A remote plasma generator

Abstract

The application belongs to the technical field of plasma, and provides a remote plasma generator, which comprises an ionization cavity, an ignition assembly, a magnetic core assembly and a heat dissipation assembly, and an air channel is formed in the ionization cavity; the ignition assembly is used for exciting and igniting the gas in the air channel to form plasma; the ignition assembly comprises a dielectric sheet, a sealing structure and an ignition structure, the dielectric sheet is attached to the ionization cavity, the sealing structure is arranged on the outside of the dielectric sheet, and the ignition structure is used for exciting and igniting the gas; the inner wall of the ionization cavity is formed with an anodic oxidation plating film; and the dielectric sheet is formed with an anodic oxidation plating film on the surface through an anodic oxidation process.In the application, the surface of the dielectric sheet is formed with an anodic oxidation plating film, the dielectric sheet acts as a dielectric material, the anodic oxidation plating film on the surface is closely attached to the anodic oxidation plating film in the ionization cavity, the contact surface stress is increased, the dielectric sheet is prevented from cracking, the gas corrosion caused by plasma bombardment is effectively reduced, and the service life is prolonged.

Description

Technical Field

[0001] This invention relates to the field of plasma technology, and more specifically to a remote plasma generator. Background Technology

[0002] A remote plasma source is a device used to generate plasma, commonly found in photovoltaic, chemical, and semiconductor industries. In semiconductor manufacturing, remote plasma generators serve as core process equipment, achieving high-precision cleaning and surface treatment of process chambers through non-contact plasma dissociation technology. This device typically consists of a plasma source dissociation chamber, a gas transport system, an electromagnetic field coupling module, and a thermal management unit. Its core function is to ionize fluorine-containing raw material gases (such as CF4 and NF3) in a dissociation zone outside the chamber, generating highly reactive fluorine radicals (F*) and ions (F⁻), which are then transported to the process chamber via a directional gas flow and the synergistic effect of an electromagnetic field. During this process, the reactive fluorine components react with residual contaminants (such as silicon oxide and silicon nitride) within the chamber, generating volatile products (such as SiF4), which are ultimately discharged from the system by a vacuum pump assembly. This achieves atomic-level surface cleaning, ensuring the uniformity and repeatability of critical processes such as thin film deposition and etching.

[0003] Currently, remote plasma generators use an ignition structure to ionize gases within a cavity to produce plasma. The dielectric layer within the ignition structure plays a crucial role in electrical isolation and uniform electric field distribution, and is typically sealed separately inside the ignition structure. However, over long-term use, the dielectric layer can crack or even break. Cracks in the dielectric layer lead to seal failure, plasma or reactive gas leakage, disrupting the vacuum environment and affecting process stability (such as thin film deposition / etching uniformity). Fragments from the breakage entering the plasma region may be ionized or sputtered onto the substrate surface, causing metal contamination on semiconductor / optical device surfaces and severely reducing product yield. Summary of the Invention

[0004] To address the shortcomings of existing technologies, this invention provides a remote plasma generator that solves the problem that the dielectric layer of the current remote plasma generator's ignition structure may crack or even break during use, affecting its service life.

[0005] The present invention provides a remote plasma generator, comprising:

[0006] An ionization chamber is formed within which an airway is formed. All corners of the airway are rounded. The air inlet and outlet of the airway are arranged diagonally.

[0007] An ignition assembly is located at the opposite corner of the gas passage and is used to ignite the gas in the gas passage to form plasma.

[0008] A magnetic core assembly, disposed between the gas channels, is used to provide a continuous current after plasma ignition, thereby continuously ionizing the plasma.

[0009] Heat dissipation components are disposed on both sides of the ionization cavity;

[0010] The ignition assembly includes:

[0011] The dielectric sheet is attached to the ionization cavity;

[0012] A sealing structure is provided on the outside of the dielectric sheet to ensure the airtightness between the ionization cavity and the dielectric sheet;

[0013] An ignition structure is used to discharge the dielectric sheet to excite and ignite the gas in the gas passage to form plasma;

[0014] The air inlet, the air outlet, and the inner wall of the air passage are all coated with an anodized film; the surface of the dielectric sheet is coated with an anodized film.

