Aerostatic motion platform and control method

Abstract

The application provides a kind of aerostatic movement platform and control method, platform includes: bottom plate, guide rail, gas float plate, drive device, aerostatic rotary table, throttler, sensor and gas control valve;Guide rail is fixedly installed on bottom plate, gas float plate is slidably arranged in guide rail;Drive device is arranged between guide rail and gas float plate, and is drivingly connected with gas float plate;Throttler is arranged in gas float plate, gas float plate is provided with air inlet hole, throttler is connected with air inlet hole, and multiple gas control valves are connected with multiple air inlet holes;Aerostatic rotary table is installed on gas float plate;Gas control valve is connected with numerical control system, when sensor detects that aerostatic movement platform is offset, numerical control system adjusts the gas pressure of gas control valve according to the feedback signal of sensor, controls the gas film pressure between gas float plate and guide rail, and then drives throttler to move, realizes the accurate adjustment of the position and attitude of gas float plate.

Description

Technical Field

[0001] This invention relates to the field of ultra-precision measurement and machining technology, and in particular to a gas static pressure motion platform and control method. Background Technology

[0002] Gas hydrostatic guideways and rotary tables, using gas as the supporting medium, feature low friction coefficient, no wear, no need for lubrication, and high precision, and are widely used in semiconductors, precision measurement, and ultra-precision machining. However, compared to liquid hydrostatic or rolling guideways and rotary tables, gas hydrostatic guideways and rotary tables have lower rigidity, and their positional accuracy is easily affected by cutting forces and workpiece weight, limiting their application in the machining of medium to large workpieces, especially in the machine tool industry where effective promotion is difficult. With the increasing demands for machining accuracy in the machine tool industry, particularly the grinding machine industry, the demand for guideway and rotary table combinations is growing. However, commonly used rolling guideways and rotary tables cannot meet high-precision requirements, while liquid hydrostatic guideways and rotary tables face challenges such as the difficulty in designing and manufacturing throttle devices and the complexity of lubrication treatment.

[0003] Therefore, the combination of gas static pressure guideways and rotary tables has potential advantages in equipment such as vertical grinders and vertical lathes. However, in practical applications, the problem of workpiece asymmetry and off-center loading caused by cutting forces is particularly prominent. For example, in vertical grinders, due to the need to install a grinding wheel dressing mechanism, the rotary table is usually not centered, which inherently leads to off-center loading. After the workpiece is fixed, the off-center loading problem is further aggravated. In addition, because gas static pressure guideways and rotary tables have relatively low rigidity, the positional offset is even greater under off-center loading conditions, which seriously affects machining accuracy. Summary of the Invention

[0004] The present invention aims to solve the technical problem that gas static pressure guide rails are prone to deviation due to the weight of the workpiece and the processing load during operation.

[0005] To address the aforementioned problems, this invention provides a gas static pressure motion platform, comprising: a base plate, a guide rail, an air-floating slide, a drive device, a gas static pressure turntable, a throttle valve, a sensor, and gas control valves; the guide rail is fixedly mounted on the base plate, and the air-floating slide is slidably mounted on the guide rail; the drive device is positioned between the guide rail and the air-floating slide and is drively connected to the air-floating slide; the throttle valve is positioned on the air-floating slide to form a pressure-bearing gas film and adjust the position and attitude of the air-floating slide; the air-floating slide has multiple air inlets, the throttle valve is connected to the air inlets, and multiple gas control valves are connected to the multiple air inlets; the gas static pressure turntable is mounted on the air-floating slide; the gas control valves are connected to a CNC system, and the sensor is used to detect the offset of the gas static pressure motion platform in real time and feed the detection signal back to the CNC system; When the workpiece is placed on the gas static pressure motion platform for processing, when the sensor detects that the gas static pressure motion platform has shifted, the CNC system, based on the feedback signal from the sensor, controls the air film pressure between the air float and the guide rail by adjusting the gas pressure of the gas control valve, thereby driving the throttle to move, so as to achieve precise adjustment of the position and attitude of the air float.

[0006] The technical effects achieved by adopting this solution are as follows: By setting a throttle on the air-floating slide and opening an air inlet on the air-floating slide, the throttle is connected to the air inlet. At the same time, multiple gas control valves are connected to multiple air inlets. The gas control valves are connected to the CNC system. When the sensor detects that the platform has shifted, the CNC system adjusts the gas pressure of each gas control valve according to the feedback signal, adjusts the local air pressure and support force of the air-floating slide, and can drive the throttle to move. The position and attitude of the air-floating slide can be precisely adjusted, thereby solving the technical problem that the air-floating slide is easily shifted by the weight of the workpiece and the processing load when running on the gas static pressure guide rail.

