Bearing device and detection equipment

Abstract

The invention relates to the technical field of wafer detection, in particular to a bearing device and detection equipment. The bearing device comprises a bearing part and a limiting part, and the bearing part is provided with a bearing surface used for bearing an object to be tested. The limiting part is connected with the bearing part and located on the periphery of the bearing part, after the to-be-measured object is placed on the bearing part, the limiting part can stop the to-be-measured object and prevent the to-be-measured object from sliding relative to the bearing part, and when the to-be-measured object is located on the bearing face of the bearing part, the suspension space can enable the edge of the to-be-measured object to be in a suspension state. Therefore, the contact part of the to-be-measured object and the edge of the bearing device is subjected to upward supporting force, the suspended part of the to-be-measured object is subjected to downward gravity, and then the supporting force and the gravity are opposite in direction and influence each other, so that the influence of the bearing part on the edge film thickness data of the to-be-measured object is reduced; the accuracy of the film thickness measurement data at the edge of the to-be-measured object is improved, and the problem of low accuracy of the film thickness measurement data at the edge of the to-be-measured object at present is solved.

Description

Technical Field

[0001] The present application relates to the field of wafer detection technology, and in particular to a carrier device and a detection device. Background Art

[0002] During wafer processing, it is usually necessary to measure the thickness of the wafer and the thickness of the film on the surface of the wafer. Current wafer inspection equipment usually includes a wafer carrier and an optical inspection system. The wafer carrier is used to carry the wafer, and the optical inspection system is used to measure the wafer. The optical inspection system is usually fixed, while the wafer carrier can drive the wafer to move. Usually, the wafer is fixed on the wafer carrier by vacuum adsorption, so that the wafer will not move relative to the wafer carrier.

[0003] Currently, after the wafer is fixed on the wafer carrier, the film thickness measurement result at the edge of the wafer is prone to abnormality, resulting in low accuracy of the film thickness measurement data at the edge of the wafer. Summary of the invention

[0004] The present application provides a carrying device for improving the problem of low accuracy of film thickness measurement data at the edge of an object to be measured.

[0005] In addition, the purpose of the present application is also to provide a detection device using the above-mentioned carrying device.

[0006] In a first aspect, an embodiment provides a carrying device, the carrying device comprising: A bearing portion, the bearing portion having a bearing surface for bearing the object to be tested; A limiting portion, the limiting portion is connected to the bearing portion and is located at the periphery of the bearing portion; the limiting portion is used to stop and limit the object to be measured; There is a suspended space between the bearing portion and the limiting portion, and the suspended space is used to accommodate a portion of the object to be measured that exceeds the bearing portion.

[0007] Furthermore, in one embodiment, the carrying device further includes a supporting portion, the supporting portion having a supporting surface for carrying the label, and the supporting portion is connected to a side of the limiting portion away from the carrying portion.

[0008] Furthermore, in one embodiment, the bearing surface is coplanar with the supporting surface.

[0009] Furthermore, in one embodiment, the limiting portion includes a limiting base and a stopping structure, the limiting base is arranged between the supporting portion and the bearing portion, the stopping structure is fixedly assembled on the limiting base, and the stopping structure stops and limits the object to be measured.

[0010] Furthermore, in an embodiment, the limiting base and the supporting portion define a groove, the stopping structure is arranged in the groove, and a side of the stopping structure away from the bearing portion abuts against the supporting portion.

[0011] Furthermore, in an embodiment, the top surface of the limiting base is lower than the supporting surface, and the top surface of the stopping structure is higher than the supporting surface.

[0012] Furthermore, in one embodiment, the carrying portion includes a convex structure, the convex structure is used to carry the object to be tested and form a vacuum adsorption air channel on the carrying portion, the vacuum adsorption air channel is used to adsorb and fix the object to be tested; the vacuum adsorption air channel includes a first vacuum channel and a second vacuum channel isolated from the first vacuum channel, the carrying portion includes a first area and a second area surrounding the first area; the first area is connected to the first vacuum channel, and the second area is connected to the second vacuum channel to achieve vacuum adsorption of objects to be tested of different sizes.

[0013] Furthermore, in one embodiment, a receiving groove is provided on the carrying portion, and the receiving groove is used to accommodate a robot arm that transports the object to be tested, or the carrying device also includes a lifting portion, and the carrying portion surrounds the lifting portion, and the lifting portion can be lifted and lowered relative to the carrying portion, and the lifting portion is used to pick up and transport the object to be tested and place the object to be tested on the carrying portion.

[0014] Furthermore, in one embodiment, the bearing surface is coated with a first film layer, and the first film layer is used for anti-static.

