Electric energy self-circulation system, device and method for testing semiconductor device

Abstract

The invention relates to an electric energy self-circulation system, device and method for testing a semiconductor device, the test system comprises a first filter circuit, a first conversion circuit, a transformation circuit, a second conversion circuit and a second filter circuit, the input alternating current of an external power supply is subjected to primary filtering, rectification, transformation, inversion and secondary filtering in sequence, and finally returns to the external power supply; the input electric energy of the system is equal to the output electric energy of the system, a reactive electric energy self-circulation system is formed, a circuit of the test system comprises a to-be-tested component, and the device further comprises a control circuit so as to simulate the operating environment of the actual working condition of the component and test the to-be-tested component. The test system is an electric energy self-circulation system, no other extra power consumption is generated except for loss generated by components, and energy consumption is effectively saved; the testing device can simulate the actual operation condition of the to-be-tested component and test the qualified condition of the component.

Description

Technical Field

[0001] The present invention relates to the field of power electronics technology, and more specifically to an electric energy self-circulation system, device and method for testing semiconductor devices. Background Art

[0002] Semiconductor testing is an important step in the semiconductor design, production, packaging and testing process. It is a process of using specific instruments to detect semiconductor devices to identify defects, verify whether the devices meet the design goals, and separate good and defective products.

[0003] Semiconductor testing can ensure that the produced chips meet the required yield rate, reduce costs, and reduce waste, while providing effective test data and improving design and process; however, the semiconductor testing equipment in the domestic market is basically based on static testing or dynamic testing of a single semiconductor. The existing semiconductor testing equipment cannot meet the actual application conditions of semiconductors, and thus cannot effectively intercept defective products, which can easily lead to defective products flowing into the downstream industrial chain, causing greater economic losses. Summary of the invention

[0004] The technical problem to be solved by the present invention is that the existing semiconductor testing devices cannot meet the actual application conditions of semiconductors, and thus the effect of selecting and intercepting defective products is poor. In view of the above-mentioned defects of the prior art, a power self-circulation system, device and method for testing semiconductor devices are provided. It can not only simulate the actual application conditions of semiconductors, but also use a closed-loop power self-circulation system to maximize the energy saving.

[0005] The technical solution adopted by the present invention to solve its technical problem is:

[0006] A power self-circulation system for testing semiconductor devices is constructed, wherein the system comprises a first filter circuit, the input end of the first filter circuit is connected to an external power supply, and is used to perform a first filter on an input alternating current provided by the external power supply, so that the input alternating current is converted into a first alternating current;

[0007] a first conversion circuit, wherein an input end of the first conversion circuit is connected to an output end of the first filter circuit and is used to rectify the first alternating current to convert the first alternating current into direct current;

[0008] a second conversion circuit, wherein an input end of the second conversion circuit is connected to an output end of the first conversion circuit and is used to invert the direct current so as to convert the direct current into a second alternating current;

[0009] a second filter circuit, wherein an input end of the second filter circuit is connected to an output end of the second conversion circuit and is used for performing a second filtering on the second alternating current so as to convert the second current into an output alternating current;

[0010] The output end of the second filter circuit is connected to the input end of the external power supply or the input end of the first conversion circuit; and the output AC current is returned to the external power supply to form an electric energy self-circulation system;

[0011] The first filter circuit, the first conversion circuit, the second conversion circuit and the second filter circuit are electrically connected in sequence and are respectively located on one or more circuit boards.

[0012] Furthermore, the input alternating current of the system is equal to the output alternating current.

[0013] Further, when a voltage conversion circuit is included, the voltage conversion circuit is provided between the output end of the first conversion circuit and the input end of the second conversion circuit, and is used to adjust the input voltage of the second conversion circuit so that the second conversion circuit operates at different input voltages;

[0014] When the voltage transformation circuit is not included, the output end of the first conversion circuit is connected to the input end of the second conversion circuit.

