Lamp nest system and rapid thermal processing apparatus

Abstract

The application relates to the technical field of rapid heat treatment, in particular to a lamp nest system and a rapid heat treatment equipment. The lamp nest system comprises a hollow shell and a honeycomb assembly; the honeycomb assembly is arranged in the hollow shell, and the honeycomb assembly comprises a first honeycomb piece and a second honeycomb piece; a plurality of first mounting through holes are arranged on the first honeycomb piece, a plurality of second mounting through holes are arranged on the second honeycomb piece, each first mounting through hole is communicated with a corresponding second mounting through hole, and the honeycomb assembly is composed of honeycomb holes; a sunken hole is arranged in the first mounting through hole, and an abutting table is formed at the connection position of the second mounting through hole and the sunken hole; when a lamp tube is mounted in the honeycomb hole, an electric connecting piece at the top of the lamp tube abuts against the abutting table, and the lamp tube is arranged in the second mounting through hole. The integrated honeycomb assembly design simplifies the manufacturing process and reduces the manufacturing cost; meanwhile, the honeycomb holes of the honeycomb assembly improve the heat dissipation efficiency of the lamp tube under the premise of ensuring the smooth installation of the lamp tube.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of rapid thermal processing equipment, in particular to a lamp nest system and rapid thermal processing equipment. BACKGROUND

[0002] RTP (Rapid Thermal Processing) is a kind of rapid thermal processing equipment for semiconductor device manufacturing and material research, which can realize precise control and optimized processing of materials by controlling the temperature and time of heating and cooling to change the properties or structure thereof.

[0003] The heating unit is the main component of the rapid thermal processing equipment, and the heating unit in the related art is a lamp nest formed by welding hundreds of super-thin-wall stainless steel pipes, a stainless steel upper cover and a copper bottom groove, halogen lamps are installed in the lamp nest, and the halogen lamps are installed on a circuit substrate through the holes in the bottom of the lamp nest.

[0004] However, the hundreds of super-thin-wall stainless steel pipes are difficult to weld, difficult to rework, inconvenient to install, difficult to detect and high in cost; the super-thin-wall stainless steel pipes are easily damaged; and the circular steel pipes cannot be matched with flat halogen lamps, and the heat dissipation efficiency is low. SUMMARY

[0005] The application provides a lamp nest system and rapid thermal processing equipment, which avoids a large amount of welding work in the manufacturing process through integrated modular design, and realizes efficient heat dissipation of flat halogen lamps through the structure design of composite holes.

[0006] In a first aspect, the application provides a lamp nest system, which comprises a hollow shell, a honeycomb assembly and a lamp tube; the honeycomb assembly is arranged in the hollow shell, the honeycomb assembly comprises a first honeycomb piece and a second honeycomb piece stacked one above another along the longitudinal axis of the hollow shell, and the second honeycomb piece is located below the first honeycomb piece; a plurality of first mounting through holes arranged in an array are arranged on the first honeycomb piece, a plurality of second mounting through holes arranged in an array are arranged on the second honeycomb piece, each first mounting through hole is in communication with a corresponding second mounting through hole to form a honeycomb hole, and the honeycomb hole is configured to install a heating assembly; a sunken hole is arranged in the first mounting through hole, and an abutment table is formed at the connection between the second mounting through hole and the sunken hole; the heating assembly comprises a lamp tube and an electrical connecting piece arranged at the top of the lamp tube, the first mounting through hole allows the electrical connecting piece to pass through, the second mounting through hole is matched with the lamp tube, so that the electrical connecting piece abuts against the abutment table, and the lamp tube is located in the second mounting through hole.

[0007] In a possible implementation, the first mounting through hole comprises a first circular hole, a sunken step is arranged in the first circular hole, and the sunken hole is arranged on the sunken step; the sunken hole is combined by a second circular hole and a first waist hole to form a plum blossom-shaped sunken hole; and the second mounting through hole comprises a second waist hole, the size of the second waist hole is the same as that of the first waist hole, and an abutting table is formed at the joint of the second waist hole and the second circular hole.

[0008] The honeycomb hole formed by the first mounting through hole and the second mounting through hole is a three-step hole, which comprises a circular hole, a plum blossom hole, and a waist hole arranged from top to bottom, can not only ensure smooth insertion of the flat body halogen lamp, but also ensure that the distance between the four walls of the flat body halogen lamp shell and the inner wall of the honeycomb hole is consistent, and ensure that the heat of the flat body halogen lamp can be evenly dissipated, thereby improving the heat dissipation efficiency of the flat body halogen lamp.

