Vacuum pump

Abstract

The invention provides a vacuum pump capable of suppressing deformation of a stator in the vertical direction. A vacuum pump (1) is provided with: a rotor (4) housed in a housing (2) and rotationally driven; a plurality of stages of rotor blades (22) provided on the rotor (4); and a plurality of stages of stators (5) disposed between the plurality of stages of rotor blades (22). The stator (5) has an inner peripheral rib (51), an outer peripheral rib (53), and stator blades (55) connecting the inner peripheral rib (51) and the outer peripheral rib (53), and is housed in the housing (2) in a state where the outer peripheral rib (53) is sandwiched by the spacer (31). A deformation permitting section (57) that permits deformation in the radial direction of the inner peripheral rib (51) and / or the stator blade (55) is provided to at least a portion of the outer peripheral rib (53) of the stator (5).

Description

Technical Field

[0001] The present invention relates to a vacuum pump. Background Art

[0002] A vacuum pump includes a rotor having rotor blades and a stator disposed between the rotor blades (see, for example, Patent Document 1). In this vacuum pump, the rotor rotates, causing the rotor blades to move relative to stator blades provided on the stator. The vacuum pump then suctions the interior of a device to be exhausted and discharges the suctioned gas to the outside.

[0003] [Prior art literature]

[0004] [Patent Document]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2021-139361 Summary of the Invention

[0006] [Problems to be solved by the invention]

[0007] In vacuum pumps, the stator temperature is sometimes adjusted to a high temperature, for example to prevent product accumulation inside the vacuum pump. Furthermore, even without temperature adjustment, the stator temperature can sometimes reach a high temperature due to the high-speed rotation of the rotor or the load of the exhaust gas. In conventional vacuum pumps, the stator's temperature fluctuations caused by temperature adjustment, for example, can cause the stator to deform vertically (i.e., toward the rotor blades), potentially causing the stator to contact the rotor blades. Contact between the stator and the rotor blades can cause the vacuum pump to malfunction or damage the stator and / or rotor blades.

[0008] Therefore, an object of the present invention is to suppress deformation of a stator in the direction of the rotation axis and to operate a vacuum pump safely.

[0009] [Technical means to solve the problem]

[0010] A vacuum pump according to one embodiment of the present invention includes a rotor, multi-stage rotor blades, and a multi-stage stator. The rotor is housed in a housing and is driven to rotate. The multi-stage rotor blades are disposed on the rotor. The multi-stage stator is disposed between the multi-stage rotor blades. Each stator has inner circumferential ribs, outer circumferential ribs, and stator blades. The stator blades connect the inner circumferential ribs to the outer circumferential ribs. Each stator is housed in the housing with the circumferential ribs clamped by spacers. A deformation-permitting portion is provided on at least a portion of the outer circumferential ribs of the stator to allow radial deformation of the inner circumferential ribs and / or the stator blades.

[0011] [Effects of the Invention]

[0012] In a vacuum pump according to one embodiment of the present invention, at least a portion of the outer ribs of the stator is provided with a deformation-permitting portion that allows radial deformation of the inner ribs and / or stator blades. Thus, even if the outer ribs are clamped by spacers and are difficult to deform radially, the inner ribs and / or stator blades can easily deform radially. As a result, for example, in the event of temperature fluctuations within the vacuum pump, the inner ribs and / or stator blades can deform radially, thereby preventing them from deforming toward the rotor blades. Thus, even in the event of temperature fluctuations within the vacuum pump, the stator will not come into contact with the rotor blades, allowing the vacuum pump to operate safely. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 This is a cross-sectional view of a vacuum pump.

[0014] Figure 2 This is an overall diagram of the stator components.

[0015] Figure 3 This is a cross-sectional view of a portion of a stator component provided with a deformation allowing portion.

[0016] Figure 4 This is a cross-sectional view of a deformation-allowing portion provided with a groove.

[0017] Figure 5 This is a cross-sectional view of a deformation-allowing portion provided with a hollow portion.

[0018] Figure 6 This is a diagram showing an example of a through portion, a groove portion, and a hollow portion other than a circular shape.

