation box 1. A launching groove 13 is provided on the side of the installation box 1, and the length direction of the launching groove 13 is the same as the length direction of the installation groove 12, and the launching groove 13 is connected to the installation groove 12.

[0035] Reference Figure 1 and Figure 2 As shown, a mounting substrate 14 is arranged in the mounting groove 12, and the length direction of the mounting substrate 14 is the same as the length direction of the mounting box 1. A filament holder 1 141 and a filament holder 2 142 are arranged on the mounting substrate 14, and the length direction of the filament holder 1 141 is the same as the length direction of the mounting box 1. The filament holder 2 142 is arranged below the filament holder 1 141, and the length direction of the filament holder 2 142 is the same as the length direction of the filament holder 1 141.

[0036] Reference Figure 1 and Figure 2 As shown, a filament power supply 15 is arranged in the mounting substrate 14, and there are 8 filament power supplies 15, which are evenly distributed at equal distances in the mounting substrate 14; a filament system 16 is arranged on the filament holder 141, and there are 8 filament systems 16, which correspond one to one with the 8 filament power supplies 15, one end of the filament system 16 is connected to one end of the filament power supply 15, and the other end of the filament system 16 is connected to the other end of the filament power supply 15; a high-voltage power supply 17 is arranged on the mounting box 1, and the high-voltage power supply 17 is connected to the filament system 16.

[0037] Reference Figure 1 and Figure 2As shown, under high vacuum conditions, the cathode is heated by the filament system 16 at the rear to obtain electron work function, so that the electrons are separated from the cathode. Under the action of the high-voltage accelerating electric field of the high-voltage power supply 17, the electrons fly to the anode at high speed to form an electron beam. The electron gun does not need to be filled with gas, nor does it require an independent focusing system and scanning system to complete the bombardment of the film material with an electron beam. On the one hand, this design avoids the influence of the cold cathode electron gun filled with gas on the vacuum, and on the other hand, it does not require an independent focusing system and scanning system, and has a simple structure and reduces costs.

[0038] Reference Figure 2 and Figure 3 As shown, a sliding hole 18 is opened on the top surface of the mounting box 1, and there are 8 sliding holes 18, and the 8 sliding holes 18 correspond one-to-one to the 8 filament power supplies 15; a sliding groove 143 is opened on the top surface of the mounting substrate 14, and there are 8 sliding grooves 143, and the 8 sliding grooves 143 correspond one-to-one to the 8 filament power supplies 15, and the 8 sliding grooves 143 correspond one-to-one to the 8 sliding holes 18, and the sliding grooves 143 are connected with the sliding holes 18.

[0039] Reference Figure 2 and Figure 3 As shown, a sliding rod 19 is arranged in the sliding hole 18, and the sliding rod 19 is vertically slidably arranged in the sliding groove 143. The end of the filament system 16 close to the sliding rod 19 passes through the filament seat 141 and the mounting substrate 14 and is inserted into the sliding rod 19. An interface 191 is arranged on the bottom surface of the sliding rod 19. The filament system 16 is connected to the interface 191, and the interface 191 can be inserted into the filament power supply 15.

[0040] Reference Figure 2 and Figure 3 As shown, a sliding groove 110 is provided on the side of the installation box 1, and there are 8 sliding grooves 110, and the 8 sliding grooves 110 correspond one-to-one to the 8 filament power supplies 15. A sliding hole 111 is provided on the side wall of the sliding groove 143, and the sliding hole 111 corresponds one-to-one to the sliding groove 110, and the sliding hole 111 is connected to the sliding groove 110. A clamping groove 192 and a clamping groove 2 193 are provided on the side of the sliding rod 19, and the clamping groove 2 193 is located below the clamping groove 192.

[0041] Reference Figure 2 and Figure 3 As shown, there are 8 groups of clamping mechanisms 2, and the 8 groups of clamping mechanisms 2 correspond one-to-one to the 8 filament power supplies 15. The clamping mechanisms 2 include clamping rods 21, limit blocks 22 and springs 23. The 8 clamping rods 21 correspond one-to-one to the 8 sliding grooves 110, and the clamping rods 21 are horizontally slidably arranged in the sliding grooves 110.

[0042] Reference Figure 2 and Figure 3As shown, a limiting groove 112 is provided on the side wall of the sliding groove 110, the axial centerline direction of the limiting groove 112 coincides with the axial centerline direction of the sliding groove 110, a limiting block 22 is arranged on the clamping rod 21, and a spring 23 is arranged in the limiting groove 112, one end of the spring 23 abuts against the side wall of the limiting groove 112 away from the mounting substrate 14, and the other end of the spring 23 abuts against the side of the limiting block 22 away from the mounting substrate 14.

