Carrier state updating method and device and server

Abstract

The invention provides a carrier state updating method and device and a server. The method comprises: acquiring a use state, a detention state and a clean state of a vehicle (41); determining a next state of the vehicle according to the use state, the detention state and the clean state (42); and managing the life cycle of the carrier according to the current state. According to the invention, the next state of the carrier can be determined, the life cycles of different types of carriers can be managed in a unified manner, the accuracy and the utilization rate of the carriers can be improved, and the yield and the productivity of semiconductor products can be improved.

Description

Vehicle status updating method, device, and server Technical Field

[0001] The present disclosure relates to the field of data processing technology, and in particular to a vehicle status updating method, device, and server. Background Art

[0002] Currently, in the process of producing semiconductor products, different types of carriers are needed to provide protection, transportation, and storage functions for semiconductor products. This can effectively avoid problems such as contamination and electrostatic damage caused by the transportation of products between different process stations, effectively improving the yield rate.

[0003] Taking into account the different properties of different carriers such as the products they carry, the number of times they can be used, and the available capacity, various types of carriers are derived, resulting in different service lives of the carriers. This makes it impossible to manage the carriers in a unified manner, which may affect production efficiency.

[0004] Summary of the Invention

[0005] The present disclosure provides a vehicle status updating method, device, and server to address the deficiencies of related technologies.

[0006] According to a first aspect of an embodiment of the present disclosure, a vehicle status updating method is provided, comprising:

[0007] Get the vehicle's usage status, detention status, and clean status;

[0008] A next state of the carrier is determined according to the use state, the detention state, and the clean state.

[0009] Optionally, obtaining the cleanliness status of the carrier includes:

[0010] Obtaining the usage time and usage count of the vehicle;

[0011] When the number of uses is greater than a preset number threshold and / or the usage time is greater than a preset time threshold, determining that the clean state of the carrier is a dirty state;

[0012] When the number of uses is less than or equal to the preset number threshold and the usage time is less than or equal to the preset time threshold, it is determined that the clean state of the carrier is a clean state.

[0013] Optionally, obtaining the usage time of the vehicle includes:

[0014] Obtain the binding time and unbinding time of the carrier corresponding to the same batch of products; the binding time refers to the time when the product is placed in the carrier, and the unbinding time refers to the time when the product leaves the carrier;

[0015] Determine the current usage time based on the binding time and the unbinding time;

[0016] The usage time of the vehicle is calculated according to the historical usage time of the vehicle and the current usage time.

[0017] Optionally, when it is detected that the clean state of the carrier changes to the dirty state, obtaining the usage state of the carrier includes:

[0018] Obtaining the number of cleaning times of the carrier and a preset number threshold;

[0019] When the number of cleanings is equal to the preset number threshold, the current state of the carrier is determined to be an unavailable state; when the number of cleanings is less than the preset number threshold, the current state of the carrier is determined to be maintained; the current state is an empty state or an in-use state.

[0020] Optionally, obtaining the cleanliness status of the carrier includes:

[0021] Obtaining the pollution level of the carrier and the pollution level of the process site;

[0022] When the contamination level of the carrier matches the contamination level of the process site, it is determined that the carrier has successfully entered the process site.

[0023] Optionally, obtaining the clean status of the carrier further includes:

[0024] When the pollution level of the carrier does not match the pollution level of the process site, determining whether there is a conversion path between the pollution level of the carrier and the pollution level of the process site;

[0025] When it is determined that a conversion path exists, it is determined that the carrier has successfully entered the process site; when it is determined that no conversion path exists, it is determined that the carrier has failed to enter the process site.

[0026] Optionally, the method further includes:

[0027] The carrier is created according to a preset carrier model; the initial state of the carrier is an unusable state, the clean state is a dirty state, and the detained state is undetained.

[0028] Optionally, the preset carrier model is stored in a basic data module of the semiconductor manufacturing execution system; the basic data module is used to create preset carrier models corresponding to various carriers and maintain carrier status.

