Vacuum coating apparatus and vacuum coating method for flexible substrates

Abstract

The present application relates to the technical field of vacuum coating, and discloses a vacuum coating equipment and a vacuum coating method for flexible substrates, which comprises a coating mechanism and a winding mechanism arranged outside the coating mechanism for winding and unwinding the flexible substrate. The height of the first winding assembly and the second winding assembly is adjusted, so that the height of the winding and unwinding of the flexible substrate is adjusted correspondingly to adapt to flexible substrates of different sizes, and the flexible substrate has a matching winding and unwinding space between the second substrate and the third substrate, so that the coating efficiency is not affected, and the space inside and outside the flexible substrate is still relatively separated, the uniformity of the coating is improved, and the height of the target material mechanism is adjusted through the cooperation of the first coating assembly, the second coating assembly and the first connecting assembly, so that the target material mechanism bombards the target material atoms at the center position of the flexible substrate, and the uniformity of the coating is further improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vacuum coating, in particular to a vacuum coating equipment and method for flexible substrate. BACKGROUND

[0002] With the continuous development of flexible screen related technology, the high-speed iteration of folding screen mobile phones has become the representative of the high-end products of major mobile phone manufacturers. The outermost layer of the folding screen mobile phone screen usually uses colorless polyimide film or ultra-thin glass as a flexible substrate, but the shortcomings of the flexible substrate are also obvious, that is, its hardness, wear resistance and scratch resistance are poor. To this end, the vacuum coating technology can effectively solve the above problems. Among them, the magnetron sputtering coating is a physical vapor deposition technology that forms a thin film by depositing sputtered target atoms onto a workpiece in a vacuum environment by applying an electromagnetic field to bombard the surface of a solid target with argon ions.

[0003] The background technology of the publication CN115058698B discloses a winding type vacuum coating machine, which has the following problems: the existing winding coating machine is prone to cause wrinkles in the film during unwinding and winding, which leads to unevenness of the film and is not conducive to the coating treatment of the film. In addition, during operation, the film is subjected to uneven tensile stress, which can easily cause excessive instantaneous tensile stress and damage to the film.

[0004] Based on the existing technology, the following problems exist:

[0005] The existing vacuum coating equipment for flexible substrate is not convenient to match with flexible substrates of different sizes during unwinding and winding the flexible substrate for vacuum coating, which is not convenient for actual vacuum coating use, and the distance between the target and the substrate cannot be adjusted synchronously, affecting the uniformity of the coating. Referring to the above application file, it only ensures the stability of the flexible substrate during winding through a tension adjusting mechanism, which has certain disadvantages. To solve the above problems, a vacuum coating equipment and method for flexible substrate are proposed. SUMMARY

[0006] To achieve the above purpose, the present application realizes the following technical scheme: a vacuum coating equipment for flexible substrate, comprising a vacuum furnace, a coating mechanism arranged vertically in the vacuum furnace, a winding mechanism arranged outside the coating mechanism for unwinding and winding the flexible substrate, and a lifting mechanism arranged on the side of the winding mechanism away from the coating mechanism, the coating mechanism comprising:

[0007] The first substrate is fixedly arranged on the inner side wall of the vacuum furnace. The top of the first substrate is fixedly provided with the second substrate. The top of the second substrate is movably provided with the third substrate. The top of the first substrate is provided with the first guide assembly arranged in a ring array with the center point of the second substrate, so as to guide the unwinding of the flexible substrate. The top of the first substrate and the top of the second substrate are respectively provided with the first film coating assembly and the second film coating assembly, so as to respectively coat the flexible substrate from both sides. The winding mechanism comprises:

[0008] The spline shaft is rotatably arranged on the inner bottom wall of the vacuum furnace and symmetrically arranged with the center point of the second substrate. The side walls of the two spline shafts are respectively provided with the first winding assembly and the second winding assembly. The first winding assembly comprises:

[0009] The winding drum is sleeved on the side wall of the spline shaft. The top of the spline shaft to the top inner wall of the vacuum furnace leaves a spacing for installing the winding drum. The top of the third substrate is provided with the first connecting assembly.

[0010] Further, the first guide assembly comprises:

[0011] The first guide pipe is rotatably arranged on the top of the first substrate. The top of the first substrate is movably provided with the second guide pipe. The flexible substrate is unwound along the first guide pipe and the second guide pipe. The top of the first guide pipe and the second guide pipe extends to the top of the vacuum furnace. The side away from each other of the second substrate and the third substrate is provided with the support assembly arranged in a ring array, so as to limit the position of the second guide pipe. The support assembly comprises:

[0012] The support seat is fixedly arranged on the side away from each other of the second substrate and the third substrate. The top of the support seat is provided with a support through slot penetrating through the second substrate, the third substrate and the first substrate. The inner walls of the two sides of the support through slot are provided with the first sliding groove. The first sliding block is placed in the first sliding groove. The outer wall of the second guide pipe is fixedly connected to the side close to the first sliding block. The first spring is placed in the first sliding groove, so that the second guide pipe has a tendency to approach the first guide pipe.

[0013] Further, the first film coating assembly and the second film coating assembly are the same and are oppositely arranged to respectively coat the flexible substrate from the inner side and the outer side. The second film coating assembly comprises:

[0014] The frame body is fixedly arranged on the top of the second substrate. The inner side middle end of the frame body is provided with the first transmission mechanism. The two side inner walls of the frame body are respectively slidably provided with the first toothed plate and the second toothed plate. The top of the first toothed plate is fixedly connected to the bottom of the third substrate. The first toothed plate and the second toothed plate are moved in the same direction by the first transmission mechanism.

