Spray device and semiconductor growth equipment

Abstract

The present invention discloses a spray device and semiconductor growth equipment. The spray device includes a cover body provided with at least one air inlet, and a spray element disposed between the cover body and the cover body to form a diffusion chamber. At least one partition is detachably disposed within the diffusion chamber to divide the diffusion chamber into at least two air chambers. This means that a different number of partitions can be flexibly provided based on the requirements for the air chambers. The partitions include a plurality of plug-in units. The plug-in units are detachably connected end-to-end to each other, allowing the spray area of the air chambers to be flexibly changed. This allows the spray area of each air chamber to be adjusted based on different process requirements.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment, and in particular to a spray device and semiconductor growth equipment. Background Art

[0002] In the manufacturing equipment of semiconductor devices, the spray device is a key device that provides the substrate with a reaction source gas that can form a compound semiconductor. The reaction source gas grows on the substrate, such as epitaxial growth to form a compound semiconductor film. The structure of the spray device largely determines the flow and distribution state of the reaction source gas. It is necessary to be able to match the cavity pressure and gas flow rate through structural designs such as the size and arrangement of the spray holes, to achieve precise gas transport and fluid dynamics design, so as to grow a good quality film on the substrate. In some cases, it is also necessary to set a structure in the spray device that can prevent the reaction source gas from mixing in the spray device according to the process requirements and the characteristics of different reaction source gases, or to adjust the gas flow through the partition coupling of the spray device to improve the uniformity of film growth and film formation quality.

[0003] In the prior art, the partition plates used to partition the spray device are fixed and non-detachable structures, which results in fixed partitions of the air chambers, inflexible airflow adjustment, and limits the universality of the spray device.

[0004] Therefore, it is necessary to provide a spray device and a semiconductor growth equipment to solve the above problems existing in the prior art. Summary of the Invention

[0005] An object of the present invention is to provide a spray device and a semiconductor growth device comprising the spray device, which can flexibly adjust the spray area of each partition in the spray device according to changes in process requirements.

[0006] To achieve the above object, the technical solution of the present invention is as follows:

[0007] A spraying device, comprising:

[0008] The cover body is provided with at least one air inlet portion;

[0009] a spraying member disposed on the cover body to form a diffusion cavity between the cover body and the diffusion cavity, the diffusion cavity being in communication with each of the air inlets and communicating with the outside through the spraying member;

[0010] At least one isolating portion is detachably disposed between the cover and the spray element, dividing the diffusion cavity into at least two air chambers;

[0011] The isolation portion includes a plurality of plug-in units, and the plurality of plug-in units are detachably connected end to end to form a closed structure.

[0012] A semiconductor growth device comprises a spray device and a base arranged opposite to the spray device and used for carrying a substrate.

[0013] By adopting the above technical solution, at least one isolation part can be detachably set in the diffusion chamber to divide the diffusion chamber into at least two air chambers, that is, different numbers of isolation parts can be flexibly set according to the demand for the air chamber. The isolation part includes a number of plug-in units, and the spraying area of the air chamber can be flexibly changed by detachably connecting the plug-in units end to end. In this way, the spraying area of each air chamber can be adjusted according to different process requirements.

[0014] Optionally, at least part of the plug-in unit can be detachably provided on the spraying element and / or the cover body.

[0015] Optionally, the plug-in unit is detachably mounted on the spray component, and the thermal expansion coefficient of the plug-in unit is less than or equal to the thermal expansion coefficient of the spray component.

[0016] Optionally, the constituent material of either the spray piece or the isolation part is a temperature-resistant material, and / or the surface of either the spray piece or the isolation part is covered with a temperature-resistant coating, the temperature-resistant material includes graphite, or a metal having a melting point or softening point of not less than 2000 degrees Celsius, and the temperature-resistant coating includes silicon carbide or tantalum carbide.

[0017] Optionally, the number of the isolation parts is at least 2, and the isolation parts are sequentially arranged from the inside to the outside.

[0018] Optionally, the spray member includes a plurality of spray holes, and the plurality of spray holes form a plurality of spray rings sequentially surrounded from the inside to the outside on the spray member, and the isolation portion is located between adjacent spray rings.

[0019] Optionally, a snap-fit groove is provided between adjacent spray rings to detachably fit at least one plug-in unit of the isolation portion.

[0020] Optionally, the clamping groove forms a ring-shaped closed structure around the center of the spraying element;

[0021] The isolation portion is detachably arranged in the clamping slot, and the plug-in units are connected end to end in the clamping slot to form a ring shape.

[0022] Optionally, the area between adjacent spray rings is provided with at least one said clamping groove along the circumferential direction, and there is a gap between adjacent said clamping grooves;

[0023] Some of the plug-in units are detachably adapted to the corresponding snap-in slots.

