A cutting tool with multi-layer nano-coating and a method for manufacturing the same

Abstract

The application discloses a cutter with a multilayer nano coating and a preparation method thereof. The cutter comprises a cutter base body and a multilayer nano coating arranged on the surface of the cutter base body. The multilayer nano coating comprises, from inside to outside, a transition layer, a functional layer and a protective layer in sequence. The functional layer comprises alternately arranged wear-resistant layers and lubricating layers. The uppermost layer and the lowermost layer in the functional layer are wear-resistant layers. The preparation method comprises sequentially depositing the transition layer, the functional layer and the protective layer on the surface of the cutter base body by using an atomic layer deposition process. The application utilizes reasonable combination of structures of the layers, learns from enamel to optimize wear resistance, lubricity and corrosion resistance of the coating, and improves cutting performance of the cutter (such as reducing a wear rate and prolonging a service life). Meanwhile, the application adopts the atomic layer deposition technology to solve a problem of optimization of a microstructure and performance of the coating, avoids performance damage of a traditional chemical or physical vapor deposition to the cutter base body, and improves a stress concentration phenomenon among the coatings.

Description

Technical Field

[0001] This invention relates to the field of mechanical manufacturing tools, and more particularly to a metal cutting tool and its preparation method. Background Technology

[0002] In the field of precision manufacturing, micro-milling technology is widely used in high-end equipment manufacturing fields such as aerospace and microelectronics due to its ability to achieve high-precision machining of tiny parts. In this scenario, the cutting force is significantly reduced, but the tool is significantly affected by the size effect, easily leading to plowing—that is, the tool cannot achieve ideal shearing during the cutting process, instead exerting a squeezing and plowing effect on the material, resulting in decreased surface quality, dimensional accuracy deviations, and insufficient cutting edge sharpness further exacerbating tool wear, seriously affecting machining efficiency and part yield. With the development of machining materials towards high-performance composite materials and difficult-to-machine materials (such as titanium alloys and nickel-based alloys), the performance challenges faced by micro-milling tools are becoming increasingly prominent.

[0003] To improve tool performance, coating technology has become a core research direction. Various coating technologies exist, with chemical vapor deposition (CVD) and physical vapor deposition (PVD) being the most widely used. While CVD coatings offer high bonding strength and can improve tool wear resistance to some extent, their high deposition temperatures (typically exceeding 800℃) easily lead to grain growth and decreased hardness in the tool substrate. Furthermore, the coating thickness is often in the micrometer range, making it difficult to meet the nanometer-level cutting edge precision requirements of micro-milling tools. Insufficient nanometer-level density also weakens the coating's wear resistance. PVD coatings, on the other hand, have lower deposition temperatures (generally 200-500℃), causing less damage to the substrate. However, when pursuing high-hardness coatings, they easily generate significant compressive stress, limiting the coating's bonding strength. This can not only affect the stability of the tool substrate but also exacerbate cutting edge chipping due to stress concentration, failing to effectively solve the cutting edge sharpness problem in micro-milling scenarios. In addition, existing micro-texturing technologies rely on laser etching, offering limited improvement in overall coating density.

[0004] Atomic layer deposition (ALD) technology, with its atomic-level thin film growth control, can achieve nanometer-level precise control of coating thickness (accuracy up to 0.1 nm), forming uniform, dense, ultra-thin coatings on the cutting edges of micro-milling tools, providing a new approach to solving the problem of insufficient cutting edge sharpness. However, existing ALD deposition coating technologies for tools in micro-milling scenarios still have certain problems: the adhesion of ALD coatings to the tool surface is poor, and the coating is prone to peeling off during cutting, ultimately leading to rapid wear and short lifespan of micro-milling tools, which cannot meet the precision machining requirements of high-performance materials. Summary of the Invention

[0005] This invention provides a cutting tool with a multi-layer nano-coating and its preparation method, in order to solve the technical problems mentioned in the background art.

