Auxiliary film coating assembly and film coating device

Abstract

The invention relates to the technical field of photovoltaics and semiconductors, in particular to an auxiliary film coating assembly and a film coating device, and solves the problem that the film coating uniformity of the film coating device on a film material is poor due to the poor extension smoothness of the film material. The auxiliary coating assembly comprises at least one group of clamping structures arranged in a cavity of the coating device, and each clamping structure comprises a first clamping part, a second clamping part and a bearing part. The second clamping part and the first clamping part are arranged in parallel, and a crack is formed between the two. The crack communicates with the cavity and can contain the thin film material, and the size of the crack in the direction perpendicular to the first plane is larger than the thickness of the thin film material. According to the film coating device, the film material can extend in the crack in the film coating process, the crack limits the film material to generate large deformation in the direction perpendicular to the crack, the first clamping part and the second clamping part extending along the first plane enable the film material to keep good extension smoothness, and the film coating uniformity of the film coating device is improved.

Description

Technical Field

[0001] The present disclosure relates to the field of photovoltaic and semiconductor technology, and in particular to an auxiliary coating component and a coating device. Background Art

[0002] In the photovoltaic and semiconductor industries, thin film materials usually need to be coated. The coating process is usually completed in specific coating devices such as Chemical Vapor Deposition (CVD) and Physical Vapor Deposition (PVD). Some coating processes need to be carried out under high temperature conditions. However, thin film materials will stretch under high temperature conditions. Therefore, in order to ensure that the coating device has good uniformity in coating the thin film material, the thin film material needs to always maintain good ductility and flatness during the stretching process.

[0003] In the related art, a tensioning device is usually used to continuously tension the film material so that the film material always maintains good ductility and flatness. However, the tensioning device is prone to malfunction under high temperature conditions, so that the tensioning device cannot continuously tension the film material during the stretching process of the film material, resulting in poor ductility and flatness of the film material, thereby resulting in poor uniformity of coating the film material by the coating device. Summary of the invention

[0004] In view of this, the embodiments of the present disclosure provide an auxiliary coating component and a coating device, which solve the problem of poor uniformity of coating the thin film material by the coating device due to poor ductility and flatness of the thin film material.

[0005] In a first aspect, an embodiment of the present disclosure provides an auxiliary coating component, which is applied to a coating device, wherein the coating device includes a cavity, the cavity having a chamber capable of accommodating the auxiliary coating component, the auxiliary coating component including at least one group of clamping structures, the clamping structure being configured to clamp a thin film material; wherein the clamping structure includes: a first clamping portion, extending along a first plane; a second clamping portion, arranged parallel to the first clamping portion, and having a gap between the second clamping portion and the first clamping portion, the gap being configured to accommodate the thin film material; a supporting portion, located between the first clamping portion and the second clamping portion, and configured to support the thin film material; wherein the gap is connected to the chamber, and the size of the gap in a direction perpendicular to the first plane is greater than the thickness of the thin film material, so that the coating gas can enter the gap from the chamber and coat the thin film material.

[0006] In some embodiments, the clamping structure includes: a first clamping member, having a first surface extending along the first plane, the first surface forming the first clamping portion; a second clamping member, arranged opposite to the first clamping member and detachably connected, the second clamping member having a second surface extending along the first plane, the second surface forming the second clamping portion; a plurality of support members, forming the supporting portion, a plurality of the support members are arranged in at least one row at intervals along a first direction, wherein the support members are connected to the first surface and can abut against the second surface, or the support members are connected to the second surface and can abut against the first surface, wherein the first direction is parallel to the first plane.

[0007] In some embodiments, the clamping structure includes: a first clamping member, having a first surface extending along the first plane; a second clamping member, arranged opposite to the first clamping member and detachably connected, the second clamping member having a second surface extending along the first plane; wherein the first surface has at least one row of first accommodating grooves arranged at intervals along a first direction, the first accommodating grooves are connected to the chamber, the bottom of the first accommodating grooves forms the first clamping portion, the second surface forms the second clamping portion, and the side walls of the first accommodating grooves form the supporting portion; and / or the second surface has at least one row of second accommodating grooves arranged at intervals along the first direction, the second accommodating grooves are connected to the chamber, the first surface forms the first clamping portion, the bottom of the second accommodating grooves forms the second clamping portion, and the side walls of the second accommodating grooves form the supporting portion, wherein the first direction is parallel to the first plane.