[0015] Furthermore, one or more of the first conversion circuit, the voltage transformation circuit and the second conversion circuit includes components to be tested.

[0016] Furthermore, it also includes a control circuit, which is used to control the first conversion circuit, the voltage transformation circuit and the second conversion circuit to simulate the operating environment of the actual working conditions of the component to be tested.

[0017] Furthermore, the input alternating current includes at least one phase number, and the phase numbers of the first conversion circuit and the second conversion circuit respectively correspond to the phase numbers of the input alternating current.

[0018] Furthermore, it also includes a fuse, which is located between the external power supply and the input end of the first filter circuit, and the fuse is used to safely isolate the system from the external power supply. A device for testing semiconductor devices is also provided, which includes a shell, a test component and a heat dissipation component, the shell includes a chassis and an upper cover, and the chassis is provided with a cavity; the test component is arranged in the cavity and is used to test the components to be tested; one end of the heat dissipation component is located in the cavity, and the other end is connected to the outside of the shell, and is used to dissipate heat from the test component; the upper cover is detachably fixedly connected to the chassis, and is used to protect the test component and the heat dissipation component;

[0019] Furthermore, the test component includes a first filter circuit, a first conversion circuit, a voltage transformer circuit, a second conversion circuit, a second filter circuit and a control circuit; the first filter circuit, the first conversion circuit, the voltage transformer circuit, the second conversion circuit, the second filter circuit and the control circuit are respectively packaged on a PCB board or the cavity.

[0020] The present invention also provides a method for testing a semiconductor device, comprising the following steps:

[0021] S1, installing the components to be tested in one or more of the first conversion circuit, the voltage transformation circuit and the second conversion circuit;

[0022] S2, controlling the first conversion circuit, the voltage transformation circuit and the second conversion circuit through a control module to simulate the operating environment of the actual working condition of the component to be tested;

[0023] S3: Test the components to be tested and obtain test results.

[0024] The beneficial effects of the present invention are:

[0025] The present invention relates to an electric energy self-circulation system, device and method for testing semiconductor devices. The test system includes a first filtering circuit, a first conversion circuit, a transformer circuit, a second conversion circuit and a second filtering circuit. The input alternating current of an external power supply is filtered, rectified, transformed, inverted and filtered twice in sequence, and finally returns to the external power supply. The input electric energy of the system is equal to the output electric energy of the system, forming a reactive electric energy self-circulation system. The circuit of the test system includes components to be tested, and the device also includes a control circuit, so that the test system can simulate the operating environment of the actual working conditions of the components to achieve the test of the components to be tested. The test system of the present invention is an electric energy self-circulation system. In addition to the loss generated by the components themselves, there is no other additional power consumption, which effectively saves energy consumption; the present invention proposes to electrically connect each circuit module, and respectively locate them on one or more circuit boards, and encapsulate the circuit boards in the same cavity, effectively improving the degree of modularization and making the structure simpler; the test device of the present invention can effectively simulate the actual operating conditions of the components to be tested and test the qualified conditions of the components. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the present invention will be further described below in conjunction with the accompanying drawings and embodiments. The drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other system architecture drawings or circuit topology drawings can be obtained based on these drawings without creative work:

[0027] Figure 1It is a structural diagram of an electric energy self-circulation system for testing a semiconductor device in one embodiment of the present invention, which does not include a voltage conversion circuit and in which the first filter circuit is not in the circulation;

[0028] Figure 2 It is a structural diagram of an electric energy self-circulation system for testing a semiconductor device in one embodiment of the present invention, which does not include a voltage transformation circuit and in which a first filter circuit is in the circulation;

[0029] Figure 3 It is a structural diagram of an electric energy self-circulation system for testing a semiconductor device in one embodiment of the present invention, including a voltage conversion circuit and a first filter circuit not in the circulation;

[0030] Figure 4 It is a structural diagram of an electric energy self-circulation system including a voltage conversion circuit and a first filter circuit in a cycle for testing a semiconductor device in one embodiment of the present invention;

