Mask assembly, mask mechanism and mask device

Abstract

The application relates to a mask assembly, a mask mechanism and a mask device, and belongs to the field of exposure machines, wherein the mask assembly comprises a mask frame and a mask plate, the mask frame is configured with a through hole one, the mask plate is attached to a side one of the mask frame configured with the through hole one, one end of the through hole one is blocked and sealed, the side one is configured with a plurality of air suction holes one, and the plurality of air suction holes one are distributed circumferentially around the through hole one; a guide frame is attached to the side one, the air suction holes one are located between the mask plate and the guide frame, and the thickness of the guide frame is not less than the thickness of the mask plate. The mask assembly of the application is provided with air suction holes on the mask frame, when two mask assemblies clamp and tightly adhere to the material to be exposed, the air between the two mask assemblies is extracted through the air suction holes, the material to be exposed and the mask plate are tightly adhered through vacuum adsorption, thereby improving the exposure quality, reducing the projection error, and meanwhile, the mask plate itself is not deformed.

Description

Technical Field

[0001] This application relates to the field of exposure machines, and in particular to a mask assembly, mask mechanism, and mask device. Background Technology

[0002] Currently, in electronic device manufacturing, exposure technology is a core technology for assisting patterning. Certain strip materials, such as metal masks (FMMs), metal meshes (a nearly invisible conductive mesh woven from extremely fine metal wires on a transparent film in televisions and mobile phones), and flexible chip metal mounting frames, although having different specific applications, all require double-sided exposure to assist in patterning to achieve precise control of micron-level structures.

[0003] Current double-sided exposure technology involves passing a strip of material to be exposed (such as a metal mesh, chip mounting frame, or metal mask) through a pair of spaced-apart masks. Flat light passes through the masks and shines onto the material, exposing it. The exposed material is then etched or electroplated to obtain the finished product. The current problems with this exposure technology are that the exposure quality is not high, and there is an error between the position of the light projection on the material and the theoretical design position, which affects the accuracy of subsequent etching. Even if the pair of spaced-apart masks are squeezed tightly to fit the material, the error is still relatively large. At the same time, the squeezing force on the mask cannot be too large, otherwise, if the squeezing force on the mask is too large, it will cause the mask itself to deform, further degrading the exposure quality. Summary of the Invention

[0004] To address the problem of low mask exposure quality in current double-sided exposure processes mentioned in the background art, this application provides a mask assembly, a mask mechanism, and a mask device.

[0005] This application provides a mask assembly, including a mask frame and a mask plate. The mask frame has a through hole. The mask plate is attached to a side of the mask frame with the through hole and blocks and seals one end of the through hole. The side has a plurality of air intake holes distributed around the through hole.

[0006] A guide frame is attached to one side, and an air intake hole is located between the mask and the guide frame. The thickness of the guide frame is not less than the thickness of the mask.

[0007] The mask frame has an internal air extraction hole that communicates with the air intake hole, and one end of the air extraction hole extends to the outer wall of the mask frame.

[0008] By adopting the above technical solution, after the two mask components clamp the material to be exposed, the air between the two mask components is extracted by the air suction hole, so that the material to be exposed and the mask are vacuum adsorbed and tightly attached together, thereby improving the exposure quality, reducing the projection error, and at the same time, it will not cause the mask itself to deform.

[0009] Preferably, the side surface has a U-shaped groove, and the U-shaped groove has a suction hole that communicates with the suction hole. The through hole is located inside the U-shaped groove, and the mask covers the U-shaped groove.

[0010] By adopting the above technical solution, the mask frame can be used to attach the mask plate, reducing the difficulty of mask plate installation and facilitating mask plate disassembly and assembly.

[0011] Preferably, the side surface has a U-shaped groove 2 communicating with the air extraction hole, the guide frame covers the U-shaped groove 2, a sealing ring 1 is tightly clamped between the guide frame and the side surface, the U-shaped groove 2 is located inside the sealing ring 1, and a gap is constructed between the guide frame located inside the U-shaped groove 2 and the side surface, the gap being constructed to allow gas inside the guide frame to pass through and enter the U-shaped groove 2.

[0012] By adopting the above technical solution, the vacuum pressure around the mask can be homogenized, thereby improving the vacuum adsorption quality of the material and the mask.

[0013] Preferably, a second sealing ring is provided on the side of the guide frame facing away from the mask frame.

[0014] By adopting the above technical solution, the clamping and sealing performance of the two mask assemblies on the material to be exposed is improved, and the air between the two mask assemblies is removed better and faster.

[0015] Preferably, the upper and lower ends of the mask frame are respectively provided with roller one and roller two;

[0016] The side surface is provided with a plurality of limiting blocks around the circumference of the mask, and the limiting blocks abut against the edge of the mask;

[0017] One side is provided with a guide wheel, which is adapted to be rolled and connected with the bottom surface of the mask.

[0018] By adopting the above technical solution, it is convenient to assemble and disassemble the mask assembly and mask plate.

[0019] In addition, this application also proposes a mask mechanism, including a mounting frame, a mounting frame and the aforementioned mask assembly, wherein the mounting frame and the mounting frame are connected by a connector, and the connector is configured to drive the mounting frame to slide up and down and left and right relative to the mounting frame.

[0020] The mounting frame 1 has a through hole 2 and a clamp is provided on the mounting frame 1. The clamp is configured to clamp and fix the mask assembly on the side of the mounting frame 1 with the through hole 2, and to make the through hole 1 and the through hole 2 face each other.

[0021] By adopting the above technical solution, the position of the mask assembly can be adjusted to align with the material to be exposed.