[0008] In some embodiments, when the first surface has a plurality of the first accommodating grooves, the plurality of the first accommodating grooves are arranged in multiple rows and columns along the first direction and the second direction; when the second surface has a plurality of the second accommodating grooves, the plurality of the second accommodating grooves are arranged in multiple rows and columns along the first direction and the second direction, wherein the second direction is perpendicular to the first direction.

[0009] In some embodiments, the difference between the dimension of the gap in a direction perpendicular to the first plane and the thickness of the film material is less than 1.2 mm and greater than 0.1 mm.

[0010] In some embodiments, the first clamping member and / or the second clamping member has at least one through-hole, and the through-hole is configured to connect the gap with the outside of the auxiliary coating assembly and expose the coated area of ​​the thin film material, and the coating gas can enter the gap through the through-hole; wherein, the area of ​​the orthographic projection of the through-hole on a plane parallel to the thin film material is smaller than the area of ​​the orthographic projection of the thin film material on a plane parallel to the thin film material.

[0011] In some embodiments, the number of the clamping structures is multiple groups, and the multiple groups of the clamping structures are arranged at intervals along a third direction, wherein the material of the first clamping member and the material of the second clamping member of each group of the clamping structures both include conductive materials, wherein the third direction is perpendicular to the first plane; wherein, for two adjacent groups of the clamping structures, one group of the clamping structures is electrically connected to the positive pole of a power supply, and the other group of the clamping structures is electrically connected to the negative pole of the power supply, so that an electric field is formed between the two adjacent groups of the clamping structures.

[0012] In some embodiments, the auxiliary coating assembly further includes: a connecting block, located between two adjacent groups of the clamping structures, and connecting the two adjacent groups of the clamping structures, wherein the material of the connecting block includes an insulating material.

[0013] In the second aspect, an embodiment of the present disclosure provides a coating device, comprising: a cavity having a chamber; a gas supply assembly connected to the cavity and configured to provide coating gas to the chamber; at least one group of auxiliary coating assemblies described in the first aspect can be placed in the chamber, and the coating gas can enter the gap of the auxiliary coating assembly from the chamber and coat the thin film material carried by the auxiliary coating assembly.

[0014] In some embodiments, the number of the auxiliary coating components is multiple groups, and the multiple groups of auxiliary coating components are arranged at intervals in the chamber along the extension direction of the chamber and / or in a direction perpendicular to the extension direction of the chamber.

[0015] The auxiliary coating assembly provided by the embodiment of the present disclosure utilizes the gap between the first clamping part and the second clamping part to accommodate the thin film material. The gap is connected to the chamber of the coating device, and the size of the gap in the direction perpendicular to the first plane is larger than the thickness of the thin film material, so that the coating gas can enter the gap and coat the thin film material. The thin film material can extend in the gap during the coating process. The gap limits the film material from producing large deformation in the direction perpendicular to the gap. The first clamping part and the second clamping part extending along the first plane enable the thin film material to maintain good ductility and flatness, so that the coating gas can coat the surface of the thin film material with good flatness, thereby improving the uniformity of coating of the thin film material by the coating device. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 Shown is a schematic diagram of an application scenario of a coating device provided by an embodiment of the present disclosure.

[0017] Figure 2 Shown is a top view of a clamping structure and a thin film material provided by an embodiment of the present disclosure.

[0018] Figure 3Shown is a side view of a clamping structure and a film material provided by an embodiment of the present disclosure.

[0019] Figure 4 Shown is a top view of a clamping structure provided in another embodiment of the present disclosure.

[0020] Figure 5 Shown Figure 4 A front view of the first clamping member of the clamping structure shown.

[0021] Figure 6 Shown is a top view of a clamping structure provided in another embodiment of the present disclosure.

[0022] Figure 7 Shown Figure 6 A front view of the second clamping member of the clamping structure shown.

[0023] Figure 8 Shown is a top view of an auxiliary coating assembly provided in one embodiment of the present disclosure.

[0024] Fig. 9 Shown is a top view of an auxiliary coating assembly provided in another embodiment of the present disclosure.

[0025] Fig.10 Shown is a schematic structural diagram of a cavity and an auxiliary coating assembly provided in one embodiment of the present disclosure.

