CUP flexible film anti-leakage pump structure and using method thereof

Abstract

The invention relates to the technical field of anti-leakage pumps, in particular to a CUP flexible film anti-leakage pump structure and a using method thereof.The CUP flexible film anti-leakage pump structure comprises an upper shell, a piston is installed on the inner side of the upper shell, a CUP flexible film and a piston rod are installed at the upper end and the lower end of the piston respectively, the piston rod is arranged in a lower shell, and a control mechanism is fixedly connected to one side of the lower end of the lower shell; the piston rod comprises an upper rod, a guide hole is formed in the middle of the lower end of the upper rod, and the lower end of the upper rod is connected with a lower rod through an adjusting mechanism; the adjusting mechanism comprises a guide column, rotating rods are arranged on the two sides of the guide column, the bottom ends of the rotating rods are rotationally connected with moving blocks, the moving blocks are installed in the transverse grooves, and sliding blocks and buffer blocks are installed on the inner sides of the lower ends of the moving blocks. The conveying speed of the photoresist is adjusted, the requirement for driving equipment used for driving the piston to move is low, and the overall cost of the pump can be reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of anti-leakage pumps, and in particular to a CUP flexible membrane anti-leakage pump structure and a use method thereof. Background Art

[0002] The CUP flexible membrane anti-leakage pump structure adopts a flexible adaptive dynamic seal structure and leakage suppression method. This design replaces the traditional seal teeth with radially arranged rigid seal teeth and axially arranged flexible adaptive deformation seal teeth. When the unit is not running, the seal installation gap can be increased. When the unit is running normally, the axially arranged flexible adaptive deformation seal teeth will produce a certain deformation under the pressure difference between the upper and lower working fluids, thereby reducing the seal gap and greatly reducing seal leakage. Numerical simulation shows that by installing a new dynamic seal structure, the sealing gap of the flexible teeth can be reduced from 3mm to 0.1-0.3mm. Under the same conditions, the leakage can be reduced by 50%-80% compared with the traditional seal structure, thus effectively solving the problem of fluid leakage. It can be widely used in various types of turbine machinery to improve the operating efficiency of turbine machinery. In the process of transporting photoresist by the CUP flexible membrane anti-leakage pump, the discharging speed needs to be controlled according to different needs, which is generally achieved by controlling the reciprocating frequency of the piston. This requires high precision of the driving mechanism, resulting in high equipment cost. Therefore, in view of the above problems, a CUP flexible membrane anti-leakage pump structure and its use method are proposed. Summary of the invention

[0003] The purpose of the present invention is to provide a CUP flexible membrane anti-leakage pump structure and a method of using the same, so as to solve the problem that in the process of transporting photoresist by the CUP flexible membrane anti-leakage pump, it is necessary to control the glue discharge speed according to different needs, which is generally achieved by controlling the reciprocating frequency of the piston, and the precision requirements of the driving mechanism are high, resulting in high equipment costs.

[0004] To achieve the above object, the present invention provides the following technical solutions: A CUP flexible membrane anti-leakage pump structure and a use method thereof, comprising an upper shell, a piston is installed on the inner side of the upper shell, a CUP flexible membrane and a piston rod are installed on the upper and lower ends of the piston respectively, the piston rod is arranged inside the lower shell, and a control mechanism is fixedly connected to one side of the lower end of the lower shell; the piston rod comprises an upper rod, a guide hole is opened in the middle of the lower end of the upper rod, and the lower end of the upper rod is connected to the lower rod through an adjustment mechanism; the adjustment mechanism comprises a guide column, rotating rods are provided on both sides of the guide column, and the bottom ends of the rotating rods are rotatably connected to moving blocks, the moving block is installed in a transverse groove, a slider and a buffer block are installed on the inner side of the lower end of the moving block, a bidirectional threaded rod is spirally connected inside the slider, the middle of the bidirectional threaded rod is rotatably connected to the middle block, and one end of the bidirectional threaded rod is fixedly connected to a conical adjustment block.

[0005] As a further optimization of the present invention, the moving block includes a T-block, a through hole with a "cross" shaped vertical section is opened in the middle of the lower end of the T-block, and sliding grooves for lateral limiting the sliding block are opened at the upper and lower ends of the through hole.

