Convection suppression vacuum structure of atomic spin inertial measurement device

Abstract

According to the convection suppression vacuum structure of the atomic spin inertial measurement device, a plurality of independent vacuum cavities are integrated together through a plurality of vacuum joints to form a vacuum integral structure, so that the modular design of the device is favorably realized, the disassembly and assembly difficulty is reduced, the debugging is convenient, the number of optical elements in an optical path is reduced, and the noise of the device is further reduced; the device is characterized in that the device comprises a magnetic shielding barrel vacuum cavity which is provided with a top plate and a bottom plate, an inner cavity of the magnetic shielding barrel vacuum cavity is used for installing a magnetic shielding barrel and a sensitive gauge head, the left side wall is connected with a detection light path inlet barrel vacuum cavity through an eleventh vacuum connector, and the right side wall is connected with a detection light path outlet barrel vacuum cavity through a seventh vacuum connector; the top plate is connected with the upper pumping light path vacuum cavity through a fifth vacuum connector, the bottom plate is connected with the lower pumping light path vacuum cavity through a ninth vacuum connector, and all the vacuum cavities are of an independent structure and are integrated into a whole through vacuum connectors.

Description

Technical Field

[0001] The present invention relates to the technical field of convection noise suppression in an atomic spin inertial measurement device, and in particular to a convection suppression vacuum structure for an atomic spin inertial measurement device. A plurality of discrete vacuum cavities are integrated together through a plurality of vacuum joints to form a vacuum overall structure, which is conducive to realizing modular design of the device, reducing the difficulty of disassembly and assembly, facilitating the debugging of the device, and reducing the number of optical elements in an optical path, thereby further reducing the noise of the device. Background Art

[0002] In the study of atomic spin inertial measurement, the suppression of convective noise is very critical. The inventors have found that placing the optical path and the sensitive meter head in a vacuum is an effective way to reduce the impact of the external environment on the output signal of the device and suppress the convective noise caused by the fluctuation of the optical path and the sensitive meter head caused by airflow disturbance. The inventors believe that by designing a convection suppression vacuum structure for the atomic spin inertial measurement device, for example, setting the device into multiple cavities, it is beneficial to the modular design of each part and the independent debugging of each part, reducing the difficulty of disassembly and assembly; connecting all vacuum structures in series into a vacuum whole, it is beneficial for the optical path to enter and exit the sensitive meter head, and the window at the entrance and exit of the sensitive meter head can be removed, which is beneficial to the long-term stability of the optical path performance and has a huge effect on the convective noise suppression of the device. In view of this, the inventors have completed this invention. Summary of the invention

[0003] In view of the defects or shortcomings in the prior art, the present invention provides a convection-suppressed vacuum structure for an atomic spin inertial measurement device, which integrates a plurality of discrete vacuum cavities together through a plurality of vacuum joints to form an overall vacuum structure, thereby facilitating the modular design of the device, reducing the difficulty of disassembly and assembly, facilitating the debugging of the device, and reducing the number of optical elements in the optical path, thereby further reducing the noise of the device.

[0004] The technical solution of the present invention is as follows:

[0005] A convection suppression vacuum structure for an atomic spin inertial measurement device, characterized in that it includes a centrally arranged magnetic shielding barrel vacuum chamber, the magnetic shielding barrel vacuum chamber has a magnetic shielding barrel vacuum chamber top plate and a magnetic shielding barrel vacuum chamber bottom plate, the inner cavity of the magnetic shielding barrel vacuum chamber is a vacuum chamber for installing the magnetic shielding barrel and a sensitive meter head, the left side wall of the magnetic shielding barrel vacuum chamber is connected to the detection light path entering the barrel vacuum chamber through an eleventh vacuum joint, the right side wall of the magnetic shielding barrel vacuum chamber is connected to the detection light path exiting the barrel vacuum chamber through a seventh vacuum joint, the top plate of the magnetic shielding barrel vacuum chamber is connected to the upper pumping light path vacuum chamber through a fifth vacuum joint, the bottom plate of the magnetic shielding barrel vacuum chamber is connected to the lower pumping light path vacuum chamber through a ninth vacuum joint, and each vacuum chamber is both an independent structure and a vacuum whole integrated together through vacuum joints.

