Vcsel laser and aperture cell thereof

Abstract

Disclosed are a VCSEL laser and a hole unit thereof. The VCSEL laser has at least one oxidation-limiting hole, and the hole unit comprises a plurality of peripheral holes, the plurality of peripheral holes are arranged circumferentially to enclose a limiting hole forming area, and the oxidation-limiting hole is formed in the limiting hole forming area; wherein the peripheral hole has a first side wall facing the oxidation-limiting hole, the first side wall comprises a first main surface and at least one turning surface, the first main surface comprises at least one plane, and the extension direction of the turning surface of the first side wall is different from the extension direction of the first main surface and is bent towards the direction of the oxidation-limiting hole.

Description

Technical Field

[0001] This application relates to the field of semiconductor lasers, and more specifically to VCSEL lasers and their aperture units. Background Technology

[0002] A VCSEL (Vertical-Cavity Surface-Emitting Laser) is a semiconductor laser that emits laser light in a vertical direction by forming a resonant cavity in the vertical direction of the substrate. VCSELs are characterized by stable beam quality, single-mode output, and high photoelectric conversion efficiency, and are widely used in communications, consumer electronics, automotive, and other fields.

[0003] VCSEL lasers mainly include a substrate layer, an N-DBR layer and a PDBR layer stacked on the substrate layer, an active region sandwiched between the N-DBR layer and the PDBR layer, and a confinement layer located above and / or below the active region. Currently, the confinement layer is mainly formed through an oxidation process. Specifically, the structural layer used to form the confinement layer is oxidized. The oxidizing solution enters the structural layer from its outer edge, and the area near the outer edge of the structural layer is oxidized to form a confinement region, while the unoxidized area forms a confinement aperture.

[0004] It is worth noting that after the oxidizing solution enters the structural layer used to form the confinement layer, the oxidation rate varies in all directions, making it difficult to control the position and shape of the final confinement hole. Thus, the final position and shape of the confinement hole may deviate significantly from the expected position and shape.

[0005] In the conventional process of forming the VCSLE laser, an epitaxial structure is first formed, which, from bottom to top, includes: a substrate layer, an N-DBR structure layer, an active region structure layer, and a P-DBR structure layer; then, an emission aperture is defined; next, the epitaxial structure is etched, and portions of some structural layers surrounding the emission aperture are removed to form a mesa structure; subsequently, the mesa structure is selectively oxidized to form the confinement layer.

[0006] During the formation of the mesa structure, a complete ring of material around the light-emitting aperture is removed so that the oxide holes formed during the subsequent oxidation of the mesa structure are more nearly circular. However, this design results in a large spacing between adjacent VCSEL lasers when forming a VCSEL array comprising multiple VCSEL lasers. This leads to a loose arrangement of the VCSEL lasers within the array, resulting in a large overall size of the VCSEL array, which does not meet the requirements for device miniaturization.

[0007] The inventors of this application propose that only a portion of the material around the light-emitting aperture can be etched to form spaced holes around the light-emitting aperture, thereby increasing the flexibility of the distance design between adjacent VCSEL lasers and making the arrangement of each VCSEL laser more compact.

[0008] However, after the oxidizing fluid enters the structural layer used to form the confinement layer, the diffusion rate and oxidation rate vary, and the pores are spaced apart, making it difficult to control the diffusion range of the oxidizing fluid and the final shape of the confinement pores. Sharp corners are easily formed at the intersections of the oxidation ranges of the structural layer formed by the oxidizing fluid flowing from each pore. Thus, the final shape of the confinement pores may deviate significantly from the expected shape. Summary of the Invention

[0009] One advantage of this application is that it provides a VCSEL laser and its aperture unit, wherein the application provides an oxide confinement layer formation scheme, which can control the shape of the confinement aperture by designing the extension direction of the aperture unit extending to the peripheral wall of the structure layer used to form the oxide confinement layer, so that the shape of the final formed confinement aperture is close to the expected shape of the confinement aperture.

[0010] Another advantage of this application is that it provides a VCSEL laser and its aperture unit, wherein the shape of the aperture in the oxide confinement layer is close to a circle by controlling the shape of the confinement aperture.

[0011] Another advantage of this application is that it provides a VCSEL laser and its aperture unit, wherein the sharpness of the turning angle at the outer edge of the aperture in the oxide confinement layer is reduced by controlling the shape of the confinement aperture. This improves the reliability of the VCSEL laser.

[0012] To achieve at least one of the above-mentioned advantages or other advantages and objectives, according to one aspect of this application, a hole element for a VCSEL laser is provided, the VCSEL laser having at least one oxide-confined hole, the hole element comprising:

[0013] Multiple peripheral holes are arranged circumferentially to enclose and form a restricted hole forming region therein, and the oxide restricted holes are formed in the restricted hole forming region;

[0014] The peripheral hole has a first sidewall facing the oxidation limiting hole. The first sidewall includes a first main surface and at least one turning surface. The first main surface includes at least one plane. The extending direction of the turning surface of the first sidewall is different from the extending direction of the first main surface and bends toward the oxidation limiting hole.

[0015] In some embodiments, the first sidewall includes a first turning surface and a second turning surface, and the first main body surface is located between the first turning surface and the second turning surface.

[0016] In some implementations, the first body surface is a plane that extends within a plane.

[0017] In some implementations, the first body surface has at least one transition region.

[0018] In some embodiments, the first main body surface includes a first main body part, a first main body second part, and a first main body middle part. The first main body middle part is located between the first main body part and the first main body second part, and is recessed into the peripheral hole relative to the first main body part and the first main body second part. The turning regions are formed between the first main body middle part and the first main body part, and between the first main body middle part and the first main body second part, respectively.

[0019] In some embodiments, the first part of the first main body, the second part of the first main body, and the middle part of the first main body are each a plane, extending within their respective planes.

[0020] In some embodiments, the first main body surface has a first main body end and a first main body end opposite to each other, and the first turning surface includes a first turning part and a first turning part, the first turning part extending between the first main body end and the first turning part of the first main body surface, wherein there is an angle between the first turning part and the plane where the first main body end of the first main body surface is located; the second turning surface includes a second turning part and a second turning part, the second turning part extending between the first main body end and the second turning part of the first main body surface, wherein there is an angle between the second turning part and the plane where the first main body end of the first main body surface is located.

[0021] In some embodiments, the peripheral hole further includes a second sidewall, and the first sidewall and the second sidewall are symmetrically arranged about a first central axis defined by the peripheral hole.

[0022] In some embodiments, the peripheral hole further includes a third sidewall, the third sidewall including a third main surface and at least one turning surface, the third main surface including at least one plane, and the extending direction of the turning surface of the third sidewall is different from the extending direction of the third main surface.

[0023] In some embodiments, the third sidewall includes a fifth turning surface and a sixth turning surface, and the third main body surface is located between the fifth turning surface and the sixth turning surface.

[0024] In some embodiments, the third main body surface has a third main body end and a third main body end opposite to each other; the fifth turning surface includes a fifth turning part and a fifth turning part, the fifth turning part extending between the third main body end and the fifth turning part of the third main body surface, wherein the fifth turning part has an angle with the plane where the third main body end of the third main body surface is located; the sixth turning surface includes a sixth turning part and a sixth turning part, the sixth turning part extending between the third main body end and the sixth turning part of the third main body surface, wherein the sixth turning part has an angle with the plane where the third main body end of the third main body surface is located.

[0025] In some embodiments, the peripheral hole further includes a fourth sidewall, which is symmetrically arranged with respect to the third sidewall about a second central axis defined by the peripheral hole.

[0026] In some embodiments, the peripheral hole further includes a first transition wall, a second transition wall, a third transition wall, and a fourth transition wall, wherein the first transition wall extends between the first sidewall and the third sidewall, the second transition wall extends between the first sidewall and the fourth sidewall, the third transition wall extends between the second sidewall and the third sidewall, and the fourth transition wall extends between the second sidewall and the fourth sidewall.

[0027] In some embodiments, the first transition wall and the second transition wall are symmetrically arranged about a second central axis set about the peripheral hole, the third transition wall and the fourth transition wall are symmetrically arranged about a second central axis set about the peripheral hole, the third transition wall and the first transition wall are symmetrically arranged about a first central axis set about the peripheral hole, and the fourth transition wall and the second transition wall are symmetrically arranged about a first central axis set about the peripheral hole.

[0028] In some embodiments, the first transition wall includes a first transition part and a first transition part, the first transition part extending from one end of the first sidewall and the first transition part extending from one end of the third sidewall, the first transition part and the first transition part intersect and extend in different directions.

[0029] In some embodiments, the extension direction of the first transition portion is consistent with the extension direction of the first sidewall at the junction with the first transition portion, and the extension direction of the first transition portion is consistent with the extension direction of the third sidewall at the junction with the first transition portion.

[0030] In some embodiments, there is an angle between the extending direction of the first transition portion and the extending direction of the first sidewall at the junction with the first transition portion, and there is an angle between the extending direction of the first transition portion and the extending direction of the third sidewall at the junction with the first transition portion.

