Vacuum ion coating device capable of uniformly coating

Abstract

The vacuum ion film plating device comprises a film plating machine body, a film plating mechanism, a moving table and a hanging frame assembly, a film plating cavity is formed in the film plating machine body, a vacuum pump is arranged at the top of the film plating machine body, and a suction opening of the vacuum pump communicates with the film plating cavity; the coating mechanism comprises at least one coating source and a connecting through pipe, the coating source is communicated with the connecting through pipe, the connecting through pipe is composed of a main pipe and a plurality of branch pipes, and a plurality of through holes matched with the branch pipes are formed in the top of the coating machine body; the moving table is mounted at the bottom of the coating cavity in a sliding manner; the hanging frame assembly comprises a hanging frame supporting column and a plurality of hanging frames, the hanging frames are installed on the hanging frame supporting column in a sliding mode, a coating material can be well and evenly distributed on the surface of a workpiece, the workpiece can be conveniently placed and taken, coating gas is effectively treated, and the risk that workers are injured is reduced.

Description

Technical Field

[0001] The invention relates to a vacuum ion plating device capable of uniformly plating films, belonging to the technical field of plating equipment. Background Art

[0002] Vacuum ion plating technology is widely used in the surface treatment of various materials. It can form a uniform, dense thin film layer on the surface of the material, improving the material's corrosion resistance, wear resistance, and decorative properties. However, during the coating process, conventional vacuum ion plating devices often have uneven distribution of the coating material, resulting in varying coating effects. Furthermore, the equipment is complex to operate and has a low degree of automation, failing to meet the requirements of modern industry for coating quality and efficiency. A search revealed that Chinese patent publication number CN118910573B discloses a vacuum coating device that facilitates workpiece replacement. This patent involves hanging the workpiece on hooks of two placement racks, lowering the outer shell, activating a vacuum pump, and activating two electron beam generators 33. Electron beams are irradiated on the coating material, heating it and causing it to sublime and adhere to the workpiece surface. Once the workpiece on the right placement rack is coated, the electric cylinder is controlled to move the movable plate upward and reset, causing the outer shell and movable rod to move upward and reset accordingly. The motor is then controlled to reverse, causing the coating table to rotate half a circle, moving the right placement rack directly below the outer shell, ready for coating the left workpiece. However, this patent cannot ensure the uniform distribution of the coating material on the surface of the workpiece. When picking up and placing the workpiece, workers are often required to drill under the equipment, and the exhaust gas generated during the coating process can easily be inhaled by the workers, causing injuries to the workers. Summary of the Invention

[0003] The technical problem to be solved by the present invention is to overcome the defects of the existing technology and provide a vacuum ion plating device that can uniformly coat the film. It can well distribute the coating material evenly on the surface of the workpiece, facilitate the placement and removal of the workpiece, and effectively handle the coating gas to reduce the risk of injury to workers.

[0004] In order to solve the above technical problems, the technical solution of the present invention is: a vacuum ion plating device capable of uniform film coating, comprising:

[0005] A coating body, wherein a coating cavity is provided in the coating body, a vacuum pump is provided on the top of the coating body, and a suction port of the vacuum pump is connected to the coating cavity;

[0006] A coating mechanism, comprising at least one coating source and a connecting pipe, wherein the coating source is connected to the connecting pipe, the connecting pipe is composed of a main pipe and a plurality of branch pipes, and a top of the coating body is provided with a plurality of through holes adapted to the branch pipes;

[0007] A movable platform, the movable platform being mounted on the bottom of the coating chamber by sliding;

[0008] A rack assembly, the rack assembly comprising a rack support column and a plurality of racks, the racks being slidably mounted on the rack support column, and the racks being provided with a plurality of mounting seats suitable for placing workpieces to be coated;

[0009] The coating machine body is provided with an entrance and exit, the entrance and exit are communicated with the coating chamber, an airtight door is hinged at the entrance and exit, at least one connecting telescopic rod is hinged between the airtight door and the movable platform, one end of the connecting telescopic rod is hinged on the airtight door, and the other end of the connecting telescopic rod is hinged on the movable platform, and opening the airtight door is suitable for driving the movable platform to slide out of the coating chamber through the telescopic action of the connecting telescopic rod, so that the workpiece of the mounting seat is outside the entrance and exit, and when the airtight door is closed, the movable platform is driven in the reverse direction to return to the working position in the coating chamber;

[0010] The coating source is suitable for depositing the coating material in the form of ions onto the surface of the workpiece to be coated through the connecting pipe.

