XY coupling table

Abstract

The embodiment of the present application discloses an XY coupling table, which comprises a bottom plate, a top plate, an X-axis driving mechanism and a Y-axis driving mechanism, the X-axis driving mechanism comprises an XY-axis guide rail assembly, an X-axis mover and an X-axis coil, the Y-axis driving mechanism comprises a YX-axis guide rail assembly, a Y-axis mover and a Y-axis coil, the XY-axis guide rail assembly comprises a first X-axis guide rail assembly and a first Y-axis guide rail assembly, the X-axis mover of the X-axis driving mechanism is connected with the first X-axis guide rail assembly; the YX-axis guide rail assembly comprises a second Y-axis guide rail assembly and a second X-axis guide rail assembly, the Y-axis mover of the Y-axis driving mechanism is connected with the second Y-axis guide rail assembly; and the top plate is connected with the first Y-axis guide rail assembly and the second X-axis guide rail assembly. The present application can significantly reduce the assembly height and the overall volume of the coupling table, remove the drag chain cable, reduce the motion friction and external interference, and greatly improve the alignment accuracy and the fiber coupling efficiency of the coupling table.

Description

Technical Field

[0001] This invention relates to the field of motor drive technology, and in particular to an XY coupling stage. Background Technology

[0002] In semiconductor device packaging and testing applications, fiber optic coupling is a key integration process for achieving efficient optical signal transmission between the chip and an external optical fiber, and it is also a core component connecting optoelectronic devices and communication systems. This process requires precise coupling alignment, thus placing stringent demands on the coupling stage in terms of high precision, small size, low assembly height, and low frictional resistance.

[0003] Traditional XY coupling stages use a two-axis stacked structure, resulting in a large overall height. Furthermore, the upper axis (Y-axis) usually has a cable drag chain, which has high frictional resistance and is prone to introducing external interference, affecting the accuracy and efficiency of coupling alignment. Summary of the Invention

[0004] The technical problem to be solved by the embodiments of the present invention is to provide an XY coupling stage to reduce volume and improve accuracy.

[0005] To address the aforementioned technical problems, this invention provides an XY coupling stage, comprising a base plate, a top plate, an X-axis drive mechanism, and a Y-axis drive mechanism. The X-axis drive mechanism includes an XY-axis guide rail assembly, an X-axis mover, and an X-axis coil disposed on the base plate along the X-axis direction. The Y-axis drive mechanism includes a YX-axis guide rail assembly, a Y-axis mover, and a Y-axis coil disposed on the base plate along the Y-axis direction. The XY-axis guide rail assembly includes a first X-axis guide rail assembly disposed on the base plate along the X-axis direction and a first Y-axis guide rail assembly correspondingly connected to the first X-axis guide rail assembly. The X-axis mover of the X-axis drive mechanism is connected to the first X-axis guide rail assembly. The YX-axis guide rail assembly includes a second Y-axis guide rail assembly disposed on the base plate along the Y-axis direction and a second X-axis guide rail assembly correspondingly connected to the second Y-axis guide rail assembly. The Y-axis mover of the Y-axis drive mechanism is connected to the second Y-axis guide rail assembly. The top plate connects the first Y-axis guide rail assembly and the second X-axis guide rail assembly.

[0006] Furthermore, there are two sets of both the X-axis drive mechanism and the Y-axis drive mechanism.

[0007] Furthermore, the two sets of X-axis coils and the two sets of Y-axis coils are arranged in a cross pattern.

[0008] Furthermore, the base plate is provided with cross-shaped grooves for accommodating and mounting the X-axis coil and the Y-axis coil.

[0009] Furthermore, two sets of X-axis coils and two sets of Y-axis coils are respectively located in the four sides of the cross-shaped groove.

[0010] Furthermore, it also includes epoxy resin for fixing the X-axis coil and the Y-axis coil.

[0011] Furthermore, the XY-axis guide rail assembly also includes a Y-axis intermediate plate. The first X-axis guide rail assembly and the first Y-axis guide rail assembly are connected through the Y-axis intermediate plate. The YX-axis guide rail assembly also includes an X-axis intermediate plate. The second Y-axis guide rail assembly and the second X-axis guide rail assembly are connected through the X-axis intermediate plate.

[0012] Furthermore, the base plate is equipped with two sets of photoelectric switches for travel limit in the X-axis and Y-axis directions, respectively.

[0013] Furthermore, the base plate is equipped with a linear encoder in the X-axis direction and a linear encoder in the Y-axis direction for real-time feedback of the top plate position.

[0014] Furthermore, both the X-axis mover and the Y-axis mover are composed of magnets and magnetic yokes for fixing the magnets.