[0007] Optional, the air flotation chute includes: The air flotation upper slide is equipped with multiple upper throttles for adjusting the vertical position and attitude of the air flotation slide; and / or The air-float side slide is equipped with multiple side throttles for adjusting its lateral position and attitude; and / or The air-float lower slide is equipped with multiple lower throttles to improve the rigidity of the guide rail and to adjust the position and attitude of the air-float slide in the vertical direction.

[0008] The technical effects achieved by adopting this solution are as follows: By equipping the upper air-bearing slide with multiple upper throttles, the side air-bearing slide with multiple side throttles, and the lower air-bearing slide with multiple lower throttles, it is possible to achieve all-round and precise adjustment of the vertical and lateral position and attitude of the air-bearing slide. This multi-dimensional adjustment capability significantly improves the flexibility and adaptability of the gas static pressure motion platform, enabling it to better cope with complex working conditions and high-precision requirements. At the same time, this design can effectively reduce the impact of uneven load distribution or dynamic changes during processing on the platform attitude, further improving the stability and processing accuracy of the platform, and providing reliable support for high-precision manufacturing and measurement.

[0009] Optional, the sensor includes: Electronic level sensor for detecting the horizontal state of the working surface of a gas static pressure motion platform; and / or Displacement sensors are used to detect the displacement of a gas static pressure motion platform after it is subjected to force; and / or Pressure sensors are used to detect the weight of workpieces being processed.

[0010] The technical effects achieved by adopting this solution are as follows: the electronic level sensor can detect the level of the platform's working surface in real time, ensuring the stability of the processing or measurement process; the displacement sensor is used to monitor the displacement of the platform after being subjected to force, and can provide timely feedback on the dynamic changes of the platform; the pressure sensor provides load information to the platform by detecting the weight of the workpiece being processed. By using electronic level sensors, displacement sensors, and pressure sensors, the gas static pressure motion platform can achieve multi-dimensional high-precision monitoring and control.

[0011] Optionally, the drive unit includes a mover adjustment plate, a motor, and a pad. The mover adjustment plate is located between the motor and the air flotation plate, and the pad is located between the motor and the guide rail.

[0012] The technical effects achieved by adopting this technical solution are as follows: The drive device, through the coordinated action of the mover adjustment plate, motor and pad, ensures the gap and installation accuracy between the motor and the guide rail body, thereby ensuring the normal operation and motion accuracy of the linear motor, realizing the precise adjustment of the motor height, and thus optimizing the air film pressure distribution between the air flotation plate and the guide rail.

[0013] Optionally, baffles are provided at both ends of the guide rail in the direction of guide rail movement.

[0014] The technical effects achieved by adopting this technical solution are as follows: baffles are set at both ends of the guide rail in the direction of movement, which effectively limits the movement range of the air flotation plate and prevents it from detaching from the guide rail due to overtravel or accidental impact. The baffles not only improve the safety and reliability of the gas static pressure motion platform, but also reduce damage caused by collisions, extend service life, and ensure the stable operation of the gas static pressure motion platform in high-precision machining and measurement.

[0015] Optionally, the baffle is equipped with anti-collision blocks.

[0016] The technical effect achieved by adopting this technical solution is as follows: the anti-collision blocks set on the baffle reduce the impact force of collisions on the guide rail, air flotation slide and drive device through the buffering effect.

[0017] Optionally, a grating ruler is provided on one side of the air flotation slide parallel to the direction of movement of the guide rail.

[0018] The technical effect achieved by adopting this technical solution is that a grating ruler is set on one side of the air flotation slide in the direction of parallel guide rail movement, which can detect the position and movement status of the air flotation slide in real time with high precision.

[0019] Optionally, the base plate is fixedly provided with a grating ruler probe mounting seat, and the grating ruler probe is located in the grating ruler probe mounting seat.

[0020] The technical effects achieved by adopting this technical solution are as follows: The mounting base of the grating ruler probe, which is fixed on the base plate, provides a stable and reliable installation reference for the grating ruler probe, ensuring the relative positional accuracy between the probe and the grating ruler. This design effectively reduces measurement errors caused by vibration and improves the detection accuracy and stability of the grating ruler.