[0015] As can be seen from the above technical solution, the remote plasma generator provided by the present invention has an anodized coating formed on the surface of the dielectric sheet through anodizing. The dielectric sheet serves as both a dielectric material and the anodized coating on its surface is closely bonded to the anodized coating inside the ionization chamber, which increases the contact surface stress, effectively reduces gas corrosion caused by plasma bombardment, and extends service life. Since the corners of the gas channels are all designed as smooth rounded corners, the probability of contact between the plasma and the inner wall of the chamber is reduced when the gas moves along the path, which is beneficial to plasma movement; at the same time, it increases the service life of the chamber, reduces dust particles generated inside the chamber, improves cleaning ability, and facilitates efficient remote plasma dissociation.

[0016] Optionally, the ionization chamber includes:

[0017] A first air chamber, wherein the air inlet is disposed at the top of the first air chamber, a first air passage is formed on the side of the first air chamber, and a first groove is formed on the outer periphery of the first air passage.

[0018] The second air chamber has an air outlet located at the bottom of the second air chamber. A second air passage is formed on the side of the second air chamber. A second groove is formed on the outer periphery of the second air passage. The first air passage and the second air passage are connected. The second groove and the second groove cooperate to form a through portion. The magnetic core assembly is located in the through portion.

[0019] A ceramic ring is disposed between the first airway opening and the second airway opening to seal the airway.

[0020] A sealing ring is provided to fit the ceramic ring.

[0021] As can be seen from the above technical solution, the ionization cavity includes a first gas cavity and a second gas cavity. Compared with a cavity with a multi-segment splicing structure, it can improve the airtightness of the cavity and further ensure the clean environment inside the cavity. At the same time, by using a ceramic ring as a dielectric material to insulate and block the gap formed between the two gas cavities, the airtightness of the air passage is improved, ensuring a clean environment.

[0022] Optionally, the ionization chamber, in conjunction with the ignition assembly, forms a third groove, and a through hole communicating with the gas passage is formed on the third groove; the inner wall of the through hole and the bottom surface of the third groove are both formed with anodized coating.

[0023] As can be seen from the above technical solution, it not only ensures the sealing of the ignition component installation part, but also improves the corrosion resistance of the cavity and extends its service life.

[0024] Optionally, the heat dissipation component includes:

[0025] A cooling water tray is disposed on both sides of the ionization cavity;

[0026] The condenser supplies condensate to the cooling water pan;

[0027] A cooling fan is connected to the condenser. The cooling fan works in conjunction with the condenser to achieve a combination of air cooling and water cooling for temperature reduction.

[0028] Optionally, the cooling water tray is provided with a water tray channel, and a number of flow-blocking copper sheets are arranged at intervals in the water tray channel.

[0029] Optionally, the water tray channel includes a main channel and an auxiliary channel, the cross-sectional area of ​​the main channel is larger than the cross-sectional area of ​​the auxiliary channel, and the main channel and the auxiliary channel are connected in an M-shape.

[0030] Optionally, a heat-conducting plate is further provided on the inner side of the cooling water tray; the magnetic core assembly and the ionization cavity are both screwed to the cooling water tray. The heat-conducting plate can improve the heat dissipation effect, while the screw connection can ensure the mechanical fixation between the cooling water tray and the magnetic core assembly and the ionization cavity, thus providing both heat dissipation performance and heat dissipation.

[0031] Optionally, the cooling water tray and the condenser are connected by cooling water pipes, the cooling water pipes including a first inlet pipe, a second inlet pipe, a first outlet pipe, and a second outlet pipe.

[0032] One end of the first water inlet pipe is connected to the water inlet connector, and the other end is connected to the water inlet of the condenser;

[0033] One end of the second water inlet pipe is connected to the water outlet of the condenser, and the other end is connected to the water inlet of the heat dissipation water tray;

[0034] The first water outlet pipe is connected between the cooling water trays;

[0035] The second water outlet pipe leads the water from the cooling water pan to the water outlet connector.

[0036] Optionally, the material of the anodic oxide coating is aluminum oxide, magnesium oxide, or titanium oxide;

[0037] The ionization chamber is made of ceramic or quartz, and the dielectric sheet is made of sapphire or quartz glass.

[0038] By adopting the above technical solution, this application has the following beneficial effects:

[0039] In this invention, the surface of the dielectric sheet is processed by anodizing to form an anodized coating. The dielectric sheet itself serves as a dielectric material, and the anodized coating on the surface and the anodized coating inside the ionization cavity are closely bonded together, which can increase the contact surface stress, effectively reduce gas corrosion caused by plasma bombardment, and extend the service life.

