Byproduct separation device and semiconductor process equipment

Abstract

The invention discloses a byproduct separation device and semiconductor process equipment, and relates to the field of semiconductors. A byproduct separation device is used for separating byproducts and comprises a shell, a cooling pipe and a plurality of flow guide parts, the shell is provided with an input port and an output port, the input port is used for receiving process byproducts, and the output port is used for outputting separated substances of the process byproducts; the cooling pipe is arranged in the shell, a flow channel is formed between the cooling pipe and the shell, and the input port and the output port are respectively communicated with the flow channel; the multiple flow guide parts are all arranged in the flow channel and are arranged at intervals in the direction from the input port to the output port, a circulation space is formed between at least part of the outer edge of each flow guide part and the inner wall of the shell, and the circulation spaces corresponding to every two adjacent flow guide parts are arranged in a staggered mode; and in the direction from the input port to the output port, the flow passing areas of the circulation spaces corresponding to the multiple flow guiding pieces are gradually reduced. The device at least can solve the problem that a current byproduct separation device is easy to block.

Description

Technical Field

[0001] The present application belongs to the field of semiconductor technology, and specifically relates to a by-product separation device and semiconductor process equipment. Background Art

[0002] During the packaging stage of semiconductor manufacturing, a vertical furnace known as a PIQ (Polyimide Curing) system is commonly used to repair damage and strengthen the adhesion of vacuum-heated polyimide (PI) films. As an insulating material, polyimide film is formed by polycondensing pyromellitic anhydride and diaminodiphenyl ether in a highly polar solvent (primarily water and gamma-butyrolactone), casting the resulting film, and then undergoing imidization. Polyimide is widely used in the packaging stage of semiconductor manufacturing due to its high temperature resistance, high dielectric strength, radiation resistance, and excellent adhesion.

[0003] During the PIQ process, nitrogen is introduced into the chamber, causing the solvent in the polyimide film to evaporate at high temperatures, solidifying the film. This process produces gaseous byproducts, γ-butyrolactone and water vapor, which are then exhausted from the chamber along with the nitrogen. γ-butyrolactone has a boiling point of 199°C-201°C and a melting point of -75°C. At room temperature, it transforms into a sticky grease. The plant's equipment requirements dictate that the generated waste gas and liquid be separated at room temperature. Therefore, the PIQ equipment's exhaust ductwork requires a system to cool and separate the byproducts.

[0004] Some by-product separation devices in related technologies adopt a two-stage structure, namely, a cooling structure and a separation structure. However, after a period of time, a large amount of by-products are easily attached to the damping plate in the cooling structure, causing the cooling structure to be blocked, thereby affecting exhaust. Summary of the Invention

[0005] The purpose of the embodiments of the present application is to provide a by-product separation device and semiconductor process equipment, which can at least solve the problem that the current by-product separation device is easily clogged.

[0006] In order to solve the above technical problems, this application is implemented as follows:

[0007] The embodiment of the present application provides a by-product separation device for separating and processing process by-products generated during a semiconductor process, the by-product separation device comprising: a shell, a cooling pipe, and a plurality of flow guides;

[0008] The housing is provided with an input port and an output port, the input port is used to receive the process by-product, and the output port is used to output the separated substances of the process by-product;

[0009] The cooling pipe is arranged in the shell, a flow channel is formed between the cooling pipe and the shell, and the input port and the input port are respectively connected to the flow channel;

[0010] A plurality of flow guides are provided in the flow channel and are arranged at intervals along the direction from the input port to the output port. A flow space is defined between at least a portion of the outer edge of each flow guide and the inner wall of the shell. The flow spaces corresponding to two adjacent flow guides are staggered.

[0011] Along the direction from the input port to the output port, the flow areas of the flow spaces corresponding to the plurality of flow guide members gradually decrease.

[0012] An embodiment of the present application also provides a semiconductor process equipment, including the above-mentioned by-product separation device.

[0013] In the embodiment of the present application, a structure of internal cooling and external ventilation is adopted, which is beneficial to increasing the cooling area in the flow channel and improving the cooling effect; multiple staggered flow spaces are formed between the cooling tube and the shell by multiple guide members, so that the process by-products generated in the semiconductor process can flow smoothly, and the flow path of the process by-products can be extended in a short range, so as to maximize the cooling effect of the internal cooling and help improve the separation effect of the process by-products; the flow area of ​​the flow space corresponding to the multiple guide members gradually decreases, which can ensure that the flow channel has a sufficiently large flow area near the input port area, effectively preventing the process by-products from condensing in the flow channel near the input port area and causing blockage, thereby extending the service life of the by-product separation device and solving the problem of short maintenance cycle. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 is a schematic diagram of a by-product separation device in the related art;

[0015] Figure 2 Schematic diagram of the by-product separation device and process chamber disclosed in the embodiments of the present application;

[0016] Figure 3 This is a first structural schematic diagram of the housing, cooling pipe, and flow guide disclosed in an embodiment of the present application;

[0017] Figure 4 This is a second structural schematic diagram of the housing, cooling pipe, and flow guide disclosed in an embodiment of the present application;

[0018] Figure 5 This is a schematic diagram of the flow path of the process by-products disclosed in the embodiments of this application in the flow channel.

