Waveguide integrated infrared spectrum chip and detection method thereof

Abstract

The invention relates to a waveguide integrated infrared spectrum chip which comprises a first optical waveguide, and a plurality of infrared colloidal quantum dot detectors of different specifications are arranged in the length direction of the first optical waveguide. According to the waveguide integrated infrared spectrum chip, detectors made of different colloidal quantum dots are used, the detectors made of the different colloidal quantum dots are arranged on one optical waveguide, and when infrared light passes through the optical waveguide, the different detectors output different light currents.

Description

Technical Field

[0001] The invention relates to the technical field of sensors, and in particular to a waveguide integrated infrared spectrum chip. Background Art

[0002] Spectra, as fingerprints of matter, can be used to identify everything. Infrared spectral sensing is widely used in inspection and quality control in various industries such as semiconductors, electronics and pharmaceuticals; crop health monitoring, food quality control and moisture content analysis; vascular imaging, tissue differentiation and endoscopy; environmental monitoring, geological and mineral exploration; enhanced vision, penetrating haze, smoke, rain and snow, and improving situational awareness; national defense security, target identification, camouflage detection and secret surveillance; scientific research, astronomy, biology, chemistry and materials science. Traditional infrared spectrometers use a spectroscopic structure, which is large in size, high in cost and difficult to promote. Spectral chips abandon the spectroscopic structure, are small in size and low in cost, and have great potential to become daily consumer products. Summary of the invention

[0003] In order to achieve the purpose of the present invention, the technical solution adopted by the present invention is: a waveguide integrated infrared spectrum chip, including: a first optical waveguide, wherein a plurality of infrared colloidal quantum dot detectors of different specifications are arranged in the length direction of the first optical waveguide.

[0004] Preferably, the infrared colloidal quantum dot detector includes: a silicon dioxide film deposited on a first optical waveguide, a second optical waveguide formed on the silicon dioxide film, a bottom electrode provided on the silicon dioxide film, the bottom electrode covering the second optical waveguide, a colloidal quantum dot film covering the bottom electrode directly above the second optical waveguide, a top electrode covering the colloidal quantum dot film, and the other end of the top electrode extending onto the silicon dioxide film.

[0005] Preferably, the first optical waveguide and the second optical waveguide are both made of silicon nitride or silicon.

[0006] Preferably, an electron transport layer is provided between the upper surface of the colloidal quantum dot film and the top electrode, and a hole transport layer is provided between the lower surface of the colloidal quantum dot film and the lower electrode.

[0007] Preferably, both the bottom electrode and the top electrode are made of graphene.

[0008] Preferably, both the bottom electrode and the top electrode are prepared with metal electrode sheets.

[0009] Compared with the prior art, the present invention has the following beneficial effects:

[0010] 1. The waveguide integrated infrared spectrum chip uses different colloidal quantum dots to make detectors, and the detectors made of different colloidal quantum dots are arranged on the first optical waveguide. When infrared light passes through the first optical waveguide, different detectors output different photocurrents.

[0011] 2. Through the top electrode, colloidal quantum dot film and bottom electrode, infrared light is absorbed and electron-hole pairs are generated to generate external photocurrent.

[0012] 3. Setting electron transport layers and hole transport layers on the upper and lower surfaces of colloidal quantum dot films can improve the photoelectric response of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is a schematic diagram of the overall structure of the waveguide integrated infrared spectrum chip in the present invention;

[0014] Figure 2 It is a cross-sectional view of the overall structure of the infrared colloidal quantum dot detector in the present invention;

[0015] In the figure: 1. first optical waveguide; 3. silicon dioxide film; 4. second optical waveguide; 5. bottom electrode; 6. colloidal quantum dot film; 7. top electrode; DETAILED DESCRIPTION

[0016] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0017] Example:

[0018] like Figure 1 to Figure 2 As shown, the present invention provides a technical solution: a waveguide integrated infrared spectrum chip, firstly selects an SOI substrate, including: a first optical waveguide 1, the first optical waveguide 1 can be made of silicon nitride or silicon,

[0019] The first optical waveguide 1 is provided with a plurality of infrared colloidal quantum dot detectors of different specifications in the length direction. The infrared colloidal quantum dot detector comprises: a silicon dioxide film 3 deposited on the first optical waveguide 1, a second optical waveguide 4 formed on the silicon dioxide film 3, and the second optical waveguide 4 can be made of silicon oxide or silicon.

