Valve body structure and semiconductor process equipment

Abstract

The invention provides a valve body structure and semiconductor process equipment. The valve body structure comprises a valve plate; the two connecting rods are connected with the two ends of the valve plate; the two driving sources can provide two rotating powers with opposite rotating directions; the first transmission part and the second transmission part are respectively connected with the two driving sources and the two connecting rods, and are used for converting the rotating power provided by the corresponding driving sources into linear power along a specified lifting direction and transmitting the linear power to the corresponding connecting rods; the synchronous switching assembly is connected with the first transmission part and the second transmission part and can switch the transmission relation between the first transmission part and the second transmission part. The first transmission part and the second transmission part can synchronously rotate in the first rotating direction or the second rotating direction, the second transmission part independently rotates in the first rotating direction or the first transmission part independently rotates in the second rotating direction, and therefore the two ends of the valve plate can synchronously ascend or descend, and single-end ascending or descending of the valve plate can be achieved. And therefore, the valve plate can be leveled.

Description

Technical Field

[0001] The present invention relates to the field of etching equipment manufacturing, and in particular to a valve body structure and a semiconductor process equipment. Background Art

[0002] As the requirements for etching process precision continue to increase, the requirements for the uniformity of the flow field inside the chamber of semiconductor etching equipment are also gradually increasing. Therefore, more and more semiconductor etching equipment uses vertical valves to control the internal air pressure of the chamber, thereby utilizing the vertical lifting characteristics of the valve plate of the vertical valve and its structural symmetry to improve the uniformity of the flow field inside the chamber.

[0003] Existing vertical valves often require separate motors on either side of the valve plate to synchronously drive the plate upwards and downwards. Therefore, existing vertical valves typically employ a dual-motor, dual-drive independent control approach. This involves a single master controller communicating with the controllers of both motors to control their synchronous rotation, thereby driving the valve plate upwards or downwards. However, during the drive process, errors and mismatches may exist between the motors and the transmission mechanism between them and the valve plate. These errors compound with the frequency of lift and lowering movements, causing the valve plate to tilt instead of vertically ascending. This, in turn, disrupts the flow field within the chamber of the semiconductor etching equipment, reducing its uniformity. Summary of the Invention

[0004] The present invention aims to at least solve the technical problem in the prior art that the valve plate tilts due to asynchronous driving on both sides of a vertical valve, and proposes a valve body structure and semiconductor process equipment.

[0005] To achieve the purpose of the present invention, a valve body structure is provided, which includes: a valve plate, a connecting assembly, a driving assembly, a transmission assembly and a synchronous switching assembly; wherein the connecting assembly includes a first connecting rod and a second connecting rod both connected to the valve plate;

[0006] The driving assembly is used to drive the transmission assembly to rotate, and includes a first driving source and a second driving source, both of which can output two rotating forces with opposite rotation directions;

[0007] The transmission assembly includes a first transmission member and a second transmission member, the first transmission member being connected to the first drive source and the first connecting rod respectively, for converting the rotational power output by the first drive source into linear power and transmitting the power to the first connecting rod; the second transmission member being connected to the second drive source and the second connecting rod respectively, for converting the rotational power provided by the second drive source into linear power and transmitting the power to the second connecting rod;

[0008] The synchronous switching assembly is connected to the first transmission member and the second transmission member respectively;

[0009] The synchronous switching assembly is used to switch to a first state when the first driving source outputs a rotational power in a first rotational direction, and drive the first transmission member and the second transmission member to rotate synchronously along the first rotational direction;

[0010] and further configured to switch to a second state when the second driving source outputs the rotational power in the first rotational direction, and drive the second transmission member to rotate along the first rotational direction;

[0011] It is also used to switch to a third state when the second driving source outputs a rotational power in a second rotational direction opposite to the first rotational direction, and drive the first transmission member and the second transmission member to rotate synchronously along the second rotational direction;

[0012] It is also used to switch to the fourth state when the first driving source outputs the rotational power of the second rotation direction, and drive the first transmission member to rotate along the second rotation direction.

[0013] Optionally, the synchronous switching assembly includes a first transmission belt, a second transmission belt, a first moving member, a second moving member, a first fixed member and a second fixed member; wherein,

[0014] The first fixed member is fixedly connected to the first transmission member, and the second fixed member is fixedly connected to the second transmission member; the first movable member is cooperatively connected to the first transmission member and can rotate therewith and move along a first straight line; the second movable member is cooperatively connected to the second transmission member and can rotate therewith and move along a second straight line; the first straight line is parallel to the second straight line;

[0015] The first transmission belt is used to connect the first movable member and the second fixed member, and the second transmission belt is used to connect the second movable member and the first fixed member to transmit rotational power;

[0016] In the first state, the first fixing member is used to drive the second movable member to rotate along the first rotation direction, and the second movable member is connected and fixed to the second fixing member to drive the second fixing member to rotate synchronously along the first rotation direction;

[0017] In the second state, the second moving member moves along the second straight line to be disconnected from the second fixed member; the transmission between the second fixed member and the first moving member is released;

[0018] In the third state, the second fixing member is used to drive the first movable member to rotate along the second rotation direction, and the first movable member is connected and fixed to the first fixing member to drive the first fixing member to rotate synchronously along the second rotation direction;

[0019] In the fourth state, the first moving member moves along the first straight line to be disconnected from the first fixed member; and the transmission between the first fixed member and the second moving member is released.

[0020] Optionally, the first transmission member includes a first screw rod; the second transmission member includes a second screw rod; the first screw rod extends along the first straight line; the second screw rod extends along the second straight line;

[0021] The first moving member is sleeved on the outer circumference of the first screw rod and is threadedly engaged, and the thread structure is configured so that when the first moving member rotates along the second rotation direction, the first moving member moves in the first direction;

[0022] The second moving member is sleeved on the outer circumference of the second screw rod and is threadedly engaged, and the thread structure is configured so that when the second moving member rotates along the first rotation direction, the second moving member moves in a second direction; the second direction is opposite to the first direction; and the first direction and the second direction are both parallel to the first straight line;

[0023] The first fixing member is located on a side of the first moving member facing the first direction; the second fixing member is located on a side of the second moving member facing the second direction.

[0024] Optionally, a first one-way connection mechanism is formed on a surface of the first movable member opposite to the first fixed member; the first one-way connection mechanism is configured to connect the first movable member and the first fixed member when the first movable member moves along the first direction to the first fixed member, and to disconnect the first movable member when the first movable member moves in the second direction;

[0025] A second one-way connection mechanism is formed on the surface opposite to the second fixed member of the second movable member; the second one-way connection mechanism is configured to connect the two when the second movable member moves along the second direction to the second fixed member, and to disconnect when the second movable member moves toward the first direction.

