Thin film permeation injection lubricating method based on thermal spraying material surface

Abstract

A thin film permeation injection lubricating method based on the surface of a thermal spraying material comprises the following steps that S1, a base material of a prepared tungsten carbide coating is machined into the specification of 16 * 16 * 3 mm through metal sample cutting machine tool equipment; s2, the base body is subjected to a series of pretreatment such as cleaning, sand blasting and deburring; s3, fixing a film material prepared in advance on the substrate; and S4, the surface of the base body is plated with a C film / TiN film through magnetron sputtering equipment. On the basis of a tungsten carbide coating, a layer of thin film is plated on the tungsten carbide coating through the magnetron sputtering technology in physical vapor deposition, the thin film with good compactness, adhesive force and other performance can be obtained through magnetron sputtering coating, and the thin film prepared through the magnetron sputtering method is small in particle, compact and good in film-substrate binding force.

Description

Technical Field

[0001] The invention relates to the technical field of coating equipment, and in particular to a thin film infiltration lubrication method based on the surface of a thermal spraying material. Background Art

[0002] Because the development of automobiles has brought a lot of energy consumption and pollution to the environment, the engine, as the core component and power output device of the vehicle, plays a decisive role in the performance and energy saving and emission reduction of the vehicle. The engine cylinder liner, as the internal working surface, forms a combustion chamber with the piston. During the working process, it is subjected to the high temperature and high pressure generated by the fuel. At the same time, it is subjected to long-term reciprocating friction between the piston ring and the piston skirt, and constantly bears the pressure load, which is very easy to cause serious wear and even cylinder pulling. Therefore, the core of improving wear resistance lies in exploring effective solutions. There are currently three feasible methods to choose from. The first is to embed an iron cylinder liner in the engine cylinder body. However, this method places extremely high requirements on the precision of assembly. If the precise assembly standard is not met, a series of problems such as uneven force and thermal expansion may occur, which significantly increases the cost of the processing and assembly process; the second is to choose to use hypereutectic aluminum silicon as the material of the cylinder liner. This method seems simple, but the process is a bit cumbersome, and the technology has not yet reached maturity. Therefore, the silicon phase structure obtained by this method is coarse and prone to cracking.

[0003] Magnetron sputtering is a type of physical vapor deposition. The general sputtering method can be used to prepare metals, semiconductors, insulators and other materials. It has the advantages of simple equipment, easy control, large coating area and strong adhesion. Because it is a high-speed sputtering under low pressure, the ionization rate of the gas must be effectively increased. Magnetron sputtering introduces a magnetic field on the target cathode surface and uses the magnetic field to confine charged particles to increase the plasma density and increase the sputtering rate.

[0004] Most existing magnetron sputtering equipment uses bolts and threads to fix the target when installing it. The steps for installing and removing the target are too complicated, which results in a long time spent on the target installation step during the coating operation, greatly prolonging the coating process time and reducing the efficiency of magnetron sputtering coating. In addition, the existing thin film infiltration lubrication method on the surface of thermal spray materials often produces thin films with large particles and poor film-base bonding. Summary of the invention

[0005] The invention discloses a thin film infiltration lubrication method based on the surface of a thermal spray material, aiming to solve the technical problem that the target material installation on the existing magnetron sputtering equipment in the background technology is too complicated.

[0006] A magnetron sputtering device proposed in the present invention comprises a box body, one side of the box body is connected to a box door by a hinge, the box door is provided with an observation window, and a sealing module is arranged on the box door, a control cabinet is arranged outside the box body, a base plate is fixedly connected to the bottom inner wall of the box body, a quick installation module is arranged on the base plate, a target material is arranged in the quick installation module, and a containing frame is fixedly connected to a side of the box body away from the box door, an argon gas bottle is arranged in the containing frame, an argon gas bottle is arranged on the argon gas bottle, an end of the gas supply pipe away from the argon gas bottle passes through the outside of the box body into the box body, and a vacuum pump is fixedly connected to the upper side of the containing frame, the output end of the vacuum pump is connected to an exhaust pipe through a conduit, and the end of the exhaust pipe away from the vacuum pump enters the box body, a calibration module is arranged in the box body, a substrate is arranged at the bottom of the calibration module, and the substrate is located above the quick installation module.

[0007] By providing a box body, a box door, an observation window, a control cabinet, a base plate, a quick installation module, a calibration module, a sealing module, a substrate, a partition frame, a containing frame, an argon gas cylinder, a gas pump, a gas pipe and a target material, the equipment utilizes a quick installation module to achieve rapid disassembly and replacement of the target material when coating the substrate with different materials, which greatly reduces the process waiting time of the sputtering coating process and improves the working efficiency of the equipment.