[0006] To solve the above-mentioned technical problems, the technical solution proposed by this invention is as follows:

[0007] A cutting tool with a multi-layer nano-coating includes a tool substrate and a multi-layer nano-coating disposed on the surface of the tool substrate. The multi-layer nano-coating includes, from the inside out, a transition layer, a functional layer, and a protective layer. The functional layer includes alternating wear-resistant layers and lubrication layers. The uppermost and lowermost layers of the functional layer are wear-resistant layers. The lubrication layer comprises zinc oxide, and the wear-resistant layer comprises titanium nitride. The lubrication layer and / or wear-resistant layer are formed using an atomic layer deposition process.

[0008] First, this invention constructs a multi-layered nano-coating system consisting of a transition layer, an alternating functional layer, and a protective layer on the surface of the tool substrate. The functional layer is composed of alternating wear-resistant and lubricating layers, which are superimposed to simulate the alternating structure of hard and tough phases in tooth enamel: the wear-resistant layer has high hardness and mimics the crystalline phase for wear resistance, while the lubricating layer mimics the tough phase for buffering and lubrication. The interface strengthening effect simulates the synergistic effect of enamel pillars and enamel pillar sheaths, combining high hardness and low friction characteristics to improve the coating's impact resistance and wear resistance. Its nanoscale effect and interface strengthening effect further optimize the deformation resistance. More importantly, this invention selects zinc oxide, formed by atomic layer deposition (ALD), as the main component of the lubricating layer, and titanium nitride as the main component of the wear-resistant layer. The inventors discovered that after forming the coating using a specific process, a low lattice mismatch exists between zinc oxide and titanium nitride, resulting in extremely strong interfacial bonding: the face-centered cubic titanium nitride is mainly composed of TiN (200) with a crystal plane spacing of 2.112 Å, while zinc oxide is mainly composed of ZnO (10-12) with a crystal plane spacing of 2.13 Å. The lattice mismatch between the two is only 0.85%, and the titanium nitride (TiN)... (110) is the second largest, with a crystal interplanar spacing of 2.665 Å. Zinc oxide is followed by ZnO (002), with a crystal interplanar spacing of 2.662 Å. The spacings are almost completely consistent (deviation of 0.11%). Low lattice mismatch is an important indicator of strong interfacial bonding. This means that after the present invention uses specific material combinations to form an alternating interlayer structure, the stress concentration phenomenon at the interface of the TiN / ZnO multilayer nanocoating is greatly reduced, reducing the risk of coating cracking and peeling, and significantly improving the overall mechanical properties of the coating, such as hardness and wear resistance. In addition, besides the structural differences brought about by ALD, the atomic layer deposition process has a lower reaction temperature. Low-temperature deposition will not destroy the typical cubic structure of TiN, thus ensuring the performance of the wear-resistant layer and the interlayer strength between the wear-resistant layer and the lubrication layer. On the other hand, ALD can achieve atomic-level thickness control with an accuracy of 0.1 nm. When preparing multilayer thin films, precise thickness control can ensure that the interplanar spacing of each layer matches the ideal state. Atomic layer deposition (ALD) can maintain the high crystallinity and hexagonal crystal structure of zinc oxide even with extremely low layer thickness (1.5 nm), without causing amorphization of zinc oxide, thus ensuring the performance of the lubrication layer and the interlayer strength of the wear-resistant layer and the lubrication layer. On the other hand, the thin films grown by ALD have extremely low surface roughness and no obvious diffusion or mixing between layers. Therefore, by optimizing the interface quality, the increase in lattice mismatch caused by interface unevenness or element mixing can be reduced.

[0009] As a further preferred embodiment of the above technical solution, the thickness of the wear-resistant layer in the functional layer is greater than or equal to 80%. TiN provides high hardness, and ZnO reduces the coefficient of friction by utilizing its layered structure. To improve the overall hardness of the multilayer nano-coating, the ratio of TiN to ZnO must be strictly controlled.

[0010] As a further preferred embodiment of the above technical solution, the uppermost and lowermost layers of the functional layer are wear-resistant layers, and the functional layer has a five-layer structure. The five-layer structure of wear-resistant layer-lubricating layer-wear-resistant layer-lubricating layer-wear-resistant layer achieves optimal wear performance and maximizes the service life of the cutting tool.

