Pre-carrying management method of semiconductor 12-inch MES system nitrogen charging carrier storage cabinet

Abstract

The invention provides a pre-carrying management method of a semiconductor 12-inch MES system nitrogen charging carrier storage cabinet, an RTD module and a GTM module are configured in an MES system, the RTD module is responsible for management and calculation, when a carrier finishes working on equipment and leaves a station, the RTD module responds to a request for carrying the carrier to an N2STK initiated by an EAP system, and if the N2STK has no spare position or a loading port of the N2STK is abnormal at the moment, the GTM module is used for carrying the carrier to the N2STK. If yes, the RTD module sends a carrying task for carrying the carrier to the STB to the MCS system and generates a pre-carrying task, and the GTM module interacts with the MCS system to issue a carrying instruction for the carrier. After the pre-carrying management method is adopted, the automatic carrying standard can be achieved by 100%. The 12-inch semiconductor production dust-free room can achieve the effect of turning off the lamp, and an operator is not needed in the dust-free room.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor production management, in particular to a pre-transport management method of a nitrogen-filled carrier storage cabinet based on a semiconductor 12-inch MES (Manufacturing Execution System). BACKGROUND

[0002] In the current semiconductor 12-inch MES system, when the carrier is completed from the equipment, some steps require the carrier to be placed in the N2STK (nitrogen-filled carrier storage cabinet). However, sometimes when the carrier reaches the designated N2STK (nitrogen-filled carrier storage cabinet), it is found that there is not enough space in the N2STK (nitrogen-filled carrier storage cabinet). This is because in the current carrier transport process, the position is occupied by other carriers that arrive first or an E84 error (loading port abnormality) error occurs when loading the port, which will cause the carrier to be unable to be placed in the N2STK (nitrogen-filled carrier storage cabinet). When this happens, the MCS (Material Control System) will transport the carrier to a temporary carrier storage cabinet. At this time, the carrier cannot reach the designated N2STK (nitrogen-filled carrier storage cabinet), which may cause some production risks.

[0003] Figure 1 The current carrier transport process from the equipment is shown. The MES system tracks the production progress through the Lot number, and Lot a in the figure represents a group of wafers stored in the carrier. In the process, the carrier is transported to the N2STK (see dashed line ① in the figure) after the process step 100 is completed. Figure 1 In the Lot a production process shown, after the process step 100 is completed, Lot a needs to be transported to the N2STK (see dashed line ① in the figure). First, the carrier is unloaded from the production equipment (see arrow ② in the figure), and is expected to be transported to the port 1 of the N2STK (see dashed arrow ③ in the figure). However, the following abnormality occurs: there is no space in the N2STK or an E84 error occurs in the port 1. At this time, the MCS system dispatches the carrier to a temporary storage cabinet STB (see arrow ④ in the figure), and the transport process ends at this time, with no subsequent action. However, the carrier should be stored in the nitrogen-filled storage cabinet N2STK, but in fact it is stored in the temporary storage cabinet STB, which may cause some production risks. SUMMARY

[0004] In view of the above problem that the carrier cannot reach the intended N2STK in the current MES system, causing production risks, the present application aims to solve this problem and provide a pre-transport management method, system and medium for a nitrogen-filled carrier storage cabinet of a semiconductor 12-inch MES system.

[0005] The technical problem to be solved by the present application is solved by the following technical scheme:

[0006] The application provides a pre-conveying management method for a nitrogen-filled carrier storage cabinet of a semiconductor 12-inch MES system, and specifically as follows: an RTD module and a GTM module are configured in the MES system, the RTD module is responsible for management and calculation, when the carrier is out of the equipment after the work is completed, the RTD module responds to the request of the EAP system to convey the carrier to the N2STK, if there is no free space in the N2STK at this time or the N2STK loading port is abnormal, the RTD module sends a conveying task to the STB to the MCS system and generates a pre-conveying task, and the GTM module interacts with the MCS to issue a conveying instruction for the carrier.