[0040] The present invention provides a remote plasma generator. Since the corners of the gas passage are all set to smooth rounded corners, the probability of contact between the plasma and the inner wall of the cavity can be reduced when the gas moves along the path, which is beneficial to the movement of the plasma. At the same time, it increases the service life of the cavity, reduces the dust particles generated in the cavity, improves the cleaning ability, and is conducive to the efficient dissociation of remote plasma.

[0041] In this invention, the ionization cavity includes a first gas cavity and a second gas cavity. Compared with a cavity with a multi-segment splicing structure, it can improve the airtightness of the cavity and further ensure the clean environment inside the cavity. At the same time, by using a ceramic ring as a dielectric material to insulate and block the gap formed between the two gas cavities, the airtightness of the air passage is improved, ensuring a clean environment. Attached Figure Description

[0042] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the accompanying drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. In all the drawings, similar elements or parts are generally identified by similar reference numerals. In the drawings, the elements or parts are not necessarily drawn to scale.

[0043] Figure 1 A schematic diagram of a remote plasma generator provided in an embodiment of the present invention is shown;

[0044] Figure 2 Another schematic diagram of a remote plasma generator provided in an embodiment of the present invention is shown;

[0045] Figure 3This diagram illustrates yet another schematic representation of a remote plasma generator provided in an embodiment of the present invention;

[0046] Figure 4 A disassembly diagram of a remote plasma generator provided in an embodiment of the present invention is shown;

[0047] Figure 5 A schematic diagram of the first air chamber and the second air chamber provided in an embodiment of the present invention is shown;

[0048] Figure 6 A cross-sectional view of an ionization cavity provided in an embodiment of the present invention is shown;

[0049] Figure 7 It shows Figure 6 Enlarged view of part A;

[0050] Figure 8 An explosion diagram of the ignition device provided in an embodiment of the present invention is shown;

[0051] Figure 9 A schematic diagram of the water tray flow channel provided in an embodiment of the present invention is shown;

[0052] Figure 10 A surface view of the dielectric sheet 210 is shown in the comparative experiment, where the dielectric sheet 210 is attached to the ionization chamber 100 but no aluminum oxide film is applied to its surface.

[0053] Figure 11(a) shows the surface of the dielectric sheet in the comparative experiment, where the dielectric sheet is located inside the ignition structure but has an aluminum oxide film on its surface.

[0054] Figure 11(b) shows a cross-sectional view of the dielectric sheet in the comparative experiment, which is located inside the ignition structure but has an aluminum oxide film on its surface.

[0055] Figure 12(a) shows a surface view of the dielectric sheet provided in the embodiment of the present invention during a comparative experiment;

[0056] Figure 12(b) shows a cross-sectional view of the dielectric sheet provided in the embodiment of the present invention during a comparative experiment.

[0057] Figure label:

[0058] 100 - Ionization chamber; 110 - Air passage; 111 - Air inlet; 112 - Air outlet; 120 - First air chamber; 121 - First air passage opening; 122 - First groove; 130 - Second air chamber; 131 - Second air passage opening; 132 - Second groove; 140 - Ceramic ring; 150 - Sealing ring; 160 - Third groove; 161 - Through hole; 170 - Screw hole;

[0059] 200 - Ignition assembly; 210 - Dielectric sheet; 220 - Sealing structure; 221 - Ceramic ring; 222 - Sealing ring; 230 - Ignition structure; 231 - Ignition piece; 232 - Ignition cap; 233 - Ignition head; 240 - Retaining ring; 250 - Retaining structure;

[0060] 300 - Magnetic core assembly; 310 - Copper strip;

[0061] 400 - Heat dissipation component; 410 - Cooling tray; 411 - Heat-conducting fin; 412 - Water tray flow channel; 412a - Baffle copper fin; 412b - Main flow channel; 412c - Auxiliary flow channel; 420 - Condenser; 430 - Cooling fan; 440 - Cooling water pipe; 441 - First inlet pipe; 442 - Second inlet pipe; 443 - First outlet pipe; 444 - Second outlet pipe. Detailed Implementation

[0062] The embodiments of the technical solution of the present invention will now be described in detail with reference to the accompanying drawings. These embodiments are only used to more clearly illustrate the technical solution of the present invention and are therefore merely examples, and should not be construed as limiting the scope of protection of the present invention.

[0063] It should be noted that, unless otherwise stated, the technical or scientific terms used in this application should have the ordinary meaning as understood by one of ordinary skill in the art to which this invention pertains.