[0019] Description of reference numerals:

[0020] 01-Cooling component; 02-Separation component; 03-Process chamber;

[0021] 11-housing; 111-input port; 112-output port;

[0022] 12-cooling pipe;

[0023] 13- flow guide; 131- inner edge; 132- outer edge;

[0024] 14-first heating element;

[0025] M-flow channel; N-circulation space;

[0026] 21-first pipeline;

[0027] 22-second pipeline;

[0028] 231 - liquid discharge pipe; 232 - first cooling liquid pipe; 233 - air intake pipe; 234 - second cooling liquid pipe;

[0029] 241 - third liquid valve; 242 - first liquid valve; 243 - first air inlet valve; 244 - second liquid valve;

[0030] 31- third pipeline;

[0031] 32-first temperature control component; 321-second heating element; 322-first temperature detection element; 323-first control element;

[0032] 41- fourth pipeline;

[0033] 42-second temperature control component; 421-second temperature detection element; 422-second air intake valve; 423-second control element; 424-flow detection element; 425-manual valve;

[0034] 51-Fifth pipeline;

[0035] 52-exhaust pipe;

[0036] 53-collection container;

[0037] 61-first flange; 62-second flange;

[0038] 71-Process chamber. DETAILED DESCRIPTION

[0039] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are part of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0040] The terms "first," "second," and the like in the specification and claims of this application are used to distinguish similar objects, and are not used to describe a specific order or precedence. It should be understood that the terms used in this manner are interchangeable where appropriate, so that the embodiments of this application can be implemented in an order other than that illustrated or described herein, and that the objects distinguished by "first," "second," and the like are generally of the same type, and do not limit the number of objects; for example, the first object can be one or more. In addition, the term "and / or" in the specification and claims refers to at least one of the connected objects, and the character " / " generally indicates that the objects connected are in an "or" relationship.

[0041] The embodiments of the present application are described in detail below through specific embodiments and their application scenarios in conjunction with the accompanying drawings.

[0042] refer to Figure 1 The related art provides a separation device with a two-stage structural design, including a cooling component 01 and a separation component 02. The cooling component 01 is connected to the outlet of the process chamber 03. The cooling component 01 can cool the process by-products discharged from the process chamber 03 to obtain waste gas and waste liquid; the separation component 02 is connected to the cooling component 01 and is used to separate the waste gas and waste liquid so that the waste gas and waste liquid can be discharged separately.

[0043] However, in the process of cooling and separating the process by-products in the above-mentioned two-stage separation device, since the process by-products are adhesive grease-like substances, they are easy to adhere to the damping plate of the cooling component 01. Over time, it is easy to cause blockage inside the separation component 01, affecting the transmission of the process by-products and reducing the cooling effect.

[0044] To solve the above problems, the present invention discloses a by-product separation device for separating and treating by-products generated during semiconductor processing. Figures 2 to 5 The disclosed by-product separation device includes a shell 11, a cooling pipe 12 and a plurality of flow guides 13.

[0045] The shell 11 is a basic component that can provide a mounting base for components such as the cooling pipe 12 and the flow guide 13. Figures 3 to 5 As shown, in some embodiments, the housing 11 may have an input port 111 and an output port 112. The input port 111 is used to receive process byproducts, and the output port 112 is used to discharge separated substances of the process byproducts, which may include waste gas and waste liquid. For example, the housing 11 may be made of stainless steel. Of course, other materials may also be used, and are not specifically limited here.

[0046] Under actual operating conditions, the housing 11 can be connected to the output end of the process chamber 71 via the input port 111, so that process byproducts generated by the process in the process chamber 71 can flow into the byproduct separation device for gas-liquid separation. In addition, the housing 11 can be arranged in a vertical direction, with the input port 111 located at the top and the output port 112 located at the bottom, so that process byproducts can enter the housing 11 from the top, and after separation, the waste gas and waste liquid can be discharged from the bottom of the housing 11.

[0047] The cooling tube 12 is an inner tube disposed within the housing 11, and a flow channel M is formed between the cooling tube 12 and the housing 11. The input port 111 and the output port 111 are respectively connected to the flow channel M. The flow channel M allows the flow of process byproducts. As the process byproducts flow within the flow channel M, heat exchange occurs between the process byproducts and the cooling tube 12, thereby cooling the process byproducts and facilitating gas-liquid separation of the process byproducts. Furthermore, the waste gas and waste liquid separated from the process byproducts can flow into the flow channel M from the input port 111 and ultimately flow out of the flow channel M from the output port 112.

[0048] For example, the cooling tube 12 may have an inlet and an outlet, wherein the inlet is used to input a cooling medium, such as cooling water, cooling gas, etc., and the outlet is used to output the cooling medium after heat exchange. By inputting the cooling medium into the cooling tube 12, heat exchange can be achieved between the cooling medium and the process byproducts, thereby cooling the process byproducts.

[0049] Optionally, the cooling tube 12 and the shell 11 may be coaxially arranged, and a gap is provided between the outer wall of the cooling tube 12 and the inner wall of the shell 11 to form a flow channel M for accommodating and transmitting process by-products.