[0021] This invention also provides a gas static pressure motion platform control method, which is applied to the gas static pressure motion platform of any of the above-mentioned technical solutions. The gas static pressure motion platform control method includes: The gas static pressure motion platform is divided into four quadrants with the center of the air flotation plate as the origin, and each quadrant is further subdivided into at least one area. Each area is connected to a gas control valve to control the gas pressure of its own area independently. When the workpiece is placed on the gas static pressure motion platform, the sensor signal transmits the gravity of the workpiece and calculates the support force of each area and the adjustment amount of the air pressure in each area. Based on the adjustment amount of the air pressure in each area, the CNC system controls the gas control valve to control the air intake pressure in each area; The CNC system determines whether the air flotation slide is properly adjusted based on the output signals of the sensors.

[0022] The technical effects achieved by adopting this technical solution are as follows: This application adopts a zoned control method, which divides the gas static pressure motion platform into multiple control zones. Each zone independently controls its own air pressure. Combined with sensor feedback and precise calculations by the CNC system, the air pressure distribution of each zone can be dynamically adjusted to compensate for the offset caused by the workpiece gravity and processing load in real time.

[0023] Optionally, the control method for the gas static pressure motion platform also includes: If the air flotation slide is properly adjusted and the load-bearing coefficient is accurate; If the air flotation chute is not properly adjusted, the load-bearing coefficient needs to be corrected.

[0024] The technical effects achieved by adopting this solution are as follows: when the air-floating slide is adjusted to the correct position, the load-bearing coefficient is accurate, ensuring the balance of the platform under load conditions; if it is not adjusted to the correct position, the load-bearing coefficient is corrected, and the air pressure distribution in each area is recalculated and adjusted, thereby achieving rapid and accurate compensation for the position and attitude of the air-floating slide. Attached Figure Description

[0025] Figure 1 This is a schematic diagram of the internal structure of the gas static pressure motion platform provided in the embodiments of this application; Figure 2 This is a schematic diagram of the structure of the air flotation slide provided in the embodiments of this application; Figure 3One of the schematic diagrams showing the cooperation relationship between the air flotation slide, guide rail and drive device provided in the embodiments of this application; Figure 4 This is the second schematic diagram showing the cooperation relationship between the air flotation slide, guide rail and drive device provided in the embodiments of this application; Figure 5 One of the schematic diagrams of the external structure of the gas static pressure motion platform provided in the embodiments of this application; Figure 6 A second schematic diagram of the external structure of the gas static pressure motion platform provided in the embodiments of this application; Figure 7 The third schematic diagram of the external structure of the gas static pressure motion platform provided in the embodiments of this application; Figure 8 This is a flowchart of the gas static pressure motion platform control method provided in the embodiments of this application; Figure 9 This is a schematic diagram of the area division of the gas static pressure motion platform provided in the embodiments of this application; Figure 10 A flowchart illustrating the control process of the gas static pressure motion platform and CNC system provided in the embodiments of this application.

[0026] Explanation of reference numerals in the attached figures: 1-Base plate; 11-Raster ruler; 12-Raster ruler probe mounting base; 13-Drag chain mounting plate; 14-Drag chain; 2-Guide rail; 21-Baffle; 22-Anti-collision block; 3-Air flotation slide; 31-Air flotation upper slide; 32-Air flotation side slide; 33-Air flotation lower slide; 34-Upper throttle; 35-Side throttle; 36-Lower throttle; 37-Air pipe connector; 4-Drive device; 41-Motor adjustment plate; 42-Motor; 43-Padded plate; 44-Positioning plate; 5 - Gas static pressure turntable; 51- Turntable mounting base; 52- First side guard plate; 53- Second side guard plate; 54- First bellows cover mounting plate; 55- Second bellows cover mounting plate; 56- First bellows cover; 57- Second bellows cover; 6- Workpiece; 7- Grinding wheel dresser; 8- Grinding wheel; 91- First zone; 92- Second zone; 93- Third zone; 94- Fourth zone; 95- Fifth zone; 96- Sixth zone; 97- Seventh zone; 98- Eighth zone. Detailed Implementation

[0027] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0028] The following is combined with Figures 1 to 10This application describes the gas static pressure motion platform and control method provided in the embodiments.