[0015] In a second aspect, an embodiment provides a detection device, including a calibration device and a carrying device, wherein the carrying device includes: A bearing portion, the bearing portion having a bearing surface for bearing the object to be tested; A limiting portion, the limiting portion is connected to the bearing portion and is located at the periphery of the bearing portion; the limiting portion is used to stop and limit the object to be measured; There is a suspended space between the bearing portion and the limiting portion, and the suspended space is used to accommodate the portion of the object to be measured that exceeds the bearing portion; A supporting portion, the supporting portion having a supporting surface for carrying the label, the supporting portion being connected to a side of the limiting portion away from the carrying portion; The calibration device includes a supporting substrate and a standard sheet arranged on the supporting substrate. The surface of the standard sheet away from the supporting substrate is coplanar with the surface of the object to be measured away from the carrying part, and is used to calibrate the standard sheet to achieve calibration of the carrying part.

[0016] Furthermore, in one embodiment, the bearing surface is coplanar with the supporting surface.

[0017] Furthermore, in one embodiment, the limiting portion includes a limiting base and a stopping structure, the limiting base is arranged between the supporting portion and the bearing portion, the stopping structure is fixedly assembled on the limiting base, and the stopping structure stops and limits the object to be measured.

[0018] Furthermore, in an embodiment, the limiting base and the supporting portion define a groove, the stopping structure is arranged in the groove, and a side of the stopping structure away from the bearing portion abuts against the supporting portion.

[0019] Furthermore, in an embodiment, the top surface of the limiting base is lower than the supporting surface, and the top surface of the stopping structure is higher than the supporting surface.

[0020] Furthermore, in one embodiment, the carrying portion includes a convex structure, the convex structure is used to carry the object to be tested and form a vacuum adsorption air channel on the carrying portion, the vacuum adsorption air channel is used to adsorb and fix the object to be tested; the vacuum adsorption air channel includes a first vacuum channel and a second vacuum channel isolated from the first vacuum channel, the carrying portion includes a first area and a second area surrounding the first area; the first area is connected to the first vacuum channel, and the second area is connected to the second vacuum channel to achieve vacuum adsorption of objects to be tested of different sizes.

[0021] Furthermore, in one embodiment, a receiving groove is provided on the carrying portion, and the receiving groove is used to accommodate a robot arm that transports the object to be tested, or the carrying device also includes a lifting portion, and the carrying portion surrounds the lifting portion, and the lifting portion can be lifted and lowered relative to the carrying portion, and the lifting portion is used to pick up and transport the object to be tested and place the object to be tested on the carrying portion.

[0022] Furthermore, in one embodiment, the bearing surface is coated with a first film layer, and the first film layer is used for anti-static.

[0023] Furthermore, in one embodiment, the detection device also includes a beam quality analyzer, the light-sensitive surface of the beam quality analyzer is coplanar with the surface of the object to be tested on the side away from the supporting part, and the beam quality analyzer is used to achieve center alignment and position monitoring of the light spot.

[0024] According to the carrying device of the above embodiment, since there is a suspended space between the carrying part and the limiting part of the carrying device, the limiting part can stop the object to be measured and prevent the object to be measured from sliding relative to the carrying part. When the object to be measured is on the carrying surface of the carrying part, the suspended space can make the edge of the object to be measured in a suspended state, so that the place where the object to be measured contacts the edge of the carrying device is subjected to an upward supporting force and the suspended part of the object to be measured itself is subjected to a downward gravity. Then, the supporting force and gravity are in opposite directions and influence each other, thereby reducing the influence of the carrying part on the film thickness data at the edge of the object to be measured, improving the accuracy of the film thickness measurement data at the edge of the object to be measured, and improving the current problem of low accuracy of film thickness measurement data at the edge of the object to be measured. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 A partial structural top view of a detection device in an embodiment; Figure 2 A side view of a bearing portion, a limiting portion and a supporting portion in an embodiment; Figure 3 A partial cross-sectional view of a bearing portion, a limiting portion and a supporting portion in an embodiment; Figure 4 A schematic diagram of the structure of a calibration device in an embodiment; Figure 5 A schematic diagram of the structure of a beam quality analyzer in an embodiment; Figure 6 is a schematic structural diagram of a bearing portion in another embodiment (the limiting portion is not shown in the figure); Figure 7 This is a process diagram of a lifting part picking up and delivering an object to be tested in an embodiment.