[0011] As a further preferred embodiment of the above technical solution, the transition layer comprises at least one of aluminum oxide and titanium oxide; the thickness of the transition layer is 5% to 20% of the total thickness of the multilayer nano-coating. Titanium nitride has weak adhesion to the tool substrate (hard alloy), therefore, the introduced transition layer strengthens the bond between the coating and the substrate. Furthermore, the inventors have found that, considering titanium nitride grown under the same number of cycles, growth on the transition layer is more stable than growth on the tool substrate surface. The transition layer bonds to the substrate surface through hydroxyl groups, firmly anchoring the substrate, offsetting the stress generated by cutting impact, preventing the coating from peeling off the substrate, and reducing internal stress. Its lattice, elastic modulus, and coefficient of thermal expansion are compatible with the tool substrate and functional layer, further reducing internal stress. It is also chemically stable and corrosion-resistant, and compatible with the functional layer.

[0012] As a further preferred embodiment of the above technical solution, the protective layer comprises at least one of alumina and titanium dioxide; the thickness of the protective layer is 5% to 20% of the total thickness of the multilayer nano-coating. The chemical inertness of alumina and titanium dioxide can prevent cutting fluid corrosion and high-temperature oxidation, protect the internal structure, significantly improve the oxidation resistance and corrosion resistance of the coating, achieve the effects of reduced wear rate, reduced cutting force, and less coating cracking, and extend the continuous cutting life of the tool.

[0013] As a further preferred embodiment of the above technical solution, the tool substrate is made of cemented carbide or high-speed steel. Cemented carbide or high-speed steel has good mechanical strength and hardness, providing a solid foundation for the adhesion of multi-layer nano-coatings and enabling the overall tool to withstand severe cutting forces and high-speed rotation.

[0014] Based on the same technical concept, the present invention also provides a method for preparing a cutting tool with a multi-layer nano-coating as described above, namely, using an atomic layer deposition process to sequentially deposit the transition layer, functional layer and protective layer on the surface of the cutting tool substrate.

[0015] Because the growth rate and main growth phase of various coatings prepared by atomic layer deposition (ALD) are basically consistent with those of the main growth phase under fixed temperature and precursor conditions, the crystal phase of each layer can be controlled to achieve the orderly arrangement of nanocrystals. The layer thickness can be precisely controlled by the number of cycles, thereby improving density. Therefore, this invention utilizes the atomic-level precision control advantage of ALD technology to solve the problems of insufficient coating density and non-uniform nanostructure, constructing a dense, multi-layered nanocoating structure. It precisely controls the composition, thickness, and interface structure of each layer in the coating, optimizing the microstructure and thus improving the coating's hardness, wear resistance, lubricity, and other properties, solving the challenge of optimizing the coating's microstructure and performance. Simultaneously, the deposition temperature of ALD is much lower than that of existing CVD (700~950℃) and PVD (>300℃) processes, effectively avoiding grain coarsening or performance degradation of the tool substrate, making it particularly suitable for heat-sensitive materials such as high-speed steel.

[0016] As a further preferred embodiment of the above technical solution, in the atomic layer deposition process, a wear-resistant layer is formed by alternating pulses of tetra(dimethylamino)titanium and plasma nitrogen, a lubricating layer is formed by alternating pulses of diethylzinc and H2O, a transition layer or protective layer composed of alumina is formed by alternating pulses of trimethylaluminum and H2O, and a transition layer or protective layer composed of titanium oxide is formed by alternating pulses of tetraisopropoxide and H2O.

[0017] As a further preferred embodiment of the above technical solution, the deposition thickness of the transition layer and the protective layer is greater than the minimum grain height of alumina or titanium oxide in the atomic layer deposition process; the deposition thickness of the wear-resistant layer is greater than the minimum grain height of TiN in the atomic layer deposition process; and the deposition thickness of the lubricating layer is greater than the minimum grain height of ZnO in the atomic layer deposition process.