[0015] A guide rod is fixed on the top of the second base plate in a circular array, and the side wall of the guide rod is sleeved with a ring body, and the outer wall of the ring body is fixedly connected with the second tooth plate.

[0016] Further, the second coating assembly further comprises:

[0017] A moving plate is horizontally movably arranged on the outer wall of the ring body and extends into the ring body, and the side wall of one end of the moving plate located outside the ring body is provided with a target material mechanism, and the side wall of one end of the moving plate located inside the ring body is respectively provided with an arc surface and a limiting frame, and a limiting through slot is formed in the top of the limiting frame;

[0018] A first servo motor is fixedly arranged on the top of the vacuum furnace, and the output shaft of the first servo motor is fixedly provided with a rotating shaft extending into the vacuum furnace through a shaft coupling, and the side wall of the rotating shaft is fixedly provided with a lever, and the side wall of the rotating shaft is sleeved in the limiting through slot, and the inner wall of the ring body is fixedly provided with a second spring, and the second spring is fixedly connected with the top of the limiting frame.

[0019] Further, the two spline shafts are drivingly connected to make the two spline shafts rotate synchronously, the bottom inner wall of the vacuum furnace is fixedly provided with a second servo motor for driving the spline shaft to rotate, and the bottom inner wall of the vacuum furnace and the inner side of the first winding assembly and the second winding assembly are both provided with a second guide assembly, and the first winding assembly and the second winding assembly are the same, and the first winding assembly further comprises:

[0020] A first auxiliary ring is fixedly arranged on the top of the winding cylinder, and the outer wall of the first auxiliary ring is provided with a first clamping groove;

[0021] A second auxiliary ring is fixedly arranged on the bottom of the winding cylinder, and the inner walls of the first auxiliary ring and the second auxiliary ring are both sleeved on the side wall of the spline shaft, and the outer wall of the second auxiliary ring is provided with a second clamping groove.

[0022] Further, the second guide assembly comprises:

[0023] A third guide tube is rotatably arranged on the bottom inner wall of the vacuum furnace, and the bottom inner wall of the vacuum furnace is rotatably provided with a fourth guide tube, and the flexible base material is wound and expanded between the third guide tube and the fourth guide tube, and the top of the third guide tube and the fourth guide tube both extends to the top of the vacuum furnace.

[0024] Further, the lifting mechanism comprises:

[0025] A lifting seat is fixedly arranged on the bottom inner wall of the vacuum furnace, a second sliding groove is formed in the inner side of the lifting seat, a second sliding block is placed in the second sliding groove, and a second connecting assembly for connecting the second sliding block and the winding cylinder is arranged on the inner side of the lifting seat;

[0026] A third servo motor is fixedly arranged on the top of the vacuum furnace, and an output shaft of the third servo motor is fixedly provided with a threaded rod extending into the second sliding groove through a shaft coupling, and the threaded rod is threadedly connected with the second sliding block.

[0027] Further, the second connecting assembly comprises:

[0028] A connecting frame is fixedly arranged on the inner side of the second sliding block, and a second transmission mechanism is arranged on the top of the connecting frame, and the top of the connecting frame is rotatably provided with a first rotating rod and a second rotating rod, and the first rotating rod and the second rotating rod are symmetrically arranged with the center point of the connecting frame, and the side walls of the first rotating rod and the second rotating rod are fixedly provided with a first gear and a second gear, respectively, and the first gear and the second gear are in meshing engagement.

[0029] A fourth servo motor is fixedly arranged on the bottom of the connecting frame, and the fourth servo motor drives the first gear and the second gear on the two sides of the top of the connecting frame to synchronously rotate through the second transmission mechanism.

[0030] A clamping plate is fixedly arranged on the side walls of the first rotating rod and the second rotating rod, and an outer ring plate is fixedly arranged on the end of the clamping plate away from the first rotating rod, and an inner ring plate is fixedly arranged on the inner side of the outer ring plate.

[0031] Further, the first connecting assembly comprises:

[0032] A connecting seat is fixedly arranged on the top of the third base plate, and a limiting groove is arranged on the two sides of the connecting seat, and a connecting block and a connecting plate are arranged on the inner wall of the limiting groove, and the connecting block and the connecting plate are fixedly connected on the side of the connecting block and the connecting plate away from each other, and the side wall of the connecting plate is in abutting engagement with the inner wall of the limiting groove, and the inner wall of the limiting groove and the side of the connecting plate away from the connecting block are fixedly provided with a third spring arranged at intervals.

[0033] The application further provides a vacuum coating method of the vacuum coating equipment for flexible substrates, and the method comprises the following steps:

[0034] S1: opening the door body of the vacuum furnace, and installing the winding drum with the flexible substrate wound thereon and the winding drum without the flexible substrate wound thereon in the vacuum furnace through the winding mechanism;

[0035] S2: after the flexible substrate is installed, the flexible substrate is unwound according to a predetermined route, and the flexible substrate is coated through the coating mechanism in the unwinding process.

[0036] The application provides a vacuum coating equipment and a vacuum coating method for flexible substrates.

[0037] 1. The application adjusts the height of the first winding assembly and the second winding assembly, so that the height of the unwinding flexible substrate is adjusted correspondingly to adapt to flexible substrates of different sizes, while the flexible substrate has a suitable unwinding space between the second base plate and the third base plate, avoiding affecting the efficiency of film coating, and still allowing the space inside and outside the flexible substrate to be relatively separated, improving the uniformity of film coating, and through the cooperation of the first film coating assembly, the second film coating assembly and the first connecting assembly, the height of the target material mechanism can be adjusted, so that the target material mechanism bombards the target material atoms at the center position of the flexible substrate, further improving the uniformity of film coating.