[0006] As a further optimization of the present invention, the slider comprises a circular plate, the upper and lower ends of which are provided with blocks adapted to the slide groove, and the middle of the circular plate is provided with a threaded hole adapted to the bidirectional threaded rod.

[0007] As a further optimization of the present invention, the upper end of the guide column is slidably connected to the upper rod through a guide hole, the upper end of the rotating rod is rotatably connected to the bottom end of the upper rod, and two rotating rods are provided, which are symmetrically arranged with the guide column as the center point.

[0008] As a further optimization of the present invention, the middle block is arranged at the lower end of the guide column, the middle block is embedded in the middle of the transverse groove, and the center points of the middle block, the upper rod and the lower rod are arranged on the same vertical line.

[0009] As a further optimization of the present invention, there are two moving blocks, the moving blocks correspond to the rotating rods one by one, the lateral projection of the moving block is T-shaped, and the bottom of the moving block is slidably connected to the lower rod through a transverse groove.

[0010] As a further optimization content of the present invention, the control mechanism includes a fixed column shell, a control rod is installed on the inner side of the fixed column shell, a rotating ring plate is installed on one end of the control rod, a telescopic spring is installed on the other end of the rotating ring plate, and a conical adjustment groove compatible with the conical adjustment block is opened in the middle of the bottom end of the control rod.

[0011] As a further optimization content of the present invention, the other end of the telescopic spring is fixedly connected to the fixed column shell, the fixed column shell and the lower shell are fixedly connected, and the angle formed by the central axis of the fixed column shell and the lower shell is 90°, and the control rod is arranged on the inner side of one end of the fixed column shell and has a hexagonal hole.

[0012] As a further optimization of the present invention, the lower end of the upper shell is fixedly connected to the lower shell by bolts and a sealing ring, a discharge port is provided in the middle of the top end of the upper shell, a suction port is provided on one side of the upper shell, and a negative pressure port is provided on one side of the lower shell.

[0013] As a further optimized content of the present invention, the following steps are included: Step I: Control the control mechanism to dock with the conical adjustment block: Use a hexagonal tool to insert into one end of the control rod, and control the control rod to move toward the conical adjustment block, so that the conical adjustment block is connected to the conical adjustment groove. After the conical adjustment block is connected to the conical adjustment groove, the bidirectional threaded rod is controlled to rotate by rotating the control rod; Step II: Adjust the adjustment mechanism: When the bidirectional threaded rod rotates, the two movable blocks are driven to move, so as to adjust the angle of the rotating rod. When the rotating rod is adjusted in angle, the spacing between the upper rod and the lower rod is adjusted. During the adjustment, the guide column moves inside the guide hole to maintain the stability of the spacing between the upper rod and the lower rod during the adjustment process. Step III: The equipment is powered on and operated: During the operation, the piston rod drives the piston to move, and the reciprocating motion of the piston in the cylinder changes the volume, so that the fluid is sucked in and discharged to complete the fluid delivery. In this process, the CUP flexible membrane is used to compensate for the unstable discharge volume of the piston pump at the beginning and end of the photoresist delivery; Step IV: Operation monitoring: Conduct intermittent and regular monitoring of the equipment operation process.

[0014] Compared with the prior art, the present invention has the following beneficial effects: 1. In the present invention, by setting the piston rod, the delivery speed of the photoresist can be adjusted by changing the length of the piston rod when the piston reciprocates at a specific frequency, and the requirements for the driving device for driving the piston to move are relatively low, which can reduce the overall cost of the pump; 2. In the present invention, the length of the piston rod can be stably adjusted according to actual needs through the setting of the adjustment mechanism, and the adjustment can be realized outside the pump body through the control mechanism, without the need to disassemble the pump body, which is more convenient, and the adjustment is supported by the guide rod and the rotating rod, which can improve the overall stability of the piston rod after adjustment; 3. In the present invention, the conical adjustment block is provided, so that the rotation rod can be better connected and adapted during the adjustment process. At the same time, the buffer blocks are provided, which are distributed on both sides of the slider, so that there can be a certain buffer space between the upper rod and the lower rod, which can further protect the piston rod and the piston. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic diagram of the piston rod structure of the present invention; Figure 3 For the present invention Figure 2 Schematic diagram of the structure at A in the middle; Figure 4 It is a schematic diagram of the structure of the regulating mechanism of the present invention; Figure 5 This is a schematic diagram of the structure of the mobile block of the present invention; Figure 6 This is a schematic diagram of the T-block structure of the present invention; Figure 7 This is a schematic diagram of the structure of the slider of the present invention; Figure 8 It is a schematic diagram of the control mechanism structure of the present invention.