[0026] Reference numerals:

[0027] 1. Coating device; 10. Auxiliary coating assembly; 100. Clamping structure; 110. First clamping member; 1101. First surface; 1102. First receiving groove; 1112. Bottom of first receiving groove; 1122. Side wall of first receiving groove; 1103. First connecting portion; 120. Second clamping member; 1201. Second surface; 1202. Second receiving groove; 1212. Bottom of second receiving groove; 1222. Side wall of first receiving groove; 1104. First connecting portion; 120. Second clamping member; 1201. Second surface; 1202. Second receiving groove; 1212. Bottom of second receiving groove; 1222. The side wall of the second accommodating groove; 1203, the second connecting part; 130, the supporting member; 1001, the gap; 1002, the through-opening; 101, the first clamping part; 102, the second clamping part; 103, the supporting part; 200, the connecting block; 20, the cavity; 2001, the chamber; 30, the air supply component; P1, the first plane; X1, the first direction; X2, the second direction; X3, the third direction; 2, the film material; 3, the power supply. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the present disclosure to clearly and completely describe the technical solutions in the embodiments of the present disclosure. Obviously, the described embodiments are only part of the embodiments of the present disclosure, not all of the embodiments. Based on the embodiments in the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0029] Figure 1 The figure shows a schematic diagram of an application scenario of a coating device provided by an embodiment of the present disclosure. Figure 1 As shown, the auxiliary coating component 10 is applied to the coating device 1, and the coating device 1 includes a cavity 20, and the cavity 20 has a chamber 2001 capable of accommodating the auxiliary coating component 10. The auxiliary coating component 10 includes at least one group of clamping structures 100, and the clamping structure 100 is configured to clamp the thin film material 2.

[0030] The clamping structure 100 includes a first clamping portion 101, a second clamping portion 102 and a supporting portion 103. The first clamping portion 101 extends along the first plane P1, the second clamping portion 102 is arranged parallel to the first clamping portion 101, and a gap 1001 is formed between the second clamping portion 102 and the first clamping portion 101, and the gap 1001 is configured to accommodate the film material 2. The supporting portion 103 is located between the first clamping portion 101 and the second clamping portion 102, and is configured to support the film material 2. The gap 1001 is connected to the chamber 2001, and the size of the gap 1001 in the direction perpendicular to the first plane P1 is greater than the thickness of the film material 2, so that the coating gas can enter the gap 1001 from the chamber 2001 and coat the film material 2.

[0031] The auxiliary coating assembly 10 uses the gap 1001 between the first clamping part 101 and the second clamping part 102 extending along the first plane P1 of the clamping structure 100 to accommodate the thin film material 2. The gap 1001 is connected to the chamber 2001 of the coating device 1, and the size of the gap 1001 in the direction perpendicular to the first plane P1 is greater than the thickness of the thin film material 2, so that the coating gas can enter the gap 1001 and coat the thin film material 2. The thin film material 2 can extend in the gap 1001 during the coating process. The gap 1001 limits the thin film material 2 from being greatly deformed in the direction perpendicular to the gap 1001, and the first clamping part 101 and the second clamping part 102 extending along the first plane P1 keep the thin film material 2 with good ductility and flatness, so that the coating gas can coat the surface of the thin film material 2 with good flatness, thereby improving the coating uniformity of the thin film material 2 by the coating device 1.

[0032] Exemplarily, the clamping structure 100 may be an integrated structure or a split structure.

[0033] Exemplarily, the first clamping part 101 has a through hole connecting the chamber 2001 and the slit 1001, and the coating gas in the chamber 2001 can enter the slit 1001 through the through hole. Exemplarily, the second clamping part 102 has a through hole connecting the chamber 2001 and the slit 1001, and the coating gas in the chamber 2001 can enter the slit 1001 through the through hole. Exemplarily, both the first clamping part 101 and the second clamping part 102 have a through hole connecting the chamber 2001 and the slit 1001, and the coating gas in the chamber 2001 can enter the slit 1001 through the through hole.