[0022] In addition, this application also proposes a mask mechanism, including a mounting frame 1, a mounting frame 1 and the aforementioned mask assembly, wherein the mask assembly has a roller 1 and a roller 2, and the mounting frame 1 and the mounting frame 1 are connected by a connector, wherein the connector is configured to drive the mounting frame 1 to slide up and down and left and right relative to the mounting frame 1.

[0023] The mounting frame 1 has a through hole 2 and a clamp is provided on the mounting frame 1. The clamp is configured to clamp and fix the mask assembly on the side of the mounting frame 1 with the through hole 2, and to make the through hole 1 and the through hole 2 face each other.

[0024] The mounting frame is provided with a slide rail 1 and a slide rail 2. The roller 1 is rotatably connected to the slide rail 1, and the roller 2 is rotatably connected to the slide rail 2. The rolling direction of the roller 1 and the roller 2 is parallel to the side of the mounting frame 1 that has the through hole 2.

[0025] By adopting the above technical solution, it is easier to disassemble and assemble the mask assembly.

[0026] Preferably, a plurality of limiting wheels are arranged around the through hole 2 on the mounting frame 1. The clamp includes clamp 1, clamp 2 and clamp 3. Clamp 1 and clamp 2 are arranged around the through hole 2. Clamp 1 and clamp 2 are adapted to press the mask assembly into contact with the limiting wheels. The pressing direction is perpendicular to the side of the mounting frame 1 with the through hole 2.

[0027] The clamp three is located on one side of the mounting frame one, and a stop block is provided on the other side of the mounting frame one. The clamp three is adapted to press the mask assembly into contact with the stop block, and the pressing direction is parallel to the side of the mounting frame one that has the through hole two.

[0028] By adopting the above technical solution, it is not easy to cause wear on the mask assembly and the mounting frame while ensuring that the mask assembly is clamped and fixed.

[0029] Preferably, the mounting frame is provided with a positioning detector for detecting the position of the mask assembly relative to the mounting frame.

[0030] By adopting the above technical solution, the mask component installed on the mounting frame can be positioned, which facilitates the precise and quick adjustment and installation of the mask component into place.

[0031] Preferably, the connector is also configured to drive the mounting frame to slide back and forth relative to the mounting bracket.

[0032] By adopting the above technical solution, the mask assembly can move back and forth relative to the mounting frame, and work with another mask assembly to clamp and seal the strip material to be exposed.

[0033] Preferably, the connector includes connector one, connector two, connector three, and connector four, and connector one, connector two, and connector three are distributed around the mounting bracket one, and there is at least one of them;

[0034] The connector 1 includes a lifting assembly 1 fixedly connected to the mounting bracket 1 and a slider 1 slidably connected to the lifting assembly 1 laterally;

[0035] The second connector includes a first transverse component fixedly connected to the first mounting bracket and a second slider that is slidably connected to the first transverse component in a lifting manner.

[0036] The connector three includes a slider three that is laterally slidably connected to the mounting bracket one and a slider four that is vertically slidably connected to the slider three. The direction of movement of the lifting component one is parallel to the sliding direction of the slider two and the slider four, and the direction of movement of the lateral component one is parallel to the sliding direction of the slider one and the slider three.

[0037] Slider 1, slider 2, and slider 4 are all fixedly connected to connector 4. Connector 4 includes slider 5 and lifting component 2. The fixed end of lifting component 2 is fixedly connected to slider 1, slider 2, or slider 4. Mounting frame 1 is slidably connected to the fixed end of lifting component 2. Slider 5 is connected to the movable end of lifting component 2, and slider 5 is constructed to be slidably connected to mounting frame 1 at an angle so that when lifting component 2 drives slider 5 to rise and fall, it drives mounting frame 1 to slide back and forth.

[0038] By adopting the above technical solution, the position of the mask component can be adjusted smoothly by moving the mounting frame back and forth, up and down, and left and right, with high moving accuracy.

[0039] In addition, this application also proposes a mask device for double-sided exposure of strip materials, including the aforementioned two mask mechanisms, wherein at least one mask mechanism has a mounting frame with a back-and-forth sliding function, and the mask components of the two mask mechanisms are symmetrically arranged at intervals and adapted to fit tightly together to clamp and seal one segment of the strip material.

[0040] By adopting the above technical solution, after the two mask assemblies clamp and seal one section of the strip material, the air between the two mask assemblies is extracted by the air suction hole, so that one section of the strip material and the mask are vacuum adsorbed and tightly attached together, thereby improving the exposure quality of the strip material, reducing projection error, and at the same time, it will not cause deformation of the mask itself.

[0041] Preferably, the mask device further includes a fixed base and a movable base adapted to be slidably connected to the fixed base, and a pair of bases adapted to be slidably connected to the movable base. The sliding direction of the movable base is parallel to the side of the mounting frame with the through hole, and the sliding direction of the bases is perpendicular to the side of the mounting frame with the through hole. The pair of bases are spaced apart.

[0042] By adopting the above technical solution, the two mask mechanisms can move horizontally closer or further apart from each other, and the two mask mechanisms can slide horizontally along a direction parallel to the side of the mounting frame with the through hole 2.

[0043] Preferably, the fixed base is provided with a guide roller located below the pair of mask assemblies, the movable base is provided with a discharge port, the two mask mechanisms are covered with a machine cover, the top of the machine cover is provided with a feed port, the feed port is located above the pair of mask assemblies, the strip material passes through the pair of mask assemblies from the feed port downwards, passes around the guide roller and extends out from the discharge port.

[0044] By adopting the above technical solution, strip materials can be smoothly passed through the mask device to form a strip material production line exposure operation with high exposure efficiency.

