Valve and wafer processing equipment using same

Abstract

The embodiment of the invention provides a valve and wafer processing equipment applying the valve. The valve includes a valve housing, a sealing member, and a locking member. The valve shell comprises a valve cavity, an air inlet and an air outlet, the sealing component comprises a valve cover, a first driving piece and a sealing ring; the valve cover is rotatably arranged in the valve cavity so as to be rotated to open / close the air outlet; the first driving piece is connected with and drives the valve cover so as to adjust the opening degree of the air outlet; and the sealing ring is arranged between the valve cover and the inner wall surface of the valve cavity on the peripheral side of the air outlet. And the locking component is arranged in the valve cavity and provides an application force for enabling the valve cover to press the sealing ring to the inner wall surface when the valve cover reaches the covering position. The wafer processing apparatus includes a valve. The sealing ring is arranged between the valve cover and the air inlet, so that the sealing effect between the valve cover and the air outlet is improved, and the situation that gas leaks from a gap between the valve cover and the air outlet is avoided. And the situation that gas leakage is not informed due to the fact that the gap between the valve cover and the gas outlet is not within the leakage detection range can be avoided.

Description

Technical Field

[0001] The present disclosure relates to the field of valve technology, and in particular to valves and wafer processing equipment using the same. Background Art

[0002] In the field of semiconductor manufacturing, valves control pressure by opening and closing the valve cover, and also provide a seal when closed. The movement of the valve cover is driven by a motor, and since the motor output shaft is a moving part, it is more likely to leak. However, due to the different locations of the sealing rings in existing valves, leakage in the valve motor cannot be detected during leak detection. Summary of the invention

[0003] In view of the above-mentioned shortcomings of the prior art, the purpose of the present disclosure is to provide a valve and a wafer processing equipment using the same, so as to solve the problems in the related art.

[0004] A first aspect of the present disclosure provides a valve, comprising:

[0005] A valve housing, comprising a valve cavity, and an air inlet and an air outlet for communicating with the valve cavity;

[0006] The sealing member comprises a valve cover, a first driving member and a sealing ring; the valve cover is rotatably arranged in the valve cavity so as to be rotated to open / close the gas outlet; the first driving member is connected to and drives the valve cover so as to adjust the opening of the gas outlet; the sealing ring is arranged between the valve cover and the inner wall surface of the valve cavity on the peripheral side of the gas outlet;

[0007] The locking member is arranged in the valve cavity and provides a force for the valve cover to press the sealing ring against the inner wall surface when the valve cover reaches the covering position.

[0008] In an embodiment of the first aspect, the locking member is configured to press down the valve cover.

[0009] In an embodiment of the first aspect, the valve cover is slidably coupled to the output end of the first driving member in a restricted rotation manner; an elastic member is provided between the valve cover and the output end of the first driving member; and the valve cover can restore the deformation of the sealing ring under the elastic force of the elastic member.

[0010] In an embodiment of the first aspect, the locking member includes an inclined pressure block provided on the inner wall of the valve cavity and located above the valve cover, the inclined pressure block includes a pressure inclined surface and a clamping plane, and the clamping plane is parallel to the valve cover; wherein the valve cover abuts against the pressure inclined surface during the process of moving to the covering position, and is pressed until the sealing ring is deformed, and when the valve cover reaches the covering position, the valve cover is in contact with the clamping plane.

[0011] In an embodiment of the first aspect, the locking member includes a second driving member, a locking ring and a buffer member; the locking ring is slidably coupled to the inner wall of the valve chamber along the axial direction of the first driving member; the output end of the second driving member is connected to the locking ring, and the buffer member is arranged between the locking ring and the inner wall of the valve chamber to absorb the force applied to the locking ring by the second driving member after the locking ring abuts against the valve cover.

[0012] In an embodiment of the first aspect, the sealing ring is implemented as at least two; the first sealing ring of the at least two sealing rings is arranged on the wall of the valve cover covering the air inlet; the second sealing ring of the at least two sealing rings is arranged on the wall of the valve cover facing the locking ring.

