Heating disc adjusting device and adjusting method

Abstract

The invention discloses a heating disc adjusting device and method, the adjusting device comprises a base backboard, at least two heating discs, a driving assembly and a linkage assembly, the driving assembly is fixed on the base backboard, and the linkage assembly is connected with the driving assembly and the at least two heating discs; the driving assembly can synchronously drive the at least two heating plates to ascend and descend through the linkage assembly. When the driving assembly is started, power of the driving assembly is evenly distributed to the heating plates on the two sides through the transmission structure of the linkage assembly, and the heating plates are driven to synchronously and vertically ascend and descend along a preset path. The multiple heating plates are driven through the single driving assembly, the number of motors and matched parts are reduced, and cost and occupied space are remarkably reduced; the complexity and maintenance difficulty of a multi-motor system are eliminated through the symmetrical design of the linkage assembly, meanwhile, the problems that traditional manual adjustment is low in precision and poor in repeatability are solved through concentrated power output and a synchronous transmission mechanism, and the stability of the system is improved.

Description

Technical Field

[0001] The present invention belongs to the field of semiconductor technology, and in particular relates to a heating plate adjustment device and an adjustment method. Background Art

[0002] In the prior art, the lifting and lowering drive of a heating device typically uses a structure in which a single motor independently controls a single heating plate. For example, in semiconductor manufacturing or vacuum coating equipment, each heating plate requires an independent motor and a supporting lifting mechanism. This design has the following significant drawbacks: each heating plate requires its own motor, transmission components, and control system, significantly increasing the manufacturing cost of the equipment; the multi-motor layout occupies a large amount of space below the cavity, limiting the miniaturization and modular design of the equipment; the multi-motor system has a high failure rate and requires individual debugging during maintenance, which is cumbersome. Summary of the Invention

[0003] In view of this, the present invention provides a heating plate adjustment device and an adjustment method to solve the technical problems of high cost and large space occupied by the existing heating plate driving device.

[0004] In order to solve the above problems, according to one aspect of the present application, an embodiment of the present invention provides a heating plate adjustment device, which includes a base back plate, a heating plate, a drive assembly and a linkage assembly. There are at least two heating plates, and the drive assembly is fixed on the base back plate. The linkage assembly connects the drive assembly and at least two heating plates; wherein, the drive assembly can synchronously drive at least two heating plates to rise and fall through the linkage assembly.

[0005] In some embodiments, the linkage assembly includes a slide base, a guide rail, a slider, an adjustment base, and an adjustment bolt. The number of the slide bases is the same as the number of the heating disks. Each slide base is connected to one heating disk. The number of the guide rails is the same as the number of the slide bases and corresponds one to one. Each guide rail has two sliders, and the slider is connected to the corresponding slide base. The adjustment base is connected to the slide base through an adjustment bolt.

[0006] and / or the contact surface between the adjustment base and the slide base is a spherical structure;

[0007] And / or the end of the adjusting bolt is in spherical contact with the adjusting base.

[0008] In some embodiments, the linkage assembly further includes an elastic anti-backlash unit, which is disposed between the adjusting bolt and the adjusting base and is used to compensate for thread fit clearance.

[0009] In some embodiments, the elastic backlash eliminating unit is a compression spring sleeved on the adjusting bolt, and two ends of the compression spring respectively abut against the slide base and the adjusting base.

[0010] In some embodiments, the heating plate adjustment device also includes a horizontal adjustment component, which includes a first displacement sensor, a controller and a first drive unit. The first displacement sensor is arranged above the heating plate and is used to detect the vertical distance from the heating plate to the part above it. The controller receives the signal of the first displacement sensor and generates a vertical adjustment instruction. The first drive unit drives the corresponding adjustment bolt to rotate according to the adjustment instruction.

[0011] In some embodiments, the heating plate adjustment device also includes a centering adjustment component, which includes a second displacement sensor and a second drive unit. The second displacement sensor is arranged on the side of the heating plate and is used to detect the horizontal distance from the heating plate to the inner wall of the cavity. The controller receives the signal of the second displacement sensor and generates a horizontal adjustment instruction. The second drive unit drives the corresponding adjustment bolt to rotate according to the adjustment instruction.

[0012] In some embodiments, the first drive unit and the second drive unit are both motors, and the motors are connected to the adjusting bolts via couplings.

[0013] In some embodiments, the adjusting bolts include horizontal bolts and vertical bolts, at least three horizontal bolts are provided, which are locked from the bottom of the slide base, the first displacement sensor and the first drive unit correspond one-to-one to the horizontal bolts, and at least three vertical bolts are provided, which are locked from the side of the slide base, and the second displacement sensor and the second drive unit correspond one-to-one to the vertical bolts.

[0014] According to another aspect of the present application, an embodiment of the present invention provides a method for adjusting a heating plate. The method for adjusting a heating plate applies the above-mentioned heating plate adjustment device. When the heating plate adjustment device includes a horizontal adjustment component and a centering adjustment component, the method includes:

[0015] The driving component synchronously drives at least two heating plates to rise and fall to set positions through the linkage component; and the heating plates are adjusted through the horizontal adjustment component and the centering adjustment component.