[0064] Currently, the rectangular corner radius of remote plasma source cavities is too small, resulting in a smaller plasma movement arc. This leads to excessive contact between the plasma and the inner wall of the cavity, reducing the cavity's lifespan and causing dust particle contamination, which reduces cleaning capabilities and ultimately lowers chip production yield.

[0065] To address the above problems, in one embodiment, such as Figure 1-8 As shown, a remote plasma generator is provided, comprising:

[0066] An ionization chamber 100 is formed inside the ionization chamber 100. All corners of the airway 110 are rounded. The air inlet 111 and the air outlet 112 of the airway 110 are arranged diagonally.

[0067] Ignition assembly 200 is located at the opposite corner of gas passage 110 and is used to ignite the gas in gas passage 110 to form plasma.

[0068] The magnetic core assembly 300 is disposed between the gas channels 110 and is used to provide a continuous current after plasma ignition to continuously ionize;

[0069] Heat dissipation components 400 are disposed on both sides of the ionization cavity 100;

[0070] Ignition assembly 200 includes:

[0071] Dielectric sheet 210 is attached to ionization cavity 100;

[0072] A sealing structure 220 is disposed on the outside of the dielectric sheet 210 to ensure the airtightness between the ionization cavity 100 and the dielectric sheet 210;

[0073] The ignition structure 230 is used to discharge the dielectric sheet 210 to excite and ignite the gas in the gas passage 110 to form plasma.

[0074] The inner walls of the air inlet 111, air outlet 112 and air passage 110 are all coated with anodized film; the surface of the dielectric sheet 210 is coated with anodized film.

[0075] The surface of the dielectric sheet 210 is processed by anodizing to form an anodized coating. The dielectric sheet 210 serves as a dielectric material, and the anodized coating formed on its surface is closely bonded to the anodized coating inside the ionization chamber 100. This increases the stress on the contact surface, effectively reduces gas corrosion caused by plasma bombardment, and extends the service life.

[0076] The following comparative experiments verify the effectiveness of the dielectric sheet arrangement in this embodiment. The specific parameter values ​​used in the experiments are not intended to limit the scope of protection of this application. The specific test environment was: gas pressure 1 tor, argon ignition at 2000 sccm, 1000 cyclic ignitions, and scanning electron microscopy at 1000X. The dielectric sheet was made of aluminum with a thickness of 3 mm and an aluminum oxide film thickness of 60 μm on its surface. After testing, Figure 10 Figure 11(a) and Figure 11(b) show the surface and cross-sectional views of the dielectric sheet 210 when it is attached to the ionization cavity 100 but without an anodized coating. Figure 12(a) and Figure 12(b) show the surface and cross-sectional views of the dielectric sheet 210 when it is not attached to the cavity but has an anodized coating.

[0077] The above comparison shows that, under the same testing environment, both the traditional method of sealing the dielectric sheet inside the ignition structure and the method of attaching it to the ionization cavity without anodizing coating result in a certain degree of cracking of the dielectric sheet. It can be confirmed that when the dielectric sheet 210 is attached to the ionization cavity 100 and its surface is coated with anodized film, it can effectively reduce the cracking and damage of the dielectric sheet 210 caused by gas corrosion from plasma bombardment. Simultaneously, it can increase the contact surface stress between the dielectric sheet 210 and the ionization cavity 100, preventing cracking of the dielectric sheet 210 and thus improving its service life.

[0078] Meanwhile, based on the smooth rounded corner setting of the gas passage 110 in this embodiment, when the gas moves along the path, the probability of contact between the plasma and the inner wall of the cavity can be reduced, which is conducive to plasma movement, increases the service life of the cavity, reduces the dust particles generated in the cavity, improves the cleaning ability, and is conducive to the efficient dissociation of remote plasma.

[0079] Optionally, the ionization chamber 100 includes:

[0080] The first air chamber 120 has an air inlet 111 located at the top of the first air chamber 120, a first air passage 121 formed on the side of the first air chamber 120, and a first groove 122 formed on the outer periphery of the first air passage 121.

[0081] The second air chamber 130 has an air outlet 112 located at its bottom. A second air passage 131 is formed on the side of the second air chamber 130. A second groove 132 is formed on the outer periphery of the second air passage 131. The first air passage 121 and the second air passage 131 are connected. The second groove 132 and the second groove 132 cooperate to form a through portion. The magnetic core assembly 300 is located in the through portion.