[0026] List of feature names corresponding to the reference numerals in the figure: 1. bearing part; 11. bearing surface; 12. convex point structure; 13. first vacuum channel; 14. second vacuum channel; 15. first area; 16. second area; 17. sealing ring; 18. first exhaust hole; 19. second exhaust hole; 101. fixing hole; 102. ejector pin movable hole; 103. receiving groove; 2. limiting part; 21. top surface of stop structure; 22. limiting base; 221. top surface of limiting base; 23. stop structure; 230. stop block; 3. Suspended space; 4. Support part; 41. Support surface; 5. Groove; 51. Groove bottom wall; 52. First groove side wall; 53. Second groove side wall; 6. Calibration device; 61. Support base; 62. Standard film; 63. First swing table; 64. First lifting platform; 65. Pitch adjustment screw; 7. Beam quality analyzer; 71. Photosensitive surface; 72. Photosensitive film holder; 73. Second swing table; 74. Second lifting platform; 75. Photosensitive film; 8. Object to be measured; 9. Standard film; 10. Lifting part; 1001. Vacuum adsorption structure.

[0027] Explanation on the reference numerals in brackets in the drawings: In the reference numerals in brackets in the drawings, the features referred to by the reference numerals are both the features represented by the numbers in the brackets and the features represented by the numbers outside the brackets. DETAILED DESCRIPTION

[0028] The present application is further described in detail below by specific embodiments in conjunction with the accompanying drawings. Wherein similar elements in different embodiments adopt associated similar element numbers. In the following embodiments, many detailed descriptions are intended to enable the present application to be better understood. However, those skilled in the art can easily recognize that some of the features can be omitted in different situations, or can be replaced by other elements, materials, and methods. In some cases, some operations related to the present application are not shown or described in the specification, in order to avoid the core part of the present application being overwhelmed by too much description, and for those skilled in the art, it is not necessary to describe these related operations in detail, and they can fully understand the related operations based on the description in the specification and the general technical knowledge in the art.

[0029] In addition, the features, operations or characteristics described in the specification can be combined in any appropriate manner to form various implementations. At the same time, the steps or actions in the method description can also be interchanged or adjusted in a manner that is obvious to those skilled in the art. Therefore, the various sequences in the specification and the drawings are only for the purpose of clearly describing a certain embodiment and are not meant to be a required sequence, unless otherwise specified that a certain sequence must be followed.

[0030] The serial numbers assigned to the components herein, such as "first", "second", etc., are only used to distinguish the objects described and do not have any order or technical meaning. The "connection" and "coupling" mentioned in this application, unless otherwise specified, include direct connection, indirect connection and contact connection (coupling), etc.

[0031] The various embodiments described in the specific implementation manner can be combined in any suitable manner without contradiction. For example, different implementation manners can be formed by combining different embodiments. In order to avoid unnecessary repetition, various possible combinations of the embodiments will not be described separately.

[0032] At present, in the process of measuring the film thickness of the object to be measured (such as a wafer), it is necessary to fix the object to be measured on a carrying device, and the carrying device usually uses a vacuum adsorption method to fix the object to be measured. The object to be measured is placed under the optical detection system by the movement of the carrying device to detect the object to be measured. In general, the size of the wafer is smaller than the size of the carrying part in the carrying device to meet the requirements of vacuum adsorption sealing. Therefore, the edge of the wafer is generally not vacuum adsorbed, and only the carrying part supports the edge of the wafer, so that the edge of the wafer will have problems such as warping. Therefore, when the object to be measured is detected, the film thickness data detection at the edge of the object to be measured often appears abnormal. In order to solve this problem, the present application provides a carrying device, which can make the edge of the object to be measured suspended, so that the place where the object to be measured contacts the edge of the carrying device is subjected to an upward supporting force and the suspended part of the object to be measured itself is subjected to a downward gravity, and then the supporting force and gravity are used in opposite directions to affect each other, thereby reducing the influence of the carrying part on the film thickness data at the edge of the object to be measured and improving the accuracy of the data at the edge of the object to be measured. The following is a detailed description of the carrying device of the present application in conjunction with the accompanying drawings.

[0033] Please refer to Figures 1 to 3 In one embodiment, the bearing device includes a bearing portion 1 and a limiting portion 2, wherein the bearing portion 1 has a bearing surface 11 for bearing the object to be measured 8. The limiting portion 2 is connected to the bearing portion 1 and is located at the periphery of the bearing portion 1. The limiting portion 2 is used to stop and limit the object to be measured 8. After the object to be measured 8 is placed on the bearing portion 1, the limiting portion 2 can stop and limit the object to be measured 8 to prevent the object to be measured 8 from sliding on the bearing portion 1.

[0034] There is a suspended space 3 between the bearing part 1 and the limiting part 2, and the suspended space 3 is used to accommodate the part of the object to be measured 8 that exceeds the bearing part 1. After the object to be measured 8 is placed on the bearing part 1, the edge of the object to be measured 8 can be in the suspended space 3, so that the place where the object to be measured contacts the edge of the bearing device is subjected to an upward supporting force, and the suspended part of the object to be measured itself is subjected to a downward gravity. Then, the supporting force and the gravity are in opposite directions and affect each other, thereby reducing the influence of the bearing part 1 on the film thickness data at the edge of the object to be measured 8, improving the accuracy of the film thickness measurement data at the edge of the object to be measured 8, and improving the current problem of low accuracy of the film thickness measurement data at the edge of the object to be measured 8.