[0016] In some embodiments, when the horizontal adjustment assembly includes a first displacement sensor, a controller, and a first drive unit, and the adjustment bolts include horizontal bolts and vertical bolts, at least three horizontal bolts are provided, the first drive unit corresponds to the horizontal bolts one-to-one, at least three vertical bolts are provided, and the second drive unit corresponds to the vertical bolts one-to-one, the horizontality of the heating plate is adjusted by the horizontal adjustment assembly, specifically:

[0017] Detect the vertical distance h between at least three positions of the heating plate and the parts above it, wherein at least three positions correspond one-to-one to the positions of the at least three horizontal bolts, compare the at least three vertical distances with the preset first standard distance spec1, and adjust the height direction of the heating plate according to the comparison results.

[0018] In some embodiments, the height of the heating plate is adjusted according to the comparison results, specifically:

[0019] When the error between at least three of the vertical distances exceeds 0.05 mm, if h < spec1, loosen the horizontal bolt corresponding to the position to adjust the height direction of the heating plate, and the adjusted height Δd satisfies: Δd = spec1 + (spec1 - h), until the error between at least three of the vertical distances does not exceed 0.05 mm; if h > spec1, tighten the horizontal bolt corresponding to the position to adjust the height direction of the heating plate, and the adjusted height Δd satisfies: Δd = spec1 + (spec1 - h), until the error between at least three of the vertical distances does not exceed 0.05 mm;

[0020] In some embodiments, the centering adjustment component is used to adjust the centering of the heating plate, specifically:

[0021] Detect a horizontal distance H between at least three positions on the heating plate and the inner wall of the cavity, wherein the at least three positions correspond one-to-one to the positions of the at least three vertical bolts, and the at least three positions on the heating plate are located on the same circumference, and compare the at least three horizontal distances with a preset second standard distance spec2, and adjust the heating plate according to the comparison results.

[0022] In some embodiments, the heating plate is adjusted according to the comparison result, specifically: when the error between at least three of the horizontal distances exceeds 0.05 mm, if H < spec2, the vertical bolt corresponding to the position is loosened to adjust the heating plate, and the adjustment amount Δd = spec2 + (spec2-H) is adjusted until the error between at least three of the horizontal distances does not exceed 0.05 mm; conversely, if H > spec2, the vertical bolt corresponding to the position is tightened to adjust the heating plate, and the height is adjusted Δd = spec2 + (spec2-H) until the error between the three horizontal distances does not exceed 0.05 mm.

[0023] Compared with the prior art, the heating plate adjustment device of the present invention has at least the following beneficial effects:

[0024] The heating plate adjustment device provided by the present invention includes a base back plate, a heating plate, a drive assembly and a linkage assembly. There are at least two heating plates. The drive assembly is fixed on the base back plate. The linkage assembly connects the drive assembly and at least two heating plates. The drive assembly can synchronously drive at least two heating plates to rise and fall through the linkage assembly.

[0025] When the drive assembly is activated, its power is evenly distributed to the heating plates on both sides through the transmission structure of the linkage assembly, driving the heating plates to rise and fall synchronously along a preset path. The rigid design of the base back plate prevents deformation, and the symmetrical layout of the linkage assembly ensures balanced force, thereby avoiding offset or tilting during the lifting process. This embodiment drives multiple heating plates with a single drive assembly, reducing the number of motors and supporting components, significantly reducing costs and space occupation. The symmetrical design of the linkage assembly eliminates the complexity and maintenance difficulty of the multi-motor system. At the same time, through centralized power output and synchronous transmission mechanism, it solves the problems of low precision and poor repeatability of traditional manual adjustment, and improves the stability of the system.

[0026] The heating plate adjustment method provided by the present invention is designed based on the above-mentioned heating plate adjustment device. Its beneficial effects refer to the beneficial effects of the above-mentioned heating plate adjustment device, which will not be described in detail here.

[0027] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention and implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the present invention with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0029] Figure 1 This is a front view of a heating plate adjustment device provided by an embodiment of the present invention;

[0030] Figure 2 1 is a schematic structural diagram of a heating plate adjustment device provided by an embodiment of the present invention;

[0031] Figure 3 This is a diagram showing the coordination of an adjusting bolt and an elastic backlash eliminating unit in a heating plate adjustment device provided by an embodiment of the present invention;

[0032] Figure 4 This is a diagram showing the coordination of a guide rail and a slider in a heating plate adjustment device provided by an embodiment of the present invention;

[0033] Figure 5 It is a top view of a horizontal adjustment component and a centering adjustment component in a heating plate adjustment device provided by an embodiment of the present invention;

[0034] Figure 6 This is a principle block diagram of a horizontal adjustment component in a heating plate adjustment device provided by an embodiment of the present invention;

[0035] Figure 7 This is a principle block diagram of a centering adjustment component in a heating plate adjustment device provided by an embodiment of the present invention.

