Driving device with damping buffer for valve
By introducing a damping buffer device into the valve drive device, the piston movement is controlled by using the connecting air duct and oil damping force, the problem of reliable locking of the valve in special circumstances is solved, and smooth operation without vibration and noise is achieved.
Patent Information
- Application Number
- CN202510714056.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-05-30
- Publication Date
- 2025-07-22
AI Technical Summary
After the external air source or power supply is interrupted, it is difficult to ensure that the valve is locked reliably, resulting in sharp changes in the piston thrust, resulting in vibration and noise, damaging the molecular pump and affecting the process.
The damping and buffering device is adopted, including a connecting airway, a check valve, a buffer piston rod, a buffer chamber and a throttling chamber. The oil uses the damping force to control the piston movement, avoid the violent acceleration of the piston at the dead point, and achieve a smooth locking and unlocking process.
It effectively suppresses vibration and noise during the locking and unlocking process of the valve, ensures the reliability and safety of the valve, and avoids equipment damage and process interference.
Smart Images
Figure CN120351367A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of vacuum valves, and particularly to a driving device with damping buffer for a valve. Background Art
[0002] At present, an ultra-high vacuum gate valve generally uses a cylinder to drive a set of connecting rods, and the connecting rods drive the valve plate to control the opening and closing of the valve. The cylinder adjusts the piston movement speed by means of exhaust throttling or intake throttling. This method can operate smoothly on valves without mechanical air cut-off protection. However, in some special processes, it is required that after the external air source or power supply is interrupted, the valve can still be reliably locked in the closed state. This requires the connecting rod to cross the dead point position when the driving device and the valve plate reach the closing dead point to ensure that the valve enters a reliable locking state.
[0003] However, during the process of entering or exiting the locking state, the driving force required gets sharply increased as it gets closer to the dead point of the connecting rod. Due to the compressibility of the gas, the pressure in the cylinder gradually rises with the increase of the intake air volume, and the thrust of the piston increases with the increase of the pressure. When reaching the critical point, the connecting rod crosses the dead point. After the connecting rod crosses the dead point, the load of the cylinder decreases sharply. At this time, the pressure in the cylinder is very high and the piston thrust is very large, which will generate a very high acceleration, causing the valve opening and closing mechanism to move quickly and generate great vibration and noise. The generated vibration is likely to damage the associated molecular pump or cause protective shutdown, seriously affecting the process. Summary of the Invention
[0004] In view of the above technical problems, the present invention provides a driving device with damping buffer for a valve, which solves the problems and defects proposed in the background art.
[0005] The technical solution adopted by the present invention is as follows:
[0006] A driving device with damping buffer for a valve is assembled on the valve; the driving device includes: a main body, with a cover plate provided at the upper end of the main body; a main piston, arranged inside the main body, and the main piston divides the interior of the main body into an upper chamber and a lower chamber; an upper air inlet and outlet is opened on the side wall of the upper chamber, and a lower air inlet and outlet is opened on the side wall of the lower chamber; a piston rod, connected to the lower end face of the main piston, and the lower part of the piston rod passes through the lower end face of the main body through a mechanical seal structure; a damping buffer device, arranged between the main piston and the bottom inside the main body, including: a communication component, penetrating through the main piston; a buffer piston rod, with the upper end of the buffer piston rod located below the main piston; a buffer component, fixedly installed at the lower part inside the main body, and the buffer piston rod is inserted into one end of the buffer component; when the buffer piston rod moves inward in the buffer component, the buffer component will generate a damping force that increases or decreases with the stroke of the buffer piston rod, so that the buffer piston rod has a buffer movement process.
[0007] Further, the connecting component includes: a connecting air passage penetrating through the main piston; a check valve assembled at the upper end of the connecting air passage; the connecting air passage connecting the upper chamber and the lower chamber; the
[0008] The check valve allows gas to flow from bottom to top and does not allow gas to flow from top to bottom.
[0009] Further, a sealing ring is provided at the upper end of the buffer piston rod, and the upper end of the buffer piston rod abuts against the lower end surface of the main piston.
[0010] Further, the buffer assembly includes: a buffer chamber, the lower part of the buffer piston rod
[0011] extends into the buffer chamber, and a buffer piston is installed at the lower part of the buffer piston rod; a throttle chamber communicated with the lower end of the buffer chamber; a control chamber communicated with the other end of the throttle chamber; the
[0012] A control piston is provided in the control chamber, and the control piston divides the control chamber into a control upper chamber and a control lower chamber; the lower part of the buffer chamber, the throttle chamber, and the control lower chamber are sequentially communicated and filled with oil.