[0009] In a possible implementation, a transition arc is arranged at the joint of the second circular hole and the first waist hole.

[0010] The arrangement of the transition arc ensures smooth connection of the second circular hole and the first waist hole, and ensures smooth passing of the flat body halogen lamp.

[0011] In a possible implementation, the hollow shell is a cylindrical hollow shell, and the honeycomb assembly is a cylindrical assembly.

[0012] The cylindrical hollow shell and the cylindrical honeycomb assembly can match the wafer shape as much as possible, reduce the product volume, and have greater space utilization.

[0013] In a possible implementation, the second honeycomb piece has an upper surface and a lower surface along the longitudinal axis of the hollow shell, an outer periphery of the second honeycomb piece extends outwardly to have a first annular flange and a second annular flange, the first annular flange is flush with the upper surface, and the second annular flange is flush with the lower surface; an inner wall of the hollow shell is provided with a first connecting groove and a second connecting groove, the first annular flange is connected to the first connecting groove, and the second annular flange is connected to the second connecting groove.

[0014] The connection of the first annular flange to the first connecting groove and the connection of the second annular flange to the second connecting groove can ensure that the second honeycomb piece is fixed in the hollow shell; meanwhile, when the second honeycomb is arranged in the hollow shell, the first annular flange and the second annular flange can also form a closed cavity between the inner wall of the hollow shell and the outer periphery of the second honeycomb piece.

[0015] In a possible implementation, the outer diameter of the first annular flange is smaller than the outer diameter of the second annular flange.

[0016] The first annular flange and the second annular flange of different sizes are used to position the second honeycomb, thereby improving the installation accuracy and efficiency of the second honeycomb.

[0017] In a possible implementation, the outer diameter of the first honeycomb is smaller than the outer diameter of the second honeycomb.

[0018] The second honeycomb is provided with a second annular flange extending outward along the outer periphery, and the second annular flange is flush with the lower surface; when the first honeycomb is arranged on the upper surface of the second honeycomb, an abutting platform is formed between the first honeycomb and the upper surface of the second honeycomb, because the outer diameter of the first honeycomb is smaller than the outer diameter of the second honeycomb; and the inner wall of the hollow shell can be provided with an abutting protrusion matched with the abutting platform, to limit the installation of the second honeycomb.

[0019] In a possible implementation, when the honeycomb assembly is arranged in the hollow shell, a cooling channel is formed between the inner wall of the hollow shell and the outer peripheral wall of the second honeycomb; the second honeycomb is provided with a plurality of cooling grooves, the plurality of cooling grooves penetrate the second honeycomb along the radial direction of the second honeycomb, and the second mounting hole is arranged between two adjacent cooling grooves; and the plurality of cooling grooves are in communication with the cooling channel.

[0020] The cooling liquid enters the cooling grooves through the cooling channel, and the second mounting hole is arranged on the left side and the right side of each cooling groove, so that the cooling liquid can dissipate heat for the flat body halogen lamp in the second mounting hole; that is, the heat generated by each flat body halogen lamp can be taken away by the cooling liquid in the adjacent cooling grooves, so that the high-energy radiation heat source quickly and efficiently enters a stable state, a stable heat dissipation efficiency is provided, and the service life and reliability of the radiation source are improved.

[0021] In a possible implementation, the cooling channel includes a first cooling channel and a second cooling channel, the first cooling channel and the second cooling channel are symmetrically distributed along the transverse axis of the hollow shell, and a sealing member is arranged at the junction of the first cooling channel and the second cooling channel; the cooling groove has a first opening and a second opening along the radial direction of the second honeycomb, the first opening is in communication with the first cooling channel, and the second opening is in communication with the second cooling channel.

[0022] A seal is arranged at the junction of the first cooling channel and the second cooling channel, so that the cooling liquid in the first cooling channel cannot directly flow to the second cooling channel, and the cooling liquid in the second cooling channel cannot directly flow to the first cooling channel, thereby ensuring the cooling effect of the cooling liquid; meanwhile, the first cooling liquid enters the first cooling channel from the first opening and then enters the cooling channel, the second cooling liquid enters the second cooling channel from the second opening and then enters the cooling channel, and the first cooling liquid and the second cooling liquid converge in the cooling channel, so that the cooling liquid is sufficient and uniform, thereby improving the heat dissipation efficiency of the flat body halogen lamp in the second mounting hole.