[0036] in:

[0037] 1. Base back plate; 2. Heating plate; 3. Drive assembly; 4. Linkage assembly; 41. Slide base; 42. Guide rail; 43. Slider; 44. Adjustment base; 45. Adjustment bolt; 46. Elastic anti-backlash unit; 451. Horizontal bolt; 452. Vertical bolt; 5. Horizontal adjustment assembly; 51. First displacement sensor; 52. Controller; 53. First drive unit; 6. Centering adjustment assembly; 61. Second displacement sensor; 62. Second drive unit. DETAILED DESCRIPTION

[0038] To further illustrate the technical means and effects employed by the present invention to achieve its intended objectives, the following detailed description of the specific implementation methods, structures, features, and effects of the present invention is provided in conjunction with the accompanying drawings and preferred embodiments. In the following description, different references to "one embodiment" or "embodiment" do not necessarily refer to the same embodiment. Furthermore, specific features, structures, or characteristics of one or more embodiments may be combined in any suitable manner.

[0039] In the description of the present invention, it should be clarified that the terms "first", "second", etc. in the specification and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence; the terms "vertical", "transverse", "longitudinal", "front", "back", "left", "right", "up", "down", "horizontal", etc. indicating directions or positional relationships are based on the directions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention, and do not mean that the devices or elements referred to must have a specific direction or position, and therefore cannot be understood as limiting the present invention.

[0040] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood broadly. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; and direct or indirect connections through an intermediary. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0041] Example 1

[0042] This embodiment provides a heating plate adjustment device, such as Figure 1-Figure 7 As shown, the heating plate adjustment device includes a base back plate 1, a heating plate 2, a drive component 3 and a linkage component 4, the heating plate 2 has at least two, the drive component 3 is fixed on the base back plate 1, and the linkage component 4 connects the drive component 3 and at least two heating plates 2; wherein, the drive component 3 can synchronously drive at least two heating plates 2 to rise and fall through the linkage component 4.

[0043] For better explanation, it is assumed that there are two heating trays 2 .

[0044] The base back plate 1 serves as the supporting structure of the entire device and is fixed below the equipment cavity. Its surface is provided with interfaces for installing the drive assembly 3 and the linkage assembly 4. The drive assembly 3 is vertically fixed to the center of the base back plate 1 by bolts. The linkage assembly 4 is symmetrically distributed on both sides of the base back plate 1 and is connected to the output end of the drive assembly 3 through a transmission component. The two heating plates 2 are respectively fixed on the top of the linkage assembly 4, and are vertically aligned with the drive assembly 3 to ensure the linearity of the lifting path. The main function of the base back plate 1 is to provide rigid support and ensure the position accuracy of each component. The drive assembly 3 outputs power through a single power source, replacing the traditional multi-motor design. The linkage assembly 4 synchronously transmits the power of the drive assembly 3 to the two heating plates 2 to achieve synchronous lifting. The heating plate 2 directly bears the process load and completes the heating function during the lifting process.

[0045] When the drive assembly 3 is started, its power is evenly distributed to the heating plates 2 on both sides through the transmission structure of the linkage assembly 4, driving the heating plates 2 to rise and fall synchronously along a preset path. The rigid design of the base back plate 1 prevents deformation, and the symmetrical layout of the linkage assembly 4 ensures balanced force, thereby avoiding offset or tilting during the lifting process. This embodiment drives multiple heating plates 2 through a single drive assembly 3, reducing the number of motors and supporting components, significantly reducing costs and space occupation. The symmetrical design of the linkage assembly 4 eliminates the complexity and maintenance difficulty of the multi-motor system. At the same time, through centralized power output and synchronous transmission mechanism, it solves the problems of low precision and poor repeatability of traditional manual adjustment, thereby improving the stability of the system.

[0046] In a specific embodiment, the linkage assembly 4 includes a slide base 41, a guide rail 42, a slider 43, an adjustment base 44 and an adjustment bolt 45. The number of the slide base 41 is the same as the number of the heating disk 2. The heating disk 2 is connected to the adjustment base 44 by standard screws. The number of the guide rails 42 is the same as the number of the slide base 41 and corresponds one to one. Each guide rail 42 has two sliders 43. The slider 43 is connected to the corresponding slide base 41. The adjustment base 44 is connected to the slide base 41 by an adjustment bolt 45.

[0047] The slide base 41 is connected to the adjustment base 44 through an adjusting bolt 45, and the adjustment base 44 is fixed to the heating plate 2 by bolts; the guide rails 42 are vertically fixed on the base back plate 1, and the number is the same as the slide base 41. Two sliders 43 are installed on the surface of each guide rail 42, and the sliders 43 are connected to the bottom of the slide base 41 through bolts, so that the slide base 41 can slide up and down along the guide rails 42; the slide base 41 is fixed on the base back plate 1 and is arranged parallel to the adjustment base 44. The two are connected by an adjusting bolt 45. The adjusting bolt 45 passes through the through hole of the slide base 41 and cooperates with the corresponding threaded hole of the adjustment base 44. The relative position of the slide base 41 and the adjustment base 44 can be adjusted by rotating the adjusting bolt 45.