[0013] In an embodiment of the first aspect, the locking member is configured to pull down the valve cover.

[0014] In an embodiment of the first aspect, the locking member includes a spiral guide groove formed in the valve housing and a guide block engaged in the spiral guide groove; the guide block is arranged on the valve cover; wherein, when the valve cover reaches the covering position, the guide block is located at the end of the spiral guide groove in the axial direction of the first drive member close to the air outlet.

[0015] In an embodiment of the first aspect, the locking member includes a second driving member; the second driving member is arranged parallel to the first driving member, and the output end is combined with the wall surface of the valve cover facing the air outlet, and when the valve cover reaches the covering position, the valve cover is retracted and pulled down toward the wall surface of the air outlet; and / or, the second driving member is arranged parallel to the first driving member and is located above the valve cover, and when the valve cover reaches the covering position, the output end of the second driving member extends out and presses down the wall surface of the valve cover facing away from the air outlet.

[0016] A second aspect of the present disclosure provides a wafer processing device comprising the valve.

[0017] As described above, the embodiment of the present disclosure provides a valve and a wafer processing device using the same. The valve includes a valve housing, a sealing member and a locking member. The valve housing includes a valve cavity, and an air inlet and an air outlet for connecting the valve cavity. The sealing member includes a valve cover, a first driving member and a sealing ring; the valve cover is rotatably arranged in the valve cavity to be rotated to open / close the air outlet; the first driving member is connected to and drives the valve cover to adjust the opening of the air outlet; the sealing ring is arranged between the valve cover and the inner wall surface of the valve cavity on the side around the air outlet. The locking member is arranged in the valve cavity, and when the valve cover reaches the covering position, it provides a force for the valve cover to press the sealing ring against the inner wall surface. The wafer processing device includes the valve. The advantage of the above arrangement is that by arranging the sealing ring between the valve cover and the air inlet, the sealing effect between the valve cover and the air outlet is improved, thereby avoiding the occurrence of gas leakage from the gap between the valve cover and the air outlet, and improving the sealing effect of the valve. At the same time, it can also avoid the situation where the gap between the valve cover and the gas outlet is not within the range of leakage detection, resulting in gas leakage without knowledge. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 , which is a cross-sectional schematic diagram of a valve in an embodiment of the present disclosure;

[0019] Figure 2 The present disclosure is shown in Figure 1 A magnified view of middle;

[0020] Figure 3 The present disclosure is shown in Figure 1 Enlarged view of B.

[0021] Figure 4 , which is a cross-sectional view of another embodiment in which the locking member presses down the valve cover;

[0022] Figure 5 FIG. 2 is a cross-sectional view of another embodiment of the locking member pressing down the valve cover;

[0023] Figure 6 , which is a cross-sectional view of a first embodiment in which a locking member pulls down the valve cover;

[0024] Figure 7 The figure shows a schematic diagram of the valve cover in this embodiment;

[0025] Figure 8 , which is a cross-sectional view of another embodiment in which the locking member pulls down the valve cover;

[0026] Fig. 9 Shown in Figure 8 Schematic diagram of the unfolding of the spiral guide groove in the example;

[0027] Fig.10 Shown in Figure 8 An expanded schematic diagram of another embodiment of the spiral guide groove in the example.

[0028] Reference numerals:

[0029] 10. Valve housing; 11. Support cylinder; 101. Valve cavity; 102. Air inlet; 103. Air outlet;

[0030] 20. Sealing member; 21. Valve cover; 2101. Arc groove; 22. First driving member; 23. Sealing ring; 24. Elastic member

[0031] 30. locking member; 31. second driving member; 311. slider; 32. locking ring; 321. pressing portion; 33. buffer member; 34. inclined pressing block; 341. inclined pressure surface; 342. pressing plane; 301. spiral guide groove; 3011. inclined section; 30111. high end; 30112. low end; 3012. straight section; 35. guide block;

[0032] 40. Guide assembly; 41. Guide groove; 42. Guide block. DETAILED DESCRIPTION

[0033] The following is an explanation of the embodiments of the present disclosure by specific examples, and those skilled in the art can easily understand other advantages and effects of the present disclosure from the information disclosed by the present disclosure. The present disclosure can also be implemented or applied through other different specific embodiments, and the details in the present disclosure can also be modified or changed in various ways according to different viewpoints and application modules without departing from the spirit of the present disclosure. It should be noted that the embodiments in the present disclosure and the features in the embodiments can be combined with each other without conflict.

