A deep ultraviolet wavefront correction mirror device with a high-precision quick-release actuator

Abstract

The present invention provides a deep ultraviolet wavefront correction mirror device with a high-precision quick-release actuator, which belongs to the technical field of deep ultraviolet wavefront correction mirror devices and includes a mirror body, a mirror chamber, a plurality of actuators and a connecting assembly. The connecting assembly includes a connector, a support, a leaf spring, an adapter and an electromagnetic adsorption module arranged in sequence from the mirror body to the driver, and a mounting seat is provided between the actuator and the mirror chamber. The deep ultraviolet wavefront correction mirror device with a high-precision quick-release actuator adsorbs or releases the adapter by controlling the on-off of the electromagnetic adsorption module circuit, so as to quickly complete the connection and separation of the actuator and the mirror body through a docking unit, and the docking unit provides a stable and reliable installation environment for the installation of the actuator, effectively improving the convenience of disassembly, maintenance and installation of the actuator as well as the accuracy and efficiency of repeatable installation, thereby effectively improving the stability and reliability of the long-term operation of the optical system.

Description

Technical Field

[0001] The present invention relates to the technical field of deep ultraviolet wavefront correction mirror devices, in particular to a deep ultraviolet wavefront correction mirror device with a high-precision quick-release actuator. Background Art

[0002] The deep ultraviolet (DUV) band generally refers to light with a wavelength between 200 and 300 nanometers. Deep ultraviolet light is widely used in scientific research, microelectronics manufacturing, materials testing, and high-precision imaging. In these applications, wavefront quality is crucial to image quality and system performance. Therefore, correcting wavefront aberration in objective lenses in deep ultraviolet optical systems has become a technical challenge, especially when extremely high resolution and precise alignment are required. Precise adjustment of wavefront aberration has a direct impact on imaging accuracy.

[0003] In the prior art, some deep ultraviolet wavefront correction schemes use actuators to control mirror deformation to achieve fast and precise optical adjustment. These actuators are usually designed to be disassembled and reassembled so that they can be handled when the actuator fails or is under maintenance. However, when the existing actuators fail or malfunction, they still face the problems of low disassembly convenience, long time, and high manual intervention. During the disassembly process, it is usually necessary to manually disconnect the adhesive fixation between the actuator and the mirror body and the connection between the actuator and the mirror chamber. The process is cumbersome and inconvenient, and the connection method of directly bonding the actuator to the mirror body requires high installation precision. During repeated disassembly and assembly, installation errors are easily generated, which reduces the calibration accuracy, thereby reducing the stability and reliability of the long-term operation of the optical system. Summary of the Invention

[0004] The present invention provides a deep ultraviolet wavefront correction mirror device with a high-precision quick-release actuator to solve the problems in related technologies such as the complicated maintenance, replacement and installation process of the actuator, low convenience, high installation precision requirements, and the easy generation of errors during repeated disassembly and assembly, which affects the correction accuracy and reduces the stability and reliability of the long-term movement of the optical system.

[0005] The present invention provides a deep ultraviolet wavefront correction mirror device with a high-precision quick-release actuator. The deep ultraviolet wavefront correction mirror device with a high-precision quick-release actuator includes a mirror body, a mirror chamber and several actuators, and also includes: a connecting component for installing the actuator on the mirror chamber and stably connected to the mirror body, the connecting component includes a connecting head, a support, a leaf spring, an adapter and an electromagnetic adsorption module arranged in sequence from the mirror body to the driver direction, the connecting head is connected to the back of the mirror body, the support is installed on the mirror chamber and has elastic deformation ability in the axial direction, the leaf spring has flexibility in two directions perpendicular to its axial direction, the connecting head, the support, the leaf spring and the adapter are connected together to form a stable docking unit, the electromagnetic adsorption module is installed on the actuator, and the electromagnetic adsorption module is energized to adsorb the adapter, so that the actuator is connected to the docking unit and stably connected to the mirror body through the docking unit, the electromagnetic adsorption module is powered off to release the adapter, and the actuator is disconnected from the docking unit; a mounting seat is connected between the actuator and the mirror chamber, and the actuator is quickly disassembled by releasing the connection between the mounting seat and the mirror chamber and cutting off the power supply of the electromagnetic adsorption module.