[0019] [Explanation of Symbols]

[0020] 1: Vacuum pump

[0021] 2: Shell

[0022] 3: Base

[0023] 4: Rotor

[0024] 5: Stator

[0025] 5a: stator components

[0026] 6: Threaded stator

[0027] 11: First end

[0028] 12: Second end

[0029] 13: Intake

[0030] 14: Base end

[0031] 15: Exhaust port

[0032] 21: Axis

[0033] 21A: thrust plate

[0034] 21B: Target

[0035] 22: Rotor blades

[0036] 23: Rotor cylinder

[0037] 31: Spacer

[0038] 44A, 44E: bearings

[0039] 44B, 44C, 44D: Magnetic bearings

[0040] 45: Motor

[0041] 45A: Motor rotor

[0042] 45B: Motor stator

[0043] 51: Inner rib

[0044] 53: Peripheral ribs

[0045] 55: stator blades

[0046] 57: Deformation allowance

[0047] 71: Heater

[0048] 72: Temperature sensor

[0049] 571: Through

[0050] 571a: Great Circle Penetration

[0051] 571b: small circle through part

[0052] 571c: semicircular through-hole

[0053] 573: Groove

[0054] 575: Hollow

[0055] A1: Axis direction

[0056] S1: First interior space

[0057] S2: Exhaust space DETAILED DESCRIPTION

[0058] Below, use Figure 1 Let's explain the vacuum pump. Figure 1 2 is a cross-sectional view of the vacuum pump 1. The vacuum pump 1 includes a housing 2, a base 3, a rotor 4, and a multi-stage stator 5.

[0059] The housing 2 includes a first end 11, a second end 12, and a first internal space S1. An air intake port 13 is provided at the first end 11. The air intake port 13 is connected to the interior of the exhaust target device so that gas can flow. The first internal space S1 is connected to the air intake port 13. The second end 12 is located on the opposite side of the first end 11 in the axial direction of the rotor 4 (hereinafter referred to as "axial direction A1"). The second end 12 is connected to the base 3. The base 3 includes a base end 14. The base end 14 is connected to the second end 12 of the housing 2. The base 3 is, for example, an aluminum member.

[0060] The rotor 4 is housed within the interior of the housing 2. The rotor 4 includes a shaft 21. The shaft 21 extends in the axial direction A1. The shaft 21 is rotatably housed within the base 3. A thrust plate 21A is provided below the shaft 21. Furthermore, a target 21B is screwed onto the lower end of the shaft 21.

[0061] The rotor 4 includes multiple rotor blades 22 and a rotor cylindrical portion 23. Each of the multiple rotor blades 22 is connected to the shaft 21 at an angle relative to the axial direction A1. The multiple rotor blades 22 are spaced apart from each other in the axial direction A1. Although not shown in the figure, the multiple rotor blades 22 extend radially from the shaft 21. In the drawings, only one of the multiple rotor blades 22 is assigned a reference numeral, while the reference numerals for the other rotor blades 22 are omitted. The rotor cylindrical portion 23 is disposed below the multiple rotor blades 22. The rotor cylindrical portion 23 extends along the axial direction A1.

[0062] The multi-stage stator 5 is respectively arranged on the base 3 via the spacers 31. When the housing 2 is fixed to the base 3, the stacked spacers 31 are clamped between the base 3 and the housing 2, and the outer peripheral ribs 53 ( Figure 2 ) are sandwiched between the spacers 31. As a result, the multi-stage stators 5 are housed in the housing 2, spaced apart from each other in the axial direction A1. Specifically, each stator 5 is housed in the housing 2 with its outer peripheral ribs sandwiched between the two spacers 31. That is, by sandwiching the outer peripheral ribs of each stator 5 between the two spacers 31, two adjacent stators 5 are arranged within the housing 2 with a predetermined gap between them.

[0063] The multi-stage stators 5 are respectively arranged between the multi-stage rotor blades 22. Specifically, the stator blades 55 ( Figure 2 ) are arranged to face the adjacent rotor blade 22.

[0064] The stator 5 has a circular shape that extends along the interior space of the housing 2. The stator 5 includes a plurality of stator components 5a that divide the circular shape. In this embodiment, the stator 5 includes two stator components 5a. That is, in this embodiment, the stator components 5a have a semicircular shape. Alternatively, the stator 5 may include two or more sector-shaped stator components 5a, or a single circular stator component 5a.

[0065] The vacuum pump 1 includes a threaded stator 6. The threaded stator 6 is fixed in contact with the base 3. The threaded stator 6 is arranged facing the outer circumferential surface of the rotor cylindrical portion 23 with a small gap in the radial direction of the rotor cylindrical portion 23. The inner circumferential surface of the threaded stator 6 facing the rotor cylindrical portion 23 is provided with a spiral groove.