[0031] Figure 5 is an overall structural diagram of a semiconductor device testing device in one embodiment of the present invention;

[0032] Figure 6 is an exploded view of a semiconductor device testing apparatus according to an embodiment of the present invention;

[0033] Figure 7 is a flow chart of a method for testing a semiconductor device in one embodiment of the present invention;

[0034] Figure 8 is a circuit diagram of a single-phase first conversion circuit in one embodiment of the present invention;

[0035] Fig. 9 is a circuit diagram of a three-phase first conversion circuit in one embodiment of the present invention;

[0036] Fig.10 is a circuit diagram of a voltage conversion circuit in one embodiment of the present invention;

[0037] Fig.11 is a circuit diagram of a single-phase second conversion circuit in one embodiment of the present invention;

[0038] Fig.12 4 is a circuit diagram of a three-phase second conversion circuit in one embodiment of the present invention.

[0039] Explanation of reference numerals: 10, first conversion circuit; 20, transformer circuit; 30, second conversion circuit; 40, second filter circuit; 50, first filter circuit; 60, fuse; 1, test component; 2, housing; 21, upper cover; 22, chassis; 3, heat dissipation component. DETAILED DESCRIPTION

[0040] In order to make the purpose, technical solution and advantages of the present application more clearly understood, the present application is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0041] Please refer to the attached Figure 1-4 The present invention proposes an electric energy self-circulation system for testing semiconductor devices, comprising a first filter circuit 50, a first conversion circuit 10, a transformer circuit 20, a second conversion circuit 30 and a second filter circuit 40. The input end of the first filter circuit 50 is connected to an external power supply, and is used to perform a first filtering on the system input alternating current provided by the external power supply, so that the input alternating current is converted into a first alternating current; the input end of the first conversion circuit 10 is connected to the output end of the first filter circuit 50, and is used to rectify the first alternating current, so that the first alternating current is converted into direct current; the input end of the second conversion circuit 30 is connected to the output end of the first conversion circuit 10, and is used to invert the direct current, so that the direct current is converted into a second alternating current; the input end of the second filter circuit 40 is connected to the output end of the second conversion circuit 30, and is used to perform a second filtering on the second alternating current, so that the second current is converted into the system output alternating current; the output end of the second filter circuit 40 is connected to the input end of the external power supply or the input end of the first conversion circuit 10, so that the system output alternating current returns to the external power supply, so as to form an electric energy self-circulation system.

[0042] In this embodiment, an external power supply provides system input AC power, an input end of the first filter circuit 50 is connected to the external power supply, and is used to perform a first filter on the input AC power so that the input AC power is converted into a first AC power. In a specific embodiment, the first filter circuit 50 is a first EMC (Electromagnetic Compatibility) filter circuit, and the electromagnetic compatibility filter circuit is used to filter out or attenuate interference signals to eliminate electromagnetic interference; the input end of the first conversion circuit 10 is connected to the output end of the first filter circuit 50, and is used to rectify the first AC power so that the first AC power is converted into DC power. In a specific embodiment, the first conversion circuit 10 adopts PFC (Power Conversion Factor). The power factor correction (PFC) rectifier circuit controls the input current waveform to synchronize the input voltage waveform, increase the proportion of effective power, and realize the conversion of AC alternating current into DC direct current; the input end of the second conversion circuit 30 is connected to the output end of the first conversion circuit 10, and is used to invert the DC power so that the DC power is converted into a second alternating current. In a specific embodiment, the second conversion circuit 30 is used to realize the conversion of DC direct current into AC alternating current; the input end of the second filter circuit 40 is connected to the output end of the second conversion circuit 30, and is used to perform a second filtering on the second alternating current so that the second current is converted into the system output alternating current. In a specific embodiment, the second filter circuit 40 also adopts EMC (Electromagnetic Compatibility electromagnetic compatibility) filter circuit; the output end of the second filter circuit 40 is connected to the input end of the external power supply or the input end of the first conversion circuit 10; so that the system outputs AC current back to the external power supply; to form an electric energy self-circulation system, in the electric energy conversion process within the system, except for the energy loss generated by each circuit itself, there is no other additional power consumption, the input electric energy of the system is equal to the output electric energy of the system, therefore, the electric energy self-circulation system is a circuit system of self-circulation of electric energy without additional power consumption; the semiconductor components to be tested are installed in the circuit included in the system, and the system is controlled by the control module so that the system can simulate the actual working environment of the components to be tested, and the system is operated to implement the test of the components to be tested. If there is no error in the operation, the components to be tested are qualified, otherwise, if the system runs with an error, the components to be tested are unqualified.