[0026] Optionally, the first fixing member includes a first internal gear and a first external gear; the second fixing member includes a second internal gear and a second external gear;

[0027] The first internal gear is fixedly connected to the first screw rod; the outer periphery of the first external gear is in contact with the second transmission belt;

[0028] A first through hole is formed at the central axis of the first external gear and is sleeved on the outer circumference of the internal gear; an inner circumferential surface of the first through hole is a toothed surface capable of unidirectionally meshing with the first internal gear, and is configured to mesh with the first internal gear when the first internal gear rotates in the first rotational direction, and to disengage from the first internal gear when the first internal gear rotates in the second rotational direction;

[0029] The second internal gear is fixedly connected to the second screw rod; the outer periphery of the second external gear abuts against the first transmission belt;

[0030] A second through hole is provided at the central axis of the second external gear and is sleeved on the outer circumference of the internal gear; the inner circumferential surface of the second through hole is a toothed surface that can be unidirectionally meshed with the second internal gear, and is configured to be meshed and connected with the second internal gear when the second internal gear rotates along the second rotation direction, and to be disengaged with the second internal gear when the second internal gear rotates along the first rotation direction.

[0031] Optionally, the outer peripheries of the first external gear and the second external gear are both ratchet tooth structures; the ratchet tooth structure of the first external gear is configured to drive the second transmission belt to rotate when the first external gear rotates along the first rotational direction, and to rotate along with the second transmission belt when the second transmission belt moves along the second rotational direction;

[0032] The ratchet tooth structure of the second external gear is configured to drive the first transmission belt to rotate when the second external gear rotates along the second rotation direction, and to rotate along with the first transmission belt when the first transmission belt moves along the first rotation direction.

[0033] Optionally, the first moving member includes a first sliding gear and a first slider; the second moving member includes a second sliding gear and a second slider;

[0034] The first slider is coaxially arranged with the first sliding gear and fixedly connected; a third through hole is opened at the central axis of the first slider; a thread structure capable of cooperating with the thread of the first screw rod is formed on the inner circumference of the third through hole;

[0035] The second slider is coaxially arranged with the second sliding gear and fixedly connected; a fourth through hole is opened at the central axis of the second slider; and a threaded structure capable of cooperating with the thread of the second screw rod is provided on the inner circumference of the fourth through hole;

[0036] The outer peripheries of the first sliding gear and the second sliding gear are both ratchet tooth structures; the ratchet tooth structure of the first sliding gear is configured to drive the first transmission belt to rotate when the first sliding gear rotates along the first rotation direction, and to rotate along with the first transmission belt when the first transmission belt moves along the second rotation direction;

[0037] The ratchet tooth structure of the second sliding gear is configured to drive the second transmission belt to rotate when the second sliding gear rotates along the second rotation direction, and to rotate along with the second transmission belt when the second transmission belt moves along the first rotation direction.

[0038] Optionally, the connecting assembly further comprises a third slider fixedly connected to the first connecting rod and a fourth slider fixedly connected to the second connecting rod; the third slider and the fourth slider are threadedly engaged with the first connecting rod and the second connecting rod respectively;

[0039] The third slider and the fourth slider both move along the first direction when the corresponding screw rod rotates along the first rotation direction, and both move along the second direction when the corresponding screw rod rotates along the second rotation direction.

[0040] Optionally, it also includes a controller and two stroke detection devices;

[0041] The two stroke detection devices are respectively used to detect the strokes of the first connecting rod and the second connecting rod in real time and send the detection results to the controller;

[0042] The controller is used to calculate the stroke difference between the first connecting rod and the second connecting rod, and determine whether the stroke difference reaches a preset threshold; if so, control the first driving source or the second driving source to switch the rotation direction so that the synchronous switching component switches to the second state or the fourth state.

[0043] Optionally, the controller is further configured to calculate a stroke compensation amount according to the stroke difference when the synchronous switching component is in the second state or the fourth state, and control the second driving source or the first driving source to output a preset stroke compensation amount so that the stroke difference drops to 0;

[0044] Alternatively, the controller is further configured to continuously determine whether the stroke difference drops to 0 when the synchronous switching component is in the second state or the fourth state; if so, control both the second driving source and the first driving source to stop outputting rotational power.

[0045] Optionally, the surfaces of the first connecting rod and the second connecting rod each have a plurality of non-identification areas and a plurality of identification areas; the plurality of non-identification areas and the plurality of identification areas are alternately arranged and evenly distributed along the lifting direction;

[0046] The two stroke detection devices include photoelectric sensors; the two photoelectric sensors are respectively fixed on the circumference of the first connecting rod and the second connecting rod, and the detection ends of the two photoelectric sensors are both facing the surfaces of the first connecting rod and the second connecting rod;

[0047] The photoelectric sensor is used to detect the identification areas and record the number of the detected identification areas.

[0048] As another technical solution, the present invention also provides a semiconductor process equipment, which includes a process chamber and a valve body structure as described above; the valve body structure is installed at the air inlet of the process chamber to control the air intake volume of the process chamber.

[0049] The present invention has the following beneficial effects:

[0050] The valve body structure provided by the present invention includes a valve plate and two sets of connecting rods, connecting members and driving sources for driving the movement of the valve plate, and also includes a synchronous switching assembly connected to the two connecting rods respectively. The synchronous switching assembly is capable of switching the transmission state of the two connecting rods when the two driving sources output rotational power of different rotation directions. Specifically, the synchronous switching assembly is capable of simultaneously driving the two transmission members to rotate synchronously along the first rotation direction when the first driving source outputs a first rotation direction, and simultaneously driving the two transmission members to rotate synchronously along the second rotation direction when the second driving source outputs a second rotation direction, thereby achieving synchronous movement of the two ends of the driving valve plate.

[0051] Moreover, the synchronous switching component can also drive only the first transmission member to rotate synchronously along the second rotation direction when the first driving source outputs the second rotation direction, and can drive only the second transmission member to rotate synchronously along the first rotation direction when the second driving source outputs the first rotation direction, thereby realizing the independent movement of a single end of the driving valve plate. For example, in the process of driving the valve plate to rise and fall, when the valve plate tilts, the two ends of the valve plate can be leveled by driving one of the two ends of the valve plate to rise or fall. Compared with the existing maintenance scheme for manually leveling the valve body structure, the valve body structure provided by the present invention does not require the operator to disassemble and repair the valve body structure, which can greatly reduce the workload of the operator, shorten the maintenance time, and reduce the errors that may occur during the manual leveling process. BRIEF DESCRIPTION OF THE DRAWINGS

[0052] Figure 1 A simplified structural diagram of a valve body structure provided in an embodiment of the present invention;

[0053] Figure 2 A simplified structural diagram of a transmission assembly and a synchronous switching assembly provided in an embodiment of the present invention;

[0054] Figure 3 A schematic top view of the synchronous switching assembly provided in an embodiment of the present invention;

[0055] Figure 4 A partial enlarged view of the helical tooth structure between the fixed member and the movable member provided in an embodiment of the present invention;

[0056] Figure 5A cross-sectional view of a transmission assembly and a synchronous switching assembly provided in an embodiment of the present invention;

[0057] Figure 6 A schematic top view of the first fixed member and the second movable member, and a schematic top view of the second fixed member and the first movable member, provided in an embodiment of the present invention;

[0058] Figure 7A A schematic top view of the first internal gear and the first external gear provided in an embodiment of the present invention;

[0059] Figure 7B for Figure 7A A partial enlarged view of

[0060] Figure 8 A transmission principle diagram of the valve body structure provided by an embodiment of the present invention in a first state;

[0061] Figure 9 A transmission principle diagram of the valve body structure provided by an embodiment of the present invention in the second state;

[0062] Figure 10 A transmission principle diagram of the valve body structure provided by an embodiment of the present invention in the third state;

[0063] Figure 11 A transmission principle diagram of the valve body structure provided by an embodiment of the present invention in the fourth state;

[0064] Figure 12 A simplified structural diagram of the semiconductor process equipment provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0065] In order to enable those skilled in the art to better understand the technical solution of the present invention, the valve body structure and semiconductor process equipment provided by the present invention are described in detail below with reference to the accompanying drawings.