[0066] like Figure 1 As shown, an exhaust space S2 is formed further downstream of the exhaust downstream end of the rotor cylindrical portion 23 and the threaded stator 6. The exhaust target gas discharged from the exhaust target device is guided to the exhaust space S2. The exhaust space S2 is connected to the exhaust port 15. The exhaust port 15 is provided on the base 3. Another vacuum pump (not shown) is connected to the exhaust port 15. In addition, the exhaust downstream side refers to the side closer to the exhaust space S2 in the axial direction A1. In addition, the exhaust downstream direction refers to the direction facing the exhaust space S2.

[0067] The vacuum pump 1 includes a bearing 44A, a bearing 44E, magnetic bearings 44B through 44D, and a motor 45. Bearings 44A and 44E are mounted on the base 3 at the location where the shaft 21 is housed. Bearings 44A and 44E rotatably support the shaft 21. Bearings 44A and 44E are ball bearings. Magnetic bearings 44B through 44D utilize magnetic force to support the shaft 21. Magnetic bearings 44B and 44C are radial magnetic bearings that support the shaft 21 radially. Magnetic bearing 44D is a thrust magnetic bearing that supports the shaft 21 axially.

[0068] The motor 45 rotates the rotor 4. The motor 45 includes a motor rotor 45A and a motor stator 45B. The motor rotor 45A is mounted on the shaft 21. The motor stator 45B is mounted on the base 3. The motor stator 45B and the motor rotor 45A are arranged to face each other.

[0069] In the vacuum pump 1, the multi-stage rotor blades 22 and the multi-stage stator 5 (stator blades) constitute a turbomolecular pumping unit. Furthermore, the rotor cylindrical portion 23 and the threaded stator 6 constitute a thread groove pumping unit. In the vacuum pump 1, the motor 45 rotates the rotor 4, causing exhaust gas to flow from the interior of the exhaust device through the intake port 13 into the first internal space S1. The exhaust gas in the first internal space S1 passes through the turbomolecular pumping unit and the thread groove pumping unit and is guided to the exhaust space S2. The exhaust gas in the exhaust space S2 is discharged through the exhaust port 15. As a result, the interior of the exhaust device attached to the intake port 13 is brought into a high vacuum state.

[0070] A heater 71 and cooling water piping are provided on the outer wall of the base 3 to control the temperature of the base 3. The temperature of the base 3 is detected by a temperature sensor 72. Based on the temperature detected by the temperature sensor 72, the temperature of the base 3 is controlled by balancing the heating of the base 3 by the heater 71 and the cooling by the cooling water flowing through the cooling water piping.

[0071] Below, use Figure 2 The specific structure of the stator 5 (stator member 5 a ) will be described. Figure 2 This is a general diagram of the stator component 5a. Each stage of the stator 5 is formed by combining multiple stator components 5a. Figure 2 The two stator parts 5a divided into 180 degrees as shown are connected to form an annular stator 5 ( Figure 2 Only one of the two stator components is described in the figure). The stator component 5a has inner peripheral ribs 51, outer peripheral ribs 53, and a plurality of stator blades 55.

[0072] Inner ribs 51 form the inner circumference of stator 5. Rotor 4 is disposed in the space within the inner circumference of inner ribs 51. That is, the inner diameter of inner ribs 51 is larger than the diameter of rotor 4. Outer ribs 53 are disposed radially a predetermined distance from inner ribs 51 and form the outer circumference of stator 5.

[0073] The stator blades 55 are arranged to connect the inner circumferential ribs 51 and the outer circumferential ribs 53. The stator blades 55 extend radially about the shaft 21. The stator blades 55 are tilted in the opposite direction to the inclination of the rotor blades 22. For example, if the rotor blades 22 are tilted from the intake side to the exhaust side, the stator blades 55 are tilted from the exhaust side to the intake side. On the other hand, if the rotor blades 22 are tilted from the exhaust side to the intake side, the stator blades 55 are tilted from the intake side to the exhaust side. The inclination direction of the rotor blades 22 and the stator blades 55 can be appropriately determined based on the direction of rotation of the rotor 4, etc.