[0015] The beneficial effects of the present invention are as follows: The present invention achieves parallel driving of two-axis motion by arranging coils in parallel on the bottom plate in the X-axis and Y-axis directions; on the one hand, it significantly reduces the assembly height and overall volume of the coupling stage; on the other hand, it eliminates the drag chain cable of the upper axis (Y-axis), reduces motion friction and external interference, thereby greatly improving the alignment accuracy and fiber coupling efficiency of the coupling stage. Attached Figure Description

[0016] Figure 1 This is a three-dimensional structural diagram of the XY coupling stage from one angle according to an embodiment of the present invention.

[0017] Figure 2 This is a three-dimensional structural diagram of the XY coupling stage from another angle according to an embodiment of the present invention.

[0018] Figure 3 This is a structural diagram of the coil and mover portion according to an embodiment of the present invention.

[0019] Figure 4 This is an internal structural diagram of the XY coupling stage according to an embodiment of the present invention.

[0020] Figure 5 This is a partial structural diagram of the XY coupling stage according to an embodiment of the present invention.

[0021] Figure 6 This is a three-dimensional structural diagram of the base plate according to an embodiment of the present invention.

[0022] Explanation of icon numbers

[0023] 1. Base plate; 2. Top plate; 3. First X-axis guide rail assembly; 4. First Y-axis guide rail assembly; 5. X-axis mover; 6. X-axis coil; 7. Y-axis intermediate plate; 8. Second Y-axis guide rail assembly; 9. Second X-axis guide rail assembly; 10. Y-axis mover; 11. Y-axis coil; 12. X-axis intermediate plate; 13. Cross-shaped groove; 14. Epoxy resin; 15. Photoelectric switch; 16. Linear encoder. Detailed Implementation

[0024] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0025] In this embodiment of the invention, directional indicators (such as up, down, left, right, front, back, etc.) are only used to explain the relative positional relationship and movement of each component in a specific posture (as shown in the figure). If the specific posture changes, the directional indicator will also change accordingly.

[0026] Furthermore, in this invention, descriptions involving "first," "second," etc., are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features.

[0027] Please refer to Figures 1-6 The XY coupling stage of this invention includes a base plate, a top plate, an X-axis drive mechanism, and a Y-axis drive mechanism.

[0028] The X-axis drive mechanism includes an XY-axis guide rail assembly, an X-axis mover, and an X-axis coil mounted on the base plate along the X-axis direction. The Y-axis drive mechanism includes a YX-axis guide rail assembly, a Y-axis mover, and a Y-axis coil mounted on the base plate along the Y-axis direction.

[0029] The XY-axis guide rail assembly includes a first X-axis guide rail assembly disposed on a base plate along the X-axis direction and a first Y-axis guide rail assembly correspondingly connected to the first X-axis guide rail assembly. The X-axis mover of the X-axis drive mechanism is connected to the first X-axis guide rail assembly. The first X-axis guide rail assembly and the first Y-axis guide rail assembly respectively provide X-axis and Y-axis guidance.

[0030] The YX-axis guide rail assembly includes a second Y-axis guide rail assembly disposed on the base plate along the Y-axis direction and a second X-axis guide rail assembly correspondingly connected to the second Y-axis guide rail assembly. The Y-axis mover of the Y-axis drive mechanism is connected to the second Y-axis guide rail assembly. The second Y-axis guide rail assembly and the second X-axis guide rail assembly provide Y-axis and X-axis guidance, respectively.

[0031] The top plate connects to the first Y-axis guide rail assembly and the second X-axis guide rail assembly; that is, the top plate is mounted on the first Y-axis guide rail assembly and the second X-axis guide rail assembly. The top plate can move freely in the X-axis and Y-axis directions. Each X-axis guide rail assembly and Y-axis guide rail assembly consists of guide rails and sliders; this part of the structure is common knowledge in the field and will not be described in detail here.

[0032] In one embodiment, both the X-axis drive mechanism and the Y-axis drive mechanism have two sets. The two sets of X-axis coils and the two sets of Y-axis coils are arranged in a cross pattern. The base plate is provided with cross-shaped grooves for accommodating and mounting the X-axis coils and Y-axis coils, and the cross-shaped grooves correspond to the cross-shaped moving parts.

[0033] When X-axis movement is required, current is supplied to the two sets of X-axis coils. These coils drive the two sets of X-axis movers to move along the X-axis, which in turn drives the top plate to move along the X-axis via the XY-axis guide rail assembly. When Y-axis movement is required, current is supplied to the two sets of Y-axis coils. These coils drive the two sets of Y-axis movers to move along the Y-axis, which in turn drives the top plate to move along the Y-axis via the YX-axis guide rail assembly. The X and Y axes can also move simultaneously; simply energize both the X-axis and Y-axis coils at the same time. Their movements do not affect each other, and the principle is the same as described above.