[0006] The front side wall and the rear side wall of the vacuum cavity of the magnetic shielding barrel are both provided with vacuum joints (such as the eighth vacuum joint).

[0007] The detection light path entering the barrel vacuum cavity is provided with a detection light path entering the barrel vacuum cavity side wall window on its detection light path entering the barrel vacuum cavity side wall, and a plurality of vacuum joints (for example, the twelfth vacuum joint) are provided on the top wall of the detection light path entering the barrel vacuum cavity.

[0008] The bottom plate of the detection light path entering the barrel vacuum cavity is provided with optical element mounting threaded holes for mounting and fixing optical elements and lasers.

[0009] The upper pumping light path vacuum chamber comprises an upper pumping light path vacuum chamber top plate and a two-position array of threaded holes on the bottom surface of the upper pumping light path vacuum chamber body located on the bottom plate; a third vacuum joint and a fourth vacuum joint are arranged on the left side wall of the upper pumping light path vacuum chamber, and a first vacuum joint and a second vacuum joint are arranged on the right side wall of the upper pumping light path vacuum chamber.

[0010] The lower pumping light path vacuum chamber comprises a top plate and a bottom plate, the bottom plate is provided with a two-dimensional array of threaded holes of the bottom plate of the lower pumping light path vacuum chamber, the right side surface of the lower pumping light path vacuum chamber is provided with an adjustment port extending to the right, and the rear side surface and the front side surface of the lower pumping light path vacuum chamber are both provided with vacuum joints (for example, the tenth vacuum joint).

[0011] The technical effects of the present invention are as follows: the present invention provides a convection suppression vacuum structure for an atomic spin inertial measurement device, which places an optical path and a sensitive meter head in a vacuum, thereby reducing the influence of the external environment on the output signal of the device, and suppressing the convection noise caused by the fluctuation of the optical path and the sensitive meter head caused by airflow disturbance. In particular, by setting the vacuum structure as a structure connected by multiple cavities, it is conducive to the modular design of each part and the independent debugging of each part, and reduces the difficulty of disassembly and assembly; in particular, all vacuum structures are connected in series into a vacuum whole through the connection between the cavities, which is conducive to the optical path entering and exiting the sensitive meter head, and the window at the entrance and exit of the sensitive meter head can be removed, which is conducive to the long-term stability of the optical path performance. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 The present invention is a schematic structural diagram of a convection-suppressed vacuum structure of an atomic spin inertial measurement device.

[0013] The reference numerals are as follows: 1-upper pumping light path vacuum chamber top plate; 2-first vacuum joint; 3-upper pumping light path vacuum chamber; 4-second vacuum joint; 5-threaded hole on the bottom surface of the upper pumping light path vacuum chamber body; 6-fifth vacuum joint; 7-third vacuum joint; 8-fourth vacuum joint; 9-magnetic shielding barrel vacuum chamber top plate vacuum joint, i.e., sixth vacuum joint; 10-magnetic shielding barrel vacuum chamber (which contains a vacuum chamber for installing the magnetic shielding barrel and the sensitive meter head); 11-seventh vacuum joint; 12-detection light path out of the barrel vacuum chamber ;13-eighth vacuum joint;14-magnetic shielding barrel vacuum chamber top plate;15-magnetic shielding barrel vacuum chamber bottom plate;16-ninth vacuum joint;17-lower pumping light path vacuum chamber;18-adjustment port;19-tenth vacuum joint;20-threaded hole of the bottom plate of the lower pumping light path vacuum chamber;21-lower pumping light path vacuum chamber top plate;22-eleventh vacuum joint;23-detection light path entering the barrel vacuum chamber side wall;24-detection light path entering the barrel vacuum chamber side wall window;25-detection light path entering the barrel vacuum chamber;26-twelfth vacuum joint. DETAILED DESCRIPTION

[0014] Below is the attached figure ( Figure 1 ) and Examples illustrate the present invention.