[0034] In some embodiments, the clamping structure 100 includes a first clamping member 110, a second clamping member 120, and a plurality of supporting members 130. The first clamping member 110 has a first surface 1101 extending along a first plane P1, and the first surface 1101 forms a first clamping portion 101. The second clamping member 120 is disposed opposite to the first clamping member 110 and is detachably connected, and the second clamping member 120 has a second surface 1201 extending along the first plane P1, and the second surface 1201 forms a second clamping portion 102. A plurality of supporting members 130 form a supporting portion 103, and the plurality of supporting members 130 are arranged in at least one row along a first direction X1. The supporting member 130 is connected to the first surface 1101 and can abut against the second surface 1201. Alternatively, the supporting member 130 is connected to the second surface 1201 and can abut against the first surface 1101, and the first direction X1 is parallel to the first plane P1.

[0035] Exemplarily, the support member 130 may be a columnar structure, a block structure or other regular or irregular shaped structures. There is a gap between adjacent support members 130 to facilitate the coating gas to enter the gap 1001 through the gap and coat the thin film material 2 contained in the gap 1001.

[0036] Exemplarily, a plurality of support members 130 form a supporting portion 103 , and one supporting portion 103 supports one film material 2 .

[0037] Exemplarily, a plurality of support members 130 are arranged in a row at intervals along the first direction X1. In a row of the plurality of support members 130, adjacent support members 130 form a supporting portion 103. The plurality of support members 130 form a plurality of supporting portions 103 arranged at intervals along the first direction X1. The plurality of supporting portions 103 respectively support a plurality of thin film materials 2.

[0038] For example, Figure 2 and Figure 3As shown, a plurality of support members 130 are arranged into a plurality of rows at intervals along a first direction X1, and adjacent support members 130 in each row support a thin film material 2, that is, the gap 1001 between the first surface 1101 and the second surface 1201 can accommodate a plurality of thin film materials 2, and the plurality of thin film materials 2 are arranged into a plurality of rows and columns in the gap 1001, so that the coating device 1 can coat a plurality of thin film materials 2 at the same time, thereby improving the coating efficiency of the coating device 1.

[0039] In some embodiments, Figure 4 and Figure 5 As shown, the clamping structure 100 includes a first clamping member 110 and a second clamping member 120. The first clamping member 110 has a first surface 1101 extending along a first plane P1, and the second clamping member 120 is disposed opposite to the first clamping member 110 and is detachably connected, and the second clamping member 120 has a second surface 1201 extending along the first plane P1. The first surface 1101 has at least one row of first receiving grooves 1102 arranged at intervals along a first direction X1, the first receiving grooves 1102 are connected to the chamber 2001, the groove bottom 1112 of the first receiving groove forms the first clamping portion 101, the second surface 1201 forms the second clamping portion 102, and the side wall 1122 of the first receiving groove forms the supporting portion 130, and the first direction X1 is parallel to the first plane P1.

[0040] In some embodiments, Figure 6 and Figure 7 As shown, the clamping structure 100 includes a first clamping member 110 and a second clamping member 120. The first clamping member 110 has a first surface 1101 extending along a first plane P1, and the second clamping member 120 is arranged opposite to the first clamping member 110 and is detachably connected, and the second clamping member 120 has a second surface 1201 extending along the first plane P1. The second surface 1201 has at least one row of second receiving grooves 1202 arranged at intervals along a first direction X1, and the second receiving grooves 1202 are connected to the chamber 2001. The first surface 1101 forms a first clamping portion 101, and the groove bottom 1212 of the second receiving groove forms the second clamping portion 102. The side wall 1222 of the second receiving groove forms a supporting portion 130, and the first direction X1 is parallel to the first plane P1.

[0041] In some embodiments, Figures 4 to 7As shown, the clamping structure 100 includes a first clamping member 110 and a second clamping member 120. The first clamping member 110 has a first surface 1101 extending along a first plane P1, and the second clamping member 120 is disposed opposite to the first clamping member 110 and is detachably connected, and the second clamping member 120 has a second surface 1201 extending along the first plane P1. The first surface 1101 has at least one row of first receiving grooves 1102 arranged at intervals along a first direction X1, and the second surface 1201 has at least one row of second receiving grooves 1202 arranged at intervals along the first direction X1, and the first receiving grooves 1102 and the second receiving grooves 1202 are both connected to the chamber 2001. The groove bottom 1112 of the first receiving groove forms the first clamping portion 101, and the groove bottom 1212 of the second receiving groove forms the second clamping portion 102. The side wall 1122 of the first receiving groove and the side wall 1222 of the second receiving groove jointly form a supporting portion 130, and the first direction X1 is parallel to the first plane P1.