[0045] In summary, this application includes at least one of the following beneficial technical effects:

[0046] The mask assembly of this application has air suction holes on the mask frame. When the two mask assemblies clamp and tightly fit the material to be exposed, the air between the two mask assemblies is extracted by the air suction holes, so that the material to be exposed and the mask are vacuum adsorbed and tightly attached together, thereby improving the exposure quality, reducing projection error, and at the same time, it will not cause deformation of the mask itself.

[0047] The mask assembly of this application uses a mask frame to attach the mask plate, which reduces the difficulty of mask plate installation and facilitates mask plate assembly and disassembly. Attached Figure Description

[0048] Figure 1 This is a schematic diagram of the mask assembly in Embodiment 1 of this application.

[0049] Figure 2 yes Figure 1 A schematic diagram after removing the mask and guide frame.

[0050] Figure 3 yes Figure 2 A magnified view of a portion of the image.

[0051] Figure 4 This is a schematic diagram of the guide frame structure in Embodiment 1. Figure 1 .

[0052] Figure 5 This is a schematic diagram of the guide frame structure in Embodiment 1. Figure 2 .

[0053] Figure 6 This is a schematic diagram of the mask mechanism in Embodiment 2 of this application. Figure 1 .

[0054] Figure 7 This is a schematic diagram of the mask mechanism in Embodiment 2 of this application. Figure 2 .

[0055] Figure 8 This is a schematic diagram of the installation of mounting frame one and mask assembly in Embodiment 2 of this application. Figure 1 .

[0056] Figure 9 This is a schematic diagram of the installation of mounting frame one and mask assembly in Embodiment 2 of this application. Figure 2 .

[0057] Figure 10 This is a schematic diagram of the installation of mounting frame one and mask assembly in Embodiment 2 of this application. Figure 3 .

[0058] Figure 11 This is a schematic diagram of the structure of mounting bracket one in Embodiment 2 of this application. Figure 1 .

[0059] Figure 12 This is a schematic diagram of the structure of mounting bracket one in Embodiment 2 of this application. Figure 2 .

[0060] Figure 13 This is a schematic diagram of the mask mechanism in Embodiment 3 of this application. Figure 1 .

[0061] Figure 14 This is a schematic diagram of the mask mechanism in Embodiment 3 of this application. Figure 2 .

[0062] Figure 15 This is a schematic diagram of the structure of connector four in embodiment three of this application.

[0063] Figure 16 yes Figure 15 Enlarged view of section H in the image.

[0064] Figure 17 This is a schematic diagram of the mask device in Embodiment 4 of this application. Figure 1 .

[0065] Figure 18 This is a schematic diagram of the mask device in Embodiment 4 of this application. Figure 2 .

[0066] Figure 19 This is a schematic diagram of the mask device after the cover is removed in Embodiment 4 of this application. Figure 1 .

[0067] Figure 20 This is a schematic diagram of the mask device after the cover is removed in Embodiment 4 of this application. Figure 2 .

[0068] Figure 21 yes Figure 19 Schematic diagram after removing the two mask mechanisms Figure 1 .

[0069] Figure 22 yes Figure 19 Schematic diagram after removing the two mask mechanisms Figure 2 .

[0070] Explanation of reference numerals in the attached drawings: A. Mask assembly; 1. Mask frame; 2. Guide frame; 3. Pipe connector; 4. Pressure block; 5. Air extraction hole; 6. Air intake hole one; 7. Limiting block; 8. Guide wheel; 9. Mask plate; 10. Handle; 11. Roller two; 12. Roller one; 13. U-shaped groove one; 14. U-shaped groove two; 15. Sealing ring one; 16. Air intake hole two; 17. U-shaped groove three; 18. Sealing ring two; 19. Through hole one;

[0071] B. Mask mechanism; 20. Mounting bracket one; 21. Connector one; 211. Lifting assembly one; 212. Slider one; 22. Connector two; 221. Lateral movement assembly one; 222. Slider two; 23. Connector three; 231. Slider three; 232. Slider four; 24. Positioning detector; 241. Three-axis translation assembly; 242. Vision camera; 25. Mounting frame one; 251. Through hole two; 26. Slide rail one; 27. Slide rail two; 28. Limiting wheel; 29. ​​Connecting... 30. Connecting block; 30. Clamp 1; 301. Push-pull device 1; 302. Mounting base 1; 303. Pressure rod 1; 31. Clamp 2; 310. Mounting base 2; 311. Push-pull device 2; 312. Push-pull device 3; 313. Pressure rod 2; 314. Mounting base 3; 32. Clamp 3; 33. Stop block; 34. Mounting frame 2; 35. Connector 4; 351. Mounting base 4; 352. Slider 5; 353. Lifting assembly 2; 354. Slider 6; 355. Slide rail 3;

[0072] C. Mask device; 39. Machine base; 40. Fixed base; 41. Transverse movement assembly two; 42. Movable base; 43. Transverse movement assembly three; 44. Guide roller one; 45. Roller frame one; 46. Discharge port one; 47. Carrier frame; 48. Guide rail; 49. Machine cover; 50. Feed port. Detailed Implementation

[0073] The following is in conjunction with the appendix Figure 1-22 This application will be described in further detail. Example 1

[0074] This application discloses a mask assembly A. (Refer to...) Figures 1-3As shown, the mask assembly A includes a mask frame 1 and a mask plate 9. The mask frame 1 has a through hole 19. The mask plate 9 is attached to the side of the mask frame 1 with the through hole 19, and one end of the through hole 19 is blocked and sealed. The side has multiple suction holes 6, which are distributed circumferentially around the through hole 19. This design can quickly remove the air around the mask plate 9, quickly achieve vacuum adsorption of the material and the mask plate 9, and homogenize the vacuum pressure around the mask plate 9, thereby improving the vacuum adsorption quality of the material and the mask plate 9.