[0029] like Figure 1 As shown in the figure, this application embodiment provides a gas static pressure motion platform, which includes: a base plate 1, a guide rail 2, an air-floating slide 3, a drive device 4, a gas static pressure turntable 5, a throttle valve, a sensor, and gas control valves. The guide rail 2 is fixedly mounted on the base plate 1, and the air-floating slide 3 is slidably mounted on the guide rail 2. The drive device 4 is located between the guide rail 2 and the air-floating slide 3 and is drively connected to the air-floating slide 3. The throttle valve is located on the air-floating slide 3 and is used to form a pressure-bearing gas film to adjust the position and attitude of the air-floating slide 3. The air-floating slide 3 has multiple air inlets, and the throttle valve is connected to these air inlets. Multiple gas control valves are respectively connected to the multiple air inlets, and these gas control valves are connected to a CNC system. The sensor is used to detect the offset of the gas static pressure motion platform in real time and feeds the detection signal back to the CNC system. When the workpiece 6 is placed on the gas static pressure motion platform for processing, when the sensor detects that the platform has shifted, the CNC system controls the air film pressure between the air float plate 3 and the guide rail 2 by adjusting the gas pressure of the gas control valve according to the feedback signal of the sensor, thereby driving the throttle to move, so as to achieve precise adjustment of the position and attitude of the air float plate 3.

[0030] It should be noted that each of the multiple air inlets on the air flotation plate 3 is equipped with an air pipe connector 37, and each air pipe connector 37 is connected to a corresponding gas control valve. The gas control valve can be an electro-proportional control valve. For example, if the air flotation plate 3 has 8 air inlets, then 8 air pipe connectors 37 will be configured, and each air pipe connector 37 will be connected to one electro-proportional control valve.

[0031] Furthermore, such as Figure 2 As shown, the throttle includes an upper throttle 34, a side throttle 35, and a lower throttle 36. The air-float slide 3 includes an upper air-float slide 31, an upper air-float slide 32, and an air-float side slide 32. Multiple upper throttles 34 are located on the upper air-float slide 31 to adjust the vertical position and orientation of the air-float slide 3. Multiple side throttles 35 are located on the side air-float slide 32 to adjust the lateral position and orientation of the air-float slide 3. Multiple lower throttles 36 are located on the lower air-float slide 33 to improve the guide rail stiffness and can also be used to adjust the vertical position and orientation of the air-float slide 3. The vertical position and orientation of the air-floating slide 3 are described. This multi-dimensional adjustment capability significantly improves the flexibility and adaptability of the gas static pressure motion platform, enabling it to better cope with complex working conditions and high precision requirements. The upper throttle 34, side throttle 35, and lower throttle 36 can be made of porous materials, such as graphite. For example, the upper air-floating slide 31 is equipped with 8 upper throttles 34, each air-floating side slide 32 is equipped with 4 side throttles 35, and each lower air-floating slide 33 is equipped with 4 lower throttles 36.

[0032] Furthermore, the sensors include electronic level sensors, displacement sensors, and pressure sensors. The electronic level sensor detects the horizontal state of the working surface of the gas static pressure motion platform, the displacement sensor detects the displacement of the gas static pressure motion platform under force, and the pressure sensor detects the weight of the workpiece 6. By employing these sensors simultaneously, the gas static pressure motion platform can achieve multi-dimensional high-precision monitoring and control. The number of electronic level sensors, displacement sensors, and pressure sensors installed is determined according to actual needs. For example, when workpiece 6 is added, its weight causes the gas static pressure guide rail 2 to sink. Furthermore, because the center of mass of workpiece 6 does not coincide with the center of the air-floating slide 3, the plane of the air-floating slide 3 tilts up and down. The electronic level sensor installed on the air-floating slide 3 in the X-axis direction can detect that the air-floating slide 3 is lower on the left and higher on the right in the X-axis direction, and the electronic level sensor installed on the air-floating slide 3 in the Y-axis direction can detect that the air-floating slide 3 is horizontal in the Y-axis direction.

[0033] Furthermore, such as Figure 3 and Figure 4 As shown, the drive device 4 includes a mover adjustment plate 41, a motor 42, and a pad 43. The mover adjustment plate 41 is located between the motor 42 and the air-bearing slide 3, and the pad 43 is located between the motor 42 and the guide rail 2. Through the coordinated action of the mover adjustment plate 41, the motor 42, and the pad 43, the drive device 4 ensures the gap and installation accuracy between the motor 42 and the main body of the guide rail 2, thereby ensuring the normal operation and motion accuracy of the linear motor 42, realizing precise adjustment of the height of the motor 42, and thus optimizing the air film pressure distribution between the air-bearing slide 3 and the guide rail 2.