[0008] In a preferred embodiment, the quick installation module includes a mounting ring, the bottom of the mounting ring is fixedly connected to the upper side of the base plate, the inner wall of the mounting ring is rotatably connected to a support rod through an external thread, the upper side of the support rod is fixedly connected to a base, the base and the support rod are both provided with insertion holes, the same conductive rod is arranged in the insertion hole, the upper side of the conductive rod is fixedly connected to a stabilizing plate, and the upper side of the base is provided with a plurality of grooves equidistantly distributed around the circumference, the same stabilizing plate is clamped in the grooves, and the stabilizing plate is fixedly connected to the side opposite to the conductive rod; the upper side of the stabilizing plate is fixedly connected A chimeric frame is provided, a circular groove is provided at the bottom of the chimeric frame, a magnet is slidably connected in the circular groove, a mounting seat is fixedly connected on the upper side of the chimeric frame, four circumferentially equidistantly distributed sliding grooves are provided on the upper side of the mounting seat, limited blocks are slidably connected in the sliding grooves, short shafts are fixedly connected on the upper sides of the limited blocks, and opposite sides of the four limited blocks are all fitted with the outside of the target material, an adjustment frame is movably connected on the upper side of the mounting seat, four circumferentially equidistantly distributed curved grooves are provided on the adjustment frame, the inner walls of the four curved grooves are respectively slidably connected to the outside of the four short shafts, and a coil is fixedly connected to the inner wall of the adjustment frame Spring, one end of the coil spring away from the adjustment frame is fixedly connected to the upper side of the mounting seat; the base, stabilizing plate, chimeric frame, and the outside of the mounting seat are slidably connected with the same isolation cover, the upper side of the isolation cover is provided with a sputtering hole, the sputtering hole and the target material are located on the same axis, the bottom of the base is fixedly connected with four circumferentially equidistantly distributed binding guide rails, the binding guide rails are slidably connected with a clamping fastener, the outside of the isolation cover is provided with four circumferentially equidistantly distributed cutting grooves, the inner walls of the cutting grooves are fixedly connected with racks 1, the outsides of the four clamping fasteners are respectively clamped with the four racks 1, and the outside of the support rod A connecting ring is slidably connected; four push-pull rods equidistantly distributed around the circumference are movably connected on the upper side of the connecting ring, and the ends of the four push-pull rods away from the connecting ring are respectively movably connected to the ends of the four locking fasteners away from the rack one, the outsides of the push-pull rods are slidably connected to the inner wall of the restraining guide rail, and the outside of the support rod is fixedly connected with a fixing ring, the fixing ring is located below the connecting ring, and a spring one is fixedly connected to the side of the fixing ring opposite to the connecting ring, the spring one is wrapped around the outside of the support rod, and the outside of the support rod is fixedly connected with a rotating circle, the rotating circle is located below the fixing ring and above the mounting ring.

[0009] By providing a quick installation module, the quick installation module can use curved grooves and limit blocks to quickly and conveniently fix the target material, and the target material can be firmly maintained in the position during sputtering operation without changing, thereby improving the stability of the equipment when installing the target material. At the same time, the fasteners and racks that can be quickly unlocked can help workers save a lot of disassembly and assembly time, reduce the workload of workers, and improve work efficiency.

[0010] In a preferred embodiment, the calibration module includes a sliding rod and a screw rod, and the inner walls on both sides of the box body away from the box door are fixedly connected to partition frames, and two symmetrical circular holes are provided in the two partition frames. The two circular holes on the same side are respectively movably connected to the outside of the sliding rod and the screw rod, and sliders are provided on the sliding rod and the screw rod. The opposite sides of the two sliders are movably connected to the same threaded rod, and two symmetrical limiting rods are provided on the outside of the threaded rod, and the two limiting rods are fixedly connected to the opposite sides of the two sliders. The same transmission block is provided on the outside of the limiting rod and the threaded rod, and the inner wall of one of the partition frames is fixedly connected to motor 1, and the output of motor 1 The output end is connected to one side of the screw rod through a coupling; the outside of the slider located on the screw rod is fixedly connected to motor 2, the output end of motor 2 is connected to a gear through a coupling, the outside of the threaded rod is fixedly connected to gear ring 1, gear ring 1 is meshed with the gear, the bottom of the transmission block is fixedly connected to a hydraulic rod, the output end of the hydraulic rod is fixedly connected to an isolation frame, the top inner wall of the isolation frame is fixedly connected to motor 3, the output end of motor 3 is connected to a accommodating frame through a coupling, and a pump is arranged on the accommodating frame. The output end of the pump is connected to a suction cup through a pipeline, the bottom of the suction cup is in contact with the upper side of the substrate, and the outside of the accommodating frame is fixedly connected to a baffle, which is located above the substrate.