[0050] In the embodiment of the present application, the flow path of the process by-products in the flow channel M can be extended to increase the retention time of the process by-products in the flow channel M, thereby improving the heat exchange effect. To extend the flow path, in the embodiment of the present application, multiple guide members 13 are provided in the flow channel M and are arranged at intervals along the direction from the input port 111 to the output port 112, and a flow space N is provided between at least a portion of the outer edge 132 of each guide member 13 and the inner wall of the shell 11, as shown in FIG. Figures 3 to 5 Based on this, the process by-products entering the flow channel M can flow along each circulation space N, ensuring the smooth flow of the process by-products. In addition, during the flow process, the process by-products can also exchange heat with the cooling pipe 12, thereby cooling the process by-products and facilitating the separation of the process by-products. At the same time, the process by-products can also contact and exchange heat with the guide member 13, which can improve the heat exchange efficiency to a certain extent.

[0051] Furthermore, the flow spaces N corresponding to two adjacent flow guides 13 are staggered. This allows the process byproducts to change their flow direction when flowing from one flow space N to the adjacent flow space N, effectively increasing the flow distance and extending the flow path of the process byproducts. This can extend the contact time between the process byproducts and the cooling tubes 12 and flow guides 13, thereby improving heat exchange efficiency, enhancing the cooling effect, and facilitating enhanced separation. Furthermore, the flow guides 13 can also provide a certain degree of obstruction to the process byproducts, thereby increasing the turbulence of the process byproducts and adding a spiral, which is beneficial for improving the cooling effect.

[0052] To alleviate the blockage problem, the flow areas of the circulation spaces N corresponding to the multiple flow guides 13 gradually decrease along the direction from the input port 111 to the output port 112, so that the flow areas of the circulation spaces N corresponding to the flow guides 13 close to the input port 111 are larger. When the process by-products enter the flow channel M through the input port 111, they quickly exchange heat with the cooling pipe 12 and the guide member 13 in this area, causing the temperature of the process by-products to drop sharply, and a part of the substances in the process by-products quickly condenses on the guide member 13 and the cooling pipe 12 near the input port 111. In addition, the cooling efficiency of the area near the input port 111 is reduced due to the attachment of the process by-products, and the process by-products no longer continue to attach to the area near the input port 111. In this case, since the flow space N corresponding to the guide member 13 near the input port 111 has a larger flow area, the process by-products can have sufficient flow area to flow to the output port 112. Therefore, even if some substances separated from the process by-products are attached to the guide member 13 in this area, it will not cause blockage and will not affect the exhaust, thereby ensuring the normal operation of the by-product separation device, extending the service life of the by-product separation device, and improving the maintenance cycle.

[0053] Based on the above settings, the embodiment of the present application adopts an internal cooling and external ventilation structure, which is conducive to increasing the cooling area in the flow channel M and improving the cooling effect; multiple staggered circulation spaces N are formed between the cooling pipe 12 and the shell 11 through multiple guide members 13, which can make the process by-products generated in the semiconductor process flow smoothly, and can extend the flow path of the process by-products in a short range, maximize the cooling effect of internal cooling, and help improve the separation effect of process by-products; the flow area of ​​the circulation space N corresponding to the multiple guide members 13 gradually decreases, which can ensure that the flow channel M has a sufficiently large flow area in the area near the input port 111, effectively preventing the process by-products from condensing in the area near the input port 111 of the flow channel M and causing blockage, thereby extending the service life of the by-product separation device and solving the problem of short maintenance cycle.

[0054] In some embodiments, in a plane perpendicular to the direction from the input port 111 to the output port 112, the flow spaces N corresponding to two adjacent flow guides 13 are arranged 180 degrees apart. Based on this arrangement, the process byproducts can flow in a meandering manner in the flow channel M, which can further extend the flow path of the process byproducts to a certain extent, thereby improving the cooling effect of the process byproducts and further improving the separation effect of the process byproducts.

[0055] In other embodiments, the angle range of the flow space N corresponding to each of two adjacent guide members 13 in a plane perpendicular to the direction from the input port 111 to the output port 112 can be 20° to 180°, for example, including 20°, 30°, 45°, 60°, 80°, 90°, 110°, 120°, 135°, 150°, 160°, 180°, etc. Of course, it can also be other degrees, as long as it can ensure that the process by-products can flow smoothly in the flow channel M and there is a way to extend the flow path of the process by-products, the specific form is not limited.

[0056] Based on the above arrangement, the process by-products can be made to flow in a spiral in the flow channel M, and the flow path of the process by-products in the flow channel M can also be extended, which is beneficial to improving the cooling effect of the process by-products and further improving the separation effect of the process by-products.

[0057] refer to Figures 3 to 5 In some embodiments, in a plane perpendicular to the direction from the input port 111 to the output port 112, the projected area of ​​the multiple flow guides 13 gradually increases along the direction from the input port 111 to the output port 112, so that the multiple flow guides 13 are arranged in a tower shape. In this way, it can be ensured that the flow area of ​​the circulation space N in the plane changes from large to small. On the one hand, it can alleviate the blockage problem of process by-products in the area near the input port 111 in the flow channel M. On the other hand, the contact area with the flow guide 13 can be increased as the process by-products flow in the flow channel M, which can be beneficial to improving the cooling efficiency to a certain extent, and can also be beneficial to improving the cooling uniformity.