[0035] Regarding the method of placing the object to be tested 8 on the carrying portion 3, in one embodiment, refer to Figure 1, a receiving groove 103 is provided on the carrying part 1, and the receiving groove 103 is used to receive a manipulator for carrying the object to be tested 8. When the object to be tested 8 needs to be placed on the carrying part 1, the manipulator fixes the object to be tested 8 by adsorption or the like, and transfers the object to be tested 8 to the carrying part 1. During this process, the manipulator gradually approaches the carrying part 1 until it enters the receiving groove 103. After the object to be tested 8 contacts the carrying surface 11 of the carrying part 1, the manipulator separates from the object to be tested 8, and then the manipulator can be withdrawn from the receiving groove 103.

[0036] In another embodiment, please refer to Figure 6 and Figure 7 The carrying device further includes a lifting part 10. The carrying part 1 surrounds the lifting part 10. The lifting part 10 can be lifted and lowered relative to the carrying part 1. The lifting part 10 is used to pick up and deliver the object to be tested 8 and place the object to be tested 8 on the carrying part 1. In order to make the object to be tested 8 more stable on the lifting part 10, a vacuum adsorption structure 1001 is provided on the top of the lifting part 10. By evacuating the vacuum adsorption structure 1001, the object to be tested 8 can be adsorbed on the lifting part 10. When the object to be tested 8 needs to be placed on the carrying part 1, the lifting part 10 is raised so that the vacuum adsorption structure 1001 on the top of the lifting part 10 is higher than the carrying part 1, and then the object to be tested 8 is placed on the lifting part 10 and fixed by a loading device such as a manipulator, and then the lifting part 10 is lowered until the object to be tested 8 is about to contact the carrying part 1, and the vacuum adsorption structure 1001 on the top of the lifting part 10 is released from fixing the object to be tested 8, and the lifting part 10 is continued to be lowered so that the lifting part 10 is lower than the carrying surface 11 of the carrying part 1, so that the object to be tested 8 completely falls on the carrying part 1, and the pick-up and delivery operation of the lifting part 10 is completed.

[0037] Further, in one embodiment, please refer to Figure 1 and Figure 3 The carrying device further comprises a support portion 4, the support portion 4 having a support surface 41 for carrying a standard sheet 9, and the support portion 4 is connected to the side of the limiting portion 2 away from the carrying portion 1. In this way, the standard sheet 9 carried by the support portion 4 can be used to calibrate or measure the object to be measured 8, and the support portion 4 is connected to the side of the limiting portion 2 away from the carrying portion 1, which can make the overall structure of the carrying device more compact.

[0038] It should be noted that the suspended space accommodates the portion of the object to be tested that exceeds the load-bearing surface, and the stop structure of the limit part cooperates with the suspended space to stop the portion of the object to be tested that exceeds the load-bearing surface, so as to achieve the stable, accurate and appropriate placement of the object to be tested, thereby improving the detection efficiency and accuracy. Secondly, the coordination and cooperation of the limit part, the suspended space and the support part further improve the practicality, detection accuracy and efficiency of the load-bearing device.

[0039] In one embodiment, please refer to Figure 3, the bearing surface 11 and the supporting surface 41 are coplanar, so that the amount of data is smaller when the calibration or measurement is performed by the standard film 9 in the subsequent process, which facilitates the data processing. Of course, in some other embodiments, there may also be a set difference between the bearing surface 11 and the supporting surface 41, and in the subsequent calibration or measurement, the difference can be processed for data.

[0040] In one embodiment, please refer to Figure 3 , the label 9 is bonded to the support surface 41. In some other embodiments, the label 9 can be fixed on the support part 4 by vacuum adsorption. Specifically, the support part 4 is provided with an adsorption hole, and the adsorption hole is connected to the vacuum device through an air path. The adsorption hole is sucked by the vacuum device, so that the adsorption hole generates negative pressure to adsorb and fix the label 9. In some other embodiments, the label 9 can also be fixed on the support part by other feasible methods, such as fixing by a clamp, fixing by magnetic attraction, etc.

[0041] In one embodiment, please refer to Figure 3 , the scale plate 9 on the support portion 4 is a thickness scale plate used to calibrate the thickness of the object to be measured 8. Of course, in some other embodiments, the scale plate 9 on the support portion 4 can also be a film thickness scale plate used to calibrate the film thickness on the object to be measured 8.