[0034] The following is a detailed description of the embodiments of the present disclosure with reference to the accompanying drawings so that those skilled in the art can easily implement the present disclosure. The present disclosure can be embodied in many different forms and is not limited to the embodiments described herein.

[0035] In the representations of the present disclosure, the reference terms "one embodiment", "some embodiments", "examples", "specific examples", or "some examples" and the like mean that the specific features, structures, materials or characteristics represented in conjunction with the embodiment or example are included in at least one embodiment or example of the present disclosure. Moreover, the specific features, structures, materials or characteristics represented may be combined in any one or a group of embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine different embodiments or examples represented in the present disclosure and the features of different embodiments or examples, unless they are mutually contradictory.

[0036] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the representation of the present disclosure, "a group" means two or more, unless otherwise clearly and specifically defined.

[0037] In order to clearly describe the present disclosure, components not related to the description are omitted, and the same reference numerals are given to the same or similar components throughout the specification.

[0038] Throughout the specification, when a device is said to be "connected" to another device, this includes not only the case of "direct connection" but also the case of "indirect connection" by placing other elements therebetween. In addition, when a device is said to "include" a certain component, unless otherwise stated, it does not exclude other components, but means that other components may be included.

[0039] Although the terms first, second, etc. are used to represent various elements in this article in some examples, these elements should not be limited by these terms. These terms are only used to distinguish one element from another element. For example, the first interface and the second interface, etc. are represented. Moreover, as used in this article, the singular forms "one", "one" and "the" are intended to also include plural forms, unless there is an opposite indication in the context. It should be further understood that the terms "comprising" and "including" indicate that there are the described features, steps, operations, elements, modules, projects, kinds, and / or groups, but do not exclude the existence, occurrence or addition of one or a group of other features, steps, operations, elements, modules, projects, kinds, and / or groups. The terms "or" and "and / or" used herein are interpreted as inclusive, or mean any one or any combination. Therefore, "A, B or C" or "A, B and / or C" means "any of the following: A; B; C; A and B; A and C; B and C; A, B and C". Only when the combination of elements, functions, steps or operations is inherently mutually exclusive in some way, will there be an exception to this definition.

[0040] The technical terms used herein are only used to refer to specific embodiments and are not intended to limit the present disclosure. The singular form used herein also includes the plural form unless the sentence clearly indicates the contrary meaning. The meaning of "including" used in the specification is to specify specific characteristics, regions, integers, steps, operations, elements and / or components, and does not exclude the existence or addition of other characteristics, regions, integers, steps, operations, elements and / or components.

[0041] Although not defined differently, all terms, including technical and scientific terms used herein, have the same meaning as those generally understood by those skilled in the art to which the present disclosure belongs. Terms defined in commonly used dictionaries are additionally interpreted as having meanings consistent with relevant technical literature and the message of the present disclosure, and shall not be overly interpreted as ideal or very formal meanings unless defined.

[0042] In the field of semiconductor manufacturing, valves control pressure by opening and closing the valve cover, and also provide a seal when closed. The movement of the valve plate in the valve is driven by a motor, and since the motor output shaft is a moving part, it is more likely to leak. However, due to the different locations of the sealing rings in existing valves, leakage in the valve motor cannot be detected during leak detection.

[0043] Based on the above problems, the advantage of the embodiment of the present disclosure is that, by providing the sealing ring between the valve cover and the air inlet, the sealing effect between the valve cover and the air inlet is improved, thereby preventing gas from leaking from the gap between the valve cover and the air inlet, thereby improving the sealing effect of the valve. At the same time, it can also prevent the situation where gas leaks without knowing it because the gap between the valve cover and the air inlet is not within the range of leakage detection.