[0082] A ceramic ring 140 is disposed between the first airway opening 121 and the second airway opening 131 to seal the airway 110;

[0083] The sealing ring is 150 and is designed to work with the ceramic ring 140.

[0084] The ionization chamber 100 includes a first gas chamber 120 and a second gas chamber 130. Compared to a multi-segment spliced ​​structure, it improves the airtightness of the chamber, further ensuring a clean environment inside. Simultaneously, a ceramic ring 140 acts as a dielectric material to insulate the gap between the two gas chambers, and a sealing ring 150 is then installed to further improve the sealing of the air passage 110, ensuring a clean environment. The gas flow direction within the air passage 110 is as follows... Figure 6 As shown.

[0085] Specifically, such as Figure 6 As shown, it is located at the opposite corner of the air inlet 111 and the air outlet 112. Figure 8 As shown, the sealing structure 220 includes a ceramic ring 221 and a sealing ring 222 to ensure the air passage 110 is airtight; then a fixing ring 240 is provided to fix the dielectric sheet 210; the ignition structure 230 includes an ignition piece 231, an ignition cap 232 and an ignition head 233. The ignition piece 231 is fixed to the outside of the dielectric sheet 210 by another fixing ring 240. Then the ignition cap 232 and the ignition head 233 are installed in sequence. Finally, the fixing structure 250 is installed to complete the overall installation.

[0086] With the corners of the air passage 110 rounded by chamfering, the cavity is made of aluminum substrate and an anodized coating is formed on the inner wall of the air passage 110. This reduces the contact between plasma and the cavity wall, reduces the bombardment of the anodized coating by plasma, reduces the frequency of plasma contact with the cavity wall by 50%, and increases the overall service life by more than 30%.

[0087] Optionally, the ionization chamber 100, in conjunction with the ignition assembly 200, forms a third groove 160, on which a through hole 161 communicating with the gas passage 110 is formed; the inner wall of the through hole 161 and the bottom surface of the third groove 160 are both coated with an anodized film. This ensures the sealing of the ignition assembly 200 mounting portion, improves the corrosion resistance of the chamber, and extends its service life.

[0088] Optionally, the anodic oxide coating is made of aluminum oxide, magnesium oxide, or titanium oxide; the ionization chamber is made of ceramic or quartz; and the dielectric sheet is made of sapphire or quartz glass.

[0089] However, existing remote plasma generators face severe thermal management challenges during long-term operation. On the one hand, the coupling effect of high-frequency alternating electric and magnetic fields leads to the continuous accumulation of Joule heat and induced eddy current losses in the core assembly and cavity walls. On the other hand, the violent collisions of gas molecules during plasma ionization further exacerbate local temperature rise. Although traditional solutions use external air-cooling or liquid-cooling modules for heat dissipation, their long heat conduction paths and high contact thermal resistance make it difficult to effectively suppress the temperature gradient between the core and critical areas of the cavity. Experimental data shows that when the dissociation cavity temperature exceeds 150°C, sealing materials (such as fluororubber and polyimide) age faster, leading to the risk of gas leakage. At the same time, the magnetic permeability of the core decreases significantly, resulting in a reduction of plasma ionization efficiency by more than 20%. Such thermal failure problems not only shorten the service life of the equipment but also force frequent production line shutdowns for maintenance, severely restricting the continuous production capacity and economic benefits of semiconductor manufacturing equipment.

[0090] Regarding the aforementioned thermal management issues, such as Figure 3 As shown, in one embodiment, the heat dissipation assembly 400 includes:

[0091] A cooling water tray 410 is disposed on both sides of the ionization chamber 100;

[0092] Condenser 420 supplies condensate to radiator 410;

[0093] Cooling fan 430 is connected to condenser 420. Cooling fan 430 is used in conjunction with condenser 420 to achieve a combination of air cooling and water cooling for temperature reduction.

[0094] By combining the condenser 420 and cooling fan 430, synchronous heat exchange between the internal and external systems is achieved, thereby enhancing heat dissipation efficiency and contributing to the extension of the lifespan of the cavity and sealing components, ultimately improving overall production efficiency. The combination of water cooling and air cooling forms an internal circulation cooling system, rapidly and efficiently dissipating the heat of the high-temperature medium into the surrounding environment, thus maintaining a stable operating temperature for the equipment or system.