[0075] In this embodiment, as Figures 1-3 As shown, a guide frame 2 is attached to one side, and the air intake hole 6 is located between the mask plate 9 and the guide frame 2. The thickness of the guide frame 2 is not less than the thickness of the mask plate 9. This design can avoid the inability of a pair of mask components A to fit tightly together and to clamp and seal the material. The tight fit of a pair of mask components A is achieved by the tight fit of the two guide frames 2 of a pair of mask components A with each other.

[0076] In this embodiment, as Figures 1-3 As shown, the mask frame 1 has an internal air extraction hole 5 that communicates with the air intake hole 6. One end of the air extraction hole 5 extends to the outer wall of the mask frame 1. By connecting one end of the air extraction hole 5 to an air extraction device, the air between the pair of mask components A can be extracted after the pair of mask components A are tightly fitted together, creating a vacuum between the pair of mask components A. In this way, the material located between the pair of mask components A can adhere tightly to the mask plate 9. The material to be exposed and the mask plate 9 are vacuum-adhered and adhered together, thereby improving the exposure quality, reducing projection errors, and preventing deformation of the mask plate itself. To facilitate the connection of the air extraction hole 5 to the air extraction device, a pipe connector 3 can be installed at one end of the air extraction hole 5.

[0077] In this embodiment, further, such as Figure 2 As shown, the side has a U-shaped groove 13, and the U-shaped groove 13 has a suction hole 16 communicating with the air extraction hole 5. The through hole 19 is located inside the U-shaped groove 13. The mask plate 9 covers the U-shaped groove 13. With this design, the air extraction hole 5 extracts air from the U-shaped groove 13 through the suction hole 16, so that the mask frame 1 can adsorb and install the mask plate 9, reducing the installation difficulty of the mask plate 9 and making it easy to disassemble and assemble the mask plate 9. The mask plate 9 blocks and seals one end of the through hole 19 by vacuum adsorption.

[0078] In this embodiment, further, such as Figure 2 As shown, the side surface has a U-shaped groove 14 communicating with the air extraction hole 5. The guide frame 2 covers the U-shaped groove 14. A sealing ring 15 is tightly clamped between the guide frame 2 and the side surface. The position of the sealing ring 15 on the guide frame 2 is as follows: Figure 4As shown, the second groove 14 is located inside the sealing ring 15. A gap is constructed between the guide frame 2 and the side surface 1 inside the second groove 14. The gap is designed to allow gas inside the guide frame 2 to pass through and enter the second groove 14. The sealing ring 15 ensures a reliable seal between the guide frame 2 and the mask frame 1. When the air extraction hole 5 is used for extraction, the air between a pair of mask components A enters the second groove 14 through the gap between the guide frame 2 and the side surface 1 inside the second groove 14, and then enters the air extraction hole 5. The sealing ring 15 effectively prevents air leakage. By setting the gap and using the second groove 14 to assist the air extraction hole 6 for extraction, the extraction speed can be accelerated, and the vacuum pressure around the mask plate 9 can be further homogenized, thereby improving the vacuum adsorption quality of the material and the mask plate 9.

[0079] In this embodiment, further, such as Figure 5 As shown, a second sealing ring 18 is provided on the side of the guide frame 2 facing away from the mask frame 1. After a pair of mask components A are tightly fitted together, the pair of guide frames 2 compress the second sealing ring 18. The second sealing ring 18 improves the tightness of the fit between the pair of mask components A. To facilitate the installation of the second sealing ring 18 on the guide frame 2, as follows... Figure 5 As shown, a groove 3 17 can be provided on the side of the guide frame 2 facing away from the mask frame 1, and part of the sealing ring 2 18 can be placed into the groove 3 17.

[0080] In this embodiment, further, such as Figures 1-2 As shown, the side wall of the mask frame 1 is provided with a pressure block 4, which is used to cooperate with the clamp 32 of the mask mechanism B to clamp and fix the mask assembly A.

[0081] In this embodiment, further, such as Figures 1-3 As shown, roller 12 and roller 21 are respectively provided at the upper and lower ends of the mask frame 1. The roller 12 and roller 21 can be adapted to the slide rail 1 26 and slide rail 2 27 of the mask mechanism B so as to realize the mask assembly A sliding laterally on the mounting frame 1 25, which facilitates the assembly and disassembly of the mask assembly A.

[0082] In this embodiment, further, such as Figures 1-3 As shown, a plurality of limiting blocks 7 are arranged around the circumference of the mask plate 9 on the side side. The limiting blocks 7 abut against the edge of the mask plate 9 and are used to limit the mask plate 9 during installation, so that it can be quickly and accurately installed on the designated position on the mask frame 1. The side side is provided with guide wheels 8, which are adapted to roll and connect with the bottom surface of the mask plate 9. Since the mask plate 9 is heavy, the guide wheels 8 facilitate the movement of the mask plate 9 to the installation position on the mask frame 1, reduce the wear of the mask plate 9 during the disassembly and assembly process, and facilitate the disassembly and assembly of the mask plate 9.

[0083] In this embodiment, further, such as Figures 1-2As shown, a handle 10 is provided on the side of the mask frame 1 so that a person can pull the mask assembly A to slide it laterally on the mounting frame 25. Example 2

[0084] This embodiment discloses a mask mechanism B, such as Figure 6 and Figure 7 As shown, it includes a mounting bracket 20, a mounting frame 25, and a mask assembly A of embodiment one. The mounting bracket 20 and the mounting frame 25 are connected by a connector, which is configured to drive the mounting frame 25 to slide up and down and left and right relative to the mounting bracket 20.

