Conveying mechanism, vacuum processing equipment and vacuum processing method

Abstract

The invention belongs to the technical field of material conveying, and particularly relates to a carrying mechanism, vacuum treatment equipment and a vacuum treatment method. The carrying mechanism is movably arranged among the first space, the second space and the third space and comprises a first-stage moving assembly, a second-stage moving assembly and a third-stage moving assembly, and the first-stage moving assembly is arranged in the second space and can move in the first direction relative to the second space; the second-stage moving assembly is arranged on one side of the first-stage moving assembly and can move in the first direction relative to the first-stage moving assembly. The third-stage moving assembly is arranged on the side, away from the first-stage moving assembly, of the second-stage moving assembly and can move in the first direction relative to the second-stage moving assembly, and the third-stage moving assembly is used for bearing a substrate; the moving speeds of the first-stage moving assembly, the second-stage moving assembly and the third-stage moving assembly are sequentially increased. And through the first-stage moving assembly, the second-stage moving assembly and the third-stage moving assembly of which the moving speeds are sequentially increased, the carrying efficiency of the base plate is improved, and the machining amount of the base plate is increased.

Description

Technical Field

[0001] This invention relates to the field of material conveying technology, and in particular to a conveying mechanism, vacuum processing equipment, and vacuum processing method. Background Technology

[0002] With the technological advancements in vacuum processing fields such as vacuum coating, the market demands for both quality and yield in vacuum processing are constantly increasing. Improving yield becomes particularly important while ensuring product quality. Taking vacuum coating of substrates as an example, a transfer chamber is typically installed between the coating chamber and the atmospheric environment to facilitate the transfer of the substrate between the atmosphere, the transfer chamber, and the coating chamber, thereby achieving automated continuous coating.

[0003] In existing technologies, the transfer distance of substrates between the atmosphere, the transport chamber, and the coating chamber is generally large, typically requiring multiple robotic arms. This results in complex structures, large space requirements, and low transport efficiency, impacting both substrate transport and coating efficiency. Replacing the substrate with a high-power motor to increase its movement speed would increase costs; furthermore, due to the long travel distance, high-speed substrate movement can lead to instability, affecting coating results. Using conveyor belts or rollers for cross-chamber substrate transfer also presents technical problems of complex structures and low transport efficiency, and may also compromise the sealing performance of the transport chamber and coating chamber. Summary of the Invention

[0004] The purpose of this invention is to provide a conveying mechanism, vacuum processing equipment, and vacuum processing method to solve the problems of complex structure and low conveying efficiency in the prior art where the substrate is driven by a motor to move through the atmospheric environment, conveying room, and coating room, thereby improving the coating efficiency of the substrate and increasing the processing volume of the substrate.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] On the one hand, a conveying mechanism is provided, which is movable between a first space, a second space, and a third space, including:

[0007] A primary moving component, wherein the primary moving component is disposed within the second space and is capable of moving relative to the second space along a first direction;

[0008] A secondary moving component, wherein the secondary moving component is disposed on one side of the primary moving component and is capable of moving relative to the primary moving component along the first direction;

[0009] A third-level moving component is disposed on the side of the second-level moving component away from the first-level moving component and can move relative to the second-level moving component along the first direction. The third-level moving component is used to support the substrate.

[0010] The moving speeds of the first-level moving component, the second-level moving component, and the third-level moving component increase sequentially.

[0011] As an optional technical solution for the conveying mechanism, the conveying mechanism includes a base plate, which is disposed in the second space and extends along the first direction. A first guide member is disposed on the base plate along the first direction. The primary moving component includes a support plate and a first mating member. The first mating member is disposed on the side of the support plate near the base plate. The first mating member and the first guide member cooperate to enable the primary moving component to move relative to the base plate along the first direction.

[0012] As an optional technical solution for the conveying mechanism, the base plate is further provided with a first rack along the first direction, and the primary moving component also includes a gear. The gear is rotatably disposed on the support plate, and the gear and the first rack can mesh. The gear can rotate clockwise or counterclockwise to drive the primary moving component to move along the first direction.

[0013] As an optional technical solution for the conveying mechanism, the secondary moving component includes a support arm and a second guide member. The second guide member is disposed along the first direction on the side of the support arm near the primary moving component. The primary moving component also includes a second mating member, which is disposed on the side of the support plate near the secondary moving component. The second mating member and the second guide member cooperate to enable the secondary moving component to move relative to the primary moving component along the first direction.