[0074] In the vacuum pump 1, raw materials flowing in from the exhaust target device generate specific products, which can accumulate inside the vacuum pump 1. To prevent this, the vacuum pump 1's heater 71 and / or cooling water piping are used to regulate the vacuum pump 1's temperature. If the temperature of the vacuum pump 1 fluctuates due to this temperature regulation, the inner circumferential ribs 51 and / or stator blades 55 of the stator 5 may deform vertically (towards the rotor blades 22). If this deformation becomes excessive, the stator blades 55 may come into contact with the rotor blades 22.

[0075] The present inventors discovered that when the vacuum pump 1 experiences temperature fluctuations, the inner circumferential ribs 51 and / or stator blades 55 deform significantly in the vertical direction because the outer circumferential ribs 53 are held between the spacers 31, preventing them from deforming within the plane of the stator 5 (i.e., in the radial direction of the stator 5). Based on this knowledge, the present inventors discovered that by providing the outer circumferential ribs 53 with deformation-permitting portions 57 (described below), the outer circumferential ribs 53 deform in the radial direction of the stator 5, and this deformation causes the inner circumferential ribs 51 and / or stator blades 55 to deform radially, thereby suppressing vertical deformation of the inner circumferential ribs 51 and / or stator blades 55.

[0076] like Figure 2 As shown, the deformation allowing portion 57 is provided at the circumferential end portion of the outer peripheral rib 53 of the stator component 5a. Preferably, the deformation allowing portion 57 is provided at both circumferential end portions of the outer peripheral rib 53 of the stator component 5a. That is, the deformation allowing portion 57 is provided within a range of a predetermined length extending from the circumferential end portion of the outer peripheral rib 53 of the stator component 5a as a starting point toward the circumferential direction. Although not particularly limited, the predetermined length in the circumferential direction roughly corresponds to the amount of 2 to 3 stator blades 55. As shown in FIG. Figure 2 and Figure 3 As shown, the deformation allowing portion 57 is provided with a plurality of through portions 571 that penetrate the outer peripheral rib 53 in the thickness direction. Specifically, the deformation allowing portion 57 is provided with two large circular through portions 571a, a small circular through portion 571b disposed between the two large circular through portions 571a, and a semicircular through portion 571c provided at the end of the outer peripheral rib 53. Figure 3 It is a cross-sectional view of a portion of the stator member 5 a where the deformation allowing portion 57 is provided.

[0077] like Figure 2 and Figure 3As shown, the through-portion 571 forms a space within the plane of the outer circumferential rib 53 (i.e., within a plane including the radial direction of the stator 5). Therefore, even when the outer circumferential rib 53 is held between the spacers 31, the through-portion 571 deforms within the plane of the outer circumferential rib 53 due to temperature fluctuations, etc., and accordingly, the inner circumferential rib 51 and / or the stator blades 55 deform in the radial direction of the stator 5. The radial deformation of the inner circumferential rib 51 and / or the stator blades 55 suppresses deformation of the inner circumferential rib 51 and / or the stator blades 55 in the vertical direction (direction toward the rotor blades 22).

[0078] Furthermore, by providing semicircular through-portions 571c at both ends of the outer circumferential rib 53, these through-portions 571c can deform more significantly. This is because the ends of the outer circumferential rib 53 of the stator component 5a serve as the connection points with the other stator component 5a, and a gap exists in these areas. As a result, the inner circumferential rib 51 and / or the stator blades 55 can deform more significantly in the radial direction, further suppressing vertical deformation of the inner circumferential rib 51 and / or the stator blades 55.

[0079] like Figure 2 and Figure 3 As shown in FIG. 5 , the thickness of the deformation allowing portion 57 is smaller than the thickness of the other portions of the peripheral rib 53. Figure 2 As shown, the deformation-allowing portion 57 is formed in a thin, band-like shape circumferentially, starting from the circumferential end of the outer rib 53. Furthermore, multiple through-portions 571 are provided within the band-like, thinly formed portion. Consequently, when the outer rib 53 is clamped between the two spacers 31, a gap is formed between the spacers 31 and the deformation-allowing portion 57. The gap between the spacers 31 and the deformation-allowing portion 57 facilitates deformation of the deformation-allowing portion 57 within the plane of the outer rib 53, thereby facilitating radial deformation of the inner rib 51 and / or the stator blades 55.