[0066] This embodiment provides a valve body structure for use in semiconductor process equipment, which includes a valve plate, a connecting assembly, a driving assembly, a transmission assembly, and a synchronous switching assembly.

[0067] The valve plate is, for example, disposed at an air inlet or an air outlet of a semiconductor process device, so that the air inlet and air outlet flow rates of the semiconductor process device can be controlled by adjusting the position of the valve plate.

[0068] like Figure 1 As shown, the connecting assembly includes a first connecting rod 3A and a second connecting rod 3B, both connected to the valve plate 5. In some specific embodiments, the first connecting rod 3A and the second connecting rod 3B are symmetrically arranged relative to the central axis of the valve plate 5.

[0069] The driving assembly includes a first driving source 1A and a second driving source 1B, both of which can output two rotational forces with opposite rotation directions.

[0070] The transmission assembly is used to drive the transmission assembly to rotate, and includes a first transmission member 2A and a second transmission member 2B. The first transmission member 2A is respectively connected to the first driving source 1A and the first connecting rod 3A, and is used to convert the rotational power output by the first driving source 1A into linear power, and transmit it to the first connecting rod 3A; the second transmission member 2B is respectively connected to the second driving source 1B and the second connecting rod 3B, and is used to convert the rotational power output by the second driving source 1B into linear power, and transmit it to the second connecting rod 3B.

[0071] The synchronous switching component 4 is connected to the first transmission member 2A and the second transmission member 2B respectively. The synchronous switching component 4 has four working states. Specifically, the synchronous switching component 4 is used to switch to the first state when the first driving source 1A outputs the rotational power of the first rotation direction, and drive the first transmission member 2A and the second transmission member 2B to rotate synchronously along the first rotation direction in the first state; that is, when the first driving source 1A outputs the rotational power of the first rotation direction, it can serve as the main driving source to simultaneously drive the first connecting rod 3A and the second connecting rod 3B to move linearly synchronously, thereby simultaneously driving the two ends of the valve plate 5 to rise or fall synchronously.

[0072] The synchronous switching component 4 is also used to switch to the second state when the second driving source 1B outputs rotational power in the first direction, and in the second state only drives the second transmission member 2B to rotate along the first direction, without driving the first transmission member 2A to rotate, so as to drive the second connecting rod 3B to rise or fall alone, thereby adjusting the distance between the end of the valve plate 5 connected to the second connecting rod 3B and the air inlet.

[0073] The synchronous switching assembly 4 is also configured to switch to a third state when the second drive source 1B outputs rotational power in a second direction opposite to the first direction. In this state, the synchronous switching assembly 4 drives the first transmission member 2A and the second transmission member 2B to rotate synchronously in the second direction. That is, when the second drive source 1B outputs rotational power in the second direction, it serves as the primary driving source, simultaneously driving the first connecting rod 3A and the second connecting rod 3B to move linearly, thereby simultaneously driving both ends of the valve plate 5 to descend or ascend synchronously. It should be noted that the movement direction of the valve plate 5 is opposite when the synchronous switching assembly 4 is in the third state and the first state.

[0074] The synchronous switching assembly 4 is further configured to switch to a fourth state when the first drive source 1A outputs rotational power in the second direction. In the fourth state, the synchronous switching assembly 4 drives the first transmission member 2A to rotate in the second direction without driving the second transmission member 2B to rotate, thereby driving the first connecting rod 3A to independently descend or ascend, thereby independently adjusting the distance between the end of the valve plate 5 connected to the first connecting rod 3A and the air inlet. It should be noted that the difference between the fourth state and the second state of the synchronous switching assembly 4 lies in the different objects driven for rotation. Specifically, the fourth state independently drives the first transmission member 2A, while the second state independently drives the second transmission member 2B.

[0075] As can be seen, by adopting the above-mentioned synchronous switching assembly 4, the valve body structure provided in this embodiment can achieve four operating states. Taking the valve body structure provided in this embodiment as an example, the vertical valve can achieve synchronous raising of the valve plate 5 at both ends, synchronous lowering of the valve plate 5 at both ends, raising of the valve plate 5 at one end, and lowering of the valve plate 5 at one end. In this way, the valve plate 5 can be driven to rise and fall synchronously at both ends, and the valve plate 5 can be leveled by adjusting the height of the valve plate 5 at one end. This eliminates the need for operators to disassemble and repair the valve body structure, greatly reducing the operator's workload, shortening maintenance time, and reducing errors that may occur during manual leveling.

[0076] Specifically, the first driving source 1A and the second driving source 1B are, for example, motors.

[0077] In some embodiments, as Figure 2 As shown, the synchronous switching assembly 4 includes a first transmission belt 41A, a second transmission belt 41B, a first moving member 42A, a second moving member 42B, a first fixed member 43A and a second fixed member 43B.

[0078] Among them, the first fixed member 43A is fixedly connected to the first transmission member 2A, and the second fixed member 43B is fixedly connected to the second transmission member 2B; the first moving member 42A is connected to the first transmission member 2A and can rotate with it and move along the first straight line, and the second moving member 42B is connected to the second transmission member 2B and can rotate with it and move along the second straight line. The first transmission belt 41A is used to connect the first moving member 42A and the second fixed member 43B respectively, and the second transmission belt 41B is used to connect the second moving member 42B and the first fixed member 43A to transmit rotational power. And as Figure 3 As shown, in some embodiments, a plurality of tensioning wheels 411 are further arranged around the valve plate 5, and the plurality of tensioning wheels 411 are fixed at the edge of the air inlet of the semiconductor process equipment; the first transmission belt 41A and the second transmission belt 41B are also wound around the outer circumference of the plurality of tensioning wheels 411 to tension the transmission belts.

[0079] Specifically, when the synchronous switching component 4 is in the first state, the first driving source 1A outputs rotational power in the first rotation direction to drive the first transmission member 2A to rotate along the first rotation direction, and the first fixed member 43A also rotates along the first rotation direction; the first fixed member 43A is used to drive the second movable member 42B to rotate along the first rotation direction through the second transmission belt 41B, so that the second movable member 42B moves along the first straight line, and then the second movable member 42B is connected and fixed to the second fixed member 43B, so that the first fixed member 43A can drive the second fixed member 43B to rotate synchronously along the first rotation direction through the second transmission belt 41B, and then drive the first connecting rod 3A and the second connecting rod 3B to move synchronously in a straight line.