[0014] As an optional technical solution for the conveying mechanism, the secondary moving component further includes a connector, and at least one support arm is provided. Multiple support arms are spaced apart along a second direction, and the multiple support arms are fixed together by the connector. The second direction is perpendicular to the first direction.

[0015] As an optional technical solution for the conveying mechanism, the secondary moving component further includes a second rack, which is disposed on the support arm along the first direction. The second rack and the first rack are disposed opposite to each other. The second rack and the gear can mesh. The gear rotates in the clockwise or counterclockwise direction, which can drive the secondary moving component to move along the first direction.

[0016] As an optional technical solution for the conveying mechanism, the secondary moving component further includes a third guide member. The third guide member is disposed along the first direction on the side of the support arm near the tertiary moving component. The tertiary moving component includes a bearing arm and a third mating member. The third mating member is disposed on the side of the bearing arm near the support arm. The third mating member and the third guide member cooperate to enable the tertiary moving component to move relative to the secondary moving component along the first direction.

[0017] As an optional technical solution for the conveying mechanism, the primary moving component further includes a first fixing member, and the tertiary moving component further includes a second fixing member. The first fixing member and the second fixing member are connected by a connector. The movement of the primary moving component and the movement of the secondary moving component relative to the primary moving component can both be driven by the tertiary moving component through the connector.

[0018] On the other hand, a vacuum processing device is provided, including a buffer chamber, a coating chamber, and a conveying mechanism as described in any one of the above. The buffer chamber has openings at both ends; a first valve is disposed at one end and a second valve is disposed at the other end, the second valve being located between the coating chamber and the buffer chamber; the first valve can be opened or closed to connect or isolate the atmosphere from the buffer chamber; the second valve can be opened or closed to connect or isolate the buffer chamber from the coating chamber.

[0019] On the other hand, a vacuum processing method is provided, applied to the vacuum processing equipment described in any of the above claims, comprising the following steps:

[0020] S1. After restoring the atmospheric environment to the buffer chamber, open the first valve;

[0021] S2. Drive the conveying mechanism to move, so that the third-level moving component and part of the second-level moving component leave the buffer chamber and place the substrate on the third-level moving component;

[0022] S3. Drive the conveying mechanism to move, and close the first valve after the conveying mechanism is fully placed in the buffer chamber;

[0023] S4. After restoring the vacuum environment of the buffer chamber, open the second valve;

[0024] S5. Drive the conveying mechanism to move, so that the third-level moving component and part of the second-level moving component enter the coating chamber;

[0025] S6. The substrate is handed over to the coating mechanism for coating.

[0026] The beneficial effects of this invention are:

[0027] This invention provides a conveying mechanism, a vacuum processing device, and a vacuum processing method. The conveying mechanism is movably disposed between a first space, a second space, and a third space, and includes a primary moving component, a secondary moving component, and a tertiary moving component. The primary moving component is disposed within the second space and can move relative to the second space along a first direction. The secondary moving component is disposed to one side of the primary moving component and can move relative to the primary moving component along the first direction. The tertiary moving component is disposed on the side of the secondary moving component away from the primary moving component and can move relative to the secondary moving component along the first direction. The tertiary moving component is used to carry a substrate. The moving speeds of the primary, secondary, and tertiary moving components increase sequentially. By using the primary, secondary, and tertiary moving components with sequentially increasing moving speeds, the cost of the driving components is reduced, the substrate conveying efficiency is improved, and the substrate processing volume is increased. Attached Figure Description

[0028] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments of the present invention will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of the present invention and these drawings without creative effort.