[0043] The test system of the present invention is a reactive electric energy self-circulation system. During the electric energy conversion process within the test system, there is no other additional power consumption except the energy loss generated within each circuit itself. The input electric energy of the system is equal to the output electric energy of the system, forming a closed loop of electric energy, which effectively saves energy consumption. The test system of the present invention can simulate the operating environment of the actual working conditions of the components to be tested, test the qualification of the components while running the system, and timely and effectively screen out defective semiconductor products to prevent them from flowing into the downstream industrial chain and causing greater economic losses.

[0044] Please refer to Figure 1-Figure 10 When the transformer circuit 20 is included, the transformer circuit 20 is arranged between the output end of the first conversion circuit 10 and the input end of the second conversion circuit 30, and is used to adjust the input voltage of the second conversion circuit 30 so that the second conversion circuit 30 operates under different input voltages; when the transformer circuit 20 is not included, the output end of the first conversion circuit 10 is connected to the input end of the second conversion circuit 30.

[0045] In specific implementation: the voltage conversion circuit 20 adopts a DCDC circuit, and the DCDC circuit can convert the input DC voltage into the required DC voltage. In this system, the voltage conversion circuit 20 is used to adjust the DC output voltage of the first conversion circuit 10 to the input voltage required by the second conversion circuit 30, so that the second conversion circuit 30 operates under different input voltages; the voltage conversion circuit 20 can be used or not. When the voltage conversion circuit 20 is included, the voltage conversion circuit 20 is arranged between the output end of the first conversion circuit 10 and the input end of the second conversion circuit 30. At this time, the output end of the first conversion circuit 10 is connected to the input end of the voltage conversion circuit 20. The output end of the transformer circuit 20 is connected to the input end of the second conversion circuit 30. The system inputs AC alternating current, and the ACDC alternating current is converted into DC through the first conversion circuit 10, and then the DCDC direct current voltage conversion is realized through the transformer circuit 20. Finally, the DCAC direct current is converted into AC through the second conversion circuit 30, and AC power is finally obtained to form a closed power cycle. When the transformer circuit 20 is not included, the output end of the first conversion circuit 10 is directly connected to the input end of the second conversion circuit 30, and the DCDC direct current voltage conversion is no longer realized through the transformer circuit 20. In a specific embodiment, the transformer circuit 20 can be used but not limited to the following Fig.10 The Buck step-down transformer circuit 20, Boost step-up transformer circuit 20 and full-bridge circuit shown in the figure, the finished products corresponding to different types of transformer circuits 20 are easy to obtain, so they are not described in detail here.

[0046] Please refer to Figure 1-Figure 4 , further comprising a fuse 60, which is located between the external power supply and the input end of the first filter circuit 50, and is used to safely isolate the system from the external power supply.

[0047] In specific implementation: the fuse 60 is arranged at the input port of the system, that is, between the external power supply and the input end of the first filter circuit 50. Its function is that when a short circuit or failure occurs inside the system, the fuse 60 will be disconnected in time, so that the system can be physically and safely isolated from the external power supply in time to ensure the personal safety of the maintenance personnel.