[0048] The slide base 41 carries the heating plate 2 and transmits the lifting power. The guide rail 42 provides the slide base 41 with a vertical motion trajectory and rigid support. The slider 43 reduces the friction between the slide base 41 and the guide rail 42 and ensures smooth movement. The slide base 41 serves as a reference fixed point. The initial position of the adjustment base 44 is changed by screwing in or out the adjustment bolt 45 to eliminate assembly gaps or compensate for thermal deformation errors. The adjustment bolt 45 realizes fine-tuning function through threaded cooperation, and maintains the stability of the slide base 41 after being locked.

[0049] When the driving component 3 drives the linkage component 4 to work, the adjustment base 44 rises and falls vertically along the guide rail 42, driving the heating plate 2 to move synchronously; the slider 43 slides on the guide rail 42 to ensure the linearity of the lifting trajectory; the slide base 41 and the adjustment bolt 45 provide reference positioning in a stationary state. When it is necessary to adjust the horizontal or centering position of the heating plate 2, the distance between the slide base 41 and the adjustment base 44 is changed by rotating the adjustment bolt 45, thereby fine-tuning the vertical or horizontal offset of the heating plate 2; the rigid fit of the guide rail 42 and the slider 43 suppresses the vibration or offset caused by external loads, and ultimately achieves stable and precise position control of the heating plate 2 during the lifting process.

[0050] The contact surface between the adjustment base 44 and the slide base 41 is a spherical structure.

[0051] The contact surface between the adjustment base 44 and the slide base 41 adopts a spherical structure design, which enables the two to adapt to small angle offsets when in contact through the multi-degree-of-freedom characteristics of the sphere. This design significantly reduces the stress concentration problem on the contact surface caused by assembly errors or thermal expansion, while allowing the slide base 41 to maintain uniform contact with the adjustment base 44 when it is slightly tilted during vertical lifting, avoiding local wear or jamming. Spherical contact also enhances the system's adaptability to vacuum force or temperature changes. When the heating plate 2 is deformed by external loads, the spherical structure automatically adjusts the contact angle to compensate for the offset, thereby maintaining a stable fit between the slide base 41 and the adjustment base 44, and improving the anti-interference ability and long-term operational reliability of the overall structure.

[0052] The end of the adjusting bolt 45 is in spherical contact with the adjusting base 44 .

[0053] The end of the adjusting bolt 45 engages the adjusting base 44 through spherical contact, allowing the adjusting bolt 45 to adapt to changes in the relative angle between the adjusting base 44 and the slide base 41 during tightening or adjustment. This spherical contact reduces the effect of thread fit clearance on adjustment accuracy, eliminating the rigid constraints of traditional planar fit through the flexible contact between the end spherical surface and the adjusting base 44. Furthermore, when the adjusting bolt 45 is rotated, the spherical contact allows the end of the adjusting bolt 45 to slide freely on the surface of the adjusting base 44, thereby converting the rotational motion into a smooth displacement of the slide base 41, avoiding adjustment jams or localized stress concentrations caused by thread engagement deviation. This design is particularly suitable for fine-tuning operations in vacuum or high-temperature environments, effectively suppressing bolt locking failures caused by thermal deformation and ensuring long-term stability of the adjusted position.

[0054] In a specific embodiment, the linkage assembly 4 further includes an elastic backlash eliminating unit 46, which is disposed between the adjusting bolt 45 and the adjusting base 44 to compensate for thread fit clearance. The elastic backlash eliminating unit 46 is a compression spring sleeved on the adjusting bolt 45, with both ends of the compression spring abutting against the slide base 41 and the adjusting base 44, respectively.

[0055] The compression spring is sleeved on the threaded rod of the adjusting bolt 45 and is located in the contact area between the adjusting base 44 and the slide base 41. Its two ends abut the end face of the threaded hole of the adjusting base 44 and the inner wall of the adjusting hole of the slide base 41, respectively. When the adjusting bolt 45 is screwed into the adjusting base 44, the compression spring is subjected to axial compression and continuously applies a reverse force through elastic deformation, forcing the threaded surface of the adjusting bolt 45 to fit tightly with the threaded surface of the adjusting base 44, thereby eliminating the fitting gap between the two. This design can effectively suppress the position drift of the adjusting base 44 caused by thread gap. Especially in a vacuum or high-temperature environment, the slight displacement caused by thermal expansion or vibration can be dynamically compensated by the compression spring to keep the contact surface stable, avoiding the position failure due to loosening after adjustment. At the same time, the flexible characteristics of the compression spring allow the adjusting bolt 45 to adapt to slight angular deviations during the locking process, reducing assembly stress concentration and improving the smoothness and long-term reliability of the adjustment operation.