[0044] Figure 1 The figure shows a cross-sectional view of a valve in an embodiment of the present disclosure. Figure 1 In the example, the valve comprises a valve housing 10, a sealing member 20 and a locking member 30. The valve housing 10 comprises a valve cavity 101, and an air inlet 102 and an air outlet 103 for communicating with the valve cavity 101. Exemplarily, the air inlet 102 and the air outlet 103 are coaxial.

[0045] The sealing component 20 includes a valve cover 21, a first driving member 22 and a sealing ring 23; the valve cover 21 is rotatably disposed in the valve cavity 101 so as to be rotated to open / close the air outlet 103; the first driving member 22 is connected to and drives the valve cover 21 to adjust the opening of the air outlet 103; the sealing ring 23 is disposed between the valve cover 21 and the inner wall surface of the valve cavity 101 on the side surrounding the air outlet 103.

[0046] Exemplarily, the first driving member 22 is implemented as a servo motor, and the output end of the servo motor is connected to the valve cover 21. As an example, the first driving member 22 is arranged on the outer wall of the valve housing 10, and its output end penetrates into the valve cavity 101 and is connected to the valve cover 21. In this arrangement, at least one sealing ring 23 needs to be arranged between the output end of the first driving member 22 and the valve housing 10. In another embodiment, the first driving member 22 can also be directly arranged in the valve cavity 101 to further reduce the leakage degree of the valve.

[0047] Exemplarily, the sealing ring 23 is disposed on the side wall of the valve cover 21 facing the gas outlet 103 or the inner wall of the valve cavity 101 around the gas outlet 103. In this embodiment, the sealing ring 23 is disposed on the side wall of the valve cover 21 facing the gas outlet 103.

[0048] Exemplarily, the valve cover 21 has the same shape as the gas outlet 103 and the area of ​​the valve cover 21 is larger than the area of ​​the gas outlet 103, so that the valve cover 21 can completely cover the gas outlet 103. Further exemplary, the diameter of the sealing ring 23 is larger than the diameter of the gas outlet 103.

[0049] Figure 2 The present disclosure is shown in Figure 1 A magnified view of the middle. Figure 1 and Figure 2 In the example, an annular fixing groove is concavely provided on the wall surface of the valve cover 21 facing the air inlet, and the sealing ring 23 is engaged with the fixing groove. Further exemplarily, an adhesive is applied to the area where the sealing ring 23 and the fixing groove are combined to further improve the fixing effect between the sealing ring 23 and the valve cover 21. It can be understood by those skilled in the art that, since the fixing groove has a certain depth, the area where the inner wall of the fixing groove and the sealing ring 23 are combined can resist the lateral shear force that the sealing ring 23 is subjected to due to the friction between the sealing ring 23 and the bottom wall of the valve cavity 101 during the movement, thereby preventing the sealing ring 23 from falling off the valve cover 21.

[0050] The locking member 30 is disposed in the valve cavity 101 , and provides a force for the valve cover 21 to press the sealing ring 23 against the inner wall surface when the valve cover 21 reaches the covering position.

[0051] The advantage of the above arrangement is that the sealing ring 23 is arranged between the valve cover 21 and the gas outlet 103, thereby improving the sealing effect between the valve cover 21 and the gas outlet 103, thereby preventing gas from leaking from the gap between the valve cover 21 and the gas outlet 103, and improving the sealing effect of the valve. At the same time, it can also prevent the situation where gas leaks without knowing it because the gap between the valve cover 21 and the gas outlet 103 is not within the range of leakage detection.

[0052] Exemplarily, the locking member 30 is configured to press down the valve cover 21 or pull down the valve cover 21 . Figure 1 FIG. 2 is a cross-sectional view of a first embodiment in which the locking member 30 presses down the valve cover 21. Figure 1In the example, the valve cover 21 is slidably coupled to the output end of the first driving member 22 in a rotationally restricted manner; an elastic member 24 ( Figure 3 As shown in ); the valve cover 21 can make the sealing ring 23 recover its deformation under the elastic force of the elastic member 24.