[0011] By providing a calibration module, the calibration module uses a lead screw and a threaded rod to enable the device to automatically calibrate the position of the substrate according to the position of the target material, so that the positions of the substrate and the target material are consistent, thereby improving the device when sputtering and coating the substrate. The material on the target material can be more accurately and evenly covered on the surface of the substrate, thereby improving the quality of the coating.

[0012] In a preferred solution, the sealing module includes a sealing gasket 1, a side of the box body close to the box door is fixedly connected to the outside of the sealing gasket 1, a side of the box door close to the box body is fixedly connected to a sealing gasket 2, and the sealing gasket 1 fits on the side opposite to the sealing gasket 2, a side of the box body away from the control cabinet is fixedly connected to a locking block, a side of the box door away from the control cabinet is fixedly connected to a connecting block, and the connecting block and the locking block are both provided with fitting holes, and the same bolt is provided in the two fitting holes; a toothed ring 2 is provided on the outside of the bolt, and the toothed ring 2 is located on the side of the connecting block away from the locking block. Ring 2 is movably connected to the side opposite to the connecting block, and a knob is fixedly connected to the side of the gear ring 2 away from the connecting block, and the knob is located outside the bolt; an annular frame is arranged on the outside of the gear ring 2, and a stopper is slidably connected to the inner wall of the annular frame, and the stopper is fixedly connected to the side opposite to the connecting block, and two symmetrical springs 2 are fixedly connected to the side of the stopper away from the gear ring 2, and one end of the two springs 2 away from the stopper are fixedly connected to the inner wall of the annular frame, and a rack 2 is clamped on the outside of the gear ring 2, and the rack 2 is fixedly connected to the side opposite to the inner wall of the annular frame, and a toggle groove is provided on the connecting block.

[0013] By providing a sealing module, the sealing module can continuously pressurize sealing gasket 1 and sealing gasket 2 using bolts, connecting blocks and locking blocks, thereby quickly increasing the compactness of sealing gasket 1 and sealing gasket 2, thereby maintaining sufficient sealing inside the box, reducing the entry of external impurities into the box, improving the purity of argon gas in the box, and preventing the thin film formed by sputtering on the substrate from being contaminated, thereby improving the quality of equipment coating.

[0014] A thin film infiltration lubrication method based on the surface of a thermal spray material comprises the following steps:

[0015] S1: Use a metal sample cutting machine to process the substrate material with the tungsten carbide coating into a size of 16×16×3mm;

[0016] S2: The substrate is subjected to a series of pretreatments such as cleaning, sandblasting, and deburring;

[0017] S3: Fix the prepared film material on the substrate;

[0018] S4: Use magnetron sputtering equipment to coat C film / TiN film on the surface of the substrate.

[0019] Compared with the prior art, this patent has the following technical effects:

[0020] 1. The magnetron sputtering equipment provided by the present invention can realize the rapid disassembly and replacement of the target material when coating different materials on the substrate, which greatly reduces the process waiting time of the sputtering coating process and improves the working efficiency of the equipment.

[0021] 2. On the basis of tungsten carbide coating, a thin film is coated on it through magnetron sputtering technology in physical vapor deposition. Magnetron sputtering coating can obtain a thin film with good properties such as density and adhesion. The film prepared by magnetron sputtering method has fine particles, dense film and good film-base bonding. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 A schematic diagram of the overall structure of a magnetron sputtering device proposed by the present invention;

[0023] Figure 2 A schematic cross-sectional view of a magnetron sputtering device proposed by the present invention;

[0024] Figure 3 A schematic diagram of the structure of a quick installation module of a magnetron sputtering device proposed by the present invention;

[0025] Figure 4 A schematic diagram of the support rod structure of a magnetron sputtering device proposed by the present invention;

[0026] Figure 5A schematic diagram of the base structure of a magnetron sputtering device proposed by the present invention;

[0027] Figure 6 A schematic diagram of the structure of a mounting base for a magnetron sputtering device proposed by the present invention;

[0028] Figure 7 A schematic diagram of the structure of a calibration module of a magnetron sputtering device proposed by the present invention;

[0029] Figure 8 A schematic diagram of the sealing module structure of a magnetron sputtering device proposed by the present invention;

[0030] Fig. 9 A schematic diagram of the connecting block structure of a magnetron sputtering device proposed by the present invention;

[0031] Fig.10 It is a schematic diagram of the process of thin film infiltration lubrication method based on the surface of thermal spraying material. DETAILED DESCRIPTION