[0029] Figure 1 This is a schematic diagram of the structure of the vacuum processing equipment provided in an embodiment of the present invention;

[0030] Figure 2 This is a schematic diagram of the structure of the base plate of the conveying mechanism provided in an embodiment of the present invention;

[0031] Figure 3 This is a schematic diagram of the structure of the primary moving component of the conveying mechanism provided in an embodiment of the present invention;

[0032] Figure 4 This is a schematic diagram of the structure of the secondary moving component of the conveying mechanism provided in an embodiment of the present invention;

[0033] Figure 5 This is a schematic diagram of the structure of the three-stage moving component of the conveying mechanism provided in an embodiment of the present invention;

[0034] Figure 6 This is a schematic diagram of the conveying mechanism provided in an embodiment of the present invention;

[0035] Figure 7 This is a schematic diagram of the conveying operation state of the vacuum processing equipment provided in this embodiment of the invention. Figure 1 ;

[0036] Figure 8 This is a schematic diagram of the conveying operation state of the vacuum processing equipment provided in this embodiment of the invention. Figure 2;

[0037] Figure 9 This is a schematic diagram of the conveying operation state of the vacuum processing equipment provided in this embodiment of the invention. Figure 3 ;

[0038] Figure 10 This is a flowchart of the vacuum processing method provided in an embodiment of the present invention.

[0039] In the picture:

[0040] 1. Substrate;

[0041] 100. Buffer chamber; 110. First valve; 120. Second valve;

[0042] 200. Coating chamber;

[0043] 300. Moving and transporting organizations;

[0044] 310. Primary moving component; 311. Gear; 312. Motor; 313. First fixing component; 314. Support plate; 315. First mating component; 316. Second mating component;

[0045] 320. Secondary moving component; 321. Support arm; 322. Synchronizer; 323. Second rack; 324. Third guide; 325. Pulley; 326. Coupling; 327. Second guide;

[0046] 330. Third-level moving component; 331. Second fixing component; 332. Bearing arm; 333. Third mating component; 334. Pin; 335. Abutment block;

[0047] 340. Base plate; 341. First guide component; 342. First rack;

[0048] 350. Connecting parts. Detailed Implementation

[0049] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, and not all of the structures.

[0050] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0051] In this invention, those skilled in the art will understand that the function performed by a component can be performed by one component, multiple components, one part, or multiple parts. Similarly, the function performed by a part can also be performed by one part, one component, or a combination of multiple parts.

[0052] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0053] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention. In addition, the terms "first" and "second" are used only for distinction in description and have no special meaning.

[0054] In existing technologies, the transfer distance of substrates between the atmosphere, the transport chamber, and the coating chamber is generally large, typically requiring multiple robotic arms. This results in complex structures, large space requirements, and low transport efficiency, impacting both substrate transport and coating efficiency. Replacing the substrate with a high-power motor to increase its movement speed would increase costs; furthermore, due to the long travel distance, high-speed substrate movement can lead to instability, affecting coating results. Using conveyor belts or rollers for cross-chamber substrate transfer also presents technical problems of complex structures and low transport efficiency, and may also compromise the sealing performance of the transport chamber and coating chamber.

[0055] To address the above problems, this embodiment provides a vacuum processing device, see reference. Figure 1The system includes a buffer chamber 100, a coating chamber 200, and a conveying mechanism 300. The buffer chamber 100 has openings at both ends; a first valve 110 is configured at one end, and a second valve 120 is configured at the other end, with the second valve 120 located between the coating chamber 200 and the buffer chamber 100. The first valve 110 can be opened or closed to connect or isolate the atmosphere from the buffer chamber 100; the second valve 120 can be opened or closed to connect or isolate the buffer chamber 100 and the coating chamber 200. In this embodiment, the first valve 110 is configured as a gate valve, and the second valve 120 is configured as a gate valve.

[0056] Taking the coating equipment as an example, the conveying mechanism 300 is movably positioned between the first space (atmospheric environment), the second space (buffer room 100), and the third space (coating room 200). (See attached image.) Figures 2-6 The conveying mechanism 300 includes a primary moving component 310, a secondary moving component 320, and a tertiary moving component 330. The primary moving component 310 is located within the buffer chamber 100 and can move relative to the buffer chamber 100 along a first direction. The secondary moving component 320 is located to one side of the primary moving component 310 and can move relative to the primary moving component 310 along the first direction. The tertiary moving component 330 is located on the side of the secondary moving component 320 away from the primary moving component 310 and can move relative to the secondary moving component 320 along the first direction. The tertiary moving component 330 is used to carry the substrate 1. The moving speeds of the primary moving component 310, the secondary moving component 320, and the tertiary moving component 330 increase sequentially. By using the primary moving component 310, the secondary moving component 320, and the tertiary moving component 330 with sequentially increasing moving speeds, the cost of the drive components is saved, the conveying efficiency of the substrate 1 is improved, and the production volume of the substrate 1 is increased. Preferably, the ratio of the moving speeds of the first-level moving component 310, the second-level moving component 320, and the third-level moving component 330 is set to 1:2:3, which facilitates the design of the moving structure.