[0006] In a possible implementation, the electromagnetic adsorption module includes an electromagnet and a connector. The connector and the actuator, as well as the mounting seat and the actuator, are fixedly connected by bonding. The connector and the electromagnet are connected by threading.

[0007] In a possible implementation, the mounting seat includes a locking pressure block and a washer, the washer is located between the locking pressure block and the mirror chamber, and the locking pressure block is fixedly connected to the actuator in an adhesive manner.

[0008] In one possible implementation, both ends of the leaf spring are fixedly connected to the adapter body and the adapter head respectively, an axial fastener is connected between the adapter body and the connector, and the axial fastener passes through the support member to connect the connector head, the support member and the adapter body together.

[0009] In a possible implementation, the support member is a leaf spring with a circular structure, and a plurality of circumferential fasteners are distributed along the circumference of the support member, and the support member is fixedly mounted on the end face of the mirror chamber through the circumferential fasteners.

[0010] In a possible implementation, the adapter includes a connector having a circular connecting groove formed thereon. The leaf spring includes a spring body and a connecting end with a circular structure, and the connecting end is inserted into the connecting groove.

[0011] The above-mentioned one or more technical solutions in the embodiments of the present invention have the following technical effects: a deep ultraviolet wavefront correction mirror device with a high-precision quick-release actuator provided by the embodiment of the present invention adsorbs or releases the adapter by controlling the on-off of the electromagnetic adsorption module circuit, so as to quickly complete the connection and separation of the actuator and the mirror body through the docking unit, effectively improving the speed and convenience of disassembly and replacement of the actuator, and the docking unit provides a stable and reliable installation environment for the installation of the actuator. On the one hand, it provides a stable lateral support force for the mirror body and ensures axial flexibility. On the other hand, it fully reduces the influence of the torque generated in the connection state of the connector, support and adapter and the fixed connection state of the actuator and the mirror chamber on the mirror surface, and improves the installation tolerance of the actuator installation, reduces the influence of the eccentric torque on the mirror surface when the actuator is working, ensures the accuracy of the mirror adjustment and the convenience of the actuator installation, and effectively improves the convenience of disassembly, maintenance and installation of the actuator as well as the accuracy and efficiency of repeatable installation, thereby effectively improving the stability and reliability of the long-term operation of the optical system. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 This is a structural schematic diagram of a mirror chamber and a mirror body of a deep ultraviolet wavefront correction mirror device with a high-precision quick-release actuator provided by an embodiment of the present invention.

[0013] Figure 2 The present invention is a schematic structural diagram of a connector of a deep ultraviolet wavefront correction mirror device with a high-precision quick-release actuator provided by an embodiment of the present invention.

[0014] Figure 3 The present invention provides a schematic structural diagram of a connection assembly and an actuator of a deep ultraviolet wavefront correction mirror device with a high-precision quick-release actuator.

[0015] Figure 4 The diagram is a partial cross-sectional structural diagram of a deep ultraviolet wavefront correction mirror device with a high-precision quick-release actuator provided by an embodiment of the present invention.

[0016] Figure 5 This is a schematic diagram of the exploded structure of a connector, a support member, and an adapter of a deep ultraviolet wavefront correction mirror device with a high-precision quick-release actuator provided by an embodiment of the present invention.

[0017] Figure 6 The present invention is a schematic structural diagram of a mounting base for a deep ultraviolet wavefront correction mirror device with a high-precision quick-release actuator provided by an embodiment of the present invention.

[0018] Figure 7 The present invention is a schematic structural diagram of a leaf spring of a deep ultraviolet wavefront correction mirror device with a high-precision quick-release actuator provided by an embodiment of the present invention.

[0019] In the figure: 1. Mirror body; 2. Mirror chamber; 3. Actuator; 4. Connecting assembly; 41. Connecting head; 42. Support member; 43. Adapter; 44. Leaf spring; 441. Spring body; 442. Connecting end; 45. Adapter; 451. Connecting body; 452. Connecting groove; 46. Electromagnetic adsorption module; 461. Electromagnet; 462. Connecting member; 47. Axial fastener; 48. Mounting seat; 481. Locking block; 482. Washer; 49. Circumferential fastener. DETAILED DESCRIPTION