[0011] Furthermore, the bracket support column is installed on the mobile platform through a rotating base. The mobile platform is provided with a first installation cavity. A rotating drive motor is installed in the first installation cavity. The movable end of the rotating drive motor is connected to the rotating base.

[0012] Furthermore, in order to ensure the stability of rotation, a rotation groove is provided on the movable platform, and a circular protrusion is provided in the rotation groove;

[0013] The rotating base moves in the rotating groove. A circular concave piece is provided at the bottom of the rotating base. When the rotating base is installed in place, the circular convex piece is suitable for being inserted into the circular concave piece.

[0014] Furthermore, in order to enable the hanger to be adjusted in the vertical direction, a movable cavity is provided in the hanger support column, and at least one sliding groove is provided on the outer wall of the hanger support column, and the sliding groove is connected to the movable cavity;

[0015] The hanger is slidably mounted on the hanger support column by at least one lifting mechanism, the lifting mechanism includes a lifting drive and a lifting rod, a second mounting cavity is provided in the rotating base, the second mounting cavity is communicated with the movable cavity, the lifting drive is mounted in the second mounting cavity, the lifting rod is connected to the movable end of the lifting drive, and the hanger is connected to the lifting rod through the sliding groove.

[0016] Furthermore, in order to make the workpiece coating more uniform, the mounting seat is connected to the bracket through a rotating shaft assembly, and the rotating shaft assembly includes a rotating shaft, an angle driving member and an angle sensor. The rotating shaft is hinged to the bracket, and the axis of the rotating shaft forms a certain angle with the axis of the bracket. The angle driving member is installed inside the bracket, and the movable end of the angle driving member is connected to the rotating shaft. The angle sensor is installed at the connection between the rotating shaft and the bracket, and the angle sensor is suitable for detecting the rotation angle of the mounting seat.

[0017] Furthermore, an electromagnetic flow valve is provided at the outlet end of the branch pipe, and the electromagnetic flow valve is suitable for regulating the flow of the coating material flowing out of the branch pipe.

[0018] Furthermore, the movable platform is slidably mounted on the bottom of the coating chamber via at least one gear rack mechanism;

[0019] Wherein, the rack and pinion mechanism comprises:

[0020] a gear mounted on the bottom of the coating chamber;

[0021] Two racks are installed on the bottom of the moving platform.

[0022] Furthermore, in order to control the exhaust gas, exhaust meshes are provided on both sides of the coating body, and the exhaust meshes are connected to the coating cavity. A covering plate is hinged on the exhaust meshes. Two covering telescopic rods are also provided on both sides of the coating body. One end of the covering telescopic rod is hinged on the coating body, and the other end of the covering telescopic rod is hinged on the covering plate. A sealing strip is provided on the covering plate, and the covering telescopic rod is suitable for controlling the rotation and opening and closing action of the covering plate.

[0023] Furthermore, in order to reduce the impact of harmful gases on workers, fans are installed on both sides of the coating machine body, and the air duct direction of the fan is parallel to the length direction of the discharge mesh;

[0024] When the cover plate is opened, the fan is adapted to be started to disperse the coating gas discharged from the discharge mesh.

[0025] Furthermore, in order to ensure that the cavity is clean after coating, at least one spray head and a circulation fan are provided on the top of the coating cavity. The spray head is connected to an external water pump through a connecting pipe, and the surface of the blade of the circulation fan is provided with an anti-plating layer.

[0026] A water guide groove is provided at the bottom of the coating chamber, and the outlet of the water guide groove is connected to an external water pump. The spray head is suitable for spraying a cleaning agent to clean the coating chamber wall and the rack assembly after the coating is completed. The cleaning agent flows into the water guide groove and is sucked by the external water pump.

[0027] The circulating fan is suitable for generating airflow after coating is completed to accelerate the drying of the coating chamber.

