Multi-parameter testing device and testing method for micro-nano light-emitting device

Abstract

The invention belongs to the field of micro-nano light-emitting device parameter testing, and particularly relates to a micro-nano light-emitting device multi-parameter testing device and a micro-nano light-emitting device multi-parameter testing method. The micro-nano light-emitting device multi-parameter testing device comprises a sample table, a spatial light path system and a photoelectric detection assembly; the sample table is used for placing a micro-nano light-emitting device to be tested; the spatial light path system is used for collecting photoelectric signals emitted by a to-be-detected micro-nano light-emitting device on a sample table, the spatial light path system comprises a light incidence part, a polarization module and a plurality of light splitting modules which are sequentially arranged from bottom to top, and the light splitting modules are used for transmitting the corresponding light signals to the photoelectric detection assembly; the photoelectric detection assembly is used for collecting optical parameters and / or electrical parameters of the micro-nano light-emitting device to be tested. The spectrum, the light intensity, the electrical curve and the polarization characteristic can be tested at the same time, the testing method is simple, the speed is high, and the testing precision is high.

Description

Technical Field

[0001] The present invention belongs to the field of parameter testing of micro-nano light-emitting devices, and particularly relates to a multi-parameter testing device and testing method for micro-nano light-emitting devices. Background Art

[0002] Micro-nano light-emitting devices refer to devices measured in nanometer or micrometer order of magnitude. Micro-nano light-emitting devices have very important application values and broad application prospects in the fields of display, lighting, communication, biomedicine, environmental monitoring, laser-machining, etc. Micro-nano light-emitting devices are key components for manufacturing optoelectronic systems, and the performance of micro-nano light-emitting devices determines the quality of optoelectronic systems. Therefore, it is crucial to accurately and comprehensively measure the performance of micro-nano light-emitting devices, such as optical intensity, spectrum, polarization characteristics, optical image, and electrical characteristics under specific temperature / magnetic field conditions.

[0003] Currently, mainly the non-optical characteristics and / or optical characteristics of micro-nano light-emitting devices are characterized and studied. The non-optical characteristics are mainly detected by, for example, scanning probe measurement methods, scanning tunneling microscopes, atomic force microscopes, laser confocal scanning microscopes, digital holography technology, white light interference, etc., to detect the morphological characteristics of micro-nano light-emitting devices; the optical characteristics are mainly detected by a spectroscopy system. A typical spectroscopy system consists of a light source, a sample cell, a signal detection and processing unit, etc. However, this detection method can only perform single-parameter detection each time, resulting in a complex and slow measurement procedure. More importantly, many micro-nano light-emitting devices are not stable at the beginning of the experiment. Under multiple measurements, their performance decays severely, and there are large deviations in each parameter such as optical intensity, spectrum, and polarization characteristics obtained from multiple measurements under the same conditions, with low accuracy. Summary of the Invention

[0004] To improve the deficiencies of the prior art, the present invention provides a multi-parameter testing device and measurement method for micro-nano light-emitting devices, which can measure multiple parameters simultaneously.

[0005] In a first aspect, the present invention provides a multi-parameter testing device for micro-nano light-emitting devices, including a sample stage, a spatial optical path system, and a photoelectric detection component;

[0006] The sample stage is used to place the micro-nano light-emitting device to be tested;

[0007] The spatial optical path system is used to collect the photoelectric signals emitted by the micro-nano light-emitting device to be tested on the sample stage. The spatial optical path system includes a light incident component, a polarization module, and several beam splitting modules sequentially arranged from bottom to top. The beam splitting modules are used to transmit the corresponding optical signals to the photoelectric detection component;

[0008] The photoelectric detection component is used to collect the optical parameters and / or electrical parameters of the micro-nano light-emitting device to be tested.

[0009] According to an embodiment of the present invention, the photoelectric detection component includes at least two photomultiplier tubes, a first photomultiplier tube and a second photomultiplier tube. The first photomultiplier tube is arranged in the first transverse light splitting optical path near the bottom, and the second photomultiplier tube is arranged inside the sample stage, preferably embedded in the sample stage.

[0010] According to an embodiment of the present invention, the first photomultiplier tube and the second photomultiplier tube are connected to the circuit measurement unit through a circuit switching unit.