[0024] Optionally, the spray part includes a plurality of spray holes, and the plurality of spray holes form a plurality of spray circles on the spray part that are surrounded sequentially from the inside to the outside; some of the plug-in units of the isolation part are detachable positioning connectors corresponding to the spray holes, and the other plug-in units are extension connectors that are detachably arranged sequentially between adjacent positioning connectors, and the extension connectors are located between adjacent spray circles.

[0025] Optionally, a positioning post is provided on a side of the positioning connector facing the spraying member, and the positioning post is detachably provided at a location corresponding to the spraying hole, with the bottom portion being accommodated in the spraying hole.

[0026] Optionally, the exposed surface of the positioning connector excluding the positioning post facing the spray component and the surface of the extension connector facing the spray component are both in contact with the area between the adjacent spray rings of the spray component.

[0027] Optionally, the positioning connector is a folding structure, and the folding structure includes at least one of a U-shaped structure, a V-shaped structure, a wave-shaped structure or an arc-shaped structure.

[0028] Optionally, among the adjacent plug-in units, a side wall of one of the plug-in units is provided with a protruding structure, and a side wall of the other plug-in unit is provided with a recessed structure adapted to the protruding structure to achieve a detachable concave-convex fit, so that the side walls of the adjacent plug-in units fit together;

[0029] The first direction is defined as the direction from one side wall of the plug-in unit to the adjacent side wall of the plug-in unit;

[0030] The size of the protruding structure in the second direction increases along the first direction and then decreases, and the second direction is perpendicular to the first direction.

[0031] Optionally, the gap between two adjacent plug-in units is 0.01-0.05 mm. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 A cross-sectional view of the internal structure of a spray device according to an embodiment of the present invention;

[0033] Figure 2 This is a schematic diagram of the assembly structure of a spray element and an isolation portion according to an embodiment of the present invention;

[0034] Figure 3 This is a schematic diagram of the assembly structure of another spray element and isolation portion according to an embodiment of the present invention;

[0035] Figure 4 for Figure 3 A schematic diagram of an assembly structure of the clamping groove and the isolation portion shown;

[0036] Figure 5 for Figure 3 Another schematic diagram of the assembly structure of the clamping groove and the isolation portion shown;

[0037] Figure 6 This is a schematic diagram of the assembly structure when two adjacent extension connectors are connected according to an embodiment of the present invention;

[0038] Figure 7 This is a schematic diagram of the assembly structure when the positioning connector and the adjacent extension connector are connected according to an embodiment of the present invention;

[0039] Figure 8 The figure is a structural diagram of a positioning connector with a positioning column provided at the bottom according to an embodiment of the present invention.

[0040] Reference numerals:

[0041] 100, cover body; 200, spray part; 210, spray hole; 220, snap-in groove; 230, spray ring; 300, diffusion cavity; 310, central air chamber; 320, middle air chamber; 330, edge air chamber; 400, isolation part; 410, plug-in unit; 411, raised structure; 412, recessed structure; 420, positioning plug-in part; 421, positioning column; 430, extension plug-in part. DETAILED DESCRIPTION

[0042] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein should be the common meanings understood by people with ordinary skills in the field to which the invention belongs. The words "including" and similar words used in this article mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0043] The following is combined with Figure 1-8 , the specific implementation methods of the present invention are further described in detail.

[0044] An embodiment of the present invention provides a spray device for use in semiconductor growth equipment, including but not limited to chemical vapor deposition (CVD) equipment and physical vapor deposition (PVD) equipment. The CVD equipment may be plasma-enhanced PECVD (PECVD) equipment, metal-organic CVD (MOCVD) equipment, or the like. This embodiment uses MOCVD equipment as an example. It should be understood that this equipment is merely exemplary and the present invention is not limited to this type of equipment.

[0045] Reference Figure 1 The spraying device shown in the figure includes:

[0046] The cover 100 is provided with at least one air inlet portion (not shown) for introducing gas into each air chamber;

[0047] The spray element 200 is provided on the cover 100 to form a diffusion cavity 300 between the cover 100 and the diffusion cavity 300, which is connected to each air inlet portion and communicates with the outside through the spray element 200;

[0048] At least one isolating portion 400 is detachably disposed between the cover 100 and the spray element 200, dividing the diffusion cavity 300 into at least two air chambers, with adjacent air chambers being isolated from each other;

[0049] At least one isolation portion 400 includes a plurality of plug-in units 410 , and the plurality of plug-in units 410 are detachably connected end to end to form a closed structure.

[0050] In some embodiments, the cover 100 is provided with multiple air inlets evenly distributed throughout the cover 100. These air inlets are connected to an external air supply device, which provides process gas. The process gas enters different locations of the diffusion chamber 300 through different air inlets. To ensure uniform diffusion of the process gas, the cover 100 is also provided with a spray element 200. The spray element 200 is plate-shaped and has multiple spray holes 210 formed therein. The spray holes 210 extend through the thickness of the spray element 200. A gap exists between the end surface of the spray element 200 and the cover 100, forming a diffusion chamber 300 between the spray element 200 and the cover 100. The spray holes 210 communicate with the diffusion chamber 300. Process gas from the air inlets enters the diffusion chamber 300, then flows through the spray holes 210 and into the process chamber.