[0080] When the synchronous switching component 4 is in the second state, the second driving source 1B outputs rotational power in the first rotation direction to drive the second transmission member 2B to rotate along the first rotation direction; driven by the second transmission member 2B, the second moving member 42B moves along the second straight line to separate the second moving member 42B from the second fixed member 43B, thereby not transmitting rotational power to the first fixed member 43A; moreover, the transmission between the second fixed member 43B and the first moving member 42A is released, so that the second transmission member 2B rotates alone in the first rotation direction, and the first transmission member 2A does not rotate therewith, thereby driving the second connecting rod 3B to move along the second straight line alone.

[0081] When the synchronous switching component 4 is in the third state, the second driving source 1B outputs rotational power of the second rotation direction to drive the second transmission member 2B to rotate along the second rotation direction, and the second fixed member 43A also rotates along the second rotation direction; the second fixed member 43B is used to drive the first movable member 42A to rotate along the second rotation direction through the first transmission belt 41A, so that the first movable member 42A moves in a straight line, and the first movable member 42A is connected and fixed to the first fixed member 43A, so that the second fixed member 43B can drive the first fixed member 43A to rotate synchronously along the second rotation direction through the first transmission belt 41A, and then make the first transmission member 2A and the second transmission member 2B rotate synchronously along the second rotation direction to drive the first connecting rod 3A and the second connecting rod 3B to move synchronously in a straight line.

[0082] When the synchronous switching component 4 is in the fourth state, the first driving source 1A outputs rotational power of the second rotation direction to drive the first transmission member 2A to rotate along the second rotation direction; under the drive of the first transmission member 2A, the first movable member 42A moves along a straight line to separate the first movable member 42A from the first fixed member 43A, so that the rotational power will not be transmitted to the second fixed member 43B; moreover, the transmission between the first fixed member 43A and the second movable member 42B is released, so that the first transmission member 2A rotates alone along the second rotation direction, and the second transmission member 2B does not rotate therewith, thereby driving the first connecting rod 3A to move alone along the first straight line.

[0083] It can be seen that the synchronous switching component 4 provided in this embodiment can switch the connection state between the first fixed part 43A and the first movable part 42A, and the connection state between the second fixed part 43B and the second movable part 42B, so as to determine whether the first transmission part 2A and the second transmission part 2B rotate synchronously, thereby realizing switching between four action states: synchronous rising of both ends of the valve plate 5, synchronous falling of both ends of the valve plate 5, rising of one end of the valve plate 5 and falling of one end of the valve plate 5.

[0084] In some specific implementations, the transmission belt may be a belt or a chain.

[0085] Furthermore, in some embodiments, the first transmission member 2A includes a first screw rod 21A, the second transmission member 2B includes a second screw rod 21B, the first screw rod 21A extends along a first straight line, and the second screw rod 21B extends along a second straight line. Specifically, the first straight line and the second straight line are parallel.

[0086] The first moving member 42A is sleeved on the outer periphery of the first screw rod 21A and is threadedly engaged, and the thread structure between the two is configured so that when the first moving member 42A rotates along the second direction of rotation, the first moving member 42A moves along the first screw rod 21A in the first direction. The second moving member 42B is sleeved on the outer periphery of the second screw rod 21B and is threadedly engaged, and the thread structure between the two is configured so that when the second moving member 42B rotates relative to the first direction of rotation, the second moving member 42B moves along the second screw rod 21B in the second direction. Wherein, the second direction is opposite to the first direction; the first direction and the second direction are both parallel to the first straight line. Moreover, the first fixed member 43A is located on the side of the first moving member 42A facing the first direction; the second fixed member 43B is located on the side of the second moving member 42B facing the second direction.

[0087] Taking the first direction as upward and the second direction as downward as an example, correspondingly, the first movable member 42A is located below the first fixed member 43A, and the second movable member 42B is located above the second fixed member 43B.

[0088] Thus, in the first state, the second movable member 42B is driven by the second transmission belt 41B to rotate along the first rotation direction so as to be able to descend linearly, thereby approaching the second fixed member 43B and being connected and fixed thereto;

[0089] In the third state, the first movable member 42A is driven by the first transmission belt 41A to rotate along the second rotation direction so as to rise linearly, thereby approaching the first fixed member 43A and being connected and fixed thereto.

[0090] Furthermore, in some embodiments, a first one-way connection mechanism is formed on the surface opposite to the first fixed member 43A of the first movable member 42A; a second one-way connection mechanism is formed on the surface opposite to the second fixed member 43B of the second movable member 42B.

[0091] Specifically, the first one-way connection mechanism is configured to connect the first movable member 42A to the first fixed member 43A when the first movable member 42A moves to a position away from the first fixed member 43A, and to disconnect the first movable member 42A when the first movable member 42A moves to a position away from the first fixed member 43A. The second one-way connection mechanism is configured to connect the second movable member 42B to the second fixed member 43B when the second movable member 42B moves to a position away from the second fixed member 43B.

[0092] In some specific embodiments, the first one-way connection mechanism includes a helical tooth structure provided on two opposite surfaces of the first fixed member 43A and the first movable member 42A. Figure 4 Shown, be arranged on the lip-deep helical tooth structure of first moving member 42A and comprise a plurality of helical teeth, a plurality of helical teeth all have an inclined surface and a vertical plane, and wherein the inclined surface is more and more higher on the direction of the second rotation direction, and the highest point of the inclined surface is connected with the vertical plane.Like this, when first moving member 42A rotates along the second rotation direction, two relative vertical planes can offset each other, so that two helical tooth structures are meshed, thereby the first fixing member 43A and the first moving member 42A are fixedly connected; And when first moving member 42A rotates along the first rotation direction opposite to the second rotation direction, two relative inclined surfaces do not interfere with each other, so that two helical tooth structures can not mesh, thereby the first fixing member 43A and the first moving member 42A are disconnected.

[0093] Above-mentioned second unidirectional connecting mechanism comprises the helical tooth structure on two relative surfaces that is arranged on the second fixed member 43B and the second moving member 42B.Similar to above-mentioned helical tooth structure, the helical tooth structure that is arranged on the second moving member 42B surface also comprises a plurality of helical teeth; And a plurality of helical teeth all have an inclined surface and a vertical surface, wherein the inclined surface is increasingly higher on the direction of the first rotational direction, and the highest vertical surface that is in the inclined surface connects.Like this, when the second moving member 42B rotates along the first rotational direction, two relative vertical surfaces can offset each other, so that two helical tooth structures mesh, thereby the second fixed member 43B and the second moving member 42B are fixedly connected; And when the second moving member 42B rotates along the second rotational direction, two relative inclined surfaces do not interfere with each other, so that two helical tooth structures can not mesh, thereby the second fixed member 43B and the second moving member 42B are disconnected.

[0094] In some specific embodiments, such as Figure 5As shown, the first moving member 42A includes a first sliding gear 421A and a first slider 422A; the second moving member 42B includes a second sliding gear 421B and a second slider 422B. The first slider 422A is coaxially arranged with the first sliding gear 421A and fixedly connected to it, so as to drive the first sliding gear 421A to move along the first screw rod 21A. A third through hole is defined at the center axis of the first slider 422A; the inner circumference of the third through hole has a threaded structure that can threadably engage with the first screw rod 21A.