[0029] Optionally, the method further includes:

[0030] In response to detecting an operation of editing the specification information of the carrier, obtaining a detection field in the specification information of the carrier; the detection field includes a detection status;

[0031] When the detection field is not in the detected state, determining that the specification information of the carrier is in a non-editable state;

[0032] When the detection field is in the detected state, comparing the current account with the editing account that edited the specification information to see if they are the same account;

[0033] When the current account and the editing account are different, it is determined that the current account is denied editing the specification information of the vehicle; when the current account and the editing account are the same, it is determined that the current account is allowed to edit the specification information of the vehicle and the specification information is frozen after the editing is completed.

[0034] Optionally, the specification information of the carrier is stored in a carrier module of the semiconductor manufacturing execution system; the carrier module is used to manage carrier services.

[0035] Optionally, the specification information of the carrier is stored in the carrier module of the semiconductor manufacturing execution system, and the specification information is used by the carrier module and the work-in-process module; the carrier module is used to manage carrier business; and the work-in-process module is used to batch specify carriers.

[0036] Optionally, the method further includes:

[0037] generating information to be reviewed in response to detecting a request to activate specification information of the vehicle;

[0038] In response to the pending review information being approved, it is determined that the vehicle will be put into use.

[0039] Optionally, the method further includes:

[0040] In response to detecting an operation of upgrading the specification information, generating a new version of the specification information; the new version of the specification information is different in version from the original version of the specification information but has the same other contents as the original version;

[0041] In response to detecting an operation of editing the specification information of the new version, editing the specification information of the new version and freezing it;

[0042] In response to detecting an operation of activating the new version of the specification information, the new version of the specification information is activated and the state of the original version of the specification information is updated to an inactivated state.

[0043] Optionally, the method further includes:

[0044] In response to detecting the operation of cloning specification information, generating specification information with a new name; the specification information with the new name is different from the specification information with the original name but has the same other contents;

[0045] In response to detecting an operation of editing the specification information of the new name, editing the specification information of the new name and freezing it;

[0046] In response to detecting an operation to activate the specification information of the new name, the specification information of the new name is activated.

[0047] Optionally, the method further includes:

[0048] Obtain vehicle data in XML format according to the TibcoRV message subscription method. The vehicle data includes the vehicle's usage status, detention status, and clean status. The vehicle data also includes the BPEL name corresponding to the server.

[0049] A Java file corresponding to the BPEL name is found; the Java file includes a releaseMaterial method;

[0050] Calling the releaseMaterial method causes the vehicle module to process the service; wherein the processing of the service includes operating the database to update the use status, detention status and clean status of the vehicle;

[0051] In response to the completion of the business process, a response message in XML format is generated and returned.

[0052] According to a second aspect of an embodiment of the present disclosure, a vehicle status updating method is provided, comprising:

[0053] In response to detecting an operation of configuring a vehicle, displaying a creation page; the creation page includes a creation button and specification parameters;

[0054] In response to an operation of configuring specification parameters, obtaining specification information corresponding to the specification parameters;

[0055] In response to detecting an operation of creating a vehicle, the vehicle is created according to the specification information and the life cycle of the vehicle is managed.

[0056] Optionally, the method further includes:

[0057] In response to detecting an operation of displaying vehicle specification information, displaying the vehicle specification information;

[0058] In response to detecting an operation to edit specification information of a vehicle, the input specification information is acquired and updated.

[0059] Optionally, the method further includes:

[0060] In response to detecting an operation of displaying vehicle specification information, displaying the vehicle specification information;

[0061] In response to detecting an operation of upgrading the specification information, generating a new version of the specification information; the new version of the specification information is different in version from the original version of the specification information but has the same other contents as the original version;

[0062] In response to detecting an operation of editing the specification information of the new version, editing the specification information of the new version and freezing it;

[0063] In response to detecting an operation of activating the new version of the specification information, the new version of the specification information is activated and the state of the original version of the specification information is updated to an inactivated state.

[0064] Optionally, the method further includes:

[0065] In response to detecting an operation of displaying vehicle specification information, displaying the vehicle specification information;

[0066] In response to detecting the operation of cloning specification information, generating specification information with a new name; the specification information with the new name is different from the specification information with the original name but has the same other contents;

[0067] In response to detecting an operation of editing the specification information of the new name, editing the specification information of the new name and freezing it;

[0068] In response to detecting an operation to activate the specification information of the new name, the specification information of the new name is activated.