[0018] As a further preferred embodiment of the above technical solution, the deposition temperature during the atomic layer deposition process is 180~220℃.

[0019] As a further preferred embodiment of the above technical solution, the tool substrate is cleaned, degreased, and derusted before performing the atomic layer deposition process.

[0020] The present invention has the following beneficial effects:

[0021] This invention utilizes a rational combination of layers, drawing inspiration from the synergistic effects of dental enamel materials to optimize the coating's wear resistance, lubricity, and corrosion resistance. Furthermore, through optimization of the functional layer's material composition and process, a coating structure with excellent interfacial bonding is achieved, thereby improving tool hardness, reducing wear rate, extending service life, and significantly enhancing tool cutting performance. Simultaneously, this invention employs atomic layer deposition (ALD) technology to solve the challenges of optimizing the coating's microstructure and performance, avoiding the performance damage to the tool substrate caused by traditional chemical and physical vapor deposition methods, and mitigating stress concentration between coating layers. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the structure of the cutting tool with multi-layer nano-coating of the present invention.

[0023] Figure 2 This is a TEM image of the functional coating on the surface of the cutting tool with multilayer nanocoatings in Example 1.

[0024] Figure 3 for Figure 2 Enlarged view of the area within the red box.

[0025] Figure 4 for Figure 3 Crystal phase structure analysis diagram.

[0026] Figure 5 for Figure 2 Enlarged view of the area within the yellow box.

[0027] Figure 6 for Figure 5 Crystal phase structure analysis diagram.

[0028] Figure 7 The image shows the EDS analysis spectrum of the surface coating of the cutting tool with multilayer nano-coating in Example 1.

[0029] Figure 8 The results are the hardness test results of the cutting tools with multi-layer nano-coatings in Examples 2-4.

[0030] Figure 9 The images show the morphology of the cutting tools with multi-layer nano-coatings in Examples 2-4 before and after cutting.

[0031] Figure 10 The results show the average burr height after cutting with the tools with multi-layer nano-coatings used in Examples 2-4.

[0032] Figure 11 The surface roughness and roughness variance of the workpieces after cutting with tools bearing multi-layer nano-coatings in Examples 2-4 are shown.

[0033] Figure 12The images show 3D topographic images of the workpiece surface after cutting with the multi-layer nano-coating tool used in Examples 2-4.

[0034] Figure 13 The results show the friction coefficient test results for Example 2, Comparative Example 1, and the uncoated cutting tool. Detailed Implementation

[0035] The embodiments of the present invention will be described in detail below with reference to the accompanying drawings, but the present invention can be implemented in many different ways as defined and covered by the claims.

[0036] Example 1:

[0037] like Figure 1 As shown, the milling cutter with multi-layer nano-coating in this embodiment includes a cutter substrate (i.e., Figure 1 The tool consists of a tool layer and a multi-layered nano-coating on the surface of the tool substrate. From the inside out, the multi-layered nano-coating comprises a transition layer, a functional layer, and a protective layer. The functional layer consists of five alternating TiN wear-resistant layers and ZnO lubricating layers, with the top and bottom layers being wear-resistant layers. The thicknesses of the TiN wear-resistant layers from the outside to the inside are 15.95 nm, 13.48 nm, and 9.08 nm, respectively, for a total thickness of 38.51 nm. Each ZnO lubricating layer is 1.5 nm thick, for a total thickness of 3 nm, making the total thickness of the functional layer 41.51 nm. Both the transition layer and the protective layer are TiO2 layers, with the transition layer and protective layer each having a thickness of 5 nm. The total thickness of the multi-layered nano-coating outside the tool substrate is 51 nm. The tool substrate is made of cemented carbide.