[0058] In order to fix the guide member 13, in the embodiment of the present application, the guide member 13 may include an inner edge 131 and an outer edge 132 that are spaced apart, such as Figure 3As shown. The inner edge 131 is connected to the outer wall of the cooling tube 12, a portion of the outer edge 132 is connected to the inner wall of the shell 11, and another portion of the outer edge 132 is spaced apart from the inner wall of the shell 11, forming a flow space N. Based on this arrangement, by connecting the inner edge 131 to the outer wall of the cooling tube 12 and a portion of the outer edge 132 to the inner wall of the shell 11, the firmness and stability of the flow guide 13 can be ensured, so that the flow guide 13 will not shake or fall off under the impact of process by-products, thereby ensuring the service life of the by-product separation device. In addition, the other portion of the outer edge 132 is spaced apart from the inner wall of the shell 11 to provide space for the flow of process by-products and avoid obstructing the flow of process by-products. In addition, the inner edge 131 is wrapped around the outer wall of the cooling tube 12, which can increase the contact area between the flow guide 13 and the cooling tube 12, thereby improving the heat exchange efficiency. In this way, the cooling efficiency of the process by-products can be increased, which is conducive to promoting the separation of process by-products. Of course, a portion of the outer edge 132 is connected to the inner wall of the shell 11. When the shell 11 is heated, heat can be directly transferred from the shell 11 to the guide member 13, thereby improving the heating efficiency of the guide member 13 and promoting the shedding of process by-products attached to the surface of the guide member 13.

[0059] Exemplarily, the guide member 13 can be an incomplete circular ring structure, specifically a multi-semicircular ring structure, that is, a circular ring structure with a central angle greater than 180°. Of course, it can also be a less than semicircular ring structure, that is, a circular ring structure with a central angle less than 180°. The specific structure can be selected according to actual working conditions.

[0060] Taking into account that in this application, the cross-sectional areas of multiple guide members 13 increase successively along the direction from the input port 111 to the output port 112, the guide member 13 closest to the input port 111 can adopt a semi-circular ring structure to make the flow area here larger, effectively alleviating the blockage problem; the next guide member 13 can also adopt a semi-circular ring structure, and the cross-sectional area increases, and so on, until some guide members 13 close to the output port 112 can adopt a multi-semi-circular ring structure, and the guide member 13 closest to the output port 112 also adopts a multi-semi-circular ring structure, and the cross-sectional area is the largest.

[0061] It should be noted here that another part of the outer edge 132 of the guide member 13 can be a planar edge, which is spaced apart from the inner wall of the shell 11 to form a flow space N. Of course, it can also be other shapes, which are not specifically limited here.

[0062] refer to Figure 2In some embodiments, the by-product separation device may further include a first heating element 14, which is wrapped around the outer wall of the shell 11. In this way, the shell 11 can be heated by the first heating element 14, so that the process by-products attached to the inner wall of the shell 11, the surface of the guide member 13 and the outer wall of the cooling pipe 12 are liquefied and fall off due to heat, thereby achieving a disassembly-free cleaning effect, facilitating the positioning and maintenance of the by-product separation device, and reducing the difficulty of maintenance.

[0063] For example, the first heating element 14 can be a heating belt, which is wrapped around the outer wall of the housing 11 in a winding and tightening manner to increase the heating area, improve heating efficiency and heating uniformity. Of course, other forms can also be used, which are not specifically limited here.

[0064] In order to achieve the flow of cooling medium in and out of the cooling pipe 12, the by-product separation device may further include a first pipe 21 and a second pipe 22, both of which extend into the cooling pipe 12, wherein the first pipe 21 is used to input the cooling medium into the cooling pipe 12, and the second pipe 22 is used to discharge the cooling medium in the cooling pipe 12. Based on this, the flow of the cooling medium in the cooling pipe 12 can be achieved, so that the cooling medium with a lower temperature is input into the cooling pipe 12 and heat exchanged with the process by-products. After the heat exchange, the cooling medium with a higher temperature is discharged to the outside of the cooling pipe 12. In this cycle, the process by-products can be cooled and the separation effect of the process by-products can be achieved.

[0065] For example, the first pipeline 21 and the second pipeline 22 may be connected to the housing 11 and the cooling pipe 12 by welding, so as to ensure the stability of the first pipeline 21 and the second pipeline 22 and ensure the sealing of the connection.

[0066] Optionally, an inlet and an outlet may be provided at one end of the cooling pipe 12 near the output port 112, wherein the first pipe 21 may extend into the cooling pipe 12 via the inlet, and the second pipe 22 may extend into the cooling pipe 12 via the outlet. For example, the inlet may be provided at the bottom wall of the cooling pipe 12. This design allows the cooling medium in the cooling pipe 12 to be completely discharged.

[0067] Furthermore, the port of the first pipeline 21 is close to the end of the cooling pipe 12 facing the output port 112, and the port of the second pipeline 22 is close to the end of the cooling pipe 12 facing the input port 111. Based on this, the flow direction of the cooling medium in the cooling pipe 12 can be opposite to the flow direction of the process by-products in the flow channel M, thereby realizing countercurrent heat exchange to improve the heat exchange effect.

[0068] Considering the presence of cooling medium in the cooling tube 12, the cooling medium will affect the heating effect of the process by-products attached to the shell 11, which is not conducive to the removal of the process by-products. In addition, when the heating temperature is high, the cooling medium will boil and expand, which may easily cause the cooling tube 12 to rupture and cause leakage. Therefore, before heating the shell, the cooling medium in the cooling tube 12 needs to be emptied.