[0013] Further, the lower end of the buffer piston rod located at the buffer piston is a throttle shaft; the cross section of the throttle shaft is trapezoidal or conical.
[0014] Further, a sealing ring is provided at the joint of the buffer piston rod and the buffer chamber; an air pressure balance hole is provided on the side wall of the buffer chamber.
[0015] Further, one or more sealing rings are provided between the control piston and the control chamber.
[0016] Further, an anti-rotation guiding groove is provided inside the main body, and an anti-rotation guiding post is provided on the main piston rod; the anti-rotation guiding post slides in the anti-rotation guiding groove to provide anti-rotation and guiding functions for the main piston rod.
[0017] Due to the adoption of the above technical solution, the beneficial effects of the present invention compared with the prior art are:
[0018] The present invention adopts the principle of damping buffer, and uses the cooperation of a connecting air passage, a check valve, a buffer piston rod, a buffer chamber, a throttle chamber and a control chamber to generate a buffer force when the main piston moves upward, and the cooperation of the buffer piston rod, the buffer chamber and the throttle chamber to generate a buffer force when the main piston moves downward. And because there is oil in the buffer chamber and the control chamber, a damping buffer force will be generated, the buffer effect is good, and there will be no vibration, ensuring the safety of the entire valve during operation, and there will be no vibration and loud noise under special mechanisms. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] Figure 1 It is a schematic cross-sectional structure diagram of the main body of the present invention.
[0020] Figure 2 It is a schematic structure diagram inside the main body of the present invention.
[0021] Figure 3 It is a schematic structure diagram outside the main body of the present invention.
[0022] Figure 4 It is a schematic structure diagram of the buffer assembly of the present invention.
[0023] Figure 5 It is a schematic diagram of the structural principle of an ultra-high vacuum gate valve.
[0024] Reference numerals in the drawings: 1, cover plate; 2, main piston; 3, connecting air passage; 4, control upper chamber; 5, buffer piston rod; 6, control piston; 7, control lower chamber; 8, throttle shaft; 9, throttle chamber; 10, buffer chamber; 11, main body; 12, check valve; 13, buffer piston; 14, sealing ring; 15, upper air inlet and outlet; 16, lower air inlet and outlet; 17, anti-rotation guide groove; 18, piston rod; 19, anti-rotation guide post; 20, valve plate; 21, connecting rod. DETAILED DESCRIPTION OF THE INVENTION
[0025] The following further describes the specific embodiments of the present invention with reference to the drawings.
[0026] Embodiment: Refer to Figures 1 - 5 , a driving device with damping buffer for a valve, which is assembled on a valve cover or a valve body. The driving device includes a main body 11, a main piston 2 and a piston rod 18. A cover plate 1 is provided at the upper end of the main body 11. The main piston 2 is arranged inside the main body 11, and the main piston 2 divides the interior of the main body 11 into an upper chamber and a lower chamber. An upper air inlet and outlet 15 is opened on the side wall of the upper chamber, and a lower air inlet and outlet 16 is opened on the side wall of the lower chamber. The piston rod 18 is connected to the lower end surface of the main piston 2, and the lower part of the piston rod 18 passes through the lower end surface of the main body 11 through a mechanical seal structure.
[0027] The damping buffer device is arranged between the main piston 2 and the bottom inside the main body 11, and plays a buffering role in the movement of the main piston 2 in both directions.
[0028] The damping buffer device includes a communication component, which is arranged through the main piston 2.
[0029] The communication component includes a connecting air passage 3, which is arranged through the main piston 2.
[0030] A check valve 12 is assembled at the upper end of the connecting air passage 3.
[0031] The connecting air passage 3 connects the upper cavity and the lower cavity.
[0032] The one-way valve 12 allows gas to flow upward but not downward.
[0033] The damping and buffering device further includes a buffer piston rod 5 and a buffer assembly.
[0034] The buffer piston rod 5 is located below the main piston 2.
[0035] The upper end of the buffer piston rod 5 is provided with a sealing ring 14, and the upper end of the buffer piston rod 5 abuts against the lower end face of the main piston 2.
[0036] The buffer assembly is fixedly installed in the lower part of the main body 11, and the buffer piston rod 5 is inserted into one end of the buffer assembly.