[0011] The photomultiplier tube is used to test the light intensity of the micro-nano light-emitting device to be tested. The selection of the photomultiplier tube is determined according to the light-emitting position of the sample: the first photomultiplier tube is selected for the top-emitting micro-nano device, and the second photomultiplier tube is selected for the bottom-emitting micro-nano device.

[0012] According to an embodiment of the present invention, the micro-nano light-emitting device to be tested includes various micro-nano electroluminescent devices based on materials selected from single-crystalline, polycrystalline, amorphous thin-film types.

[0013] According to an embodiment of the present invention, the light incident component is selected from components capable of collecting and transmitting light from the micro-nano light-emitting device sample to be tested, such as a transparent lens, preferably an objective lens. The magnification of the objective lens can be switched according to the sample size, such as different magnifications of 5×, 10×, 20×, 50×, 100×, etc.

[0014] According to an embodiment of the present invention, the photoelectric detection component includes one or more of a spectrometer, a photomultiplier tube, an imaging CCD, a semiconductor tester, an electrical probe, and a circuit measurement unit, and the number of each device is 1 or more, which is set according to actual needs.

[0015] According to an embodiment of the present invention, the electrical probe is connected to the circuit measurement unit.

[0016] According to an embodiment of the present invention, a coupling lens is arranged between the light splitting module and the corresponding photoelectric detection component, and the coupling lens is used to focus the light from the light splitting module to the corresponding photoelectric detection component.

[0017] According to an embodiment of the present invention, a first light splitting module is arranged between the first photomultiplier tube and the light incident component, and the first light splitting module is used to refract the light emitted from the micro-nano light emitter and transmit it into the first photomultiplier tube; a second light splitting module is arranged between the spectrometer and the light incident component, and the second light splitting module is used to refract the light emitted from the micro-nano light emitter and transmit it into the optical fiber.

[0018] According to an embodiment of the present invention, a coupling lens is disposed between the first photomultiplier tube and the first spectroscopic module. The coupling lens is used to focus the parallel light from the first spectroscopic module onto the first photomultiplier tube, and the principal focus of the coupling lens is located at the light inlet of the first photomultiplier tube.

[0019] According to an embodiment of the present invention, an eyepiece is disposed at the bottom of the imaging CCD. The light from the micro-nano light-emitting device to be measured passes through the light incident component, the polarization module, the first spectroscopic module, and the second spectroscopic module and is coupled at the eyepiece. The principal focus of the eyepiece coupling is located at the light inlet of the imaging CCD.

[0020] According to an embodiment of the present invention, a coupling lens and an optical fiber are disposed between the spectrometer and the second spectroscopic module. One end of the optical fiber is located at the principal focus of the coupling lens, and the other end is connected to the spectrometer.

[0021] According to an embodiment of the present invention, the optical fiber is a bifurcated optical fiber. One bifurcated end of the bifurcated optical fiber is connected to the spectrometer, and the other bifurcated end is connected to the alignment light source.

[0022] According to an embodiment of the present invention, the spectrometer is used to test the spectral information of the sample, and the spectral information includes electro-luminescence spectrum and photo-luminescence spectrum.

[0023] According to an embodiment of the present invention, the alignment light source is used to assist in adjusting the position of the optical fiber to achieve lens coupling of the optical fiber.

[0024] According to an embodiment of the present invention, a first angle adjustment mechanism is disposed at the corresponding position of the spatial optical path system to the spectroscopic module. The first angle adjustment mechanism is used to adjust the angle of the spectroscopic module relative to the incident component, and change the light intensity of the spectroscopic module incident on the photoelectric detection component.

[0025] According to an embodiment of the present invention, the first spectroscopic module can be cut out of the optical path through the first angle mechanism to achieve the function of closing the light intensity test signal to protect the first photomultiplier tube.

[0026] According to an embodiment of the present invention, the second spectroscopic module can be switched from a semi-reflective mirror to a total-reflective mirror through the first angle mechanism to achieve the function of enhancing the spectral test signal.

[0027] According to an embodiment of the present invention, a second angle adjustment mechanism is disposed at the corresponding position of the spatial optical path system to the polarization module. The second angle adjustment mechanism is used to adjust the angle of the polarization module in the horizontal direction, and the adjusted angle is 0 to 360°.