[0038] 2. The application adjusts the height of the first winding assembly and the second winding assembly through the first connecting assembly and the second connecting assembly, while facilitating the synchronous adjustment of the height of the third base plate and the target material mechanism, suitable for flexible substrates of different sizes, while facilitating operation and avoiding affecting the film coating effect.

[0039] 3. The application makes the target material mechanism always located at the center position of the flexible substrate through the first film coating assembly and the second film coating assembly, avoiding affecting the efficiency of film coating, and facilitating the adjustment of the distance between the target material mechanism and the flexible substrate, thereby improving the uniformity of film coating.

[0040] 4. The application makes the flexible substrate move along a track similar to a ring between the second base plate and the third base plate through the first guide assembly and the second guide assembly, thereby facilitating film coating from both sides of the flexible substrate, improving the film coating efficiency, and allowing the space inside and outside the flexible substrate to be relatively separated, thereby facilitating the reduction of the movement range of the target material atoms after bombardment, so as to facilitate the uniform deposition of the target material atoms on the flexible substrate, improving the film coating effect. BRIEF DESCRIPTION OF DRAWINGS

[0041] Figure 1 It is a schematic diagram of the overall structure of the application;

[0042] Figure 2 It is a schematic diagram of the top view structure of the vacuum furnace of the application;

[0043] Figure 3 It is a schematic diagram of the lifting mechanism and winding mechanism structure of the application;

[0044] Figure 4 It is a schematic diagram of the film coating mechanism, winding mechanism and first guide assembly structure of the application;

[0045] Figure 5 It is a schematic diagram of the first winding assembly, the second winding assembly and the second connecting assembly structure of the application;

[0046] Figure 6 It is a schematic diagram of the second connecting assembly and the winding cylinder structure of the application;

[0047] Figure 7 The second connecting assembly structure schematic view of the present application;

[0048] Figure 8 The first winding assembly structure schematic view of the present application;

[0049] Figure 9 The first substrate and the third substrate longitudinal section structure schematic view of the present application;

[0050] Figure 10 The first guide assembly and the second guide assembly structure schematic view of the present application;

[0051] Figure 11 The first guide assembly and the second guide assembly structure schematic view of the present application; Figure 10 The first guide assembly and the second guide assembly structure schematic view of the present application;

[0052] Figure 12 The first winding assembly structure schematic view of the present application;

[0053] Figure 13 The second coating assembly and the first coating assembly structure schematic view of the present application;

[0054] Figure 14 The ring body longitudinal section structure schematic view of the present application.

[0055] The above-mentioned figure mark involved in the figure: 1, the vacuum furnace; 2, the second guide assembly; 3, the first servo motor; 4, the fifth servo motor; 5, the first guide assembly; 6, the coating mechanism; 7, the winding mechanism; 8, the lifting mechanism;

[0056] 21, the third guide pipe; 22, the fourth guide pipe;

[0057] 51, the first guide pipe; 52, the second guide pipe; 53, the support assembly; 531, the support seat; 532, the support through slot;

[0058] 61, the first coating assembly; 62, the first substrate; 63, the first connecting assembly; 64, the third substrate; 65, the second substrate; 66, the second connecting assembly; 67, the second coating assembly;

[0059] 631, the connecting seat; 632, the connecting plate; 633, the connecting block;

[0060] 661, the connecting frame; 662, the second gear; 663, the second transmission mechanism; 664, the first gear; 665, the clamping plate; 666, the outer ring plate; 667, the inner ring plate; 668, the fourth servo motor;

[0061] 671, ring body; 672, second tooth plate; 673, frame body; 674, first tooth plate; 675, first transmission mechanism; 676, movable plate; 677, target mechanism; 678, guide rod; 679, arcuate surface; 6791, limit frame; 6792, limit slot; 6793, shift rod;

[0062] 71. spline shaft; 72. first winding assembly; 73. second servo motor; 74. second winding assembly;

[0063] 721, winding drum; 722, first clamping slot; 723, first auxiliary ring; 724, second auxiliary ring; 725, second clamping slot;

[0064] 81. Lifting seat; 82. Third servo motor. DETAILED DESCRIPTION

[0065] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0066] Example 1: Please refer to Figure 1 、 Figure 2 、 Figure 3 and Figure 4 A vacuum coating device for a flexible substrate includes a vacuum furnace 1. During the coating process, the flexible substrate is placed in a vacuum environment by the vacuum furnace 1, thereby achieving vacuum coating. The device also includes a coating mechanism 6 arranged vertically in the vacuum furnace 1, a winding mechanism 7 arranged outside the coating mechanism 6 for unwinding the flexible substrate, and a lifting mechanism 8 arranged on the side of the winding mechanism 7 away from the coating mechanism 6. The coating mechanism 6 includes:

[0067] The first substrate 62 is fixed to the inner wall of the vacuum furnace 1. A second substrate 65 is fixed on the top of the first substrate 62. A third substrate 64 is lifted and lowered on the top of the second substrate 65. The top of the first substrate 62 is provided with a first guide assembly 5 arranged in a circular array with the center point of the second substrate 65 to guide the unrolling of the flexible substrate. The top of the first substrate 62 and the top of the second substrate 65 are respectively provided with a first coating assembly 61 and a second coating assembly 67 to coat the flexible substrate from both sides.