[0095] The second slider 422B is coaxially arranged and fixedly connected to the second sliding gear 421B to drive the second sliding gear 421B to move along the second screw rod 21B; a fourth through hole is opened at the center axis of the second slider 422B; the inner circumference of the fourth through hole has a threaded structure that can cooperate with the thread of the second screw rod 21B.

[0096] Moreover, if Figure 6 As shown, the outer peripheries of the first sliding gear 421A and the second sliding gear 421B are both ratchet tooth structures. The ratchet tooth structure of the first sliding gear 421A is configured to drive the first transmission belt 41A to rotate when the first sliding gear 421A rotates in the first rotational direction, and to rotate along with the first transmission belt 41A when the first transmission belt 41A moves in the second rotational direction. The ratchet tooth structure of the second sliding gear 421B is configured to drive the second transmission belt 41B to rotate when the second sliding gear 421B rotates in the second rotational direction, and to rotate along with the second transmission belt 41B when the second transmission belt 41B moves in the first rotational direction.

[0097] In some embodiments, the connecting assembly also includes a third slider connected and fixed to the first connecting rod 3A and a fourth slider connected and fixed to the second connecting rod 3B; the third slider and the fourth slider are respectively threadedly engaged with the first connecting rod 3A and the second connecting rod 3B, so that the first connecting rod 3A and the second connecting rod 3B are respectively transmission-connected to the first screw rod and the second screw rod.

[0098] The third slider and the fourth slider both rise straight up when the corresponding screw rod rotates along the first rotation direction, and both fall straight down when the corresponding screw rod rotates along the second rotation direction; in some embodiments, as Figure 5 and Figure 6 As shown, the first fixing member 43A includes a first internal gear 431A and a first external gear 432A; the second fixing member 43B includes a second internal gear 431B and a second external gear 432B.

[0099] Among them, the first internal gear 431A is fixedly connected to the first screw rod 21A; the outer periphery of the first external gear 432A is in contact with the transmission belt 41; a first through hole is opened at the center axis of the first external gear 432A, which is sleeved on the outer periphery of the first internal gear 431A; the inner peripheral surface of the first through hole is a toothed surface that can be unidirectionally engaged with the first internal gear 431A, and is configured to be engaged with the first internal gear 431A when it rotates along the first rotation direction, and to slide relative to the first internal gear 431A when it rotates along the second rotation direction to release the engagement.

[0100] like Figure 5 and Figure 6 As shown, the second internal gear 431B is fixedly connected to the second screw rod 21B; the outer periphery of the second external gear 432B abuts the second transmission belt 41B; a second through hole is formed at the center axis of the second external gear 432B, which is sleeved on the outer periphery of the second internal gear 431B; the inner periphery of the second through hole is a toothed surface capable of one-way meshing with the second internal gear 431B, and is configured to mesh with the second internal gear 431B when the second internal gear 431B rotates in the second direction of rotation, and to slide relative to the second internal gear 431B when the second internal gear 431B rotates in the first direction of rotation to release the meshing. Specifically, in some embodiments, the outer peripheries of the first internal gear 431A and the second external gear 432B can be provided with a ratchet tooth structure, and the inner peripheries of the first external gear 432A and the second external gear 432B are also provided with ratchet tooth structures of corresponding shapes to achieve the above-mentioned one-way meshing.

[0101] In this way, in the first state, the first screw rod 21A rotates along the first rotation direction, and the first internal gear 431A also rotates along the first rotation direction, thereby driving the first external gear 432A to rotate along the first rotation direction; and in the fourth state, the first screw rod 21A rotates along the second rotation direction, and the first internal gear 431A also rotates along the second rotation direction, while the first external gear 432A does not rotate accordingly.

[0102] Similarly, in the third state, the second screw rod 21B rotates along the second rotational direction, and the second internal gear 431B also rotates along the second rotational direction, thereby driving the second external gear 432B to rotate along the second rotational direction; and in the second state, the second screw rod 21B rotates along the first rotational direction, and the second internal gear 431B also rotates along the first rotational direction, while the second external gear 432B does not rotate accordingly.

[0103] In some embodiments, as Figure 6As shown, the outer circumferences of the first external gear 432A and the second external gear 432B are both ratchet tooth structures. Specifically, the ratchet tooth structure of the first external gear 432A is configured to drive the second transmission belt 41B to rotate when the first external gear 432A rotates in the first rotational direction, and to rotate along with the second transmission belt 41B when the second transmission belt 41B moves in the second rotational direction. In other words, the first external gear 432A acts as a driving wheel when rotating in the first rotational direction, and as a driven wheel when rotating in the second rotational direction.

[0104] On the contrary, the ratchet tooth structure of the second external gear 432B is configured to drive the first transmission belt 41A to rotate when the second external gear 432B rotates along the second rotational direction, and to rotate along with the first transmission belt 41A when the first transmission belt 41A moves along the first rotational direction, that is, the second external gear 432B serves as a driving wheel when rotating along the second rotational direction, and serves as a driven wheel when rotating along the first rotational direction.

[0105] In some preferred embodiments, the ratchet tooth structure can be composed of a bendable tooth piece and a retractable spring piece. Specifically, taking the ratchet tooth structure of the first inner gear 431A and the first outer gear 432A as an example, Figure 7A As shown, the ratchet tooth structure at the outer periphery of the first inner gear 431A may include a first tooth piece 4311 and a first elastic piece 4312, and the ratchet tooth structure at the outer periphery of the first outer gear 432A may include a second tooth piece 4321 and a second elastic piece 4322. Figure 7B As shown, the first tooth piece 4311 is tilted relative to the tooth root circumference of the first internal gear 431A, and one end of the first tooth piece 4311 is connected to the first internal gear 431A, and the other end is connected to the end of the first elastic piece 4312; the extension direction of the first elastic piece 4312 is perpendicular to the tooth root circumference, and the second elastic piece 4312 is used to elastically deform in a direction perpendicular to the tooth root circumference when subjected to external force. Specifically, as shown in FIG. Figure 7BAs shown, the first tooth plate 4311, the first elastic plate 4312 and the root circumference of the gear can roughly form a triangle, and the right angle portion of the triangle can engage with the ratchet tooth structure 4323 at the inner circumference of the first outer gear 432A, while the acute angle cannot engage with the ratchet tooth structure 4323, but will slide relative to the ratchet tooth structure 4323. In this way, when the first internal gear 431A rotates along the first rotational direction, the elastic piece 4312 will not be deformed, and the end of the tooth piece 4311 will abut against the external ratchet tooth structure, that is, the right-angled portion of the above-mentioned triangle can engage with the ratchet tooth structure 4323 at the inner circumference of the first external gear 432A; and when the first internal gear 431A rotates along the second rotational direction, the ratchet tooth structure 4323 at the inner circumference of the first external gear 432A will push the first tooth piece 4311, and the first elastic piece 4312 will be compressed and deformed, so that the first tooth piece 4311 is close to the root circle of the first internal gear 431A, so that the first internal gear 431A cannot engage with the ratchet tooth structure 4323 at the inner circumference of the first external gear 432A, and then when the first internal gear 431A rotates along the second rotational direction, the transmission between the first internal gear 431A and the first external gear 432A is released, that is, the first external gear 432A will not rotate as the first internal gear 431A rotates.