[0016] In the figure: 1. Upper shell; 2. Discharge port; 3. Suction port; 4. Piston; 5. CUP flexible membrane; 6. Negative pressure port; 7. piston rod; 71. upper rod; 72. guide hole; 73. lower rod; 74, adjustment mechanism; 741, guide column; 742, transverse groove; 743, rotating rod; 744, moving block; 7441, T-block; 7442, through hole; 7443, slide groove; 745, bidirectional threaded rod; 746, intermediate block; 747, conical adjustment block; 748, slider; 7481, round plate; 7482, block; 7483, threaded hole; 749, buffer block; 8. Control mechanism; 81. Fixed column housing; 82. Control rod; 83. Rotating ring plate; 84. Telescopic spring; 85. Conical adjustment slot; 9. Lower shell. DETAILED DESCRIPTION

[0017] See also Figure 1-8 , the present invention provides a technical solution: A CUP flexible membrane anti-leakage pump structure and a method of using the same, comprising an upper shell 1, a piston 4 is installed inside the upper shell 1, a CUP flexible membrane 5 and a piston rod 7 are installed at the upper and lower ends of the piston 4, respectively, the piston rod 7 is arranged inside a lower shell 9, and a control mechanism 8 is fixedly connected to one side of the lower end of the lower shell 9; the piston rod 7 comprises an upper rod 71, a guide hole 72 is opened in the middle of the lower end of the upper rod 71, and the lower end of the upper rod 71 is connected to a lower rod 73 through an adjustment mechanism 74; the adjustment mechanism 74 It includes a guide column 741, and rotating rods 743 are provided on both sides of the guide column 741. The bottom ends of the rotating rods 743 are rotatably connected to the moving blocks 744. The moving blocks 744 are installed inside the transverse groove 742. A slider 748 and a buffer block 749 are installed on the inner side of the lower end of the moving block 744. A bidirectional threaded rod 745 is spirally connected inside the slider 748. The middle of the bidirectional threaded rod 745 is rotatably connected to the middle block 746. One end of the bidirectional threaded rod 745 is fixedly connected to a conical adjustment block 747.

[0018] As a further technical solution for implementing the present invention, the moving block 744 includes a T-shaped block 7441, a through hole 7442 with a "cross" vertical section is provided in the middle of the lower end of the T-shaped block 7441, and a sliding groove 7443 for lateral limiting the slider 748 is provided at the upper and lower ends of the through hole 7442. Through the above arrangement, the angle of the rotating rod 743 can be stably adjusted; As a technical solution for further implementing the present invention, the slider 748 includes a circular plate 7481, and a block 7482 adapted to the slide groove 7443 is provided at the upper and lower ends of the circular plate 7481, and a threaded hole 7483 adapted to the bidirectional threaded rod 745 is provided in the middle of the circular plate 7481. Through the above arrangement, the moving block 744 is driven to move by the rotation of the bidirectional threaded rod 745; As a technical solution for further implementation of this solution, the upper end of the guide column 741 is slidably connected to the upper rod 71 through the guide hole 72, the upper end of the rotating rod 743 is rotatably connected to the bottom end of the upper rod 71, and there are two rotating rods 743, which are symmetrically arranged with the guide column 741 as the center point. The middle block 746 is arranged at the lower end of the guide column 741, and the middle block 746 is embedded in the middle of the transverse groove 742. The center points of the middle block 746, the upper rod 71 and the lower rod 73 are arranged on the same vertical line. Through the above arrangement, the stability of the piston rod 7 during the length adjustment process can be ensured; As a further technical solution for implementing the present invention, two moving blocks 744 are provided, and the moving blocks 744 correspond to the rotating rods 743 one by one. The lateral projection of the moving block 744 is T-shaped, and the bottom of the moving block 744 is slidably connected to the lower rod 73 through the transverse groove 742. Through the above arrangement, the stability of the moving block 744 moving inside the transverse groove 742 can be ensured; As a technical solution for further implementation of this scheme, the control mechanism 8 includes a fixed column shell 81, a control rod 82 is installed on the inner side of the fixed column shell 81, a rotating ring plate 83 is installed on one end of the control rod 82, and a telescopic spring 84 is installed on the other end of the rotating ring plate 83. A conical adjustment groove 85 adapted to the conical adjustment block 747 is opened in the middle of the bottom end of the control rod 82, and the other end of the telescopic spring 84 is fixedly connected to the fixed column shell 81, and the fixed column shell 81 is fixedly connected to the lower shell 9, and the angle formed by the central axis of the fixed column shell 81 and the lower shell 9 is 90°. The control rod 82 is arranged on the inner side of one end of the fixed column shell 81 and has a hexagonal hole. Through the above arrangement, the length of the piston rod 7 can be adjusted according to actual needs; As a technical solution for further implementation of this scheme, the lower end of the upper shell 1 is fixedly connected to the lower shell 9 by bolts and a sealing ring, a discharge port 2 is provided in the middle of the top of the upper shell 1, a suction port 3 is provided on one side of the upper shell 1, and a negative pressure port 6 is provided on one side of the lower shell 9. Through the above arrangement, the stability of the overall operation of the equipment can be further improved.