[0068] In specific implementation, the flexible substrate is moved along a similar annular trajectory between the second substrate 65 and the third substrate 64 by the first guide assembly 5 and the second guide assembly 2, so as to facilitate the first coating assembly 61 and the second coating assembly 67 to coat the flexible substrate from both sides of the flexible substrate, improve the coating efficiency, and relatively separate the space on the inner side and the outer side of the flexible substrate, so as to facilitate reducing the movement range of the target atoms after the target is bombarded, so as to facilitate the target atoms to uniformly deposit on the flexible substrate, and improve the coating effect.

[0069] Since the size of the flexible substrate is different, in order to facilitate the coating of the flexible substrate with different sizes, and reduce the wrinkle of the flexible substrate during unwinding, the height of the third substrate 64 is adjusted by the second connecting assembly 66, so that the third substrate 64 and the second substrate 65 are suitable for unwinding of the flexible substrate with different sizes, and the height of the first winding assembly 72 and the second winding assembly 74 is adjusted by the lifting mechanism 8, so that the height of the unwound flexible substrate is adjusted correspondingly, so as to adapt to the flexible substrate with different sizes, and the unwound space of the flexible substrate between the second substrate 65 and the third substrate 64 is adapted, so as to avoid affecting the coating efficiency, and the space on the inner side and the outer side of the flexible substrate is still relatively separated by the movement trajectory of the flexible substrate and the blocking of the second substrate 65 and the third substrate 64, so as to improve the uniformity of the coating, and the height of the target mechanism 677 is adjusted by the cooperation of the first coating assembly 61, the second coating assembly 67 and the first connecting assembly 63, so that the target mechanism 677 bombards the target atoms at the center position of the flexible substrate, and the uniformity of the coating is further improved.

[0070] The first coating assembly 61 and the second coating assembly 67 are the same and are oppositely arranged to coat the flexible substrate from the inner side and the outer side of the flexible substrate respectively, and the second coating assembly 67 comprises:

[0071] The frame body 673 is fixedly arranged at the top of the second substrate 65, the inner side middle end of the frame body 673 is provided with the first transmission mechanism 675, the inner walls of the two sides of the frame body 673 are respectively slidably provided with the first tooth plate 674 and the second tooth plate 672, the top of the first tooth plate 674 is fixedly connected with the bottom of the third substrate 64, and the first tooth plate 674 and the second tooth plate 672 are moved in the same direction by the first transmission mechanism 675;

[0072] The guide rod 678 is annularly arranged at the top of the second substrate 65, the side wall of the guide rod 678 is sleeved with the ring body 671, and the outer wall of the ring body 671 is fixedly connected with the second tooth plate 672.

[0073] Please refer to Figure 9 、 Figure 13 and Figure 14 , the second coating assembly 67 further comprises:

[0074] The movable plate 676 is horizontally movable on the outer wall of the ring body 671 and extends into the ring body 671. The side wall of the movable plate 676 located outside the ring body 671 is provided with a target mechanism 677. The side wall of the movable plate 676 located inside the ring body 671 is provided with an arc surface 679 and a limit frame 6791. The limit frame 6791 has a limit slot 6792 defined at its top.

[0075] The first servo motor 3 is fixed on the top of the vacuum furnace 1. The output shaft of the first servo motor 3 is fixed with a rotating shaft extending into the vacuum furnace 1 through a coupling. The side wall of the rotating shaft is fixed with a shift rod 6793, and the side wall of the rotating shaft is sleeved in the limiting groove 6792. The inner wall of the ring body 671 is fixed with a second spring, and the second spring is fixedly connected to the top of the limiting frame 6791.

[0076] In a specific implementation, when the height of the third substrate 64 is adjusted through the first connecting component 63, the third substrate 64 drives the first tooth plate 674 to move upward, and the first tooth plate 674 drives the second tooth plate 672 to move upward through the first transmission mechanism 675, and the second tooth plate 672 drives the ring body 671 to move upward, thereby driving the movable plate 676 and the target material mechanism 677 to move upward, so as to synchronously adjust the height of the target material mechanism 677 according to flexible substrates of different sizes, so that the bombarded target atoms are more evenly deposited on the surface of the flexible substrate, thereby improving the uniformity of the coating.

[0077] Since the heights of the top of the third substrate 64 and the top of the winding drum 721 are synchronized, when the height of the winding drum 721 and the third substrate 64 increases by two units, the target mechanism 677 needs to move upward by one unit to ensure that it is located at the center of the flexible substrate. This avoids compromising the uniformity of the coating due to adapting to flexible substrates of different sizes. To this end, the transmission ratio between the first transmission mechanism 675 and the second tooth plate 672 is adjusted so that when the first tooth plate 674 moves upward by two units, the second tooth plate 672 moves upward by one unit. This ensures that the target mechanism 677 is always located at the center of the flexible substrate, avoiding any impact on the coating efficiency.

[0078] The first transmission mechanism 675 includes two meshing first transmission gears, and the sides of the first transmission gears that are away from each other are respectively meshed with the first tooth plate 674 and the second tooth plate 672, so that the first tooth plate 674 can drive the second tooth plate 672 to move upward or downward synchronously, and through the transmission ratio of the meshing of the two first transmission gears, it is easy to adjust the moving distance of the second tooth plate 672, which is convenient for actual adjustment and use.