[0095] The cooling water tray 410 is symmetrically arranged on both sides of the ionization chamber 100. The cooling water tray 410 is made of aluminum substrate, which is not only simple and durable in structure, but also has excellent heat dissipation performance.

[0096] like Figure 9 As shown, a water flow channel 412 is provided in the cooling water tray 410, and several flow-blocking copper plates 412a are arranged at intervals in the water flow channel 412; the flow-blocking copper plates 412a can reduce the local water flow rate and can better dissipate heat.

[0097] The water tray flow channel 412 includes a main flow channel 412b and an auxiliary flow channel 412c. The cross-sectional area of ​​the main flow channel 412b is larger than that of the auxiliary flow channel 412c, and the main flow channel 412b and the auxiliary flow channel 412c are connected in an M-shape. With the M-shaped flow channel in the heat dissipation water tray 410, the main flow channel 412b, in conjunction with the auxiliary flow channel 412c, can maximize the heat exchange area, improve heat dissipation efficiency, and enhance the reliability of the remote plasma source. Tests have shown that using the M-shaped flow channel improves heat dissipation efficiency by 30%, and the cavity temperature remains stable below 60℃. The main flow channel 412b and the auxiliary flow channel 412c are connected but do not overlap.

[0098] In one embodiment, a heat-conducting plate 411 is also provided on the inner side of the cooling water tray 410; the magnetic core assembly 300 and the ionization cavity 100 are both screwed to the cooling water tray 410. The heat-conducting plate 411 can improve the heat dissipation effect, and the screw connection can ensure the mechanical fixation effect between the cooling water tray 410 and the magnetic core assembly 300 and the ionization cavity 100, thus also providing heat dissipation performance. A copper strip 310 is provided on the magnetic core assembly 300. High-frequency alternating current is applied to the copper strip 310, and the copper strip 310 acts as an inductive coupling primary coil to generate a high-frequency electromagnetic field. The conductive gas forms eddy currents under the action of the magnetic field, and the conductive gas is thus ionized; a sustaining current also passes through the copper strip 310, which sustains the electromagnetic field after high-voltage ignition.

[0099] See Figure 5 The first air chamber 120 and the second air chamber 130 are each provided with several screw holes 170 for screwing with the heat sink 410; the magnetic core assembly 300 is wrapped with a copper part and then screwed with the heat sink 410, which is not shown in the figure.

[0100] Specifically, the cooling water tray 410 and the condenser 420 are connected by a cooling water pipe 440. The cooling water pipe 440 includes a first inlet pipe 441, a second inlet pipe 442, a first outlet pipe 443, and a second outlet pipe 444. One end of the first inlet pipe 441 is connected to the inlet connector, and the other end is connected to the inlet end of the condenser 420. One end of the second inlet pipe 442 is connected to the outlet end of the condenser 420, and the other end is connected to the inlet of the cooling water tray 410. The first outlet pipe 443 is connected between the cooling water trays 410. The second outlet pipe 444 leads the water from the cooling water tray 410 to the outlet connector.

[0101] The following provides a test procedure for the remote plasma generator provided in this embodiment. The test steps include:

[0102] Step 1: Place the assembled dissociation chamber on the machine for a leak test. Install the inlet valve and outlet valve on the inlet 111 and outlet 112 respectively. Open the valves to test, evacuate the vacuum, and then close the outlet valve to observe the pressure change in the dissociation chamber.

[0103] Step Two: Place the assembled dissociation chamber onto the machine for a leak test. Install the inlet and outlet water pipes, open the outlet valve, then open the inlet valve and check for leaks. Then close the outlet valve. Perform a pressure test to check for leaks over a long period.

[0104] Step 3: Measure the power by increasing the volume of the given gas and observing the changes in the power of the measuring platform, the bus voltage, and the three-phase current.

[0105] Step 4: Functional Measurement;

[0106] Step 5: Measurement data.

[0107] The remote plasma generator provided in this embodiment solves the problem of plasma source impact damage to the cavity caused by the small radius of the rectangular corners in current remote plasma source cavities. This designed remote plasma source represents a significant breakthrough in the field of semiconductor process equipment, providing a convenient and promising direction for improving the service life and cleanliness of future remote plasma source cavities. The plasma source of this invention has fewer parts and seals, resulting in lower costs and higher reliability. Simultaneously, based on the heat dissipation component 400 provided in this embodiment, combined with the condenser 420 and cooling fan 430, synchronous heat exchange between the internal and external components is achieved, thereby enhancing heat dissipation efficiency and contributing to the extension of the cavity and sealing components' lifespan, thus improving overall production efficiency. The combination of water cooling and air cooling forms an internal circulation cooling system, rapidly and efficiently dissipating the heat of the high-temperature medium into the surrounding environment, thereby maintaining a stable operating temperature for the equipment or system.