[0053] Figure 3 The present disclosure is shown in Figure 1 A magnified view of B. Figure 1 and Figure 3 In the example, at least one pair of guide components 40 is provided between the valve cover 21 and the output end of the first driving member 22, and the guide components 40 include a guide groove 41 and a guide block 42 that are slidably combined. One of the guide groove 41 and the guide block 42 is provided on the valve cover 21, and the other is provided on the output end of the first driving member 22. In this embodiment, the guide components 40 are implemented as a pair, the guide groove 41 is formed on the outer wall of the output end of the first driving member 22 along the axial extension direction of the output end of the first driving member 22, and the guide block 42 is provided on the wall surface where the valve cover 21 and the output end of the first driving member 22 are combined. It can be understood that the setting of the guide components 40 enables the valve cover 21 to rotate with the first driving member 22 and to move axially along the output end of the first driving member 22. Exemplarily, the elastic member 24 is implemented as a spring and is provided between the valve cover 21 and the output end of the first driving member 22. In another embodiment, the setting positions of the guide groove 41 and the guide block 42 are interchanged.

[0054] exist Figure 1 In the example, the locking member 30 includes a second driving member 31, a locking ring 32 and a buffer member 33; the locking ring 32 is slidably coupled to the inner wall of the valve cavity 101 along the axial direction of the first driving member 22; the output end of the second driving member 31 is connected to the locking ring 32, and the buffer member 33 is arranged between the locking ring 32 and the inner wall of the valve cavity 101 to absorb the force applied to the locking ring 32 by the second driving member 31 after the locking ring 32 abuts against the valve cover 21. Exemplarily, the part where the locking ring 32 abuts against the valve cover 21 is implemented as a clamping portion 321, and the diameter of the clamping portion 321 is greater than the diameter of the air inlet 102. Exemplarily, the second driving member 31 is implemented as an oil cylinder, a gas cylinder or an electric cylinder. The buffer member 33 is implemented as a spring.

[0055] Those skilled in the art can understand that, after the valve cover 21 completely covers the air outlet 103 (i.e., the opening of the air outlet 103 is zero), the locking ring 32 approaches the valve cover 21 under the drive of the second driving member 31, and after the pressing portion 321 of the locking ring 32 abuts against the valve cover 21, the buffer member 33 is gradually compressed and converts the driving force of the second driving member 31 into an elastic force, and the elastic force can both enable the locking ring 32 to maintain a state of pressing the valve cover 21 and prevent the locking ring 32 from damaging the valve cover 21.

[0056] In other embodiments, the second driving member 31 and the buffer member 33 are both implemented as two. The two second driving members 31 are symmetrically arranged on both sides of the locking ring 32 and the output ends are connected to the locking ring 32. The two buffer members 33 are symmetrically arranged between the locking ring 32 and the inner wall of the valve cavity 101. The advantage of such an arrangement is that the two symmetrically arranged second driving members 31 can make the force on the locking ring 32 more uniform, so that the force can be more uniformly transmitted to the valve cover 21, thereby achieving the effect of the valve cover 21 sealing the air inlet 102 uniformly.

[0057] exist Figure 1 In the example, the sealing ring 23 is implemented as at least two; the first sealing ring of the at least two sealing rings 23 is arranged on the wall of the valve cover 21 covering the air inlet 102; the second sealing ring of the at least two sealing rings is arranged on the wall of the valve cover 21 facing the locking ring 32. The advantage of the above arrangement is that the arrangement of the double sealing rings 23 can further improve the sealing effect of the valve. In another embodiment, the first sealing ring of the at least two sealing rings is arranged on the wall of the valve cover 21 covering the air inlet 102; the second sealing ring of the at least two sealing rings 23 is arranged on the wall of the locking ring 32 facing the valve cover 21.