[0028] After adopting the above technical solution, the present invention has the following beneficial effects:

[0029] 1. In the present invention, the staff opens the airtight door so that the connecting telescopic rod drives the movable platform to slide out of the coating chamber to the outside of the entrance and exit. Then the staff fixes the workpiece to be coated on the mounting seat of the hanger, pushes the airtight door so that the connecting telescopic rod retracts and drives the movable platform back into the coating chamber. After confirming that the airtight door is closed, the vacuum pump is started to suck the air in the coating chamber to form a low-pressure environment to reduce gas interference;

[0030] The coating source evenly outputs the coating gas into the coating chamber through the connecting pipe. At this time, the rotary drive motor starts, driving the rotating base and the rack support column to rotate. The lifting drive component drives the rack to move up and down, and the mounting seat rotates by the rotating shaft assembly. The multi-directional movement enables the workpiece on the mounting seat to be evenly covered with the coating material, reducing blind spots and effectively preventing the workpiece in a fixed position from being effectively covered by the coating material in some areas.

[0031] After the coating is completed, close the telescopic rod to open the covering plates with discharge meshes on both sides, start the fan to blow away and dilute the residual coating gas to reduce the harm, and open the airtight door again to collect the workpiece on the mounting seat.

[0032] 2. In the present invention, when the coating chamber needs to be cleaned, the airtight door is closed, and the external controller controls the spray head to spray the cleaning agent to clean the coating chamber wall and the rack assembly. The waste liquid is recovered to the external water pump through the water guide trough;

[0033] The circulating fan is then started through an external controller to generate a spiral airflow, accelerating the drying of the cavity and preventing residual water stains from affecting subsequent processes.

[0034] 3. In the present invention, the branch pipes connected to the through pipe are distributed at the top of the coating chamber, and the flow rate of each outlet is controlled by the electromagnetic flow valve to ensure uniform diffusion of the coating material. After the first coating process is completed, the workpiece is taken out to detect the coating thickness of the workpiece, and the electromagnetic flow valve can be adjusted according to the thickness of the workpiece in different areas. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 A perspective view of a vacuum ion plating device capable of uniform film deposition according to the present invention;

[0036] Figure 2 This is a front view of a vacuum ion plating device capable of uniform film deposition according to the present invention;

[0037] Figure 3It is a left side view of a vacuum ion plating device capable of uniform film coating according to the present invention;

[0038] Figure 4 A top view of a vacuum ion plating device capable of uniform film deposition according to the present invention;

[0039] Figure 5 This is a full cross-sectional view of a vacuum ion plating device capable of uniform film deposition according to the present invention. DETAILED DESCRIPTION

[0040] In order to make the contents of the present invention more clearly understood, the present invention is further described in detail below based on specific embodiments in conjunction with the accompanying drawings.

[0041] like Figure 1-5 As shown, a vacuum ion plating device capable of uniformly depositing a film comprises:

[0042] A coating machine body 1 is provided with a coating chamber 11 in the coating machine body 1, a vacuum pump 12 is provided on the top of the coating machine body 1, and a suction port of the vacuum pump 12 is connected to the coating chamber 11;

[0043] The coating mechanism includes at least one coating source 21 and a connecting pipe. The coating source 21 is connected to the connecting pipe. The connecting pipe is composed of a main pipe 221 and multiple branch pipes 222. The top of the coating body 1 is provided with multiple through holes adapted to the branch pipes 222.

[0044] The movable platform 3 is mounted on the bottom of the coating chamber 11 by sliding;

[0045] The rack assembly includes a rack support column 41 and a plurality of racks 42. The racks 42 are slidably mounted on the rack support column 41. The racks 42 are provided with a plurality of mounting seats 43 suitable for placing workpieces to be coated.

[0046] The coating machine body 1 is provided with an entrance and exit 13, which is connected to the coating chamber 11. An airtight door 14 is hinged at the entrance and exit 13. At least one connecting telescopic rod 15 is hinged between the airtight door 14 and the movable platform 3. One end of the connecting telescopic rod 15 is hinged on the airtight door 14, and the other end of the connecting telescopic rod 15 is hinged on the movable platform 3. When the airtight door 14 is opened, the movable platform 3 is driven to slide out of the coating chamber 11 through the telescopic action of the connecting telescopic rod 15, so that the workpiece of the mounting seat 43 is outside the entrance and exit 13. When the airtight door 14 is closed, the movable platform 3 is driven in the reverse direction to return to the working position in the coating chamber 11.

[0047] The coating source 21 is suitable for depositing the coating material in the form of ions onto the surface of the workpiece to be coated through the connecting through-tube.

[0048] In this embodiment, the branch pipe 222 connected to the through pipe is distributed at the top of the coating chamber 11, and the flow rate of each outlet is controlled by the electromagnetic flow valve to ensure uniform diffusion of the coating material. After the first coating process is completed, the workpiece is taken out to detect the coating thickness of the workpiece, and the electromagnetic flow valve can be adjusted according to the thickness of the workpiece in different areas.