[0069] Based on the above situation, in the embodiment of the present application, the by-product separation device may further include a first cold liquid pipe 232, a second cold liquid pipe 234, a drain pipe 231 and an air inlet pipe 233. Among them, the first cold liquid pipe 232 and the drain pipe 231 are both connected to the end of the first pipeline 21 located outside the cooling pipe 12, and the first cold liquid pipe 232 is provided with a first liquid valve 242, and the drain pipe 231 is provided with a third liquid valve 241. In this way, the third liquid valve 241 can control the connection and disconnection between the drain pipe 231 and the first pipeline 21, and the first liquid valve 242 can control the connection and disconnection between the first cold liquid pipe 232 and the first pipeline 21. Exemplarily, the third liquid valve 241 and the first liquid valve 242 can both be solenoid valves. Of course, they can also be other types of valve bodies, which are not specifically limited here.

[0070] Similarly, the second cooling liquid pipe 234 and the air intake pipe 233 are both connected to the end of the second pipeline 22 located outside the cooling pipe 12, and the second cooling liquid pipe 234 is provided with a second liquid valve 244, and the air intake pipe 233 is provided with a first air intake valve 243. In this way, the first air intake valve 243 can control the connection and disconnection between the air intake pipe 233 and the second pipeline 22, and the second liquid valve 244 can control the connection and disconnection between the second cooling liquid pipe 234 and the second pipeline 22. For example, the first air intake valve 243 and the second liquid valve 244 can both be solenoid valves, of course, other types of valve bodies can also be used, which is not specifically limited here.

[0071] Illustratively, the first air inlet valve 243 , the third liquid valve 241 , the first liquid valve 242 and the second liquid valve 244 are all connected to corresponding pipelines via ferrule joints.

[0072] In some embodiments, the by-product separation device may further include a third control element (not shown in the figure), which is electrically connected to the first air inlet valve 243, the first liquid valve 242, the second liquid valve 244 and the third liquid valve 241, respectively, so as to control the switching of each valve under different working conditions.

[0073] Among them, the third control element is used to control the opening of the first liquid valve 242, the opening of the second liquid valve 244, the closing of the third liquid valve 241 and the closing of the first air inlet valve 243 during the semiconductor process, so that the cooling medium can be injected into the cooling pipe 12 through the first cooling pipe 232 and the first pipeline 21, and the cooling medium after heat exchange is discharged through the second pipeline 22 and the second cold liquid pipe 234, thereby cooling the process by-products; at the same time, the drain pipe 231 is isolated by the third liquid valve 241, and the air inlet pipe 233 is isolated by the first air inlet valve 243 to prevent the cooling medium from leaking from the drain pipe 231 and the air inlet pipe 233.

[0074] The third control element is also used to control the closing of the first liquid valve 242, the closing of the second liquid valve 244, the opening of the third liquid valve 241 and the opening of the first air inlet valve 243 during the process of emptying the cooling pipe 12, so that gas can be introduced into the cooling pipe 12 through the air inlet pipe 233 and the second pipeline 22, and the cooling medium in the cooling pipe 12 is discharged through the first pipeline 21 and the drain pipe 231; at the same time, the first cold liquid pipe 232 is isolated by the first liquid valve 242, and the second cold liquid pipe 234 is isolated by the second liquid valve 244 to avoid gas leakage from the second cold liquid pipe 234 and cooling medium leakage from the first cold liquid pipe 232.

[0075] The specific steps of emptying the cooling medium in the cooling pipe 12 and heating and removing the process by-products include:

[0076] 1) Drain the cooling pipe 12: Close the first liquid valve 242 and the second liquid valve 244 to stop injecting coolant into the cooling pipe 12;

[0077] 2) Open the third liquid valve 241 and the first air inlet valve 243, and introduce gas, such as nitrogen, into the second pipeline 22 through the air inlet pipe 233. The gas enters the cooling pipe 12 through the second pipeline 22. Under the action of the gas pressure, the cooling medium is discharged from the cooling pipe 12 through the first pipeline 21 and discharged through the second cold liquid pipe 234, thereby emptying the cooling medium in the cooling pipe 12;

[0078] 3) Close the third liquid valve 241 and the first air inlet valve 243;

[0079] 4) The first heating element 14 is started to heat the housing 11 . The heating temperature is greater than the melting point of the process by-products, so that the process by-products melt and fall off, and are finally discharged through the output port 112 .

[0080] In addition, a program for automatic drainage maintenance can be set up through software to achieve regular automatic drainage maintenance. The specific method is: after the device has been running for a period of time, when the machine is idle (IDLE), the first liquid valve 242 and the second liquid valve 244 are controlled to be closed through the PLC program, and the third liquid valve 241 and the first air inlet valve 243 are opened to allow gas to be introduced into the cooling pipe 12 through the air inlet pipe 233 and the second pipeline 22, and the gas is used to apply pressure to the cooling medium in the cooling pipe 12, so that the cooling medium is discharged through the first pipeline 21 and the drain pipe 231; after the cooling medium in the cooling pipe 12 is emptied, the third liquid valve 241 and the first air inlet valve 243 are controlled to be closed, and the heating program is started. After heating to the preset time, the first heating element 14 is controlled to stop running; the first liquid valve 242 and the second liquid valve 244 are opened again. The above processes are all controlled by PLC programs, which can avoid manual disassembly and tilting of the by-product separation device. Automatic drainage maintenance is controlled by software, avoiding traditional manual drainage methods, increasing drainage reliability, saving labor costs and machine time, and improving machine efficiency.