[0042] Exemplarily, the edge and center area of ​​the first clamp 110 have a first connection portion 1103, and the edge and center area of ​​the second clamp 120 have a second connection portion 1203, and the first connection portion 1103 and the second connection portion 1203 are detachably connected to achieve detachable connection between the first clamp 110 and the second clamp 120.

[0043] In some embodiments, when the first surface 1101 has a plurality of first receiving grooves 1102 , the plurality of first receiving grooves 1102 are arranged in a plurality of rows and columns along the first direction X1 and the second direction X2 , and the second direction X2 is perpendicular to the first direction X1 .

[0044] In some embodiments, when the second surface 1201 has a plurality of second receiving grooves 1202 , the plurality of second receiving grooves 1202 are arranged in a plurality of rows and columns along the first direction X1 and the second direction X2 , wherein the second direction X2 is perpendicular to the first direction X1 .

[0045] The above arrangement enables the clamping structure 100 to have a plurality of slits 1001 arranged in a plurality of rows and columns along the first direction X1 and the second direction X2. The plurality of slits 1001 are used to respectively accommodate a plurality of thin film materials 2, so that the coating device 1 can coat a plurality of thin film materials 2 at the same time, thereby improving the coating efficiency of the coating device 1.

[0046] In some embodiments, the difference between the dimension of the gap 1001 in the direction perpendicular to the first plane P1 and the thickness of the film material 2 is less than 1.2 mm and greater than 0.1 mm.

[0047] In the actual production process, the size of the gap 1001 in the direction perpendicular to the first plane P1 can be set according to the thickness and thermal expansion coefficient of different film materials 2.

[0048] In some embodiments, the first clamping member 110 has at least one through-hole 1002, or the second clamping member 120 has at least one through-hole 1002, or both the first clamping member 110 and the second clamping member 120 have at least one through-hole 1002. The through-hole 1002 is configured to connect the gap 1001 with the outside of the auxiliary coating assembly 10 and expose the coated area of ​​the film material 2, and the coating gas can enter the gap 1001 through the through-hole 1002. The area of ​​the orthographic projection of the through-hole 1002 on the plane parallel to the film material 2 is smaller than the area of ​​the orthographic projection of the film material 2 on the plane parallel to the film material 2.

[0049] The through hole 1002 is used to connect the gap 1001 with the outside of the auxiliary coating assembly 10, so that the coating gas can quickly enter the gap 1001 and improve the uniformity of the gas in the gap 1001. In addition, the through hole 1002 is used to expose only the coated area of ​​the thin film material 2, and other non-coated areas of the thin film material 2 are still blocked. Only the coated area of ​​the thin film material 2 is disturbed by the airflow, which can reduce the disturbance intensity of the airflow of the passivation gas on the thin film material 2, make the ductility and flatness of the thin film material 2 better, and further improve the coating uniformity of the thin film material 2 by the coating device 1.

[0050] Exemplarily, when the first surface 1101 of the first clamping member 110 forms the first clamping portion 101, the second surface 1201 of the second clamping member 120 forms the second clamping portion 102, and there is only one thin film material accommodating area in the gap 1001 between the first clamping portion 101 and the second clamping portion 102, the first clamping member 110 has a through opening 1002, or the second clamping member 120 has a through opening 1002, or the first clamping member 110 and the second clamping member 120 both have a through opening 1002, the through opening 1002 connects the thin film material accommodating area with the outside of the auxiliary coating assembly 10, and the area of ​​the orthographic projection of the through opening 1002 on a plane parallel to the thin film material accommodating area is smaller than the area of ​​the orthographic projection of the thin film material accommodating area on a plane parallel to the thin film material accommodating area.

[0051] In the case where there are multiple film material accommodating areas in the gap 1001 between the first clamping portion 101 and the second clamping portion 102, the first clamping member 110 has multiple through openings 1002, or the second clamping member 120 has multiple through openings 1002, or the first clamping member 110 and the second clamping member 120 both have multiple through openings 1002, and the multiple through openings 1002 are arranged one-to-one corresponding to the multiple film material accommodating areas, and the area of ​​the orthographic projection of each through opening 1002 on a plane parallel to the corresponding film material accommodating area is smaller than the area of ​​the orthographic projection of the corresponding film material accommodating area on a plane parallel to the corresponding film material accommodating area.