[0032] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0033] Example 1

[0034] Reference Figure 1-9 A magnetron sputtering device comprises a box body 1, a box door 2 is connected to one side of the box body 1 through a hinge, an observation window 3 is provided on the box door 2, and a sealing module 8 is provided on the box door 2, a control cabinet 4 is provided outside the box body 1, a base plate 5 is connected to the bottom inner wall of the box body 1 through bolts, a quick installation module 6 is provided on the base plate 5, a target material 15 is provided in the quick installation module 6, and a receiving frame 11 is connected to the side of the box body 1 away from the box door 2 through bolts, and a receiving frame 11 is provided in the receiving frame 11 There is an argon gas cylinder 12, on which a gas pipe 14 is provided, and one end of the gas pipe 14 away from the argon gas cylinder 12 passes through the outside of the box body 1 and enters the box body 1, and a vacuum pump 16 is connected to the upper side of the accommodating frame 11 by bolts, and the output end of the vacuum pump 16 is connected to an exhaust pipe through a conduit, and the end of the exhaust pipe away from the vacuum pump 16 enters the box body 1, and a calibration module 7 is provided in the box body 1, and a substrate 9 is provided at the bottom of the calibration module 7, and the substrate 9 is located above the quick installation module 6.

[0035] Specifically, before opening the box door 2, start the vacuum pump 16 to input air into the box body 1, so as to balance the air pressure inside the box body 1 and the outside, use the sealing module 8 to open the box door 2, use the quick installation module 6 to fix the target 15 in the equipment, ensure that the quick installation module 6 and the base plate 5 are firmly connected and in good contact, put the substrate 9 into the equipment, use the calibration module 7 to adsorb the substrate 9 and adjust the position of the calibration substrate 9 and the target 15, so that the substrate 9 and the target 15 are on the same axis, use the sealing module 8 to close the box door 2 and ensure the seal, start the vacuum pump 16 to exhaust the air in the box body 1 until a vacuum state is reached, start the gas supply pump 13, and let the gas supply pump 13 inject the argon gas in the argon bottle 12 into the box body 1 through the gas supply pipe 14, and start the magnetron sputtering coating operation on the substrate 9; the equipment can use the quick installation module 6 to realize the rapid disassembly and replacement of the target 15 when coating the substrate 9 with different materials, which greatly reduces the process waiting time of the sputtering coating process and improves the working efficiency of the equipment.

[0036] Reference Figure 2 , Figure 3 , Figure 4 , Figure 5 and Figure 6In a preferred embodiment, the quick installation module 6 includes a mounting ring 601, the bottom of the mounting ring 601 is connected to the upper side of the base plate 5 by bolts, the inner wall of the mounting ring 601 is rotatably connected to a support rod 614 by an external thread, the upper side of the support rod 614 is connected to a base 603 by bolts, the base 603 and the support rod 614 are both provided with an insertion hole 604, the insertion hole 604 is provided with a same conductive rod 605, the upper side of the conductive rod 605 is connected to a stabilizing plate 615 by bolts, and the upper side of the base 603 is provided with a plurality of grooves equidistantly distributed around the circumference. , the same stabilizing plate 615 is clamped in the grooves, and the side of the stabilizing plate 615 opposite to the conductive rod 605 is connected by bolts; the upper side of the stabilizing plate 615 is connected with a fitting frame 617 by bolts, and a circular notch 620 is provided at the bottom of the fitting frame 617, and a magnet 616 is slidably connected in the circular notch 620, and a mounting seat 619 is connected to the upper side of the fitting frame 617 by bolts, and four circumferentially equidistantly distributed sliding grooves 621 are provided on the upper side of the mounting seat 619, and a limiting block 622 is slidably connected in the sliding groove 621, and a short shaft is connected to the upper side of the limiting block 622 by bolts, and The opposite sides of the four limit blocks 622 are all fitted with the outside of the target material 15. The upper side of the mounting seat 619 is rotatably connected with an adjustment frame 623 through a bearing. The adjustment frame 623 is provided with four circumferentially equidistantly distributed curved grooves 624. The inner walls of the four curved grooves 624 are respectively slidably connected to the outside of the four short shafts. The inner wall of the adjustment frame 623 is connected with a coil spring 625 through bolts. The end of the coil spring 625 away from the adjustment frame 623 is connected to the upper side of the mounting seat 619 through bolts. The base 603, the stabilizing plate 615, the chimeric frame 617, and the outside of the mounting seat 619 are slidably connected with the same An isolation cover 602, a sputtering hole 618 is provided on the upper side of the isolation cover 602, and the sputtering hole 618 and the target material 15 are located on the same axis. The bottom of the base 603 is connected to four circumferentially equidistantly distributed restraining rails 610 by bolts, and the restraining rails 610 are slidably connected with a clamping fastener 611. The outside of the isolation cover 602 is provided with four circumferentially equidistantly distributed grooves, and the inner walls of the grooves are connected with a rack 1 613 by bolts. The outsides of the four clamping fasteners 611 are respectively clamped with the four racks 1 613, and the outside of the support rod 614 is slidably connected with a connecting ring 608;The upper side of the connecting ring 608 is rotatably connected with four push-pull rods 612 that are equidistantly distributed around the circumference through bearings. The ends of the four push-pull rods 612 that are away from the connecting ring 608 are respectively rotatably connected with the ends of the four locking fasteners 611 that are away from the rack 1 613 through bearings. The outsides of the push-pull rods 612 are all slidably connected with the inner wall of the restraining guide rail 610, and the outside of the support rod 614 is connected with a fixing ring 607 through bolts. The fixing ring 607 is located below the connecting ring 608. The side of the fixing ring 607 opposite to the connecting ring 608 is connected with a spring 1 609 through bolts. The spring 1 609 surrounds the outside of the supporting rod 614. The outside of the supporting rod 614 is connected with a rotating ring 606 through bolts. The rotating ring 606 is located below the fixing ring 607 and above the mounting ring 601. ;