[0056] In a specific embodiment, the heating plate adjustment device also includes a horizontal adjustment component 5, which includes a first displacement sensor 51, a controller 52 and a first drive unit 53. The first displacement sensor 51 is arranged above the heating plate 2 and is used to detect the vertical distance from the heating plate 2 to the parts above it. The controller 52 receives the signal of the first displacement sensor 51 and generates a vertical adjustment instruction. The first drive unit 53 drives the corresponding adjustment bolt 45 to rotate according to the adjustment instruction.

[0057] The horizontality of the heating plate 2 is directly related to the stability of the process quality and the reliability of the equipment operation. For example, in semiconductor manufacturing or vacuum coating, the deviation in parallelism between the heating plate and the upper wafer or substrate will lead to uneven temperature distribution, which in turn causes differences in film thickness, material stress concentration and even device failure. In severe cases, the entire batch of products may be scrapped. In addition, the tilted heating plate may mechanically interfere with other components during the lifting process, accelerating wear or causing failures. Therefore, precise horizontal adjustment is the key to ensuring process consistency and equipment life.

[0058] The first displacement sensor 51 monitors the vertical distance between the heating plate 2 and the upper part (such as the cavity cover or the substrate carrier) in real time through non-contact measurement, and converts the distance signal into an electrical signal output; after receiving the sensor signal, the controller 52 calculates the horizontal offset of the heating plate 2 through a preset algorithm, and generates adjustment parameters corresponding to the offset (such as the rotation direction and number of turns of the adjustment bolt 45); the first drive unit 53 (such as a stepper motor or a servo motor) drives the adjustment bolt 45 to rotate according to the instruction of the controller 52, and changes the relative height of the slide base 41 and the adjustment base 44 through threaded transmission, thereby correcting the inclination angle of the heating plate 2.

[0059] When the heating plate 2 is horizontally offset due to assembly error or thermal deformation, the first displacement sensor 51 detects the vertical distance abnormality and sends a signal to the controller 52; after analyzing the signal, the controller 52 determines the position and adjustment amount of the adjustment bolt 45 that needs to be adjusted, and sends a pulse instruction to the corresponding first drive unit 53; the first drive unit 53 drives the adjustment bolt 45 to rotate, and the adjustment base 44 is partially lifted or lowered by advancing or retracting the thread, and the elastic anti-backlash unit 46 synchronously compensates for the thread gap to ensure the adjustment accuracy.

[0060] In a specific embodiment, the heating plate adjustment device also includes a centering adjustment component 6, which includes a second displacement sensor 61 and a second drive unit 62. The second displacement sensor 61 is arranged on the side of the heating plate 2 and is used to detect the horizontal distance from the heating plate 2 to the inner wall of the cavity. The controller 52 receives the signal of the second displacement sensor 61 and generates a horizontal adjustment instruction. The second drive unit 62 drives the corresponding adjustment bolt 45 to rotate according to the adjustment instruction.

[0061] The centering of the heating plate is a core requirement to ensure process uniformity and equipment operation safety. In vacuum coating or semiconductor processing, if the heating plate deviates from the center of the cavity, it will lead to asymmetric thermal field distribution and uneven heating of the substrate, which in turn will cause quality problems such as film thickness deviation and material crystallization defects. At the same time, the eccentric heating plate may rub or collide with the inner wall of the cavity during high-speed lifting and lowering, causing equipment damage or process interruption. Therefore, precise centering adjustment is necessary to maintain process consistency and avoid mechanical failures.

[0062] The second displacement sensor 61 obtains the horizontal distance data between the heating plate 2 and the inner wall of the cavity in real time through non-contact measurement, and accurately identifies the horizontal offset direction and amplitude of the heating plate; the second driving unit 62 (such as a servo motor or a stepper motor) drives the corresponding adjustment bolt 45 to rotate according to the instruction of the controller 52, and changes the horizontal position of the adjustment base 44 through threaded transmission, thereby pushing the heating plate 2 to move laterally to correct the center offset.

[0063] When the second displacement sensor 61 detects that the horizontal distance between the heating plate 2 and the inner wall of the cavity exceeds a preset range, the offset signal is transmitted to the controller 52; the controller 52 analyzes the offset according to the algorithm and generates an adjustment instruction, specifying the adjustment bolt 45 that needs to be adjusted and its rotation parameters; after receiving the instruction, the second drive unit 62 drives the corresponding adjustment bolt 45 to rotate, and the adjustment base 44 drives the heating plate 2 to move laterally by advancing or retracting the thread, and the elastic anti-backlash unit 46 simultaneously eliminates the influence of the thread gap on the adjustment accuracy; the coordinated action of multiple adjustment bolts 45 gradually corrects the horizontal offset of the heating plate 2 until its center coincides with the cavity axis.

[0064] In a specific embodiment, the first drive unit 53 and the second drive unit 62 are both motors, and the motors are connected to the adjusting bolts via couplings.