[0051] To prevent the spray element 200 from significant thermal expansion and plastic deformation caused by prolonged high temperatures (e.g., above 800 degrees Celsius), existing technologies require additional water cooling, which increases maintenance costs. To address this issue, in some embodiments, either the spray element 200 or the isolation portion 400 is constructed from a heat-resistant material. In some embodiments, either the spray element 200 or the isolation portion 400 is coated with a heat-resistant coating. The heat-resistant coating includes silicon carbide or tantalum carbide.

[0052] In some embodiments, the temperature-resistant material includes graphite, or a metal having a melting point or softening point of not less than 2000 degrees Celsius.

[0053] In some specific embodiments, the plug-in unit 410 is made of graphite, or is plated with a coating, such as graphite plated with silicon carbide or graphite plated with tantalum carbide. In some embodiments, the plug-in unit 410 can also be made of other high-temperature resistant metal materials, such as molybdenum metal, as long as the melting point or softening point meets 2000°C or higher.

[0054] In some embodiments, reference Figure 1 and Figure 2 At least one isolating portion 400 is provided, and the isolating portion 400 is placed inside the diffusion chamber 300, that is, the isolating portion 400 is placed between the cover 100 and the spray element 200, and can divide the diffusion chamber 300 into at least two air chambers. Specifically, when one isolating portion 400 is provided, the diffusion chamber 300 is divided into two air chambers; when two isolating portions 400 are provided, the two isolating portions 400 are arranged from the inside out, so that the isolating portions 400 divide the diffusion chamber 300 into three air chambers. More specifically, there are N isolating portions 400, where N is a positive integer, and the N isolating portions 400 are arranged sequentially from the inside out, dividing the diffusion chamber 300 into N+1 air chambers.

[0055] In some specific embodiments, the number of the isolation parts 400 is at least two. When there are two or more isolation parts 400 , the isolation parts 400 are sequentially arranged from the inside to the outside.

[0056] In some more specific embodiments, reference Figure 1 and Figure 2There are two isolation parts 400, which are arranged in sequence from the inside to the outside, and together divide the diffusion chamber 300 into three air chambers, namely the central air chamber 310, the middle air chamber 320 and the edge air chamber 330. In some more specific embodiments, the inner circle diameter of the central air chamber 310 is 8~16cm, and a 4~6-inch substrate can be placed underneath it; the middle circle diameter surrounded by the middle air chamber 320 is 12~21cm, and an 8-inch substrate can be placed underneath it; the outer circle diameter surrounded by the edge air chamber 330 is 18~31cm, and a 12-inch substrate can be placed underneath it. The substrate described in this embodiment can be a silicon substrate, a silicon carbide substrate, etc. On the basis of the spray device corresponding to the epitaxial growth of large-size substrates, a detachable isolation part 400 is provided to easily obtain the spray range required for the epitaxial growth of small-size substrates, thereby realizing the epitaxial growth of multiple substrates of different sizes and improving the compatibility of semiconductor growth equipment containing the spray device. For the growth of epitaxial wafers on small-sized substrates, the middle gas chamber 320 is used to introduce reaction gases, and the space between the middle gas chamber 320 and the edge gas chamber 330 is used to introduce inert purge gas, which can confine the reaction gases and isolate the reaction gases from the inner walls of the equipment to prevent the problem of reaction gases being consumed due to the growth of material layers on the inner walls.

[0057] In some embodiments, the flexibility of the zoning coupling adjustment can be improved by removably setting the isolation part 400. For example, if the isolation part 400 is not set, there is only one spray space in the diffusion chamber 300, and the zoning coupling control cannot be achieved. If two isolation parts 400 are set, the diffusion chamber 300 is divided into three spray spaces: the central air chamber 310, the middle air chamber 320 and the edge air chamber 330: by controlling at least one of the flow rate, type and molecular weight of the gas introduced into the three spray spaces, the zoning coupling is achieved to adjust the epitaxial uniformity. More specifically, the central air chamber 310 is introduced into a reaction gas of a first flow rate, component or molecular weight; the middle air chamber 320 is introduced into a reaction gas of a second flow rate, component or molecular weight; the edge air chamber 330 is introduced into a reaction gas of a third flow rate, component or molecular weight or a purge gas to prevent the problem of the growth of a material layer on the inner wall of the equipment and the consumption of the reaction gas.

[0058] In some embodiments, at least a portion of the plug-in unit 410 is detachably mounted on the spray element 200 and / or the cover 100. Specifically, at least a portion of the plug-in unit 410 is detachably mounted on the spray element 200, allowing the isolation portion 400 to be detachably mounted on the spray element 200; and at least a portion of the plug-in unit 410 is detachably mounted on the cover 100, allowing the isolation portion 400 to be detachably mounted on the cover 100.