[0048] Please refer to Figure 1-Figure 4 The output end of the second filter circuit 40 is connected to the input end of the external power supply or the input end of the first conversion circuit 10; so that the system outputs AC current back to the external power supply; to form an electric energy self-circulation system; the input electric energy of the system is equal to the output electric energy of the system.

[0049] In specific implementation: when the output end of the second filter circuit 40 is connected to the input end of the external power supply, the system input current of the external power supply passes through the first filter circuit 50, the first conversion circuit 10, the transformer circuit 20, the second conversion circuit 30, and the second filter circuit 40 in sequence to obtain the system output current, and the system output current flows back to the external power supply; when the output end of the second filter circuit 40 is connected to the input end of the first conversion circuit 10, the system output current output by the second filter circuit 40 will pass through the first filter circuit 50 and then return to the external power supply; the output end of the second filter circuit 40 is connected before the input end of the first conversion circuit 10 to form an energy cycle.

[0050] Please refer to Figure 1-Figure 4 One or more of the first conversion circuit 10, the voltage transformation circuit 20 and the second conversion circuit 30 include components to be tested; the control circuit controls the first conversion circuit 10, the voltage transformation circuit 20 and the second conversion circuit 30 so that the electric energy self-circulation system can simulate the actual operating environment of the semiconductor components.

[0051] In specific implementation: at least one or more of the first conversion circuit 10, the voltage conversion circuit 20 and the second conversion circuit 30 include components to be tested. In a specific embodiment, the components to be tested include semiconductor components, such as IGBT (Insulate-Gate Bipolar Transist) and MOSFET (Metal-Oxide-Semiconductor Field-Effect Transistor) made of semiconductor materials such as SiC silicon carbide and GaN gallium nitride. The control circuit is electrically connected to the first conversion circuit 10, the voltage conversion circuit 20 and the second conversion circuit 30 and controls them respectively, so that the electric energy self-circulation system can simulate the operating environment of the actual working conditions of the semiconductor components to be tested. The actual working conditions of the semiconductor components refer to the parameters loaded by the semiconductor components when the semiconductor components are used in actual electronic products. The operation of the components to be tested in the system corresponds to the operation of the components in the electronic products. The operation of the system realizes the test of the reliability and other performance indicators of the components to be tested. When the system reports an error during operation, it means that the component product to be tested is unqualified.

[0052] Please refer to Figure 1-Figure 12 The system input AC power includes at least one phase number, and the phase numbers of the first conversion circuit 10 and the second conversion circuit 30 correspond to the phase numbers of the input AC power respectively.

[0053] In specific implementation: the system input AC power can be but not limited to single-phase AC power and three-phase AC power, which is determined according to specific needs. The phase numbers of the first conversion circuit 10 and the second conversion circuit 30 correspond to the phase numbers of the input AC power. When the system input AC power is single-phase AC power, the first conversion circuit 10 should adopt a single-phase first conversion circuit 10, and the second conversion circuit 30 should also adopt a single-phase second conversion circuit 30. In a specific embodiment, the single-phase first conversion circuit 10 can adopt but not limited to a single-phase interleaved parallel PFC circuit and Figure 8 The single-phase totem PFC circuit shown in FIG. 1 is a single-phase second conversion circuit 30, which is not limited to the following: Fig.11 When the system input AC power is three-phase AC power, the first conversion circuit 10 should be a three-phase first conversion circuit 10, and the second conversion circuit 30 should also adopt a three-phase second conversion circuit 30. In a specific embodiment, the three-phase first conversion circuit 10 can adopt but is not limited to the Vienna PFC circuit and Fig. 9 The three-phase totem PFC circuit shown; the three-phase second conversion circuit 30 can be used but not limited to Fig.12 The circuit shown; finished products corresponding to different types of first conversion circuits 10 and second conversion circuits 30 are relatively easy to obtain, so they are not described here in detail.