[0080] In the vacuum pump 1, at least a portion of the outer ribs 53 of the stator 5 is provided with a deformation-permitting portion 57 that allows radial deformation of the inner ribs 51 and / or stator blades 55. This allows the inner ribs 51 and / or stator blades 55 to deform easily in the radial direction, even if the outer ribs 53 are held by spacers and are difficult to deform radially. As a result, for example, when the vacuum pump 1 experiences temperature fluctuations, the inner ribs 51 and / or stator blades 55 can deform radially, thereby preventing the inner ribs 51 and / or stator blades 55 from deforming toward the rotor blades 22. Consequently, even when the vacuum pump 1 experiences temperature fluctuations, the stator 5 does not come into contact with the rotor blades 22, allowing the vacuum pump 1 to operate safely. In particular, by arranging the deformation-allowing portion 57 at both circumferential end portions of the outer peripheral rib 53 of the stator component 5a, the effect of suppressing the deformation of the inner peripheral rib 51 and / or the stator blade 55 in the direction approaching the rotor blade 22 can be more significant compared to the case where it is arranged at the circumferential central portion of the outer peripheral rib 53 of the stator component 5a.

[0081] As mentioned above, although one embodiment of the present invention has been described, the present invention is not limited to the above embodiment, and various modifications can be made without departing from the scope of the invention.

[0082] In the vacuum pump 1 of the embodiment, the outer peripheral rib 53 is easily deformed in the radial direction (within the plane of the stator 5) by providing the through-hole 571 in the deformation-allowing portion 57 of the outer peripheral rib 53. The through-hole 571 can be formed by a simple process of drilling a hole in the outer peripheral rib 53. However, the structure that easily deforms the outer peripheral rib 53 is not limited to the through-hole 571. For example, Figure 4 As shown, the outer peripheral rib 53 can be easily deformed by providing the groove 573 that does not penetrate the outer peripheral rib 53 in the deformation allowing portion 57. The groove 573 can be formed without penetrating the outer peripheral rib 53 and can therefore be formed by easy processing. Figure 4 It is a cross-sectional view of the deformation allowing portion 57 provided with the groove portion 573 .

[0083] In addition, for example, Figure 5 As shown, by providing a hollow portion 575, the space within the outer peripheral rib 53, within the deformation-permitting portion 57, the outer peripheral rib 53 can be easily deformed. The stator 5 having the hollow portion 575 provided in the outer peripheral rib 53 can be formed using, for example, a three-dimensional printer. The hollow portion 575 is invisible from the outside of the stator 5, thereby improving the appearance of the stator 5. Figure 5 It is a cross-sectional view of the deformation allowing portion 57 provided with the hollow portion 575 .

[0084] The through portion 571, the groove portion 573, and the hollow portion 575 formed in the deformation allowing portion 57 may be formed in any shape other than a circle. Figure 6 As shown, V-shaped members and triangular-shaped members are arranged alternately. Figure 6 This is a diagram showing an example of a through portion 571 , a groove portion 573 , and a hollow portion 575 that are not circular.

[0085] The deformation allowing portion 57 may be arranged at any position on the outer peripheral rib 53 as long as it is at least a portion of the outer peripheral rib 53. For example, a plurality of deformation allowing portions 57 may be arranged at equal intervals along the circumferential direction of the outer peripheral rib 53.

[0086] The deformation allowing portion 57 may be combined to form the through portion 571 , the groove portion 573 and / or the hollow portion 575 in any shape.

[0087] The vacuum pump 1 in the above embodiment is a pump that integrates a turbomolecular pump comprising multi-stage rotor blades 22 and a multi-stage stator 5 with a threaded groove pump comprising a rotor cylindrical portion 23 and a threaded stator 6. However, the threaded groove pump can be omitted. In other words, the stator 5 having the aforementioned deformation-permitting portion 57 can also be applied to a vacuum pump comprising only a turbomolecular pump.

[0088] Those skilled in the art should understand that the exemplary embodiments are specific examples of the following embodiments.

[0089] (First Embodiment) A vacuum pump according to the first embodiment (e.g., vacuum pump 1) includes a rotor (e.g., rotor 4), multiple stages of rotor blades (e.g., rotor blades 22), and a multiple stages of stators (e.g., stator 5). The rotor is housed in a housing (e.g., housing 2) and is driven to rotate. The multiple stages of rotor blades are disposed within the rotor. The multiple stages of stators are positioned between the multiple stages of rotor blades. Each stator has inner circumferential ribs (e.g., inner circumferential ribs 51), outer circumferential ribs (e.g., outer circumferential ribs 53), and stator blades (e.g., stator blades 55). The stator blades connect the inner and outer circumferential ribs. Each stator is housed in the housing with the circumferential ribs held between spacers (e.g., spacers 31). Deformation-permitting portions (e.g., deformation-permitting portions 57) are provided on at least a portion of the stator's outer circumferential ribs to allow radial deformation of the inner circumferential ribs and / or stator blades.