[0020] To make the above-mentioned objects, features, and advantages of the present invention more readily apparent, specific embodiments of the present invention are described in detail below with reference to the accompanying drawings. The following description sets forth numerous specific details to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways than those described below, and those skilled in the art may make similar modifications without departing from the scope of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0021] See also Figure 1 、 Figure 2 and Figure 3 A deep ultraviolet wavefront correction mirror device with a high-precision quick-release actuator includes a mirror body 1, a mirror chamber 2, an actuator 3, and a connecting component 4 for mounting the actuator 3 on the mirror chamber 2 and stably connecting the actuator to the mirror body 1. The actuators 3 are arranged in a regular hexagonal axially symmetrical shape and are connected to the back of the mirror body 1 through the connecting component 4, forming a correction system that can adjust the shape of the mirror body 1 in real time and accurately correct the wavefront error.

[0022] See Figure 1 、 Figure 2 、 Figure 3 and Figure 4, the connecting assembly 4 includes a connector 41, a support 42, an adapter 43, a leaf spring 44, an adapter 45 and an electromagnetic adsorption module 46 which are arranged in sequence from the mirror body 1 to the actuator 3. The connector 41 is fixedly connected to the back of the mirror body 1 by bonding. The support 42 is installed on the mirror chamber 2 and has elastic deformation ability in the axial direction. An axial fastener 47 is connected between the adapter 43 and the connector 41. The leaf spring 44 is flexible in two directions perpendicular to its axial direction, and one end of the leaf spring 44 is fixedly connected to the adapter 43, and the other end is fixedly connected to the adapter 45. The axial fastener 47 passes through the support 42 to connect the connector 41, the support 42 and the adapter 43 together. On the one hand, the support 42 provides lateral support for the mirror body 1 and ensures axial flexibility. On the other hand, it fully reduces The invention can reduce the influence of the torque on the mirror surface when the connector 41, the support 42 and the adapter 43 are connected and the actuator 3 is fixedly connected to the mirror chamber 2, thereby ensuring the stability of the position state of the mirror body 1. At the same time, the leaf spring 44 and the adapter 45 are combined to form a stable docking unit, providing a stable and reliable installation environment for the installation of the actuator 3. Within a certain range, the leaf spring 44 is used to provide the mirror body 1 with two degrees of rotational freedom in two directions perpendicular to the axial direction, effectively reducing the eccentric torque during actuation caused by the installation error of the actuator 3, improving the tolerance capability of the installation of the actuator 3, and correspondingly improving the convenience of repeated disassembly of the actuator, and reducing the influence of the installation error on the correction accuracy, thereby improving the stability and reliability of the long-term operation of the optical system. Among them, the leaf spring 44 is a two-dimensional X-flexible leaf spring, and the actuator 3 is a piezoelectric ceramic motor.

[0023] See 3 and Figure 4 The electromagnetic adsorption module 46 is installed on the actuator 3, and the adapter 45 is indium steel or a material that can be adsorbed by a magnet. When replacing or repairing the actuator 3, the electromagnetic adsorption module 46 adsorbs and releases the adapter 45 by switching the circuit on and off, so as to quickly complete the connection and separation of the actuator 3 and the mirror body 1 through the docking unit, thereby facilitating the rapid completion of the disassembly and assembly of the actuator 3, and effectively reducing the degree of manual intervention, improving the convenience and speed of disassembly and assembly of the actuator 3, and providing a stable and reliable installation environment in combination with the docking unit. On the basis of achieving high-precision wavefront adjustment, when the actuator 3 fails or malfunctions, it can be quickly disassembled and replaced, effectively improving the maintainability and work efficiency of the optical system, and fully improving the stability and reliability of the long-term operation of the optical system.

[0024] See Figure 1 、 Figure 3 、 Figure 4 and Figure 6A mounting base 48 is connected between the actuator 3 and the mirror chamber 2. The mounting base 48 includes a locking pressure block 481 and a washer 482. The washer 482 is located between the locking pressure block 481 and the mirror chamber 2. The locking pressure block 481 is installed on the back of the mirror chamber 2 by screws. The locking pressure block 481 stably connects the actuator 3 and the mirror chamber 2, and the locking pressure block 481 located on the back is convenient for disassembly and installation.

[0025] See Figure 3 and Figure 4 The electromagnetic adsorption module 46 includes an electromagnet 461 and a connecting member 462. The connecting member 462 is connected to the electromagnet 461 by a threaded connection. The connecting member 462 and the actuator 3, as well as the locking pressure block 481 and the actuator 3, are fixedly connected by bonding. The bonding fixation reduces the influence of local stress concentration on the wavefront correction accuracy.