[0054] Please refer to Figure 5-Figure 6 In one embodiment of the present invention, a semiconductor device testing device comprises a housing 2, a test assembly 1 and a heat dissipation assembly 3, wherein the test assembly 1 comprises a PCB board, and a first filter circuit 50, a first conversion circuit 10, a voltage transformation circuit 20, a second conversion circuit 30, a second filter circuit 40 and a control circuit are respectively packaged on the PCB board; a cavity is provided in a chassis 22; the housing 2 comprises a chassis 22 and an upper cover 21, the test assembly 1 is arranged in the cavity, and is used to test components to be tested; one end of the heat dissipation assembly 3 is located in the cavity, and the other end is connected to the outside of the housing 2, and is used to dissipate heat for the test assembly 1; the upper cover 21 is detachably fixedly connected to the chassis 22, and is used to protect the test assembly 1 and the heat dissipation assembly 3.

[0055] In the specific implementation: it includes a shell 2, a test component 1 and a heat dissipation component 3. The first filter circuit 50, the first conversion circuit 10, the transformer circuit 20, the second conversion circuit 30, the second filter circuit 40 and the control circuit can be integrated and packaged as separate devices first, and then packaged on a PCB (Printed Circuit Board) to achieve electrical connection, or directly packaged on a PCB to form a test component 1; the shell 2 includes a chassis 22 and an upper cover 21, the chassis 22 is provided with a cavity, and the test component 1 is installed in the cavity of the chassis 22; one end of the heat dissipation component 3 is located in the cavity, and the other end is connected to the outside of the shell 2, and is used to dissipate the heat of the test component 1. In a specific embodiment, the heat dissipation component 3 can use a heat dissipation fan; the upper cover 21 is detachably fixedly connected to the chassis 22, and is used to protect the test component 1 and the heat dissipation component 3; in a specific embodiment, it also includes a data interface for data transmission and communication between the test component 1 and the computer.

[0056] Please refer to the attached Figure 7 In one embodiment of the present invention, a method for testing a semiconductor device includes:

[0057] S1, installing the components to be tested in one or more circuits among the first conversion circuit 10, the voltage transformation circuit 20 and the second conversion circuit 30;

[0058] S2, controlling the first conversion circuit 10, the voltage conversion circuit 20 and the second conversion circuit 30 through the control module, so that the system can simulate the operating environment of the actual working conditions of the components to be tested

[0059] S3. Get the test result by running the electric energy self-circulation system.

[0060] In the above steps, the components to be tested are first installed in one or more circuits of the first conversion circuit 10, the transformer circuit 20 and the second conversion circuit 30. In a specific embodiment, after confirming the type of the first conversion circuit 10, the transformer circuit 20 and the second conversion circuit 30, the corresponding components in the circuit are replaced with the components to be tested; then the first conversion circuit 10, the transformer circuit 20 and the second conversion circuit 30 are controlled by the control module so that the system can simulate the operating environment of the actual working conditions of the components to be tested. In a specific embodiment, the control module controls the first conversion circuit 10, the transformer circuit 20 and the second conversion circuit 30 so that the operation of the components to be tested in the system is equivalent to the operation of the components in the actual electronic products; finally, the test results are obtained by running the electric energy self-circulation system; in a specific embodiment, the performance test of the components to be tested is realized by controlling the operation of the control system. If the system reports an error, it means that the performance of the components to be tested is unqualified.

[0061] It should be noted that, in this article, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, device, article or method including a series of elements includes not only those elements, but also includes other elements not explicitly listed, or also includes elements inherent to such process, device, article or method. In the absence of further restrictions, an element defined by the sentence "includes a ..." does not exclude the presence of other identical elements in the process, device, article or method including the element.

[0062] The above description is only a preferred embodiment of the present application, and does not limit the patent scope of the present application. Any equivalent structure or equivalent process transformation made using the contents of the present application specification and drawings, or directly or indirectly used in other related technical fields, are also included in the patent protection scope of the present application.