[0079] In the coating process, the distance between the target material and the substrate affects the uniformity of the atomic distribution of the target material. In order to improve the uniformity of the deposition of the target material atoms on the surface of the flexible substrate, the first servo motor 3 drives the rotating shaft and the push rod 6793 of the second coating assembly 67 to rotate. The push rod 6793 is pressed and moved along the arc surface 679 to overcome the elastic force of the second spring, thereby adjusting the horizontal position of the target material mechanism 677 and adjusting the distance between the target material mechanism 677 and the flexible substrate, thereby improving the uniformity of the coating.

[0080] By allowing the moving plate 676 to move horizontally on the side wall of the ring body 671, the ring body 671 is lifted, and the moving plate 676 and the target material mechanism 677 are lifted synchronously. By making the height of the push rod 6793 and the arc surface 679 greater than the lifting height of the ring body 671, the push rod 6793 is at a certain distance from the limiting frame 6791, so that the push rod 6793 is always in contact with the arc surface 679 when the ring body 671 is lifted, facilitating the movement of the moving plate 676. The second spring facilitates the resetting of the moving plate 676 and the target material mechanism 677 for next use.

[0081] The limiting frame 6791 is sleeved on the side wall of the rotating shaft to prevent the moving plate 676 from separating from the ring body 671.

[0082] The first toothed plate 674 of the first coating assembly 61 is fixedly connected with the third base plate 64, so as to synchronously adjust the height of the target material mechanism 677 of the first coating assembly 61 and the second coating assembly 67. The first coating assembly 61 further comprises a fifth servo motor 4 for driving the rotation of the push rod 6793 of the first coating assembly 61. The specific transmission is the same as that of the second coating assembly 67, which will not be repeated here.

[0083] Embodiment two: please refer to Figure 4 、 Figure 5 、 Figure 6 and Figure 8 The difference between the technical solutions of the embodiment and the embodiment one is that the winding mechanism 7 comprises:

[0084] The spline shaft 71 is rotatably arranged on the inner wall of the bottom of the vacuum furnace 1, and is symmetrically arranged with the center point of the second base plate 65. The side walls of the two spline shafts 71 are respectively provided with a first winding assembly 72 and a second winding assembly 74. The first winding assembly 72 comprises:

[0085] The winding cylinder 721 is sleeved on the side wall of the spline shaft 71, and the top of the spline shaft 71 is spaced from the top inner wall of the vacuum furnace 1 to form a space for installing the winding cylinder 721. The top of the third base plate 64 is provided with a first connecting assembly 63.

[0086] Two spline shafts 71 are drivingly connected to rotate synchronously, the inner wall of the bottom of the vacuum furnace 1 is fixedly provided with a second servo motor 73 for driving the spline shaft 71 to rotate, the inner wall of the bottom of the vacuum furnace 1 and located inside the first winding assembly 72 and the second winding assembly 74 is provided with a second guide assembly 2, the first winding assembly 72 and the second winding assembly 74 are the same, and the first winding assembly 72 further comprises:

[0087] A first auxiliary ring 723 is fixedly arranged at the top of the winding drum 721, and a first clamping groove 722 is formed in the outer wall of the first auxiliary ring 723;

[0088] A second auxiliary ring 724 is fixedly arranged at the bottom of the winding drum 721, and the inner walls of the first auxiliary ring 723 and the second auxiliary ring 724 are both sleeved on the side wall of the spline shaft 71, and a second clamping groove 725 is formed in the outer wall of the second auxiliary ring 724.

[0089] In specific implementation, the winding drum 721 is sleeved on the side wall of the spline shaft 71, so that the winding drum 721 can be driven to rotate by the spline shaft 71 while being vertically moved, thereby facilitating the adjustment of the height of the winding drum 721 to adapt to flexible substrates of different sizes.

[0090] When driving the two spline shafts 71 to rotate, the two spline shafts 71 are drivingly connected through a gear and chain transmission mode, which is prior art and will not be repeated here, so that the two spline shafts 71 rotate synchronously to drive the winding drums 721 of the first winding assembly 72 and the second winding assembly 74 to rotate synchronously, so that the flexible substrate is wound stably while being plated during the winding process, one of the spline shafts 71 is driven to rotate by the second servo motor 73, so that the two spline shafts 71 rotate synchronously, which is convenient for actual driving use.

[0091] The height of the winding drums 721 of the first winding assembly 72 and the second winding assembly 74 is adjusted synchronously by the lifting mechanism 8 and the second connecting assembly 66, so that the size of the flexible substrate can be adjusted conveniently, and the actual use is facilitated.

[0092] The first clamping groove 722 and the second clamping groove 725 are used to cooperate with the first connecting assembly 63 and the second connecting assembly 66 respectively, so that the height of the third base plate 64 and the target material mechanism 677 can be adjusted synchronously when the height of the winding drum 721 is adjusted, and the actual operation is facilitated.

[0093] In order to ensure the stability of the winding of the flexible substrate, an external tension adjusting mechanism can be used to adaptively extrude the flexible substrate to ensure the tension during the winding of the flexible substrate, which is prior art and will not be repeated here.

[0094] Please refer to Figure 3 , the lifting mechanism 8 comprises:

[0095] Lifting seat 81, fixed in the bottom wall of vacuum furnace 1, the inner side of lifting seat 81 is provided with second sliding groove, the inside of second sliding groove is placed with second sliding block, the inner side of lifting seat 81 is provided with second connecting assembly 66 for connecting second sliding block and winding drum 721;

[0096] Third servo motor 82, fixedly arranged on the top of vacuum furnace 1, the output shaft of third servo motor 82 is fixedly provided with a threaded rod extending into the second sliding groove through a shaft coupling, and the threaded rod is threadedly connected with the second sliding block.