[0081] refer to Figure 2 In some embodiments, the by-product separation device may further include a third pipeline 31, one end of the third pipeline 31 being connected to the input port 111, and the other end of the third pipeline 31 being used to be connected to the exhaust end of the process chamber 71. In this way, the process by-products generated by the process in the process chamber 71 can enter the third pipeline 31 through the exhaust end and be transported to the flow channel M through the third pipeline 31, so as to facilitate cooling and separation of the process by-products.

[0082] For example, the third pipeline 31 and the housing 11 can be connected via a first flange 61. Of course, other connection methods can also be used, which are not specifically limited here. Among them, the first flange 61 can be a KF flange.

[0083] Considering that process byproducts are prone to condensation in the third pipeline 31 at low temperatures, causing blockage of the third pipeline 31 and affecting the exhaust of the process chamber 71, the byproduct separation device may further include a first temperature control component 32, which can control the temperature of the process byproducts in the third pipeline 31 to prevent condensation caused by excessively low temperature.

[0084] Among them, the first temperature control component 32 may include a second heating element 321, a first temperature detection element 322 and a first control element 323. The second heating element 321 is wrapped around the outer wall of at least part of the third pipeline 31, and is used to heat the process by-products in the third pipeline 31. The first temperature detection element 322 is arranged in the area of ​​the third pipeline 31 close to the input port 111 (that is, close to the exhaust end of the third pipeline 31), and is used to detect the temperature in the third pipeline 31; the first control element 323 is electrically connected to the second heating element 321 and the first temperature detection element 322 respectively, and is used to control the second heating element 321 to increase the heating temperature when the first temperature detection element 322 detects that the temperature in the third pipeline 31 is lower than the boiling point of the process by-products.

[0085] Optionally, the second heating element 321 may be a heating belt, the first temperature detection element 322 may be a temperature sensor, and the first control element 323 may be a PLC.

[0086] In an embodiment of the present application, the process by-products in the third pipeline 31 can be heated by the second heating element 321, and the exhaust temperature in the third pipeline 31 can be monitored in real time by the first temperature detection element 322. T is set to a specific temperature greater than the boiling point of γ-butyrolactone in the process by-products (199°C to 201°C). When the first temperature detection element 322 detects that the exhaust temperature in the third pipeline 31 is lower than the set value T, the first control element 323 controls the second heating element 321 to increase the heating temperature, so that the exhaust temperature is controlled within a preset range, thereby avoiding condensation of process by-products in the third pipeline 31 due to insufficient heating, thereby realizing real-time monitoring and control of the front-end exhaust temperature.

[0087] For example, the third pipeline 31 may have a section of quartz transition tube, the second heating element 321 may be wrapped around the outside of the quartz transition tube, and the first temperature detection element 322 may be disposed at a downstream position of the quartz transition tube.

[0088] Due to the influence of front-end heating, the temperature of the process by-products is relatively high before entering the flow channel M. In order to increase the condensation rate of the process by-products in the flow channel M, the process by-products can be cooled when entering the flow channel M to prevent the process by-products from having a high temperature after entering the flow channel M and affecting the cooling and separation effect.

[0089] Based on the above situation, the by-product separation device may further include a fourth pipeline 41, such as Figure 2As shown, one end of the fourth pipe 41 extends to an area within the housing 11 near the input port 111. For example, one end of the fourth pipe 41 can be connected to the connection between the third pipe 31 and the input port 111 of the housing 11, or to an area of ​​the housing 11 near the input port 111. The other end of the fourth pipe 41 is used to receive a cooling gas, such as nitrogen. Based on this, cooling gas can be introduced into the area of ​​the input port 111 through the fourth pipe 41, thereby cooling the process byproducts as they enter the flow channel M, preventing the process byproducts from entering the flow channel M at a high temperature and affecting the cooling and separation effect.

[0090] In order to monitor the temperature of the process by-products when they enter the flow channel M, the by-product separation device can also include a second temperature control component 42. The second temperature control component 42 can monitor and control the temperature of the process by-products when they enter the flow channel M in real time to prevent the temperature from being too high and affecting the cooling and separation effect.

[0091] The second temperature control component 42 includes a second temperature detection element 421, a second air intake valve 422 and a second control element 423, wherein the second temperature detection element 421 is arranged in an area near the input port 111 in the shell 11, and the second air intake valve 422 is arranged in the fourth pipeline 41; the second control element 423 is electrically connected to the second temperature detection element 421 and the second air intake valve 422 respectively, and is used to control the second air intake valve 422 to open when the second temperature detection element 421 detects that the temperature in the area near the input port 111 in the shell 11 is higher than the boiling point of the process by-product, so as to allow cooling gas to enter the shell 11.

[0092] For example, the second temperature detection element 421 may be a temperature sensor, and the second control element 423 may be a PLC.

[0093] In addition, the second temperature control assembly 42 may further include a flow detection element 424, which is disposed in the fourth pipeline 41 and is used to detect the flow rate of the cooling gas in the fourth pipeline 41. The second control element 423 is also electrically connected to the flow detection element 424 and is used to adjust the opening of the second intake valve 422 based on the temperature gradient change in the area near the input port 111 within the housing 11 detected by the second temperature detection element 421 and the flow rate of the cooling gas in the fourth pipeline 41 detected by the flow detection element 424. For example, the flow detection element 424 may be a flow meter, etc.