[0038] TEM images of multilayer nanocoatings are shown below. Figure 2 As shown, the material composition of each layer can be obtained through lattice spacing analysis of the coating. Figure 3 and Figure 4 For example, Figure 3 for Figure 2 Enlarged image within the red box Figure 4 The crystal structure diagram shows a face-centered cubic structure with a lattice spacing of 1.93 Å, confirming it as TiN. Further analysis reveals... Figure 5 and Figure 6 For example, Figure 5 for Figure 2 Enlarged image within the yellow box Figure 6 Based on crystal structure analysis, the lattice spacings are 2.13 Å, 2.098 Å, and 2.665 Å, respectively, confirming that it is ZnO. The lattice mismatch between the two is very low.

[0039] EDS analysis spectrum of multilayer nanocoating as shown in the figure Figure 7As shown in the EDS, the distribution of N and Ti is consistent, and the distribution of Zn and O is consistent (O is distributed throughout the entire coating because the oxygen source itself will preferentially react with the titanium source during the ALD preparation process, and there will be some residue in the chamber, so it will inevitably diffuse to the entire coating), which can help to prove the material composition of each layer structure.

[0040] Various properties were tested on the same blank material for the cutting tool inserts and micro-milling cutters with multi-layer nano-coatings of this embodiment. The test methods included scratch test and nano-indentation test, FE-SEM, HRTEM and electrochemical impedance spectroscopy, CNC milling of oxygen-free copper test and Vickers hardness test. The test results were as follows: the critical peel load for scratching of the cutting tool inserts with multi-layer nano-coatings of this embodiment was 15-30N; the cohesive strength was >300MPa; the macroscopic porosity of the multi-layer nano-coating was <0.1%; the microscopic porosity was <0.05%; and the EIS impedance value was >10. 6 Ω•cm 2 The lifespan of the micro-milling cutter is 500-800 cycles under medium load and 800-1000 cycles under light load (2-3 times that of uncoated tools). Based on the above data and TEM images, the advantages of the multilayer nano-coating of this invention in terms of coating adhesion can be demonstrated. Due to the thinness of the coating, the performance of the YG8 tool substrate before and after deposition is almost identical, and no damage is caused by the deposition process. Hardness: 1500-1600 HV (no difference); Bending strength: 2500-2800 MPa (no difference); Cutting edge radius: 5-10 μm (variation <0.05 μm); Ra: 0.1-0.2 μm (no difference).

[0041] The method for preparing the cutting tool with multi-layer nano-coating in this embodiment includes the following steps:

[0042] Step 1, Tool substrate preparation: The substrate to be coated is pretreated by ultrasonic cleaning, degreasing, and rust removal using alcohol and pure water to ensure that the substrate surface is clean and free of impurities;

[0043] Step 2: Using atomic layer deposition (ALD) technology, a TiO2 layer of required thickness is deposited at 200℃ using tetraisopropyl titanate and H2O for a certain number of cycles.

[0044] Step 3: Using atomic layer deposition (ALD) technology, first deposit TiN (wear-resistant layer) of the required thickness using tetra(dimethylamino)titanium and plasma nitrogen at 200℃, plasma power 200W, and nitrogen flow rate 50ml / min. Then, deposit ZnO (lubricating layer) of the required thickness using diethylzinc and H2O at 200℃ and nitrogen flow rate 50ml / min. The required thickness of TiN (wear-resistant layer) and ZnO (lubricating layer) of the required thickness is formed by alternating deposition through multiple cycles.

[0045] Step 4: Using atomic layer deposition (ALD) technology, deposit TiO2 of the required thickness as a protective layer at 200℃ and a nitrogen flow rate of 50 ml / min using titanium tetraisopropoxide and H2O.

[0046] Example 2:

[0047] This embodiment of a milling cutter with a multi-layer nano-coating includes a cutter substrate and a multi-layer nano-coating disposed on the surface of the cutter substrate. The multi-layer nano-coating, from the inside out, includes a transition layer, a functional layer, and a protective layer. The functional layer comprises five alternating TiN wear-resistant layers and ZnO lubricating layers, wherein the uppermost and lowermost layers of the functional layer are wear-resistant layers. The thickness of each TiN wear-resistant layer is 10 nm from the outside in, with a total thickness of 30 nm. Each ZnO lubricating layer is 1 nm thick, with a total thickness of 2 nm, resulting in a total functional layer thickness of 32 nm. The transition layer and the protective layer are both TiO2 layers, with the transition layer and protective layer each having a thickness of 5 nm. The total thickness of the multi-layer nano-coating outside the cutter substrate is 42 nm. The cutter substrate is made of cemented carbide.