[0065] In a specific embodiment, the adjusting bolt 45 includes a horizontal bolt 451 and a vertical bolt 452. At least three horizontal bolts 451 are provided, which are locked from the bottom of the slide base 41. The first displacement sensor 51 and the first drive unit 53 correspond one-to-one to the horizontal bolt 451. At least three vertical bolts 452 are provided, which are locked from the side of the slide base 41. The second displacement sensor 61 and the second drive unit 62 correspond one-to-one to the vertical bolt 452.

[0066] Horizontal bolts 451 are tightened from the bottom of the slide base 41 and rotated to adjust the horizontal lateral displacement of the adjustment base 44, thereby correcting the vertical distance between the heating plate 2 and the upper component. Vertical bolts 452 are tightened from the side of the slide base 41 and rotated to change the vertical height of the adjustment base 44, used to adjust the center position deviation between the heating plate 2 and the inner wall of the cavity, ensuring the heating plate's horizontal and vertical alignment. Horizontal bolts 451 and vertical bolts 452 independently control the horizontal and vertical positions of the adjustment base 44, and the two work together to achieve precise positioning of the heating plate 2 in three-dimensional space.

[0067] At least three horizontal bolts 451 and three vertical bolts 452 are provided to meet the stability requirements of planar positioning. The three bolts form a triangular support structure, which can determine the geometric principle of a plane through three points, eliminating the redundant degrees of freedom or support instability that may be caused by single-point or double-point adjustment. For example, the three horizontal bolts 451 can accurately adjust the tilt angle of the adjustment base 44 through differentiated rotation, while the three vertical bolts 452 can compensate for local height deviations of the heating plate 2 through synchronous or asynchronous lifting, thereby achieving uniform force and balanced adjustment in both the horizontal and vertical directions, avoiding the reduction in adjustment accuracy or structural deformation caused by insufficient number of bolts.

[0068] Horizontal adjustment is achieved via horizontal bolts 451: a first displacement sensor 51 detects the vertical distance deviation between the heating plate 2 and the component above it. The controller 52 calculates the adjustment amount for each horizontal bolt 451 based on the deviation signal. The first drive unit 53 rotates the corresponding horizontal bolt 451, and by adjusting the height of the adjustment base 44 at different positions, the heating plate 2 is restored to a horizontal position. Centering adjustment is achieved via vertical bolts 452: a second displacement sensor 61 detects the horizontal distance deviation between the heating plate 2 and the inner wall of the cavity. The controller 52 analyzes the signal and sends a command to the second drive unit 62, which rotates the vertical bolts 452 to push the adjustment base 44 horizontally and correct the center position of the heating plate 2. The coordinated action of the three horizontal bolts 451 and the three vertical bolts 452 forms closed-loop control in the horizontal and vertical directions, respectively, ultimately achieving all-round, high-precision centering and horizontal adjustment of the heating plate 2.

[0069] Example 2

[0070] This embodiment provides a heating plate adjustment method, which applies the heating plate adjustment device described in Example 1. When the heating plate adjustment device includes a horizontal adjustment component 5 and a centering adjustment component 6, the adjustment method includes: the driving component 3 synchronously drives at least two of the heating plates 2 to rise and fall to the set position through the linkage component 4; and adjusts the heating plate 2 through the horizontal adjustment component 5 and the centering adjustment component 6.

[0071] Specifically, the heating plate adjustment method of this embodiment includes the following steps: first, the driving component 3 synchronously drives at least two heating plates 2 to rise and fall in the vertical direction to the target height required by the process through the cooperation of the slide base 41 and the guide rail 42 of the linkage component 4. During this process, the slider 43 ensures the linearity of the lifting trajectory, and the spherical contact structure of the adjustment base 44 and the slide base 41 is adaptive to a small angle offset; then, the first displacement sensor 51 of the horizontal adjustment component 5 detects the vertical distance between the heating plate 2 and the upper part in real time, and the controller 52 calculates the horizontal bolts 451 according to the detection signal. The first driving unit 53 drives the horizontal bolt 451 to rotate to adjust the amount of adjustment, and eliminates the tilt deviation of the heating plate 2 by changing the height difference of different positions of the adjustment base 44; at the same time, the second displacement sensor 61 of the centering adjustment component 6 monitors the horizontal distance between the heating plate 2 and the inner wall of the cavity. After parsing the offset data, the controller 52 sends an instruction to the second driving unit 62 to drive the vertical bolt 452 to rotate to push the adjustment base 44 to move horizontally until the center of the heating plate 2 coincides with the axis of the cavity. During the adjustment process, the elastic anti-backlash unit 46 dynamically compensates for the thread gap to ensure the stability of the position after adjustment.