[0028] According to an embodiment of the present invention, the optoelectronic detection component is connected to the information reading component, and the information reading component is selected from devices that can be connected to the optoelectronic detection component and read the test data of the optoelectronic detection component. The information reading component is selected from devices such as computers, mobile phones, and engineering machines.

[0029] According to an embodiment of the present invention, the connection between the tester and the information reading component includes wired connection and / or wireless connection, and the wireless connection includes WiFi and Bluetooth.

[0030] According to an embodiment of the present invention, the spatial optical path system further includes a housing, and the light incident component, the polarization module, and several beam splitting modules are arranged inside the housing. Preferably, the coupling lens is located inside the housing.

[0031] According to an embodiment of the present invention, the imaging CCD, the spectrometer, and the photomultiplier tube are located inside or outside the housing.

[0032] According to an embodiment of the present invention, the test device further includes an excitation power source for exciting the micro-nano light-emitting device to be tested to emit light.

[0033] According to an embodiment of the present invention, the excitation power source is selected from a DC power source or an AC power source.

[0034] According to an embodiment of the present invention, the device further includes a magnetic field adjustment component for changing the magnetic field intensity of the sample to be detected on the sample stage. Preferably, the magnetic field adjustment component includes controllable magnetic fields distributed above and below the sample stage, or controllable magnetic fields distributed on both sides of the sample stage, and the two sides are arranged opposite to each other.

[0035] According to an embodiment of the present invention, the device further includes a temperature condition component for changing the temperature of the sample to be detected on the sample stage.

[0036] According to an embodiment of the present invention, the magnetic field adjustment component and the temperature control component are arranged in a sealed cavity, and quartz glass windows are provided above and below the sealed chamber for convenient optical measurement.

[0037] In a second aspect, the present invention also provides a method for testing the performance of a micro-nano light-emitting device using the above test device, including the following steps:

[0038] Place the micro-nano light-emitting device to be tested in a sample cell and fix it, and excite the micro-nano light-emitting device to be tested to perform electroluminescence, and the optoelectronic detection component collects corresponding optical parameters.

[0039] Beneficial effects

[0040] The test device of the present invention can simultaneously test the spectrum, light intensity, electrical curve, and polarization characteristics. The test method is simple, fast, and has high test accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] Figure 1 It is a schematic structural diagram of the multi-parameter test device for micro-nano light-emitting devices in the present invention;

[0042] Figure 2 It is a schematic diagram of the end face of the optical Y-shaped optical fiber in the present invention;

[0043] Figure 3 It is the optical image obtained by the test equipment in Example 1;

[0044] Figure 4 It is the transfer curve measured by the test equipment in Example 1;

[0045] Figure 5 It is the output curve measured by the test equipment in Example 1;

[0046] Figure 6 It is the luminance curve measured by the test equipment in Example 1;

[0047] Figure 7 It is the spectral curve measured by the test equipment in Example 1;

[0048] Figure 8 It is the polarization spectral curve measured by the test equipment in Example 1;

[0049] Figure 9 It is the polarization luminance curve measured by the test equipment in Example 1.

[0050] Among them, 1 - sample stage, 2 - spatial optical path system, 3 - imaging CCD, 4 - spectrometer, 5 - alignment light source, 6 - optical fiber, 61 - detection optical fiber part, 62 - calibration optical fiber part, 7 - first photomultiplier tube, 8 - circuit switching unit, 9 - circuit measurement unit, 10 - electrical probe, 11 - second photomultiplier tube, 12 - micro-nano light-emitting device to be tested, 13 - light incident component, 14 - polarization module, 15 - first beam splitting module, 16 - second beam splitting module, 17 - coupling lens, 18 - eyepiece, 20 - electromagnetic coil, 21 - sealed chamber, 22 - quartz glass window. DETAILED DESCRIPTION OF THE INVENTION

[0051] The following will further elaborate on the device of the present invention, its preparation method, and application in combination with specific embodiments. It should be understood that the following embodiments are only for exemplarily illustrating and explaining the present invention, and should not be construed as limiting the protection scope of the present invention. All technologies implemented based on the above content of the present invention are covered within the scope of protection intended by the present invention.

[0052] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention.