[0097] In specific implementation, the third servo motor 82 is started, the output shaft of the third servo motor 82 drives the threaded rod to rotate, so as to drive the second sliding block to move in the process of rotation of the threaded rod, so as to drive the second connecting assembly 66 to move, thereby adjusting the positioning position of the winding drum 721, and adjusting the height of the winding drum 721.

[0098] Please refer to Figure 7 , the second connecting assembly 66 comprises:

[0099] Connecting frame 661, fixedly arranged on the inner side of the second sliding block, the top of connecting frame 661 is provided with second transmission mechanism 663, the top of connecting frame 661 is rotatably provided with first rotating rod and second rotating rod, the first rotating rod and the second rotating rod are symmetrically arranged with the center point of connecting frame 661, the side wall of the first rotating rod and the second rotating rod is respectively fixedly provided with first gear 664 and second gear 662, and the first gear 664 and the second gear 662 are engaged;

[0100] Fourth servo motor 668, fixedly arranged on the bottom of connecting frame 661, fourth servo motor 668 drives first gear 664 and second gear 662 on both sides of the top of connecting frame 661 to rotate synchronously through second transmission mechanism 663;

[0101] Clamping plate 665, fixedly arranged on the side wall of the first rotating rod and the second rotating rod, the end of clamping plate 665 away from the first rotating rod is fixedly provided with outer ring plate 666, and the inner side of outer ring plate 666 is fixedly provided with inner ring plate 667.

[0102] In the embodiment, the fourth servo motor 668 is started to drive the two clamping plates 665 on the top side of the connecting frame 661 to move away from each other, so that the two outer ring plates 666 are located on the two sides of the spline shaft 71, and then the winding drum 721 is placed on the side wall of the spline shaft 71 along the top of the spline shaft 71. When the second auxiliary ring 724 at the bottom of the winding drum 721 is horizontal with the inner ring plate 667, the two outer ring plates 666 are moved close to each other to insert the inner ring plate 667 into the second clamping groove 725, so as to position the winding drum 721, and adjust the height of the winding drum 721 through the lifting mechanism 8.

[0103] By arranging the second clamping groove 725, the winding drum 721 can rotate on the side wall of the inner ring plate 667 through the second clamping groove 725 after the inner ring plate 667 is inserted into the second clamping groove 725, so as not to affect the rotation of the winding drum 721, and facilitate the positioning of the height of the winding drum 721.

[0104] The second transmission mechanism 663 drives the first gear 664 and the second gear 662 on the top of the connecting frame 661, so as to facilitate the synchronous adjustment of the height of the winding drum 721 of the first winding assembly 72 and the second winding assembly 74, and facilitate the actual operation.

[0105] The second transmission mechanism 663 includes a second transmission gear rotatingly arranged on the top of the connecting frame 661 and two third transmission gears meshing with the two sides of the second transmission gear and meshing with the first gear 664 or the second gear 662, so that the rotation directions of the first gear 664 and the second gear 662 are opposite, so that the clamping plates 665 can rotate close to or away from each other.

[0106] Please refer to Figure 12 , the first connecting assembly 63 comprises:

[0107] The connecting seat 631 is fixedly arranged on the top of the third base plate 64, and the two sides of the connecting seat 631 are provided with limiting grooves, the inner walls of the limiting grooves are sleeved with connecting blocks 633 and connecting plates 632, the connecting blocks 633 and the connecting plates 632 are fixedly connected on the side close to each other, the side wall of the connecting plate 632 is in abutting fit with the inner wall of the limiting groove, and the inner wall of the limiting groove and the side away from the connecting block 633 of the connecting plate 632 is fixedly provided with third springs arranged at intervals.

[0108] In the embodiment, when the height adjustment of the winding drum 721 is completed, the connecting block 633 is inserted into the first clamping groove 722 of the first auxiliary ring 723, so that the third base plate 64 is connected with the winding drum 721, and the height of the third base plate 64 is adjusted according to the size of the flexible base material.

[0109] The connecting plate 632 is stopped by the limiting groove, so as to avoid the disconnection of the connecting block 633 and the connecting seat 631.

[0110] Embodiment three, please refer to Figure 10 and Figure 11 The difference between the technical scheme of the embodiment and the embodiment two is that the first guide assembly 5 comprises:

[0111] The first guide pipe 51 is rotatably arranged on the top of the first base plate 62, the top of the first base plate 62 is movably provided with the second guide pipe 52, the flexible base material is rolled and developed between the first guide pipe 51 and the second guide pipe 52, the top of the first guide pipe 51 and the second guide pipe 52 extends to the top of the vacuum furnace 1, the side of the second base plate 65 and the third base plate 64 away from each other is provided with the support assembly 53 arranged in an annular array, so as to limit the position of the second guide pipe 52, the support assembly 53 comprises:

[0112] The support seat 531 is fixedly arranged on the side of the second base plate 65 and the third base plate 64 away from each other, the top of the support seat 531 is provided with the support through slot 532 penetrating through the second base plate 65, the third base plate 64 and the first base plate 62, the inner wall of the two sides of the support through slot 532 is provided with the first sliding groove, the first sliding block is arranged in the first sliding groove, the outer wall of the second guide pipe 52 is fixedly connected with the side of the first sliding block, the first spring is arranged in the first sliding groove, so that the second guide pipe 52 has the tendency to approach the first guide pipe 51.