[0023] The first cooling liquid enters the first cooling channel through the first water inlet and flows out from the first water outlet after completing heat circulation; the second cooling liquid enters the second cooling channel through the second water inlet and flows out from the second water outlet after completing heat circulation; so that the cooling liquid can be circulated and replaced.

[0024] In a possible implementation, the bottom of the hollow shell is provided with a plurality of support bases, and the plurality of support bases are arranged at the same distance along the circumference of the hollow shell.

[0025] The support bases are used for supporting the hollow shell, and the plurality of support bases arranged at the same distance along the circumference of the hollow shell can uniformly bear the force of the hollow shell, thereby improving the support stability.

[0026] In a possible implementation, the bottom of the hollow shell is provided with a first positioning pin and a second positioning pin, the first positioning pin and the second positioning pin are symmetrically distributed along the radial direction of the hollow shell, and the first positioning pin and the second positioning pin are configured to position the hollow shell in an assembly device for mounting the lamp nest system.

[0027] The first positioning pin and the second positioning pin are used for positioning the hollow shell when the lamp nest system is mounted in the assembly device, thereby improving the assembly precision and the assembly efficiency.

[0028] In a possible implementation, the honeycomb assembly is made of a heat-conducting material, and the heat-conducting material includes one of copper, aluminum, steel, silicon carbide or ceramic.

[0029] The honeycomb assembly made of the high-heat-conducting material has higher heat dissipation efficiency.

[0030] In a possible implementation, the honeycomb assembly is integrally formed.

[0031] The integrated modular design avoids a large amount of welding work in the manufacturing process, improves the reliability of the product, facilitates installation and maintenance, and reduces manufacturing costs.

[0032] In a possible implementation manner, the outer surfaces of the first honeycomb part and the second honeycomb part are provided with protective plating layers.

[0033] The protective plating layer can be a nickel plating layer, and the protective plating layer can protect the first honeycomb part and the second honeycomb part from corrosion and rust on the outer surfaces of the first honeycomb part and the second honeycomb part.

[0034] In a second aspect, the application also provides a rapid thermal processing device comprising the lamp nest system in the first aspect.

[0035] The lamp nest system provided by the application has the following technical effects:

[0036] The honeycomb assembly avoids a large amount of welding work in the manufacturing process through the integrated modular design, improves the reliability of the product, facilitates installation and maintenance, and reduces manufacturing costs.

[0037] The honeycomb holes of the honeycomb assembly are three-step holes, including circular holes, plum-blossom holes, and waist holes arranged from top to bottom, which not only ensure the smooth insertion of the flat body halogen lamp, but also ensure that the distance between the four walls of the flat body halogen lamp shell and the inner walls of the honeycomb holes is consistent, so as to ensure that the heat of the flat body halogen lamp can be evenly dissipated, thereby improving the heat dissipation efficiency of the flat body halogen lamp.

[0038] Meanwhile, the cooling system of the lamp nest system can quickly and efficiently bring the high-energy radiation heat source into a stable state, provide stable heat dissipation efficiency, and improve the service life and reliability of the radiation source. BRIEF DESCRIPTION OF DRAWINGS

[0039] Figure 1 A structural schematic diagram of the lamp nest system provided by the embodiment of the application is shown in the figure;

[0040] Figure 2 A three-dimensional structural schematic diagram of the honeycomb assembly of the lamp nest system provided by the embodiment of the application is shown in the figure;

[0041] Figure 3 A cross-sectional schematic diagram of the honeycomb assembly of the lamp nest system provided by the embodiment of the application is shown in the figure;

[0042] Figure 4 A top view schematic diagram of the honeycomb hole of the honeycomb assembly provided by the embodiment of the application is shown in the figure;

[0043] Figure 5 A three-dimensional structural schematic diagram of the honeycomb hole of the honeycomb assembly provided by the embodiment of the application is shown in the figure;

[0044] Figure 6A front view structural schematic diagram of a honeycomb assembly of a lamp nest system provided by an embodiment of the present application;

[0045] Figure 7 A side view structural schematic diagram of the honeycomb assembly of the lamp nest system provided by the embodiment of the present application;

[0046] Figure 8 A three-dimensional structural schematic diagram of a second honeycomb piece of the honeycomb assembly provided by the embodiment of the present application;

[0047] Figure 9 A structural schematic diagram of a hollow shell of the lamp nest system provided by the embodiment of the present application;

[0048] Figure 10 A bottom view structural schematic diagram of the lamp nest system provided by the embodiment of the present application.