[0053] In the description of the present invention, it should be noted that unless otherwise clearly specified and defined, the terms "mounted", "connected", and "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0054] Embodiment 1

[0055] A multi-parameter testing device for micro-nano light-emitting devices, comprising a sample stage 1, a spatial optical path system 2, and a photoelectric detection component; the sample stage 1 is used to place the micro-nano light-emitting device 12 to be tested, the spatial optical path system 2 is used to collect the photoelectric signals emitted by the micro-nano light-emitting device 12 on the sample stage 1 and transmit them to the photoelectric detection component. The spatial optical path system 2 includes a light incident component 13, a polarization module 14, and several spectroscopic modules arranged in sequence from bottom to top. Different spectroscopic modules correspond to different photoelectric detection components. The spectroscopic module is used to transmit the optical signal to the corresponding photoelectric detection component. The photoelectric detection component includes several detection devices for collecting the optical parameters of the micro-nano light-emitting device to be tested.

[0056] The photoelectric detection component is used to test the light intensity of the micro-nano light-emitting device to be tested. The selection of the photomultiplier tube is determined according to the light-emitting position of the sample: it includes at least a top light-emitting acquisition device and a bottom light-emitting acquisition device. The top light-emitting acquisition device is, for example, the first photomultiplier tube 7, and the first photomultiplier tube 7 is arranged at an arbitrary position. The bottom light-emitting acquisition device is, for example, the second photomultiplier tube 11, and the second photomultiplier tube 11 is arranged below the micro-nano light-emitting device 12 to be tested. The corresponding position between the micro-nano light-emitting device 12 to be tested and the bottom light-emitting acquisition device 11 is a transparent structure or a hollow structure. The second photomultiplier tube is detachably connected to the inside of the sample stage 1 or embedded in the sample stage 1.

[0057] The structure and form of the micro-nano light-emitting device 12 to be tested can be various, including but not limited to various micro-nano electroluminescent devices based on thin film materials selected from single crystal type, polycrystal type, or amorphous type.

[0058] In this embodiment, the optoelectronic detection components are selected from one or more of a spectrometer 4, a first photomultiplier tube 7, a second photomultiplier tube 11, an imaging CCD 3, a semiconductor tester, an electrical probe 10, and a circuit detection unit 9, and the number of each device is 1 or more, which is set according to actual needs. The electrical probe 10, the first photomultiplier tube 7, and the second photomultiplier tube 11 are connected to the circuit detection unit 9, and the first photomultiplier tube 7 and the second photomultiplier tube 11 are connected to the circuit detection unit 9 through a circuit switching unit 8.

[0059] A first beam splitting module 15 is provided between the first photomultiplier tube 7 and the light incident component 13, and a second beam splitting module 16 is provided between the spectrometer 4 and the light incident component 13.

[0060] Among them, a coupling lens 17 is provided between the first photomultiplier tube 7 and the first beam splitting module 15. The coupling lens 17 is used to focus the parallel light from the first beam splitting module 15 onto the first photomultiplier tube 7, and the main focus coupled by the coupling lens 17 is located at the light entrance of the first photomultiplier tube 7.

[0061] An eyepiece 18 is provided at the bottom of the imaging CCD 3. The light from the micro-nano light-emitting device 12 to be measured passes through the light incident component 13, the polarization module 14, the first beam splitting module 15, and the second beam splitting module 16 and then is coupled at the eyepiece 18. The main focus coupled by the eyepiece 18 is located at the light entrance of the imaging CCD 3.

[0062] The spectrometer 4 is used to test the spectral information of the micro-nano light-emitting device 12 to be measured. The spectral information includes electroluminescence spectrum and photoluminescence spectrum. A coupling lens 17 and an optical fiber 6 are provided between the spectrometer 4 and the second beam splitting module 16. The second beam splitting module 16 is provided at a position corresponding to the optical fiber 6. The second beam splitting module 16 is used to refract the light emitted by the micro-nano light-emitting device 12 to be measured and transmit it into the optical fiber 6.

[0063] The optical fiber 6 is a bifurcated optical fiber, such as a Y-shaped optical fiber. One end of the Y-shaped optical fiber is located at the main focus of the coupling lens. One of the bifurcated ends is connected to the spectrometer, and the other bifurcated end is connected to the alignment light source 5. The alignment light source 5 is used to assist in adjusting the position of the optical fiber 6 to achieve lens coupling of the optical fiber 6.