[0052] Exemplarily, in the case where the first surface 1101 has a first receiving groove 1102, the first clamping member 110 has a through-hole 1002, and the through-hole 1002 connects the groove bottom 1112 of the first receiving groove with the outside of the auxiliary coating assembly 10, or the second clamping member 120 has a through-hole 1002, and the through-hole 1002 connects the first receiving groove 1102 with the outside of the auxiliary coating assembly 10, or the first clamping member 110 and the second clamping member 120 both have a through-hole 1002, and the through-hole 1002 connects the first receiving groove 1102 with the outside of the auxiliary coating assembly 10. The area of ​​the orthographic projection of the through-hole 1002 on the plane parallel to the first receiving groove 1102 is smaller than the area of ​​the orthographic projection of the first receiving groove 1102 on the plane parallel to the first receiving groove 1102. When the first surface 1101 has a plurality of first receiving grooves 1102 , the number of the through openings 1002 is plural, and the plurality of through openings 1002 are arranged in a one-to-one correspondence with the plurality of first receiving grooves 1102 .

[0053] Exemplarily, in the case where the second surface 1201 has a second receiving groove 1202, the first clamping member 110 has a through-hole 1002, and the through-hole 1002 connects the second receiving groove 1202 with the outside of the auxiliary coating assembly 10. Alternatively, the second clamping member 120 has a through-hole 1002, and the through-hole 1002 connects the groove bottom 1212 of the second receiving groove with the outside of the auxiliary coating assembly 10. Alternatively, both the first clamping member 110 and the second clamping member 120 have a through-hole 1002, and the through-hole 1002 connects the second receiving groove 1202 with the outside of the auxiliary coating assembly 10. The area of ​​the orthographic projection of the through-hole 1002 on the plane parallel to the second receiving groove 1202 is smaller than the area of ​​the orthographic projection of the second receiving groove 1202 on the plane parallel to the second receiving groove 1202. When the second surface 1201 has a plurality of second receiving grooves 1202 , the number of the through openings 1002 is plural, and the plurality of through openings 1002 and the plurality of second receiving grooves 1202 are arranged in a one-to-one correspondence.

[0054] In some embodiments, the number of the clamping structures 100 is multiple groups, and the multiple groups of clamping structures 10 are arranged at intervals along the third direction X3. The material of the first clamping member 110 and the material of the second clamping member 120 of each group of clamping structures 100 both include conductive materials. The third direction X3 is perpendicular to the first plane P1. For two adjacent groups of clamping structures 100, one group of clamping structures 100 is electrically connected to the positive electrode of the power source 3, and the other group of clamping structures 100 is electrically connected to the negative electrode of the power source 3, so that an electric field is formed between the two adjacent groups of clamping structures 100. The coating gas can be ionized into plasma by the electric field, so that the plasma coats the coated area of ​​the thin film material 2.

[0055] Exemplarily, the type of power supply 3 may be a radio frequency power supply, an ultra-high frequency power supply, a medium frequency power supply, or the like.

[0056] For example, Figure 8 and Fig. 9 As shown, there are four groups of clamping structures 100, and the four groups of clamping structures 10 are arranged at intervals along the third direction X3. One group of clamping structures 100 in two adjacent groups of clamping structures 100 is electrically connected to the positive electrode of the power source 3, and the other group of clamping structures 100 is electrically connected to the negative electrode of the power source 3, so that an electric field is formed between the two groups of clamping structures 100. One group of clamping structures 100 in the other two adjacent groups of clamping structures 100 is electrically connected to the positive electrode of the power source 3, and the other group of clamping structures 100 is electrically connected to the negative electrode of the power source 3, so that an electric field is formed between the other two groups of clamping structures 100.

[0057] In some embodiments, the auxiliary coating assembly 10 further includes a connecting block 200, which is located between two adjacent groups of clamping structures 100 and connects the two adjacent groups of clamping structures 100, and the material of the connecting block 200 includes an insulating material. The connecting block 200 is used to connect the two adjacent groups of clamping structures 100, so as to connect the multiple groups of clamping structures 100 into a whole. In addition, the connecting block 200 made of insulating material can achieve insulation between the two adjacent groups of clamping structures 100.