[0031] In some embodiments, the first transition wall is a plane extending between the first sidewall and the third sidewall.

[0032] In some implementations, the first transition wall is a curved surface.

[0033] In some implementations, the first transition surface is a curved surface, and the second transition surface is a curved surface.

[0034] In some embodiments, the peripheral hole further includes a second sidewall and a third sidewall. The second sidewall includes a second main surface, a third turning surface, and a fourth turning surface. The third sidewall includes a third main surface, a fifth turning surface, and a sixth turning surface. The second main surface is located between the third turning surface and the fourth turning surface, and the third main surface is located between the fifth turning surface and the sixth turning surface. The first turning surface of the first sidewall is connected to the third turning surface of the second sidewall, the second turning surface of the first sidewall is connected to the fifth turning surface of the third sidewall, and the fourth turning surface of the second sidewall is connected to the sixth turning surface of the third sidewall.

[0035] In some implementations, the third transition surface is a curved surface, the fourth transition surface is a curved surface, the fifth transition surface is a curved surface, and the sixth transition surface is a curved surface.

[0036] According to another aspect of this application, a VCSEL laser is provided, comprising:

[0037] At least one oxide confinement layer, the oxide confinement layer having an oxide confinement pore; and

[0038] The hole unit as described above.

[0039] The further objectives and advantages of this application will become fully apparent from the following description and accompanying drawings.

[0040] These and other objects, features and advantages of this application are fully apparent from the following detailed description, the accompanying drawings and the claims. Attached Figure Description

[0041] These and / or other aspects and advantages of this application will become clearer and more readily understood from the following detailed description of embodiments of this application taken in conjunction with the accompanying drawings, wherein:

[0042] Figure 1The illustration shows a schematic diagram of one embodiment of a hole unit for a laser according to an embodiment of this application.

[0043] Figure 2 The illustration shows a schematic diagram of another embodiment of the aperture unit for a laser according to an embodiment of this application.

[0044] Figure 3 The illustration shows a schematic diagram of yet another embodiment of a hole unit for a laser according to an embodiment of this application.

[0045] Figure 4 The illustration shows a schematic diagram of yet another embodiment of a hole unit for a laser according to an embodiment of this application.

[0046] Figure 5 The illustration shows a schematic diagram of yet another embodiment of a hole unit for a laser according to an embodiment of this application.

[0047] Figure 6 The illustration shows a schematic diagram of yet another embodiment of a hole unit for a laser according to an embodiment of this application.

[0048] Figure 7 The illustration shows a schematic diagram of yet another embodiment of a hole unit for a laser according to an embodiment of this application.

[0049] Figure 8 The illustration shows a schematic diagram of yet another embodiment of a hole unit for a laser according to an embodiment of this application.

[0050] Figure 9 The illustration shows a schematic diagram of yet another embodiment of a hole unit for a laser according to an embodiment of this application.

[0051] Figure 10 The figure shows a schematic diagram of the arrangement of aperture units for a laser according to an embodiment of the present application. Detailed Implementation

[0052] The terms and words used in the following specification and claims are not limited to their literal meaning, but are used solely by the inventors to enable a clear and consistent understanding of this application. Therefore, it will be apparent to those skilled in the art that the following description of various embodiments of this application is provided for illustrative purposes only and not for the purpose of limiting this application as defined in the appended claims and their equivalents.

[0053] It is understood that the term "a" should be understood as "at least one" or "one or more", that is, in one embodiment, the number of an element can be one, while in another embodiment, the number of the element can be multiple, and the term "a" should not be understood as a limitation on the number.

[0054] While ordinal numbers such as "first," "second," etc., will be used to describe various components, there is no limitation on which components are used herein. The term is used only to distinguish one component from another. For example, a first component may be referred to as a second component, and similarly, a second component may be referred to as a first component, without departing from the teachings of this application. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0055] The terminology used herein is for the purpose of describing various embodiments only and is not intended to be limiting. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. It will also be understood that the terms “comprising” and / or “having” as used in this specification specify the presence of the described features, numbers, steps, operations, components, elements or combinations thereof, without excluding the presence or addition of one or more other features, numbers, steps, operations, components, elements or groups thereof.

[0056] Application Overview

[0057] As described above, currently, the confinement layer is mainly formed through an oxidation process. Specifically, the structural layer used to form the confinement layer is oxidized. An oxidizing fluid, such as water vapor, enters the structural layer from its outer edge. The area near the outer edge of the structural layer is oxidized to form a confinement region, while the unoxidized area forms a confinement hole.

[0058] In traditional processes, the mesa structure is selectively oxidized to form the confinement layer. During the formation of the mesa structure, a complete ring of material around the light-emitting aperture is removed so that the oxide aperture formed during subsequent oxidation of the mesa structure is closer to a circle. However, this design results in a large spacing between adjacent VCSEL lasers when forming a VCSEL array containing multiple VCSEL lasers. This leads to a loose arrangement of the VCSEL lasers within the array, resulting in a large overall size of the VCSEL array, which does not meet the requirements for device miniaturization.

[0059] The inventors of this application propose that only a portion of the material around the light-emitting aperture can be etched to form spaced holes around the light-emitting aperture, thereby increasing the flexibility of the distance design between adjacent VCSEL lasers and making the arrangement of each VCSEL laser more compact.

[0060] However, after the oxidizing fluid enters the structural layer used to form the confinement layer, the diffusion rate and oxidation rate vary, and the pores are spaced apart, making it difficult to control the diffusion range of the oxidizing fluid and the final shape of the confinement pores. Sharp corners are easily formed at the intersections of the oxidation ranges of the structural layer formed by the oxidizing fluid flowing from each pore. Thus, the final shape of the confinement pores may deviate significantly from the expected shape.

[0061] The inventors of this application have noticed that the peripheral wall of the hole guides the oxidizing fluid, causing the oxidizing fluid to flow and diffuse inward from the outer edge of the structural layer along the extension direction of the peripheral wall of the hole, and to impregnate the structural layer used to form the confinement layer, thereby oxidizing the structural layer used to form the confinement layer in a specific direction, and in this way, a confinement hole is formed in the hole structure.

[0062] Based on this, the inventors of this application propose to control the flow direction of the oxidation fluid by designing the extension direction of the peripheral wall of the hole on the structural layer used to form the oxidation confinement layer, thereby controlling the shape of the final confinement hole.

[0063] Furthermore, the higher the sharpness at the intersection of adjacent edges of the limiting hole, the greater the current accumulation at the intersection, resulting in a much higher current density at the intersection than the surrounding area. This leads to a higher local thermal effect and reduced reliability of the VCSEL chip. Therefore, the sharpness of the outer edge of the limiting hole should be minimized as much as possible, and the ideal shape of the limiting hole is circular. The extension direction of the hole extending to the peripheral wall of the hole on the structural layer used to form the oxide limiting layer will affect the shape of the limiting hole. Therefore, the extension direction of the hole extending to the peripheral wall of the hole on the structural layer used to form the oxide limiting layer needs to be further designed to reduce the sharpness of the limiting hole and make it closer to a circle.

[0064] Similar to regular polygons, the more sides there are, the larger the interior angles are, and the lower the sharpness at the intersection of adjacent sides, this application proposes to increase the turning surface of the hole sidewall facing the limiting hole, so that the sharpness at the intersection of the diffusion range of the oxidizing fluid flowing and diffusing along each surface is reduced.

[0065] Accordingly, this application proposes a hole unit for a VCSEL laser, the VCSEL laser having at least one oxide-limiting hole, the hole unit comprising: a plurality of peripheral holes arranged circumferentially to enclose a limiting hole forming region therein, the oxide-limiting hole being formed in the limiting hole forming region; wherein, the peripheral holes have a first sidewall facing the oxide-limiting hole, the first sidewall comprising a first main surface and at least one turning surface, the first main surface comprising at least one plane, and the extending direction of the turning surface of the first sidewall being different from the extending direction of the first main surface.

[0066] After introducing the basic principles of this application, various non-limiting embodiments of this application will be described in detail below with reference to the accompanying drawings.

[0067] Schematic diagram of aperture unit for VCSEL laser

[0068] like Figures 1 to 10 As shown, a hole unit for a laser according to an embodiment of this application is illustrated. The VCSEL laser has a multilayer structure, mainly including a substrate layer, an N-DBR layer, a P-DBR layer, an active region sandwiched between the N-DBR layer and the P-DBR layer, and an oxide confinement layer located above and / or below the active region, the oxide confinement layer having an oxide confinement hole 200.

[0069] In this embodiment, the VCSEL laser further includes an aperture unit comprising a plurality of peripheral apertures 10, each of the peripheral apertures 10 extending at least partially to the oxide confinement layer. Specifically, the peripheral apertures 10 extend from the upper surface of the VCSEL laser to below the active region, i.e., below the bottom surface of the active region.