[0085] Specifically, the connectors include connector one 21, connector two 22, and connector three 23. Connectors one 21, connector two 22, and connector three 23 are distributed around the mounting bracket one 20, and there is at least one of each. For example... Figure 11 and Figure 12 Connector 21 is present in two parts, located on the left and right sides of the upper end of mounting bracket 20. Connector 22 and connector 23 are located on the left and right sides of the lower end of mounting bracket 20, respectively. Figure 12 As shown, the connector 21 includes a lifting assembly 211 fixedly connected to the mounting bracket 20 and a slider 212 laterally slidably connected to the lifting assembly 211; as Figure 11 As shown, connector 22 includes a transverse sliding component 221 fixedly connected to mounting bracket 20 and a slider 222 slidably connected to the transverse sliding component 221; connector 3 includes a slider 3 slidably connected to mounting bracket 20 laterally and a slider 4 slidably connected to the slider 3 slidably. The direction of movement of the lifting component 211 is parallel to the sliding direction of slider 222 and slider 4 232, and the direction of movement of the transverse sliding component 221 is parallel to the sliding direction of slider 1 212 and slider 3 231. Slider 1 212, slider 222, and slider 4 232 are all fixedly connected to mounting frame 25. The movement of the lifting component 211 causes the mounting frame 25 to move up and down, and the movement of the transverse sliding component 221 causes the mounting frame 25 to move left and right. This connector structure design enables the mounting frame 25 to move smoothly up and down and left and right to adjust the position of the mask component A on mounting bracket 20, with high movement accuracy of the mounting frame 25. Of course, in other embodiments, the connector can also use conventional moving mechanisms such as a two-axis translation mechanism to realize the vertical and horizontal movement of the mounting frame 25 relative to the mounting bracket 20.

[0086] To facilitate the connection of slider 1 212, slider 2 222, slider 4 232 with mounting frame 1 25, such as Figure 9 and Figure 10As shown, slider 1 212, slider 2 222, and slider 4 232 are connected to mounting frame 1 25 via connecting block 29. Slider 1 212, slider 2 222, and slider 4 232 are fixedly connected to connecting block 29, and connecting block 29 is rotatably connected to mounting frame 1 25.

[0087] In this embodiment, as Figures 8-10 As shown, the mounting frame 25 has a through hole 251 and a clamp is provided on the mounting frame 25. The clamp is designed to clamp and fix the mask assembly A on the side of the mounting frame 25 with the through hole 251, and to make the through hole 19 and the through hole 251 face each other. With this design, parallel light passes through the through hole 251 and the through hole 19 in sequence and then shines on the mask plate 9.

[0088] In this embodiment, further, such as Figure 6 and Figure 8 As shown, the mounting frame 25 is provided with a slide rail 26 and a slide rail 27. The roller 12 is rotatably connected to the slide rail 26, and the roller 11 is rotatably connected to the slide rail 27. The rolling direction of the roller 12 and the roller 11 is parallel to the side of the mounting frame 25 with the through hole 251. With this design, the mask assembly A can be pulled laterally on the mounting frame 25 by hand using the handle 10. During the sliding process, the roller 12 rolls along the slide rail 26, and the roller 11 rolls along the slide rail 27, thereby removing the mask assembly A from the mounting frame 25 or installing the mask assembly A on the mounting frame 25 at the installation position. The presence of the roller 12 and the roller 11 facilitates the movement of the mask assembly A on the mounting frame 25, reduces the friction loss between the mounting frame 25 and the mask assembly A, and facilitates the disassembly and assembly of the mask assembly A.

[0089] Preferred, such as Figure 9 and Figure 10 As shown, multiple limiting wheels 28 are arranged circumferentially around the through hole 251 on the mounting frame 25. Figure 6 and Figure 8As shown, the fixture includes a first fixture 30, a second fixture 31, and a third fixture 32. Multiple first fixtures 30 and second fixtures 31 are arranged circumferentially around the second through hole 251 to ensure reliable clamping and fixing of the mask assembly A. The first fixture 30 and second fixture 31 are adapted to press the mask assembly A against the limiting wheel 28, with the pressing direction perpendicular to the side of the mounting frame 25 where the second through hole 251 is formed. The third fixture 32 is located on one side of the mounting frame 25. A stop block 33 is fixedly provided on the other side of the frame 25. The clamp 32 is adapted to press the mask assembly A against the stop block 33. The pressing direction is parallel to the side of the mounting frame 25 with the through hole 251, so as to clamp and fix the mask assembly A on the mounting frame 25. The setting of the limiting wheel 28 ensures that the mask assembly A is clamped and fixed and does not easily cause wear on the mask assembly A and the mounting frame 25, and facilitates the movement of the mask assembly A on the mounting frame 25.

[0090] Specifically, such as Figure 8 As shown, the fixture 30 includes a push-pull device 301, a mounting base 302, and a pressure rod 303. The fixed end of the push-pull device 301 and the mounting base 302 are fixedly connected to the mounting frame 25. The movable end of the push-pull device 301 is hinged to one end of the pressure rod 303. The pressure rod 303 is hinged to the mounting base 302. When the push-pull device 301 moves, it drives the other end of the pressure rod 303 to approach or move away from the mask frame 1. When it is necessary to fix the mask assembly A, it abuts against the side of the mask frame 1, and then presses the mask frame 1 against the limiting wheel 28. The limiting wheel 28 and the other end of the pressure rod 303 clamp and fix the mask frame 1.