[0094] In addition, the fourth pipeline 41 may also be provided with a manual valve 425, and the manual valve 425 is used to manually realize the opening and closing of the fourth pipeline 41 to facilitate the maintenance of the machine.

[0095] The specific process is as follows: the temperature in the input port 111 area is detected in real time by the second temperature detection element 421. When the second temperature detection element 421 detects that the temperature there is greater than the boiling point of γ-butyrolactone in the process by-product, the second control element 423 is used to control the second air intake valve 422 to open, and the flow detection element 424 is used to detect the gas flow in the fourth pipeline 41. The cooling gas flow value corresponding to different temperature gradients is set according to the temperature gradient change, and the opening of the second air intake valve 422 is adjusted to mix the high-temperature exhaust gas with the cooling gas to achieve cooling, so that the process by-products entering the flow channel M can be quickly cooled, and the exhaust temperature can be monitored in real time to ensure that the process by-products are condensed under optimal temperature conditions.

[0096] Considering that waste gas and waste liquid are generated after separation of process by-products, in the embodiment of the present application, the by-product separation device may further include a fifth pipeline 51, an exhaust pipeline 52 and a collection container 53, such as Figure 2 As shown, one end of the fifth pipeline 51 is connected to the output port 112 for receiving the separated material, which includes waste gas and waste liquid. The other end of the fifth pipeline 51 is connected to the collection container 53 for transporting the waste liquid from the separated material to the collection container 53 for storage. The exhaust pipeline 52 is connected to the fifth pipeline 51 for exhausting the waste gas from the separated material. In addition, the exhaust pipeline 52 can also be connected to the plant service end to discharge the waste gas there for treatment.

[0097] Exemplarily, the fifth pipeline 51 can be connected to at least one of the output port 112 and the collecting container 53 using a KF flange; the exhaust pipeline 52 can be connected to at least one of the fifth pipeline 51 and the plant service end through a second flange 62, wherein the second flange 62 can be a KF flange.

[0098] Based on the above-mentioned byproduct separation device, the present application also discloses a semiconductor process equipment, which includes the above-mentioned byproduct separation device. Of course, the semiconductor process equipment may also include a process chamber 71, and the exhaust end of the process chamber 71 is connected to the air inlet end of the byproduct separation device, so that process byproducts generated by the process in the process chamber 71 can be discharged into the byproduct separation device for separation and treatment.

[0099] In summary, the embodiment of the present application can realize online monitoring and control of the exhaust temperature, effectively alleviate the condensation of process by-products before entering the flow channel M, and avoid the condensation of process by-products in the third pipeline 31 due to insufficient heating causing the exhaust temperature to be too low, thereby avoiding the blockage of the third pipeline 31; it can also realize online monitoring and control of the condensation temperature, so that the process by-products are liquefied and collected within the optimal liquefaction temperature, thereby improving the liquefaction efficiency; through the special arrangement of multiple guide members 13, the problem of blockage caused by condensation of process by-products in the front end area of ​​the flow channel M can be alleviated, ensuring that the process by-products have sufficient flow area in the flow channel M, avoiding the occurrence of blockage caused by rapid condensation of process by-products due to rapid cooling of the front end; in addition, the by-product separation device in the embodiment of the present application can also realize regular cleaning and maintenance, which can solve the problems of complex and laborious maintenance, short maintenance cycle, and long maintenance time.

[0100] The embodiments of the present application are described above in conjunction with the accompanying drawings, but the present application is not limited to the above-mentioned specific implementation methods. The above-mentioned specific implementation methods are merely illustrative and not restrictive. Under the guidance of this application, ordinary technicians in this field can also make many forms without departing from the purpose of this application and the scope of protection of the claims, all of which are within the protection of this application.

Claims

1. A by-product separation device for separating and treating process by-products generated in a semiconductor process, characterized in that: The by-product separation device comprises: a shell (11), a cooling pipe (12) and a plurality of flow guides (13); The housing (11) is provided with an input port (111) and an output port (112), wherein the input port (111) is used to receive the process by-product, and the output port (112) is used to output the separated substances of the process by-product; The cooling pipe (12) is arranged in the shell (11), a flow channel (M) is formed between the cooling pipe (12) and the shell (11), and the input port (111) and the output port (112) are respectively connected to the flow channel (M); A plurality of the flow guide members (13) are arranged in the flow channel (M) and are spaced apart in a direction from the input port (111) to the output port (112); a flow space (N) is defined between at least a portion of an outer edge (132) of each of the flow guide members (13) and an inner wall of the housing (11); and the flow spaces (N) corresponding to two adjacent flow guide members (13) are staggered. Along the direction from the input port (111) to the output port (112), the flow areas of the circulation spaces (N) corresponding to the plurality of flow guide members (13) gradually decrease.

2. The by-product separation device according to claim 1, characterized in that: In a plane perpendicular to the direction from the input port (111) to the output port (112), the flow spaces (N) corresponding to two adjacent flow guide members (13) are arranged in a 180° staggered arrangement.

3. The by-product separation device according to claim 1, characterized in that: In a plane perpendicular to the direction from the input port (111) to the output port (112), the projected areas of the plurality of flow guide members (13) gradually increase along the direction from the input port (111) to the output port (112).