[0049] Specifically, if Figure 1-2 、 Figure 5 As shown, the rack support column 41 is installed on the mobile platform 3 through a rotating base 51. The mobile platform 3 is provided with a first installation cavity 31. The first installation cavity 31 is provided with a rotating drive motor 32. The movable end of the rotating drive motor 32 is connected to the rotating base 51.

[0050] Specifically, if Figure 5 As shown, the movable platform 3 is provided with a rotation groove 33, and a circular protrusion 331 is provided in the rotation groove 33;

[0051] The rotating base 51 moves in the rotating groove 33 . A circular concave part 511 is provided at the bottom of the rotating base 51 . When the rotating base 51 is installed in place, the circular protrusion 331 is suitable for being inserted into the circular concave part 511 .

[0052] Specifically, if Figure 1-2 、 Figure 5 As shown, a movable cavity 411 is provided in the rack support column 41, and at least one sliding groove 412 is provided on the outer wall of the rack support column 41, and the sliding groove 412 is connected to the movable cavity 411;

[0053] The hanger 42 is slidably installed on the hanger support column 41 through at least one lifting mechanism. The lifting mechanism includes a lifting drive and a lifting rod 44. A second installation cavity 512 is provided in the rotating base 51. The second installation cavity 512 is connected to the movable cavity 411. The lifting drive is installed in the second installation cavity 512. The lifting rod 44 is connected to the movable end of the lifting drive. The hanger 42 is connected to the lifting rod 44 through the sliding groove 412.

[0054] Specifically, if Figure 1-5 As shown, the mounting seat 43 is connected to the hanger 42 through a rotating shaft assembly. The rotating shaft assembly includes a rotating shaft 61, an angle driving member and an angle sensor. The rotating shaft 61 is hinged to the hanger 42. The axis of the rotating shaft 61 forms a certain angle with the axis of the hanger 42. The angle driving member is installed inside the hanger 42. The movable end of the angle driving member is connected to the rotating shaft 61. The angle sensor is installed at the connection between the rotating shaft 61 and the hanger 42. The angle sensor is suitable for detecting the rotation angle of the mounting seat 43.

[0055] Specifically, an electromagnetic flow valve is provided at the outlet end of the branch pipe 222 , and the electromagnetic flow valve is suitable for regulating the flow of the coating material flowing out of the branch pipe 222 .

[0056] Specifically, if Figure 1-2 As shown, the movable platform 3 is slidably mounted on the bottom of the coating chamber 11 through at least one gear rack mechanism;

[0057] Among them, the rack and pinion mechanism includes:

[0058] A gear 71 mounted at the bottom of the coating chamber 11;

[0059] Two racks 72 mounted on the bottom of the moving platform 3;

[0060] In this embodiment, the two racks 72 are engaged with the gear 71 , and the airtight door 14 is pulled to move the two racks 72 outwards through the connecting telescopic rod 15 .

[0061] Specifically, if Figure 1-5 As shown, discharge meshes 81 are provided on both sides of the coating body 1, and the discharge meshes 81 are connected to the coating chamber 11. A covering plate 82 is hinged on the discharge meshes 81. Two covering telescopic rods 83 are also provided on both sides of the coating body 1. One end of the covering telescopic rod 83 is hinged on the coating body 1, and the other end of the covering telescopic rod 83 is hinged on the covering plate 82. A sealing strip is provided on the covering plate 82, and the covering telescopic rod 83 is suitable for controlling the rotation and opening and closing action of the covering plate 82.

[0062] Specifically, if Figure 1-3 As shown, fans 84 are also installed on both sides of the coating machine body 1, and the air duct direction of the fan 84 is parallel to the length direction of the discharge mesh 81;

[0063] When the cover plate 82 is opened, the fan 84 is adapted to be started to blow away the coating gas discharged from the discharge mesh 81 .

[0064] Specifically, if Figure 5 As shown, at least one spray head 9 and a circulation fan 10 are further provided on the top of the coating chamber 11. The spray head 9 is connected to an external water pump through a connecting pipe, and the surface of the blade of the circulation fan 10 is provided with an anti-plating layer.

