Efficient surface strengthening composite technology and integrated equipment thereof

Abstract

The invention relates to the technical field of part treatment, and discloses an efficient surface strengthening composite technology and integrated equipment thereof, the efficient surface strengthening composite technology comprises a low-temperature ion source nitriding technology, a multi-arc ion plating technology and a deep oscillation magnetron sputtering ion enhanced deposition technology, comprising the following steps: S1, treating an engineering part by using a low-temperature ion source nitriding process; and S2, treating the nitrided engineering part by using a composite process of a multi-arc ion plating technology and a deep oscillation magnetron sputtering ion enhanced deposition technology. According to the efficient surface strengthening composite technology and the integrated equipment thereof, the plasma source nitriding and coating preparation integrated process can be achieved, the one-time process time is within 4 hours, the coating thickness can be 50-200 microns, the integrated treatment of engineering part surface strengthening is achieved, and the requirements of severe working conditions, heavy loads and the like can be effectively met.

Description

Technical Field

[0001] The present invention relates to the technical field of part processing, and particularly to an efficient surface strengthening composite technology and its integrated equipment. Background Art

[0002] ‌Engineering parts and components‌ refer to various parts and components used in the engineering field. They play a crucial role in engineering products such as mechanical equipment, transportation vehicles, and building structures. There is a wide variety of engineering parts and components, covering from simple screws to complex control system components, and each part and component has its specific function and use.

[0003] During the operation of engineering parts and components, they may fail and be damaged due to harsh working conditions such as wear, corrosion, irradiation, and high-temperature oxidation. Therefore, in order to meet the requirements of the above-mentioned complex and harsh working conditions, parts and components often need surface strengthening treatment, such as traditional surface heat treatment (normalizing, quenching, tempering, and annealing), nitriding, carburizing, and surface coating.

[0004] However, at present, the treatment of parts and components uses single surface strengthening treatment, and the process takes a long time with limited strengthening effect, making it difficult to meet the requirements of complex and harsh working conditions. Therefore, there is a need for a composite strengthening technology and its integrated equipment that combines high efficiency, low-temperature nitriding and carburizing, and advanced surface coating technology to achieve high-performance surface strengthening composite technology for engineering parts and components. Summary of the Invention

[0005] In order to make up for the deficiencies of the prior art and solve at least one technical problem proposed in the background art.

[0006] The present invention provides an efficient surface strengthening composite technology, including: low-temperature ion source nitriding process, multi-arc ion plating technology process, and deep oscillation magnetron sputtering ion enhanced deposition technology process.

[0007] An efficient surface strengthening composite technology, a method for efficient surface strengthening, includes the following steps: S1. Use the low-temperature ion source nitriding process to treat engineering parts and components; S2. Use the composite process of multi-arc ion plating technology and deep oscillation magnetron sputtering ion enhanced deposition technology to treat the nitrided engineering parts and components.

[0008] By adopting the above technical solutions, an integrated process of plasma source nitriding and coating preparation can be achieved. The time of one process is within 4 hours, and the coating thickness can be 50 - 200 μm. The integrated treatment of surface strengthening of engineering parts and components is realized, which can effectively meet the requirements of harsh and heavy-duty working conditions.

[0009] Preferably, in step S1, when using the low-temperature ion source nitriding process to treat engineering components, plasma source nitriding is achieved below 450°C to achieve nitrogen ion implantation and synchronous diffusion. The nitriding time is 1 to 4 hours, and the thickness of the nitrided layer is 5 to 20 μm.

[0010] Preferably, in step S2, first, a metal bonding layer with a thickness of 20 to 50 μm is prepared by the multi-arc ion plating technology process, then a ceramic coating with a thickness of 50 to 150 μm is prepared, and then a surface layer with a thickness of 5 to 50 μm is prepared by the deep oscillating magnetron sputtering ion enhanced deposition technology to improve the density, smoothness, and toughness of the surface layer.

[0011] Preferably, in step S2, first, a metal bonding layer with a thickness of 2 to 5 μm is prepared by the deep oscillating magnetron sputtering ion enhanced deposition technology, then a ceramic coating with a thickness of 5 to 10 μm is prepared, and finally, a tough coating with a thickness of 50 to 150 μm is prepared by the multi-arc ion plating technology process.