[0106] When the valve body is placed vertically, the driven wheel may slip due to its own gravity and other external resistance, that is, relative sliding occurs between the driven wheel and the transmission belt, resulting in a large stroke difference between the driven wheel and the driving wheel, and even causing transmission failure. Therefore, in order to avoid this problem, Figure 6 As shown, the diameter of the first external gear 432A can be designed to be slightly smaller than the diameter of the second sliding gear 421B; the diameter of the second external gear 432B can be designed to be slightly smaller than the diameter of the first sliding gear 421A. This increases the gear ratio between the driven and driving sides, thereby increasing the contact area between the driven gear and the second transmission belt 41B and the first transmission belt 41A, and preventing gear slippage. Specifically, the diameter differences between the first external gear 432A and the second sliding gear 421B, and between the second external gear 432B and the first sliding gear 421A, can be designed based on various parameters such as the actual screw stroke and the motor reduction ratio to prevent gear slippage.

[0107] However, this will cause the rotation of the driven side to lag behind that of the active side in structure. Specifically, it may cause the rotation speed of the second sliding gear 421B to be slightly lower than that of the first external gear 432A when the first external gear 432A drives the second sliding gear 421B to rotate synchronously along the first rotation direction, thereby causing the rising action of the second connecting rod 3B to lag behind the rising action of the first connecting rod 3A; it may also cause the rotation speed of the first sliding gear 421A to be slightly lower than that of the second external gear 432B when the second external gear 432B drives the first sliding gear 421A to rotate synchronously along the second rotation direction, thereby causing the descending action of the first connecting rod 3A to lag behind the descending action of the second connecting rod 3B. Therefore, if the rising action of the second connecting rod 3B lags behind the rising action of the first connecting rod 3A during the rising stage of the valve plate 5, the first driving source 1A can be controlled to be closed and the second driving source 1B can be controlled to output the first rotational driving force to drive the second connecting rod 3B to rise alone; and if the descending action of the first connecting rod 3A lags behind the descending action of the second connecting rod 3B during the descending stage of the valve plate 5, the second driving source 1B can be controlled to be closed and the first driving source 1A can be controlled to output the second rotational driving force to drive the first connecting rod 3A to descend alone.

[0108] by Figures 8-11 Taking the valve body structure shown as an example, this embodiment also provides a specific transmission process of the valve body structure. In which, the first rotation direction is, for example, clockwise, and the second rotation direction is, for example, counterclockwise. The extension direction of the first screw rod 21A and the second screw rod 21B is the vertical direction.

[0109] like Figure 8 As shown, in the first state, the first driving source 1A rotates clockwise, driving the first screw rod 21A to rotate clockwise, which in turn drives the first internal gear 431A to rotate clockwise, which in turn drives the first external gear 432A to rotate clockwise, which in turn drives the transmission belt 41 to move in the clockwise direction, which in turn drives the second sliding gear 421B to rotate clockwise, causing the second sliding gear 421B to descend. When the second sliding gear 421B reaches the second external gear 432B, it engages with the second external gear 432B, which in turn drives the second internal gear 431B to rotate clockwise, which in turn drives the second screw rod 21B to rotate clockwise. In this way, the first screw rod 21A and the second screw rod 21B rotate synchronously, which can cause the first connecting rod 3A and the second connecting rod 3B to rise synchronously.

[0110] like Figure 9 As shown, in the second state, the second driving source 1B rotates clockwise, driving the second screw rod 21B to rotate clockwise, which in turn drives the second internal gear 431B to rotate clockwise, and drives the second slider 422B to rise to a position away from the second external gear 432B, thereby driving the second sliding gear 421B to separate from the second external gear 432B, thereby releasing the connection. In this way, the second connecting rod 3B can be raised independently.

[0111] like Figure 10 As shown, in the third state, the second driving source 1B rotates counterclockwise, driving the second screw rod 21B to rotate counterclockwise, which in turn drives the second internal gear 431B to rotate counterclockwise, which in turn drives the second external gear 432B to rotate counterclockwise, which in turn drives the transmission belt 41 to move counterclockwise, which in turn drives the first sliding gear 421A to rotate counterclockwise, causing the first sliding gear 421A to descend. When the first sliding gear 421A reaches the first external gear 432A, it engages with it, which in turn drives the first external gear 432A to rotate counterclockwise, which in turn drives the first internal gear 431A to rotate counterclockwise, which in turn drives the first screw rod 21A to rotate counterclockwise. In this way, the first screw rod 21A and the second screw rod 21B rotate synchronously, which can cause the second connecting rod 3B and the first connecting rod 3A to descend synchronously.

[0112] like Figure 11 As shown, in the fourth state, the first driving source 1A rotates counterclockwise, driving the first screw rod 21A to rotate counterclockwise, which in turn drives the first internal gear 431A to rotate counterclockwise, and drives the first slider 422A to rise to a position away from the first external gear 432A, thereby separating the first sliding gear 421A from the first external gear 432A, thereby releasing the connection. In this way, the first connecting rod 3A can be lowered independently.

[0113] In some embodiments, the valve body structure further includes a controller and two stroke detection devices 6. The two stroke detection devices 6 are respectively used to detect the strokes of the first connecting rod 3A and the second connecting rod 3B in real time and send the detection results to the controller. Figure 1 As shown, the two stroke detection devices 6 include, for example, a first stroke detection device 6A corresponding to the first connecting rod 3A, and a second stroke detection device 6B corresponding to the second connecting rod 3B.

[0114] The controller calculates the stroke difference between the two connecting rods and determines whether it reaches a preset threshold. If so, it controls the first drive source 1A or the second drive source 1B to switch its rotational direction, thereby switching the synchronous switching assembly 4 to the second or fourth state. This allows for timely detection of valve plate 5 tilt and prompt control of the valve plate 5's single-end rise or fall, thereby achieving automatic leveling of the valve plate 5.

[0115] Furthermore, the controller is also used to calculate the stroke compensation amount based on the stroke difference when the synchronous switching component 4 is in the second state or the fourth state, and control the second drive source 1B or the first drive source 1A to output a preset stroke compensation amount to reduce the stroke difference to 0, thereby leveling the valve plate 5.

[0116] Alternatively, the controller can also be used to continuously determine whether the stroke difference has dropped to 0 when the synchronous switching component 4 is in the second state or the fourth state; if so, it indicates that the valve plate 5 has been leveled, and at this time the first drive source 1A and the second drive source 1B can be controlled to stop outputting rotational power.

[0117] Based on the above controller, this embodiment further provides a specific control process of the valve body structure. In which, the first rotation direction is, for example, clockwise, and the second rotation direction is, for example, counterclockwise. The first screw rod 21A and the second screw rod 21B extend in a vertical direction.

[0118] The control method includes:

[0119] S1: Obtain the lifting requirement of the valve plate. If the valve plate needs to be raised, proceed to the following step S2; if the valve plate needs to be lowered, proceed to the following step S3.