[0034] It should be noted that motor 42 can be a coreless linear motor or a linear motor with an iron core. When the motor is a coreless linear motor, the cooperation relationship between the air flotation plate 3, the guide rail 2, and the drive device 4 is as follows: Figure 3 As shown. When motor 42 is a linear motor with an iron core, the cooperation relationship between the air-floating slide 3, the guide rail 2, and the drive device 4 is as follows. Figure 4 As shown, a positioning plate 44 is provided on one side of the iron core linear motor for positioning during installation.

[0035] Furthermore, baffles 21 are provided at both ends of the guide rail 2 in the direction of movement, which effectively limits the movement range of the air flotation plate 3 and prevents it from detaching from the guide rail 2 due to overtravel or accidental impact. The baffles 21 not only improve the safety and reliability of the gas static pressure motion platform, but also reduce damage caused by collisions, extend service life, and ensure the stable operation of the gas static pressure motion platform in high-precision machining and measurement.

[0036] Furthermore, the baffle 21 is also provided with anti-collision block 22, which can reduce the impact force of collision on the guide rail 2, air flotation slide 3 and drive device 4 through buffering.

[0037] Furthermore, a grating ruler 11 is provided on one side of the air-floating slide plate 3 parallel to the direction of movement of the guide rail 2. The grating ruler 11 can monitor the movement position and movement status of the air-floating slide plate 3 on the guide rail 2 in real time, and can provide micron-level or even nanometer-level precision to ensure the accuracy of motion control.

[0038] Furthermore, the base plate 1 is fixedly provided with a grating ruler probe mounting seat 12, and the probe of the grating ruler 11 is mounted on the grating ruler probe mounting seat 12. The grating ruler probe mounting seat 12 fixedly provided on the base plate 1 provides a stable and reliable mounting reference for the probe of the grating ruler 11, ensuring the relative positional accuracy between the probe and the grating ruler 11. This design effectively reduces the measurement error caused by vibration and improves the detection accuracy and stability of the grating ruler 11.

[0039] Furthermore, a turntable mounting base 51 is provided on the top of the air flotation slide 3. The gas static pressure turntable 5 is mounted on the turntable mounting base 51. A drag chain mounting plate 13 is provided on one side of the turntable mounting base 51 parallel to the movement direction of the guide rail 2. A drag chain 14 is provided on the drag chain mounting plate 13. The drag chain 14 is fixed to the base plate 1 on the side that abuts against it. The drag chain 14 can effectively store and protect the air pipes, cables, etc. required during the movement of the air flotation slide 3, preventing them from being worn, tangled, or broken due to frequent movement. Moreover, the drag chain mounting plate 13 is set along the movement direction parallel to the guide rail 2, so that the drag chain 14 can freely extend and retract with the movement of the air flotation slide 3, adapting to the reciprocating movement of the air flotation slide 3 on the guide rail, while reducing interference with the movement accuracy.

[0040] Furthermore, such as Figure 5 As shown, the turntable mounting base 51 is provided with a first side guard plate 52 and a second side guard plate 53 on both sides of the parallel guide rail 2 movement direction. The other two sides of the turntable mounting base 51 are provided with a first bellows cover mounting plate 54 and a second bellows cover mounting plate 55. The first bellows cover mounting plate 54 is used to install the first bellows cover 56, and the second bellows cover mounting plate 55 is used to install the second bellows cover 57. The first side guard plate 52, the second side guard plate 53, the first bellows cover 56, and the second bellows cover 57 together form a multi-layer protective structure, which effectively prevents dust, debris and other foreign matter from entering the interior of the gas static pressure motion platform, and avoids contamination or damage to precision components such as the air flotation slide 3, the guide rail 2 and the gas static pressure turntable 5. The first bellows cover 56 and the second bellows cover 57 adopt a flexible design, which can freely extend and retract with the movement of the air flotation slide 3, which does not affect the motion performance and can continuously provide protection.

[0041] In other embodiments, such as Figure 6 and Figure 7As shown, the gas static pressure motion platform is equipped with a grinding wheel dresser 7 and a grinding wheel 8. When the workpiece 6 is placed on the gas static pressure motion platform for processing, the grinding wheel dresser 7 and the grinding wheel 8 work together in the gas static pressure motion platform to meet the processing requirements of complex shapes and high-precision workpieces, thus expanding the application range of the gas static pressure motion platform.