[0037] Specifically, before fixing the target 15 on the device, align the support rod 614 with the mounting ring 601, insert it and rotate the rotating circle 606, so that the support rod 614 is screwed into the mounting ring 601 and fixed on the base plate 5, and the conductive rod 605 connected to the stabilizing plate 615 is inserted into the insertion hole 604, so that the bottom of the stabilizing plate 615 is clamped with the groove on the base 603 to ensure that the bottom of the conductive rod 605 is in close contact with the base plate 5, and the adjusting frame 623 on the chimeric frame 617 connected to the stabilizing plate 615 is rotated. When the adjusting frame 623 overcomes the torsion of the coil spring 625 and rotates, the inner wall of the curved groove 624 pushes the short shaft on the limit block 622, so that the limit block 622 moves to the outside of the mounting seat 619, and the target 15 is placed in the cavity at the center of the mounting seat 619, and the adjusting frame 623 is loosened. 25 torque, the limit block 622 quickly clamps the target 15, pick up the isolation cover 602, align it with the target 15 and insert it from top to bottom, so that the isolation cover 602 slides downward on the outside of the mosaic frame 617, grab the connecting ring 608 and push it upward, so that the connecting ring 608 drives the push-pull rod 612 to push the locking fastener 611 to move to the outside of the base 603, after the isolation cover 602 is completely lowered, release the connecting ring 608, and under the pull of the spring 1 609, the connecting ring 608 drives the push-pull rod 612 to reset, so that the locking fastener 611 connected to the push-pull rod 612 can be engaged with the rack 1 613 on the isolation cover 602, so that the isolation cover 602 is fixed on the base 603, so that the isolation cover 602 wraps the argon gas bottle 12, and when the target 15 needs to be replaced, just follow the above steps in reverse.

[0038] In specific application scenarios, the quick installation module 6 is mainly suitable for the quick installation link in the quick installation process, that is, the quick installation module 6 can use the curved groove 624 and the limit block 622 to quickly and conveniently fix the target material 15, and the target material 15 can be firmly maintained in the position during the sputtering operation without changing, thereby improving the stability of the equipment when installing the target material 15. At the same time, the quickly unlocked locking fasteners 611 and rack 613 can help the staff save a lot of disassembly and assembly time, reduce the workload of the staff, and improve work efficiency.

[0039] Reference Figure 7 In a preferred embodiment, the calibration module 7 includes a sliding rod 701 and a screw rod 702. The inner walls of the box body 1 on both sides away from the box door 2 are connected to the partition frame 10 by bolts. Two symmetrical circular holes are provided in the two partition frames 10. The two circular holes on the same side are respectively connected to the outside of the sliding rod 701 and the screw rod 702 through bearings for rotation. Slide blocks 703 are provided on the sliding rod 701 and the screw rod 702. The opposite sides of the two slide blocks 703 are connected to the same threaded rod 705 for rotation through bearings, and the outside of the threaded rod 705 is provided with two symmetrical limiting rods 707. The two limiting rods 707 are connected to the opposite sides of the two slide blocks 703 by bolts. The limiting rods 707 and the outside of the threaded rod 705 are provided with the same transmission block 706. The inner wall of one of the partition frames 10 is connected to a motor 1 704 by bolts. The output end of the motor 1 704 is connected to the motor 1 704 by a coupling. The device is connected to one side of the screw rod 702; the outside of the slider 703 located on the screw rod 702 is connected to the motor 2 709 by bolts, and the output end of the motor 2 709 is connected to the gear 710 through a coupling, the outside of the threaded rod 705 is connected to the gear ring 1 708 by bolts, and the gear ring 1 708 is meshed with the gear 710, the bottom of the transmission block 706 is connected to the hydraulic rod 711 by bolts, and the output end of the hydraulic rod 711 is connected to the isolation frame 712 by bolts, and the top inner wall of the isolation frame 712 is connected to the motor 3 713 by bolts, and the output end of the motor 3 713 is connected to the accommodating frame 714 through a coupling, and the accommodating frame 714 is provided with a pump 715. The output end of the pump 715 is connected to the suction cup 716 through a pipeline, and the bottom of the suction cup 716 is in contact with the upper side of the substrate 9, and the outside of the accommodating frame 714 is connected to the baffle 717 by bolts, and the baffle 717 is located above the substrate 9.