[0069] Optionally, the method further includes:

[0070] In response to detecting an operation of displaying vehicle specification information, displaying the vehicle specification information;

[0071] In response to detecting an operation of detaining a carrier or releasing a carrier, the detention status of the carrier is adjusted to detained or not detained, respectively.

[0072] Optionally, the method further includes:

[0073] In response to detecting an operation of displaying vehicle specification information, displaying the vehicle specification information;

[0074] In response to detecting an operation of scrapping a vehicle, the use status of the vehicle is adjusted to a scrapped status.

[0075] Optionally, the method further includes:

[0076] In response to detecting an operation of binding a carrier to a batch, binding the carrier to a target batch;

[0077] In response to detecting an operation of unbinding a batch from a carrier, the target batch is unbound from the carrier.

[0078] Optionally, the method further includes:

[0079] In response to detecting an operation of displaying vehicle specification information, displaying the vehicle specification information;

[0080] In response to detecting an operation of adjusting the position of the carrier, the position of the carrier is adjusted to a target position.

[0081] According to a third aspect of an embodiment of the present disclosure, a vehicle status updating device is provided, comprising:

[0082] A status acquisition module is used to obtain the use status, detention status and clean status of the vehicle;

[0083] A state determination module is used to determine a next state of the carrier according to the use state, the detention state and the clean state.

[0084] Optionally, the status acquisition module includes:

[0085] A duration acquisition submodule is used to obtain the usage duration and usage count of the vehicle;

[0086] A times acquisition submodule is used to obtain the number of times the vehicle is used;

[0087] a dirty state determination submodule, configured to determine that the clean state of the carrier is a dirty state when the number of uses is greater than a preset number threshold and / or the usage duration is greater than a preset duration threshold;

[0088] The clean state determination submodule is configured to determine that the clean state of the vehicle is a clean state when the number of uses is less than or equal to the preset number threshold and the usage time is less than or equal to the preset time threshold.

[0089] Optionally, the duration acquisition submodule includes:

[0090] A time acquisition unit, configured to acquire the binding time and unbinding time of the carrier corresponding to the same batch of products; the binding time refers to the time when the product is placed in the carrier, and the unbinding time refers to the time when the product leaves the carrier;

[0091] A time determination unit, configured to determine the current usage time according to the binding time and the unbinding time;

[0092] The time calculation unit is used to calculate the usage time of the vehicle based on the historical usage time of the vehicle and the current usage time.

[0093] Optionally, when it is detected that the clean state of the carrier changes to a dirty state, the state acquisition module includes:

[0094] A times acquisition submodule is used to obtain the number of cleaning times of the carrier and a preset number threshold;

[0095] The state determination submodule is used to determine that the current state of the carrier is an unavailable state when the number of cleaning times is equal to the preset number threshold; when the number of cleaning times is less than the preset number threshold, determine to maintain the current state of the carrier; the current state is an empty state or an in-use state.

[0096] Optionally, the status acquisition module includes:

[0097] A pollution level acquisition submodule, used to obtain the pollution level of the carrier and the pollution level of the process site;

[0098] The site entry determination submodule is used to determine that the carrier has successfully entered the process site when the pollution level of the carrier matches the pollution level of the process site.

[0099] Optionally, the status acquisition module further includes:

[0100] a conversion path determination submodule, configured to determine whether a conversion path exists between the pollution level of the carrier and the pollution level of the process site when the pollution level of the carrier does not match the pollution level of the process site;

[0101] The entry determination submodule is used to determine that the carrier has successfully entered the process site when it is determined that a conversion path exists; and to determine that the carrier has failed to enter the process site when it is determined that no conversion path exists.

[0102] Optionally, the device further comprises:

[0103] The vehicle creation module is used to create the vehicle according to a preset vehicle model; the initial state of the vehicle is an unusable state, the clean state is a dirty state, and the detained state is undetained.