[0042] As another application mode of the label 9 on the support part 4, the support part 4 moves synchronously with the carrying part 1, and the label 9 can also be used to calibrate the height of the carrying part 1. For example, in one embodiment, before the object 8 to be tested is detected, the carrying part 1 needs to be at a set height. At this time, the height of the label 9 on the support part 4 can be detected by the optical detection system to determine whether the height of the carrying part 1 meets the requirements. If it meets the requirements, the object 8 to be tested is tested. If it does not meet the requirements, the height of the carrying part 1 is adjusted until it meets the requirements.

[0043] Specifically, in one embodiment, after the object to be tested 8 is placed on the supporting part 1, the edge portions extending along the circumference of the object to be tested 8 are all in a suspended state. Figure 1 The number of the limiting parts 2 is more than two, and the limiting parts 2 are arranged at intervals along the circumference of the bearing part 1. Specifically, the number of the limiting parts 2 is 4. In some other embodiments, the number of the limiting parts 2 can also be 2, 3 or 5.

[0044] Regarding the structure of the limiting portion 2, in one embodiment, please refer to Figure 1 and Figure 3The limiting part 2 includes a limiting base 22 and a stop structure 23, and the limiting base 22 is arranged between the supporting part 4 and the bearing part 1. The stop structure 23 is fixedly assembled on the limiting base 22 and stops and limits the object to be measured 8. Since the stop structure 23 is fixedly assembled on the limiting base 22, the stop structure 23 can be processed separately, and it is easier to control the dimensional accuracy of the limiting part 2. Of course, in some other embodiments, in addition to being fixedly assembled, the stop structure 23 and the limiting base 22 can also be integrally formed.

[0045] Further, in one embodiment, please refer to Figure 1 and Figure 3 The limiting base 22 and the support portion 4 define a groove 5, and the stop structure 23 is disposed in the groove 5. The side of the stop structure 23 away from the bearing portion 1 abuts against the support portion 4. The groove 5 facilitates the positioning and installation of the stop structure 23. In some other embodiments, the groove 5 may also be completely on the limiting base 22.

[0046] In one embodiment, please refer to Figure 1 and Figure 3 The limiting base 22 is connected to the outer peripheral surface of the carrying part 1 . In order not to interfere with the suspended part of the object to be measured 8 , the top surface 221 of the limiting base 22 is lower than the carrying surface 11 .

[0047] In one embodiment, the top surface 221 of the limiting base 22 is lower than the supporting surface 41, and the top surface 21 of the stop structure 23 is higher than the supporting surface 41. In this way, the support portion 4 can provide better support for the stop structure 23, and the stop structure 23 is not easy to loosen after the object to be tested 8 touches the stop structure 23.

[0048] Specifically, in one embodiment, please refer to Figure 3 The groove 5 includes a groove bottom wall 51, a first groove side wall 52 and a second groove side wall 53. The first groove side wall 52 is opposite to the second groove side wall 53. The first groove side wall 52 is on the support portion 4, the groove bottom wall 51 and the second groove side wall 53 are on the limiting base 22, and the first groove side wall 52 is higher than the second groove side wall 53. The first groove side wall 52 is against the stop structure 23. Since the first groove side wall 52 is higher, the stop effect on the stop structure 23 is better. In one embodiment, please refer to Figure 1 and Figure 3 In some other embodiments, the groove 5 may be in other forms other than a through groove, for example, the groove 5 further includes a third groove side wall surface, and the third groove side wall surface connects the first groove side wall surface 52 and the second groove side wall surface 53 .

[0049] In one embodiment, please refer to Figure 1 and Figure 3The stop structure 23 is a stop block 230 embedded in the groove 5. The stop block 230 is installed in the groove 5 by interference fit. The side of the stop block 230 away from the bearing part 1 is in contact with the first groove side wall 52, and the side of the stop block 230 close to the bearing part 1 is in contact with the second groove side wall 53. The stop block 230 can be in contact with the groove wall of the groove 5 by embedding, so that the groove 5 has a better support effect on the stop block 230. In one embodiment, the stop block 230 is in a long strip shape.

[0050] In some other embodiments, the stop structure 23 can also be fixedly assembled on the limiting base 22 by bolt fixing, laser welding, snap fixing, etc. In addition to being fixedly assembled in the groove 5, the stop structure 23 can also be installed in other ways. For example, when the stop structure 23 is fixed by bolts, it can also be directly fixed on the top plane of the limiting base 22. Of course, in some other embodiments, the stop structure 23 can also be integrally formed with the limiting base 22.