[0012] On the other hand, the present application also provides an integrated device for an efficient surface strengthening composite technology. According to the above-mentioned efficient surface strengthening composite technology, it includes: a plasma nitriding module, a multi-arc ion plating module, a deep oscillating magnetron sputtering ion enhanced deposition module, a vacuum chamber, a cooling circulation system, a gas path control system, and a vacuum pumping system; The plasma nitriding module includes a plasma power supply, a bias power supply a, and an ion source target; The multi-arc ion plating module includes a multi-arc target, a sputtering power supply, and a bias power supply b; The deep oscillating magnetron sputtering ion enhanced deposition module includes a magnetron sputtering target, a deep oscillating magnetron sputtering power supply, and a bias power supply.

[0013] The beneficial effects of the present invention are as follows: The efficient surface strengthening composite technology and its integrated device of the present invention can realize the integrated process of plasma source nitriding and coating preparation. The one-time process time is within 4 hours, and the coating thickness can be 50 to 200 μm, achieving the integrated treatment of surface strengthening of engineering components and effectively meeting the requirements of harsh and heavy-duty working conditions. Description of the Drawings

[0014] Figure 1 is a schematic diagram of the composition of the surface strengthening composite technology of the present invention.

[0015] Figure 2 is a schematic diagram of the surface strengthening composite method in Embodiment 1 of the present invention.

[0016] Figure 3 is a schematic diagram of the surface strengthening composite method in Embodiment 2 of the present invention. Detailed Embodiments

[0017] Reference will now be made to example embodiments to discuss the subject matter described herein. It should be understood that discussing these embodiments is only to enable those skilled in the art to better understand and thus implement the subject matter described herein. Without departing from the scope of protection of the content of this specification, changes can be made to the functions and arrangements of the elements discussed. Each example can omit, substitute, or add various processes or components as needed. Additionally, the features described relative to some examples can also be combined in other examples.

[0018] The present invention provides a composite strengthening technology integrating high efficiency, low-temperature nitriding and carburizing, and advanced surface coating technology, as well as an integrated device thereof, to achieve a high-performance surface strengthening composite technology for engineering components.

[0019] The technical solution of the present invention will be further elaborated in detail below in conjunction with the accompanying drawings of the specification and specific embodiments. Please refer to Figure 1 An efficient surface strengthening composite technology provided by this application includes a low-temperature ion source nitriding process, a multi-arc ion plating technology process, and a deep oscillation magnetron sputtering ion enhanced deposition technology process.

[0020] Example 1 Please pay particular attention to Figure 2 When processing engineering components, first use the low-temperature ion source nitriding process to process the engineering components; Among them, when using the low-temperature ion source nitriding process to process engineering components, plasma source nitriding is realized for the engineering components below 450°C to achieve nitrogen ion implantation and synchronous diffusion. The nitriding time is 1 to 4 hours, and the thickness of the nitrided layer obtained is 5 to 20 μm; After that, a composite process of the multi-arc ion plating technology process and the deep oscillation magnetron sputtering ion enhanced deposition technology is adopted. The specific method is as follows: First, use the multi-arc ion plating technology process to prepare a metal bonding layer with a thickness of 20 to 50 μm, then prepare a ceramic coating with a thickness of 50 to 150 μm, and then use the deep oscillation magnetron sputtering ion enhanced deposition technology to prepare a surface layer with a thickness of 5 to 50 μm to improve the compactness, smoothness, and toughness of the surface layer.

[0021] Specifically, through the above technology, an integrated process of plasma source nitriding and coating preparation can be realized. The one-time process time is within 4 hours, and the coating thickness can be 50 to 200 μm, achieving an integrated treatment of the surface strengthening of engineering components and effectively meeting the requirements of harsh and heavy-duty working conditions.

[0022] Example 2 Please pay particular attention to Figure 3, when processing engineering components, first use the low-temperature ion source nitriding process to process the engineering components; Among them, when using the low-temperature ion source nitriding process to process engineering components, the engineering components are subjected to plasma source nitriding below 450 °C to achieve nitrogen ion implantation and synchronous diffusion. The nitriding time is 1 to 4 hours, and the thickness of the nitrided layer is 5 to 20 μm; After that, adopt the composite process of multi-arc ion plating technology and deep oscillation magnetron sputtering ion enhanced deposition technology. The specific method is as follows: First, use the deep oscillation magnetron sputtering ion enhanced deposition technology to prepare a metal bonding layer with a thickness of 2 to 5 μm, then prepare a ceramic coating with a thickness of 5 to 10 μm, and finally use the multi-arc ion plating technology to prepare a strong and tough coating with a thickness of 50 to 150 μm.

[0023] Specifically, through the above technology, an integrated process of plasma source nitriding and coating preparation can be realized. The one-time process time is within 4 hours, and the coating thickness can be 50 to 200 μm, realizing the integrated treatment of surface strengthening of engineering components, and effectively meeting the requirements of harsh and heavy-duty working conditions.