[0026] See 3 and Figure 5 The support member 42 is a leaf spring with a circular structure, which makes the overall structure lightweight, and a number of circumferential fasteners 49 are distributed along the circumference of the support member 42. The support member 42 is fixedly mounted on the end face of the mirror chamber 2 by the circumferential fasteners 49, which facilitates the disassembly and assembly of the docking unit.

[0027] See Figure 3 、 Figure 4 and Figure 7 The adapter 45 includes a connecting body 451, which has a circular connecting groove 452. The leaf spring 44 includes a spring body 441 and a connecting end 442 with a circular structure. The connecting end 442 is inserted into the connecting groove 452. The connecting groove 452 limits the connecting end 442, so that the leaf spring 44 and the adapter 45 are stably and accurately connected together.

[0028] In the embodiments of the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Furthermore, a first feature being "above," "above," or "above" a second feature may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher level than the second feature. A first feature being "below," "below," or "below" a second feature may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0029] In the description of the present invention, it should also be noted that, unless otherwise expressly specified or limited, the terms "disposed," "connected," "installed," and "connected" should be understood in a broad sense. For example, they may refer to fixed or detachable connections, integral or sliding connections; mechanical or electrical connections; direct or indirect connections through an intermediate medium; or internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0030] The embodiments of this specific implementation method are all preferred embodiments of the present invention and are not intended to limit the scope of protection of the present invention. Therefore, any equivalent changes made based on the structure, shape, and principle of the present invention should be included in the scope of protection of the present invention.

Claims

1. A deep ultraviolet wavefront correction lens device with a high-precision quick-release actuator, comprising a lens body, a lens chamber, and a plurality of actuators, characterized in that: The invention also includes a connection assembly for mounting the actuator on the mirror chamber and stably connecting the actuator to the mirror body, wherein the connection assembly includes a connector, a support, an adapter, a leaf spring, an adapter, and an electromagnetic adsorption module, which are sequentially arranged from the mirror body to the actuator. The connector is connected to the back of the mirror body, and the support is installed on the mirror chamber and has elastic deformation ability in the axial direction; An axial fastener is connected between the adapter and the connector, and the axial fastener passes through the support to connect the connector, the support and the adapter together; The two ends of the leaf spring are fixedly connected to the adapter body and the adapter respectively, and the leaf spring is flexible in two directions perpendicular to its axis; The connector, the support, the adapter, the leaf spring and the adapter are connected together to form a stable docking unit; The electromagnetic adsorption module is installed on the actuator, and when the electromagnetic adsorption module is powered on, it adsorbs the adapter, so that the actuator is connected to the docking unit and stably connected to the mirror body through the docking unit. When the electromagnetic adsorption module is powered off, the adapter is released, and the actuator is disconnected from the docking unit. A mounting base is provided between the actuator and the mirror chamber. The actuator can be quickly disassembled by disconnecting the mounting base from the mirror chamber and cutting off the power supply of the electromagnetic adsorption module. The electromagnetic adsorption module includes an electromagnet and a connecting piece, wherein the connecting piece and the actuator, and the mounting seat and the actuator are fixedly connected by bonding, and the connecting piece and the electromagnet are connected by threading; The leaf spring is a two-dimensional X-flexible leaf spring.

2. The deep ultraviolet wavefront correction lens device with a high-precision quick-release actuator according to claim 1, characterized in that: The mounting seat includes a locking pressure block and a washer. The washer is located between the locking pressure block and the mirror chamber. The locking pressure block is fixedly connected to the actuator in an adhesive manner and is located on the end surface of the mirror chamber.

3. The deep ultraviolet wavefront correction lens device with a high-precision quick-release actuator according to claim 1, characterized in that: The support member is a leaf spring with a circular structure, and a plurality of circumferential fasteners are distributed along the circumference of the support member. The support member is fixedly mounted on the end surface of the mirror chamber through the circumferential fasteners.

4. The deep ultraviolet wavefront correction lens device with a high-precision quick-release actuator according to claim 1, characterized in that: The adapter comprises a connector, which is provided with a circular connecting groove. The leaf spring comprises a spring body and a connecting end of a circular structure, and the connecting end is inserted into the connecting groove.

Images