[0064] In this embodiment, the Y-shaped optical fiber is a concentric optical fiber, which is composed of a middle detection optical fiber part 61 and a surrounding calibration optical fiber 62. The detection optical fiber part 61 is connected to the spectrometer, and the calibration optical fiber part 62 is connected to the alignment light source.

[0065] To meet the requirements of different detection devices for light, in this embodiment, first angle adjustment mechanisms are provided at positions corresponding to the first beam splitting module 15 and the second beam splitting module 16 on the spatial optical path system 2. The first angle adjustment mechanism is used to adjust the angles of the corresponding first beam splitting module 15 and the second beam splitting module 16 relative to the light incident component 13, and change the light intensity of the beam splitting module entering the light detection device.

[0066] For example, the first beam splitting module 15 and the second beam splitting module 16 can be adjusted by the first angle adjustment mechanism. For example, the angle of the first beam splitting module 15 corresponding to the first photomultiplier tube 7 can be adjusted so that the mirror surface faces downward to turn off the light intensity test signal and protect the first photomultiplier tube 7; or the second beam splitting module 16 corresponding to the spectrometer 4 can be adjusted to the vertical direction, switched from a semi-reflective mirror to a fully reflective mirror, to achieve the function of enhancing the spectral test signal.

[0067] To test the polarization data at different angles, in this embodiment, a second angle adjustment mechanism is provided at a position corresponding to the polarization module 14 on the spatial optical path system 2. The second angle adjustment mechanism is used to adjust the angle of the polarization module 14 in the horizontal direction, and the adjusted angle is 0 to 360°.

[0068] The light incident component 13 is selected from components that can collect and transmit light from the micro-nano light-emitting device 12 to be measured and convert it into parallel light, such as a transparent lens, preferably an objective lens. The magnification of the objective lens can be switched according to the sample size, such as different magnifications of 5×, 10×, 20×, 50×, 100×, etc.; the first beam splitting module 15 and the second beam splitting module 16 are, for example, beam splitters.

[0069] The spatial optical path system 2 further includes a housing. The light incident component 13, the polarization module 14, the first beam splitting module 15, and the second beam splitting module 16 are arranged inside the housing. The coupling lens 17 is located inside the housing, and the imaging CCD 3, the spectrometer 4, and the first photomultiplier tube 7 are located inside or outside the housing.

[0070] The photoelectric detection component is connected to the information reading component. The information reading component is selected from devices that can be connected to the photoelectric detection component and read the test data of the photoelectric detection component. The information reading component is selected from devices such as a computer, a mobile phone, and an engineering machine; the connection between the photoelectric detection component and the information reading component includes wired connection and / or wireless connection, and the wireless connection includes WiFi and Bluetooth.

[0071] The testing device further includes a magnetic field adjustment component and a temperature adjustment component placed in the sealed chamber 21. The magnetic field adjustment component is used to change the magnetic field intensity of the sample to be detected on the detection stage. The magnetic field adjustment component can control the magnetic field environment of the sample. Preferably, two electromagnetic coils 20 can be located on the left and right or above and below the sample. The temperature adjustment component is used to change the temperature of the sample to be detected on the detection stage. When refrigeration operation is required, a refrigeration gas needs to be injected into the sealed chamber 21.

[0072] Embodiment 2

[0073] In this embodiment, the micro-nano light-emitting device 12 to be tested is an organic, inorganic, or perovskite light-emitting device with a size of less than 5 mm. This device can be an electroluminescent device, a photoluminescent device, or a light-emitting device with other mechanisms, such as a light-emitting transistor, a light-emitting diode, etc.

[0074] A method for testing the performance of a micro-nano light-emitting device using the above testing device includes the following steps:

[0075] Place the micro-nano light-emitting device 12 to be tested in the field of view of the imaging CCD 3 on the sample stage 1. Select an appropriate objective magnification by observing the image in the imaging CCD 3 and adjust the position of the micro-nano light-emitting device 12 to make it at the center of the field of view of the imaging CCD 3. At this time, the off-state optical photo of the micro-nano light-emitting device 12 can be directly obtained through the imaging CCD 3.

[0076] Turn on the alignment light source 5. The outer optical fiber of the Y-shaped optical fiber 6 forms a ring pattern on the micro-nano light-emitting device 12 to be tested. Further adjust the position of the micro-nano light-emitting device 12 to make the light-emitting area of the micro-nano light-emitting device 12 inside the ring pattern, and then turn off the alignment light source after adjustment.