[0019] The method comprises the following steps: Step I: controlling the control mechanism 8 to dock with the conical adjustment block 747: inserting a hexagonal tool into one end of the control rod 82, and controlling the control rod 82 to move toward the conical adjustment block 747, thereby connecting the conical adjustment block 747 with the conical adjustment groove 85. After the conical adjustment block 747 is connected with the conical adjustment groove 85, the bidirectional threaded rod 745 is controlled to rotate by rotating the control rod 82; Step II: Adjust the adjustment mechanism 74: During the rotation of the bidirectional threaded rod 745, the two movable blocks 744 are driven to move, so as to adjust the angle of the rotating rod 743. During the angle adjustment process, the rotating rod 743 adjusts the distance between the upper rod 71 and the lower rod 73. During the adjustment process, the guide column 741 moves inside the guide hole 72 to maintain the stability of the distance between the upper rod 71 and the lower rod 73 during the adjustment process. Step III: The equipment is powered on and operated: During the operation, the piston rod 7 drives the piston 4 to move, and the reciprocating motion of the piston 4 in the cylinder changes the volume, so that the fluid is sucked in and discharged to complete the fluid transportation. In this process, the CUP flexible membrane 5 is used to compensate for the unstable discharge volume of the piston pump at the beginning and end of the injection of the photoresist. Step IV: Operation monitoring: Conduct intermittent and regular monitoring of the equipment operation process.

[0020] This article uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only used to help understand the method and core ideas of the present invention. The above is only a preferred implementation of the present invention. It should be pointed out that due to the limitations of textual expression and the objective existence of infinite specific structures, ordinary technicians in this technical field can make several improvements, modifications or changes without departing from the principles of the present invention, and can also combine the above technical features in an appropriate manner; these improvements, modifications, changes or combinations, or the direct application of the inventive concept and technical solution to other occasions without improvement, should be regarded as the protection scope of the present invention.

Claims

1. A CUP flexible membrane anti-leakage pump structure, comprising an upper shell (1), characterized in that: A piston (4) is installed inside the upper shell (1); a CUP flexible membrane (5) and a piston rod (7) are installed at the upper and lower ends of the piston (4), respectively; the piston rod (7) is arranged inside the lower shell (9); and a control mechanism (8) is fixedly connected to one side of the lower end of the lower shell (9); The piston rod (7) comprises an upper rod (71), a guide hole (72) is provided in the middle of the lower end of the upper rod (71), and the lower end of the upper rod (71) is connected to the lower rod (73) via an adjustment mechanism (74); The adjustment mechanism (74) comprises a guide column (741), and rotating rods (743) are provided on both sides of the guide column (741). The bottom ends of the rotating rods (743) are rotatably connected to a moving block (744). The moving block (744) is installed inside the transverse groove (742). A slider (748) and a buffer block (749) are installed on the inner side of the lower end of the moving block (744). A bidirectional threaded rod (745) is spirally connected inside the slider (748). The middle of the bidirectional threaded rod (745) is rotatably connected to an intermediate block (746). One end of the bidirectional threaded rod (745) is fixedly connected to a conical adjustment block (747).