[0104] Optionally, the preset carrier model is stored in a basic data module of the semiconductor manufacturing execution system; the basic data module is used to create preset carrier models corresponding to various carriers and maintain carrier status.

[0105] Optionally, the device further comprises:

[0106] a field acquisition submodule, configured to acquire a detection field in the specification information of the vehicle in response to detecting an operation of editing the specification information of the vehicle; the detection field includes a detection status;

[0107] a non-editable state determining submodule, configured to determine that the specification information of the carrier is in a non-editable state when the detection field is not in the detected state;

[0108] An account comparison submodule, configured to compare, when the detection field is in the detected state, whether the current account and the editing account that edited the specification information are the same account;

[0109] an editing rejection submodule, configured to, when the current account and the editing account are different, determine to reject the current account from editing the specification information of the vehicle;

[0110] The editing permission submodule is used to determine whether the current account is allowed to edit the specification information of the vehicle and to freeze the specification information after the editing is completed when the current account and the editing account are the same.

[0111] Optionally, the specification information of the carrier is stored in a carrier module of the semiconductor manufacturing execution system; the carrier module is used to manage carrier services.

[0112] Optionally, the specification information of the carrier is stored in the carrier module of the semiconductor manufacturing execution system, and the specification information is used by the carrier module and the work-in-process module; the carrier module is used to manage carrier business; and the work-in-process module is used to batch specify carriers.

[0113] Optionally, the device further comprises:

[0114] an audit information generating module, configured to generate information to be audited in response to detecting a request for activating specification information of the vehicle;

[0115] The vehicle use module is used to determine that the vehicle will be put into use in response to the information to be reviewed being approved.

[0116] Optionally, the device further comprises:

[0117] A specification information generating module, configured to generate a new version of specification information in response to detecting an operation of upgrading specification information; the new version of specification information is different from the original version of specification information in version but has the same other contents as the original version;

[0118] a specification information editing module, configured to edit and freeze the specification information of the new version in response to detecting an operation of editing the specification information of the new version;

[0119] The specification information activation module is configured to activate the new version of the specification information and update the state of the original version of the specification information to an inactivated state in response to detecting an operation of activating the new version of the specification information.

[0120] Optionally, the device further comprises:

[0121] a specification information generating module, configured to generate specification information with a new name in response to detecting an operation of cloning specification information; the specification information with the new name is different from the specification information with the original name but has the same other contents;

[0122] a specification information editing module, configured to edit and freeze the specification information of the new name in response to detecting an operation of editing the specification information of the new name;

[0123] The specification information activation module is configured to activate the specification information of the new name in response to detecting an operation of activating the specification information of the new name.

[0124] Optionally, the device further comprises:

[0125] The vehicle data acquisition module is used to obtain vehicle data in XML format according to the TibcoRV message subscription method. The vehicle data includes the vehicle's usage status, detention status, and clean status; the vehicle data also includes the BPEL name corresponding to the server;

[0126] A Java file query module, used to query the Java file corresponding to the BPEL name; the Java file includes a releaseMaterial method;

[0127] A business processing module is used to call the releaseMaterial method to enable the vehicle module to process the business; wherein the business processing includes operating the database to update the use status, detention status and clean status of the vehicle;

[0128] The response information returning module is used to generate and return response information in XML format in response to the completion of business processing.

[0129] According to a fourth aspect of an embodiment of the present disclosure, a vehicle status updating device is provided, comprising:

[0130] A creation page display module, configured to display a creation page in response to detecting an operation of configuring a vehicle; the creation page includes a creation button and specification parameters;

[0131] A specification information acquisition module, configured to acquire specification information corresponding to the specification parameters in response to an operation of configuring the specification parameters;

[0132] The lifecycle management module is used to create the vehicle according to the specification information and manage the lifecycle of the vehicle in response to detecting the operation of creating the vehicle.

[0133] Optionally, the device further comprises:

[0134] a specification information display module, configured to display the specification information of the vehicle in response to detecting an operation of displaying the specification information of the vehicle;

[0135] The specification information updating module is used to obtain the input specification information and update the specification information in response to detecting an operation of editing the specification information of the vehicle.