[0090] In the vacuum pump of the first embodiment, at least a portion of the stator's outer ribs is provided with a deformation-permitting portion that allows radial deformation of the inner ribs and / or stator blades. This allows the inner ribs and / or stator blades to deform easily, even if the outer ribs are held in place by spacers and are difficult to deform radially. As a result, for example, if the vacuum pump experiences temperature fluctuations, the inner ribs and / or stator blades can deform radially, thereby preventing them from deforming toward the rotor blades. Consequently, even if the vacuum pump experiences temperature fluctuations, the stator will not come into contact with the rotor blades, ensuring safe operation of the vacuum pump.

[0091] (Second embodiment) In the vacuum pump of the first embodiment, each stator stage may include multiple stator components (e.g., stator component 5a). In this case, the deformation-permitting portion may be formed at the circumferential end of the outer rib of the stator component. The circumferential end of the outer rib of the stator component serves as the connection portion with another stator component, with a slight gap existing in this portion. As a result, the inner rib and / or stator blades can deform more significantly in the radial direction, thereby further suppressing vertical deformation of the inner rib and / or stator blades.

[0092] (Third embodiment) In the vacuum pump of the first or second embodiment, the thickness of the deformation-allowing portion can be smaller than the thickness of the remaining portions of the outer peripheral rib. In the vacuum pump of the third embodiment, when the outer peripheral rib is clamped by the spacers, a gap is formed between the spacers and the deformation-allowing portion, making it easier for the deformation-allowing portion to deform within the plane of the outer peripheral rib. As a result, the inner peripheral rib and / or stator blades are also more easily deformed in the radial direction.

[0093] (Fourth Embodiment) In the vacuum pump of any of the first to third embodiments, the deformation-allowing portion may include a through portion (e.g., through portion 571) that penetrates the outer peripheral rib. In the vacuum pump of the fourth embodiment, the through portion can be formed by the simple process of drilling a hole in the outer peripheral rib, thereby facilitating stator processing.

[0094] (Fifth Embodiment) In the vacuum pump of any of the first to fourth embodiments, the deformation-allowing portion may include a hollow portion (e.g., hollow portion 575) formed within the outer peripheral rib. In the vacuum pump of the fifth embodiment, the hollow portion is invisible from the outside of the stator, thereby improving the stator's appearance.

[0095] (Sixth Embodiment) In the vacuum pump of any of the first to fifth embodiments, the deformation-allowing portion may include a groove (e.g., groove 573) formed in the outer peripheral rib. In the vacuum pump of the sixth embodiment, the groove can be formed by easy processing, thereby facilitating processing of the stator.

Claims

1. A vacuum pump comprising: a rotor housed in the housing and driven to rotate; Multi-stage rotor blades are provided on the rotor; as well as The multi-stage stator is arranged between the multi-stage rotor blades. The stator includes an inner peripheral rib, an outer peripheral rib, and stator blades connecting the inner peripheral rib and the outer peripheral rib, and is housed in the housing in a state where the outer peripheral rib is sandwiched by spacers. A deformation allowing portion that allows deformation of the inner peripheral rib and / or the stator blade in the radial direction is provided on at least a portion of the outer peripheral rib.

2. The vacuum pump according to claim 1, wherein Each stator stage contains multiple stator components. The deformation allowing portion is formed at an end portion in the circumferential direction of the outer peripheral rib of the stator component.

3. The vacuum pump according to claim 1, wherein The thickness of the deformation allowing portion is smaller than the thickness of other portions of the outer peripheral rib.

4. The vacuum pump according to claim 1, wherein The deformation allowing portion has a through portion penetrating through the outer peripheral rib.

5. The vacuum pump according to claim 1, wherein The deformation allowing portion has a hollow portion formed inside the outer peripheral rib.

6. The vacuum pump according to claim 1, wherein The deformation allowing portion has a groove portion formed in the outer peripheral rib.

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