[0059] Taking into account the complexity of the various structures including the air inlet part (such as a temperature measuring device and a cooling device) provided on the cover 100 of some process chambers, in some specific embodiments, the plug-in unit 410 is preferably selected to be detachably provided on the spray part 200 to avoid mutual interference with various other structures provided on the cover 100, and is provided on the spray part 200. When the air chamber area needs to be adjusted, the cover 100 can be opened for adjustment, which is convenient for operation.

[0060] When the plug-in unit 410 is detachably mounted on the spray component 200 , the thermal expansion coefficient of the plug-in unit 410 is less than or equal to the thermal expansion coefficient of the spray component 200 .

[0061] In some embodiments, especially when the process temperature is high, resulting in significant thermal expansion effects on the spray element 200 and the plug-in unit 410, materials with high thermal expansion coefficients will experience greater thermal deformation at the same temperature. Therefore, due to the high thermal expansion coefficient of the spray element 200, the degree of deformation of the spray element 200 under the thermal expansion effect is higher than that of the plug-in unit 410, thereby avoiding expansion stress on the spray hole 210 caused by the thermal expansion deformation of the plug-in unit 410. If the thermal expansion coefficient of the plug-in unit 410 is higher than that of the spray element 200, the degree of deformation of the spray element 200 under the thermal expansion effect is lower than that of the plug-in unit 410, resulting in plastic deformation at the connection between the plug-in unit 410 and the spray element 200, and even possible damage to the spray element 200 or the plug-in unit 410.

[0062] In some specific embodiments, the temperature-resistant material includes graphite or metal, and the melting point or softening point of the metal is ≥2000°C.

[0063] In order to effectively control the amount of gas ejected from each air chamber and maximize the use of the spray holes 210 inherent in the spray piece 200, the plug-in unit 410 in the isolation part 400 is further designed so that it will not interfere with the process of gas passing through the spray holes 210 to the greatest extent and can maximize the utilization rate of the spray holes 210.

[0064] The spraying member 200 includes a plurality of spray holes 210, which are formed on the spraying member 200 to form a plurality of spray rings 230 which are sequentially surrounded from the inside to the outside. The isolation portion 400 is located between adjacent spray rings 230. Figure 2 The isolation portion 400 is located between adjacent spray rings 230, that is, each plug-in unit 410 in the isolation portion 400 is disposed between adjacent spray rings 230. Specifically, the plug-in unit 410 is detachably disposed between adjacent spray rings 230, so that the connection between the plug-in unit 410 and the spray element 200 does not block the spray hole 210, thereby not interfering with the process of gas passing through the spray hole 210.

[0065] In order to facilitate the detachable installation of the plug-in unit 410 between adjacent spray rings 230 on the spray element 200 , a snap-fit groove 220 is provided between adjacent spray rings 230 to detachably fit at least one plug-in unit 410 of the isolation portion 400 .

[0066] In some embodiments, reference Figure 3 、 Figure 4 and Figure 5 The spray part 200 is provided with a snap-in groove 220 for detachably setting the plug-in unit 410. The snap-in groove 220 is a closed structure in a ring shape surrounding the middle part of the spray part 200; the isolation part 400 is detachably arranged in the snap-in groove 220, and each plug-in unit is connected end to end in the snap-in groove 220 to form a ring shape.

[0067] In some specific embodiments, the clamping groove 220 is in a circular ring shape or a polygonal ring shape, which is not limited here, and the clamping groove 220 is mainly capable of separating adjacent spray rings 230.

[0068] In some specific embodiments, referring to Figure 4 The snap-in slot 220 is a semi-through slot, that is, the snap-in slot 220 does not penetrate the spray element 200 . At the same time, each plug-in unit 410 is disposed in the snap-in slot 220 and snap-into the snap-in slot 220 .

[0069] In some embodiments, reference Figure 5 At least one snap-in groove 220 is circumferentially provided in the region between adjacent spray rings 230, that is, a plurality of snap-in grooves 220 are provided on the spray element 200, with intervals between adjacent snap-in grooves 220. Each snap-in groove 220 is sequentially provided in the region between adjacent spray rings 230 along the circumferential direction. In some specific embodiments, each snap-in groove 220 is sequentially provided in the region between adjacent spray rings 230 at intervals along the circumferential direction. Some plug-in units 410 and corresponding snap-in grooves 220 are detachably provided in the snap-in grooves 220. Adjacent plug-in units 410 of some plug-in units 410 are sequentially detachably connected to other plug-in units 410. These other plug-in units 410 are fitted to the region between adjacent spray rings 230 of the spray element 200 to ensure airtightness and to minimize shielding of the spray holes 210 and thus affect the spraying effect. This design allows for more flexible adjustment of the area enclosed by each air chamber, and plug-in units 410 of different shapes can be detachably arranged sequentially between adjacent snap-in slots 220 .