[0072] In a specific embodiment, when the horizontal adjustment assembly 5 includes a first displacement sensor 51, a controller 52, and a first drive unit 53, and the adjusting bolt 45 includes a horizontal bolt 451 and a vertical bolt 452, at least three horizontal bolts 451 are provided, the first drive unit 53 corresponds to the horizontal bolt 451 one-to-one, at least three vertical bolts 452 are provided, and the second drive unit 62 corresponds to the vertical bolt 452 one-to-one, the horizontal degree of the heating plate 2 is adjusted by the horizontal adjustment assembly 5, specifically:

[0073] Detect the vertical distance h between at least three positions of the heating plate 2 and the parts above it, wherein the at least three positions correspond one-to-one to the positions of the at least three horizontal bolts 451, and compare the at least three vertical distances with the preset first standard distance spec1:

[0074] When the error between at least three of the vertical distances exceeds 0.05 mm, if h < spec1, loosen the horizontal bolt 451 corresponding to the position to adjust the height direction of the heating plate 2, and the adjusted height Δd satisfies: Δd = spec1 + (spec1 - h), until the error between at least three of the vertical distances does not exceed 0.05 mm; if h > spec1, tighten the horizontal bolt 451 corresponding to the position to adjust the height direction of the heating plate 2, and the adjusted height Δd satisfies: Δd = spec1 + (spec1 - h), until the error between at least three of the vertical distances does not exceed 0.05 mm;

[0075] The centering adjustment component 6 is used to adjust the centering of the heating plate 2, specifically by detecting the horizontal distance H between at least three positions on the heating plate 2 and the inner wall of the cavity, wherein the at least three positions correspond to the positions of the at least three vertical bolts, and the at least three positions on the heating plate 2 are located on the same circumference, and the at least three horizontal distances are respectively compared with the preset second standard distance spec2:

[0076] When the error between at least three of the horizontal distances exceeds 0.05 mm, if H is less than spec2, loosen the vertical bolt 452 corresponding to the position and adjust the heating plate 2 by an adjustment amount Δd=spec2+(spec2-H), until the error between at least three of the horizontal distances does not exceed 0.05 mm; conversely, if H is greater than spec2, tighten the vertical bolt 452 corresponding to the position and adjust the heating plate 2 by an adjustment height Δd=spec2+(spec2-H), until the error between at least three of the horizontal distances does not exceed 0.05 mm.

[0077] The horizontal adjustment component 5 adjusts the horizontality of the heating plate 2 as follows: select three positions on the heating plate 2 corresponding to the three horizontal bolts 451, detect the vertical distance h from each position to the upper part through the first displacement sensor 51, and compare it with the preset standard distance spec1; if h < spec1 at a certain position, loosen the corresponding horizontal bolt 451 and adjust the height Δd = spec1 + (spec1-h) to raise the point to compensate for the deviation; if h > spec1, tighten the bolt and adjust Δd = spec1 + (spec1-h) to lower the height until the vertical distance error of the three positions is ≤ 0.05mm. This method ensures the horizontality of the heating plate 2 through three-point coordinated leveling, eliminates uneven temperature distribution or mechanical interference caused by tilt, and after adjustment, the parallelism error between the heating plate and the upper part is controlled at the micron level, significantly improving process stability and equipment reliability.

[0078] The centering adjustment component 6 adjusts the centering of the heating plate 2 as follows: select three positions corresponding to the three vertical bolts 452 on the same circumference of the heating plate 2, detect the horizontal distance H from each position to the inner wall of the cavity through the second displacement sensor 61, and compare it with the preset standard distance spec2; if H < spec2 at a certain position, loosen the corresponding vertical bolt 452 and adjust Δd = spec2 + (spec2-H) to push the heating plate 2 away from the cavity wall; if H > spec2, tighten the bolt and adjust Δd = spec2 + (spec2-H) to shorten the distance until the horizontal distance error of the three points is ≤ 0.05mm. This method corrects the center offset by synchronously correcting the three points, so that the axis of the heating plate 2 coincides with the axis of the cavity, avoiding the risk of thermal field asymmetry or friction collision caused by eccentricity. After adjustment, the center deviation is controlled at the submillimeter level, ensuring process uniformity and equipment operation safety.

[0079] In summary, it is easy for those skilled in the art to understand that, under the premise of no conflict, the above-mentioned advantageous technical features can be freely combined and superimposed.

[0080] The above are merely preferred embodiments of the present invention and do not constitute any form of limitation to the present invention. Any simple modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention still fall within the scope of the technical solution of the present invention.

Claims

1. A heating plate adjustment device, characterized in that: The heating plate adjustment device includes a base back plate, a heating plate, a drive assembly and a linkage assembly. There are at least two heating plates. The drive assembly is fixed to the base back plate. The linkage assembly connects the drive assembly and the at least two heating plates. The drive assembly can synchronously drive the at least two heating plates to rise and fall through the linkage assembly.

2. The heating plate adjustment device according to claim 1, characterized in that: The linkage assembly includes a slide base, a guide rail, a slider, an adjustment base and an adjustment bolt. The number of the slide base is the same as the number of the heating plates. The heating plates are connected to the adjustment base. The number of the guide rails is the same as the number of the slide bases and corresponds one to one. Each guide rail has two sliders, and the sliders are connected to the corresponding slide bases. The adjustment base is connected to the slide base through an adjustment bolt. and / or the contact surface between the adjustment base and the slide base is a spherical structure; And / or the end of the adjusting bolt is in spherical contact with the adjusting base.