[0120] Step S2 includes:

[0121] S21: Control the first driving source 1A to rotate clockwise, so that the synchronous switching component switches to the first state, thereby driving the first screw rod 21A and the second screw rod 21B to rotate synchronously clockwise, thereby driving the first connecting rod 3A and the second connecting rod 3B to rise synchronously;

[0122] S22: Continuously detecting the strokes of the first connecting rod 3A and the second connecting rod 3B respectively, and calculating the stroke difference between the two connecting rods;

[0123] S23: Determine whether the stroke reaches a preset threshold; if so, it indicates that the second connecting rod 3B lags behind the first connecting rod 3A, and proceed to the following step S24; if not, return to the above step S22 to continue determining the stroke difference;

[0124] S24: Control the second driving source 1B to rotate clockwise to switch the synchronous switching assembly to the second state, thereby driving the second screw rod 21B to rotate clockwise alone, thereby driving the second connecting rod 3B to rise alone; at the same time, continuously detect the strokes of the first connecting rod 3A and the second connecting rod 3B respectively, and calculate the stroke difference between the two connecting rods. When the stroke difference drops to 0, indicating that the valve plate has been leveled, the second driving source 1B is controlled to stop rotating;

[0125] S25: Determine whether the valve plate has reached the target position. If not, return to the above step S21 to drive the first connecting rod 3A and the second connecting rod 3B to continue to rise synchronously; if so, the process of controlling the valve plate to rise is completed.

[0126] Step S3 includes:

[0127] S31: Control the second driving source 1B to rotate counterclockwise, so that the synchronous switching component switches to the third state, thereby driving the first screw rod 21A and the second screw rod 21B to rotate counterclockwise synchronously, thereby driving the first connecting rod 3A and the second connecting rod 3B to descend synchronously;

[0128] S32: Continuously detecting the strokes of the first connecting rod 3A and the second connecting rod 3B respectively, and calculating the stroke difference between the two connecting rods;

[0129] S33: Determine whether the stroke reaches a preset threshold; if so, it indicates that the first connecting rod 3A lags behind the second connecting rod 3B, and proceed to the following step S34; if not, return to the above step S32 to continue determining the stroke difference;

[0130] S34: Control the first drive source 1A to rotate counterclockwise to switch the synchronous switching assembly to the fourth state, thereby driving the first screw rod 21A to rotate counterclockwise alone, thereby driving the first connecting rod 3A to descend alone; at the same time, continuously detect the strokes of the first connecting rod 3A and the second connecting rod 3B, and calculate the stroke difference between the two connecting rods. When the stroke difference drops to 0, indicating that the valve plate has been leveled, the first drive source 1A is controlled to stop rotating;

[0131] S35: Determine whether the valve plate has reached the target position. If not, return to the above step S31 to drive the first connecting rod 3A and the second connecting rod 3B to continue to descend synchronously; if so, the process of controlling the valve plate to descend is completed.

[0132] It should be noted that the “target position” of the valve plate described in the above steps S25 and S35 determines the opening of the valve body structure, and therefore, it depends on the gas flow value required by the actual process.

[0133] In some embodiments, the surfaces of both the first connecting rod 3A and the second connecting rod 3B have multiple non-recognition areas and multiple recognition areas, which are alternately arranged and evenly distributed along the lifting direction. The two travel detection devices 6 include photoelectric sensors, which are respectively fixed to the circumference of the first connecting rod 3A and the second connecting rod 3B, with their detection ends facing the surfaces of the first connecting rod 3A and the second connecting rod 3B. The photoelectric sensors are used to detect the recognition areas and record the number of detected recognition areas to indicate the corresponding link's lifting or lowering travel.

[0134] As another technical solution, Figure 12 As shown, this embodiment further provides a semiconductor process equipment, which includes a process chamber 02 and the above-mentioned valve body structure 01. Specifically, the valve body structure 01 is installed at the air inlet of the process chamber 02 to control the air intake of the process chamber 02. The process chamber is, for example, an etching chamber, and the air inlet is located at the bottom of the process chamber.

[0135] The semiconductor process equipment further includes a molecular pump 03 for driving an air flow, which is disposed on the air inlet side of the valve body structure 01 and communicated with the valve body structure 01 .

[0136] In some embodiments, the controller may also calculate the movement direction and travel distance of the valve plate according to the process chamber pressure and the desired pressure before driving the valve plate to move, and control the first driving source and the second driving source according to the calculation results.

[0137] As described above, the valve body structure and semiconductor process equipment provided in this embodiment can realize the synchronous rising and falling of both ends of the valve plate and the independent lifting and lowering of a single end of the valve plate by controlling the two driving sources to output rotational power of different rotation directions asynchronously, thereby eliminating the need for operators to disassemble and repair the valve body structure, greatly reducing the workload of operators, shortening the maintenance time, and reducing possible errors that may occur during manual leveling.

[0138] It will be understood that the above embodiments are merely exemplary embodiments for illustrating the principles of the present invention, and the present invention is not limited thereto. Those skilled in the art will appreciate that various modifications and improvements can be made without departing from the spirit and substance of the present invention, and such modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A valve body structure, applied to semiconductor process equipment, characterized in that: include: A valve plate, a connecting assembly, a driving assembly, a transmission assembly and a synchronous switching assembly; wherein the connecting assembly includes a first connecting rod and a second connecting rod both connected to the valve plate; The driving assembly is used to drive the transmission assembly to rotate, and includes a first driving source and a second driving source, both of which can output two rotating forces with opposite rotation directions; The transmission assembly includes a first transmission member and a second transmission member, the first transmission member being connected to the first drive source and the first connecting rod respectively, for converting the rotational power output by the first drive source into linear power and transmitting the power to the first connecting rod; the second transmission member being connected to the second drive source and the second connecting rod respectively, for converting the rotational power provided by the second drive source into linear power and transmitting the power to the second connecting rod; The synchronous switching assembly is connected to the first transmission member and the second transmission member respectively; The synchronous switching assembly is used to switch to a first state when the first driving source outputs a rotational power in a first rotational direction, and drive the first transmission member and the second transmission member to rotate synchronously along the first rotational direction; and further configured to switch to a second state when the second driving source outputs the rotational power in the first rotational direction, and drive the second transmission member to rotate along the first rotational direction; It is also used to switch to a third state when the second driving source outputs a rotational power in a second rotational direction opposite to the first rotational direction, and drive the first transmission member and the second transmission member to rotate synchronously along the second rotational direction; It is also used to switch to the fourth state when the first driving source outputs the rotational power of the second rotation direction, and drive the first transmission member to rotate along the second rotation direction.