[0040] Specifically, after the target material 15 is fixed in the device, the pump 715 is started, and the pump 715 drives the suction cup 716 to adsorb and fix the substrate 9, and the motor 1 704 is started, and the motor 1 704 drives the screw rod 702 to rotate, so that the slider 703 on the slide rod 701 and the screw rod 702 can drive the transmission block 706 to move horizontally, and the motor 2 709 is started, and the motor 2 709 drives the gear ring 1 708 meshing with the gear 710 to rotate, so that the threaded rod 705 rotates, and the limiting rod 707 Under the constraint of , the transmission block 706 can move longitudinally on the threaded rod 705. With the lateral and longitudinal adjustments, the transmission block 706 is finally moved to the top of the target material 15, and the hydraulic rod 711 is started. The output end of the hydraulic rod 711 drives the substrate 9 to descend to a position close to the target material 15 and then stops. When the equipment is performing sputtering coating operation, the motor three 713 is started, and the motor three 713 drives the receiving frame 714 to rotate, so that the substrate 9 adsorbed on the suction cup 716 can rotate accordingly.

[0041] In a specific application scenario, the calibration module 7 is mainly suitable for the calibration link in the calibration process, that is, the calibration module 7 uses the lead screw 702 and the threaded rod 705 to enable the device to automatically calibrate the position of the substrate 9 according to the position of the target material 15, so that the positions of the substrate 9 and the target material 15 are kept consistent, thereby improving the device when sputtering and coating the substrate 9. The material on the target material 15 can be more accurately and evenly covered on the surface of the substrate 9, thereby improving the quality of the coating.

[0042] Reference Figure 8 and Fig. 9In a preferred embodiment, the sealing module 8 includes a sealing gasket 801, a side of the box body 1 close to the box door 2 is connected to the outside of the sealing gasket 801 by bolts, a side of the box door 2 close to the box body 1 is connected to a sealing gasket 802 by bolts, and the sealing gasket 801 fits on the side opposite to the sealing gasket 802, a side of the box body 1 away from the control cabinet 4 is connected to a locking block 804 by bolts, and a side of the box door 2 away from the control cabinet 4 is connected to a connecting block 803 by bolts, and the connecting block 803 and the locking block 804 are both provided with a fitting hole 806, and the same bolt 807 is provided in the two fitting holes 806; a gear ring 808 is provided on the outside of the bolt 807, and the gear ring 808 is located on the side of the connecting block 803 away from the locking block 804, and the gear ring 808 is connected to the connecting block 8 03 is rotatably connected by a bearing, and the side of the gear ring 2 808 away from the connecting block 803 is connected with a knob 813 by bolts, and the knob 813 is located on the outside of the bolt 807; an annular frame 809 is arranged on the outside of the gear ring 2 808, and a stopper 811 is slidably connected to the inner wall of the annular frame 809, and the stopper 811 is connected to the side opposite to the connecting block 803 by bolts, and the side of the stopper 811 away from the gear ring 2 808 is connected with two symmetrical springs 2 812 by bolts, and the ends of the two springs 2 812 away from the stopper 811 are connected to the inner wall of the annular frame 809 by bolts, and a rack 2 810 is clamped on the outside of the gear ring 2 808, and the rack 2 810 is connected to the side opposite to the inner wall of the annular frame 809 by bolts, and a toggle groove 805 is provided on the connecting block 803.

[0043] Specifically, when closing the door 2, align the bolt 807 on the connecting block 803 with the fitting hole 806 on the locking block 804 and insert it, push the annular frame 809 downward, so that the rack 2 810 releases the engagement with the gear ring 2 808 when the annular frame 809 overcomes the pulling force of the spring 2 812, turn the knob 813, and the knob 813 drives the gear ring 2 808 to rotate, so that the bolt 807 is screwed into the locking block 804. As the bolt 807 is screwed in, the sealing gasket 1 801 and the sealing gasket 2 802 between the box body 1 and the door 2 are continuously pressed against each other. After the bolt 807 is completely screwed in, loosen the annular frame 809, and under the push of the spring 2 812, the rack 2 810 and the gear ring 2 808 are re-engaged, and under the restraint of the stopper 811, the gear ring 2 808 no longer rotates.