[0057] Further, see Figure 2 and Figure 3The conveying mechanism 300 includes a base plate 340, which is disposed within a second space and extends along a first direction. A first guide member 341 is disposed on the base plate 340 along the first direction. The primary moving component 310 includes a support plate 314 and a first mating member 315. The first mating member 315 is disposed on the side of the support plate 314 near the base plate 340. The first mating member 315 and the first guide member 341 cooperate to enable the primary moving component 310 to move relative to the base plate 340 along the first direction. The first guide member 341 guides the primary moving component 310 to prevent it from deviating during movement. In this embodiment, the first guide member 341 is configured as a guide rail, and the first mating member 315 is configured as a slider. The slider cooperates with the guide rail to slide the primary moving component 310 along the first direction onto the base plate 340. In other embodiments, the first guide member 341 can also be configured as a slide groove, and the slide groove and the slider can be used to cooperate; or the first guide member 341 can be configured as a lead screw, and the first mating member 315 can be configured as a nut, and the nut and the lead screw can be used to cooperate, etc. The possible embodiments will not be listed one by one here, and those skilled in the art can choose according to the actual situation.

[0058] Furthermore, in this embodiment, the base plate 340 is further provided with a first rack 342 along the first direction, and the primary moving component 310 also includes a gear 311. The gear 311 is rotatably mounted on the support plate 314, and the gear 311 and the first rack 342 can mesh. The gear 311 rotates clockwise or counterclockwise, which can drive the primary moving component 310 to move along the first direction. Specifically, a motor 312 is provided on the primary moving component 310, and the motor 312 can drive the gear 311 to rotate clockwise or counterclockwise. In other embodiments, a hydraulic cylinder or an electric rod can be used to drive the gear 311 to rotate, or a lead screw and nut can be used to drive the primary moving component 310 to move.

[0059] Furthermore, the base plate 340 is provided with a plurality of square holes spaced apart along the first direction to save on the manufacturing materials of the base plate 340 and thus reduce cost waste.

[0060] Further, see Figure 4 The secondary moving component 320 includes a support arm 321 and a second guide member 327. The second guide member 327 is disposed along a first direction on the side of the support arm 321 near the primary moving component 310. The primary moving component 310 also includes a second mating member 316, which is disposed on the side of the support plate 314 near the secondary moving component 320. The second mating member 316 and the second guide member 327 cooperate to enable the secondary moving component 320 to move relative to the primary moving component 310 along the first direction. The second guide member 327 guides the secondary moving component 320 to prevent it from deviating during movement.

[0061] In this embodiment, the second guide member 327 is configured as a guide rail, and the second mating member 316 is configured as a slider. The slider and the guide rail cooperate to slide the secondary moving component 320 onto the primary moving component 310 along the first direction. In other embodiments, the second guide member 327 can be configured as a groove, with the groove and the slider cooperating; or the second guide member 327 can be configured as a lead screw, and the second mating member 316 can be configured as a nut, with the nut and the lead screw cooperating, etc. All possible embodiments are not listed here, and those skilled in the art can choose according to the actual situation.

[0062] Furthermore, since the automatic replacement of substrate 1 is involved, at least one support arm 321 is provided. In this embodiment, two support arms 321 are provided. In other embodiments, more than two support arms 321 can be provided. The multiple support arms 321 are spaced apart along the second direction. The secondary moving component 320 also includes a synchronizing element 322. The multiple support arms 321 are all fixed together by the synchronizing element 322. The second direction is perpendicular to the first direction. Specifically, the support arm 321 is formed by splicing two oppositely arranged plates. The two ends of the two plates are connected by a pivot. In this embodiment, the synchronizing element 322 is set as a connecting plate so that the two support arms 321 can move synchronously when the secondary moving component 320 moves.

[0063] Furthermore, the secondary moving component 320 also includes a second rack 323, which is disposed on the support arm 321 along the first direction. The second rack 323 and the first rack 342 are disposed opposite each other. The second rack 323 and the gear 311 can mesh. The gear 311 rotates in a clockwise or counterclockwise direction, which can drive the secondary moving component 320 to move along the first direction. The cooperation of the first rack 342, the second rack 323 and the gear 311 is a conventional toothed displacement structure, and its specific structure and mechanical principle will not be described in detail here.