2. The valve body structure according to claim 1, characterized in that: The synchronous switching assembly includes a first transmission belt, a second transmission belt, a first moving member, a second moving member, a first fixed member and a second fixed member; wherein, The first fixed member is fixedly connected to the first transmission member, and the second fixed member is fixedly connected to the second transmission member; the first movable member is cooperatively connected to the first transmission member and can rotate therewith and move along a first straight line; the second movable member is cooperatively connected to the second transmission member and can rotate therewith and move along a second straight line; the first straight line is parallel to the second straight line; The first transmission belt is used to connect the first movable member and the second fixed member, and the second transmission belt is used to connect the second movable member and the first fixed member to transmit rotational power; In the first state, the first fixing member is used to drive the second movable member to rotate along the first rotation direction, and the second movable member is connected and fixed to the second fixing member to drive the second fixing member to rotate synchronously along the first rotation direction; In the second state, the second moving member moves along the second straight line to be disconnected from the second fixed member; the transmission between the second fixed member and the first moving member is released; In the third state, the second fixing member is used to drive the first movable member to rotate along the second rotation direction, and the first movable member is connected and fixed to the first fixing member to drive the first fixing member to rotate synchronously along the second rotation direction; In the fourth state, the first moving member moves along the first straight line to be disconnected from the first fixed member; and the transmission between the first fixed member and the second moving member is released.

3. The valve body structure according to claim 2, characterized in that: The first transmission member includes a first screw rod; the second transmission member includes a second screw rod; the first screw rod extends along the first straight line; the second screw rod extends along the second straight line; The first moving member is sleeved on the outer circumference of the first screw rod and is threadedly engaged, and the thread structure is configured so that when the first moving member rotates along the second rotation direction, the first moving member moves in the first direction; The second moving member is sleeved on the outer circumference of the second screw rod and is threadedly engaged, and the thread structure is configured so that when the second moving member rotates along the first rotation direction, the second moving member moves in a second direction; the second direction is opposite to the first direction; and the first direction and the second direction are both parallel to the first straight line; The first fixing member is located on a side of the first moving member facing the first direction; the second fixing member is located on a side of the second moving member facing the second direction.

4. The valve body structure according to claim 3, characterized in that: A first one-way connection mechanism is formed on the surface of the first movable member opposite to the first fixed member; the first one-way connection mechanism is configured to connect the first movable member and the first fixed member when the first movable member moves along the first direction and to disconnect the first movable member when the first movable member moves in the second direction; A second one-way connection mechanism is formed on the surface opposite to the second fixed member of the second movable member; the second one-way connection mechanism is configured to connect the two when the second movable member moves along the second direction to the second fixed member, and to disconnect when the second movable member moves toward the first direction.

5. The valve body structure according to claim 3, characterized in that: The first fixing member includes a first internal gear and a first external gear; the second fixing member includes a second internal gear and a second external gear; The first internal gear is fixedly connected to the first screw rod; the outer periphery of the first external gear is in contact with the second transmission belt; A first through hole is formed at the central axis of the first external gear and is sleeved on the outer circumference of the internal gear; an inner circumferential surface of the first through hole is a toothed surface capable of unidirectionally meshing with the first internal gear, and is configured to mesh with the first internal gear when the first internal gear rotates in the first rotational direction, and to disengage from the first internal gear when the first internal gear rotates in the second rotational direction; The second internal gear is fixedly connected to the second screw rod; the outer periphery of the second external gear abuts against the first transmission belt; A second through hole is provided at the central axis of the second external gear and is sleeved on the outer circumference of the internal gear; the inner circumferential surface of the second through hole is a toothed surface that can be unidirectionally meshed with the second internal gear, and is configured to be meshed and connected with the second internal gear when the second internal gear rotates along the second rotation direction, and to be disengaged with the second internal gear when the second internal gear rotates along the first rotation direction.

6. The valve body structure according to claim 5, characterized in that: The outer circumferences of the first external gear and the second external gear are both ratchet tooth structures; the ratchet tooth structure of the first external gear is configured to drive the second transmission belt to rotate when the first external gear rotates in the first rotation direction, and to rotate along with the second transmission belt when the second transmission belt moves in the second rotation direction; The ratchet tooth structure of the second external gear is configured to drive the first transmission belt to rotate when the second external gear rotates along the second rotation direction, and to rotate along with the first transmission belt when the first transmission belt moves along the first rotation direction.

7. The valve body structure according to claim 3, characterized in that: The first moving member includes a first sliding gear and a first slider; the second moving member includes a second sliding gear and a second slider; The first slider is coaxially arranged with the first sliding gear and fixedly connected; a third through hole is opened at the central axis of the first slider; a thread structure capable of cooperating with the thread of the first screw rod is formed on the inner circumference of the third through hole; The second slider is coaxially arranged with the second sliding gear and fixedly connected; a fourth through hole is opened at the central axis of the second slider; and a threaded structure capable of cooperating with the thread of the second screw rod is provided on the inner circumference of the fourth through hole; The outer peripheries of the first sliding gear and the second sliding gear are both ratchet tooth structures; the ratchet tooth structure of the first sliding gear is configured to drive the first transmission belt to rotate when the first sliding gear rotates along the first rotation direction, and to rotate along with the first transmission belt when the first transmission belt moves along the second rotation direction; The ratchet tooth structure of the second sliding gear is configured to drive the second transmission belt to rotate when the second sliding gear rotates along the second rotation direction, and to rotate along with the second transmission belt when the second transmission belt moves along the first rotation direction.

8. The valve body structure according to claim 3, characterized in that: The connecting assembly further includes a third slider fixedly connected to the first connecting rod and a fourth slider fixedly connected to the second connecting rod; the third slider and the fourth slider are threadedly engaged with the first connecting rod and the second connecting rod respectively; The third slider and the fourth slider both move along the first direction when the corresponding screw rod rotates along the first rotation direction, and both move along the second direction when the corresponding screw rod rotates along the second rotation direction.

9. The valve body structure according to claim 1, characterized in that: It also includes a controller and two stroke detection devices; The two stroke detection devices are respectively used to detect the strokes of the first connecting rod and the second connecting rod in real time and send the detection results to the controller; The controller is configured to calculate a stroke difference between the first connecting rod and the second connecting rod, and determine whether the stroke difference reaches a preset threshold; If so, the first driving source or the second driving source is controlled to switch the rotation direction so that the synchronous switching component switches to the second state or the fourth state.

10. The valve body structure according to claim 9, characterized in that: The controller is further configured to calculate a stroke compensation amount according to the stroke difference when the synchronous switching component is in the second state or the fourth state, and control the second driving source or the first driving source to output a preset stroke compensation amount so that the stroke difference decreases to 0; Alternatively, the controller is further configured to continuously determine whether the stroke difference drops to 0 when the synchronous switching component is in the second state or the fourth state; if so, control both the second driving source and the first driving source to stop outputting rotational power.

11. The valve body structure according to claim 9, characterized in that: The surfaces of the first connecting rod and the second connecting rod each have a plurality of non-identification areas and a plurality of identification areas; the plurality of non-identification areas and the plurality of identification areas are alternately arranged and evenly distributed along the lifting direction; The two stroke detection devices include photoelectric sensors; the two photoelectric sensors are respectively fixed on the circumference of the first connecting rod and the second connecting rod, and the detection ends of the two photoelectric sensors are both facing the surfaces of the first connecting rod and the second connecting rod; The photoelectric sensor is used to detect the identification areas and record the number of the detected identification areas.

12. A semiconductor process equipment, characterized in that: It comprises a process chamber and a valve body structure as described in any one of claims 1 to 11; the valve body structure is installed at the air inlet of the process chamber to control the air intake volume of the process chamber.

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