[0070] For example, when the substrate layer, the N-DBR layer, the active region, the oxide confinement layer, and the P-DBR layer are arranged from bottom to top, the peripheral aperture 10 extends from the P-DBR layer to the N-DBR layer below the active region, and the peripheral aperture 10 passes through the oxide confinement layer; as another example, when the substrate layer, the P-DBR layer, the active region, the oxide confinement layer, and the N-DBR layer are arranged from bottom to top, the peripheral aperture 10 extends from the N-DBR layer to the P-DBR layer below the active region, and the peripheral aperture 10 passes through the oxide confinement layer.

[0071] A plurality of peripheral holes 10 are arranged circumferentially along the VCSEL laser and spaced apart from each other. The plurality of peripheral holes 10 enclose a confinement hole forming region 101 therein, and the oxide confinement hole 200 is formed within the confinement hole forming region 101. During the formation of the oxide confinement layer, an oxidizing fluid is introduced into the peripheral holes 10, wherein the peripheral holes 10 are located on the outer periphery of the structural layer used to form the oxide confinement layer; the oxidizing fluid enters the interior of the structural layer used to form the oxide confinement layer from the peripheral holes 10; the portion of the structural layer used to form the oxide confinement layer oxidized by the oxidizing fluid forms the confinement region, and the portion of the interior not oxidized by the oxidizing fluid forms the oxide confinement hole 200.

[0072] It is worth mentioning that the peripheral wall of the peripheral hole 10 guides the oxidation fluid. During the formation of the oxidation confinement layer, the oxidation fluid flows along the extension direction of the peripheral wall of the peripheral hole 10 and diffuses in all directions. Accordingly, in this embodiment, the flow direction of the oxidation fluid is controlled by designing the extension direction of the peripheral wall of the peripheral hole 10, thereby controlling the shape of the final formed oxidation confinement hole 200.

[0073] Furthermore, the higher the sharpness of the intersection of adjacent edges of the oxide limiting hole 200, the greater the current accumulation at the intersection, resulting in a much higher current density at the intersection than the surrounding area. This leads to a higher local thermal effect and reduced reliability of the VCSEL chip. Therefore, the sharpness of the outer edge of the oxide limiting hole 200 should be minimized as much as possible, and the ideal shape of the oxide limiting hole 200 is circular.

[0074] Similar to regular polygons, the more sides there are, the larger the interior angles are, and the lower the sharpness at the intersection of adjacent sides, this application proposes to increase the turning surface of the hole sidewall facing the oxide limiting hole 200, so that the sharpness at the intersection of the diffusion range of the oxide fluid flowing and diffusing along each surface is reduced.

[0075] The specific shape of the peripheral hole 10 is not limited to that of this application. For example, in some embodiments of this application, the peripheral hole 10 is obtained by deforming a rectangular hole. In some embodiments of this application, the peripheral hole 10 is obtained by forming a triangular hole.

[0076] The structure of the outer hole 10 obtained by deforming the rectangular hole is described below, such as... Figures 1 to 6 As shown.

[0077] The peripheral hole 10 includes a first sidewall 11, a second sidewall 12, a third sidewall 13, and a fourth sidewall 14. The first sidewall 11 is opposite to the second sidewall 12, and the third sidewall 13 and the fourth sidewall 14 are opposite to each other. The first sidewall 11 includes a first main surface 111 and at least one turning surface. The first main surface 111 includes at least one plane. The extending direction of the turning surface of the first sidewall 11 is different from the extending direction of the first main surface 111, that is, there is an angle between the turning surface of the first sidewall 11 and the first main surface 111.

[0078] Accordingly, in some embodiments of this application, the first sidewall 11 includes a first turning surface 112 and a second turning surface 113, and the first main body surface 111 is located between the first turning surface 112 and the second turning surface 113. Specifically, the first main body surface 111 has a first main body end 1101 and a first main body end 1102, the first turning surface 112 extends from the first main body end 1101 relative to the first main body surface 111 in a turning manner, and the second turning surface 113 extends from the first main body end 1102 relative to the first main body surface 112 in a turning manner.

[0079] Optionally, the first main body surface 111 is a plane, with each part extending in the same plane; or, the first main body surface 111 is a non-plane, with at least two parts extending in different planes, and the first main body surface 111 has at least one turning region.

[0080] Accordingly, in some embodiments of this application, the first main body surface 111 is a plane, such as... Figure 1 , Figure 3 and Figure 5 As shown.

[0081] In other embodiments of this application, the first main surface 111 is non-planar, for example, a curved surface, a multi-plane combined transition surface, a planar-curved surface combined transition surface, etc. The curved surface can be represented as a single arcuate surface, a combined curved surface formed by multiple arcuate surfaces, etc. A multi-plane combined transition surface is a transition surface composed of multiple planes, wherein each pair of adjacent planes is located on different planes. A planar-curved surface combined transition surface is a transition surface formed by a combination of planes and curved surfaces, wherein there is an included angle between each pair of adjacent surfaces. In other embodiments, each pair of adjacent surfaces can also be connected by an arcuate transition surface, so that the three surfaces form a unified arcuate surface.

[0082] In some embodiments where the first main body surface 111 is non-planar, such as Figure 2 , Figure 4 and Figure 6 As shown, the first main body surface 111 includes a first main body part 1111, a first main body part 1112, and a first main body middle part 1113. The first main body middle part 1113 is located between the first main body part 1111 and the first main body part 1112, and is recessed into the peripheral hole 10 relative to the first main body part 1111 and the first main body part 1112. The turning regions are formed between the first main body middle part 1113 and the first main body part 1111, and between the first main body middle part 1113 and the first main body part 1112, respectively.

[0083] Specifically, a transition region is formed between the middle part 1113 of the first main body and the first part 1111 of the first main body, and another transition region is formed between the middle part 1113 of the first main body and the second part 1112 of the first main body.

[0084] The end of the first main body part 1111 forms the first main body end 1101 of the first main body surface 111, and the end of the first main body part 1112 forms the first main body end 1102 of the first main body surface 111.

[0085] The first main body part 1111, the first main body part 1112 and the first main body middle part 1113 of the first main body surface 111 are each a plane, extending in their respective planes.

[0086] Optionally, the first main body part 1111 and the first main body part 1112 may extend in the same plane or in different planes.

[0087] Alternatively, the plane containing the middle part 1113 of the first main body may be parallel to the plane containing the first part 1111 of the first main body and / or the plane containing the second part 1112 of the first main body, or it may be neither parallel to the plane containing the first part 1111 of the first main body nor parallel to the plane containing the second part 1112 of the first main body.

[0088] The first main body part 1111 and the first main body part 1112 can also be non-planar, for example, curved surfaces, multi-planar combination transition surfaces, planar surface combination transition surfaces, etc. Figure 7 and Figure 8 As shown.

[0089] The first main body surface 111 further includes a first main body first connecting surface 1114 and a first main body second connecting surface 1115. The first main body first connecting surface 1114 is connected between the first main body part 1111 and the first main body middle part 1113, and the first main body second connecting surface 1115 is connected between the first main body second part 1112 and the first main body middle part 1113.

[0090] The first connecting surface 1114 of the first main body can be a plane or a non-plane, such as a curved surface, a multi-plane combined transition surface, or a plane-curved surface combined transition surface. Similarly, the first connecting surface 1115 of the second main body can be a plane or a non-plane, such as a curved surface, a multi-plane combined transition surface, or a plane-curved surface combined transition surface.

[0091] In one embodiment of this application, both the first main body first connecting surface 1114 and the second main body second connecting surface 1215 are planar. In this embodiment, the first main body part 1111 and the first main body second part 1112 extend in the same plane. The plane where the first main body middle part 1113 is located is parallel to the plane where the first main body part 1111 and the first main body second part 1112 are located, and is recessed into the peripheral hole 10 relative to the first main body part 1111 and the first main body second part 1112. The first main body first connecting surface 1114 is perpendicular to the first main body part 1111 and the first main body middle part 1113, and the first main body second connecting surface 1115 is perpendicular to the first main body second part 1112 and the first main body middle part 1113.

[0092] In this embodiment of the application, the first transition surface 112 includes a first transition part 1121 and a first transition part 1122. The first transition part 1121 extends between the first main body end 1101 of the first main body surface 111 and the first transition part 1122, wherein the first transition part 1121 and the plane where the first main body end 1101 of the first main body surface 111 is located have an angle. The second transition surface 113 includes a second transition part 1131 and a second transition part 1132. The second transition part 1131 extends between the first main body end 1102 of the first main body surface 111 and the second transition part 1132, wherein the second transition part 1131 and the plane where the first main body end 1102 of the first main body surface 111 is located have an angle.

[0093] The angle between the first turning portion 1121 and the plane containing the first main body end 1101 of the first main body surface 111 is not limited by this application. For example, in some embodiments of this application, the angle between the first turning portion 1121 and the plane containing the first main body end 1101 of the first main body surface 111 is 90 degrees. It should be understood that due to process errors, workpiece wear, etc., the angle between the first turning portion 1121 and the plane containing the first main body end 1101 of the first main body surface 111 is allowed to have errors. The angle of 90 degrees between the first turning portion 1121 and the plane containing the first main body end 1101 of the first main body surface 111 means that the angle between the first turning portion 1121 and the plane containing the first main body end 1101 of the first main body surface 111 is approximately 90 degrees, with an allowable error of 1 to 2 degrees. For example, in some embodiments of this application, the plane where the first turning part 1121 and the first body end 1101 of the first body surface 111 are located are connected by an arc-shaped transition surface, so that the extension of the first turning part 1121 and the extension of the first body end 1101 of the first body surface 111 have an angle of 60-120 degrees between their planes after they intersect.