[0077] Adjust the probe arm of the electrical probe 10 to make the probe connected to the semiconductor tester contact the electrodes on the micro-nano light-emitting device 12. Depending on the type of the micro-nano light-emitting device 12, the number of electrodes ranges from 2 to 5.

[0078] By setting the semiconductor tester, apply an appropriate voltage to the sample. The semiconductor tester can directly measure the electrical curve (the relationship between voltage and current) of the device. In addition, a part of the light signal emitted by the sample enters the first photomultiplier tube and is converted into a current signal, and its light intensity information is obtained through the reading of the semiconductor tester 9. Another part enters the spectrometer 4 through the spatial optical path and the central main optical fiber 20 of the Y-shaped optical fiber to obtain its spectral information. During the process of the device being lit, the on-state optical photo of the micro-nano light-emitting device 1 can be obtained through the imaging CCD 3.

[0079] By rotating the polarizer 14, the spectral and light intensity information of the outgoing light in different polarization directions can be obtained.

[0080] By attaching a temperature control component, optical photos, electrical curves, spectra, and light intensity information of the device at different temperatures can be obtained.

[0081] By attaching a magnetic field control component, optical photos, electrical curves, spectra, and light intensity information of the device at different magnetic fields can be obtained.

[0082] See Figure 3 As shown, it is the optical pattern of the micro-nano light-emitting device 12 to be tested in this embodiment. It can be seen from the figure that for devices ranging from dozens of nanometers to hundreds of nanometers, this device can clearly display them.

[0083] See Figure 4 As shown, it is the transfer curve graph of the micro-nano light-emitting device 12 to be tested in this embodiment. It can be seen from the figure that by applying a fixed source-drain voltage and scanning the gate voltage, a complete and continuous electrical transfer curve can be obtained.

[0084] See Figure 5 As shown, it is the output curve graph of the micro-nano light-emitting device 12 to be tested in this embodiment. It can be seen from the figure that by applying a fixed gate voltage and scanning the source-drain voltage, a complete and continuous electrical output curve graph can be obtained.

[0085] See Figure 6 As shown, it is the brightness curve graph of the micro-nano light-emitting device 12 to be tested in this embodiment. It can be seen from the figure that while obtaining the electrical curve graph, this embodiment can also obtain the corresponding optical brightness curve graph.

[0086] See Figure 7 As shown, it is the spectral curve graph of the micro-nano light-emitting device 12 to be tested in this embodiment. It can be seen from the figure that this device can obtain a complete and continuous relative spectral curve in the range of 400 - 700 nanometers.

[0087] See Figure 8 As shown, it is the polarization spectral curve graph of the micro-nano light-emitting device 12 to be tested in this embodiment. It can be seen from the figure that this device can measure the spectra of polarized light sources obtained at different analyzer angles.

[0088] See Figure 9 As shown, it is the polarization brightness curve graph of the micro-nano light-emitting device 12 to be tested in this embodiment. It can be seen from the figure that this device can measure the brightness values obtained at different polarizer angles and fully evaluate the polarization characteristics of the polarized light source.

[0089] The specific implementation manners of the present invention have been exemplarily described above through embodiments. However, the protection scope of the present invention is not limited to the above exemplary implementation manners. Any modifications, equivalent replacements, improvements, etc. made by those skilled in the art within the spirit and principle of the present invention shall be included within the protection scope of the claims of the present invention.

Claims

1. A multi-parameter testing device for micro-nano light-emitting devices, characterized in that, It includes a sample stage, a spatial optical path system, and a photoelectric detection component; The sample stage is used to place the micro-nano light-emitting device to be tested; The spatial optical path system is used to collect the photoelectric signals emitted by the micro-nano light-emitting device to be tested on the sample stage. The spatial optical path system includes a light incident component, a polarization module, and several spectroscopic modules arranged sequentially from bottom to top. The spectroscopic module is used to transmit the corresponding optical signals to the photoelectric detection component; The photoelectric detection component is used to collect the optical parameters and / or electrical parameters of the micro-nano light-emitting device to be tested.