[0136] Optionally, the device further comprises:

[0137] a specification information display module, configured to display the specification information of the vehicle in response to detecting an operation of displaying the specification information of the vehicle;

[0138] A specification information generating module, configured to generate a new version of specification information in response to detecting an operation of upgrading specification information; the new version of specification information is different from the original version of specification information in version but has the same other contents as the original version;

[0139] a specification information editing module, configured to edit and freeze the specification information of the new version in response to detecting an operation of editing the specification information of the new version;

[0140] The specification information activation module is configured to activate the new version of the specification information and update the state of the original version of the specification information to an inactivated state in response to detecting an operation of activating the new version of the specification information.

[0141] Optionally, the device further comprises:

[0142] a specification information display module, configured to display the specification information of the vehicle in response to detecting an operation of displaying the specification information of the vehicle;

[0143] a specification information generating module, configured to generate specification information with a new name in response to detecting an operation of cloning specification information; the specification information with the new name is different from the specification information with the original name but has the same other contents;

[0144] a specification information editing module, configured to edit and freeze the specification information of the new name in response to detecting an operation of editing the specification information of the new name;

[0145] The specification information activation module is configured to activate the specification information of the new name in response to detecting an operation of activating the specification information of the new name.

[0146] Optionally, the device further comprises:

[0147] a specification information display module, configured to display the specification information of the vehicle in response to detecting an operation of displaying the specification information of the vehicle;

[0148] The detention status determination module is used to adjust the detention status of the vehicle to detained or not detained in response to detecting the operation of detaining the vehicle or releasing the vehicle.

[0149] Optionally, the device further comprises:

[0150] a specification information display module, configured to display the specification information of the vehicle in response to detecting an operation of displaying the specification information of the vehicle;

[0151] The scrapped state adjustment module is used to adjust the use state of the vehicle to a scrapped state in response to detecting an operation of scrapping the vehicle.

[0152] Optionally, the device further comprises:

[0153] a batch binding module, configured to bind the carrier to a target batch in response to detecting an operation of binding the carrier to a batch;

[0154] The batch unbinding module is configured to unbind the target batch from the carrier in response to detecting an operation of unbinding a batch from the carrier.

[0155] Optionally, the device further comprises:

[0156] a specification information display module, configured to display the specification information of the vehicle in response to detecting an operation of displaying the specification information of the vehicle;

[0157] The vehicle position adjustment module is configured to adjust the position of the vehicle to a target position in response to detecting an operation of adjusting the vehicle position.

[0158] According to a fifth aspect of an embodiment of the present disclosure, a server is provided, including:

[0159] Memory and processor;

[0160] The memory is used to store a computer program executable by the processor;

[0161] The processor is configured to execute the computer program in the memory to implement the method according to any one of the first aspect or the second aspect.

[0162] According to a sixth aspect of an embodiment of the present disclosure, a non-transitory computer-readable storage medium is provided, which, when an executable computer program in the storage medium is executed by a processor, can perform the method described in any one of the first aspect or the second aspect.

[0163] The technical solutions provided by the embodiments of the present disclosure may have the following beneficial effects:

[0164] The solution provided by the disclosed embodiment can obtain the carrier's usage status, detention status, and clean status; then, the carrier's next status is determined based on the usage status, detention status, and clean status. In this way, the solution of this embodiment can determine the carrier's next status and uniformly manage the lifecycles of different types of carriers, thereby improving carrier accuracy and utilization, thereby facilitating improved semiconductor product yield and productivity.

[0165] It is to be understood that the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the disclosure. BRIEF DESCRIPTION OF THE DRAWINGS

[0166] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present disclosure and, together with the description, serve to explain the principles of the present disclosure.

[0167] FIG. 1 is a block diagram showing a semiconductor manufacturing execution system according to an exemplary embodiment.

[0168] FIG2 is a diagram showing an application architecture of a semiconductor manufacturing execution system according to an exemplary embodiment.

[0169] FIG. 3 is a flowchart showing an operation of a semiconductor manufacturing execution system according to an exemplary embodiment.

[0170] Fig. 4 is a flow chart showing a method for updating vehicle status according to an exemplary embodiment.