[0049] Reference signs:

[0050] 100 - hollow shell;

[0051] 101 - first water inlet; 102 - second water inlet; 103 - first water outlet; 104 - second water outlet; 105 - support base; 106 - first positioning pin; 107 - first cooling channel;

[0052] 200 - honeycomb assembly;

[0053] 201 - first honeycomb piece; 202 - second honeycomb piece; 2011 - first mounting through hole; 2021 - second mounting through hole;

[0054] 2012 - first circular hole; 2013 - sunken step; 2014 - second waist hole; 2015 - second circular hole; 2016 - first waist hole; 2017 - abutting table; 2022 - first annular flange; 2023 - second annular flange; 2024 - cooling channel. DETAILED DESCRIPTION

[0055] The lamp nest in the related art is welded by hundreds of super-thin-wall stainless steel pipes, wherein 409 super-thin-wall stainless steel pipes are respectively welded with a stainless steel upper cover and a copper bottom groove to form a closed cavity, and a halogen lamp is installed in the cavity. However, the super-thin-wall stainless steel pipe is too thin to be easily damaged, and it is difficult to weld the 409 super-thin-wall stainless steel pipes, and it is difficult to rework, inconvenient to install, difficult to detect, and high in cost; and the circular steel pipe cannot be matched with a flat halogen lamp, and the heat dissipation efficiency is low.

[0056] Therefore, the embodiment of the present application provides a lamp nest system and a rapid heat treatment equipment, which avoids a large amount of welding work in the manufacturing process through integrated modular design, and realizes efficient heat dissipation of the flat halogen lamp through the structure design of the composite hole.

[0057] For the purposes of the present application, the technical solutions and advantages will be more apparent, the following will be further described in detail. The terms used in the following examples are only for the purpose of describing the specific embodiments, and are not intended to be limiting on the present application. As used in the specification and the appended claims of the present application, the singular forms "a," "an," and "the" are intended to include the plural forms, e.g., "one or more," unless the context clearly indicates otherwise.

[0058] In this specification, the reference to "one embodiment" or "some embodiments" means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment of the application. The appearances of the phrase "in one embodiment" or "in some embodiments" in various places in the specification are not necessarily all referring to the same embodiment, although it can. The terms "comprising," "including," "having," and their variants are meant to be construed as "including but not limited to," unless otherwise indicated.

[0059] As shown in Figures 1-4 The embodiments of the present application provide a lamp nest system, which comprises a cylindrical hollow shell 100 and a cylindrical honeycomb assembly 200, the honeycomb assembly 200 is arranged in the hollow shell 100, the hollow shell 100 has a cylindrical cavity, the cylindrical cavity has a first opening and a second opening along the longitudinal axis thereof, the first opening is located at the top of the hollow shell 100, and the second opening is located at the bottom of the hollow shell 100, the honeycomb assembly 200 is arranged in the cylindrical cavity of the hollow shell 100 from the first opening, or the honeycomb assembly 200 can also be arranged in the cylindrical cavity of the hollow shell 100 from the second opening.

[0060] The cylindrical hollow shell 100 and the cylindrical honeycomb assembly 200 can match the wafer shape, reduce the product volume, and have greater space utilization.

[0061] The honeycomb assembly 200 comprises a first honeycomb piece 201 and a second honeycomb piece 202 stacked up and down along the longitudinal axis of the hollow shell 100, and the second honeycomb piece 202 is located below the first honeycomb piece 201.

[0062] The first cellular part 201 is provided with a plurality of first mounting through holes 2011 arranged in an array, and the second cellular part 202 is provided with a plurality of second mounting through holes 2021 arranged in an array. The central axis of each first mounting through hole 2011 coincides with the central axis of a corresponding second mounting through hole 2021, and each first mounting through hole 2011 is in communication with a corresponding second mounting through hole 2021.