[0048] The preparation method of the cutting tool with multi-layer nano-coating in this embodiment is basically the same as that in Example 1.

[0049] Example 3:

[0050] This embodiment of a milling cutter with a multi-layer nano-coating includes a cutter substrate and a multi-layer nano-coating disposed on the surface of the cutter substrate. The multi-layer nano-coating, from the inside out, includes a transition layer, a functional layer, and a protective layer. The functional layer comprises five alternating TiN wear-resistant layers and ZnO lubricating layers, wherein the uppermost and lowermost layers of the functional layer are wear-resistant layers. The thickness of each TiN wear-resistant layer is 10 nm from the outside in, with a total thickness of 30 nm. Each ZnO lubricating layer is 1.5 nm thick, with a total thickness of 3 nm, and the total thickness of the functional layer is 33 nm. The transition layer and the protective layer are both TiO2 layers, with the transition layer and the protective layer each having a thickness of 5 nm. The total thickness of the multi-layer nano-coating outside the cutter substrate is 43 nm. The cutter substrate is made of cemented carbide.

[0051] The preparation method of the cutting tool with multi-layer nano-coating in this embodiment is basically the same as that in Example 1.

[0052] Example 4:

[0053] This embodiment of a milling cutter with a multi-layer nano-coating includes a cutter substrate and a multi-layer nano-coating disposed on the surface of the cutter substrate. The multi-layer nano-coating, from the inside out, includes a transition layer, a functional layer, and a protective layer. The functional layer comprises five alternating TiN wear-resistant layers and ZnO lubricating layers, wherein the uppermost and lowermost layers are wear-resistant layers. The thickness of each TiN wear-resistant layer is 10 nm from the outside in, with a total thickness of 30 nm. Each ZnO lubricating layer is 2 nm thick, with a total thickness of 4 nm, resulting in a total functional layer thickness of 34 nm. The transition layer and the protective layer are both TiO2 layers, with the transition layer and protective layer each having a thickness of 5 nm. The total thickness of the multi-layer nano-coating outside the cutter substrate is 44 nm. The cutter substrate is made of cemented carbide.

[0054] The preparation method of the cutting tool with multi-layer nano-coating in this embodiment is basically the same as that in Example 1.

[0055] Hardness and cutting tests were conducted on the cutting tools of Examples 2-4, and the results are as follows: Figures 8-12 As shown, the hardness of the cutting tool is significantly improved compared to the uncoated tool. Figure 8 ), and the surface morphology of the tool after cutting ( Figure 9 Both the surface morphology of the workpiece and the surface morphology of the workpiece were significantly improved. Figure 12 The burr height decreased significantly. Figure 10 The surface roughness of the workpiece decreased significantly. Figure 11 , Figure 11 In the figure, Sa represents the arithmetic mean roughness and Sq represents the root mean square roughness. Comparing the tools of Examples 2-4 and the uncoated tool, it can be seen that the surface roughness of the workpiece in Examples 2-4 is lower. This proves that the multilayer nano-coating of the present invention improves the machining performance of the tool.

[0056] Comparative Example 1:

[0057] This comparative example of a milling cutter with a multi-layer nano-coating includes a tool substrate and a multi-layer nano-coating disposed on the surface of the tool substrate. The multi-layer nano-coating, from the inside out, includes a transition layer, a functional layer, and a protective layer. The functional layer comprises five alternating layers of TiN wear-resistant material and Al2O3 lubricating material, with the uppermost and lowermost layers being wear-resistant layers. The thickness of each TiN wear-resistant layer is 10 nm from the outside in, for a total thickness of 30 nm. Each Al2O3 lubricating layer is 1 nm thick, for a total thickness of 2 nm, and the total thickness of the functional layer is 32 nm. Both the transition layer and the protective layer are TiO2 layers, with the transition layer and protective layer each having a thickness of 5 nm. The total thickness of the multi-layer nano-coating outside the tool substrate is 42 nm. The tool substrate is made of cemented carbide.