[0037] When the buffer piston rod 5 moves inward in the buffer assembly, the buffer assembly generates a damping force that increases or decreases with the stroke of the buffer piston rod 5, enabling the buffer piston rod 5 to have a buffering movement process.
[0038] The buffer assembly includes a buffer chamber 10. The lower part of the buffer piston rod 5 extends into the buffer chamber 10, and a buffer piston 13 is installed at the lower part of the buffer piston rod 5.
[0039] The throttle chamber 9 is communicated with the lower end of the buffer chamber 10.
[0040] The control chamber is communicated with the other end of the throttle chamber 9. A control piston 6 is arranged in the control chamber, and the control piston 6 divides the control chamber into a control upper chamber 4 and a control lower chamber 7.
[0041] The lower part of the buffer chamber 10, the throttle chamber 9, and the control lower chamber 7 are communicated in sequence and filled with hydraulic oil inside.
[0042] The lower end of the buffer piston rod 5 located at the buffer piston 13 is a throttle shaft 8, and the cross-section of the throttle shaft 8 is trapezoidal or conical.
[0043] A sealing ring is arranged at the joint of the buffer piston 13 and the buffer chamber 10, and an air pressure balance hole is opened on the side wall of the buffer chamber 10.
[0044] One or more sealing rings are arranged between the control piston 6 and the control chamber.
[0045] An anti-rotation guide groove 17 is arranged inside the main body 11, and an anti-rotation guide post 19 is arranged on the piston rod 18. The anti-rotation guide post 19 slides in the anti-rotation guide groove 17 to provide anti-rotation and guiding functions for the main piston 2.
[0046] During assembly, the buffer piston rod and the throttling chamber are matched one by one. One control chamber can match a combination of multiple buffer piston rods and throttling chambers, or multiple control chambers can match one buffer piston rod and throttling chamber.
[0047] Valve closing process: The lower air inlet and outlet on the main body is in the exhaust throttling state, and the compressed air enters the upper chamber from the upper air inlet and outlet. The one-way valve on the main piston is closed to prevent the gas from entering the lower chamber. The main piston moves downward under the action of air pressure, and the lower part of the main piston pushes the buffer piston rod and the buffer piston to move downward synchronously. At the same time, the buffer piston squeezes the oil in the buffer chamber to flow to the lower chamber of the control piston, and the control piston in the control chamber is pushed upward by the oil. When the throttle shaft at the lower part of the buffer piston enters the throttle chamber, the slit between the throttle shaft and the throttle chamber gradually decreases to produce a throttling effect, forcing the buffer piston and the main piston to slow down. At this time, the valve plate 20 enters the locking process and is ready to cross the dead point of the connecting rod 21 in the closing direction. The main piston continues to move downward. After crossing the dead point of the connecting rod 21, the load decreases sharply. Since the oil in the buffer chamber cannot be compressed, the oil pressure in the buffer chamber increases sharply, thereby balancing the thrust of the main piston to prevent the main piston from accelerating, ensuring the smooth progress of the locking process until the valve enters a reliable locking state.
[0048] Valve opening process: the upper air inlet and outlet on the main body is in the exhaust throttling state, and the compressed air enters the lower chamber from the lower air inlet and outlet. At the same time, the control piston in the control chamber moves downward under the action of air pressure to squeeze the oil in the lower chamber to flow to the buffer chamber, pushing the buffer piston and the buffer piston rod to move upward. There is a sealing ring at the upper end of the buffer piston rod, which contacts the lower surface of the main piston, sealing the connecting airway and preventing the gas from flowing to the upper chamber of the main piston. Under the joint action of the buffer piston rod and the air pressure in the lower chamber, the main piston moves upward. At this time, the throttle shaft is in the throttle chamber with a throttling effect and the valve plate 20 is in the unlocking process, ready to cross the dead point of the connecting rod 21 in the opening direction. The main piston continues to move upward. After crossing the dead point of the connecting rod 21, the load decreases sharply. The main piston accelerates upward under the action of the high-pressure gas in the lower chamber, while the buffer piston still moves smoothly under the throttling effect. When the upward movement speed of the main piston is slightly faster than that of the buffer piston rod, the upper end face sealing ring of the buffer piston rod is separated from the connecting air passage at the bottom of the main piston, the seal fails, and the high-pressure gas in the lower chamber enters the upper chamber from the connecting air passage on the main piston through the one-way valve, causing the pressure in the upper chamber to rise rapidly. Since there is no piston rod in the upper chamber, its effective area is larger than that of the lower chamber, and the thrust is greater than that of the lower chamber under the same air pressure, forcing the main piston to slow down to restore the seal between the buffer piston rod and the main piston. In this way, the main piston moves smoothly under the regulation and control of the control piston to complete the valve plate unlocking process. Since the throttle shaft has a taper, with the end of the unlocking process, the gap between the throttle shaft and the throttle chamber gradually increases, and the upward movement speed of the main piston gradually increases until the throttle shaft completely separates from the throttle chamber and moves at a uniform speed until the valve is fully opened.