[0065] A water channel 16 is provided at the bottom of the coating chamber 11. The outlet of the water channel 16 is connected to an external water pump. The spray head 9 is suitable for spraying a cleaning agent to clean the walls of the coating chamber 11 and the rack assembly after the coating is completed. The cleaning agent flows into the water channel 16 and is sucked out by the external water pump.

[0066] The circulation fan 10 is adapted to generate airflow after coating is completed to accelerate the drying of the coating chamber 11 .

[0067] In this embodiment, when the coating chamber 11 needs to be cleaned, the airtight door 14 is closed, and the external controller controls the spray head 9 to spray the cleaning agent to clean the coating chamber 11 wall and the rack assembly, and the waste liquid is recovered to the external water pump through the water guide trough;

[0068] The circulation fan 84 is then started by an external controller to generate a spiral airflow, thereby accelerating the drying of the cavity and preventing residual water stains from affecting subsequent processes.

[0069] In this embodiment, the worker opens the airtight door 14 so that the connecting telescopic rod 15 drives the movable platform 3 to slide out of the coating chamber 11 to the outside of the entrance 13. Then, the worker fixes the workpiece to be coated on the mounting seat 43 of the hanger, pushes the airtight door 14 so that the connecting telescopic rod 15 retracts and drives the movable platform 3 back into the coating chamber 11. After confirming that the airtight door 14 is closed, the vacuum pump 12 is started to suck the air in the coating chamber 11 to form a low-pressure environment to reduce gas interference.

[0070] The coating source 21 evenly outputs the coating gas into the coating chamber 11 through the connecting pipe. At this time, the rotary drive motor 32 is started, driving the rotating base 51 and the rack support column 41 to rotate. The lifting drive member drives the rack to move up and down, and the mounting seat 43 rotates by the rotating shaft 61 assembly. The multi-directional movement allows the workpiece on the mounting seat 43 to be evenly covered with the coating material, reducing blind spots and effectively preventing the workpiece in a fixed position from being effectively covered by the coating material in some areas.

[0071] After the coating is completed, the telescopic rod 83 is closed to open the covering plate 82 of the discharge mesh 81 on both sides, and the fan 84 is started to blow away and dilute the residual coating gas to reduce the harm, and the airtight door 14 is opened again to collect the workpiece on the mounting seat 43.

[0072] The above specific embodiments further illustrate the technical problems, technical solutions and beneficial effects solved by the present invention. It should be understood that the above are only specific embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A vacuum ion plating device capable of uniform film coating, characterized in that: include: A coating machine body (1), wherein a coating chamber (11) is provided in the coating machine body (1), a vacuum pump (12) is provided on the top of the coating machine body (1), and a suction port of the vacuum pump (12) is connected to the coating chamber (11); A coating mechanism, the coating mechanism comprising at least one coating source (21) and a connecting pipe, the coating source (21) being connected to the connecting pipe, the connecting pipe being composed of a main pipe (221) and a plurality of branch pipes (222), the top of the coating body (1) being provided with a plurality of through holes adapted to the branch pipes (222); A movable platform (3), the movable platform (3) being mounted on the bottom of the coating chamber (11) by sliding; A rack assembly, the rack assembly comprising a rack support column (41) and a plurality of racks (42), the racks (42) being slidably mounted on the rack support column (41), and the racks (42) being provided with a plurality of mounting seats (43) suitable for placing workpieces to be coated; The coating machine body (1) is provided with an entrance and exit (13), the entrance and exit (13) is connected to the coating chamber (11), an airtight door (14) is hinged at the entrance and exit (13), at least one connecting telescopic rod (15) is hinged between the airtight door (14) and the movable platform (3), one end of the connecting telescopic rod (15) is hinged on the airtight door (14), and the other end of the connecting telescopic rod (15) is hinged on the movable platform (3), and opening the airtight door (14) is suitable for driving the movable platform (3) to slide out of the coating chamber (11) through the telescopic action of the connecting telescopic rod (15), so that the workpiece of the mounting seat (43) is located outside the entrance and exit (13), and when the airtight door (14) is closed, the movable platform (3) is driven in the reverse direction to return to the working position in the coating chamber (11); The coating source (21) is suitable for depositing the coating material in the form of ions onto the surface of the workpiece to be coated through the connecting pipe.

2. The vacuum ion plating device capable of uniform film coating according to claim 1, characterized in that: The hanger support column (41) is installed on the mobile platform (3) through a rotating base (51). The mobile platform (3) is provided with a first installation cavity (31). A rotating drive motor (32) is installed in the first installation cavity (31). The movable end of the rotating drive motor (32) is connected to the rotating base (51).