[0051] In one embodiment, please refer to Figure 3 , the support part 4 and the limiting base 22 are integrally formed. This facilitates the processing of the support part 4 and the limiting base 22. Regarding the relationship between the bearing part 1 and the limiting part 2, in one embodiment, the bearing part 1 and the limiting base 22 are integrally formed, please refer to Figure 1 and Figure 3 , the limiting base 22 is a protrusion arranged on the outer peripheral surface of the bearing part 1. In some other embodiments, the limiting part 2 can also be annular and wrapped around the outer periphery of the bearing part 1. In some other embodiments, the support part 4, the limiting base 22 and the bearing part 1 can be assembled together by welding, bolting, etc. in addition to being integrally formed.

[0052] The carrier 1 fixes the object to be tested 8 by vacuum adsorption. In one embodiment, please refer to Figure 1 The bearing part 1 includes a convex structure 12, the convex structure 12 is used to bear the object to be tested 8 and form a vacuum adsorption airway on the bearing part 1, and the vacuum adsorption airway is used to adsorb and fix the object to be tested 8. Specifically, in one embodiment, please refer to Figure 1, the vacuum adsorption air channel includes a first vacuum channel 13 and a second vacuum channel 14 isolated from the first vacuum channel 13, and the carrier 1 includes a first area 15 and a second area 16 surrounding the first area 15; the first area 15 is connected to the first vacuum channel 13, and the second area 16 is connected to the second vacuum channel 14, so as to realize vacuum adsorption of objects to be tested 8 of different sizes. When the size of the object to be tested 8 is large, the object to be tested 8 is placed on the first area 15 and the second area 16, and the first vacuum channel 13 and the second vacuum channel 14 are vacuumed to adsorb and fix the object to be tested 8. When the size of the object to be tested 8 is small, the object to be tested 8 is placed on the carrier 1 to cover the first area 15, and the first vacuum channel 13 is vacuumed to fix the object to be tested 8. In one embodiment, the label 9 is also fixed on the support part 4 by vacuum adsorption. The vacuum device is not only connected to the adsorption hole on the support part 4 through the air path, but also connected to the first vacuum channel 13 and the second vacuum channel 14 through the air path. After the vacuum device is started, it can suck the first vacuum channel 13 and the second vacuum channel 14, so that the object to be tested 8 is adsorbed and fixed on the carrier part 1.

[0053] In one embodiment, please refer to Figure 1 A closed-loop sealing ring 17 is provided between the first region 15 and the second region 16, and the first vacuum channel 13 and the second vacuum channel 14 are isolated by the sealing ring 17. In one embodiment, the carrier 1 has a first vacuum hole 18 connected to the first vacuum channel 13 and a second vacuum hole 19 connected to the second vacuum channel 14.

[0054] In one embodiment, the bearing surface 11 of the bearing part 1 is coated with a first film layer, and the first film layer is used for anti-static. Specifically, in one embodiment, the first film layer is a DLC coating. The bearing part 1 is made of alumina ceramic material, and the DLC coating on the surface can not only realize the conductivity of the bearing part 1, eliminate the influence of static electricity on the measured stress, but also improve the wear resistance of the bearing part 1.

[0055] In one embodiment, the object to be tested 8 is in the form of a sheet. Specifically, the object to be tested 8 is a wafer. In one embodiment, the carrying device includes a driving mechanism for driving the carrying portion to move. Specifically, in one embodiment, the carrying portion 1 can be raised and lowered, and the driving mechanism includes a lifting driving mechanism (not shown in the figure) for driving the carrying portion 1 to be raised and lowered. Of course, in addition to being able to perform lifting and lowering movements, the carrying portion 1 can also perform translational movements, and the carrying portion 1 can translate along a first horizontal direction and a second horizontal direction, and the angle between the first horizontal direction and the second horizontal direction is greater than 0 degrees and less than 180 degrees.

[0056] In one embodiment, please refer to Figure 1The bearing part 1 has a fixing hole 101 for fixing the bearing part 1 and a push rod movable hole 102 for the push rod to extend. The fixing hole 101 is used to fix the bearing part 1. The push rod movable hole 102 is used for the push rod to extend and lift the object to be tested 8 when needed.

[0057] In one embodiment of a detection device, please refer to Figures 1 to 5 The detection device includes a calibration device 6 and a carrying device including a support portion 4 as in any of the above-mentioned embodiments, wherein the calibration device 6 includes a supporting substrate 61 and a standard sheet 62 arranged on the supporting substrate 61, wherein the surface of the standard sheet 62 away from the supporting substrate 61 is coplanar with the surface of the object to be tested 8 away from the carrying portion 1, and is used to calibrate the standard sheet 9 on the supporting portion 4 to achieve calibration of the carrying portion 1. In one embodiment, the standard sheet 62 is bonded to the supporting substrate 61. In some other embodiments, the standard sheet 62 can also be mounted on the supporting substrate 61 in other feasible ways, such as by fixing with a clamp, fixing by adsorption, etc.