[0044] In a specific application scenario, the sealing module 8 is mainly suitable for the sealing link in the sealing process, that is, the sealing module 8 can use the bolt 807, the connecting block 803 and the locking block 804 to continuously pressurize the sealing gasket 1 801 and the sealing gasket 2 802, thereby quickly increasing the compactness of the sealing gasket 1 801 and the sealing gasket 2 802, so as to maintain sufficient sealing inside the box body 1, reduce the external impurities entering the box body 1, improve the purity of the argon gas in the box body 1, and the thin film sputtered on the substrate 9 will not be contaminated, thereby improving the quality of the equipment coating.

[0045] Working principle: Before opening the box door 2, start the vacuum pump 16 to input air into the box body 1, so as to balance the air pressure inside the box body 1 and the outside air pressure. After opening 2, align the support rod 614 with the mounting ring 601 and insert it and rotate the rotating circle 606 to screw the support rod 614 into the mounting ring 601 and fix it on the base plate 5. Insert the conductive rod 605 connected to the stabilizing plate 615 into the insertion hole 604, so that the bottom of the stabilizing plate 615 is clamped with the groove on the base 603 to ensure that the bottom of the conductive rod 605 is in close contact with the base plate 5. Rotate the adjustment frame 623 on the engaging frame 617 connected to the stabilizing plate 615. When the adjustment frame 623 rotates to overcome the torsion of the coil spring 625, the inner wall of the curved groove 624 pushes the short shaft on the limit block 622 , so that the limit block 622 moves to the outside of the mounting seat 619, the target material 15 is placed in the cavity at the center of the mounting seat 619, and the adjustment frame 623 is released. Under the torsion of the coil spring 625, the limit block 622 quickly clamps the target material 15, picks up the isolation cover 602 and aligns it with the target material 15 and inserts it from top to bottom, so that the isolation cover 602 slides downward on the outside of the mosaic frame 617, grabs the connecting ring 608 and pushes it upward, so that the connecting ring 608 drives the push-pull rod 612 to push the locking fastener 611 to move to the outside of the base 603, and after the isolation cover 602 is completely lowered, the connecting ring 608 is released. Under the pull of the spring 609, the connecting ring 608 drives the push-pull rod 612 to reset, so that the locking fastener 611 connected to the push-pull rod 612 can be with The rack 1 613 on the isolation cover 602 is engaged, so that the isolation cover 602 is fixed on the base 603, so that the isolation cover 602 wraps the argon gas bottle 12. When the target material 15 needs to be replaced, the above steps can be reversed. After the target material 15 is fixed in the equipment, the pump 715 is started, and the pump 715 drives the suction cup 716 to adsorb and fix the substrate 9. The motor 1 704 is started, and the motor 1 704 drives the screw rod 702 to rotate, so that the slider 703 on the sliding rod 701 and the screw rod 702 can drive the transmission block 706 to move horizontally, and the motor 2 709 is started, and the motor 2 709 drives the gear ring 1 708 meshing with the gear 710 to rotate, so that the threaded rod 705 rotates. Under the restraint of the limiting rod 707, the transmission block 706 The threaded rod 705 can be moved longitudinally. Under the lateral and longitudinal adjustments, the transmission block 706 is finally moved to the top of the target 15. The hydraulic rod 711 is started. The output end of the hydraulic rod 711 drives the substrate 9 to descend to a position close to the target 15 and then stops. When the equipment performs sputtering coating operation, the motor 3 713 is started. The motor 3 713 drives the accommodating frame 714 to rotate, so that the substrate 9 adsorbed on the suction cup 716 can rotate accordingly. When the box door 2 is closed, the bolt 807 on the connecting block 803 is aligned with the fitting hole 806 on the locking block 804 and inserted, and the annular frame 809 is pushed downward. When the annular frame 809 overcomes the pulling force of the spring 2 812, the rack 2 810 releases the clamping of the gear ring 2 808, and the knob 813 is turned.The knob 813 drives the gear ring 808 to rotate, so that the bolt 807 is screwed into the locking block 804. As the bolt 807 is screwed in, the sealing gasket 801 and the sealing gasket 802 between the box body 1 and the box door 2 are constantly pressed against each other. After the bolt 807 is completely screwed in, the annular frame 809 is loosened. Under the push of the spring 812, the rack 810 and the gear ring 808 are re-engaged, and under the restraint of the stopper 811, the gear ring 808 no longer rotates. The vacuum pump 16 is started to exhaust the air in the box body 1 until it reaches a vacuum state, and the gas delivery pump 13 is started to inject the argon gas in the argon gas bottle 12 into the box body 1 through the gas delivery pipe 14, and the magnetron sputtering coating operation on the substrate 9 is started.