[0108] The above embodiments merely illustrate several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the invention patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A remote plasma generator, characterized by, include: An ionization chamber is formed within which an airway is formed. All corners of the airway are rounded. The air inlet and outlet of the airway are arranged diagonally. An ignition assembly is located at the opposite corner of the gas passage and is used to ignite the gas in the gas passage to form plasma. A magnetic core assembly, disposed between the gas channels, is used to provide a continuous current after plasma ignition, thereby continuously ionizing the plasma. Heat dissipation components are disposed on both sides of the ionization cavity; The ignition assembly includes: A dielectric sheet is attached to the ionization cavity, and an anodized coating is formed on the surface of the dielectric sheet to increase the contact surface stress between the dielectric sheet and the ionization cavity. A sealing structure is provided on the outside of the dielectric sheet to ensure the airtightness between the ionization cavity and the dielectric sheet; An ignition structure is used to discharge the dielectric sheet to excite and ignite the gas in the gas passage to form plasma. The ignition structure includes an ignition sheet, an ignition cap, and an ignition head. The ignition sheet is fixed to the outside of the dielectric sheet by another fixing ring. Then, the ignition cap and the ignition head are installed in sequence. Finally, the fixing structure is installed to complete the overall installation. The air inlet, the air outlet, and the inner wall of the air passage are all coated with anodized film; the ionization chamber, in conjunction with the ignition assembly, forms a third groove, and a through hole communicating with the air passage is formed on the third groove; the inner wall of the through hole and the bottom surface of the third groove are both coated with anodized film.

2. The remote plasma generator of claim 1, wherein, The ionization chamber includes: A first air chamber, wherein the air inlet is disposed at the top of the first air chamber, a first air passage is formed on the side of the first air chamber, and a first groove is formed on the outer periphery of the first air passage. The second air chamber has an air outlet located at the bottom of the second air chamber. A second air passage is formed on the side of the second air chamber. A second groove is formed on the outer periphery of the second air passage. The first air passage and the second air passage are connected. The second groove and the second groove cooperate to form a through portion. The magnetic core assembly is located in the through portion. A ceramic ring is disposed between the first airway opening and the second airway opening to seal the airway. A sealing ring is provided to fit the ceramic ring.

3. The remote plasma generator of claim 1, wherein, The heat dissipation component includes: A cooling water tray is disposed on both sides of the ionization cavity; The condenser supplies condensate to the cooling water pan; A cooling fan is connected to the condenser. The cooling fan works in conjunction with the condenser to achieve a combination of air cooling and water cooling for temperature reduction.

4. The remote plasma generator of claim 3, wherein, The cooling water tray has a water tray channel, and several flow-blocking copper sheets are arranged at intervals in the water tray channel.

5. The remote plasma generator of claim 4, wherein, The water tray channel includes a main channel and an auxiliary channel. The cross-sectional area of ​​the main channel is larger than that of the auxiliary channel, and the main channel and the auxiliary channel are connected in an M-shape.

6. The remote plasma generator of claim 5, wherein, A heat-conducting plate is also provided on the inner side of the heat dissipation water tray; the magnetic core assembly and the ionization cavity are both screwed to the heat dissipation water tray.

7. The remote plasma generator of claim 6, wherein, The cooling water tray and the condenser are connected by cooling water pipes, which include a first inlet pipe, a second inlet pipe, a first outlet pipe, and a second outlet pipe. One end of the first water inlet pipe is connected to the water inlet connector, and the other end is connected to the water inlet of the condenser; One end of the second water inlet pipe is connected to the water outlet of the condenser, and the other end is connected to the water inlet of the heat dissipation water tray; The first water outlet pipe is connected between the cooling water trays; The second water outlet pipe leads the water from the cooling water pan to the water outlet connector.

8. The remote plasma generator of claim 1, wherein, The material of the anodic oxide coating is aluminum oxide, magnesium oxide, or titanium oxide; The ionization chamber is made of ceramic or quartz, and the dielectric sheet is made of sapphire or quartz glass.

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