3. The heating plate adjustment device according to claim 2, characterized in that: The linkage assembly further includes an elastic clearance eliminating unit, which is arranged between the adjusting bolt and the adjusting base and is used to compensate for the thread fitting clearance.

4. The heating plate adjustment device according to claim 3, characterized in that: The elastic backlash eliminating unit is a compression spring sleeved on the adjusting bolt, and two ends of the compression spring respectively abut against the slide base and the adjusting base.

5. The heating plate adjustment device according to claim 2, characterized in that: The heating plate adjustment device also includes a horizontal adjustment component, which includes a first displacement sensor, a controller and a first drive unit. The first displacement sensor is arranged above the heating plate and is used to detect the vertical distance from the heating plate to the part above it. The controller receives the signal of the first displacement sensor and generates a vertical adjustment instruction. The first drive unit drives the corresponding adjustment bolt to rotate according to the adjustment instruction.

6. The heating plate adjustment device according to claim 5, characterized in that: The heating plate adjustment device also includes a centering adjustment component, which includes a second displacement sensor and a second drive unit. The second displacement sensor is arranged on the side of the heating plate and is used to detect the horizontal distance from the heating plate to the inner wall of the cavity. The controller receives the signal of the second displacement sensor and generates a horizontal adjustment instruction. The second drive unit drives the corresponding adjustment bolt to rotate according to the adjustment instruction.

7. The heating plate adjustment device according to claim 6, characterized in that: The first drive unit and the second drive unit are both motors, and the motors are connected to the adjusting bolts via couplings.

8. The heating plate adjustment device according to claim 6, characterized in that: The adjusting bolts include horizontal bolts and vertical bolts. At least three horizontal bolts are provided and are locked from the bottom of the slide base. The first displacement sensor and the first drive unit correspond one-to-one to the horizontal bolts. At least three vertical bolts are provided and are locked from the side of the slide base. The second displacement sensor and the second drive unit correspond one-to-one to the vertical bolts.

9. A method for adjusting a heating plate, characterized in that: The heating plate adjustment method applies the heating plate adjustment device according to any one of claims 1 to 8. When the heating plate adjustment device includes a horizontal adjustment component and a centering adjustment component, the adjustment method includes: The driving component synchronously drives at least two heating plates to rise and fall to set positions through the linkage component; and the heating plates are adjusted through the horizontal adjustment component and the centering adjustment component.

10. The method for adjusting the heating plate according to claim 9, wherein: When the horizontal adjustment assembly includes a first displacement sensor, a controller, and a first drive unit, and the adjustment bolts include horizontal bolts and vertical bolts, at least three horizontal bolts are provided, the first drive units correspond to the horizontal bolts one-to-one, at least three vertical bolts are provided, and the second drive units correspond to the vertical bolts one-to-one, the horizontality of the heating plate is adjusted by the horizontal adjustment assembly, specifically as follows: Detect the vertical distance h between at least three positions of the heating plate and the parts above it, wherein at least three positions correspond one-to-one to the positions of the at least three horizontal bolts, compare the at least three vertical distances with the preset first standard distance spec1, and adjust the height direction of the heating plate according to the comparison results.

11. The method for adjusting the heating plate according to claim 10, wherein: Adjust the height of the heating plate according to the comparison results, specifically: When the error between at least three of the vertical distances exceeds 0.05mm, if h<spec1, loosen the horizontal bolt corresponding to the position to adjust the height direction of the heating plate, and the adjusted height Δd satisfies: Δd=spec1+(spec1-h), until the error between at least three of the vertical distances does not exceed 0.05mm; if h>spec1, tighten the horizontal bolt corresponding to the position to adjust the height direction of the heating plate, and the adjusted height Δd satisfies: Δd=spec1+(spec1-h), until the error between at least three vertical distances does not exceed 0.05mm.

12. The method for adjusting the heating plate according to claim 10, wherein: The centering adjustment component is used to adjust the centering of the heating plate, specifically: Detect a horizontal distance H between at least three positions on the heating plate and the inner wall of the cavity, wherein the at least three positions correspond one-to-one to the positions of the at least three vertical bolts, and the at least three positions on the heating plate are located on the same circumference, and compare the at least three horizontal distances with a preset second standard distance spec2, and adjust the heating plate according to the comparison results.

13. The method for adjusting the heating plate according to claim 12, wherein: Adjust the heating plate according to the comparison results, specifically: When the error between at least three of the horizontal distances exceeds 0.05mm, if H<spec2, loosen the vertical bolt corresponding to the position and adjust the heating plate, and the adjustment amount Δd=spec2+(spec2-H) until the error between at least three of the horizontal distances does not exceed 0.05mm; conversely, if H>spec2, tighten the vertical bolt corresponding to the position and adjust the heating plate, and adjust the height Δd=spec2+(spec2-H) until the error between at least three horizontal distances does not exceed 0.05mm.

Images