[0064] Further, see Figure 5 The secondary moving component 320 also includes a third guide 324, which is disposed along the first direction on the side of the support arm 321 near the tertiary moving component 330. The tertiary moving component 330 includes a bearing arm 332 and a third mating component 333, which is disposed on the side of the bearing arm 332 near the support arm 321. The third mating component 333 and the third guide 324 cooperate to enable the tertiary moving component 330 to move relative to the secondary moving component 320 along the first direction. The third guide 324 guides the tertiary moving component 330 to prevent it from deviating during movement.

[0065] In this embodiment, the third guide member 324 is configured as a guide rail, and the third mating member 333 is configured as a slider. The slider and the guide rail cooperate to slide the third-stage moving component 330 onto the second-stage moving component 320 along the first direction. In other embodiments, the third guide member 324 can also be configured as a groove, with the groove and the slider cooperating; or the third guide member 324 can be configured as a lead screw, and the third mating member 333 can be configured as a nut, with the nut and the lead screw cooperating, etc. All possible embodiments are not listed here, and those skilled in the art can choose according to the actual situation. The first guide member 341, the second guide member 327, and the third guide member 324 adopt the same structure, which can save on mold manufacturing costs.

[0066] Specifically, at least one bearing arm 332 is provided. In this embodiment, two bearing arms 332 are provided at intervals along the second direction, corresponding one-to-one with the two support arms 321.

[0067] Furthermore, the primary moving component 310 includes a first fixing member 313, and the tertiary moving component 330 includes a second fixing member 331. The first fixing member 313 and the second fixing member 331 are connected by a connector 350. The movement of the primary moving component 310 and the movement of the secondary moving component 320 relative to the primary moving component 310 can both be driven by the connector 350 to move the tertiary moving component 330. In this embodiment, the material of the connector 350 is a material with small deformation to avoid flexible deformation of the connector 350 during long-term use, which would affect the moving accuracy of the tertiary moving component 330. Specifically, two connectors 350 are provided to correspond one-to-one with the two bearing arms 332. At least one of the first fixing member 313 and the second fixing member 331 is configured as an adjustable belt clamp, which allows for easy manual adjustment when the tension of the connector 350 is uneven at different positions during movement. In this embodiment, the connector 350 is configured as a synchronous belt. In other embodiments, the connector 350 may also be a wire rope, a connecting rope, or a metal chain, etc., which will not be listed here.

[0068] Furthermore, the support arm 332 is provided with a pin 334 and an abutment block 335, and the substrate 1 is provided with a pin hole. The pin 334 can be inserted into the pin hole to fix the substrate 1. There are four abutment blocks 335, all of which are L-shaped and are used to abut against the side wall of the substrate 1 to increase the stability of the substrate 1.

[0069] Furthermore, pulleys 325 are provided at both ends of the two support arms 321 along the first direction to facilitate sliding on the connecting member 350. Two shafts are provided between the two pulleys, and the two shafts are fixed by a coupling 326 so that the two pulleys 325 can rotate synchronously. In other embodiments, the two ends of the secondary moving component 320 along the first direction can also be provided as smooth balls or rods, etc. When the primary moving component 310 moves at a speed of V, the moving speed of the secondary moving component 320 is 2V. There is a positional difference between the primary moving component 310 and the secondary moving component 320. At this time, the connecting member 350 is pulled, thereby driving the tertiary moving component 330 to move at a speed of 3V.

[0070] The primary moving component 310, secondary moving component 320, and tertiary moving component 330 in the conveying mechanism provided in this embodiment can all move along a first direction. In practical applications, the first direction can be set as a horizontal direction, a vertical direction, or a direction with any tilt angle, thus possessing versatility. Since the secondary moving component 320 and tertiary moving component 330 in this embodiment are used as an example of a coating equipment, they are configured as separate structures. In other embodiments, the secondary moving component 320 and tertiary moving component 330 can be configured as an integrated structure to increase their load-bearing and transport performance.

[0071] In this embodiment, the coating equipment only processes the coating of substrate 1 transported from one side. In practical applications, in order to improve the processing efficiency of substrate 1, the coating chamber 200 can be set in the middle position, and the conveying mechanism 300 can be set at the other end or around the coating chamber 200, with multiple conveying mechanisms 300 working synchronously.