[0043] Reference Figure 2 and Figure 3 As shown, when the sliding rod drives the filament system 16 to be inserted into the filament power supply 15, the sliding clamping rod 21 is inserted into the clamping groove 192 to prevent the sliding rod 19 from sliding out of the filament power supply 15 due to external force, thereby improving the stability of the electron gun. When the sliding rod drives the filament system 16 to be separated from the filament power supply 15, the sliding clamping rod 21 is inserted into the clamping groove 2 193 to prevent the sliding rod 19 from sliding into the filament power supply 15 due to external force, thereby affecting the normal operation of the electron gun, which is beneficial to the stable operation of the electron gun.

[0044] Reference Figure 1 and Figure 4 As shown, a sliding groove 311 is provided on the top surface of the base plate 31, and the length direction of the sliding groove 311 is the same as the length direction of the sliding rod 34. The supporting mechanism 4 includes a second motor 41, a second screw rod 42, a slider 43, a connecting seat 1 44, a rotating tube 1 45, a stud 46, a second rotating tube 47 and a second connecting seat 48. The second motor 41 is arranged in the base plate 31, the second screw rod 42 is fixed on the output shaft of the second motor 41, the second screw rod 42 is rotatably arranged in the sliding groove 311, the length direction of the second screw rod 42 is the same as the length direction of the sliding groove 311, and the slider 43 is threadedly sleeved on the second screw rod 42.

[0045] Reference Figure 1 and Figure 4 As shown, a connecting seat 44 is hinged on a slider 43, a rotating tube 45 is rotatably disposed in the connecting seat 44, a stud 46 is threadedly sleeved in the rotating tube 45, and the axial centerline direction of the stud 46 coincides with the axial centerline direction of the rotating tube 45, and a rotating tube 47 is sleeved on the stud 46, and the axial centerline direction of the rotating tube 47 coincides with the axial centerline direction of the stud 46.

[0046] Reference Figure 1 and Figure 4 As shown, the rotating tube 47 is rotatably arranged in the connecting seat 48, and the connecting seat 48 is hinged on the installation box 1. The motor 41 drives the screw 42 to rotate forward or reversely, and the slider 43 can be adjusted to slide in the sliding groove 311. The slider 43 can drive the connecting seat 44 to slide, so as to facilitate more stable support of the installation box 1.

[0047] Reference Figure 1As shown, the moving mechanism 5 includes a support column 51, a support screw 52 and a universal pulley 53. There are four support screws 52, and the four support screws 52 are all threadedly sleeved in the base plate 31. The four support screws 52 are respectively located at the four corners of the base plate 31. There are four universal pulleys 53, and the four universal pulleys 53 correspond to the four support screws 52 one by one. The universal pulley 53 is arranged on the support screws 52.

[0048] Reference Figure 1 As shown, there are four support columns 51, and the four support columns 51 are all welded and fixed on the bottom surface of the base plate 31. The four support columns 51 are respectively located at the four corners of the base plate 31. When the installation box 1 needs to be moved, the support screw 52 is rotated to adjust the height of the base plate 31 so that the support columns 51 are away from the ground, and the universal pulley 53 is slid to facilitate the movement of the installation box 1. When the installation box 1 needs to be positioned, the support screw 52 is rotated to adjust the height of the base plate 31 so that the support column 51 is close to the ground, and the support screw 52 is continued to be rotated so that the rotating support screw 52 drives the universal pulley 53 to separate from the bottom surface, which is convenient for positioning the installation box 1.

[0049] The implementation principle of a strip-shaped multi-filament non-scanning coil thermal electron gun in the embodiment of the present application is: Under high vacuum conditions, the cathode is heated by the filament system 16 at the rear to obtain electron work function, so that the electrons are separated from the cathode. Under the action of the high-voltage accelerating electric field of the high-voltage power supply 17, the electrons fly to the anode at high speed to form an electron beam. The electron gun does not need to be filled with gas, nor does it require an independent focusing system and scanning system to complete the bombardment of the film material with an electron beam. On the one hand, this design avoids the influence of the cold cathode electron gun filled with gas on the vacuum, and on the other hand, it does not require an independent focusing system and scanning system, and has a simple structure and reduces costs.

[0050] The above are all preferred embodiments of the present application, and the protection scope of the present application is not limited thereto. Therefore, any equivalent changes made according to the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A strip-shaped multi-filament non-scanning coil thermal electron gun, characterized in that: The invention comprises an installation box (1), wherein an installation slot (12) is provided in the installation box (1), an emission slot (13) is provided on the side of the installation box (1), the emission slot (13) is communicated with the installation slot (12), an installation base plate (14) is provided in the installation slot (12), a filament holder 1 (141) and a filament holder 2 (142) are provided on the installation base plate (14), and the filament holder 2 (142) is provided under the filament holder 1 (141). A filament power supply (15) is arranged in the mounting substrate (14), a filament system (16) is arranged on the filament holder (141), one end of the filament system (16) is connected to one end of the filament power supply (15), and the other end of the filament system (16) is connected to the other end of the filament power supply (15), and a high-voltage power supply (17) is arranged on the mounting box (1), and the high-voltage power supply (17) is connected to the filament system (16).