[0049] The present invention adopts the principle of damping buffering, and uses the cooperation of a communicating air passage, a one-way valve, a buffer piston rod, a buffer chamber, a throttle chamber and a control chamber to generate a buffering force when the main piston moves upward. The cooperation of the buffer piston rod, the buffer chamber and the throttle chamber generates a buffering force when the main piston moves downward. Moreover, since there is hydraulic oil in the buffer chamber and the control chamber, a damping buffering force will be generated, with good buffering effect and no vibration generated, ensuring the safety of the entire main body during operation and not generating vibration and loud noise under special mechanisms either.
[0050] The above are only the preferred specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope of the present invention, according to the technical solution and inventive concept of the present invention, making equivalent substitutions or changes, should be covered by the protection scope of the present invention.
Claims
1. A driving device with damping buffer for a valve, assembled on the valve; the driving device includes: A main body, with a cover plate provided at the upper end of the main body; A main piston, arranged inside the main body, and the main piston divides the interior of the main body into an upper chamber and a lower chamber; an upper air inlet / outlet is provided on the side wall of the upper chamber, and a lower air inlet / outlet is provided on the side wall of the lower chamber; A piston rod, connected to the lower end face of the main piston, and the lower part of the piston rod passes through the lower end face of the main body through a mechanical seal structure; Characterized in that A damping buffer mechanism, arranged between the main piston and the bottom inside the main body, including: A communication component, penetrating through the main piston; A buffer piston rod, with the upper end of the buffer piston rod located below the main piston; A buffer component, fixedly installed at the lower part inside the main body, and the buffer piston rod is inserted into one end of the buffer component; when the buffer piston rod moves inward in the buffer component, the buffer component will generate a damping force that increases or decreases with the stroke of the buffer piston rod, so that the buffer piston rod has a buffer movement process.
2. The drive device with damping buffer for a valve according to claim 1, characterized in that, The communication component includes: A communication air passage, penetrating through the main piston; A one-way valve, assembled at the upper end of the communication air passage; The communication air passage communicates the upper chamber and the lower chamber; the one-way valve allows gas to flow from bottom to top and does not allow gas to flow from top to bottom.
3. A driving device with damping buffer for a valve according to claim 2, characterized in that, A sealing ring is provided at the upper end of the buffer piston rod, and the upper end of the buffer piston rod abuts against the lower end face of the main piston.
4. A driving device with damping buffer for a valve according to claim 3, characterized in that, The buffer component includes: A buffer chamber, the lower part of the buffer piston rod extends into the buffer chamber, and a buffer piston is installed at the lower part of the buffer piston rod; A throttle chamber, communicating with the lower end of the buffer chamber; A control chamber, communicating with the other end of the throttle chamber; a control piston is arranged in the control chamber, and the control piston divides the control chamber into a control upper chamber and a control lower chamber; The lower part of the buffer chamber, the throttle chamber, and the control lower chamber are sequentially communicated and filled with hydraulic oil inside.
5. A driving device with damping buffer for a valve according to claim 4, characterized in that, The part of the buffer piston rod located below the buffer piston is a throttle shaft, and the cross section of the throttle shaft is trapezoidal or conical.
6. A driving device with damping buffer for a valve according to claim 5, characterized in that, A sealing ring is provided at the joint of the buffer piston rod and the buffer chamber, and an air pressure balance hole is provided on the side wall of the buffer chamber.
7. A driving device with damping buffer for a valve according to claim 6, characterized in that, One or more sealing rings are provided between the control piston and the control chamber.
8. A driving device with damping buffer for a valve according to claim 7, characterized in that, An anti-rotation guide groove is provided inside the main body, and an anti-rotation guide post is provided on the main piston rod. The anti-rotation guide post slides in the anti-rotation guide groove to provide anti-rotation and guiding functions for the main piston rod.