[0091] Preferred, such as Figure 6 As shown, the second clamp 31 is located on the side of the mask frame 1 where the handle 10 is provided. With this design, after the second clamp 31 is opened, the mask frame 1 can move along the first slide rail 26 and the second slide rail 27 under the pull of the handle 10. At this time, neither the first clamp 30 nor the second clamp 31 will obstruct the movement of the mask frame 1.

[0092] Specifically, the second clamp 31 includes a second mounting base 310, a second push-pull device 311, a third push-pull device 312, a second pressure rod 313, and a third mounting base 314. The second mounting base 310 is fixedly connected to the first mounting frame 25, and the third mounting base 314 is hinged to the first mounting frame 25. The fixed end and the movable end of the second push-pull device 311 are respectively hinged to the second mounting base 310 and the third mounting base 314, so that the second push-pull device 311 drives the third mounting base 314 to swing. The fixed end and movable end of fixture 2 are hinged to one end of mounting base 314 and pressure rod 313, respectively. One end of pressure rod 313 is also hinged to mounting base 314. Push-pull device 312 is used to move the other end of pressure rod 313 closer to or away from mask frame 1, and when it is necessary to fix mask assembly A, it abuts against the side of mask frame 1, and then presses mask frame 1 against limit wheel 28, and clamps and fixes mask frame 1 by limit wheel 28 and the other end of pressure rod 313. When fixture 21 is opened, push-pull device 311 drives mounting base 314 from Figure 6 Rotate the position shown by 90 degrees so that the pressure rod 313 leaves the moving path of the mask frame 1, so as to avoid the pressure rod 313 from obstructing the movement of the mask frame 1 along the slide rail 26 and slide rail 27 under the pull of the handle 10.

[0093] In this embodiment, further, such as Figure 7 , Figure 11 , Figure 12 As shown, the mounting bracket 20 is equipped with a positioning detector 24, which is used to detect the position of the mask assembly A relative to the mounting bracket 20, so as to control the connector to adjust the position of the mask assembly A in a timely manner according to the detection result, thereby positioning the mask assembly A installed on the mounting frame 25, and making it easy to adjust and install the mask assembly A into place accurately and quickly.

[0094] Preferred, such as Figure 12 As shown, the positioning detector 24 includes a three-axis translation component 241 and a vision camera 242. The three-axis translation component 241 is connected to the mounting bracket 20, and the vision camera 242 is connected to the three-axis translation component 241. The three-axis translation component 241 drives the vision camera 242 to move back and forth, left and right, and up and down to detect the position of the mask component A relative to the mounting bracket 20. Of course, in other embodiments, the positioning detector 24 can also use conventional positioning methods such as laser positioning. Example 3

[0095] The difference between this embodiment and embodiment two is that the connector is also configured to drive the mounting frame 25 to slide back and forth relative to the mounting bracket 20, so as to realize the mask assembly A moving back and forth relative to the mounting bracket 20, and cooperating with another mask assembly A to clamp and seal the strip material to be exposed.

[0096] Specifically, the connector also includes connector four 35, and slider one 212, slider two 222, and slider four 232 are all fixedly connected to connector four 35. Furthermore, to facilitate the connection of slider one 212, slider two 222, slider four 232, and connector four 35, as follows... Figures 13-15 As shown, slider 1 212, slider 2 222, and slider 4 232 are all fixedly connected to a mounting frame 2 34. Connector 4 35 is installed and fixed on the mounting frame 2 34. There are multiple connectors 4 35, and they are all connected to the mounting frame 1 25. The mounting frame 1 25 is moved back and forth through the connectors 4 35.

[0097] Specifically, such as Figure 15 and Figure 16 As shown, the connector four 35 includes at least a slider five 352 and a lifting component two 353. The fixed end of the lifting component two 353 is fixedly connected to slider one 212, slider two 222, slider four 232, or mounting frame two 34. The mounting frame one 25 is slidably connected to the fixed end of the lifting component two 353. The slider five 352 is connected to the movable end of the lifting component two 353, and the slider five 352 is constructed to be slidably connected to the mounting frame one 25 at an angle, so that when the lifting component two 353 drives the slider five 352 to rise and fall, it drives the mounting frame one 25 to slide back and forth. This structure of the connector four 35 can realize the smooth back and forth movement of the mounting frame one 25 to adjust the position of the mask component A, and the movement accuracy of the mounting frame one 25 is high. Of course, in other embodiments, the connector four 35 can also adopt conventional linear actuators such as linear motors, cylinders, and hydraulic cylinders.

[0098] Furthermore, to facilitate the assembly and connection of slider five 352 and lifting component two 353 with slider one 212, slider two 222, slider four 232, mounting frame two 34, and mounting frame one 25, and to improve the sliding stability of mounting frame one 25, connector four 35 also includes mounting base four 351, slider six 354, and slide rail three 355, such as Figure 15 and Figure 16 As shown, the mounting base 351 is fixedly connected to slider 212, slider 222, slider 4, or mounting frame 2 34. The fixed end of the lifting component 2 353 is fixedly installed on the mounting base 351. Slider 5 352 is slidably installed on the mounting base 351. Slide rail 3 355 is horizontally fixedly installed on the mounting base 351. Slider 6 354 is slidably connected to slide rail 3 355. At the same time, slider 6 354 is also fixedly connected to mounting frame 1 25. Slider 5 352 and slider 6 354 are slidably connected. The lifting component 2 353 pushes slider 5 352 to rise and fall, causing slider 6 354 to slide back and forth along slide rail 3 355, which in turn causes mounting frame 1 25 to slide back and forth. Example 4

[0099] This embodiment discloses a mask device C for double-sided exposure of strip materials. The mask device C includes at least two mask mechanisms B, and at least one of the mask mechanisms B is the mask mechanism B of Embodiment 3. Therefore, the two mask mechanisms B in this embodiment can both be the mask mechanism B of Embodiment 3, or one can be the mask mechanism B of Embodiment 3 and the other can be the mask mechanism B of Embodiment 2. In addition, at least one of the two mask components A of the two mask mechanisms B has a sealing ring 2 18 to ensure that one section of the strip material is reliably clamped and sealed.