[0094] The first turning part 1121 can be planar or non-planar, and the first turning part 1122 can be planar or non-planar, and can be an irregular curved surface.

[0095] In one embodiment of this application, both the first bend portion 1121 and the first bend portion 1122 are planar. In this embodiment, the first bend portion 1122 is parallel to the plane containing the first main body end 1101 of the first main body surface 111, wherein the end of the first main body portion 1111 of the first main body surface 111 is the first main body end 1101 of the first main body surface 111, that is, the first bend portion 1122 is parallel to the first main body portion 1111, and the first bend portion 1121 is perpendicular to the first main body portion 1111 and the first bend portion 1122.

[0096] The angle between the second turning portion 1131 and the plane containing the first two ends 1102 of the first main body surface 111 is not limited by this application. For example, in some embodiments of this application, the angle between the second turning portion 1131 and the plane containing the first two ends 1102 of the first main body surface 111 is 90 degrees. It should be understood that the angle between the second turning portion 1131 and the plane containing the first two ends 1102 of the first main body surface 111 is 90 degrees, meaning that the angle between the second turning portion 1131 and the plane containing the first two ends 1102 of the first main body surface 111 is approximately 90 degrees, with an allowable error of 1 to 2 degrees. For example, in some embodiments of this application, the second turning part 1131 and the plane where the first main body ends 1102 of the first main body surface 111 are located are transitioned by an arc-shaped transition surface, so that the extensions of the second turning part 1131 and the first main body ends 1102 of the first main body surface 111 have an angle of 60-120 degrees between them after they intersect.

[0097] The second turning part 1131 can be planar or non-planar, and the second turning part 1132 can be planar or non-planar.

[0098] In one embodiment of this application, both the second turning portion 1131 and the second turning portion 1132 are planar. In this embodiment, the second turning portion 1132 is parallel to the plane containing the first two ends 1102 of the second main body surface 121. The end of the first two ends 1112 of the first main body surface 111 is the first two ends 1102 of the first main body surface 111, meaning the second turning portion 1132 is parallel to the first two ends 1112, and the second turning portion 1131 is perpendicular to both the first two ends 1112 and the second turning portion 1132. The end of the first turning portion 1122 is the end of the first turning surface 112 and also one end of the first sidewall 11. The end of the second turning portion 1132 is the end of the second turning surface 113 and also the other end of the first sidewall 11.

[0099] Optionally, the first sidewall 11 and the second sidewall 12 are symmetrically arranged about the first central axis L1 set about the peripheral hole 10.

[0100] Accordingly, the second sidewall 12 includes a second main surface 121 and at least one turning surface. The second main surface 121 includes at least one plane. The extending direction of the turning surface of the second sidewall 12 is different from the extending direction of the second main surface 121.

[0101] In some embodiments of this application, the second sidewall 12 includes a third transition surface 122 and a fourth transition surface 123, and the second main body surface 121 extends between the third transition surface 122 and the fourth transition surface 123. Specifically, the second main body surface 121 has opposing second main body end 1201 and second main body ends 1202, the third transition surface 122 extends from the second main body end 1201 relative to the second main body surface 121 in a transitional manner, and the fourth transition surface 123 extends from the second main body ends 1202 relative to the second main body surface 121 in a transitional manner.

[0102] Optionally, the second main body surface 121 is a plane, with each part extending in a plane; or, the second main body surface 121 is a non-plane, with at least two parts extending in different planes, and the second main body surface 121 has at least one turning region.

[0103] Accordingly, in some embodiments of this application, the second main body surface 121 is a plane.

[0104] In some other embodiments of this application, the first main surface 111 is non-planar, such as a curved surface, a multi-planar combination transition surface, a planar-curved surface combination transition surface, etc.

[0105] In some embodiments where the second main body surface 121 is non-planar, the second main body surface 121 includes a second main body part 1211, a second main body part 1212, and a second main body middle part 1213. The second main body middle part 1213 is located between the second main body part 1211 and the second main body part 1212, and is recessed into the peripheral hole 10 relative to the second main body part 1211 and the second main body part 1212. The turning regions are formed between the second main body middle part 1213 and the second main body part 1211, and between the second main body middle part 1213 and the second main body part 1212, respectively.

[0106] Specifically, a transition region is formed between the middle part 1213 of the second main body and the first part 1211 of the second main body, and another transition region is formed between the middle part 1213 of the second main body and the second part 1212 of the second main body.

[0107] The end of the second main body part 1211 forms the second main body first end 1201 of the second main body surface 121, and the end of the second main body part 1212 forms the second main body second end 1202 of the second main body surface 121.

[0108] The second main body part 1211, the second main body part 1212 and the second main body middle part 1213 of the second main body surface 121 can each be a plane, extending in their respective planes.

[0109] Optionally, the second main body part 1211 and the second main body part 1212 extend in the same plane, or they may extend in different planes.

[0110] Alternatively, the plane containing the middle portion 1213 of the second main body may be parallel to the plane containing the first part 1211 of the second main body and / or the plane containing the second part 1212 of the second main body, or it may be neither parallel to the plane containing the first part 1211 of the second main body nor parallel to the plane containing the second part 1212 of the second main body.

[0111] The second main body part 1211 and the second main body part 1212 can also be non-planar, such as curved surfaces, multi-planar combination transition surfaces, planar surface combination transition surfaces, etc.

[0112] The second main body surface 121 further includes a second main body first connecting surface 1214 and a second main body second connecting surface 1215. The second main body first connecting surface 1214 is connected between the second main body part 1211 and the second main body middle part 1213, and the second main body second connecting surface 1215 is connected between the second main body second part 1212 and the second main body middle part 1213.

[0113] The second main body connecting surface 1214 can be a plane or a non-plane, such as a curved surface, or a multi-plane combination transition surface, a plane-curved surface combination transition surface, etc. Similarly, the second main body connecting surface 1215 can be a plane or a non-plane, such as a curved surface, or a multi-plane combination transition surface, a plane-curved surface combination transition surface, etc.

[0114] In some embodiments of this application, the second main body first connecting surface 1214 and the second main body second connecting surface 1215 are both planes. In this embodiment, the second main body part 1211 and the second main body part 1212 extend in the same plane, the plane where the second main body middle part 1213 is located is parallel to the plane where the second main body part 1211 and the second main body part 1212 are located, and is recessed into the peripheral hole 10 relative to the second main body part 1212 and the second main body part 1211, the second main body first connecting surface 1214 is perpendicular to the second main body part 1211 and the second main body middle part 1213, and the second main body second connecting surface 1215 is perpendicular to the second main body part 1212 and the first main body middle part 1213.

[0115] In this embodiment, the third turning surface 122 includes a third turning part 1221 and a third turning part 1222. The third turning part 1221 extends between the second main body end 1201 of the second main body surface 121 and the third turning part 1222, wherein the third turning part 1221 and the plane where the second main body end 1201 of the second main body surface 121 is located have an angle. The fourth turning surface 123 includes a fourth turning part 1231 and a fourth turning part 1232. The fourth turning part 1231 extends between the second main body end 1202 of the second main body surface 121 and the fourth turning part 1232, wherein the fourth turning part 1231 and the plane where the second main body end 1202 of the second main body surface 121 is located have an angle.

[0116] The angle between the third turning portion 1221 and the plane containing the second main body end 1201 of the second main body surface 121 is not limited by this application. For example, in one embodiment of this application, the angle between the third turning portion 1221 and the plane containing the second main body end 1201 of the second main body surface 121 is 90 degrees. The 90-degree angle between the third turning portion 1221 and the plane containing the second main body end 1201 of the second main body surface 121 means that the angle between the third turning portion 1221 and the plane containing the second main body end 1201 of the second main body surface 121 is approximately 90 degrees, allowing for an error of 1 to 2 degrees. For example, in some embodiments of this application, the plane where the third turning part 1221 and the plane where the second main body end 1201 of the second main body surface 121 are located are connected by an arc-shaped transition surface, so that the extension of the third turning part 1221 and the second main body end 1201 of the second main body surface 121 intersects the plane where the two are located at an angle of 60-120 degrees.

[0117] The third turning part 1221 can be planar or non-planar, and the third turning part 1222 can be planar or non-planar.

[0118] In one embodiment of this application, both the third bend portion 1221 and the third bend portion 1222 are planar. In this embodiment, the third bend portion 1222 is parallel to the plane containing the second main body end 1201 of the second main body surface 121, wherein the end of the second main body portion 1211 of the second main body surface 121 is the second main body end 1201 of the second main body surface 121. That is, the third bend portion 1222 is parallel to the second main body portion 1211, and the third bend portion 1221 is perpendicular to the second main body portion 1211 and the third bend portion 1222.