[0058] The calibration device 6 is installed independently of the carrying part 1. When the height of the carrying part 1 changes, the height of the calibration device 6 does not change with the height of the carrying part 1. Since the support part 4 and the carrying part 1 move synchronously, when calibrating the carrying part 1, the height of the standard piece 9 can be calibrated according to the height of the standard piece 62 through the optical detection system of the detection equipment (not shown in the figure). After the calibration of the standard piece 9 is completed, the calibration of the carrying part 1 is also achieved.

[0059] Of course, in addition to calibrating the standard sheet 9, the standard sheet 62 on the support substrate 61 can also be used to assist in detecting the object to be tested 8. For example, in one embodiment, the standard sheet 9 on the support portion 4 is used to detect the thickness of the object to be tested 8, and the standard sheet 62 on the support substrate 61 is used to detect the film thickness of the object to be tested 8.

[0060] In one embodiment, please refer to Figure 1 and Figure 4 In order to be applicable to the objects to be tested 8 of different film thicknesses, the number of standard sheets 62 is more than two, and each standard sheet 62 corresponds to a film thickness of the object to be tested 8. Specifically, the number of standard sheets 62 can be 2, 3 or more than 4 as needed.

[0061] It should be noted that in some application scenarios, the supporting part 1 may not have the freedom to move up and down. In this case, the height of the supporting part 1 cannot be adjusted. In this way, the movement error in the height direction will not be introduced into the standard piece 9, and there is no need for the standard piece 62 to calibrate the height of the standard piece 9.

[0062] In some other embodiments, in addition to being installed independently from the bearing part 1, the calibration device 6 can also be raised and lowered synchronously with the bearing part 1. For example, the calibration device 6 is installed on the bearing part 1. This makes the structure more compact, but it will introduce too much error in the lifting and lowering movement of the bearing part 1 into the detection of the standard film 9. When the measured data is inaccurate, it is impossible to determine whether it is a problem in the measurement link or the calibration link. In contrast, in the above embodiment, the calibration device 6 and the bearing part 1 are installed independently, which can reduce or even avoid the introduction of the error in the lifting and lowering movement of the bearing part 1, and the measured data is more accurate. When the measured data is inaccurate, it is convenient to determine where the problem lies. In order to further simplify the structure, in some other embodiments, a bearing platform can be fixedly provided on the bearing part 1 instead of the calibration device, and the standard film 62 is installed on the bearing platform.

[0063] In one embodiment, please refer to Figure 1 and Figure 4 The calibration device 6 includes a first pendulum table 63 and a first lifting platform 64 for adjusting the supporting base 61. The first pendulum table 63 is installed on the first lifting platform 64. The supporting base 61 is installed on the first pendulum table 63. The first pendulum table 63 is a two-dimensional pendulum table, which can realize the pitch and yaw adjustment of the standard piece 62. The first lifting platform 64 can adjust the height of the supporting base 61 so that the upper surface of the standard piece 62 is at the same height as the upper surface of the object to be measured 8.

[0064] In one embodiment, please refer to Figure 4 When the number of standard sheets 62 is more than two, the support base 61 corresponds to the standard sheets 62 one by one. In order to facilitate the individual adjustment of the pitch angle of the calibration sheet, each support base 61 is connected with a plurality of pitch adjustment screws 65. The pitch adjustment screws 65 are threadedly connected to the support base 61 and supported on the first swing table 63 to facilitate the pitch adjustment of the support base 61. The plurality of standard sheets 62 can be leveled separately through the pitch adjustment screws 65.

[0065] When the object to be tested 8 is optically inspected, the incident and reflected light spots of the optical inspection system need to be aligned. In order to monitor and align the positions of the incident and reflected light spots of the optical inspection system, in one embodiment, please refer to Figure 1 and Figure 5 The detection device also includes a beam quality analyzer 7, a light-sensing surface 71 of the beam quality analyzer 7 is coplanar with a surface of the object to be tested 8 on a side away from the bearing portion 1, and the beam quality analyzer 7 is used to realize the center alignment and position monitoring of the light spot.

[0066] Specifically, in one embodiment, please refer to Figure 1 and Figure 5The beam quality analyzer 7 includes a photosensitive film holder 72, a second swing table 73 and a second lifting platform 74. The photosensitive film holder 72 is used to place a photosensitive film 75. The second swing table 73 can adjust the pitch and roll angles of the photosensitive film 75 on the photosensitive film holder 72. The second lifting platform 74 can adjust the height of the photosensitive film holder 72 so that the upper surface of the photosensitive film 75 is flush with the upper surface of the wafer on the supporting part 1.