2. A strip-shaped multi-filament non-scanning coil thermal electron gun according to claim 1, characterized in that: A sliding hole (18) is provided on the top surface of the installation box (1), and a sliding groove (143) is provided on the top surface of the installation substrate (14). The sliding groove (143) is communicated with the sliding hole (18). A sliding rod (19) is provided in the sliding hole (18). The sliding rod (19) is vertically slidably arranged in the sliding groove (143). An end of the filament system (16) close to the sliding rod (19) passes through the filament seat (141) and the installation substrate (14) and is then inserted into the sliding rod (19). An interface (191) is provided on the bottom surface of the sliding rod (19). The filament system (16) is connected to the interface (191), and the interface (191) can be inserted into the filament power supply (15).

3. The strip-shaped multi-filament non-scanning coil thermal electron gun according to claim 2, characterized in that: A sliding groove (110) is provided on the side of the installation box (1), and the sliding groove (110) is connected to the installation groove (12). A sliding hole (111) is provided on the side wall of the sliding groove (143), and the sliding hole (111) is connected to the sliding groove (110). A clamping groove 1 (192) and a clamping groove 2 (193) are provided on the side of the sliding rod (19), and the clamping groove 2 (193) is located below the clamping groove 1 (192). A clamping mechanism (2) is provided on the installation box (1), and the clamping mechanism (2) includes a clamping rod (21) one end of which can be inserted into the clamping groove 1 (192) or the clamping groove 2 (193), and the clamping rod (21) is horizontally slidably arranged in the sliding groove (110).

4. The strip-shaped multi-filament non-scanning coil thermal electron gun according to claim 3, characterized in that: A limiting groove (112) is provided on the side wall of the sliding groove (110); the clamping mechanism (2) comprises a limiting block (22) arranged on the clamping rod (21) and a spring (23) arranged in the limiting groove (112); the limiting block (22) is horizontally slidably arranged in the limiting groove (112); one end of the spring (23) abuts against the side wall of the limiting groove (112) away from the mounting substrate (14); and the other end of the spring (23) abuts against the side surface of the limiting block (22) away from the mounting substrate (14).

5. The strip-shaped multi-filament non-scanning coil thermionic gun according to claim 1, characterized in that: A lifting mechanism (3) is arranged next to the installation box (1), and the lifting mechanism (3) includes a bottom plate (31), a mounting vertical plate (32) arranged on the bottom plate (31), a motor (33) arranged on the mounting vertical plate (32), a screw (31) fixed on the output shaft of the motor (33), and a slide bar (34) vertically slidably arranged on the mounting vertical plate (32), a transfer groove (321) is opened on the side surface of the mounting vertical plate (32), the screw (31) is rotatably arranged in the transfer groove (321), the slide bar (34) is sleeved on the screw (31), and the slide bar (34) is vertically slidably arranged in the transfer groove (321), and a transfer seat (11) is arranged on the installation box (1), and the transfer seat (11) is hinged with the slide bar (34).

6. The strip-shaped multi-filament non-scanning coil thermal electron gun according to claim 5, characterized in that: A sliding groove (311) is provided on the top surface of the bottom plate (31), and a supporting mechanism (4) is provided on the bottom plate (31), wherein the supporting mechanism (4) comprises a sliding block (43) slidingly arranged in the sliding groove (311), a connecting seat (44) hinged on the sliding block (43), a rotating tube (45) rotatably arranged in the connecting seat (44), a stud (46) threadedly sleeved in the rotating tube (45), a rotating tube (47) sleeved on the stud (46), and a connecting seat (48) hinged on the installation box (1), wherein the rotating tube (47) is rotatably arranged in the connecting seat (48).

7. The strip-shaped multi-filament non-scanning coil thermal electron gun according to claim 6, characterized in that: The support mechanism (4) comprises a second motor (41) arranged in the base plate (31) and a second screw (42) fixed on the output shaft of the second motor (41); the second screw (42) is rotatably arranged in the sliding groove (311), and the sliding block (43) is threadedly sleeved on the second screw (42).

8. The strip-shaped multi-filament non-scanning coil thermionic gun according to claim 6, characterized in that: A moving mechanism (5) is arranged on the bottom plate (31), and the moving mechanism (5) comprises a supporting screw strip (52) threadedly sleeved in the bottom plate (31) and a universal pulley (53) for sliding the bottom plate (31), and the universal pulley (53) is arranged on the supporting screw strip (52).

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