[0119] The angle between the fourth turning part 1231 and the plane containing the second main body ends 1202 of the second main body surface 121 is not limited by this application. For example, in some embodiments of this application, the angle between the fourth turning part 1231 and the plane containing the second main body ends 1202 of the second main body surface 121 is 90 degrees. It should be understood that the angle between the fourth turning part 1231 and the plane containing the second main body ends 1202 of the second main body surface 121 being 90 degrees means that the angle between the fourth turning part 1231 and the plane containing the second main body ends 1202 of the second main body surface 121 is approximately 90 degrees, with an allowable error of 1 to 2 degrees. For example, in some embodiments of this application, the plane where the fourth turning part 1231 and the second body two ends 1202 of the second body surface 121 are located are transitioned by an arc-shaped transition surface, so that the extensions of the fourth turning part 1231 and the second body two ends 1202 of the second body surface 121 intersect and there is an angle of 60-120 degrees between the two planes.

[0120] The fourth turning part 1231 can be planar or non-planar, and the fourth turning part 2 1232 can be planar or non-planar.

[0121] In one embodiment of this application, both the fourth bend portion 1231 and the fourth bend portion 1232 are planar. In this embodiment, the fourth bend portion 1232 is parallel to the plane containing the second main body ends 1202 of the second main body surface 121, wherein the end of the second main body portion 1212 of the second main body surface 121 is the second main body end 1202 of the second main body surface 121, that is, the fourth bend portion 1232 is parallel to the second main body portion 1212, and the fourth bend portion 1231 is perpendicular to the second main body portion 1212 and the fourth bend portion 1232. The end of the third bend portion 1222 is the end of the third bend surface 122, and also one end of the second sidewall 12. The end of the fourth bend portion 1232 is the end of the fourth bend surface 123, and also the other end of the second sidewall 12.

[0122] Optionally, the third sidewall 13 includes a third main surface 131 and at least one turning surface. The third main surface 131 includes at least one plane, and the extending direction of the turning surface of the third sidewall 13 is different from the extending direction of the third main surface 131.

[0123] Accordingly, the third sidewall 13 includes a fifth turning surface 132 and a sixth turning surface 133, and the third main body surface 131 is located between the fifth turning surface 132 and the sixth turning surface 133. Specifically, the third main body surface 131 has a third main body end 1301 and a third main body end 1302, the fifth turning surface 132 extends from the third main body end 1301 relative to the third main body surface 131 in a turning manner, and the sixth turning surface 133 extends from the third main body end 1302 relative to the third main body surface 131 in a turning manner.

[0124] Optionally, the third main surface 131 may be a plane, with each part extending within the same plane; or, the third main surface 131 may be non-planar, with at least two parts extending within different planes, having at least one turning region. Accordingly, in one embodiment of this application, the third main surface 131 is a plane.

[0125] In this embodiment, the fifth turning surface 132 includes a fifth turning part 1321 and a fifth turning part 1322. The fifth turning part 1321 extends between the third main body end 1301 of the third main body surface 131 and the fifth turning part 1322, wherein the fifth turning part 1321 and the plane where the third main body end 1301 of the third main body surface 131 is located have an angle. The sixth turning surface 133 includes a sixth turning part 1331 and a sixth turning part 1332. The sixth turning part 1331 extends between the third main body end 1302 of the third main body surface 131 and the sixth turning part 1332, wherein the sixth turning part 1331 and the plane where the third main body end 1302 of the third main body surface 131 is located have an angle.

[0126] The angle between the fifth turning portion 1321 and the plane containing the third main body end 1301 of the third main body surface 131 is not limited by this application. For example, in some embodiments of this application, the angle between the fifth turning portion 1321 and the plane containing the third main body end 1301 of the third main body surface 131 is approximately 90 degrees, with an allowable error of 1 to 2 degrees. As another example, in some embodiments of this application, the fifth turning portion 1321 and the plane containing the third main body end 1301 of the third main body surface 131 are transitioned by an arc-shaped transition surface, such that the extensions of the fifth turning portion 1321 and the third main body end 1301 of the third main body surface 131 intersect at an angle of 60-120 degrees between their respective planes.

[0127] The fifth turning part 1321 can be planar or non-planar, and the fifth turning part 1322 can be planar or non-planar.

[0128] In one embodiment of this application, both the fifth bend portion 1321 and the fifth bend portion 1322 are planar. In this embodiment, the fifth bend portion 1322 is parallel to the plane containing the third main body end 1301 of the third main body surface 131, wherein the third main body surface 131 is planar, that is, the fifth bend portion 1322 is parallel to the third main body surface 131, and the fifth bend portion 1321 is perpendicular to the third main body surface 131.

[0129] The angle between the sixth bend portion 1331 and the plane containing the third main body ends 1302 of the third main body surface 131 is not limited by this application. For example, in some embodiments of this application, the angle between the sixth bend portion 1331 and the plane containing the third main body ends 1302 of the third main body surface 131 is 90 degrees. It should be understood that the angle between the sixth bend portion 1331 and the plane containing the third main body ends 1302 of the third main body surface 131 is 90 degrees, meaning that the angle between the sixth bend portion 1331 and the plane containing the third main body ends 1302 of the third main body surface 131 is approximately 90 degrees, with an allowable error of 1 to 2 degrees. For example, in some embodiments of this application, the sixth turning part 1331 and the plane where the third main body two ends 1302 of the third main body surface 131 are located are transitioned by an arc-shaped transition surface, so that the extension of the sixth turning part 1331 and the extension of the third main body two ends 1302 of the third main body surface 131 have an angle of 60-120 degrees between their planes after they intersect.

[0130] The sixth turning part 1331 can be planar or non-planar, and the sixth turning part 1332 can be planar or non-planar.

[0131] In one embodiment of this application, both the sixth bend portion 1331 and the sixth bend portion 1332 are planar. In this embodiment, the sixth bend portion 1332 is parallel to the plane containing the third main body end 1302 of the second main body surface 121, wherein the third main body surface 131 is planar, that is, the sixth bend portion 1332 is parallel to the third main body surface 131, and the sixth bend portion 1331 is perpendicular to the third main body surface 131. The end of the fifth bend portion 1322 is the end of the fifth bend surface 132, and also one end of the third sidewall 13. The end of the sixth bend portion 1332 is the end of the sixth bend surface 133, and also the other end of the third sidewall 13.

[0132] It should be understood that the third sidewall 13 may have only one turning surface connected to the third main body surface 131, for example, only a fifth turning surface 132 or only a sixth turning surface 133. The third sidewall 13 may also extend entirely within a plane, that is, the third sidewall 13 may not have any turning surface connected to the third main body surface 131.

[0133] The third sidewall 13 and the fourth sidewall 14 are symmetrically arranged about the second central axis L2 set about the peripheral hole 10.

[0134] Accordingly, the fourth sidewall 14 includes a fourth main surface 141 and at least one turning surface. The fourth main surface 141 includes at least one plane. The extending direction of the turning surface of the fourth sidewall 14 is different from the extending direction of the fourth main surface 141.

[0135] In some embodiments of this application, the fourth sidewall 14 includes a seventh turning surface 142 and an eighth turning surface 143, and the fourth main body surface 141 is located between the seventh turning surface 142 and the eighth turning surface 143. Specifically, the fourth main body surface 141 has opposing fourth main body one end 1401 and fourth main body two ends 1402, the seventh turning surface 142 extends from the fourth main body one end 1401 relative to the fourth main body surface 141 in a turning manner, and the eighth turning surface 143 extends from the fourth main body two ends 1402 relative to the fourth main body surface 141 in a turning manner.

[0136] Optionally, the fourth main surface 141 may be a plane, with each part extending within the same plane; or, the fourth main surface 141 may be non-planar, with at least two parts extending within different planes, and the fourth main surface 141 may have at least one turning region. Accordingly, in one embodiment of this application, the fourth main surface 141 is a plane.

[0137] In this embodiment of the application, the seventh turning surface 142 includes a seventh turning part 1421 and a seventh turning part 1422. The seventh turning part 1421 extends between the fourth main body end 1401 of the fourth main body surface 141 and the seventh turning part 1422, wherein the seventh turning part 1421 and the plane where the fourth main body end 1401 of the fourth main body surface 141 is located have an angle. The eighth turning surface 143 includes an eighth turning part 1431 and an eighth turning part 1432. The eighth turning part 1431 extends between the fourth main body end 1402 of the fourth main body surface 141 and the eighth turning part 1432, wherein the eighth turning part 1431 and the plane where the fourth main body end 1402 of the fourth main body surface 141 is located have an angle.