[0020] A second optical waveguide 4 with a flat surface is obtained by chemical mechanical polishing (CMP), a bottom electrode 5 is provided on the silicon dioxide film 3, the bottom electrode 5 is made of graphene, the bottom electrode 5 covers the second optical waveguide 4, and a colloidal quantum dot film 6 is covered on the bottom electrode 5 directly above the second optical waveguide 4.

[0021] In order to improve the photoelectric response of the device, an electron transport layer is provided between the upper surface of the colloidal quantum dot film 6 and the top electrode 7, and a hole transport layer is provided between the lower surface of the colloidal quantum dot film 6 and the lower electrode.

[0022] The colloidal quantum dot film 6 is covered with a top electrode 7 , and the other end of the top electrode 7 extends onto the silicon dioxide film 3 . The top electrode 7 is also made of graphene.

[0023] The graphene / colloidal quantum dot film 65 / graphene structure is used to absorb infrared light and generate electron-hole pairs to generate external photocurrent. After the top electrode 7 is manufactured, a metal electrode sheet is prepared by photolithography and metal deposition process to complete the device preparation.

[0024] The spectral chip uses different colloidal quantum dots to make detectors, which are arranged on the first optical waveguide 1. When infrared light passes through the first optical waveguide 1, different infrared colloidal quantum dot detectors output different photocurrents, and the spectrum in the first optical waveguide 1 is calculated by an algorithm.

[0025] The present invention arranges different infrared colloidal quantum dot detectors on the first optical waveguide 1 to achieve spectral perception, and has the advantages of small size and low cost.

[0026] A detection method for a waveguide integrated infrared spectrum chip includes: screening and detecting infrared light passing through a first optical waveguide 1 by using different infrared colloidal quantum dot detectors; different infrared colloidal quantum dot detectors output different photocurrents; and outputting the spectrum in the first optical waveguide 1 according to the different photocurrents.

[0027] The embodiments of the present invention disclose preferred embodiments, but are not limited thereto. A person skilled in the art can easily understand the spirit of the present invention based on the above embodiments and make different extensions and changes. However, as long as they do not deviate from the spirit of the present invention, they are all within the protection scope of the present invention.

Claims

1. A waveguide integrated infrared spectrum chip, characterized in that: include: A first optical waveguide, wherein a plurality of infrared colloidal quantum dot detectors of different specifications are arranged in the length direction of the first optical waveguide.

2. The waveguide integrated infrared spectrum chip according to claim 1, characterized in that: The infrared colloidal quantum dot detector includes: a silicon dioxide film is deposited on the first optical waveguide, a second optical waveguide is formed on the silicon dioxide film, a bottom electrode is provided on the silicon dioxide film, the bottom electrode covers the second optical waveguide, the bottom electrode is covered with a colloidal quantum dot film directly above the second optical waveguide, the colloidal quantum dot film is covered with a top electrode, and the other end of the top electrode extends to the silicon dioxide film.

3. The waveguide integrated infrared spectrum chip according to claim 2, characterized in that: The first optical waveguide and the second optical waveguide are both made of silicon nitride or silicon.

4. The waveguide integrated infrared spectrum chip according to claim 2, characterized in that: An electron transport layer is arranged between the upper surface of the colloidal quantum dot film and the top electrode, and a hole transport layer is arranged between the lower surface of the colloidal quantum dot film and the lower electrode.

5. The waveguide integrated infrared spectrum chip according to claim 2, characterized in that: The bottom electrode and the top electrode are both made of graphene.

6. The waveguide integrated infrared spectrum chip according to claim 2, characterized in that: The bottom electrode and the top electrode are both prepared with metal electrode sheets.

7. The detection method of the waveguide integrated infrared spectrum chip according to any one of claims 1 to 6, characterized in that: include: Screening and detecting the infrared light passing through the first optical waveguide by using different infrared colloidal quantum dot detectors; Different infrared colloidal quantum dot detectors output different photocurrents; The spectrum in the first optical waveguide is output according to different photocurrents.

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