[0015] Figure 1 It is a schematic diagram of the structure of a convection suppression vacuum structure of an atomic spin inertial measurement device according to the present invention. Figure 1 As shown, a convection suppression vacuum structure of an atomic spin inertial measurement device includes a centrally arranged magnetic shielding barrel vacuum chamber 10, wherein the magnetic shielding barrel vacuum chamber 10 has a magnetic shielding barrel vacuum chamber top plate 14 and a magnetic shielding barrel vacuum chamber bottom plate 15, wherein the inner cavity of the magnetic shielding barrel vacuum chamber 10 is a vacuum chamber for installing a sensitive meter head, wherein the left side wall of the magnetic shielding barrel vacuum chamber 10 is connected to a detection light path inlet barrel vacuum chamber 25 through an eleventh vacuum joint 22, and the right side wall of the magnetic shielding barrel vacuum chamber 10 is connected to a detection light path outlet barrel vacuum chamber 12 through a seventh vacuum joint 11, the magnetic shielding barrel vacuum chamber top plate 14 is connected to an upper pumping light path vacuum chamber 3 through a fifth vacuum joint 6, and the magnetic shielding barrel vacuum chamber bottom plate 15 is connected to a lower pumping light path vacuum chamber 17 through a ninth vacuum joint 16, wherein each vacuum chamber is both an independent structure and a vacuum whole integrated together through vacuum joints.

[0016] The front side wall and the rear side wall of the magnetic shielding barrel vacuum chamber 10 are both provided with vacuum joints (such as the eighth vacuum joint 13, etc.). The detection light path entering the barrel vacuum chamber 25 is provided with a detection light path entering the barrel vacuum chamber side wall window 24 (for wavelength and optical power monitoring of the optical path) on its detection light path entering the barrel vacuum chamber side wall 23, and a plurality of vacuum joints (such as the twelfth vacuum joint 26, etc.) are provided on the top wall of the detection light path entering the barrel vacuum chamber 25. The bottom plate of the detection light path entering the barrel vacuum chamber 25 is provided with optical element mounting threaded holes for mounting and fixing optical elements and lasers.

[0017] The upper pumping light path vacuum chamber 3 includes an upper pumping light path vacuum chamber top plate 1 and a two-dimensional array of threaded holes 5 on the bottom surface of the upper pumping light path vacuum chamber body located on the bottom plate (for installing optical elements or electrical elements, etc.), a third vacuum joint 7 and a fourth vacuum joint 8 (spare design, which can be used for electrical interface and fiber feedthrough) are arranged on the left wall of the upper pumping light path vacuum chamber 3, and a first vacuum joint 2 and a second vacuum joint 4 (spare design, which can be used for electrical interface and fiber feedthrough) are arranged on the right wall of the upper pumping light path vacuum chamber 3. The lower pumping light path vacuum chamber 17 includes a top plate and a bottom plate, and the bottom plate is provided with a two-dimensional array of threaded holes 20 on the bottom plate of the lower pumping light path vacuum chamber, and the right side of the lower pumping light path vacuum chamber 17 is provided with an adjustment port 18 extending to the right (for use in adjusting and opening the light path), and the rear side and front side of the lower pumping light path vacuum chamber 17 are both provided with vacuum joints (such as the tenth vacuum joint 19, etc.).

[0018] If a vacuum cavity of a sensitive meter head is set in the vacuum cavity of the magnetic shielding barrel, a vacuum joint for connection between the vacuum cavity of the sensitive meter head and the magnetic shielding barrel (such as a vacuum joint on the top plate of the magnetic shielding barrel and the vacuum cavity of the sensitive meter head, i.e., the sixth vacuum joint 9, etc.) is required. Alternatively, the vacuum cavity of the magnetic shielding barrel and the vacuum cavity of the sensitive meter head are one vacuum cavity, the interior of the cavity is the magnetic shielding barrel, and the interior of the magnetic shielding barrel is the sensitive meter head.

[0019] A convection-suppressed vacuum structure design for an atomic spin inertial measurement device can not only install sensitive elements such as the optical path and meter head of the device in the designed overall vacuum structure, reduce the impact of the external environment on the output signal of the device, and suppress convection noise caused by fluctuations in the optical path and sensitive meter head caused by airflow disturbances; it can also maintain the independence of various components, realize modular design of the device, reduce the difficulty of disassembly and assembly, and facilitate the debugging of the device; at the same time, it reduces the number of optical elements in the optical path, and further reduces the noise of the device. A convection-suppressed vacuum structure for an atomic spin inertial measurement device comprises a magnetic shielding barrel and a sensitive meter head vacuum cavity, an upper pumping light path vacuum cavity, a lower pumping light path vacuum cavity, a detection light path inlet barrel vacuum cavity and a detection light path outlet barrel vacuum cavity, wherein the magnetic shielding barrel and the sensitive meter head vacuum cavity are cylindrical, the upper pumping light path vacuum cavity, the lower pumping light path vacuum cavity, the detection light path inlet barrel vacuum cavity and the detection light path outlet barrel vacuum cavity are square, and optical path installation threaded holes are provided inside for installation of optical components, the cavities are connected by vacuum joints to form a vacuum whole, and the optical path can freely enter and exit the magnetic shielding barrel and the sensitive meter head vacuum cavity through the connection to realize low convection noise atomic spin inertial measurement.