[0138] The angle between the seventh turning part 1421 and the plane containing the fourth main body end 1401 of the fourth main body surface 141 is not limited by this application. For example, in some embodiments of this application, the angle between the seventh turning part 1421 and the plane containing the fourth main body end 1401 of the fourth main body surface 141 is approximately 90 degrees, allowing an error of 1 to 2 degrees. As another example, in some embodiments of this application, the seventh turning part 1421 and the plane containing the fourth main body end 1401 of the fourth main body surface 141 are transitioned by an arc-shaped transition surface, such that the extensions of the seventh turning part 1421 and the fourth main body end 1401 of the fourth main body surface 141 intersect at an angle of 60-120 degrees between their respective planes.

[0139] The seventh turning part 1421 can be planar or non-planar, and the seventh turning part 1422 can be planar or non-planar.

[0140] In one embodiment of this application, both the seventh bend portion 1421 and the seventh bend portion 1422 are planar. In this embodiment, the seventh bend portion 1422 is parallel to the plane containing the fourth main body end 1401 of the fourth main body surface 141, wherein the end of the fourth main body portion of the fourth main body surface 141 is the fourth main body end 1401 of the fourth main body surface 141. That is, the seventh bend portion 1422 is parallel to the fourth main body portion, and the seventh bend portion 1421 is perpendicular to the fourth main body portion and the seventh bend portion 1422.

[0141] The angle between the eighth turning part 1431 and the plane containing the fourth main body ends 1402 of the fourth main body surface 141 is not limited by this application. For example, in some embodiments of this application, the angle between the eighth turning part 1431 and the plane containing the fourth main body ends 1402 of the fourth main body surface 141 is 90 degrees. It should be understood that the angle between the eighth turning part 1431 and the plane containing the fourth main body ends 1402 of the fourth main body surface 141 is approximately 90 degrees, with an allowable error of 1 to 2 degrees. For another example, in some embodiments of this application, the eighth turning part 1431 and the plane containing the fourth main body ends 1402 of the fourth main body surface 141 are transitioned by an arc-shaped transition surface, such that the extensions of the eighth turning part 1431 and the fourth main body ends 1402 of the fourth main body surface 141 have an angle of 60-120 degrees between their intersecting planes.

[0142] The eighth turning part 1431 can be planar or non-planar, and the eighth turning part 1432 can be planar or non-planar.

[0143] In one embodiment of this application, both the eighth bend portion 1431 and the eighth bend portion 1432 are planar. In this embodiment, the eighth bend portion 1432 is parallel to the plane containing the fourth main body end 1402 of the second main body surface 121, wherein the end of the fourth main body end 1402 of the fourth main body surface 141 is the fourth main body end 1402, that is, the eighth bend portion 1432 is parallel to the fourth main body end 1402, and the eighth bend portion 1431 is perpendicular to the fourth main body end 1432. The end of the seventh bend portion 1422 is the end of the seventh bend surface 142, and also one end of the fourth sidewall 14. The end of the eighth bend portion 1432 is the end of the eighth bend surface 143, and also the other end of the fourth sidewall 14.

[0144] It should be understood that the fourth sidewall 14 may have only one turning surface connected to the fourth main surface 141, for example, only a seventh turning surface 142 or only an eighth turning surface 143. The fourth sidewall 14 may also extend entirely within a plane, that is, the fourth sidewall 14 may not have any turning surface connected to the fourth main surface 141.

[0145] In this embodiment, the peripheral hole 10 further includes a first transition wall 15, a second transition wall 16, a third transition wall 17, and a fourth transition wall 18. The first transition wall 15 extends between the first side wall 11 and the third side wall 13, the second transition wall 16 extends between the first side wall 11 and the fourth side wall 14, the third transition wall 17 extends between the second side wall 12 and the third side wall 13, and the fourth transition wall 18 extends between the second side wall 12 and the fourth side wall 14.

[0146] Specifically, the first transition wall 15 extends between the first turning portion 1122 of the first turning surface 112 of the first side wall 11 and the fifth turning portion 1322 of the fifth turning surface 132 of the third side wall 13; the second transition wall 16 extends between the second turning portion 1132 of the second turning surface 113 of the first side wall 11 and the seventh turning portion 1422 of the seventh turning surface 142 of the fourth side wall 14; the third transition wall 17 extends between the third turning portion 1222 of the third turning surface 122 of the second side wall 12 and the sixth turning portion 1332 of the sixth turning surface 133 of the third side wall 13; and the fourth transition wall 18 extends between the fourth turning portion 1232 of the fourth turning surface 123 of the second side wall 12 and the eighth turning portion 1432 of the eighth turning surface 143 of the fourth side wall 14.

[0147] The first transition wall 15, the second transition wall 16, the third transition wall 17 and the fourth transition wall 18 may be planar or non-planar.

[0148] In some embodiments of this application, the first transition wall 15, the second transition wall 16, the third transition wall 17 and the fourth transition wall 18 may be multi-plane combined transition surfaces.

[0149] For example, in one embodiment of this application, the first transition wall 15 includes a first transition portion 151 and a first transition portion 152. The first transition portion 151 extends from one end of the first sidewall 11, and the first transition portion 152 extends from one end of the third sidewall 13. The first transition portion 151 and the first transition portion 152 intersect and extend in different directions. The second transition wall 16 includes a second transition portion 161 and a second transition portion 162. The second transition portion 161 extends from the other end of the first sidewall 11, and the second transition portion 162 extends from one end of the fourth sidewall 14. The second transition portion 161 and the second transition portion 162 intersect and extend in different directions. The extension directions are different; the third transition wall 17 includes a third transition part 171 and a third transition part 172, the third transition part 171 extends from one end of the second side wall 12, the third transition part 172 extends from the other end of the third side wall 13, the third transition part 171 and the third transition part 172 intersect, and their extension directions are different; the fourth transition wall 18 includes a fourth transition part 181 and a fourth transition part 182, the fourth transition part 181 extends from the other end of the second side wall 12, the fourth transition part 182 extends from the other end of the fourth side wall 14, the fourth transition part 181 and the fourth transition part 182 intersect, and their extension directions are different.

[0150] The included angles between the first transition part 151 and the second transition part 162, the second transition part 161 and the second transition part 162, the third transition part 171 and the third transition part 172, and the fourth transition part 181 and the fourth transition part 182 are not limited to this application. Optionally, the included angles between the first transition part 151 and the second transition part 162, the second transition part 161 and the second transition part 162, the third transition part 171 and the third transition part 172, and the fourth transition part 181 and the fourth transition part 182 are all approximately 90 degrees.

[0151] In this embodiment, such as Figure 1 and Figure 2 As shown, the first transition part 151 and the first transition part 152, the second transition part 161 and the second transition part 162, the third transition part 171 and the third transition part 172, and the fourth transition part 181 and the fourth transition part 182 are all planar. The extension direction of the first transition part 151 is consistent with the extension direction of the first sidewall 11 where it connects with the first transition part 151, that is, consistent with the extension direction of the first turning part 1122 of the first sidewall 11. In other words, the first transition part 151 and the first turning part 1122 extend in the same plane. The extension direction of the first transition part 152 is consistent with the extension direction of the third sidewall 13 where it connects with the first transition part 152, that is, consistent with the extension direction of the fifth turning part 1322 of the third sidewall 13. In other words, the first transition part 152 and the fifth turning part 1322 extend in the same plane.

[0152] The extension direction of the second transition portion 161 is consistent with the extension direction of the first sidewall 11 where it connects to the second transition portion 161, that is, consistent with the extension direction of the second bend portion 1132 of the first sidewall 11. In other words, the second transition portion 161 and the second bend portion 1132 extend in the same plane. The extension direction of the second transition portion 162 is consistent with the extension direction of the fourth sidewall 14 where it connects to the second transition portion 162, that is, consistent with the extension direction of the seventh bend portion 1422 of the fourth sidewall 14. In other words, the second transition portion 162 and the seventh bend portion 1422 extend in the same plane.

[0153] The extension direction of the third transition portion 171 is consistent with the extension direction of the second sidewall 12 where it connects to the third transition portion 171, that is, consistent with the extension direction of the third bend portion 1222 of the second sidewall 12. In other words, the third transition portion 171 and the third bend portion 1222 extend in the same plane. The extension direction of the third transition portion 172 is consistent with the extension direction of the third sidewall 13 where it connects to the third transition portion 172, that is, consistent with the extension direction of the sixth bend portion 1332 of the third sidewall 13. In other words, the third transition portion 172 and the sixth bend portion 1332 extend in the same plane.

[0154] The extension direction of the fourth transition portion 181 is consistent with the extension direction of the second sidewall 12 where it connects to the fourth transition portion 181, that is, consistent with the extension direction of the fourth bend portion 1232 of the second sidewall 12. In other words, the fourth transition portion 181 and the fourth bend portion 1232 extend in the same plane. The extension direction of the fourth transition portion 182 is consistent with the extension direction of the fourth sidewall 14 where it connects to the fourth transition portion 182, that is, consistent with the extension direction of the eighth bend portion 1432 of the fourth sidewall 14. In other words, the fourth transition portion 182 and the eighth bend portion 1432 extend in the same plane.