[0070] In some specific embodiments, the snap-in slots 220 are semi-through slots, meaning they do not penetrate the spray element 200. Each snap-in slot 220 corresponds to a plug-in unit 410. During the connection between the isolation portion 400 and the spray element 200, the plug-in unit 410 corresponding to the snap-in slot 220 is removably mounted within the snap-in slot 220, while the other plug-in units 410 are attached to the spray element 200. The other plug-in units 410 are also positioned between adjacent spray rings 230.

[0071] In some more specific embodiments, the snap-in slot 220 is arc-shaped or straight-plate-shaped, which is not limited here, so that the plug-in unit 410 can be set in the snap-in slot 220, so that the isolation part 400 and the spray part 200 are detachably arranged.

[0072] In some embodiments, the air chambers separated by the isolation portion 400 are airtight, the detachable connection between the snap-in groove 220 and the plug-in unit 410, the detachable assembly relationship between adjacent plug-in units 410, and the fit between each plug-in unit 410 and the cover body 100 are all necessary to ensure the airtightness between the air chambers. The specific implementation method is conventional technical means in this field.

[0073] In some embodiments, the shape of the plug-in unit 410 can be arc-shaped, straight-plate-shaped, U-shaped, V-shaped, wave-shaped, etc., which is not limited here.

[0074] In some specific embodiments, referring to Figure 4 The clamping groove 220 and the spray hole 210 are not connected to each other, so as to reduce the possibility that the spray range of part of the spray hole 210 is affected after the plug-in unit 410 is set in the clamping groove 220.

[0075] The spray part 200 includes a plurality of spray holes 210, which form a plurality of spray rings 230 on the spray part 200 that are sequentially surrounded from the inside out. In the isolation part 400, some of the plug-in units 410 are detachable positioning plug-in units 420 corresponding to the spray holes 210, and other plug-in units 410 are detachable extension plug-in units 430 that are detachably arranged between adjacent positioning plug-in units 420. The extension plug-in units 430 are located between adjacent spray rings 230.

[0076] In some embodiments, reference Figure 2 The plug-in unit 410 includes a positioning plug-in component 420 and an extension plug-in component 430. The positioning plug-in component 420 is detachably arranged on the spray component 200. At the same time, the extension plug-in component 430 is arranged on the spray component 200 and placed between two adjacent positioning plug-ins 420. That is, one or more extension plug-ins 430 are arranged between two adjacent positioning plug-ins 420, so that multiple plug-in units 410 are connected end to end in sequence to form a ring.

[0077] In some embodiments, reference Figure 1 and Figure 8 The positioning connector 420 is detachably arranged in the corresponding spray hole 210 to block the corresponding spray hole 210; at the same time, the extension connector 430 is located between adjacent spray rings 230, that is, the extension connector 430 will not interfere with the process of airflow passing through the spray hole 210; that is, when the process gas passes through the spray hole 210, only the spray hole 210 where the positioning connector 420 is located is blocked, and the effective spray area of the spray ring 230 is not affected; thereby improving the problem of the effective spray area of the spray ring 230 being affected due to the extension connector 430 blocking the spray hole 210 or part of the spray hole 210.

[0078] In some specific embodiments, the extension connector 430 is fitted to the spray element 200. Specifically, the positioning connector 420 is detachably mounted on the spray element 200, while the extension connector 430 is detachably mounted on the positioning connector 420 or an adjacent extension connector 430. This allows the extension connector 430 to be detachably mounted on the spray element 200, maximizing the original structure of the spray element 200 and avoiding the need for slotting or other secondary processing on the spray element 200. Furthermore, the number of connection points between the isolation portion 400 and the spray element 200 is reduced, thereby reducing stress caused by thermal expansion between the two.

[0079] The positioning connector 420 includes two connected corner portions with an angle between the two corner portions. One or more extension connectors 430 are provided between two adjacent positioning connectors 420 so that the isolation portion 400 forms a polygonal ring shape.

[0080] In some embodiments, reference Figure 2 and Figure 7 When the isolating portion 400 forms a polygonal ring, the two corner portions have an angle between them. For example, when the isolating portion 400 forms a regular hexagon, the angle between the two corner portions is 120°. In actual use, the angle between the two corner portions can be set as needed, and the number of extension connectors 430 between two adjacent positioning connectors 420 can be adjusted to accommodate regular polygons of different shapes.

[0081] In some embodiments, both corner portions are in the shape of straight plates, and the two corner portions have the same shape and have a first side wall and a second side wall. The first side walls of the two corner portions are connected to each other and have a certain angle.

[0082] In some specific embodiments, the number of the extending connectors 430 between two adjacent positioning connectors 420 is the same, so that the isolation portion 400 forms a circular ring or a regular polygonal ring.