[0042] The gas static pressure motion platform control method provided in the embodiments of this application, such as Figure 8 As shown, it includes: S100. Divide the gas static pressure motion platform into four quadrants with the center of the air flotation plate 3 as the origin, and further subdivide each quadrant into at least one region. Each region is connected to a gas control valve to control the gas pressure of its own region independently. S200. When workpiece 6 is placed on the gas static pressure motion platform, the sensor signal transmits the gravity of workpiece 6 and calculates the adjustment amount of the support force and air pressure in each area. S300: Based on the adjustment amount of the air pressure in the area, the CNC system controls the gas control valve to control the air intake pressure of each area; S400, the CNC system determines whether the air flotation slide 3 is adjusted in place based on the output signal of the sensor.

[0043] By dividing the gas static pressure motion platform into multiple control zones, each zone independently controls its own air pressure. Combined with sensor feedback and precise calculations from the CNC system, the air pressure distribution in each zone can be dynamically adjusted to compensate for deviations caused by the workpiece's gravity and processing load in real time.

[0044] It should be noted that in step S100, each quadrant is further subdivided into at least one region, which can be two regions, three regions, four regions, etc., and can be selected according to the size of the gas static pressure motion platform and the processing accuracy.

[0045] Taking the following example of further dividing each quadrant into two regions, the specific control method for the gas static pressure motion platform includes: S101, such as Figure 9 As shown, the gas static pressure motion platform is divided into four quadrants with the center of the air flotation plate 3 as the origin, and each quadrant is further divided into two regions. Region 91 and Region 92 are located in the second quadrant, Region 93 and Region 94 are located in the first quadrant, Region 95 and Region 96 are located in the third quadrant, and Region 97 and Region 98 are located in the fourth quadrant. Regions 91 to 98 are all connected to the gas control valve, and the gas pressure of each region can be controlled independently. For example, when the air flotation plate 3 is lower on the left and higher on the right in the X-axis direction, the air pressure in the first region 91 and the fifth region 95 is increased, and the air pressure in the fourth region 94 and the eighth region 98 is decreased; when the air flotation plate 3 is higher on the left and lower on the right in the X-axis direction, the air pressure in the first region 91 and the fifth region 95 is decreased, and the air pressure in the fourth region 94 and the eighth region 98 is increased; when the air flotation plate 3 is lower on the left and higher on the right in the Y-axis direction, the air pressure in the sixth region 96 and the seventh region 97 is increased, and the air pressure in the second region 92 and the third region 93 is decreased; when the air flotation plate 3 is higher on the left and lower on the right in the Y-axis direction, the air pressure in the sixth region 96 and the seventh region 97 is decreased, and the air pressure in the second region 92 and the third region 93 is increased; the air pressure changes are made equal to balance the torque; the air pressure in the eight regions is adjusted so that the changes are equal to balance the force, wherein the air pressure used to adjust the balancing torque and the air pressure used to adjust the balancing force are calculated and superimposed and performed simultaneously.

[0046] S201. Taking the center of the first region 91 to the eighth region 98 as the equivalent force points, the coordinates of their supporting forces are F1(x1, y1), F2(x2, y2), F3(x3, y3), F4(x4, y4), F5(x5, y5), F6(x6, y6), F7(x7, y7), F8(x8, y8); S202. When the workpiece 6 is placed on the gas static pressure motion platform, the sensor signal transmits the gravity G of the workpiece 6. F1-F8 are calculated according to the force balance equation and the torque balance equation. Then, the adjustment amount of the air pressure in each area is calculated according to the empirical formula of the intake air pressure and the bearing support force. S301. Based on the adjustment amount of the air pressure in the area, the CNC system controls the gas control valve to control the air intake volume of each area. S401. The CNC system determines whether the air flotation slide 3 is adjusted in place based on the output signal of the sensor.

[0047] The force balance equation is F1+F2+F3+F4+F5+F6+F7+F8=G; The torque balance equation is: F1x1+F2x2+F3x3+F4x4+F5x5+F6x6+F7x7+F8x8=Gx9; F1y1+F2y2+F3y3+F4y4+F5y5+F6y6+F7y7+F8y8=Gy9; Where F1-F8 are the supporting forces at the centers of the first region 91 to the eighth region 98, x1-x8 are the x-axis coordinates of the supporting forces at the centers of the first region 91 to the eighth region 98, y1-y8 are the y-axis coordinates of the supporting forces at the centers of the first region 91 to the eighth region 98, G is the gravity of workpiece 6, x9 is the x-axis coordinate of the center of workpiece 6, and y9 is the y-axis coordinate of the center of workpiece 6.