[0058] Figure 4 A cross-sectional view of another embodiment of the locking member pressing down the valve cover is shown in FIG. Figure 4 In the example, a guide assembly and an elastic member are also provided between the valve cover 21 and the first driving member 22 and function as Figure 1 For example, the locking member 30 includes an inclined pressing block 34 disposed on the inner wall of the valve cavity 101 and located above the valve cover 21, and the inclined pressing block 34 includes a pressure inclined surface 341 and a clamping plane 342, and the clamping plane 342 is parallel to the valve cover 21; wherein, the valve cover 21 abuts against the pressure inclined surface 341 during the process of moving to the covering position, and is squeezed until the sealing ring 23 is deformed, and when the valve cover 21 reaches the covering position, the valve cover 21 is in contact with the clamping plane 342.

[0059] Preferably, the inclined pressing block 34 is arranged corresponding to the closing position, that is, the valve cover 21 abuts against the pressure inclined surface 341 only when it rotates to approach the closing position, and the sealing ring 23 is pressed to the inner wall surface under the pressure of the pressure inclined surface 341 (that is, the sealing ring 23 is deformed), and when the valve cover 21 reaches the closing position, the valve cover 21 abuts against the pressing plane 342. The advantage of such a setting is that by shortening the length of the inclined pressing block 34, the wear of the valve cover 21 and the inclined pressing block 34 can be reduced, and the efficiency of the valve cover 21 being driven to rotate can be improved, and the speed of the outlet 103 switching from opening to closing can be improved.

[0060] Figure 5 A cross-sectional view of another embodiment of the locking member pressing down the valve cover is shown in FIG. Figure 5 In the example, a guide assembly and an elastic member are also provided between the valve cover 21 and the first driving member 22 and function as Figure 1 For example, the second driving member 31 is arranged parallel to the first driving member 22, and the output end is combined with the wall of the valve cover 21 facing the gas outlet 103, and when the valve cover 21 reaches the covering position, it extends and presses down the wall of the valve cover 21 facing away from the gas outlet 103. The advantage of the above arrangement is that the internal structure of the valve is simpler and more compact, thereby reducing the failure rate and reducing the overall volume of the valve.

[0061] Figure 6 FIG. 1 is a cross-sectional view of a first embodiment in which a locking member pulls down the valve cover. Figure 7 The schematic diagram of the valve cover 21 in this embodiment is shown in FIG. Figure 6 and Figure 7 In the example, the valve cover 21 is slidably coupled to the output end of the first driving member 22 in a limited rotation manner, and a guide component is also provided between the valve cover 21 and the first driving member 22 and functions as Figure 1 For example, the locking member 30 includes a second driving member 31; the second driving member 31 is arranged parallel to the first driving member 22, and the output end is combined with the wall surface of the valve cover 21 facing the air outlet 103. When the valve cover 21 reaches the covering position, the valve cover 21 is retracted and pulled down toward the wall surface of the air outlet 103.

[0062] Further illustratively, an arc-shaped groove 2101 is formed on the valve cover 21, which is coaxial with the output end of the first driving member 22 and opens toward the gas outlet 103, and the cross-sectional shape of the arc-shaped groove 2101 is an inverted T shape. The output end of the second driving member 31 is provided with a slider 311 that is slidably coupled to the arc-shaped groove 2101 with the same cross-sectional shape and matching size as the arc-shaped groove 2101. It can be understood that when the valve cover 21 rotates, the slider 311 on the second driving member 31 slides in the arc-shaped groove 2101. When it is necessary to drive the valve cover 21 to move axially, the slider 311 drives the valve cover 21 by relying on the wall surface coupled to the arc-shaped groove 2101.

[0063] Figure 8 A cross-sectional view of another embodiment of the valve cover being pulled down by the locking member is shown in FIG. Figure 8 In the example, the valve cover 21 is slidably coupled to the output end of the first driving member 22 in a limited rotation manner, and a guide component is also provided between the valve cover 21 and the first driving member 22 and functions as Figure 1 For the purpose of the example, the locking member 30 is not described here. For example, the locking member 30 includes a spiral guide groove 301 formed in the valve housing 10 and a guide block 35 combined in the spiral guide groove 301; the guide block 35 is provided on the valve cover 21. When the valve cover 21 reaches the covering position, the guide block 35 is located at the end of the spiral guide groove 301 close to the gas outlet 103 in the axial direction of the first driving member 22.