[0083] In some specific embodiments, when the positioning connector 420 and the extension connector 430 form a polygonal ring, the number of extension connectors 430 between two adjacent positioning connectors 420 is different to form an irregular polygonal ring.

[0084] In some specific embodiments, both isolation portions 400 are annular.

[0085] In some specific embodiments, both of the two isolation portions 400 are polygonal rings.

[0086] In some specific embodiments, one of the two isolation portions 400 is in a circular ring shape, and the other is in a polygonal ring shape.

[0087] In some embodiments, the positioning connector 420 is a folding structure, and the folding structure includes at least one of a U-shaped structure, a V-shaped structure, a wave-shaped structure, or an arc-shaped structure.

[0088] In some specific embodiments, the positioning connector 420 may also have other shapes, which are not limited here, and are mainly based on the ability to achieve positioning connection. The shape of the extension connector 430 is not limited, as long as it can separate the two air chambers. In other words, the shape of the air chambers can be irregular. Such a configuration can further refine the airflow regulation of the air chambers according to process requirements. During use, the shape of the isolation portion 400 can be adjusted according to process requirements.

[0089] In some embodiments, the positioning plug 420 and the extension plug 430 are both made of graphite.

[0090] In some embodiments, the positioning connector 420 and the extension connector 430 are both made of temperature-resistant metal.

[0091] In some embodiments, one of the positioning connector 420 and the extending connector 430 is made of a heat-resistant metal material, and the other is made of graphite material.

[0092] In order to facilitate the connection between adjacent plug-in units 410, refer to Figure 6 and Figure 7 , among the adjacent plug-in units 410 , a side wall of one plug-in unit 410 is provided with a protruding structure 411 , and a side wall of the other plug-in unit 410 is provided with a concave structure 412 adapted to the protruding structure 411 to achieve concave-convex matching;

[0093] The direction in which the protrusion 411 is provided on the plug-in unit 410 (i.e., the direction in which the sidewall of one plug-in unit 410 points toward the protrusion 411 on the adjacent plug-in unit 410, more specifically, the direction in which the protrusion 411 extends from the sidewall of the plug-in unit 410 in which it is located toward the adjacent, removably adaptable plug-in unit 410) is defined as the first direction, and the direction perpendicular to the first direction is defined as the second direction. The dimension of the protrusion 411 in the second direction (specifically, the cross-sectional dimension in the second direction) increases along the first direction and then decreases. When a large flow of gas is introduced into the air chamber, the isolation portion 400 generates a tensile force under the impact of the large flow, easily pulling the two adjacent plug-in units 410 apart, thereby losing its isolation function. The size of the raised structure 411 in the second direction is set to increase along the first direction and then decrease, so that after two adjacent extended connectors 430 are connected, when the two adjacent extended connectors 430 are pulled in opposite directions, the raised structure 411 is difficult to easily separate from the recessed structure 412, so that the two adjacent extended connectors 430 can still maintain the assembly stability of the isolation part 400 when subjected to the tensile force generated by the impact of large airflow.

[0094] In some embodiments, the plug-in unit 410 is plate-shaped, with the recessed structure 412 extending through the plug-in unit 410 along its height, and the sidewalls of the recessed structure 412 communicating with the exterior of the plug-in unit 410. A raised structure 411 is fixed to the other side of the plug-in unit 410, and its fixing method may be bolted or integrally formed, without limitation herein, provided that the raised structure 411 and the plug-in unit 410 do not move relative to each other. The raised structure 411 fits into the recessed structure 412 in a concave-convex fit, thereby detachably connecting two adjacent plug-in units 410.

[0095] In some specific embodiments, a protruding structure 411 is provided on one side of the positioning connector 420, and a recessed structure 412 is provided on the other side; a protruding structure 411 is provided on one side of the extension connector 430, and a recessed structure 412 is provided on the other side; adjacent extension connectors 430 can be detachably connected to each other, and adjacent extension connectors 430 can be detachably connected to the positioning connector 420.

[0096] In some embodiments, the cross-sectional shape of the concave structure 412 is the same as the cross-sectional shape of the convex structure 411 .

[0097] In some embodiments, the cross-sectional shape of the protrusion structure 411 in the second direction is circular, and the protrusion structure 411 is a spherical protrusion.

[0098] In some specific embodiments, the cross-section is circular. More specifically, the sidewalls of the protruding structure 411 are curved, forming a circular cross-section. The circular cross-section's size in the second direction increases and then decreases along the first direction. The length of the portion where the protruding structure 411 connects to the connector unit 410 is shorter than the diameter of the circular cross-section formed by the protruding structure 411, causing the size in the second direction to increase and then decrease along the first direction. This prevents adjacent extended connectors 430 from separating when subjected to tensile forces generated by airflow, thereby enhancing the stability of the isolation portion 400.