[0020] The magnetic shielding barrel and the sensitive meter head vacuum chamber include a bottom plate, a side wall and a top plate. The bottom plate is provided with mounting threaded holes for mounting and fixing the magnetic shielding barrel and the sensitive meter head. A vacuum joint is provided in the center for connecting with the lower pumping light path vacuum chamber, through which the lower pumping light can enter; the side wall is provided with a vacuum joint for connecting with the detection light path inlet barrel vacuum chamber and the detection light path outlet barrel vacuum chamber, through which the detection light can enter and exit, and the remaining joints are used for electrical joints and vacuum pump interfaces; a vacuum joint is provided in the center of the top plate for connecting with the upper pumping light path vacuum chamber, through which the upper pumping light can enter.

[0021] The upper pumping light path vacuum chamber comprises a main body and a top plate portion, wherein the bottom surface of the main body portion is provided with an optical element mounting threaded hole for mounting and fixing the optical element, the side surface is provided with a vacuum joint for introducing a pumping laser and an electrical joint, and the center of the bottom surface is provided with a vacuum joint connected to the magnetic shielding barrel and the vacuum chamber of the sensitive meter head, through which the pumping light enters the magnetic shielding barrel and the vacuum chamber of the sensitive meter head; the top plate is used for sealing the upper pumping light path vacuum chamber.

[0022] The lower pumping light path vacuum chamber comprises a bottom plate, side walls and a top plate, wherein the bottom plate is provided with optical element mounting threaded holes for mounting and fixing the optical elements; the side walls are provided with vacuum joints and side wall adjustment ports, wherein the vacuum joints are used for laser introduction and electrical joints, and the side wall adjustment ports are used for optical path adjustment and opening; the top plate is provided with a vacuum joint connected to the magnetic shielding barrel and the vacuum chamber of the sensitive meter head, and the lower pumping light enters the magnetic shielding barrel and the vacuum chamber of the sensitive meter head from there.

[0023] The detection light path entering the barrel vacuum cavity comprises a bottom plate, side walls and a top plate. The bottom plate is provided with optical element mounting threaded holes for mounting and fixing optical elements and lasers; the side wall is provided with a vacuum joint connected to the magnetic shielding barrel and the vacuum cavity of the sensitive meter head, and the detection light enters the magnetic shielding barrel and the vacuum cavity of the sensitive meter head from there; the side wall is also provided with a window for monitoring the wavelength and optical power of the light path; the top plate is provided with a vacuum joint for electrical interface and optical fiber feedthrough.

[0024] The detection light path barrel vacuum cavity comprises a bottom plate, side walls and a top plate. The bottom plate is provided with optical element mounting threaded holes for the installation and fixation of the optical elements; the side wall is provided with a vacuum joint connected to the magnetic shielding barrel and the sensitive meter head vacuum cavity, for receiving the detection light from the magnetic shielding barrel and the sensitive meter head vacuum cavity; the top plate is provided with a vacuum joint for electrical interface and optical fiber feedthrough.

[0025] A convection suppression vacuum structure for an atomic spin inertial measurement device is configured as a structure in which multiple cavities are connected, and in particular, all vacuum structures are connected in series to form a vacuum whole through the connection between the cavities. Placing the optical path and the sensitive meter head in a vacuum can reduce the influence of the external environment on the output signal of the device, and suppress the convection noise caused by the fluctuation of the optical path and the sensitive meter head caused by airflow disturbance. Configuring the device into multiple cavities is conducive to the modular design of each part and independent debugging of each part, reducing the difficulty of disassembly and assembly. Connecting all vacuum structures in series to form a vacuum whole is conducive to the optical path entering and exiting the sensitive meter head, and the window sheet at the entrance and exit of the sensitive meter head can be removed, which is conducive to the long-term stability of the optical path performance.