[0007] Further, in the pre-conveying management method for the nitrogen-filled carrier storage cabinet of the semiconductor 12-inch MES system provided by the application, when there is no free space in the N2STK, the work flow is as follows:

[0008] Step A1: the RTD module first generates a conveying task to the STB for the current carrier;

[0009] Step A2: the RTD module generates a pre-conveying task to the N2STK for the current carrier;

[0010] Step A3: the GTM module sends the conveying task to the STB to the MCS system;

[0011] Step A4: the MCS system sends a conveying instruction to the AMHS system;

[0012] Step A5: the AMHS system controls the carrier to be conveyed to the STB, and the conveying is completed;

[0013] Step A6: the MCS system receives the feedback of the STB conveying completion event;

[0014] Step A7: the MCS system reports the conveying completion information to the GTM module;

[0015] Step A8: the pre-conveying task is triggered by the MES system timing task.

[0016] Further, in the pre-conveying management method for the nitrogen-filled carrier storage cabinet of the semiconductor 12-inch MES system provided by the application, the work flow after the pre-conveying task is triggered is as follows:

[0017] Step C1: the RTD module queries whether there is a free N2STK and whether there is a pre-conveying task to be processed in the system, when a free N2STK and a pre-conveying task to be processed are found, step C2 is entered;

[0018] Step C2: the RTD module converts the pre-conveying task into a conveying task, and the GTM module sends the conveying task to the MCS system, and the MCS system sends a conveying instruction to the AMHS system;

[0019] Step C3: The AMHS system controls the vehicle to move to N2STK, and the move is complete;

[0020] Step C4: The MCS system receives feedback on the N2STK transfer completion event;

[0021] Step C5: The MCS system reports the transfer completion information to the GTM module.

[0022] Furthermore, in the pre-transfer management method for the nitrogen-filled carrier storage cabinet of the 12-inch semiconductor MES system provided by the present invention: step C2, converting the pre-transfer task into a transfer task, specifically includes the following steps:

[0023] Step C2-1: The RTD module matches the destination type of the pre-transfer based on the N2STK type and filters out pre-transfer tasks of the same type;

[0024] Step C2-2: If the current vehicle is in a transportable state, the RTD module generates a transport task for the current vehicle, with the starting point being the current vehicle's location and the destination being the current N2STK;

[0025] Step C2-3: The GTM module sends the transfer task to the MCS system;

[0026] Step C2-4: Based on the feedback from the GTM module, the RTD module marks the status of the transport task as scheduled;

[0027] Step C2-5: The RTD module deletes the pre-transfer task and records the history.

[0028] Furthermore, in the pre-transfer management method for the nitrogen-filled carrier storage cabinet of the 12-inch semiconductor MES system provided by the present invention: the timed task is triggered once every 5 minutes.

[0029] Furthermore, this invention provides a pre-transfer management system for nitrogen-filled carrier storage cabinets, used to implement a pre-transfer management method for nitrogen-filled carrier storage cabinets in a 12-inch semiconductor MES system. The system includes: an MES system, an MCS system, an AMHS system, an N2STK, and an STB. The MES system is a semiconductor manufacturing execution system, equipped with an RTD module and a GTM module. The RTD module is a real-time dispatch module used to create transfer tasks and pre-transfer tasks. The GTM is a handling module that issues transfer instructions to the carrier. The MCS system is a semiconductor material control system that receives transfer tasks from the GTM module. The AMHS system is a crane management system that receives instructions from the MCS system to control the carrier for transfer operations. The N2STK is a nitrogen-filled carrier storage cabinet. The STB is a temporary storage cabinet.

[0030] Furthermore, in the pre-transfer management system for the nitrogen-filled carrier storage tank provided by the present invention: the MES system is provided with the following interfaces: LoadRequest interface, LoadComplete interface, UnloadRequest interface, and UnloadComplete interface.