[0171] FIG5 is a flow chart showing a method of obtaining a clean status of a carrier according to an exemplary embodiment.

[0172] Fig. 6 is a flow chart showing a method of obtaining the usage time of a vehicle according to an exemplary embodiment.

[0173] Fig. 7 is a flow chart showing a method of obtaining the usage status of a vehicle according to an exemplary embodiment.

[0174] Fig. 8 is a schematic diagram showing a life cycle according to an exemplary embodiment.

[0175] FIG9 is a flow chart showing a method of obtaining a clean status of a carrier according to an exemplary embodiment.

[0176] Fig. 10 is a flow chart showing the life cycle of a vehicle according to an exemplary embodiment.

[0177] Fig. 11 is a flow chart showing a vehicle management process according to an exemplary embodiment.

[0178] Fig. 12 is a flowchart showing a method of editing specification information of a vehicle according to an exemplary embodiment.

[0179] Fig. 13 is a flow chart showing a method of activating specification information of a vehicle according to an exemplary embodiment.

[0180] FIG14 is a flow chart showing a method of obtaining a clean status of a carrier according to an exemplary embodiment.

[0181] FIG15 is a flowchart showing a method of obtaining vehicle status according to an exemplary embodiment.

[0182] Fig. 16 is a flow chart showing a method of obtaining vehicle status according to an exemplary embodiment.

[0183] Fig. 17 is a block diagram showing a system architecture of a modeling tool according to an exemplary embodiment.

[0184] Fig. 18 is a block diagram showing a system architecture of a user operation platform according to an exemplary embodiment.

[0185] FIG19 is a flowchart showing a method for updating vehicle status according to an exemplary embodiment.

[0186] Fig. 20 is a schematic diagram showing a display specification parameter according to an exemplary embodiment.

[0187] FIG21 is a schematic diagram showing a method of creating a vehicle according to an exemplary embodiment.

[0188] FIG. 22 is a schematic diagram showing a detained state of a carrier according to an exemplary embodiment.

[0189] FIG. 23 is a schematic diagram showing an undetained state of a carrier according to an exemplary embodiment.

[0190] Fig. 24 is a schematic diagram showing a scrapping status according to an exemplary embodiment.

[0191] FIG25 is a schematic diagram showing an unbundling vehicle according to an exemplary embodiment.

[0192] FIG. 26 is a schematic diagram showing a method of adjusting a position of a carrier according to an exemplary embodiment.

[0193] Fig. 27 is a block diagram of a vehicle status updating device according to an exemplary embodiment.

[0194] Fig. 28 is a block diagram of a vehicle status updating device according to an exemplary embodiment.

[0195] Fig. 29 is a block diagram of a server according to an exemplary embodiment. DETAILED DESCRIPTION

[0196] Exemplary embodiments will be described in detail herein, with examples shown in the accompanying drawings. When the following description refers to the drawings, identical numbers in different drawings represent identical or similar elements, unless otherwise indicated. The exemplary embodiments described below do not represent all embodiments consistent with the present disclosure. Rather, they are merely examples of devices consistent with certain aspects of the present disclosure, as detailed in the appended claims. It should be noted that, unless there is a conflict, the features of the following embodiments and implementations may be combined with each other.

[0197] In order to solve the above technical problems, the embodiments of the present disclosure provide a carrier status update method and device, a server, and a non-transitory computer-readable storage medium. The above carrier status update method can be applied to a semiconductor manufacturing execution system. The semiconductor manufacturing execution system is used for full-process manufacturing management of semiconductor packaging and testing, executing production orders, tracking the real-time status of equipment resources (such as carriers, materials, etc.) to completing semiconductor products, and achieving the effect of information sharing and process automation implementation in the factory. When a real-time event occurs in the factory, the above-mentioned semiconductor manufacturing execution system will respond and report the event in a timely manner, and use the current data to guide the user to handle the event, thereby maximizing production efficiency and yield, which is conducive to reducing production costs and improving production management. In addition, the above-mentioned semiconductor manufacturing execution system adopts a modular design, which can meet the production requirements of different packaging and testing process technologies, and has excellent flexibility and scalability, thereby achieving the maximum input-output ratio and achieving the high flexibility and personalized production model required by Industry 4.0.