[0100] In this embodiment, as Figure 19 and Figure 20 As shown, the mask components A of the two mask mechanisms B are symmetrically arranged at intervals and are adapted to be tightly fitted to clamp and seal one section of the strip material. After the two mask components A are tightly fitted, the air between the two mask components A can be removed through the air extraction hole 5 to achieve vacuum tight bonding between one section of the strip material and the mask plate 9, thereby improving the exposure quality of the strip material, reducing projection error, and at the same time, preventing deformation of the mask plate itself.

[0101] Furthermore, such as Figures 19-22 As shown, the mask device C also includes a fixed base 40 and a movable base 42 adapted to be slidably connected to the fixed base 40, and a pair of bases 39 adapted to be slidably connected to the movable base 42. The sliding direction of the movable base 42 is parallel to the side of the mounting frame 25 with the through hole 251, and the sliding direction of the bases 39 is perpendicular to the side of the mounting frame 25 with the through hole 251. The pair of bases 39 are spaced apart, and two mask mechanisms B are respectively mounted on the two bases 39. The two bases 39 move closer or further away from each other, causing the two mask mechanisms B to move closer or further away from each other. The movable base 42 moves relative to the fixed base 40 to adjust the position of the two mask mechanisms B, facilitating precise clamping and sealing of the strip material. Preferably, the horizontal movement of the two mask mechanisms B to move closer or further away from each other can be achieved by the transverse moving component 43, such as... Figure 21 and Figure 22 As shown, the transverse component 3 43 is mounted on the movable base 42 and connected to the base 39. The base 39 is moved by the transverse component 3 43. Correspondingly, the two mask mechanisms B can slide horizontally along the side parallel to the side of the mounting frame 25 with the through hole 251, which can be completed by the transverse component 2 41. The transverse component 2 41 is mounted on the fixed base 40 and connected to the movable base 42. The movable base 42 is moved on the fixed base 40 by the transverse component 2 41. Specifically, the transverse component 2 41 and the transverse component 3 43 are conventional linear actuators such as linear motors, cylinders or hydraulic cylinders.

[0102] In this embodiment, as Figure 21 and Figure 22As shown, the fixed base 40 is provided with a guide roller 44 located below a pair of mask assemblies A. The guide roller 44 is rotatably mounted on a roller frame 45, which is fixedly connected to the fixed base 40. The movable base 42 is configured with a discharge port 46, as shown in the figure. Figure 17 and Figure 18 As shown, the two mask mechanisms B are covered by a shroud 49. The top of the shroud 49 has a feed inlet 50 located above the pair of mask assemblies A. Strip material passes downwards from the feed inlet 50, through the pair of mask assemblies A, and then passes over guide roller 44, exiting from the discharge outlet 46. When the strip material stops moving, the pair of mask assemblies A move closer together to clamp and seal one section of the strip material, allowing parallel light to pass through... Figure 18 The mask device C in the middle emits parallel light from the left and right sides toward the mask assembly A. The light passes through the second through hole 251 and the first through hole 19 in sequence and then shines onto the mask plate 9, exposing one section of the strip material to double-sided exposure. After the exposure is completed, the pair of mask assemblies A separates from each other, and then the strip material continues to move, so that the next section of material to be exposed enters between the pair of mask assemblies A. Then the above exposure action is repeated, so as to realize the continuous exposure operation of the production line, which has a fast exposure speed and high efficiency.

[0103] In this embodiment, further, such as Figure 17 and Figure 19 As shown, a carrier frame 47 is provided on the fixed base 40, and a guide rail 48 is provided on the carrier frame 47. The carrier frame 47 is located on the side of the mask frame 1 where the handle 10 is provided. With this design, after the mask assembly A is pulled out from the mask mechanism B, the mask assembly A can be temporarily placed on the carrier frame 47, and the roller 11 rolls on the guide rail 48, which facilitates the disassembly and assembly of the mask assembly A.

[0104] Of course, in other embodiments, both mask mechanisms B can be the mask mechanism B of Embodiment 2. In this case, the mask device C also has a moving mechanism that drives the mask components A of the two mask mechanisms B to move closer to each other.

[0105] Unless otherwise defined, the technical or scientific terms used in this application shall have the ordinary meaning understood by one of ordinary skill in the art to which this application pertains. The terms "first," "second," "third," and similar terms used in this application specification and claims do not indicate any order, quantity, or importance, but are merely used to distinguish different components. The terms "an" or "a" and similar terms do not indicate a quantity limitation, but rather indicate the presence of at least one. The terms "comprising" or "including" and similar terms mean that the elements or objects preceding "comprising" or "including" encompass the elements or objects listed following "comprising" or "including" and their equivalents, and do not exclude other elements or objects. "Above," "below," "left," "right," etc., are used only to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0106] The above are all preferred embodiments of this application and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A mask mechanism, characterized in that: Includes mounting bracket one, mounting frame one, and mask assembly; The mask assembly includes a mask frame and a mask plate. The mask frame has a through hole. The mask plate is attached to a side of the mask frame with the through hole and blocks and seals one end of the through hole. The side has multiple air intake holes distributed around the through hole. A guide frame is attached to one side, and an air intake hole is located between the mask and the guide frame. The thickness of the guide frame is not less than the thickness of the mask. The tight fit of a pair of mask components is achieved by the tight fit of the two guide frames of the pair of mask components. The mask frame has an internal air extraction hole that communicates with the air intake hole, and one end of the air extraction hole extends to the outer wall of the mask frame. The side surface has a spiral groove 2 that communicates with the air extraction hole. The guide frame covers the spiral groove 2. A sealing ring 1 is tightly clamped between the guide frame and the side surface. The spiral groove 2 is located inside the sealing ring 1. A gap is constructed between the guide frame located inside the spiral groove 2 and the side surface. The gap is designed to allow gas inside the guide frame to pass through and enter the spiral groove 2. The mounting bracket and the mounting frame are connected by a connector, which is configured to drive the mounting frame to slide up and down and left and right relative to the mounting bracket. The mounting frame 1 has a through hole 2 and a clamp is provided on the mounting frame 1. The clamp is configured to clamp and fix the mask assembly on the side of the mounting frame 1 with the through hole 2, and to make the through hole 1 and the through hole 2 face each other.