2. A CUP flexible membrane anti-leakage pump structure according to claim 1, characterized in that: The moving block (744) comprises a T-shaped block (7441), a through hole (7442) having a "cross"-shaped vertical cross section is provided in the middle of the lower end of the T-shaped block (7441), and a sliding groove (7443) for lateral limiting the sliding block (748) is provided at the upper and lower ends of the through hole (7442).

3. A CUP flexible membrane anti-leakage pump structure according to claim 1, characterized in that: The slider (748) comprises a circular plate (7481), the upper and lower ends of which are provided with blocks (7482) adapted to the slide groove (7443), and the middle of the circular plate (7481) is provided with a threaded hole (7483) adapted to the bidirectional threaded rod (745).

4. A CUP flexible membrane anti-leakage pump structure according to claim 1, characterized in that: The upper end of the guide column (741) is slidably connected to the upper rod (71) through the guide hole (72), and the upper end of the rotating rod (743) is rotatably connected to the lower end of the upper rod (71). Two rotating rods (743) are provided, and the rotating rods (743) are symmetrically arranged with the guide column (741) as the center point.

5. A CUP flexible membrane anti-leakage pump structure according to claim 1, characterized in that: The middle block (746) is arranged at the lower end of the guide column (741), the middle block (746) is embedded in the middle of the transverse groove (742), and the center points of the middle block (746), the upper rod (71) and the lower rod (73) are arranged on the same vertical line.

6. A CUP flexible membrane anti-leakage pump structure according to claim 1, characterized in that: Two moving blocks (744) are provided, and the moving blocks (744) correspond to the rotating rods (743) one by one. The lateral projection of the moving blocks (744) is T-shaped, and the bottom of the moving blocks (744) is slidably connected to the lower rod (73) via the transverse groove (742).

7. A CUP flexible membrane anti-leakage pump structure according to claim 1, characterized in that: The control mechanism (8) comprises a fixed column housing (81), a control rod (82) being mounted inside the fixed column housing (81), a rotating ring plate (83) being mounted on one end of the control rod (82), a telescopic spring (84) being mounted on the other end of the rotating ring plate (83), and a conical adjustment groove (85) matching the conical adjustment block (747) being provided at the middle of the bottom end of the control rod (82).

8. A CUP flexible membrane anti-leakage pump structure according to claim 7, characterized in that: The other end of the telescopic spring (84) is fixedly connected to the fixed column shell (81), the fixed column shell (81) is fixedly connected to the lower shell (9), and the angle formed by the central axis of the fixed column shell (81) and the lower shell (9) is 90°. The control rod (82) is arranged on the inner side of one end of the fixed column shell (81) and has a hexagonal hole.

9. A CUP flexible membrane anti-leakage pump structure according to claim 1, characterized in that: The lower end of the upper shell (1) is fixedly connected to the lower shell (9) by bolts and a sealing ring, a discharge port (2) is provided in the middle of the top end of the upper shell (1), a suction port (3) is provided on one side of the upper shell (1), and a negative pressure port (6) is provided on one side of the lower shell (9).

10. The method for using a CUP flexible membrane anti-leakage pump structure according to claim 1, characterized in that: The following steps are involved: Step I: Control the control mechanism (8) to dock with the conical adjustment block (747): insert a hexagonal tool into one end of the control rod (82), and control the control rod (82) to move toward the conical adjustment block (747), thereby connecting the conical adjustment block (747) with the conical adjustment groove (85). After the conical adjustment block (747) is connected with the conical adjustment groove (85), the bidirectional threaded rod (745) is controlled to rotate by rotating the control rod (82); Step II: Adjusting the adjustment mechanism (74): During the rotation of the bidirectional threaded rod (745), the two movable blocks (744) are driven to move, so as to adjust the angle of the rotating rod (743). During the angle adjustment of the rotating rod (743), the spacing between the upper rod (71) and the lower rod (73) is adjusted. During the adjustment, the guide column (741) moves inside the guide hole (72) to maintain the stability of the spacing between the upper rod (71) and the lower rod (73) during the adjustment process. Step III: The equipment is powered on and operated: During operation, the piston rod (7) drives the piston (4) to move, and the reciprocating motion of the piston (4) in the cylinder changes the volume, so that the fluid is sucked in and discharged, and the fluid is transported. During this process, the CUP flexible membrane (5) is used to compensate for the unstable discharge volume of the piston pump at the beginning and end of the photoresist transport; Step IV: Operation monitoring: Conduct intermittent and regular monitoring of the equipment operation process.

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