[0063] The number of the first mounting through holes 2011 is equal to the number of the second mounting through holes 2021. The first cellular part 201 can be provided with 392 first mounting through holes 2011 arranged in an array. After the 392 first mounting through holes 2011 are arranged in an array, a hexagon is formed approximately, so that as many first mounting through holes 2011 as possible are arranged on the first cellular part 201, and the remaining area of the first cellular part 201 is avoided from being wasted.

[0064] The lamp nest system provided in the embodiment of the application further includes a plurality of heating assemblies. The number of the heating assemblies is equal to the number of the second mounting through holes 2021, and each heating assembly is arranged in a corresponding second mounting through hole 2021.

[0065] In the embodiment of the application, the cellular assembly 200 can be an integrally formed structure.

[0066] The cellular assembly 200 can be formed by machining a whole piece of metal or a whole piece of high-thermal-conductivity material at one time. The cellular assembly 200 is integrally machined without welding, has no contact thermal resistance in the interior, has no stress concentration at the welding seam, has a longer service life and higher reliability.

[0067] The high-thermal-conductivity material can include one of copper, aluminum, steel, silicon carbide or ceramic. The cellular assembly 200 made of the high-thermal-conductivity material has higher heat dissipation efficiency.

[0068] The cellular assembly 200 avoids a large amount of welding work in the manufacturing process, improves the reliability of the product, facilitates installation and maintenance, and reduces the manufacturing cost.

[0069] In the embodiment of the application, the hollow shell 100 can be made of stainless steel.

[0070] The heating assembly can be a flat halogen lamp. The flat halogen lamp includes a lamp tube and an electrical connecting piece connected to the top of the lamp tube. The lamp tube is a flat lamp tube, and the electrical connecting piece can be a cylindrical structure. The axial diameter of the electrical connecting piece is greater than the axial diameter of the lamp tube. When the heating assembly is installed in the second mounting through hole 2021, the heating assembly enters the first mounting through hole 2011 and is finally arranged in the second mounting through hole 2021.

[0071] The hole wall of the second mounting through hole 2021 matches the shape of the lamp tube.

[0072] like Figure 5 As shown, the first mounting through hole 2011 may include a first circular hole 2012, the size of which allows the electrical connector of the heating component to pass through; a sinking step 2013 is provided in the first circular hole 2012, and a sinking hole is provided on the sinking step 2013, and the sinking hole is composed of a second circular hole 2015 and a first waist hole 2016 to form a plum blossom-shaped sinking hole.

[0073] Among them, the first waist hole 2016 includes an arc part and a straight part. When the second circular hole 2015 and the first waist hole 2016 are combined, the second circular hole 2015 covers the straight part of the first waist hole 2016, and the second circular hole 2015 is connected to the arc part of the first waist hole 2016, finally forming a plum blossom-shaped sinking hole.

[0074] A transition arc is provided at the connection between the second circular hole 2015 and the first waist hole 2016, so that the second circular hole 2015 and the first waist hole 2016 are smoothly connected, ensuring that the flat halogen lamp can pass through smoothly.

[0075] The second mounting through hole 2021 includes a second waist hole 2014, which is the same size as the first waist hole 2016. After the second waist hole 2014 and the first waist hole 2016 are stacked, the arc portion of the second waist hole 2014 coincides with the arc portion of the first waist hole 2016, and the straight portion of the second waist hole 2014 is exposed in the first circular hole 2012 through the second circular hole 2015, so that a contact table 2017 is formed at the connection between the second waist hole 2014 and the second circular hole 2015 of the sinking hole.

[0076] When the heating assembly is installed into the second installation through hole 2021 , the electrical connector abuts against the abutting table 2017 , and the lamp tube is located in the second installation through hole 2021 .

[0077] The honeycomb holes of the above-mentioned honeycomb component 200 are three-order holes, including circular holes, plum blossom holes and waist holes arranged from top to bottom, which can not only ensure the smooth insertion of the flat halogen lamp, but also ensure that the distance between the four surrounding walls of the flat halogen lamp shell and the inner wall of the honeycomb hole is consistent, ensuring that the heat of the flat halogen lamp can be evenly dissipated, thereby improving the heat dissipation efficiency of the flat halogen lamp.

[0078] At the same time, the honeycomb holes of the honeycomb assembly 200 can also ensure more effective fixation of the flat halogen lamp.