[0048] The empirical formulas for intake air pressure and bearing support force are as follows: F=C w p s A; where p s A is the intake pressure; C is the bearing's bearing area; w It is the bearing capacity factor, C w The initial value is 0.3.

[0049] The pressure sensor built into the gas static pressure turntable 5 detects the gravity G of the workpiece 6. The coordinates of gravity G are the same as the coordinates of the turntable center, which are G(x9, y9).

[0050] For example: when the coordinates of F1-F8 are F1(-300, 220), F 2( The coordinates are F1(-100, 220), F3(100, 220), F4(300, 220), F5(-300, -220), F6(-100, -220), F7(100, -220), F8(300, -220). The weight G of workpiece 6 is 1000N, and its coordinates are G(-50, 0). By controlling F1=F5, F4=F8, F2=F3=F6=F7=G / 8, we can obtain F1=F5=166.67N, F2=F3=F6=F7=125N, and F4=F8=83.33N. Then, based on the empirical formulas for intake air pressure and bearing support force, we can calculate p. s According to p s The CNC system adjusts the air pressure by controlling the amount of air pressure adjustment in the first zone 91 to the eighth zone 98, and then adjusts the air pressure by controlling the electro-proportional valve.

[0051] Meanwhile, the CNC system determines whether the adjustment is in place based on signals from the electronic level sensor and displacement sensor. The accuracy of pressure regulation is affected by the load-bearing coefficient. Using 0.3 as the initial value, if the sensor feedback indicates that the air-bearing slide 3 is properly adjusted, it means the load-bearing coefficient is accurate; otherwise, the load-bearing coefficient needs to be corrected by placing workpieces 6 with different weights. Overall, if... Figure 10 As shown, the CNC system controls the gas proportional valve through sensor signals to adjust the bearing support force in each area, so that the air flotation slide 3 in the gas static pressure motion platform is balanced.

[0052] In some other embodiments, the grinding force during processing causes the air-bearing slide 3 of the gas static pressure motion platform to have attitude errors. The normal grinding force and the axial grinding force cause the air-bearing slide 3 to pitch up and down. The CNC system locally adjusts the air pressure of the upper and lower throttles according to the calculated grinding force and the signals of the electronic level sensor and displacement sensor to counteract the pitch of the air-bearing slide 3 caused by the grinding force. The tangential grinding force causes the air-bearing slide 3 to deflect left and right. The CNC system locally adjusts the air pressure of the left and right throttles according to the calculated grinding force to counteract the deflection of the air-bearing slide 3 caused by the grinding force.

[0053] In some other embodiments, when machining asymmetrical workpiece 6, the gas static pressure turntable 5 locally adjusts the air pressure of the upper and lower throttles and adjusts it with the rotation of workpiece 6 to offset the horizontal error of the turntable working surface caused by the eccentricity of workpiece 6.

[0054] In some other embodiments, the attitude error caused by the flatness error of the guide rail 2 itself during the slide movement process is detected in segments. The attitude error of the air-floating slide 3 of the gas static pressure motion platform from zero point to end point is detected in segments. The air pressure of the throttle is locally adjusted to reduce the attitude error. The position of the air-floating slide 3 and the air pressure value are correlated to improve the attitude during the slide movement process. The more segments there are, the better the improvement effect.

[0055] In some other embodiments, to address the issue that the same throttle in the leveling control of the air-floating slide 3 needs to increase or decrease air pressure under different conditions, and that the adjustment amounts may be cumulative, leading to high control complexity, a direct mapping relationship is established between the signals of the electronic level sensor and displacement sensor and the air pressure adjustment amounts in each region. A machine learning model is then used to calculate the air pressure adjustment amounts in real time. The model adjusts the horizontal state by balancing the torque based on the electronic level sensor signal and adjusts the displacement by balancing the force based on the displacement sensor signal. After training, the model can comprehensively consider the coupling relationship between horizontal and displacement, outputting precise air pressure adjustment commands, achieving rapid and adaptive leveling of the air-floating slide 3, and significantly improving control accuracy and efficiency.