[0099] In some embodiments, the gap between two adjacent plug-in units 410 is 0.01-0.05 mm; the gap between adjacent protrusions 411 and recesses 412 is 0.01-0.05 mm. Considering the thermal expansion of the plug-in units 410 at high temperatures, the gap is provided to ensure airtightness between adjacent plug-in units 410 after thermal expansion. Too large a gap will not ensure airtightness, while too small a gap will easily cause plastic deformation between adjacent plug-in units 410 after thermal expansion.

[0100] In some embodiments, the protruding structure 411 is connected to the recessed structure 412, and the gap between adjacent protruding structures 411 and recessed structures 412 is 0.01-0.05 mm, so that two adjacent plug-in units 410 are connected, thereby making the gap between two adjacent plug-in units 410 0.01-0.05 mm.

[0101] In order to facilitate the fixation of the positioning connector 420 , a positioning post 421 is provided at the bottom of the positioning connector 420 . The positioning post 421 is used to be detachably arranged in the spray hole 210 so that the positioning connector 420 can be detachably arranged on the spray element 200 .

[0102] In some embodiments, a positioning post 421 is disposed at the bottom of the positioning connector 420. After the positioning post 421 is removably mounted on the spray hole 210, the exposed surface of the positioning connector 420, excluding the positioning post 421, facing the spray element 200 is aligned with the area between adjacent spray rings 230 of the spray element 200 to ensure airtightness. The removable arrangement between the positioning post 421 and the spray hole 210 needs to ensure airtightness between the positioning post 421 and the spray hole 210, for example, the outer diameter of the positioning post 421 must match the diameter of the spray hole 210.

[0103] In some specific embodiments, the positioning post 421 is detachably mounted on the corresponding spray hole 210 and its bottom is received in the spray hole 210 , that is, the positioning post 421 does not extend into the process chamber to reduce interference with the airflow passing through the spray hole 210 .

[0104] In some embodiments, the spray element 200 is made of graphite or a heat-resistant metal, and the melting point or softening point of the heat-resistant metal is ≥ 2000° C. Furthermore, the surface of the spray element 200 is covered with a heat-resistant coating.

[0105] In some embodiments, the spray devices of the prior art are mostly made of stainless steel, which cannot withstand high temperatures (for example, above 800 degrees Celsius) for a long time and requires additional water cooling components. The spray part 200 of the present invention is made of graphite or heat-resistant metal material, or a heat-resistant coating is formed on the spray part 200, such as graphite plated with silicon carbide or graphite plated with tantalum carbide. No additional water cooling is required, and the spray part 200 can be replaced separately, with low replacement cost and long maintenance cycle.

[0106] In some specific embodiments, the number of the isolation parts 400 can be set as required. Here, two isolation parts 400 are provided to separate the diffusion chamber 300 into a central air chamber 310 , a middle air chamber 320 and an edge air chamber 330 as an example.

[0107] In some specific embodiments, the isolation portion 400 is not provided on the spray element 200 , so that the diffusion cavity 300 is formed as an air chamber as a whole.

[0108] In some specific embodiments, only one partition 400 is provided on the spray element 200; in this case, the middle air chamber 320 and the edge air chamber 330 form a single air chamber, and the central air chamber 310 forms a single air chamber, that is, the diffusion chamber 300 is divided into two air chambers. Alternatively, the middle air chamber 320 and the central air chamber 310 form a single air chamber, and the edge air chamber 330 forms a single air chamber, that is, the diffusion chamber 300 is divided into two air chambers.

[0109] In some specific embodiments, two isolation portions 400 are provided on the spray element 200; the diffusion chamber 300 is divided into a central air chamber 310, a middle air chamber 320 and an edge air chamber 330, that is, the diffusion chamber 300 is divided into three air chambers.

[0110] The present application also discloses a semiconductor growth apparatus comprising the aforementioned spray device and a pedestal disposed opposite the spray device and configured to support a substrate. In some embodiments, a cover 100 is connected to a process chamber of the semiconductor growth apparatus, and the pedestal is disposed within the process chamber. After the cover 100 is connected to the process chamber, the spray device and the pedestal are disposed opposite each other to facilitate wafer processing.

[0111] The implementation principle of a spray device and a semiconductor growth equipment in an embodiment of the present application is as follows: a plurality of isolation parts 400 are set on the spray part 200 according to needs, a plurality of plug-in units 410 are set in the isolation part 400, and the plurality of plug-in units 410 are connected end to end in sequence to form a ring, which divides the diffusion cavity 300 into a different number of air chambers. By increasing or decreasing the plug-in units 410, the volume of the space enclosed by the isolation part 400 is changed, and the spray area can be flexibly adjusted in the spray device. In this way, the spray area can be flexibly adjusted according to different process requirements to cooperate with the chip growth, such as epitaxial growth.

[0112] While the embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations of these embodiments are possible. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as set forth in the claims. Furthermore, the invention described herein is susceptible to other embodiments and may be practiced or implemented in a variety of ways.