[0079] In the embodiment of the present application, a protective coating is provided on the outer surfaces of the first honeycomb component 201 and the second honeycomb component 202. The protective coating may be a nickel coating to protect the first honeycomb component 201 and the second honeycomb component 202 and prevent the outer surfaces of the first honeycomb component 201 and the second honeycomb component 202 from corrosion and rust.

[0080] The inner walls of the honeycomb holes of the honeycomb assembly 200 are not plated, ensuring that the flat halogen lamp directly contacts the high-thermal-conductivity honeycomb piece.

[0081] As shown in Figure 7 In the embodiment of the present application, the second honeycomb piece 202 has an upper surface and a lower surface along the longitudinal axis of the hollow shell 100, and the outer periphery of the second honeycomb piece 202 extends outwardly with a first annular flange 2022 flush with the upper surface and a second annular flange 2023 flush with the lower surface.

[0082] The inner wall of the hollow shell 100 is provided with a first connecting groove and a second connecting groove, and when the second honeycomb piece 202 is arranged in the hollow shell 100 from the second opening at the bottom of the hollow shell 100, the first annular flange 2022 is connected to the first connecting groove, and at the same time, the second annular flange 2023 is connected to the second connecting groove; so as to fix the second honeycomb piece 202 in the hollow shell 100.

[0083] As shown in Figure 6 In the embodiment of the present application, the outer diameter of the first annular flange 2022 is smaller than the outer diameter of the second annular flange 2023. By positioning the installation of the second honeycomb piece 202 through the first annular flange 2022 and the second annular flange 2023 of different sizes, the installation accuracy and installation efficiency of the second honeycomb piece 202 are improved.

[0084] In the embodiment of the present application, the outer diameter of the first honeycomb piece 201 is smaller than the outer diameter of the second honeycomb piece 202.

[0085] At this time, the outer periphery of the second honeycomb piece 202 extends outwardly with a second annular flange 2023 flush with the lower surface, and when the first honeycomb piece 201 is arranged on the upper surface of the second honeycomb piece 202, due to the fact that the outer diameter of the first honeycomb piece 201 is smaller than the outer diameter of the second honeycomb piece 202, an abutting mesa is formed between the first honeycomb piece 201 and the upper surface of the second honeycomb piece 202; the inner wall of the hollow shell 100 can be provided with an abutting protrusion matched with the abutting mesa to limit the installation of the second honeycomb piece 202.

[0086] In the embodiment of the present application, there is also a gap between the first annular flange 2022 and the first connecting groove, and the gap is <0.2 mm. After the first annular flange 2022 is connected to the first connecting groove, welding is performed on the two, further ensuring that the second honeycomb piece 202 is fixed in the hollow shell 100; at the same time, when the second honeycomb piece 202 is arranged in the hollow shell 100, a closed cavity is formed between the inner wall of the hollow shell 100 and the outer peripheral wall of the second honeycomb piece 202.

[0087] As shown in Figure 8As shown, in the embodiment of the present application, when the cellular assembly 200 is arranged in the hollow shell 100, a cooling channel is formed between the inner wall of the hollow shell 100 and the outer peripheral wall of the second cellular piece 202; the second cellular piece 202 is provided with a plurality of cooling grooves 2024, the plurality of cooling grooves 2024 penetrate the second cellular piece 202 along the radial direction of the second cellular piece 202, and the plurality of cooling grooves are all in communication with the cooling channel; a second mounting through hole 2021 is arranged between two adjacent cooling grooves 2024.

[0088] The cooling liquid enters the cooling grooves through the cooling channel, and the second mounting through hole 2021 is arranged on the left and right sides of each cooling groove, so that the cooling liquid can dissipate heat for the flat body halogen lamp in the second mounting through hole 2021.

[0089] That is, the heat generated by each flat body halogen lamp can be taken away by the cooling liquid in the adjacent cooling grooves, so that the high-energy radiation heat source quickly and efficiently enters a stable state, providing stable heat dissipation efficiency and improving the service life and reliability of the radiation source.

[0090] In the embodiment of the present application, the cooling groove can be a square groove, which enables the cooling liquid to pass in a large amount in one direction, taking away a large amount of heat and improving the heat dissipation efficiency.