[0031] Furthermore, in the pre-transfer management method for the nitrogen-filled carrier storage cabinet of the 12-inch semiconductor MES system provided by the present invention:

[0032] The present invention also provides a computer-readable storage medium storing computer-executable instructions, which, when executed by a processor, are used to implement the pre-transfer management method for the nitrogen-filled carrier storage cabinet of the aforementioned 12-inch semiconductor MES system.

[0033] Compared with the prior art, the pre-transfer management method of the present invention has the following advantages:

[0034] 1. When the vehicle finishes its work on the processing equipment and gets off the equipment, the RTD module will determine whether the current vehicle needs to be transported to the N2STK. If so, it will first find an available N2STK and dispatch the vehicle to the N2STK.

[0035] 2. When the RTD module does not find an available N2STK, it first dispatches the vehicle to a temporary vehicle storage container and generates a pre-transfer task to the N2STK for the vehicle. When the RTD module finds an available N2STK, it converts the pre-transfer task into a transfer task and sends the transfer task to the MCS system.

[0036] 3. If the vehicle arrives at the N2STK and there is no available storage space at the N2STK, the MCS system will first move the vehicle to the STB and then notify the RTD. At this time, the RTD will generate a pre-movement task for the current vehicle. When the RTD module finds an available N2STK, it will convert the pre-movement task into a delivery task and send the delivery task to the MCS system.

[0037] 4. If, when the vehicle arrives at the N2STK, the N2STK's Load Port sends an E84 error (load port error), preventing the vehicle from entering the N2STK, the MCS system will first move the vehicle to the STB and then notify the RTD. At this time, the RTD will generate a pre-movement task for the current vehicle. When the RTD module finds an available N2STK, it will convert the pre-movement task into a moving task and send the moving task to the MCS system.

[0038] 5. By adopting the pre-transfer management method of this invention, 100% automated transfer standards can be achieved. A 12-inch semiconductor manufacturing cleanroom can achieve a "lights-out" effect, eliminating the need for operators within the cleanroom. Attached Figure Description

[0039] Figure 1 This is a flowchart of the existing technology for handling and managing materials;

[0040] Figure 2 This is a flowchart of the pre-transfer management method for the nitrogen-filled carrier storage cabinet of the semiconductor 12-inch MES system of the present invention.

[0041] In the diagram: 10, production equipment; 20, carrier; 30, nitrogen-filled carrier storage tank; 40, overhead crane track; 50, temporary storage tank. Detailed Implementation

[0042] To make the technical means, creative features, objectives and effects of this invention easier to understand, the following embodiments, in conjunction with the accompanying drawings, will specifically illustrate the technical solution of this invention.

[0043] Based on modifications to existing vehicle management processes, this invention provides a pre-transfer management method and system for nitrogen-filled vehicle storage cabinets in a 12-inch semiconductor MES system.

[0044] This invention provides a pre-transfer management system for a nitrogen-filled carrier storage tank, including a MES system, an MCS system, an AMHS system, an N2STK system, and an STB system. The MES system is a semiconductor manufacturing execution system, equipped with an RTD module and a GTM module. The RTD module is a real-time dispatch module used to create transfer tasks and pre-transfer tasks. The GTM is a transport module that issues transfer instructions to the carrier. The MCS system is a semiconductor material control system that receives transfer tasks from the GTM module. The AMHS system is a crane management system that receives instructions from the MCS system to control the carrier for transfer operations. The N2STK is a nitrogen-filled carrier storage tank. The STB is a temporary storage tank. The MES system has the following interfaces: a LoadRequest interface for submitting load requests; a LoadComplete interface for reporting loading completion; an UnloadRequest interface for submitting unloading requests; and an UnloadComplete interface for reporting unloading completion.