[0058] For example, Figure 8 and Fig. 9 As shown, there are multiple connecting blocks 200, and two connecting blocks 200 are arranged between two adjacent groups of clamping structures 100, one connecting block 200 connects one side of the two adjacent groups of clamping structures 100, and the other connecting block 200 connects the other side of the two adjacent groups of clamping structures 100. Exemplarily, the material of the connecting block 200 can be insulating materials such as plastic, rubber, and ceramic.

[0059] like Figure 1 As shown, the coating device 1 includes at least one set of auxiliary coating components 10 mentioned in the above embodiment, a chamber 20 and a gas supply component 30. The chamber 20 has a chamber 2001, and the gas supply component 30 is connected to the chamber 20 and is configured to provide coating gas to the chamber 2001. At least one set of auxiliary coating components 10 can be placed in the chamber 2001, and the coating gas can enter the gap 1001 of the auxiliary coating components 10 from the chamber 2001, and coat the thin film material 2 carried by the auxiliary coating components 10.

[0060] In some embodiments, Fig.10As shown, the number of auxiliary coating components 10 is multiple groups, and multiple groups of auxiliary coating components 10 are arranged at intervals in the chamber 2001 along the extension direction of the chamber 2001. Alternatively, multiple groups of auxiliary coating components 10 are arranged at intervals in the chamber 2001 along a direction perpendicular to the extension direction of the chamber 2001. Alternatively, multiple groups of auxiliary coating components 10 are arranged at intervals in the chamber 2001 along the extension direction of the chamber 2001 and the direction perpendicular to the extension direction of the chamber 2001.

[0061] A plurality of sets of auxiliary coating components 10 are used to clamp a plurality of thin film materials 2 to further improve the coating efficiency of the coating device 1 .

[0062] Since the coating device 1 includes the auxiliary coating component 10 , all technical features and technical effects of the coating device 1 including the auxiliary coating component 10 are not described in detail here.

[0063] In the embodiments of the present disclosure, if not clearly defined, the connection may be in the form of detachable connection by means of bolts and nuts, screws, buckles, magnets, etc. In some connections, if there is no special requirement for detachable matching, non-detachable connection may be achieved by means of welding, bonding, etc.

[0064] The phrases "one embodiment", "an embodiment", etc. mentioned in the specification indicate that the embodiment described may include a specific feature, structure or characteristic, but not every embodiment may include the specific feature, structure or characteristic. In addition, such phrases do not necessarily refer to the same embodiment. In addition, when a specific feature, structure or characteristic is described in conjunction with an embodiment, it is within the knowledge of those skilled in the art to implement such feature, structure or characteristic in conjunction with other embodiments, whether explicitly or not explicitly described.

[0065] It should be understood that “on,” “above,” and “over” in this disclosure should be interpreted in the broadest manner, so that “on” not only means “directly on something,” but also includes the meaning of “on something” with intervening features or layers therebetween, and “above” or “over” not only includes the meaning of “above” or “over,” but also may include the meaning of “above” or “over something” with no intervening features or layers therebetween (i.e., directly on something).

[0066] Additionally, spatially relative terms, such as "below," "below," "beneath," "above," "above," etc., may be used herein for ease of description to describe the relationship of one component or feature to other components or features as shown in the figures. The spatially relative terms are intended to encompass different orientations of the component in use or operation in addition to the orientation depicted in the figures. The device may be otherwise oriented (rotated 90 degrees or at other orientations), and the spatially relative descriptors used herein may likewise be interpreted accordingly.

[0067] It should be noted that, in this article, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the existence of other identical elements in the process, method, article or device including the element.

[0068] The above description is only a preferred embodiment of the present disclosure and is not intended to limit the present disclosure. Any modifications, equivalent substitutions, etc. made within the spirit and principles of the present disclosure should be included in the protection scope of the present disclosure.

Claims

1. An auxiliary coating component, characterized in that: Applied to a film coating device, the film coating device comprises a cavity having a chamber capable of accommodating the auxiliary film coating component, the auxiliary film coating component comprises at least one set of clamping structures, and the clamping structures are configured to clamp a thin film material; Wherein, the clamping structure comprises: A first clamping portion extending along a first plane; A second clamping portion is arranged in parallel with the first clamping portion and has a gap between the second clamping portion and the first clamping portion, wherein the gap is configured to accommodate the film material; a supporting portion, located between the first clamping portion and the second clamping portion, and configured to support the film material; The slit is connected to the chamber, and a dimension of the slit in a direction perpendicular to the first plane is greater than a thickness of the thin film material, so that a coating gas can enter the slit from the chamber and coat the thin film material.