[0056] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A gas static pressure motion platform, characterized in that, include: The system comprises a base plate (1), a guide rail (2), an air-floating slide plate (3), a drive device (4), a gas static pressure turntable (5), a throttle valve, a sensor, and a gas control valve. The guide rail (2) is fixedly installed on the base plate (1), and the air-floating slide plate (3) is slidably disposed on the guide rail (2). The drive device (4) is disposed between the guide rail (2) and the air-floating slide plate (3) and is connected to the air-floating slide plate (3) in a transmission manner. The throttle valve is disposed on the air-floating slide plate (3) and is used to form a pressure-bearing gas film to adjust the position and attitude of the air-floating slide plate (3). The air-floating slide plate (3) has multiple air inlets, the throttle valve is connected to the air inlets, and multiple gas control valves are connected to multiple air inlets. The gas static pressure turntable (5) is installed on the air-floating slide plate (3). The gas control valve is connected to the CNC system, and the sensor is used to detect the offset of the gas static pressure motion platform in real time and feed the detection signal back to the CNC system. The gas static pressure motion platform is divided into four quadrants with the center of the air flotation plate (3) as the origin, and each quadrant is further subdivided into at least one region. Each region is connected to the gas control valve to control the air pressure of its own region independently. When the workpiece (6) is placed on the gas static pressure motion platform for processing, when the sensor detects that the gas static pressure motion platform has shifted, the CNC system controls the air film pressure between the air float (3) and the guide rail (2) by adjusting the gas pressure of the gas control valve according to the feedback signal of the sensor, thereby driving the throttle to move, so as to achieve precise adjustment of the position and attitude of the air float (3); The sensors include: an electronic level sensor for detecting the horizontal state of the working surface of the gas static pressure motion platform; a displacement sensor for detecting the displacement of the gas static pressure motion platform after being subjected to force; and a pressure sensor for detecting the weight of the workpiece (6) being processed. The drive device (4) includes a mover adjustment plate (41), a motor (42) and a pad (43). The mover adjustment plate (41) is located between the motor (42) and the air flotation plate (3), and the pad (43) is located between the motor (42) and the guide rail (2).

2. The gas static pressure motion platform according to claim 1, characterized in that, The air flotation plate (3) includes: An air flotation upper slide (31) is provided with multiple upper throttles (34) for adjusting the position and attitude of the air flotation slide (3) in the vertical direction; and / or An air-floating side slide (32) is provided with multiple side throttles (35) for adjusting the lateral position and attitude of the air-floating slide (3); and / or The air-floating lower slide (33) is provided with multiple lower throttles (36) to improve the rigidity of the guide rail and to adjust the position and attitude of the air-floating slide (3) in the vertical direction.

3. The gas static pressure motion platform according to claim 1, characterized in that, The guide rail (2) has baffles (21) at both ends in the direction of movement of the guide rail (2).

4. The gas static pressure motion platform according to claim 3, characterized in that, The baffle (21) is provided with anti-collision blocks (22).

5. The gas static pressure motion platform according to claim 1, characterized in that, The air flotation slide (3) is provided with a grating ruler (11) on one side of the parallel guide rail (2) in the direction of movement.

6. The gas static pressure motion platform according to claim 5, characterized in that, The base plate (1) is fixedly provided with a grating ruler probe mounting base (12), and the probe of the grating ruler (11) is located on the grating ruler probe mounting base (12).

7. A method for controlling a gas static pressure motion platform, wherein the method is applied to the gas static pressure motion platform according to any one of claims 1 to 6, characterized in that, The gas static pressure motion platform control method includes: The gas static pressure motion platform is divided into four quadrants with the center of the air flotation plate (3) as the origin, and each quadrant is further subdivided into at least one region. Each region is connected to the gas control valve to control the air pressure of its own region independently. When the workpiece (6) is placed on the gas static pressure motion platform, the sensor signal transmits the gravity of the workpiece (6) and calculates the adjustment amount of the support force and the air pressure of each area. Based on the adjustment amount of the air pressure in the area, the CNC system controls the gas control valve to control the air intake pressure of each area; The numerical control system determines whether the air flotation slide (3) is adjusted in place based on the output signal of the sensor.

8. The gas static pressure motion platform control method according to claim 7, characterized in that: As described above, the air flotation slide (3) is adjusted in place and the bearing capacity is accurate; If the air flotation chute (3) is not properly adjusted, the bearing capacity coefficient needs to be corrected.

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