2. The mask mechanism according to claim 1, characterized in that: The side has a spiral groove, and the spiral groove has a suction hole that communicates with the suction hole. The through hole is located inside the spiral groove, and the mask covers the spiral groove.

3. The mask mechanism according to claim 1, characterized in that: A second sealing ring is provided on the side of the guide frame facing away from the mask frame.

4. The mask mechanism according to claim 1, characterized in that: The upper and lower ends of the mask frame are respectively provided with roller one and roller two; The side surface is provided with a plurality of limiting blocks around the circumference of the mask, and the limiting blocks abut against the edge of the mask; One side is provided with a guide wheel, which is adapted to be rolled and connected with the bottom surface of the mask.

5. The mask mechanism according to claim 4, characterized in that: The mounting frame is provided with a slide rail 1 and a slide rail 2. The roller 1 is rotatably connected to the slide rail 1, and the roller 2 is rotatably connected to the slide rail 2. The rolling direction of the roller 1 and the roller 2 is parallel to the side of the mounting frame 1 that has the through hole 2.

6. The mask mechanism according to claim 1, characterized in that: The mounting frame 1 is provided with a plurality of limiting wheels around the through hole 2. The clamp includes clamp 1, clamp 2 and clamp 3. Clamp 1 and clamp 2 are provided around the through hole 2. Clamp 1 and clamp 2 are adapted to press the mask assembly into contact with the limiting wheels. The pressing direction is perpendicular to the side of the mounting frame 1 that has the through hole 2. The clamp three is located on one side of the mounting frame one, and a stop block is provided on the other side of the mounting frame one. The clamp three is adapted to press the mask assembly into contact with the stop block, and the pressing direction is parallel to the side of the mounting frame one that has the through hole two.

7. The mask mechanism according to claim 1, characterized in that: The mounting frame is equipped with a positioning detector for detecting the position of the mask assembly relative to the mounting frame.

8. The mask mechanism according to claim 1, characterized in that: The connector is also configured to drive the mounting frame to slide back and forth relative to the mounting bracket.

9. The mask mechanism according to claim 8, characterized in that: The connectors include connector one, connector two, connector three, and connector four. Connectors one, connector two, and connector three are distributed around the mounting bracket one, and there is at least one of them. The connector 1 includes a lifting assembly 1 fixedly connected to the mounting bracket 1 and a slider 1 slidably connected to the lifting assembly 1 laterally; The second connector includes a first transverse component fixedly connected to the first mounting bracket and a second slider that is slidably connected to the first transverse component in a lifting manner. The connector three includes a slider three that is laterally slidably connected to the mounting bracket one and a slider four that is vertically slidably connected to the slider three. The direction of movement of the lifting component one is parallel to the sliding direction of the slider two and the slider four, and the direction of movement of the lateral component one is parallel to the sliding direction of the slider one and the slider three. Slider 1, slider 2, and slider 4 are all fixedly connected to connector 4. Connector 4 includes slider 5 and lifting component 2. The fixed end of lifting component 2 is fixedly connected to slider 1, slider 2, or slider 4. Mounting frame 1 is slidably connected to the fixed end of lifting component 2. Slider 5 is connected to the movable end of lifting component 2, and slider 5 is constructed to be slidably connected to mounting frame 1 at an angle so that when lifting component 2 drives slider 5 to rise and fall, it drives mounting frame 1 to slide back and forth.

10. A mask device for double-sided exposure of strip materials, characterized in that: The mask mechanism includes the mask mechanism of any one of claims 1-7 and the mask mechanism of claim 8 or 9, wherein the mask components of the mask mechanism of any one of claims 1-7 and the mask components of the mask mechanism of claim 8 or 9 are symmetrically arranged at intervals and adapted to fit tightly together to clamp and seal one segment of the strip material.

11. The mask apparatus according to claim 10, characterized in that: It also includes a fixed base and a movable base adapted to be slidably connected to the fixed base, and a pair of bases adapted to be slidably connected to the movable base. The sliding direction of the movable base is parallel to the side of the mounting frame with the through hole II, and the sliding direction of the bases is perpendicular to the side of the mounting frame with the through hole II. The pair of bases are spaced apart. The mask mechanism of any one of claims 1-7 is mounted on one of the bases, and the mask mechanism of claim 8 or 9 is mounted on the other base.

12. The mask apparatus according to claim 11, characterized in that: The fixed base is provided with a guide roller located below the pair of mask assemblies. The movable base is provided with a discharge port. The two mask mechanisms are covered with a machine cover. The top of the machine cover is provided with a feed port located above the pair of mask assemblies. The strip material passes through the pair of mask assemblies from the feed port downwards, passes around the guide roller, and extends out from the discharge port.

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