[0064] Exemplarily, the cross-section of the sliding groove and the sliding column that slide together the valve cover 21 and the output end of the first driving member 22 is embodied as a rectangle to limit the relative rotation of the valve cover 21 and the output end of the first driving member 22 .

[0065] Exemplarily, the valve housing 10 includes a support cylinder 11 coaxial with the output end of the first driving member 22, the spiral guide groove 301 is formed on the outer wall of the support cylinder 11, the valve cover 21 is formed with a avoidance hole coaxial with the support cylinder 11, and the guide block 35 is arranged on the inner wall of the avoidance hole. Preferably, the support cylinder 11 and the valve housing 10 are integrally formed to improve the overall strength of the valve housing 10.

[0066] Further exemplarily, the spiral angle of the spiral guide groove 301 is the same as the rotation angle of the valve cover 21; the height difference of the spiral guide groove 301 in the axial direction of the first driving member 22 is the same as the axial movement distance of the valve cover 21 in the first driving member 22.

[0067] Fig. 9 Shown in Figure 8Schematic diagram of the spiral guide groove in the example. Figure 8 and Fig. 9 In the example, the spiral groove 301 only includes an inclined section 3011 having a high end 30111 and a low end 30112. It can be understood that when the first driving member 22 rotates, the guide block 35 slides from the high end 30111 to the low end 30112, and drives the valve cover 21 to approach the air inlet 102. When the guide block 35 is at the low end 30112, the valve cover 21 reaches the covering position and the valve cover 21 presses the sealing ring 23 until it is deformed, so as to seal the air outlet 103 with the deformation. At this time, since the first driving member 22 implemented as a servo motor has a self-locking property, the valve cover 21 can maintain the state of pressing the sealing ring 23 to avoid leakage due to insufficient pressing force. When the first driving member 22 rotates in the opposite direction, the guide block 35 slides from the lower end 30112 to the higher end 30111 and drives the valve cover 21 away from the air inlet 102. When the guide block 35 is at the higher end 30111, the opening of the air inlet 102 is maximum.

[0068] Fig.10 Shown in Figure 8 A schematic diagram of another embodiment of the spiral guide groove in the example. Figure 8 and Fig.10 In the example, the spiral inclined groove 301 includes an inclined section 3011 having a high end 30111 and a low end 30112, and a straight section 3012 connected to the high end 30111. It can be understood by those skilled in the art that when the guide block 35 is located in the straight section 3012, the valve cover 21 only rotates but the height does not change. When the guide block 35 moves from the straight section 3012 to the high end 30111, the guide block 35 drives the valve cover 21 to approach the air inlet 102, and when the valve cover 21 reaches the covering position and the valve cover 21 presses the sealing ring 23 until it is deformed, so as to achieve sealing of the air outlet 103. First, the first driving member 22 implemented as a servo motor has self-locking properties, so that the valve cover 21 can maintain the state of pressing the sealing ring 23 to avoid leakage due to insufficient pressing force. Secondly, by shortening the height of the inclined section 3011, the speed of the air outlet 103 from opening to closing is increased.

[0069] Another embodiment of the present disclosure provides a wafer processing device, comprising the valve. The wafer processing device comprises a vacuum pump and a reaction chamber; the gas outlet 103 of the valve is connected to the inlet of the reaction chamber, and the gas inlet 102 of the valve is connected to the outlet of the vacuum pump.

[0070] In summary, the embodiment of the present disclosure provides a valve and a wafer processing device using the same. The valve includes a valve housing, a sealing member and a locking member. The valve housing includes a valve cavity, and an air inlet and an air outlet for connecting the valve cavity. The sealing member includes a valve cover, a first driving member and a sealing ring; the valve cover is rotatably arranged in the valve cavity to be rotated to open / close the air outlet; the first driving member is connected to and drives the valve cover to adjust the opening of the air outlet; the sealing ring is arranged between the valve cover and the inner wall surface of the valve cavity on the side around the air outlet. The locking member is arranged in the valve cavity, and when the valve cover reaches the covering position, it provides a force for the valve cover to press the sealing ring against the inner wall surface. The wafer processing device includes the valve. The advantage of the above arrangement is that by arranging the sealing ring between the valve cover and the air inlet, the sealing effect between the valve cover and the air outlet is improved, thereby avoiding the occurrence of gas leakage from the gap between the valve cover and the air outlet, and improving the sealing effect of the valve. At the same time, it can also avoid the situation where the gap between the valve cover and the gas outlet is not within the range of leakage detection, resulting in gas leakage without knowledge.