[0198] Figure 1 is a block diagram of a semiconductor manufacturing execution system according to an exemplary embodiment. Referring to Figure 1 , the semiconductor manufacturing execution system includes a basic data module, a process flow module, a production planning module, a work-in-progress module, an engineering management module, a recipe module, an equipment module, a machine limit module, a carrier module, a material module, a fixture module, and a packaging module.

[0199] In one embodiment, the basic data module can be a unified basic data model platform that provides basic data modeling functions for the semiconductor manufacturing execution system, including but not limited to: factory modeling, equipment modeling, system status modeling, packaging modeling, user authority modeling, recipe (different semiconductor devices require different programs, recipes or menus) basic data modeling, material basic data modeling, process step flow modeling, strategy modeling, data acquisition basic data modeling and alarm basic data modeling. It is understandable that the basic data model, as a standard framework, provides users with the basic general functions they need and provides a series of customized extension settings, such as unified naming conventions, unified data enumeration types and unified business SQL management, which are conducive to the rapid construction of applications; the definition of objects in multiple cross-applications is standardized, supports multiple languages ​​and multiple units, is more flexible, and has stronger scalability and flexibility.

[0200] In this embodiment, the factory modeling function is used to support the maintenance of factory basic data, support multi-factory mode, and support the creation of areas under the factory.

[0201] In this embodiment, the device modeling function is used to support the creation of device master data and the maintenance of device port data.

[0202] In this embodiment, the system status modeling function is used to support batch status maintenance, equipment status maintenance, material status maintenance, carrier status maintenance, fixture status maintenance, and the like.

[0203] In this embodiment, the packaging modeling is used to maintain packaging-related attribute data and to uniformly maintain and manage packaging methods of different specifications.

[0204] In this embodiment, user authority modeling is used to support the creation and maintenance of users, user groups, and user roles, and to support the maintenance of password verification for user menus and user operation interfaces.

[0205] In this embodiment, recipe basic data modeling is used to support the creation and maintenance of process menu data and the maintenance of recipe equipment data relationships.

[0206] In this embodiment, material basic data modeling is used to support the creation and maintenance of material basic data.

[0207] In this embodiment, process step flow modeling is used to support the creation and maintenance of basic data of work steps, processes, sections, and processes, support visual interface editing of processes, support the creation and maintenance of branch processes, and support the creation and maintenance of rework processes.

[0208] In this embodiment, strategy modeling is used to support product-level, process-level, and work-step-level process modeling, so as to facilitate the semiconductor manufacturing execution system to select different equipment and recipes for business operations in the actual production process according to different strategy configurations.

[0209] In this embodiment, the data collection basic data modeling is used to support the creation and maintenance of data collection details and the maintenance of data collection rules.

[0210] In this embodiment, the alarm basic data modeling is used to support alarm system information maintenance, alarm triggering conditions for maintenance management, and alarm triggering subsequent actions for maintenance management.

[0211] In one embodiment, the process flow module can allow users to define products and their corresponding process flows, including each step type and related process control strategies, thereby providing process management specifications for the semiconductor manufacturing execution system. Taking version control as an example, the process flow module can provide a complete version control mechanism. All activated processes in the system must strictly comply with this version control system, which can avoid errors in production process data and thus avoid serious accidents. Taking process definition as an example, the process flow module can support multi-path and rework, and can automatically select paths based on pre-set conditions during on-site operations. The process flow module can also support various product process rule controls, and can perform different process controls according to product and process conditions. The above conditions can be subdivided into step level, process level, process level, product level and batch level.

[0212] In this embodiment, the process step flow modeling function is used to support the creation and maintenance of basic data of work steps, processes, sections and processes, support visual interface editing of processes, support the creation and maintenance of branch processes, and support the creation and maintenance of rework processes.

[0213] In this embodiment, the product process configuration function is used to configure different process flows according to different products. Different recipes and equipment can be selected according to different strategies for the same product and process.