Claims

1. A spraying device, characterized in that: include: The cover (100) is provided with at least one air inlet portion; A spraying member (200) is provided on the cover body (100) to form a diffusion cavity (300) between the cover body (100), wherein the diffusion cavity (300) is in communication with each of the air inlet portions and communicates with the outside through the spraying member (200); At least one isolating portion (400) is detachably disposed between the cover (100) and the spraying element (200), dividing the diffusion cavity (300) into at least two air chambers; The isolation portion (400) comprises a plurality of plug-in units (410), and the plurality of plug-in units (410) are sequentially connected end to end in a detachable manner to form a closed structure.

2. The spraying device according to claim 1, characterized in that At least a portion of the plug-in unit (410) is detachably mounted on the spraying element (200) and / or the cover (100).

3. The spraying device according to claim 2, characterized in that The plug-in unit (410) is detachably mounted on the spraying part (200), and the thermal expansion coefficient of the plug-in unit (410) is less than or equal to the thermal expansion coefficient of the spraying part (200).

4. The spraying device according to claim 1, characterized in that The constituent material of any one of the spraying member (200) and the isolating portion (400) is a temperature-resistant material, and / or the surface of any one of the spraying member (200) and the isolating portion (400) is covered with a temperature-resistant coating, the temperature-resistant material includes graphite, or a metal having a melting point or softening point of not less than 2000 degrees Celsius, and the temperature-resistant coating includes silicon carbide or tantalum carbide.

5. The spraying device according to claim 1, characterized in that The number of the isolation parts (400) is at least 2, and the isolation parts (400) are arranged in sequence from the inside to the outside.

6. The spraying device according to claim 1, characterized in that The spraying part (200) comprises a plurality of spraying holes (210), and the plurality of spraying holes (210) form a plurality of spraying rings (230) sequentially surrounding the spraying part (200) from the inside out, and the isolation portion (400) is located between adjacent spraying rings (230).

7. The spraying device according to claim 6, characterized in that: A snap-fit groove (220) is provided between adjacent spray rings (230) to detachably fit at least one of the plug-in units (410) of the isolation portion (400).

8. The spraying device according to claim 7, characterized in that: The clamping groove (220) is formed into a ring-shaped closed structure around the center of the spraying element (200); The isolation portion is detachably arranged in the clamping slot (220), and each of the plug-in units (410) is connected end to end in the clamping slot (220) to form a ring shape.

9. The spraying device according to claim 7, characterized in that: At least one clamping groove (220) is provided in the circumferential direction in the region between adjacent spray rings (230), and there is a gap between adjacent clamping grooves (220); Some of the plug-in units (410) are detachably adapted to the corresponding snap-in slots (220).

10. The spraying device according to claim 1, characterized in that The spraying part (200) comprises a plurality of spraying holes (210), and the plurality of spraying holes (210) form a plurality of spraying rings (230) on the spraying part (200) that are sequentially surrounded from the inside out; some of the plug-in units (410) of the isolation part (400) are detachable positioning plug-in units (420) corresponding to the spraying holes (210), and the other plug-in units (410) are extension plug-in units (430) that are sequentially detachable and arranged between adjacent positioning plug-in units (420), and the extension plug-in units (430) are located between adjacent spraying rings (230).

11. The spraying device according to claim 10, characterized in that: A positioning column (421) is provided on one side of the positioning connector (420) facing the spraying component (200). The positioning column (421) is detachably arranged corresponding to the spraying hole (210) and has its bottom accommodated in the spraying hole (210).

12. The spraying device according to claim 11, characterized in that The exposed surface of the positioning connector (420) facing the spray part (200) except the positioning column (421), and the surface of the extension connector (430) facing the spray part (200) are both in contact with the area between the adjacent spray rings (230) of the spray part (200).

13. The spraying device according to claim 10, characterized in that The positioning connector (420) is a folding structure, and the folding structure includes at least one of a U-shaped structure, a V-shaped structure, a wave-shaped structure or an arc-shaped structure.

14. The spraying device according to claim 1, characterized in that Among the adjacent plug-in units (410), a side wall of one of the plug-in units (410) is provided with a protruding structure (411), and a side wall of the other plug-in unit (410) is provided with a recessed structure (412) adapted to the protruding structure (411) to achieve a detachable concave-convex fit, so that the side walls of the adjacent plug-in units (410) fit together. The first direction is defined as a direction from a side wall of one plug-in unit (410) to a side wall of an adjacent plug-in unit (410); The size of the protruding structure (411) in the second direction increases along the first direction and then decreases, and the second direction is perpendicular to the first direction.

15. The spraying device according to claim 1, characterized in that The gap between two adjacent plug-in units (410) is 0.01-0.05 mm.

16. A semiconductor growth device, characterized in that: It comprises the spraying device according to any one of claims 1 to 15, and a base arranged opposite to the spraying device and used for supporting the substrate.

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