[0026] like Figure 1 As shown, a convection suppression vacuum structure design of an atomic spin inertial measurement device includes a magnetic shielding barrel and a sensitive meter head vacuum cavity 10, an upper pumping light path vacuum cavity 3, a lower pumping light path vacuum cavity 17, a detection light path entry barrel vacuum cavity 25 and a detection light path exit barrel vacuum cavity 12.

[0027] A magnetic shielding barrel and a sensitive meter head vacuum chamber side wall is arranged in the middle of the magnetic shielding barrel and a sensitive meter head vacuum chamber 10, and a magnetic shielding barrel and a sensitive meter head vacuum chamber side wall vacuum joint 11, 13, 22 is arranged on the magnetic shielding barrel and a sensitive meter head vacuum chamber side wall. A magnetic shielding barrel and a sensitive meter head vacuum chamber top plate 14 is arranged just above the magnetic shielding barrel and a sensitive meter head vacuum chamber side wall. A magnetic shielding barrel and a sensitive meter head vacuum chamber bottom plate 15 is arranged just below the magnetic shielding barrel and a sensitive meter head vacuum chamber side wall.

[0028] The magnetic shielding barrel and the sensitive meter head vacuum chamber 10 are connected to the upper pumping optical path vacuum chamber 3 through the magnetic shielding barrel and the sensitive meter head vacuum chamber top plate vacuum joint 9, and the upper pumping optical path vertically enters the magnetic shielding barrel and the sensitive meter head vacuum chamber 10;

[0029] The magnetic shielding barrel and sensitive meter head vacuum chamber 10 is connected to the lower pumping optical path vacuum chamber 17 through the magnetic shielding barrel and sensitive meter head vacuum chamber bottom plate vacuum joint 16, and the lower pumping optical path vertically enters the magnetic shielding barrel and sensitive meter head vacuum chamber 10;

[0030] The magnetic shielding barrel and sensitive meter head vacuum chamber 10 is connected to the detection light path entering barrel vacuum chamber 25 through the vacuum joint 22 on the side wall of the magnetic shielding barrel and sensitive meter head vacuum chamber, and the detection light path enters the magnetic shielding barrel and sensitive meter head vacuum chamber 10 horizontally from there;

[0031] The magnetic shielding barrel and sensitive meter head vacuum chamber 10 is connected to the detection light path barrel vacuum chamber 12 through the vacuum joint 11 on the side wall of the magnetic shielding barrel and sensitive meter head vacuum chamber, and the detection light path is horizontally emitted from the magnetic shielding barrel and sensitive meter head vacuum chamber 10 to the detection light path barrel vacuum chamber 12.

[0032] The upper pumping light path vacuum chamber 3 is located directly above the magnetic shielding barrel and the sensitive meter head vacuum chamber 10, and the upper pumping light path vacuum chamber 3 main body side wall is provided with upper pumping light path vacuum chamber main body side wall vacuum joints 2, 4, 7, 8, and the upper pumping light path vacuum chamber 3 main body bottom surface is provided with an upper pumping light path vacuum chamber main body bottom surface threaded hole 5, and the upper pumping light path vacuum chamber main body bottom surface vacuum joint 6 is provided at the center of the upper pumping light path vacuum chamber 3 main body bottom surface, and the upper pumping light path vacuum chamber top plate 1 is provided directly above the upper pumping light path vacuum chamber 3 main body.

[0033] The lower pumping light path vacuum chamber 17 is located directly below the magnetic shielding barrel and the sensitive meter head vacuum chamber 10. A lower pumping light path vacuum chamber side wall is provided in the middle of the lower pumping light path vacuum chamber 17. A lower pumping light path vacuum chamber side wall vacuum joint 19 and a lower pumping light path vacuum chamber side wall adjustment port 18 are provided on the lower pumping light path vacuum chamber side wall. A lower pumping light path vacuum chamber top plate 21 is provided directly above the lower pumping light path vacuum chamber side wall. A lower pumping light path vacuum chamber bottom plate is provided directly below the lower pumping light path vacuum chamber side wall. A lower pumping light path vacuum chamber bottom plate threaded hole 20 is provided on the lower pumping light path vacuum chamber bottom plate.