[0024] On the other hand, the embodiment of the present application also provides an integrated device according to the above-mentioned efficient surface strengthening composite technology, including: a plasma nitriding module, a multi-arc ion plating module, a deep oscillation magnetron sputtering ion enhanced deposition module, a vacuum chamber, a cooling circulation system, a gas path control system, and a vacuum pumping system; The plasma nitriding module includes a plasma power supply, a bias power supply a, and an ion source target; The multi-arc ion plating module includes a multi-arc target, a sputtering power supply, and a bias power supply b; The deep oscillation magnetron sputtering ion enhanced deposition module includes a magnetron sputtering target, a deep oscillation magnetron sputtering power supply, and a bias power supply c.

[0025] In summary, the technical solution proposed by the present invention can combine the surface strengthening composite technology according to the material type and technical requirements of the components. When strengthening the surface of metal components, low-temperature ion source nitriding, multi-arc ion plating, and deep oscillation magnetron sputtering ion enhanced deposition technology are used; when strengthening the surface of ceramic components, multi-arc ion plating or deep oscillation magnetron sputtering ion enhanced deposition technology is used; the composite strengthening technology of the present invention can achieve the high-efficiency preparation of metal and ceramic coatings. The coating materials can be various metals and alloys, such as Cr, CrTi, TiAl, Cu, Al, Ag, Au, etc.; the ceramic coating materials can be nitrides, carbides, oxides, etc., such as CrN, CrSiN, TiSiN, TiAlSiN, CrAlSiN, AlN, TiCN, TiSiCN, etc. The target materials used are high-purity metal target materials, such as Cr and Ti (≥99.99 at.%). Using an efficient surface strengthening composite technology and integrated equipment of the present invention can efficiently strengthen the surface of metal components and ceramic components and meet the performance requirements of harsh working conditions.

[0026] The above describes the embodiments of the specific implementation manner, but this embodiment is not limited to the above specific implementation manner. The above specific implementation manner is only illustrative and not restrictive. Under the inspiration of this embodiment, those of ordinary skill in the art can also make many forms, all of which fall within the protection scope of this embodiment.

Claims

1. A highly efficient surface strengthening composite technology, characterized in that: include: Low-temperature ion source nitriding process, multi-arc ion plating technology, deep oscillation magnetron sputtering ion enhanced deposition technology.

2. A high-efficiency surface strengthening composite technology according to claim 1, characterized in that: The method for efficient surface strengthening comprises the following steps: S1. Use low temperature ion source nitriding process to treat engineering parts; S2. Use the multi-arc ion plating technology and deep oscillation magnetron sputtering ion enhanced deposition technology composite process to process the engineering parts after nitriding treatment.

3. A high-efficiency surface strengthening composite technology according to claim 2, characterized in that: In step S1, when the engineering parts are treated by a low-temperature ion source nitriding process, plasma source nitriding is performed below 450°C to achieve nitrogen ion implantation and synchronous diffusion, wherein the nitriding time is 1 to 4 hours, and the thickness of the nitrided layer is 5 to 20 μm.

4. The high-efficiency surface strengthening composite technology according to claim 2, characterized in that: In step S2, a multi-arc ion plating process is first used to prepare a metal bonding layer of 20 to 50 μm, and then a ceramic coating of 50 to 150 μm is prepared, and then a deep oscillation magnetron sputtering ion enhanced deposition technology is used to prepare a surface layer of 5 to 50 μm.

5. The high-efficiency surface strengthening composite technology according to claim 2, characterized in that: In step S2, deep oscillation magnetron sputtering ion enhanced deposition technology is first used to prepare a 2-5 μm metal bonding layer, then a 5-10 μm ceramic coating is prepared, and finally a 50-150 μm toughness coating is prepared using a multi-arc ion plating process.

6. An integrated device for high-efficiency surface strengthening composite technology, according to any one of claims 1 to 5, characterized in that: include: Plasma nitriding module, multi-arc ion plating module, deep oscillation magnetron sputtering ion enhanced deposition module, vacuum chamber, cooling circulation system, gas path control system and vacuum pumping system; The plasma nitriding module includes a plasma power supply, a bias power supply a and an ion source target; The multi-arc ion plating module includes a multi-arc target, a sputtering power supply and a bias power supply b; The deep oscillation magnetron sputtering ion enhanced deposition module includes a magnetron sputtering target, a deep oscillation magnetron sputtering power supply and a bias power supply c.

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