[0072] Further, see Figures 7-10 This embodiment also provides a vacuum processing method applied to the aforementioned vacuum processing equipment, comprising the following steps:

[0073] S1. After restoring the atmospheric environment to the buffer chamber 100, open the first valve 110;

[0074] S2. Drive the conveying mechanism 300 to move, so that the third-level moving component 330 and part of the second-level moving component 320 leave the buffer chamber 100 and place the substrate 1 in the third-level moving component 330;

[0075] S3. Drive the conveying mechanism 300 to move, and after the conveying mechanism 300 is fully placed in the buffer chamber 100, close the first valve 110.

[0076] S4. After restoring the vacuum environment of the buffer chamber 100, open the second valve 120;

[0077] S5. Drive the conveying mechanism 300 to move, so that the third-level moving component 330 and part of the second-level moving component 320 enter the coating chamber 200;

[0078] S6. The substrate 1 is handed over to the coating mechanism for coating.

[0079] This vacuum processing method can improve the coating efficiency of substrate 1 and increase the processing volume of substrate 1. After the coating of substrate 1 is completed, substrate 1 is transported out in the reverse direction of the vacuum processing method and replaced.

[0080] Specifically, the buffer chamber 100 is equipped with an exhaust port and a vacuum pump to allow the buffer chamber 100 to switch between a vacuum environment and an atmospheric environment.

[0081] In the standby state, the conveying mechanism 300 of the vacuum processing equipment provided in this embodiment is located within the buffer chamber 100, and the first valve 110 and the second valve 120 are both closed. When it is necessary to transport the substrate 1 for coating, the buffer chamber 100 is first restored to the atmospheric environment through the exhaust port. Then, the first valve 110 is opened, and the gear 311 is rotated by the motor 312, thereby driving the primary moving component 310 to move along the first direction. The primary moving component 310 drives the secondary moving component 320 and the tertiary moving component 330 to move out of the buffer chamber 100 into the atmospheric environment. The robotic arm clamps the substrate 1 and places it on the tertiary moving component 330. After placement, the motor 312 drives the gear 311 to rotate in the opposite direction, moving the secondary moving component 320 and the tertiary moving component 330 from the atmospheric environment into the buffer chamber 100. When the secondary moving component 320 and the tertiary moving component 330 have all entered the buffer chamber 100, the first valve 110 is closed and the buffer chamber is sealed. In the buffer chamber 100, a vacuum pump evacuates the chamber to create a vacuum environment. Then, the second valve 120 is opened, and the motor 312 drives the gear 311 to rotate, which in turn moves the secondary moving component 320 and the tertiary moving component 330 into the coating chamber 200. Inside the coating chamber 200, the coating mechanism coats the substrate 1. After coating, the motor 312 drives the gear 311 to rotate, which in turn moves the secondary moving component 320 and the tertiary moving component 330 back into the buffer chamber 100 and closes the second valve 120. Once the buffer chamber 100 is sealed, it returns to atmospheric conditions through the exhaust port. The first valve 110 is then opened, and the motor 312 drives the gear 311 to rotate, which in turn moves the secondary moving component 320 and the tertiary moving component 330 out of the buffer chamber 100. The robotic arm removes the coated substrate 1 and places a new uncoated substrate 1 on the tertiary moving component 330, thus achieving continuous processing of the substrate 1. This vacuum processing equipment saves on the cost of drive components, improves the conveying efficiency of substrate 1, and increases the output of substrate 1.

[0082] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art will be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A conveying mechanism, movable between a first space, a second space, and a third space, characterized in that: include: A primary moving component (310) is disposed within the second space and is capable of moving relative to the second space along a first direction; A secondary moving component (320) is disposed on one side of the primary moving component (310) and is movable relative to the primary moving component (310) along the first direction; A third-level moving component (330) is disposed on the side of the second-level moving component (320) away from the first-level moving component (310) and can move relative to the second-level moving component (320) along the first direction. The third-level moving component (330) is used to carry the substrate (1). The moving speeds of the first-level moving component (310), the second-level moving component (320), and the third-level moving component (330) increase sequentially.