Claims

1. An electric energy self-circulation system for semiconductor device testing, characterized in that: The first filter circuit comprises a first filter circuit, wherein the input end of the first filter circuit is connected to an external power source and is used to perform a first filter on the input alternating current provided by the external power source so as to convert the input alternating current into a first alternating current; a first conversion circuit, wherein an input end of the first conversion circuit is connected to an output end of the first filter circuit and is used to rectify the first alternating current to convert the first alternating current into direct current; a second conversion circuit, wherein an input end of the second conversion circuit is connected to an output end of the first conversion circuit and is used to invert the direct current so as to convert the direct current into a second alternating current; a second filter circuit, wherein an input end of the second filter circuit is connected to an output end of the second conversion circuit and is used for performing a second filtering on the second alternating current so as to convert the second current into an output alternating current; The output end of the second filter circuit is connected to the input end of the external power supply or the input end of the first conversion circuit; and the output AC current is returned to the external power supply to form an electric energy self-circulation system; The first filter circuit, the first conversion circuit, the second conversion circuit and the second filter circuit are electrically connected in sequence and are respectively located on one or more circuit boards.

2. The electric energy self-circulation system for semiconductor device testing according to claim 1, characterized in that: The input alternating current and the output alternating current of the system are equal.

3. The electric energy self-circulation system for semiconductor device testing according to claim 1, characterized in that: When a voltage conversion circuit is included, the voltage conversion circuit is provided between the output end of the first conversion circuit and the input end of the second conversion circuit, and is used to adjust the input voltage of the second conversion circuit so that the second conversion circuit operates at different input voltages; When the voltage transformation circuit is not included, the output end of the first conversion circuit is connected to the input end of the second conversion circuit.

4. The electric energy self-circulation system for semiconductor device testing according to claim 3, characterized in that: One or more of the first conversion circuit, the voltage transformation circuit and the second conversion circuit includes components to be tested.

5. The electric energy self-circulation system for semiconductor device testing according to claim 4, characterized in that: It also includes a control circuit, which is used to control the first conversion circuit, the voltage transformation circuit and the second conversion circuit to simulate the operating environment of the actual working conditions of the component to be tested.

6. The electric energy self-circulation system for semiconductor device testing according to claim 5, characterized in that: The input alternating current includes at least one phase number, and the phase numbers of the first conversion circuit and the second conversion circuit respectively correspond to the phase numbers of the input alternating current.

7. The electric energy self-circulation system for semiconductor device testing according to claim 1, characterized in that: The system also includes a fuse, which is located between the external power supply and the input end of the first filter circuit, and is used to safely isolate the system from the external power supply.

8. A semiconductor device testing device, characterized in that: It includes a shell, a test component and a heat dissipation component, the shell includes a chassis and an upper cover, the chassis is provided with a cavity; the test component is arranged in the cavity and is used to test the components to be tested; one end of the heat dissipation component is located in the cavity, and the other end is connected to the outside of the shell and is used to dissipate the heat of the test component; the upper cover is detachably fixedly connected to the chassis and is used to protect the test component and the heat dissipation component.

9. The semiconductor device testing device according to claim 8, characterized in that: The test component includes a first filter circuit, a first conversion circuit, a voltage transformer circuit, a second conversion circuit, a second filter circuit and a control circuit; the first filter circuit, the first conversion circuit, the voltage transformer circuit, the second conversion circuit, the second filter circuit and the control circuit are respectively packaged on a PCB board or the cavity.

10. A method for testing a semiconductor device, characterized in that: The following steps are involved: S1, installing the components to be tested in one or more of the first conversion circuit, the voltage transformation circuit and the second conversion circuit; S2, controlling the first conversion circuit, the voltage transformation circuit and the second conversion circuit through a control module to simulate the operating environment of the actual working condition of the component to be tested; S3: Test the components to be tested and obtain test results.

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