[0058] Friction coefficient tests were conducted on Example 2, Comparative Example 1, and the uncoated cutting tool. The results are as follows: Figure 13 As shown, Figure 13The left side shows the friction coefficient test results of Example 2, and the right side shows the friction coefficient test results of Comparative Example 1. Figure 13 It can be seen that, under the same test conditions, the friction coefficient of the tool in Example 2 is reduced by a greater amount compared to the uncoated tool than that of the tool in Comparative Example 1, thus exhibiting more outstanding cutting performance.

[0059] The above description is merely a preferred embodiment of the present invention, and the scope of protection of the present invention is not limited to the above embodiments. For those skilled in the art, improvements and modifications obtained without departing from the inventive concept should also be considered within the scope of protection of the present invention.

[0060] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the present invention.

Claims

1. A cutting tool with a multi-layer nanocoating, characterized in that, The tool base body and a multilayer nano coating arranged on the surface of the tool base body, the multilayer nano coating comprises a transition layer, a functional layer and a protective layer from inside to outside; the functional layer comprises alternately arranged wear-resistant layers and lubricating layers, the components of the lubricating layers comprise zinc oxide, and the components of the wear-resistant layers comprise titanium nitride; the lubricating layers and the wear-resistant layers are formed by an atomic layer deposition process.

2. The tool with multi-layer nano-coating according to claim 1, characterized in that, The thickness of the wear-resistant layers in the functional layer accounts for greater than or equal to 80% of the functional layer.

3. The tool with multi-layer nano-coating according to claim 2, characterized in that, The uppermost layer and the lowermost layer in the functional layer are wear-resistant layers, and the functional layer has a five-layer structure.

4. The tool with multi-layer nano-coating according to any one of claims 1-3, characterized in that, The transition layer comprises at least one of aluminum oxide and titanium oxide; the thickness of the transition layer is 5% to 20% of the total thickness of the multilayer nano coating.

5. The tool with multi-layer nano-coating according to any one of claims 1-3, characterized in that, The protective layer comprises at least one of aluminum oxide and titanium oxide; the thickness of the protective layer is 5% to 20% of the total thickness of the multilayer nano coating.

6. The tool with multi-layer nano-coating according to any one of claims 1-3, characterized in that, The material of the tool base body is cemented carbide or high-speed steel.

7. A method of producing a cutting tool with a multi-layer nano-coating according to any one of claims 1 to 6, characterized in that The transition layer, the functional layer and the protective layer are sequentially deposited on the surface of the tool base body by an atomic layer deposition process.

8. The method of claim 7, wherein the tool with multi-layered nanocoating is prepared by the steps of: In the atomic layer deposition process, the wear-resistant layers are formed by alternately pulsing titanium tetrakis(dimethylamino) and plasma nitrogen, the lubricating layers are formed by alternately pulsing diethyl zinc and H2O, the transition layer or the protective layer with the component of aluminum oxide is formed by alternately pulsing trimethylaluminum and H2O, and the transition layer or the protective layer with the component of titanium oxide is formed by alternately pulsing titanium tetraisopropoxide and H2O.

9. The method of claim 7, wherein the tool with multi-layered nano-coating is prepared by the steps of: The deposition thicknesses of the transition layer and the protective layer are greater than the minimum grain height of aluminum oxide or titanium oxide in the atomic layer deposition process; the deposition thickness of the wear-resistant layer is greater than the minimum grain height of TiN in the atomic layer deposition process; and the deposition thickness of the lubricating layer is greater than the minimum grain height of ZnO in the atomic layer deposition process.

10. The method of claim 7, wherein the tool with multi-layered nanocoating is prepared by the steps of: The deposition temperature in the atomic layer deposition process is 180 to 220 DEG C.

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