2. The conveying mechanism according to claim 1, characterized in that, The conveying mechanism includes a base plate (340), which is disposed in the second space and extends along the first direction. A first guide member (341) is provided on the base plate (340) along the first direction. The primary moving component (310) includes a support plate (314) and a first mating member (315). The first mating member (315) is disposed on the side of the support plate (314) near the base plate (340). The first mating member (315) and the first guide member (341) cooperate to enable the primary moving component (310) to move relative to the base plate (340) along the first direction.

3. The conveying mechanism according to claim 2, characterized in that, The base plate (340) is further provided with a first rack (342) along the first direction. The first-stage moving component (310) also includes a gear (311). The gear (311) is rotatably disposed on the support plate (314). The gear (311) and the first rack (342) can mesh. The gear (311) can rotate clockwise or counterclockwise to drive the first-stage moving component (310) to move along the first direction.

4. The conveying mechanism according to claim 3, characterized in that, The secondary moving component (320) includes a support arm (321) and a second guide (327), the second guide (327) being disposed along the first direction on the side of the support arm (321) near the primary moving component (310); the primary moving component (310) further includes a second mating component (316), the second mating component (316) being disposed on the side of the support plate (314) near the secondary moving component (320), the second mating component (316) and the second guide (327) cooperating to enable the secondary moving component (320) to move relative to the primary moving component (310) along the first direction.

5. The conveying mechanism according to claim 4, characterized in that, The secondary moving component (320) further includes a synchronizing element (322). At least one support arm (321) is provided. Multiple support arms (321) are spaced apart along a second direction. The multiple support arms (321) are fixed together by the synchronizing element (322). The second direction is perpendicular to the first direction.

6. The conveying mechanism according to claim 4, characterized in that, The secondary moving component (320) further includes a second rack (323), which is disposed on the support arm (321) along the first direction. The second rack (323) and the first rack (342) are disposed opposite to each other. The second rack (323) and the gear (311) can mesh. The gear (311) rotates in the clockwise or counterclockwise direction, which can drive the secondary moving component (320) to move along the first direction.

7. The conveying mechanism according to claim 4, characterized in that, The secondary moving component (320) further includes a third guide (324), which is disposed along the first direction on the side of the support arm (321) near the tertiary moving component (330). The tertiary moving component (330) includes a bearing arm (332) and a third mating component (333), which is disposed on the side of the bearing arm (332) near the support arm (321). The third mating component (333) and the third guide (324) cooperate to enable the tertiary moving component (330) to move relative to the secondary moving component (320) along the first direction.

8. The conveying mechanism according to any one of claims 1-7, characterized in that, The primary moving component (310) further includes a first fixing member (313), and the tertiary moving component (330) further includes a second fixing member (331). The first fixing member (313) and the second fixing member (331) are connected by a connector (350). The movement of the primary moving component (310) and the movement of the secondary moving component (320) relative to the primary moving component (310) can both be driven by the tertiary moving component (330) through the connector (350).

9. A vacuum processing device, characterized in that, The device includes a buffer chamber (100), a coating chamber (200), and a conveying mechanism as described in any one of claims 1-8. The buffer chamber (100) has openings at both ends. A first valve (110) is provided at one end, and a second valve (120) is provided at the other end. The second valve (120) is located between the coating chamber (200) and the buffer chamber (100). The first valve (110) can be opened or closed to connect or isolate the atmosphere from the buffer chamber (100). The second valve (120) can be opened or closed to connect or isolate the buffer chamber (100) from the coating chamber (200).

10. A vacuum treatment method, characterized in that, Applied to the vacuum processing apparatus as described in claim 9, the method includes the following steps: S1. After restoring the atmospheric environment to the buffer chamber (100), open the first valve (110); S2. Drive the conveying mechanism (300) to move, so that the third-level moving component (330) and part of the second-level moving component (320) leave the buffer chamber (100) and place the substrate (1) on the third-level moving component (330); S3. Drive the conveying mechanism (300) to move, and after the conveying mechanism (300) is completely placed in the buffer chamber (100), close the first valve (110); S4. After restoring the vacuum environment of the buffer chamber (100), open the second valve (120); S5. Drive the conveying mechanism (300) to move, so that the third-level moving component (330) and part of the second-level moving component (320) enter the coating chamber (200); S6. The substrate (1) is handed over to the coating mechanism for coating.

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