[0045] See Figure 2This invention also provides a pre-transfer management method for nitrogen-filled carrier storage cabinets in a 12-inch semiconductor MES system using the above-described system. The RTD module in the MES system is responsible for management and calculation. When the carrier finishes its work on the equipment and leaves the station, the RTD module responds to the request initiated by the EAP system (Semiconductor Equipment Automated Process Control System) to move the carrier to the N2STK. If there is no available space in the N2STK or the N2STK loading port is abnormal, the RTD module sends a transfer task to the MCS system to move the carrier to the STB and generates a pre-transfer task. The GTM module interacts with the MCS to issue transfer instructions to the carrier.

[0046] (1) When there is no available N2STK: After the vehicle finishes its work on the equipment and leaves the station, the RTD module will check whether the current step needs to go to N2STK. If it does, the RTD module will find an available N2STK for the vehicle and send a transport command. If no available N2STK can be found, the subsequent workflow is as follows:

[0047] Step A1: The RTD module first generates a transport task for the current vehicle to be transported to the STB.

[0048] Step A2: The RTD module then generates a pre-transfer task for the current vehicle to be transferred to N2STK.

[0049] Step A3: The GTM module sends the transfer task to STB to the MCS system.

[0050] Step A4: The MCS system sends a transfer command to the AMHS system.

[0051] Step A5: The vehicle is moved to STB under the control of the AMHS system, and the transfer is completed.

[0052] Step A6: The MCS system receives feedback that the STB transfer is complete.

[0053] Step A7: The MCS system reports the transfer completion information to the GTM module.

[0054] Step A8: The pre-transfer task is triggered by the MES system's scheduled task.

[0055] The scheduled task is triggered every 5 minutes. The workflow after the pre-transfer task is triggered is as follows:

[0056] Step C1: The RTD module queries whether there are any N2STKs with spare bits and whether there are any pre-transfer tasks to be processed in the system. When it finds that there are N2STKs with spare bits and pre-transfer tasks to be processed, proceed to step C2.

[0057] Step C2: The RTD module converts the pre-transfer task into a transfer task, and the GTM module sends the transfer task to the MCS system. The MCS system then sends the transfer command to the AMHS system.

[0058] Step C2, which converts the pre-transfer task into a transfer task, specifically includes the following steps:

[0059] Step C2-1: The RTD module matches the destination type (toType field) of the pre-transfer based on the N2STK type (warehouseType field) and filters out pre-transfer tasks of the same type.

[0060] Step C2-2: If the current vehicle is in a transferable state (transferState = WAT), the RTD module generates a transfer task for the current vehicle, with the starting point being the current vehicle's location and the destination being the current N2STK.

[0061] Step C2-3: The GTM module sends the transfer task to the MCS system.

[0062] Step C2-4: Based on the feedback from the GTM module, the RTD module marks the status of the transfer task as reserved (RESERVER).

[0063] Step C2-5: The RTD module deletes the pre-transfer task and records the history.

[0064] Step C3: The AMHS system controls the vehicle to move to N2STK, and the move is complete;

[0065] Step C4: The MCS system receives feedback on the N2STK transfer completion event;

[0066] Step C5: The MCS system reports the transfer completion information to the GTM module.

[0067] When an N2STK loading port malfunctions (an E84 error occurs): After a vehicle is moved to the N2STK, but the N2STK loading port malfunctions, preventing the vehicle from being properly stored, the MCS system needs to send the vehicle to the nearest STB (Site Bus Base), i.e., change its destination. The subsequent workflow is as follows:

[0068] Step B1: The MCS system requests a change of destination from the GTM module;

[0069] Step B2: The GTM module determines whether the original destination is N2STK;

[0070] Step B3: If the original destination is determined to be N2STK, the RTD module generates a pre-delivery task for the current vehicle;

[0071] Step B4: The GTM module successfully changed its destination and responded to the MCS system;

[0072] Step B5: The MCS system sends the transfer command to the STB to the AMHS system;

[0073] Step B6: The AMHS system controls the vehicle to move to the STB, and the move is complete;

[0074] Step B7: The MCS system receives the STB transfer completion event;

[0075] Step B8: The MCS system reports the transfer completion information to the GTM module;

[0076] Step B9: The pre-transfer task is triggered by the MES system's scheduled task.