[0113] Please refer to Figure 10 The second guide assembly 2 comprises:

[0114] The third guide pipe 21 is rotatably arranged on the inner wall of the bottom of the vacuum furnace 1, the fourth guide pipe 22 is rotatably arranged on the inner wall of the bottom of the vacuum furnace 1, the flexible base material is rolled and developed between the third guide pipe 21 and the fourth guide pipe 22, the top of the third guide pipe 21 and the fourth guide pipe 22 extends to the top of the vacuum furnace 1.

[0115] In specific implementation, the movement track of the flexible base material is limited by making the flexible base material move between the first guide pipe 51 and the second guide pipe 52, so that the flexible base material moves in the second base plate 65 and the third base plate 64 according to a similar annular track, and cooperates with the third base plate 64 and the second base plate 65, so that the inner side and the outer side of the flexible base material are relatively separated, which is convenient for actual film coating use.

[0116] The third guide pipe 21 and the fourth guide pipe 22 guide the position of the first winding assembly 72 and the second winding assembly 74 close to the flexible base material, improve the stability of the guide, so as to improve the stability of the movement of the flexible base material.

[0117] The third base plate 64 is limited by the first guide pipe 51 and the second guide pipe 52, the stability of movement of the third base plate 64 is improved, and the third base plate 64 is limited by the rotating shaft of the second coating film assembly 67, the stability of movement is further improved.

[0118] The two ends of the first guide pipe 51, the second guide pipe 52, the third guide pipe 21 and the fourth guide pipe 22 are externally connected with liquid pipes, so that the refrigerant or the heat medium can be conveniently transported into the pipes, the flexible base material can be conveniently cooled or heated, and the actual coating film use is facilitated.

[0119] The embodiment of the application further provides a vacuum coating method of the vacuum coating equipment for the flexible base material.

[0120] S1: the door body of the vacuum furnace 1 is opened, the winding drum 721 wound with the flexible base material and the winding drum 721 unwound with the flexible base material are both installed in the vacuum furnace 1 through the second winding assembly 74 and the first winding assembly 72 of the winding mechanism 7, so that the second winding assembly 74 unwinds the flexible base material while the first winding assembly 72 winds the flexible base material, or the reverse motion is performed, that is, the first winding assembly 72 unwinds the flexible base material while the second winding assembly 74 winds the flexible base material.

[0121] S2: after the flexible base material is installed, the flexible base material is wound and unwound according to a predetermined route, so that the flexible base material is wound and unwound along the similar annular track between the second base plate 65 and the third base plate 64 under the guidance of the first guide assembly 5 and the second guide assembly 2, the two sides of the flexible base material are synchronously coated by the first coating film assembly 61 and the second coating film assembly 67, the flexible base material can be reciprocally wound and unwound, so that the target material atoms are uniformly distributed on the flexible base material, the uniformity of the coating film is improved, and the flexible base material is coated by the coating film mechanism 6 in the process of winding and unwinding.

[0122] Meanwhile, the contents not described in detail in the specification all belong to the prior art known by the person skilled in the art.

[0123] It should be noted that, in the present document, the relative terms such as first and second are used only to distinguish one entity or operation from another, and do not necessarily require or imply that there is any such actual relationship or order between these entities or operations. Moreover, the terms "include", "contain" or any other variants thereof are intended to cover non-exclusive inclusion, so that the process, method, article or equipment including a series of elements not only includes those elements, but also includes other elements not explicitly listed or inherent to such process, method, article or equipment.

[0124] While embodiments of the application have been shown and described, it is to be understood that the embodiments described are merely exemplary of the principles and application of the present application. Numerous modifications and adaptions can be effected without departing from the spirit and scope of the present application, which is not limited to the exact construction and arrangement described. It is intended, therefore, to cover all modifications and adaptions that fall within the scope of the claims and their equivalents.