[0034] The detection light path entering the barrel vacuum cavity 25 is located on the side of the magnetic shielding barrel and the sensitive meter head vacuum cavity 10. A detection light path entering the barrel vacuum cavity side wall 23 is arranged in the middle of the detection light path entering the barrel vacuum cavity 25. The detection light path entering the barrel vacuum cavity side wall window 24 is arranged on the detection light path entering the barrel vacuum cavity side wall 23. A detection light path entering the barrel vacuum cavity top plate is arranged directly on the detection light path entering the barrel vacuum cavity side wall 23. The detection light path entering the barrel vacuum cavity top plate vacuum joint 26 is arranged on the detection light path entering the barrel vacuum cavity top plate.

[0035] The detection light path exit barrel vacuum chamber 12 is located on the side of the magnetic shielding barrel and sensitive meter head vacuum chamber 10 , and is symmetrically placed with the detection light path entry barrel vacuum chamber 25 relative to the magnetic shielding barrel and sensitive meter head vacuum chamber 10 .

[0036] The contents not described in detail in the specification of the present invention belong to the prior art known to the professional and technical personnel in the field. It is pointed out here that the above description helps those skilled in the art to understand the invention, but does not limit the protection scope of the invention. Any equivalent replacement, modification and / or simplification of the above description without departing from the essence of the invention falls within the protection scope of the invention.

Claims

1. A convection-suppressed vacuum structure for an atomic spin inertial measurement device, characterized in that: It includes a centrally arranged magnetic shielding barrel vacuum chamber, the magnetic shielding barrel vacuum chamber has a magnetic shielding barrel vacuum chamber top plate and a magnetic shielding barrel vacuum chamber bottom plate, the inner cavity of the magnetic shielding barrel vacuum chamber is a vacuum chamber for installing the magnetic shielding barrel and a sensitive meter head, the left side wall of the magnetic shielding barrel vacuum chamber is connected to the detection light path entering the barrel vacuum chamber through the eleventh vacuum joint, the right side wall of the magnetic shielding barrel vacuum chamber is connected to the detection light path exiting the barrel vacuum chamber through the seventh vacuum joint, the top plate of the magnetic shielding barrel vacuum chamber is connected to the upper pumping light path vacuum chamber through the fifth vacuum joint, and the bottom plate of the magnetic shielding barrel vacuum chamber is connected to the lower pumping light path vacuum chamber through the ninth vacuum joint, and each vacuum chamber is both an independent structure and a vacuum whole integrated through vacuum joints.

2. The convection suppression vacuum structure of the atomic spin inertial measurement device according to claim 1, characterized in that: The front side wall and the rear side wall of the vacuum cavity of the magnetic shielding barrel are both provided with vacuum joints.

3. The convection suppression vacuum structure of the atomic spin inertial measurement device according to claim 1, characterized in that: The detection light path entering the barrel vacuum cavity is provided with a detection light path entering the barrel vacuum cavity side wall window on its detection light path entering the barrel vacuum cavity side wall, and a plurality of vacuum joints are provided on the top wall of the detection light path entering the barrel vacuum cavity.

4. The convection suppression vacuum structure of the atomic spin inertial measurement device according to claim 1, characterized in that: The bottom plate of the detection light path entering the barrel vacuum cavity is provided with optical element mounting threaded holes for mounting and fixing optical elements and lasers.

5. The convection suppression vacuum structure of the atomic spin inertial measurement device according to claim 1, characterized in that: The upper pumping light path vacuum chamber comprises an upper pumping light path vacuum chamber top plate and a two-position array of threaded holes on the bottom surface of the upper pumping light path vacuum chamber body located on the bottom plate; a third vacuum joint and a fourth vacuum joint are arranged on the left side wall of the upper pumping light path vacuum chamber, and a first vacuum joint and a second vacuum joint are arranged on the right side wall of the upper pumping light path vacuum chamber.

6. The convection suppression vacuum structure of the atomic spin inertial measurement device according to claim 1, characterized in that: The lower pumping light path vacuum chamber comprises a top plate and a bottom plate, the bottom plate is provided with a two-dimensional array of threaded holes of the lower pumping light path vacuum chamber bottom plate, the right side surface of the lower pumping light path vacuum chamber is provided with an adjustment port extending to the right, and the rear side surface and the front side surface of the lower pumping light path vacuum chamber are both provided with vacuum joints.

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