2. The multi-parameter testing device for micro-nano light-emitting devices according to claim 1, wherein The photoelectric detection component includes at least two photomultiplier tubes, a first photomultiplier tube and a second photomultiplier tube. The first photomultiplier tube is arranged in the first lateral spectroscopic optical path near the bottom, and the second photomultiplier tube is arranged inside the sample stage. The first photomultiplier tube and the second photomultiplier tube are connected to the circuit measurement unit through a circuit switching unit. Preferably, the light incident component is selected from the components capable of collecting and transmitting the light from the micro-nano light-emitting device sample to be tested.

3. The multi-parameter testing device for micro-nano light-emitting devices according to claim 2, wherein A first spectroscopic module is arranged between the first photomultiplier tube and the light incident component. The first spectroscopic module is used to refract the light emitted by the micro-nano light-emitting device and transmit it into the first photomultiplier tube; A second spectroscopic module is arranged between the spectrometer and the light incident component. The second spectroscopic module is used to refract the light emitted by the micro-nano light-emitting device and transmit it into the optical fiber. Preferably, a coupling lens is arranged between the first photomultiplier tube and the first spectroscopic module. The coupling lens is used to focus the parallel light from the first spectroscopic module onto the first photomultiplier tube. The main focus coupled by the coupling lens is located at the light entrance of the first photomultiplier tube.

4. The multi-parameter testing device for micro-nano light-emitting devices according to any one of claims 1 to 3, characterized in that The photoelectric detection component includes one or more of a spectrometer, a photomultiplier tube, an imaging CCD, a semiconductor tester, an electrical probe, and a circuit measurement unit. The electrical probe is connected to the circuit measurement unit.

5. The multi-parameter testing device for micro-nano light-emitting devices according to any one of claims 1 to 3, characterized in that, A coupling lens is arranged between the spectroscopic module and the corresponding photoelectric detection component. The coupling lens is used to focus the light from the spectroscopic module onto the corresponding photoelectric detection component. Preferably, an eyepiece is arranged at the bottom of the imaging CCD. The light from the micro-nano light-emitting device to be tested passes through the light incident component, the polarization module, the first spectroscopic module, and the second spectroscopic module and then is coupled at the eyepiece. The main focus coupled by the eyepiece is located at the light entrance of the imaging CCD.

6. The multi-parameter testing device for micro-nano light-emitting devices according to any one of claims 1-3, characterized in that, A first angle adjustment mechanism is arranged at the position corresponding to the spectroscopic module on the spatial optical path system. The first angle adjustment mechanism is used to adjust the angle of the spectroscopic module relative to the incident component and change the light intensity of the spectroscopic module incident on the photoelectric detection component. Preferably, the first spectroscopic module can be cut out of the optical path through the first angle mechanism to realize the function of closing the light intensity test signal to protect the first photomultiplier tube. Preferably, the second spectroscopic module can be switched from a semi-reflecting mirror to a full-reflecting mirror through the first angle mechanism to realize the function of enhancing the spectral test signal.

7. The multi-parameter testing device for micro-nano light-emitting devices according to any one of claims 1-3, characterized in that, A second angle adjustment mechanism is provided at the corresponding position of the spatial optical path system with respect to the polarization module. The second angle adjustment mechanism is used to adjust the angle of the polarization module in the horizontal direction, and the adjusted angle is 0 to 360°.

8. The multi-parameter testing device for micro-nano light-emitting devices according to any one of claims 1-3, characterized in that, The photoelectric detection component is connected to the information reading component, and the information reading component is selected from devices that can be connected to the photoelectric detection component and read the test data of the photoelectric detection component.

9. The multi-parameter testing device for micro-nano light-emitting devices according to any one of claims 1-3, characterized in that, The device further includes a magnetic field adjustment component, and the magnetic field adjustment component is used to change the magnetic field strength of the sample to be detected on the sample stage. Preferably, the device further includes a temperature condition component, and the temperature adjustment component is used to change the temperature of the sample to be detected on the sample stage.

10. A method for testing the performance of a micro-nano light-emitting device using the above test device, characterized in that, It includes the following steps: Place the micro-nano light-emitting device to be tested in the sample pool of the multi-parameter test device for micro-nano light-emitting devices according to any one of claims 1-9 and fix it. Excite the micro-nano light-emitting device to be tested to perform electroluminescence, and the photoelectric detection component collects the corresponding optical parameters.

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