Claims

1. A vacuum coating device for a flexible substrate, comprising a vacuum furnace, characterized in that: The invention also includes a coating mechanism disposed in a vacuum furnace and arranged vertically, a winding mechanism disposed outside the coating mechanism for unwinding the flexible substrate, and a lifting mechanism disposed on a side of the winding mechanism away from the coating mechanism. The coating mechanism includes: The first substrate is fixedly arranged on the inner side wall of the vacuum furnace, the second substrate is fixedly arranged on the top of the first substrate, the third substrate is lifted and lowered on the top of the second substrate, the first substrate is provided with a first guide assembly arranged in a circular array with the center point of the second substrate, so as to guide the unwinding of the flexible substrate, the top of the first substrate and the top of the second substrate are respectively provided with a first coating assembly and a second coating assembly, so as to coat the flexible substrate from both sides thereof, respectively, and the winding mechanism includes: The spline shaft is rotatably arranged on the bottom inner wall of the vacuum furnace and is symmetrically arranged with respect to the center point of the second base plate. The side walls of the two spline shafts are respectively provided with a first winding assembly and a second winding assembly. The first winding assembly includes: The winding drum is sleeved on the side wall of the spline shaft, and a gap for installing the winding drum is left between the top of the spline shaft and the top inner wall of the vacuum furnace. The top of the third base plate is provided with a first connecting component; The first guide component includes: A first guide tube is rotatably mounted on the top of the first substrate. A second guide tube is movably mounted on the top of the first substrate. The flexible substrate is rolled up between the first guide tube and the second guide tube. The tops of the first guide tube and the second guide tube both extend to the top of the vacuum furnace. A support assembly arranged in a circular array is disposed on a side of the second substrate and the third substrate facing away from each other to limit the position of the second guide tube. The support assembly includes: The support seat is fixedly arranged on a side where the second substrate and the third substrate are away from each other. A support groove is provided on the top of the support seat and passes through the second substrate, the third substrate and the first substrate. The inner walls of both sides of the support groove are provided with a first slide groove. A first slider is placed inside the first slide groove. The outer wall of the second guide tube is fixedly connected to the side where the first slider is close to each other. A first spring is placed inside the first slide groove so that the second guide tube has a tendency to approach the first guide tube. The first coating assembly and the second coating assembly are the same and are arranged opposite to each other to coat the flexible substrate from the inner side and the outer side respectively. The second coating assembly includes: The frame is fixedly mounted on the top of the second base plate, a first transmission mechanism is provided at the inner middle end of the frame, a first tooth plate and a second tooth plate are slidably provided on the inner walls of both sides of the frame, the top of the first tooth plate is fixedly connected to the bottom of the third base plate, and the first tooth plate and the second tooth plate are moved in the same direction by the first transmission mechanism; The guide rods are fixedly arranged on the top of the second base plate in an annular array, the side walls of the guide rods are sleeved with a ring body, the outer wall of the ring body is fixedly connected to the second gear plate, the two spline shafts are transmission-connected so that the two spline shafts rotate synchronously, a second servo motor for driving the spline shafts to rotate is fixedly provided on the bottom inner wall of the vacuum furnace, and a second guide assembly is provided on the bottom inner wall of the vacuum furnace and inside the first winding assembly and the second winding assembly, and the first winding assembly and the second winding assembly are identical; The lifting mechanism comprises: A lifting seat is fixedly mounted on the bottom inner wall of the vacuum furnace, a second chute is provided on the inner side of the lifting seat, a second slider is placed inside the second chute, and a second connecting assembly for connecting the second slider and the winding drum is provided on the inner side of the lifting seat; a third servo motor fixedly mounted on the top of the vacuum furnace, wherein an output shaft of the third servo motor is fixedly provided with a threaded rod extending into the second slide groove via a coupling, and the threaded rod is threadedly connected to the second slider; The second connection component includes: A connecting frame is fixedly provided on the inner side of the second slider, and a second transmission mechanism is provided on the top of the connecting frame. A first rotating rod and a second rotating rod are rotatably provided on the top of the connecting frame. The first rotating rod and the second rotating rod are symmetrically arranged with respect to the center point of the connecting frame. The side walls of the first rotating rod and the second rotating rod are respectively fixedly provided with a first gear and a second gear, and the first gear and the second gear are meshed. a fourth servo motor, fixedly disposed at the bottom of the connecting frame, and driving the first gear and the second gear on both sides of the top of the connecting frame to rotate synchronously through the second transmission mechanism; A clamping plate is fixedly mounted on the side walls of the first rotating rod and the second rotating rod, an outer ring plate is fixedly mounted on one end of the clamping plate away from the first rotating rod, and an inner ring plate is fixedly mounted on the inner side of the outer ring plate; The first connection component includes: The connecting seat is fixed on the top of the third base plate, and limiting grooves are provided on both sides of the connecting seat. The inner walls of the limiting grooves are sleeved with connecting blocks and connecting plates. The connecting blocks and the connecting plates are fixedly connected on the side close to each other, and the side walls of the connecting plate cooperate with the inner wall stop of the limiting groove. The inner wall of the limiting groove and the side of the connecting plate away from the connecting block are fixedly provided with third springs arranged at intervals.

2. The vacuum coating equipment for flexible substrates according to claim 1, characterized in that: The second coating assembly further includes: The movable plate is horizontally movably arranged on the outer wall of the ring body and extends into the ring body. The side wall of one end of the movable plate located outside the ring body is provided with a target mechanism, and the side wall of one end of the movable plate located inside the ring body is respectively provided with an arc surface and a limit frame, and a limit groove is provided on the top of the limit frame; The first servo motor is fixed on the top of the vacuum furnace. The output shaft of the first servo motor is fixed with a rotating shaft extending into the vacuum furnace through a coupling. The side wall of the rotating shaft is fixed with a shift rod. The side wall of the rotating shaft is sleeved in the limiting groove. The inner wall of the ring body is fixed with a second spring, and the second spring is fixedly connected to the top of the limiting frame.

3. The vacuum coating equipment for flexible substrates according to claim 2, characterized in that: The first winding assembly further comprises: A first auxiliary ring is fixedly mounted on the top of the winding drum, and a first clamping groove is formed on the outer wall of the first auxiliary ring; The second auxiliary ring is fixed on the bottom of the winding drum, and the inner walls of the first auxiliary ring and the second auxiliary ring are sleeved on the side wall of the spline shaft. The outer wall of the second auxiliary ring is provided with a second slot.

4. The vacuum coating equipment for a flexible substrate according to claim 3, characterized in that: The second guide component includes: The third guide tube is rotatably arranged on the bottom inner wall of the vacuum furnace. The fourth guide tube is rotatably arranged on the bottom inner wall of the vacuum furnace. The flexible substrate is rolled up between the third guide tube and the fourth guide tube. The tops of the third guide tube and the fourth guide tube both extend to the top of the vacuum furnace.

5. A vacuum coating method for a flexible substrate vacuum coating device, characterized in that: The method using the vacuum coating equipment for a flexible substrate according to any one of claims 1 to 4 comprises the following steps: S1: Open the door of the vacuum furnace, and install the winding drum wrapped with the flexible substrate and the winding drum without the flexible substrate into the vacuum furnace through the winding mechanism; S2: After the flexible substrate is installed, the flexible substrate is rolled up along a predetermined route. During the rolling process, the flexible substrate is coated by a coating mechanism.

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