2. The auxiliary coating assembly according to claim 1, characterized in that: The clamping structure comprises: A first clamping member having a first surface extending along the first plane, wherein the first surface forms the first clamping portion; A second clamping member, arranged opposite to the first clamping member and detachably connected thereto, the second clamping member having a second surface extending along the first plane, the second surface forming the second clamping portion; A plurality of support members form the supporting portion, and the plurality of support members are arranged in at least one row along a first direction, wherein the support members are connected to the first surface and can abut against the second surface, or the support members are connected to the second surface and can abut against the first surface, wherein the first direction is parallel to the first plane.

3. The auxiliary coating assembly according to claim 1, characterized in that: The clamping structure comprises: A first clamping member having a first surface extending along the first plane; A second clamping member, arranged opposite to the first clamping member and detachably connected thereto, the second clamping member having a second surface extending along the first plane; The first surface has at least one row of first receiving grooves arranged at intervals along the first direction, the first receiving grooves are connected to the chamber, the bottom of the first receiving grooves forms the first clamping portion, the second surface forms the second clamping portion, and the sidewalls of the first receiving grooves form the supporting portion; and / or, The second surface has at least one row of second accommodating grooves arranged at intervals along the first direction, the second accommodating grooves are connected to the chamber, the first surface forms the first clamping portion, the bottom of the second accommodating groove forms the second clamping portion, and the side wall of the second accommodating groove forms the supporting portion, wherein the first direction is parallel to the first plane.

4. The auxiliary coating assembly according to claim 3, characterized in that: In the case where the first surface has a plurality of the first accommodating grooves, the plurality of the first accommodating grooves are arranged in a plurality of rows and columns along the first direction and the second direction at intervals; In the case where the second surface has a plurality of the second accommodating grooves, the plurality of the second accommodating grooves are arranged in a plurality of rows and columns at intervals along the first direction and the second direction, wherein the second direction is perpendicular to the first direction.

5. The auxiliary coating assembly according to any one of claims 1 to 4, characterized in that: The difference between the dimension of the slit in a direction perpendicular to the first plane and the thickness of the film material is less than 1.2 mm and greater than 0.1 mm.

6. The auxiliary coating assembly according to any one of claims 2 to 4, characterized in that: The first clamping member and / or the second clamping member has at least one through-hole, and the through-hole is configured to communicate the gap with the outside of the auxiliary coating assembly and expose the coated area of ​​the thin film material, and the coating gas can enter the gap through the through-hole; The area of ​​the orthographic projection of the through opening on a plane parallel to the film material is smaller than the area of ​​the orthographic projection of the film material on a plane parallel to the film material.

7. The auxiliary coating assembly according to claim 6, characterized in that: The number of the clamping structures is multiple groups, and the multiple groups of the clamping structures are arranged at intervals along the third direction, wherein the material of the first clamping member and the material of the second clamping member of each group of the clamping structures both include conductive materials, wherein the third direction is perpendicular to the first plane; Among them, for two adjacent groups of the clamping structures, one group of the clamping structures is electrically connected to the positive electrode of the power supply, and the other group of the clamping structures is electrically connected to the negative electrode of the power supply, so that an electric field is formed between the two adjacent groups of the clamping structures.

8. The auxiliary coating assembly according to claim 7, characterized in that: Also includes: The connecting block is located between two adjacent groups of the clamping structures and connects the two adjacent groups of the clamping structures, wherein the material of the connecting block includes insulating material.

9. A film coating device, characterized in that: include: a cavity, having a chamber; A gas supply assembly connected to the chamber and configured to provide coating gas to the chamber; At least one group of the auxiliary coating components described in any one of claims 1 to 8 can be placed in the chamber, and the coating gas can enter the gap of the auxiliary coating components from the chamber and coat the thin film material carried by the auxiliary coating components.

10. The coating device according to claim 9, characterized in that: The number of the auxiliary coating components is multiple groups, and the multiple groups of auxiliary coating components are arranged at intervals in the chamber along the extension direction of the chamber and / or in a direction perpendicular to the extension direction of the chamber.

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