[0034] In one implementation, two sets of X-axis coils and two sets of Y-axis coils are respectively located in the four sides of the cross-shaped groove. The horizontal ones are X-axis coils, and the vertical ones are Y-axis coils, which provide power when energized.

[0035] In one embodiment, the XY coupling stage also includes epoxy resin for fixing the X-axis coil and the Y-axis coil. Preferably, the epoxy resin is in a cross shape, which serves to fix the coil and provide insulation and positioning.

[0036] In one implementation, the XY-axis guide rail assembly further includes a Y-axis intermediate plate. The first X-axis guide rail assembly and the first Y-axis guide rail assembly are connected via the Y-axis intermediate plate. The YX-axis guide rail assembly also includes an X-axis intermediate plate, and the second Y-axis guide rail assembly and the second X-axis guide rail assembly are connected via the X-axis intermediate plate. The Y-axis intermediate plate is positioned along the Y-axis direction, and the X-axis intermediate plate is positioned along the X-axis direction. Through the intermediate plates, the two guide rail assemblies of the XY-axis guide rail assembly and the YX-axis guide rail assembly are staggered, further reducing the overall height.

[0037] In one implementation, the base plate is provided with two sets of photoelectric switches for travel limit in the X-axis and Y-axis directions, respectively.

[0038] As one implementation, the base plate is also provided with one linear encoder in the X-axis direction and one in the Y-axis direction for real-time feedback of the top plate position.

[0039] In one implementation, both the X-axis mover and the Y-axis mover consist of magnets and magnetic yokes for fixing the magnets. The magnets interact with the coils. This part of the structure is common knowledge in the art and will not be described in detail here.

[0040] This invention allows all cables to be integrated on the base plate, reducing the overall height while significantly reducing frictional resistance, thereby improving the alignment accuracy and working efficiency of the coupling table.

[0041] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An XY coupling stage, characterized in that, The device includes a base plate, a top plate, an X-axis drive mechanism, and a Y-axis drive mechanism. The X-axis drive mechanism includes an XY-axis guide rail assembly, an X-axis mover, and an X-axis coil disposed on the base plate along the X-axis direction. The Y-axis drive mechanism includes a YX-axis guide rail assembly, a Y-axis mover, and a Y-axis coil disposed on the base plate along the Y-axis direction. The XY-axis guide rail assembly includes a first X-axis guide rail assembly disposed on the base plate along the X-axis direction and a first Y-axis guide rail assembly correspondingly connected to the first X-axis guide rail assembly. The X-axis mover of the X-axis drive mechanism is connected to the first X-axis guide rail assembly. The YX-axis guide rail assembly includes a second Y-axis guide rail assembly disposed on the base plate along the Y-axis direction and a second X-axis guide rail assembly correspondingly connected to the second Y-axis guide rail assembly. The Y-axis mover of the Y-axis drive mechanism is connected to the second Y-axis guide rail assembly. The top plate connects the first Y-axis guide rail assembly and the second X-axis guide rail assembly. Both the X-axis mover and the Y-axis mover are composed of magnets and magnetic yokes for fixing the magnets.

2. The XY coupling stage as described in claim 1, characterized in that, There are two sets of both the X-axis drive mechanism and the Y-axis drive mechanism.

3. The XY coupling stage as described in claim 2, characterized in that, The two sets of X-axis coils and the two sets of Y-axis coils are arranged in a cross shape.

4. The XY coupling stage as described in claim 3, characterized in that, The base plate has cross-shaped grooves for accommodating and mounting the X-axis coil and Y-axis coil.

5. The XY coupling stage as described in claim 4, characterized in that, Two sets of X-axis coils and two sets of Y-axis coils are respectively located in the four sides of the cross-shaped groove.

6. The XY coupling stage as described in claim 2, characterized in that, It also includes epoxy resin for fixing the X-axis coil and Y-axis coil.

7. The XY coupling stage as described in claim 1, characterized in that, The XY-axis guide rail assembly also includes a Y-axis intermediate plate. The first X-axis guide rail assembly and the first Y-axis guide rail assembly are connected through the Y-axis intermediate plate. The YX-axis guide rail assembly also includes an X-axis intermediate plate. The second Y-axis guide rail assembly and the second X-axis guide rail assembly are connected through the X-axis intermediate plate.

8. The XY coupling stage as described in claim 1, characterized in that, The base plate is equipped with two sets of photoelectric switches for travel limit in the X-axis and Y-axis directions, respectively.

9. The XY coupling stage as described in claim 1, characterized in that, The base plate is also equipped with a linear encoder in the X-axis direction and a linear encoder in the Y-axis direction for real-time feedback of the top plate position.

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