[0077] The scheduled task is triggered every 5 minutes. The workflow after the pre-transfer task is triggered is as follows:

[0078] Step C1: The RTD module queries whether there are any N2STKs with spare bits and whether there are any pre-transfer tasks to be processed in the system. When it finds that there are N2STKs with spare bits and pre-transfer tasks to be processed, proceed to step C2.

[0079] Step C2: The RTD module converts the pre-transfer task into a transfer task, and the GTM module sends the transfer task to the MCS system. The MCS system then sends the transfer command to the AMHS system.

[0080] Step C2, which converts the pre-transfer task into a transfer task, specifically includes the following steps:

[0081] Step C2-1: The RTD module matches the destination type (toType field) of the pre-transfer based on the N2STK type (warehouseType field) and filters out pre-transfer tasks of the same type.

[0082] Step C2-2: If the current vehicle is in a transferable state (transferState = WAT), the RTD module generates a transfer task for the current vehicle, with the starting point being the current vehicle's location and the destination being the current N2STK.

[0083] Step C2-3: The GTM module sends the transfer task to the MCS system.

[0084] Step C2-4: Based on the feedback from the GTM module, the RTD module marks the status of the transfer task as reserved (RESERVER).

[0085] Step C2-5: The RTD module deletes the pre-transfer task and records the history.

[0086] Step C3: The AMHS system controls the vehicle to move to N2STK, and the move is complete;

[0087] Step C4: The MCS system receives feedback on the N2STK transfer completion event;

[0088] Step C5: The MCS system reports the transfer completion information to the GTM module.

[0089] The present invention also provides a computer-readable storage medium storing computer-executable instructions, which, when executed by a processor, are used to implement the steps of the pre-transfer management method for the nitrogen-filled carrier storage cabinet of the above-described semiconductor 12-inch MES system.

[0090] The above embodiments are merely preferred embodiments of the present invention and are not intended to limit the scope of protection of the present invention. For those skilled in the art, the present invention can have various modifications and variations. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention are included within the scope of protection of the present invention.

Claims

1. A pre-transfer management method for a nitrogen-filled carrier storage cabinet of a 12-inch semiconductor MES system, characterized in that: The MES system is configured with an RTD module and a GTM module. The RTD module is responsible for management and calculation. When the vehicle finishes its work on the equipment and leaves the station, the RTD module responds to the request initiated by the EAP system to move the vehicle to the N2STK. If there is no available space in the N2STK or the N2STK loading port is abnormal, the RTD module sends a moving task to the MCS system to move the vehicle to the STB and generates a pre-moving task. The GTM module interacts with the MCS to issue moving instructions to the vehicle.

2. The pre-transfer management method for the nitrogen-filled carrier storage cabinet of the 12-inch semiconductor MES system as described in claim 1, characterized in that: When there are no available slots in the N2STK, the workflow is as follows: Step A1: The RTD module first generates a transport task for the current vehicle to be transported to the STB; Step A2: The RTD module then generates a pre-transfer task for the current vehicle to be transferred to N2STK; Step A3: The GTM module sends the transfer task to STB to the MCS system; Step A4: The MCS system sends a transfer command to the AMHS system; Step A5: The AMHS system controls the vehicle to move to the STB, and the moving is completed; Step A6: The MCS system receives feedback on the STB transfer completion event; Step A7: The MCS system reports the transfer completion information to the GTM module; Step A8: The pre-transfer task is triggered by the MES system's scheduled task.