[0155] In another embodiment of this application, the first transition wall 15 includes a first transition portion 151 and a first transition portion 152. The first transition portion 151 extends from one end of the first sidewall 11, and the first transition portion 152 extends from one end of the third sidewall 13. The first transition portion 151 and the first transition portion 152 intersect and extend in different directions. The second transition wall 16 includes a second transition portion 161 and a second transition portion 162. The second transition portion 161 extends from the other end of the first sidewall 11, and the second transition portion 162 extends from one end of the fourth sidewall 14. The second transition portion 161 and the second transition portion 162 intersect and extend in different directions. The directions are different; the third transition wall 17 includes a third transition part 171 and a third transition part 172. The third transition part 171 extends from one end of the second side wall 12, and the third transition part 172 extends from the other end of the third side wall 13. The third transition part 171 and the third transition part 172 intersect and extend in different directions; the fourth transition wall 18 includes a fourth transition part 181 and a fourth transition part 182. The fourth transition part 181 extends from the other end of the second side wall 12, and the fourth transition part 182 extends from the other end of the fourth side wall 14. The fourth transition part 181 and the fourth transition part 182 intersect and extend in different directions.

[0156] The included angles between the first transition part 151 and the second transition part 162, the second transition part 161 and the second transition part 162, the third transition part 171 and the third transition part 172, and the fourth transition part 181 and the fourth transition part 182 are not limited to this application. Optionally, the included angles between the first transition part 151 and the second transition part 162, the second transition part 161 and the second transition part 162, the third transition part 171 and the third transition part 172, and the fourth transition part 181 and the fourth transition part 182 are all approximately 90 degrees.

[0157] In this embodiment, such as Figure 3 and Figure 4As shown, the first transition part 151 and the first transition part 152, the second transition part 161 and the second transition part 162, the third transition part 171 and the third transition part 172, and the fourth transition part 181 and the fourth transition part 182 are all planar. The extension direction of the first transition part 151 forms an angle with the extension direction of the first sidewall 11 at its junction with the first transition part 151, that is, it forms an angle with the extension direction of the first turning part 1122 of the first sidewall 11. In other words, the first transition part 151 and the first turning part 1122 extend in different planes. Similarly, the extension direction of the first transition part 152 forms an angle with the extension direction of the third sidewall 13 at its junction with the first transition part 152, that is, it forms an angle with the extension direction of the fifth turning part 1322 of the third sidewall 13. In other words, the first transition part 152 and the fifth turning part 1322 extend in different planes.

[0158] The extension direction of the second transition portion 161 forms an angle with the extension direction of the first sidewall 11 at the junction with the second transition portion 161, that is, it forms an angle with the extension direction of the second turning portion 1132 of the first sidewall 11. In other words, the second transition portion 161 and the second turning portion 1132 extend in different planes. The extension direction of the second transition portion 162 forms an angle with the extension direction of the fourth sidewall 14 at the junction with the second transition portion 162, that is, it forms an angle with the extension direction of the seventh turning portion 1422 of the fourth sidewall 14. In other words, the second transition portion 162 and the seventh turning portion 1422 extend in different planes.

[0159] The extension direction of the third transition portion 171 forms an angle with the extension direction of the second sidewall 12 where it connects to the third transition portion 171, that is, it forms an angle with the extension direction of the third bend portion 1222 of the second sidewall 12. In other words, the third transition portion 171 and the third bend portion 1222 extend in different planes. The extension direction of the third transition portion 172 forms an angle with the extension direction of the third sidewall 13 where it connects to the third transition portion 172, that is, it forms an angle with the extension direction of the sixth bend portion 1332 of the third sidewall 13. In other words, the third transition portion 172 and the sixth bend portion 1332 extend in different planes.

[0160] The extension direction of the fourth transition part 181 forms an angle with the extension direction of the second sidewall 12 where it connects to the fourth transition part 181, that is, it forms an angle with the extension direction of the fourth turning part 1232 of the second sidewall 12. In other words, the fourth transition part 181 and the fourth turning part 1232 extend in different planes. The extension direction of the fourth transition part 182 forms an angle with the extension direction of the fourth sidewall 14 where it connects to the fourth transition part 182, that is, it forms an angle with the extension direction of the eighth turning part 1432 of the fourth sidewall 14. In other words, the fourth transition part 182 and the eighth turning part 1432 extend in different planes.

[0161] The angle between the extending direction of the first transition part 151 and the extending direction of the first sidewall 11 at the junction with the first transition part 151, the angle between the extending direction of the first transition part 152 and the extending direction of the third sidewall 13 at the junction with the first transition part 152, the angle between the extending direction of the second transition part 161 and the extending direction of the first sidewall 11 at the junction with the second transition part 161, the angle between the extending direction of the second transition part 162 and the extending direction of the fourth sidewall 14 at the junction with the second transition part 162, and the extension of the third transition part 171. The angles between the extension direction of the third transition part 171 and the extension direction of the second sidewall 12 where it connects with the third transition part 172, the extension direction of the third transition part 172 and the extension direction of the third sidewall 13 where it connects with the third transition part 172, the extension direction of the fourth transition part 181 and the extension direction of the second sidewall 12 where it connects with the fourth transition part 181, and the extension direction of the fourth transition part 182 and the extension direction of the fourth sidewall 14 where it connects with the fourth transition part 182 are not limited to this application. For example, they can all be approximately 90 degrees, or they can be other angles.

[0162] Optionally, the first transition wall 15 and the second transition wall 16 are symmetrically arranged about the second central axis L2 set about the peripheral hole 10, the third transition wall 17 and the fourth transition wall 18 are symmetrically arranged about the second central axis L2 set about the peripheral hole 10, the third transition wall 17 and the first transition wall 15 are symmetrically arranged about the first central axis L1 set about the peripheral hole 10, and the fourth transition wall 18 and the second transition wall 16 are symmetrically arranged about the first central axis L1 set about the peripheral hole 10.

[0163] In other embodiments of this application, such as Figure 5 and Figure 6As shown, the first transition wall 15, the second transition wall 16, the third transition wall 17 and the fourth transition wall 18 can each be a plane.

[0164] In some other embodiments of this application, the first transition wall 15, the second transition wall 16, the third transition wall 17 and the fourth transition wall 18 may each be a curved surface.

[0165] In the structure of the peripheral hole 10 obtained by deforming a rectangular hole, the first main body surface 111 of the first sidewall 11, the second main body surface 121 of the second sidewall 12, the third main body surface 131 of the third sidewall 13, and the fourth main body surface 141 of the fourth sidewall 14 form the main body of the peripheral hole 10; the first turning surface 112, the first transition surface 15, and the fifth turning surface 132 form the first protrusion of the peripheral hole 10; the second turning surface 113, the second transition surface 16, and the seventh turning surface 142 form the second protrusion of the peripheral hole 10; the third turning surface 122, the third transition surface 17, and the sixth turning surface 133 form the third protrusion of the peripheral hole 10; and the fourth turning surface 123, the fourth transition surface 18, and the eighth turning surface 143 form the fourth protrusion of the peripheral hole 10.

[0166] The structure of the outer hole 10 obtained by deforming the triangular hole is described below, such as... Figure 9 As shown.

[0167] The peripheral hole 10A includes a first sidewall 11A, a second sidewall 12A, and a third sidewall 13A. The first sidewall 11A, the second sidewall 12A, and the third sidewall 13A are connected end to end, wherein one end of the second sidewall 12A is connected to one end of the first sidewall 11A, one end of the third sidewall 13A is connected to the other end of the first sidewall 11A, and the other end of the second sidewall 12A is connected to the other end of the third sidewall 13A.

[0168] The first sidewall 11A faces the oxidation limiting hole 200A. The first sidewall 11A includes a first main surface 111A, a first transition surface 112A, and a second transition surface 113A, with the first main surface 111A located between the first transition surface 112A and the second transition surface 113A. The second sidewall 12A includes a second main surface 121A, a third transition surface 122A, and a fourth transition surface 123A. The third sidewall 13A includes a third main surface 131A, a fifth transition surface 132A, and a sixth transition surface 133A.

[0169] The first main body surface 111A has a first main body end 1101A and a first main body end 1102A, respectively. A first turning surface 112A extends from the first main body end 1101A relative to the first main body surface 111A, and a second turning surface 113A extends from the second main body end 1202A relative to the first main body surface 111A. The second main body surface 121A has a second main body end 1201A and a second main body end 1202A, respectively. A third turning surface 122A extends from the second main body end 1201A relative to the second main body surface 121A, and a fourth turning surface 123A extends from the second main body end 1202A relative to the second main body surface 121A. The third main body surface 131A has a third main body end 1301A and a third main body end 1302A, the fifth turning surface 132A extends from the third main body end 1301A in a turning manner relative to the third main body surface 131A, and the sixth turning surface 133A extends from the third main body end 1302A in a turning manner relative to the third main body surface 131A.

[0170] Accordingly, the first turning surface 112A of the first sidewall 11A is connected to the third turning surface 122A of the second sidewall 12A, the second turning surface 113A of the first sidewall 11A is connected to the fifth turning surface 132A of the third sidewall 13A, and the fourth turning surface 123A of the second sidewall 12A is connected to the sixth turning surface 133A of the third sidewall 13A.