[0091] In the embodiment of the present application, the cooling channel can include a first cooling channel 107 and a second cooling channel, the first cooling channel 107 and the second cooling channel are symmetrically distributed along the transverse axis of the hollow shell 100, and a sealing piece is arranged at the junction of the first cooling channel 107 and the second cooling channel, so that the cooling liquid in the first cooling channel 107 cannot directly flow to the second cooling channel, and the cooling liquid in the second cooling channel cannot directly flow to the first cooling channel 107, thereby ensuring the cooling effect of the cooling liquid.

[0092] The cooling groove 2024 has a first opening and a second opening along the radial direction of the second cellular piece 202, the first opening and the second opening are in communication with each other, the first opening is in communication with the first cooling channel 107, and the second opening is in communication with the second cooling channel.

[0093] That is, the first cooling liquid enters the first cooling channel 107 and then enters the cooling groove from the first opening, the second cooling liquid enters the second cooling channel and then enters the cooling groove from the second opening, the first cooling liquid and the second cooling liquid converge in the cooling groove, and the multiple-in and multiple-out ensures that the cooling liquid is sufficient and uniform, thereby improving the heat dissipation efficiency of the cooling liquid for the flat body halogen lamp in the second mounting through hole 2021.

[0094] As Figure 9 and Figure 10As shown, in the embodiment of the present application, a first water inlet 101, a second water inlet 102, a first water outlet 103 and a second water outlet 104 are provided at the bottom of the hollow shell 100; the first water inlet 101 and the first water outlet 103 are both connected to the first cooling channel, and the first coolant enters the first cooling channel 107 through the first water inlet 101, and flows out from the first water outlet 103 after completing the thermal cycle; the second water inlet 102 and the second water outlet 104 are both connected to the second cooling channel, and the second coolant enters the second cooling channel through the second water inlet 102, and flows out from the second water outlet 104 after completing the thermal cycle, so that the coolant can circulate and be replaced.

[0095] like Figure 1 As shown, in the embodiment of the present application, a plurality of support bases 105 are provided at the bottom of the hollow shell 100 , and the plurality of support bases 105 are arranged at the same distance along the circumference of the hollow shell 100 .

[0096] The support base 105 is used to support the hollow shell 100 . A plurality of support bases 105 arranged at equal intervals along the circumference of the hollow shell 100 ensure uniform force on the hollow shell 100 , thereby improving support stability.

[0097] Four support bases 105 are provided at the bottom of the hollow shell 100 , and the four support bases 105 are arranged at the same distance along the circumference of the hollow shell 100 .

[0098] like Figure 1 As shown, in the embodiment of the present application, a first positioning pin 106 and a second positioning pin are provided at the bottom of the hollow shell 100. The first positioning pin 106 and the second positioning pin are symmetrically distributed along the radial direction of the hollow shell 100. The first positioning pin 106 and the second positioning pin are used to position the hollow shell 100 when installing the lamp nest system into the assembly equipment, thereby improving the assembly accuracy and assembly efficiency.

[0099] An embodiment of the present application also provides a rapid thermal processing device, which includes the lamp nest system described above.

[0100] In summary, the lamp nest system and the rapid thermal processing equipment provided by the embodiments of the present application have the following advantages: the integrated honeycomb assembly design avoids a large amount of welding work in the manufacturing process, improves the reliability of the product, facilitates installation and maintenance, and reduces manufacturing costs; meanwhile, the honeycomb holes of the honeycomb assembly are three-step holes, including a circular hole, a plum blossom hole and a waist hole arranged from top to bottom, which can not only ensure the smooth insertion of the flat body halogen lamp, but also ensure that the distance between the four peripheral walls of the flat body halogen lamp shell and the inner walls of the honeycomb holes is consistent, so that the heat of the flat body halogen lamp can be evenly dissipated, and the heat dissipation efficiency of the flat body halogen lamp is improved.