3. The vacuum ion plating device capable of uniform film coating according to claim 2, characterized in that: The movable platform (3) is provided with a rotation groove (33), and a circular protrusion (331) is provided in the rotation groove (33); The rotating base (51) moves in the rotating groove (33), and a circular concave part (511) is provided at the bottom of the rotating base (51). When the rotating base (51) is installed in place, the circular convex part (331) is suitable for being inserted into the circular concave part (511).

4. The vacuum ion plating device capable of uniform film coating according to claim 2, characterized in that: An active cavity (411) is provided in the rack support column (41), and at least one sliding groove (412) is provided on the outer wall of the rack support column (41), wherein the sliding groove (412) is in communication with the active cavity (411); The hanger (42) is slidably mounted on the hanger support column (41) via at least one lifting mechanism, the lifting mechanism comprising a lifting drive and a lifting rod (44), a second mounting cavity (512) is provided in the rotating base (51), the second mounting cavity (512) is communicated with the movable cavity (411), the lifting drive is mounted in the second mounting cavity (512), the lifting rod (44) is connected to the movable end of the lifting drive, and the hanger (42) passes through the sliding slot (412) and is connected to the lifting rod (44).

5. The vacuum ion plating device capable of uniform film coating according to claim 4, characterized in that: The mounting seat (43) is connected to the hanger (42) through a rotating shaft assembly, the rotating shaft assembly includes a rotating shaft (61), an angle driving member and an angle sensor, the rotating shaft (61) is hinged to the hanger (42), the axis of the rotating shaft (61) forms a certain angle with the axis of the hanger (42), the angle driving member is installed inside the hanger (42), the movable end of the angle driving member is connected to the rotating shaft (61), the angle sensor is installed at the connection between the rotating shaft (61) and the hanger (42), and the angle sensor is suitable for detecting the rotation angle of the mounting seat (43).

6. The vacuum ion plating device capable of uniform film coating according to claim 1, characterized in that: An electromagnetic flow valve is provided at the outlet end of the branch pipe (222), and the electromagnetic flow valve is suitable for regulating the flow of the coating material flowing out of the branch pipe (222).

7. The vacuum ion plating device capable of uniform film coating according to claim 1, characterized in that: The movable platform (3) is slidably mounted on the bottom of the coating chamber (11) via at least one gear rack mechanism; Wherein, the rack and pinion mechanism includes: a gear (71) mounted on the bottom of the coating chamber (11); Two racks (72) are mounted on the bottom of the moving platform (3).

8. The vacuum ion plating device capable of uniform film coating according to claim 1, characterized in that: The coating machine body (1) is provided with discharge mesh holes (81) on both sides, and the discharge mesh holes (81) are connected to the coating chamber (11). A covering plate (82) is hinged on the discharge mesh holes (81). Two covering telescopic rods (83) are also provided on both sides of the coating machine body (1). One end of the covering telescopic rod (83) is hinged on the coating machine body (1), and the other end of the covering telescopic rod (83) is hinged on the covering plate (82). A sealing strip is provided on the covering plate (82). The covering telescopic rod (83) is suitable for controlling the rotation opening and closing action of the covering plate (82).

9. The vacuum ion plating device capable of uniform film coating according to claim 8, characterized in that: Fans (84) are also installed on both sides of the coating machine body (1), and the air duct direction of the fan (84) is parallel to the length direction of the discharge mesh (81); When the cover plate (82) is opened, the fan (84) is adapted to be started to blow away the coating gas discharged from the discharge mesh (81).

10. The vacuum ion plating device capable of uniform film coating according to claim 1, characterized in that: The top of the coating chamber (11) is also provided with at least one spray head (9) and a circulation fan (10), the spray head (9) is connected to an external water pump via a connecting pipe, and the surface of the blade of the circulation fan (10) is provided with an anti-plating layer; A water guide groove (16) is provided at the bottom of the coating chamber (11), and an outlet of the water guide groove (16) is connected to an external water pump. The spray head (9) is suitable for spraying a cleaning agent to clean the wall of the coating chamber (11) and the rack assembly after coating is completed. The cleaning agent flows into the water guide groove (16) and is sucked by the external water pump. The circulating fan (10) is suitable for generating airflow after coating is completed to accelerate the drying of the coating chamber (11).

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