[0071] The above embodiments are merely illustrative of the principles and effects of the present disclosure, and are not intended to limit the present disclosure. Anyone familiar with the technology may modify or change the above embodiments without violating the spirit and scope of the present disclosure. Therefore, all equivalent modifications or changes made by those with ordinary knowledge in the technical field without departing from the spirit and technical ideas disclosed in the present disclosure shall still be covered by the protection scope of the present disclosure.

Claims

1. A valve, characterized in that: include: A valve housing, comprising a valve cavity, and an air inlet and an air outlet for communicating with the valve cavity; A sealing component, comprising a valve cover, a first driving member and a sealing ring; The valve cover is rotatably disposed in the valve cavity to be rotated to open / close the gas outlet; the first driving member is connected to and drives the valve cover to adjust the opening of the gas outlet; The sealing ring is arranged between the valve cover and the inner wall surface of the valve cavity around the air outlet; The locking member is arranged in the valve cavity and provides a force for the valve cover to press the sealing ring against the inner wall surface when the valve cover reaches the covering position.

2. The valve according to claim 1, characterized in that The locking member is configured to press down the valve cover.

3. The valve according to claim 1, characterized in that The valve cover is slidably coupled to the output end of the first driving member in a rotationally restricted manner; an elastic member is provided between the valve cover and the output end of the first driving member; and the valve cover can restore the deformation of the sealing ring under the elastic force of the elastic member.

4. The valve according to claim 1, characterized in that The locking member includes an inclined pressure block arranged on the inner wall of the valve cavity and located above the valve cover, the inclined pressure block includes a pressure inclined surface and a clamping plane, and the clamping plane is parallel to the valve cover; wherein the valve cover abuts against the pressure inclined surface during the process of moving to the covering position, and is pressed until the sealing ring is deformed, and when the valve cover reaches the covering position, the valve cover is in contact with the clamping plane.

5. The valve according to claim 1, characterized in that The locking component includes a second driving member, a locking ring and a buffer member; the locking ring is slidably coupled to the inner wall of the valve cavity along the axial direction of the first driving member; the output end of the second driving member is connected to the locking ring, and the buffer member is arranged between the locking ring and the inner wall of the valve cavity to absorb the force applied to the locking ring by the second driving member after the locking ring abuts against the valve cover.

6. The valve according to claim 5, characterized in that The sealing ring is implemented as at least two; the first sealing ring of the at least two sealing rings is arranged on the wall of the valve cover covering the air inlet; the second sealing ring of the at least two sealing rings is arranged on the wall of the valve cover facing the locking ring.

7. The valve according to claim 1, characterized in that The locking member is configured to pull down the valve cover.

8. The valve according to claim 1, characterized in that The locking member includes a spiral guide groove formed in the valve housing and a guide block engaged in the spiral guide groove; the guide block is arranged on the valve cover; wherein, when the valve cover reaches the covering position, the guide block is located at the end of the spiral guide groove close to the air outlet in the axial direction of the first driving member.

9. The valve according to claim 1, characterized in that The locking member includes a second driving member; the second driving member is arranged parallel to the first driving member, and the output end is combined with the wall surface of the valve cover facing the air outlet, and when the valve cover reaches the covering position, the valve cover is retracted and pulled down toward the wall surface of the air outlet; and / or, the second driving member is arranged parallel to the first driving member and located above the valve cover, and when the valve cover reaches the covering position, the output end of the second driving member extends out and presses down the wall surface of the valve cover facing away from the air outlet.

10. A wafer processing equipment, characterized in that: include: A valve as claimed in any one of claims 1 to 9.

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