4. The by-product separation device according to claim 1, characterized in that: The flow guide (13) comprises an inner edge (131) and an outer edge (132) that are spaced apart. The inner edge (131) is connected to the outer wall of the cooling pipe (12), a portion of the outer edge (132) is connected to the inner wall of the shell (11), and another portion of the outer edge (132) is spaced apart from the inner wall of the shell (11) to form a circulation space (N).

5. The by-product separation device according to claim 1, characterized in that: The by-product separation device further comprises a first heating element (14), wherein the first heating element (14) is wrapped around the outer wall of the shell (11).

6. The by-product separation device according to claim 1 or 5, characterized in that: The by-product separation device further comprises a first pipeline (21) for inputting a cooling medium into the cooling pipe (12) and a second pipeline (22) for discharging the cooling medium in the cooling pipe (12); The first pipeline (21) and the second pipeline (22) both extend into the cooling pipe (12), and the port of the first pipeline (21) is close to one end of the cooling pipe (12) facing the output port (112), and the port of the second pipeline (22) is close to one end of the cooling pipe (12) facing the input port (111).

7. The by-product separation device according to claim 6, characterized in that: The by-product separation device further includes a first cold liquid pipe (232), a second cold liquid pipe (234), a liquid discharge pipe (231) and an air inlet pipe (233); The first cooling liquid pipe (232) and the drain pipe (231) are both connected to one end of the first pipeline (21) located outside the cooling pipe (12), and the first cooling liquid pipe (232) is provided with a first liquid valve (242), and the drain pipe (231) is provided with a third liquid valve (241); The second cooling liquid pipe (234) and the air intake pipe (233) are both connected to one end of the second pipeline (22) located outside the cooling pipe (12), and the second cooling liquid pipe (234) is provided with a second liquid valve (244), and the air intake pipe (233) is provided with a first air intake valve (243).

8. The by-product separation device according to claim 7, characterized in that: The by-product separation device further includes a third control element, wherein the third control element is electrically connected to the first air inlet valve (243), the first liquid valve (242), the second liquid valve (244) and the third liquid valve (241), respectively; The third control element is used to control the first liquid valve (242) to open, the second liquid valve (244) to open, the third liquid valve (241) to close, and the first air inlet valve (243) to close during a semiconductor process; The third control element is also used to control the first liquid valve (242) to be closed, the second liquid valve (244) to be closed, the third liquid valve (241) to be opened, and the first air intake valve (243) to be opened during the process of emptying the cooling pipe (12).

9. The by-product separation device according to claim 1, characterized in that: The by-product separation device further includes a third pipeline (31) and a first temperature control component (32); One end of the third pipeline (31) is connected to the input port (111), and the other end of the third pipeline (31) is used to be connected to the exhaust end of the process chamber (71); The first temperature control component (32) comprises a second heating element (321), a first temperature detection element (322) and a first control element (323); the second heating element (321) is wrapped around the outer wall of at least a portion of the third pipeline (31) and is used to heat the process by-products in the third pipeline (31); the first temperature detection element (322) is provided in a region of the third pipeline (31) close to the input port (111) and is used to detect the temperature in the third pipeline (31); The first control element (323) is electrically connected to the second heating element (321) and the first temperature detection element (322), respectively, and is used to control the second heating element (321) to increase the heating temperature when the first temperature detection element (322) detects that the temperature in the third pipeline (31) is lower than the boiling point of the process by-product.

10. The by-product separation device according to claim 1 or 9, characterized in that: The by-product separation device further includes a fourth pipeline (41) and a second temperature control component (42); One end of the fourth pipeline (41) extends to an area in the housing (11) close to the input port (111), and the other end of the fourth pipeline (41) is used to receive cooling gas; The second temperature control component (42) comprises a second temperature detection element (421), a second air intake valve (422) and a second control element (423); the second temperature detection element (421) is arranged in a region near the input port (111) in the housing (11); and the second air intake valve (422) is arranged in the fourth pipeline (41); The second control element (423) is electrically connected to the second temperature detection element (421) and the second air inlet valve (422), respectively, and is used to control the second air inlet valve (422) to open when the second temperature detection element (421) detects that the temperature in the area near the input port (111) in the shell (11) is higher than the boiling point of the process by-product, so as to allow the cooling gas to flow into the shell (11).

11. The by-product separation device according to claim 10, characterized in that: The second temperature control component (42) further includes a flow detection element (424), wherein the flow detection element (424) is provided in the fourth pipeline (41) and is used to detect the flow of the cooling gas in the fourth pipeline (41); The second control element (423) is also electrically connected to the flow detection element (424) and is used to adjust the opening of the second intake valve (422) based on the temperature gradient change in the area near the input port (111) in the shell (11) detected by the second temperature detection element (421) and the flow rate of the cooling gas in the fourth pipeline (41) detected by the flow detection element (424).

12. The by-product separation device according to claim 1, characterized in that: The by-product separation device further includes a fifth pipeline (51), an exhaust pipeline (52) and a collection container (53); One end of the fifth pipeline (51) is connected to the output port (112) for receiving the separated substance; The other end of the fifth pipeline (51) is connected to the collecting container (53) for conveying the waste liquid in the separated substance to the collecting container (53), and the exhaust pipeline (52) is connected to the fifth pipeline (51) for discharging the waste gas in the separated substance.

13. A semiconductor process equipment, characterized in that: The by-product separation device comprises the by-product separation device according to any one of claims 1 to 12.

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