[0171] Optionally, the first main body surface 111A may be a plane, with each part extending in the same plane; or, the first main body surface 111A may be a non-plane, with at least two parts extending in different planes, and the second main body surface 121A may have at least one turning region. The second main body surface 121A may be a plane, with each part extending in the same plane; or, the second main body surface 121A may be a non-plane, with at least two parts extending in different planes, and the second main body surface 121A may have at least one turning region. The third main body surface 131A may be a plane, with each part extending in the same plane; or, the third main body surface 131A may be a non-plane, with at least two parts extending in different planes, and the second main body surface 121A may have at least one turning region.

[0172] In one embodiment of this application, the first main surface 111A is a plane, the first transition surface 112A is a curved surface, and the second transition surface 113A is a curved surface; the second main surface 121A is a plane, the third transition surface 122A is a curved surface, and the fourth transition surface 123A is a curved surface; the third main surface 131A is a plane, the fifth transition surface 132A is a curved surface, and the sixth transition surface 133A is a curved surface.

[0173] It should be understood that in other embodiments of this application, the first main surface 111A, the second main surface 121A, and the third main surface 131A may also be non-planar, for example, multi-planar combined transition surfaces or planar curved surface combined transition surfaces; the first transition surface 112A, the second transition surface 113A, the third transition surface 122A, the fourth transition surface 123A, the fifth transition surface 132A, and the sixth transition surface 133A may also be implemented in other ways, for example, multi-planar combined transition surfaces or planar curved surface combined transition surfaces.

[0174] In the structure of the peripheral hole 10A obtained by deforming the triangular hole, the first main body surface 111A of the first sidewall 11A, the second main body surface 121A of the second sidewall 12A, and the third main body surface 131A of the third sidewall 13A form the main body of the peripheral hole 10A; the first turning surface 112A and the third turning surface 122A form the first protrusion of the peripheral hole 10A; the second turning surface 113A and the fifth turning surface 132A form the second protrusion of the peripheral hole 10A; and the fourth turning surface 123A and the sixth turning surface 133A form the third protrusion of the peripheral hole 10A.

[0175] It should be understood that the peripheral hole 10A can also be of other shapes, and the extension direction of each sidewall can be designed according to requirements.

[0176] It is worth mentioning that in a VCSEL array formed by multiple VCSEL lasers, two adjacent VCSEL lasers can share at least one peripheral aperture 10A, such as... Figure 10 As shown.

[0177] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.

Claims

1. A hole element for a VCSEL laser, the VCSEL laser having at least one oxide-confined hole, characterized in that, The aperture unit includes: Multiple peripheral holes are arranged circumferentially to enclose and form a restricted hole forming region therein, and the oxide restricted holes are formed in the restricted hole forming region; The peripheral hole has a first sidewall facing the oxidation limiting hole; the first sidewall includes a first main surface, a first turning surface and a second turning surface, the first main surface is located between the first turning surface and the second turning surface, the first main surface includes at least one plane, and the extension directions of the first turning surface and the second turning surface of the first sidewall are different from the extension direction of the first main surface and bend toward the oxidation limiting hole.

2. The aperture unit for a VCSEL laser according to claim 1, wherein, The first main surface is a plane that extends within a plane.

3. The aperture unit for a VCSEL laser according to claim 1, wherein, The first main surface has at least one turning region.

4. The aperture unit for a VCSEL laser according to claim 3, wherein, The first main body surface includes a first main body part, a first main body part two, and a first main body middle part. The first main body middle part is located between the first main body part one and the first main body part two, and is recessed into the peripheral hole relative to the first main body part one and the first main body part two. The turning regions are formed between the first main body middle part and the first main body part one, and between the first main body middle part and the first main body part two, respectively.

5. The aperture unit for a VCSEL laser according to claim 4, wherein, The first part of the first main body, the second part of the first main body, and the middle part of the first main body are each a plane, extending within their respective planes.

6. The aperture unit for a VCSEL laser according to claim 1, wherein, The first main body surface has a first main body end and a first main body end, and the first turning surface includes a first turning part and a first turning part, the first turning part extending between the first main body end and the first turning part of the first main body surface, wherein there is an angle between the first turning part and the plane where the first main body end of the first main body surface is located; the second turning surface includes a second turning part and a second turning part, the second turning part extending between the first main body end and the second turning part of the first main body surface, wherein there is an angle between the second turning part and the plane where the first main body end of the first main body surface is located.

7. The aperture unit for a VCSEL laser according to claim 6, wherein, The peripheral hole also includes a second sidewall, and the first sidewall and the second sidewall are symmetrically arranged about a first central axis set about the peripheral hole.

8. The aperture unit for a VCSEL laser according to claim 7, wherein, The peripheral hole also includes a third sidewall, which includes a third main surface and at least one turning surface. The third main surface includes at least one plane, and the extending direction of the turning surface of the third sidewall is different from the extending direction of the third main surface.

9. The aperture unit for a VCSEL laser according to claim 8, wherein, The third sidewall includes a fifth turning surface and a sixth turning surface, and the third main body surface is located between the fifth turning surface and the sixth turning surface.

10. The aperture unit for a VCSEL laser according to claim 9, wherein, The third main body surface has a third main body end and a third main body end opposite to each other. The fifth turning surface includes a fifth turning part and a fifth turning part, the fifth turning part extending between the third main body end and the fifth turning part of the third main body surface, wherein the fifth turning part and the plane where the third main body end of the third main body surface is located have an angle between them. The sixth turning surface includes a sixth turning part and a sixth turning part, the sixth turning part extending between the third main body end and the sixth turning part of the third main body surface, wherein the sixth turning part and the plane where the third main body end of the third main body surface is located have an angle between them.

11. The aperture element for a VCSEL laser according to claim 10, wherein, The peripheral hole also includes a fourth sidewall, which is symmetrically arranged with respect to the second central axis set about the peripheral hole.

12. The aperture unit for a VCSEL laser according to claim 11, wherein, The peripheral hole further includes a first transition wall, a second transition wall, a third transition wall, and a fourth transition wall. The first transition wall extends between the first side wall and the third side wall, the second transition wall extends between the first side wall and the fourth side wall, the third transition wall extends between the second side wall and the third side wall, and the fourth transition wall extends between the second side wall and the fourth side wall.

13. The aperture unit for a VCSEL laser according to claim 12, wherein, The first transition wall and the second transition wall are symmetrically arranged about a second central axis set about the peripheral hole. The third transition wall and the fourth transition wall are symmetrically arranged about a second central axis set about the peripheral hole. The third transition wall and the first transition wall are symmetrically arranged about a first central axis set about the peripheral hole. The fourth transition wall and the second transition wall are symmetrically arranged about a first central axis set about the peripheral hole.

14. The aperture unit for a VCSEL laser according to claim 13, wherein, The first transition wall includes a first transition part and a first transition part. The first transition part extends from one end of the first sidewall, and the first transition part extends from one end of the third sidewall. The first transition part and the first transition part intersect and extend in different directions.

15. The aperture unit for a VCSEL laser according to claim 14, wherein, The extension direction of the first transition part is consistent with the extension direction of the first sidewall at the junction with the first transition part, and the extension direction of the first transition part is consistent with the extension direction of the third sidewall at the junction with the first transition part.

16. The aperture element for a VCSEL laser according to claim 14, wherein, There is an angle between the extending direction of the first transition part and the extending direction of the first sidewall at the junction with the first transition part, and there is an angle between the extending direction of the first transition part and the extending direction of the third sidewall at the junction with the first transition part.

17. The aperture element for a VCSEL laser according to claim 13, wherein, The first transition wall is a plane extending between the first sidewall and the third sidewall.

18. The aperture element for a VCSEL laser according to claim 13, wherein, The first transition wall is a curved surface.

19. The aperture unit for a VCSEL laser according to claim 1, wherein, The first transition surface is a curved surface, and the second transition surface is a curved surface.

20. The aperture unit for a VCSEL laser according to claim 19, wherein, The peripheral hole further includes a second sidewall and a third sidewall. The second sidewall includes a second main surface, a third turning surface, and a fourth turning surface. The third sidewall includes a third main surface, a fifth turning surface, and a sixth turning surface. The second main surface is located between the third turning surface and the fourth turning surface, and the third main surface is located between the fifth turning surface and the sixth turning surface. The first turning surface of the first sidewall is connected to the third turning surface of the second sidewall, the second turning surface of the first sidewall is connected to the fifth turning surface of the third sidewall, and the fourth turning surface of the second sidewall is connected to the sixth turning surface of the third sidewall.

21. The aperture unit for a VCSEL laser according to claim 20, wherein, The third transition surface is a curved surface, the fourth transition surface is a curved surface, the fifth transition surface is a curved surface, and the sixth transition surface is a curved surface.

22. A VCSEL laser, characterized in that, include: At least one oxide confinement layer, the oxide confinement layer having an oxide confinement pore; and The hole unit as described in any one of claims 1 to 21.

Images