3. The pre-transfer management method for the nitrogen-filled carrier storage cabinet of the 12-inch semiconductor MES system as described in claim 1, characterized in that: When an N2STK loading port error occurs, the workflow is as follows: Step B1: The MCS system needs to dispatch to the nearest STB, so it will request the GTM module to change the destination; Step B2: The GTM module determines whether the original destination is N2STK; Step B3: If the original destination is determined to be N2STK, the RTD module generates a pre-transfer task for the current vehicle; Step B4: The GTM module successfully changed the destination and responded to the MCS system; Step B5: The MCS system sends the transfer command to the STB to the AMHS system; Step B6: The AMHS system controls the vehicle to move to the STB, and the moving is completed; Step B7: The MCS system receives the STB transfer completion event; Step B8: The MCS system reports the transfer completion information to the GTM module; Step B9: The pre-transfer task is triggered by the MES system's scheduled task.

4. The pre-transfer management method for the nitrogen-filled carrier storage cabinet of the 12-inch semiconductor MES system as described in claim 2 or 3, characterized in that: The workflow after triggering the pre-transfer task is as follows: Step C1: The RTD module queries whether there are any N2STKs with spare bits and whether there are any pre-transfer tasks to be processed in the system. When it finds that there are N2STKs with spare bits and pre-transfer tasks to be processed, it proceeds to step C2. Step C2: The RTD module converts the pre-transfer task into a transfer task, and the GTM module sends the transfer task to the MCS system. The MCS system then sends a transfer instruction to the AMHS system. Step C3: The AMHS system controls the vehicle to move to N2STK, and the moving is completed; Step C4: The MCS system receives feedback on the N2STK transfer completion event; Step C5: The MCS system reports the transfer completion information to the GTM module.

5. The pre-transfer management method for the nitrogen-filled carrier storage cabinet of the 12-inch semiconductor MES system as described in claim 4, characterized in that: The step C2, which converts the pre-transfer task into a transfer task, specifically includes the following steps: Step C2-1: The RTD module matches the destination type of the pre-transfer according to the N2STK type and filters out pre-transfer tasks of the same type; Step C2-2: If the current vehicle is in a transportable state, the RTD module generates a transport task for the current vehicle, with the starting point being the current vehicle's location and the destination being the current N2STK; Step C2-3: The GTM module sends the transfer task to the MCS system; Step C2-4: Based on the feedback from the GTM module, the RTD module marks the status of the transport task as reserved; Step C2-5: The RTD module deletes the pre-transfer task and records the history.

6. The pre-transfer management method for the nitrogen-filled carrier storage cabinet of the 12-inch semiconductor MES system as described in claim 2 or 3, characterized in that: The scheduled task is triggered every 5 minutes.

7. A pre-transfer management system for a nitrogen-filled carrier storage tank, used for the pre-transfer management method of the nitrogen-filled carrier storage tank for a semiconductor 12-inch MES system as described in any one of claims 1-6, characterized in that, include: MES system, MCS system, AMHS system, N2STK, STB, The MES system is a semiconductor manufacturing execution system, equipped with an RTD module and a GTM module. The RTD module is a real-time dispatch module used to create transport tasks and pre-transport tasks. The GTM is a transport module that issues transport instructions to the carrier. The MCS system is a semiconductor material control system that receives transport tasks issued by the GTM module. The AMHS system is an overhead crane management system that receives instructions from the MCS system to control the carrier to perform transport operations. N2STK is a nitrogen-filled carrier storage tank. STB is a temporary storage tank.

8. The pre-transfer management system for nitrogen-filled carrier storage tank as described in claim 7, characterized in that: in, The MES system has the following interfaces: LoadRequest interface, LoadComplete interface, UnloadRequest interface, and UnloadComplete interface.

9. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores computer-executable instructions, which, when executed by a processor, are used to implement a pre-transfer management method for performing the nitrogen-filled carrier storage cabinet of a semiconductor 12-inch MES system as described in any one of claims 1-6.

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