[0101] The above merely describes specific embodiments of the present application, but the protection scope of the present application is not limited thereto, and any person skilled in the art can easily think of changes or replacements within the technical range disclosed by the present application, which should be covered by the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A light nest system, characterized in that: include: hollow shells and honeycomb components; The honeycomb assembly is disposed in the hollow shell, and includes a first honeycomb component and a second honeycomb component stacked up and down along the longitudinal axis of the hollow shell, wherein the second honeycomb component is located below the first honeycomb component; The first honeycomb member is provided with a plurality of first mounting through holes arranged in an array, and the second honeycomb member is provided with a plurality of second mounting through holes arranged in an array, each of the first mounting through holes is connected to a corresponding one of the second mounting through holes to form a honeycomb hole, and the honeycomb hole is configured to install a heating assembly; A sinking hole is provided in the first mounting through hole, and an abutting table is formed at the connection between the second mounting through hole and the sinking hole; The heating assembly includes a lamp tube and an electrical connector disposed on the top of the lamp tube, the first mounting through-hole allows the electrical connector to pass through, and the second mounting through-hole matches the lamp tube so that the electrical connector abuts against the abutting surface, and the lamp tube is located in the second mounting through-hole; The first mounting through hole includes a first circular hole, a sinking step is provided in the first circular hole, the sinking hole is provided on the sinking step, and the sinking hole is formed by combining the second circular hole and the first waist hole to form a plum blossom-shaped sinking hole; The second mounting through hole includes a second waist hole, the second waist hole has the same size as the first waist hole, and an abutting table is formed at the connection between the second waist hole and the second circular hole.

2. The light nest system according to claim 1, characterized in that: A transition arc is provided at the connection between the second circular hole and the first waist hole.

3. The light nest system according to claim 1, characterized in that: The hollow shell is a cylindrical hollow shell, and the honeycomb component is a cylindrical component.

4. The lamp nest system according to claim 3, characterized in that: The second honeycomb member has an upper surface and a lower surface along the longitudinal axis of the hollow shell, and a first annular flange and a second annular flange extend outward from the outer periphery of the second honeycomb member, the first annular flange is flush with the upper surface, and the second annular flange is flush with the lower surface; A first connecting groove and a second connecting groove are provided on the inner wall of the hollow shell. The first annular flange is connected to the first connecting groove, and the second annular flange is connected to the second connecting groove.

5. The lamp nest system according to claim 4, characterized in that: An outer diameter of the first annular flange is smaller than an outer diameter of the second annular flange.

6. The light nest system according to claim 1, characterized in that: The outer diameter of the first honeycomb member is smaller than the outer diameter of the second honeycomb member.

7. The light nest system according to claim 3, characterized in that: When the honeycomb component is disposed in the hollow shell, a cooling channel is formed between the inner wall of the hollow shell and the outer peripheral wall of the second honeycomb component; The second honeycomb member is provided with a plurality of cooling grooves, the plurality of cooling grooves penetrating the second honeycomb member in a radial direction, and the second mounting through-hole is provided between two adjacent cooling grooves; The plurality of cooling grooves are in communication with the cooling channel.

8. The light nest system according to claim 7, characterized in that: The cooling channel includes a first cooling channel and a second cooling channel, the first cooling channel and the second cooling channel are symmetrically distributed along the transverse axis of the hollow shell, and a sealing member is provided at the junction of the first cooling channel and the second cooling channel; The cooling groove has a first opening and a second opening along the radial direction of the second honeycomb member. The first opening is communicated with the first cooling channel, and the second opening is communicated with the second cooling channel.

9. The light nest system according to claim 8, characterized in that: The bottom of the hollow shell is provided with a first water inlet, a second water inlet, a first water outlet and a second water outlet; The first water inlet and the first water outlet are both in communication with the first cooling channel; The second water inlet and the second water outlet are both communicated with the second cooling channel.

10. The light nest system according to claim 3, characterized in that: A plurality of support bases are provided at the bottom of the hollow shell, and the plurality of support bases are arranged at equal intervals along the circumference of the hollow shell.

11. The light nest system according to claim 3, characterized in that: The bottom of the hollow shell is provided with a first positioning pin and a second positioning pin, which are symmetrically distributed along the radial direction of the hollow shell, and the first positioning pin and the second positioning pin are constructed to position the hollow shell in the assembly equipment for installing the lamp nest system.

12. The light nest system according to claim 1, characterized in that: The honeycomb component is made of a heat-conducting material, and the heat-conducting material includes one of copper, aluminum, steel, silicon carbide or ceramic.

13. The light nest system according to claim 1, characterized in that: The honeycomb component is formed in one piece.

14. The light nest system according to claim 1, characterized in that: The outer surfaces of the first honeycomb component and the second honeycomb component are provided with a protective coating.

15. A rapid thermal processing device, characterized in that: The lamp nest system comprises the lamp nest system according to any one of claims 1 to 14.

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