[0067] Of course, in some other embodiments, the calibration device 6 and the beam quality analyzer 7 in the detection equipment may also adopt other feasible forms other than those listed in the above embodiments. For example, the calibration device 6 may only adjust the pitch and yaw of the calibration piece through the first swing table 63, or only adjust the pitch and yaw of the calibration piece through the pitch adjustment screw 65; the calibration device 6 may also not have a height adjustment function; similarly, the beam quality analyzer 7 may also adjust the pitch and yaw through the screw, or may not have a height adjustment function.

[0068] In summary, the bearing device in some embodiments of the present application can keep the edge of the object to be measured in a suspended state by setting a limit part and a suspended space. The suspended part of the edge of the object to be measured is subjected to an upward supporting force and a downward gravity. Then, the supporting force and the gravity are in opposite directions and influence each other, thereby improving the detection accuracy of the film thickness at the edge of the object to be measured. The detection equipment in some embodiments of the present application can calibrate the mark on the support part through a calibration device, thereby realizing the calibration of the bearing part, reducing or even avoiding the motion error caused by the lifting and lowering of the bearing part. In addition, the detection equipment in some embodiments of the present application can monitor the incident light spot and the reflected light spot through a beam quality analyzer, so that the optical detection system of the detection equipment can be aligned and monitored during the installation and measurement process.

[0069] The above specific examples are used to illustrate the present application, which is only used to help understand the present application and is not intended to limit the present application. For technicians in the technical field to which the present application belongs, they can also make some simple deductions, deformations or substitutions based on the ideas of the present application.

Claims

1. A carrying device, characterized in that: include: A bearing portion, the bearing portion having a bearing surface for bearing an object to be tested; A limiting portion, the limiting portion is connected to the bearing portion and is located at the periphery of the bearing portion, and the limiting portion is used to stop and limit the object to be measured; There is a suspended space between the bearing portion and the limiting portion, and the suspended space is used to accommodate a portion of the object to be measured that exceeds the bearing portion.

2. The carrying device according to claim 1, characterized in that: The carrying device further comprises a supporting portion, wherein the supporting portion has a supporting surface for carrying the label, and the supporting portion is connected to a side of the limiting portion away from the carrying portion.

3. The carrying device according to claim 2, characterized in that: The bearing surface is coplanar with the supporting surface.

4. The carrying device according to claim 2, characterized in that: The limiting part includes a limiting base and a stopping structure. The limiting base is arranged between the supporting part and the bearing part. The stopping structure is fixedly assembled on the limiting base. The stopping structure stops and limits the object to be measured.

5. The carrying device according to claim 4, characterized in that: The limiting base and the supporting portion define a groove, the stopping structure is arranged in the groove, and a side of the stopping structure away from the bearing portion abuts against the supporting portion.

6. The carrying device according to claim 5, characterized in that: The top surface of the limiting base is lower than the supporting surface, and the top surface of the stopping structure is higher than the supporting surface.

7. The carrying device according to any one of claims 1 to 6, characterized in that: The bearing part includes a convex point structure, which is used to support the object to be tested and form a vacuum adsorption air channel on the bearing part, and the vacuum adsorption air channel is used to adsorb and fix the object to be tested; the vacuum adsorption air channel includes a first vacuum channel and a second vacuum channel isolated from the first vacuum channel, and the bearing part includes a first area and a second area surrounding the first area; the first area is connected to the first vacuum channel, and the second area is connected to the second vacuum channel to achieve vacuum adsorption of objects to be tested of different sizes.

8. The carrying device according to any one of claims 1 to 6, characterized in that: The carrying part is provided with a receiving groove, and the receiving groove is used to receive a robot arm for carrying the object to be tested, or the carrying device also includes a lifting part, and the carrying part surrounds the lifting part, and the lifting part can be lifted and lowered relative to the carrying part, and the lifting part is used to pick up and transport the object to be tested and place the object to be tested on the carrying part.

9. The carrying device according to any one of claims 1 to 6, characterized in that: The bearing surface is plated with a first film layer, and the first film layer is used for anti-static.

10. A detection device, characterized in that: It comprises a calibration device and a carrying device as described in any one of claims 2 to 6, wherein the calibration device comprises a supporting substrate and a standard piece arranged on the supporting substrate, wherein a surface of the standard piece away from the supporting substrate is coplanar with a surface of the object to be measured away from the carrying portion, and is used to calibrate the standard piece to achieve calibration of the carrying portion.

11. The detection device according to claim 10, characterized in that The detection device also includes a beam quality analyzer, the light-sensing surface of the beam quality analyzer is coplanar with the surface of the object to be tested on a side away from the bearing part, and the beam quality analyzer is used to achieve center alignment and position monitoring of the light spot.

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