[0046] Example 2

[0047] Reference Fig.10 , a thin film infiltration lubrication method based on the surface of a thermal spray material, comprising the following steps:

[0048] S1: Use a metal sample cutting machine to process the substrate material with the tungsten carbide coating into a size of 16×16×3 mm;

[0049] S2: The substrate is subjected to a series of pretreatments such as cleaning, sandblasting, and deburring;

[0050] S3: Fix the prepared film material on the substrate;

[0051] S4: using the magnetron sputtering equipment in Example 1 to plate a C film / TiN film on the surface of the substrate.

[0052] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and inventive concept of the present invention within the technical scope disclosed by the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A magnetron sputtering device, comprising a housing (1), characterized in that: One side of the box body (1) is connected to a box door (2) via a hinge, an observation window (3) is provided on the box door (2), and a sealing module (8) is arranged on the box door (2), a control cabinet (4) is arranged outside the box body (1), a support plate (5) is fixedly connected to the inner wall of the bottom of the box body (1), a quick installation module (6) is arranged on the support plate (5), a target material (15) is arranged in the quick installation module (6), and a accommodating frame (11) is fixedly connected to the side of the box body (1) away from the box door (2), and an argon gas bottle (12) is arranged in the accommodating frame (11).

2. A magnetron sputtering device according to claim 1, characterized in that: The argon gas cylinder (12) is provided with a gas delivery pipe (14), one end of the gas delivery pipe (14) away from the argon gas cylinder (12) passes through the outside of the box (1) and enters the box (1), and a vacuum pump (16) is fixedly connected to the upper side of the containing frame (11), the output end of the vacuum pump (16) is connected to an exhaust pipe via a conduit, and one end of the exhaust pipe away from the vacuum pump (16) enters the box (1), and a calibration module (7) is provided in the box (1), and a substrate (9) is provided at the bottom of the calibration module (7), and the substrate (9) is located above the quick installation module (6).

3. A magnetron sputtering device according to claim 2, characterized in that: The quick installation module (6) comprises a mounting ring (601), the bottom of the mounting ring (601) is fixedly connected to the upper side of the support plate (5), the inner wall of the mounting ring (601) is rotatably connected to a support rod (614) via an external thread, the upper side of the support rod (614) is fixedly connected to a base (603), the base (603) and the support rod (614) are both provided with insertion holes (604), the same conductive rod (605) is arranged in the insertion hole (604), the upper side of the conductive rod (605) is fixedly connected to a stabilizing plate (615), and the upper side of the base (603) is provided with a plurality of grooves equidistantly distributed around the circumference, the same stabilizing plate (615) is clamped in each of the grooves, and the stabilizing plate (615) is fixedly connected to the side opposite to the conductive rod (605).

4. A magnetron sputtering device according to claim 3, characterized in that: The upper side of the stabilizing plate (615) is fixedly connected to a fitting frame (617); a circular notch (620) is provided at the bottom of the fitting frame (617); a magnet (616) is slidably connected in the circular notch (620); the upper side of the fitting frame (617) is fixedly connected to a mounting seat (619); and the upper side of the mounting seat (619) is provided with four circumferentially equidistantly distributed sliding grooves (621).

5. A magnetron sputtering device according to claim 4, characterized in that: The slide groove (621) is slidably connected to a limit block (622), the upper side of the limit block (622) is fixedly connected to a short shaft, and the opposite sides of the four limit blocks (622) are all in contact with the outside of the target material (15). The upper side of the mounting seat (619) is movably connected to an adjustment frame (623), and the adjustment frame (623) is provided with four circumferentially equidistantly distributed curved grooves (624), the inner walls of the four curved grooves (624) are respectively slidably connected to the outside of the four short shafts, and the inner wall of the adjustment frame (623) is fixedly connected to a coil spring (625), and one end of the coil spring (625) away from the adjustment frame (623) is fixedly connected to the upper side of the mounting seat (619).

6. A thin film infiltration lubrication method based on the surface of thermal spraying material, characterized in that: The steps include: S1: Use a metal sample cutting machine to process the substrate material with the tungsten carbide coating into a size of 16×16×3mm; S2: The substrate is subjected to a series of pretreatments such as cleaning, sandblasting, and deburring; S3: Fix the prepared film material on the substrate; S4: Use magnetron sputtering equipment to coat C film / TiN film on the surface of the substrate.

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