[0214] In one embodiment, the work-in-progress module can manage the processing of work-in-progress, guide operators (i.e., users) to process products according to pre-set process requirements, and track and record processing information in detail. Among them, the most important job management function allows tracking of multiple batches for simultaneous processing and provides historical traceability of batches. In addition to the commonly used create lot (CreateLot) entry (Track In) / exit (Track Out), other functions include: batch (Split) / merge (Merge), hold (Hold) / release (Relase), skip (Skip) / future action (Future Action), internal rework (Internal-rework) / external rework (External-rework), batch scrapping, batch cancellation and scrapping, batch designated carriers, special business batch exit, batch exit, multi-core bonding entry, integrated editing and testing entry and exit, etc.

[0215] In one embodiment, the project management module can manage project-related business, including but not limited to: work permit management, QTime management, BOM management, process card management and batch reservation.

[0216] In one embodiment, the carrier module can support the management of carrier-related services, such as creating carriers, cleaning carriers, binding carriers, unbinding carriers, pausing carriers, and releasing carriers, etc., and supports the management of the carrier's service life, the number of times it is used, and the management of carrier types. The carrier creation function is used to create the specification information of the carrier. The carrier cleaning function is used to re-clean new carriers and carriers after use. The carrier binding function is used to support the binding of carrier data and batches. The carrier unbinding function is used to support the unbinding operation of carrier and batch data. The carrier pause function is used to pause the carrier. The carrier release function is used to resume the paused carrier.

[0217] In one embodiment, the semiconductor manufacturing execution system adopts CS architecture design and is developed based on the Client-Server (C / S, client-server) architecture model to ensure system stability, smooth interface operation, and enhance user experience. Among them, the server is responsible for data management, and the client is responsible for completing interactive tasks with users. The client module is divided into two parts: one part is for basic data modeling, named FactoryModeler (Modeler), and the other part is for the user's operation interaction interface, named Operator Interface Client (OIC). The front end uses the C# language winform framework, and the server side uses Java language and is developed using the sping boot 2.x framework. The data of the front and back end communications are exchanged in XML format, and Tibco Rendezvous (Tibco RV) is used for the corresponding message publishing and subscription processing. The database is selected as Oracle 19C. The technical architecture is shown in Figure 2.

[0218] Combining Figures 1 and 2, the correspondence between systems and modules in the semiconductor manufacturing execution system includes:

[0219] Functional modules that implement process control during the manufacturing process: engineering management module and machine limit management module in the OIC system.

[0220] Functional modules for realizing record traceability in the process: production planning module, work-in-progress module, batch module, and packaging module in the OIC system.

[0221] Key functional modules that assist in the manufacturing process: equipment module, process menu module, process flow module, material module, and carrier module in the OIC system.

[0222] Core data support module in the process: basic data module in the FactoryModeler system.

[0223] In conjunction with the semiconductor manufacturing execution system shown in Figures 1 and 2, the operation process of the carrier module includes:

[0224] Carrier creation: Business data is entered on the OIC front-end page. The MES.MOdule.Views.Carrier code module in the front-end code module corresponds to the front-end carrier management module. The corresponding code MES.MOdule.Views.Durable.CarrierCreate.cs under this module represents the carrier creation page. The data is encapsulated in XML format on the page. Its core parameter is the BPEL name corresponding to the server, "DurableCCarrierCreatereate.bpel".

[0225] The server obtains the BPEL XML data named "CarrierCreate.bpel" according to the TibcoRV message subscription method. The server automatically finds the corresponding BPEL according to the BPEL name transmitted by the front end, and then enters the com.zisemi.mes.solution.event.carrier.CarrierCreateEvent.java file in the zisemi-mes-be-solution under the Java entry program solution module of the BPEL configuration, executes the event method, and the event method calls the com.zisemi.mes.core.carrier corresponding to the server in the Core code module to implement business processing (the underlying ORM framework and JDBC technology are used to operate the database and complete data updates). After the business is processed, the corresponding message is returned, and the message is transmitted back to the front end for response via XML.

[0226] It should be noted that the business code logic of other functions under this vehicle module is the same as above. The only changes are: the front-end page is different, the BPEL name input to the server by the front-end is different, and the format of the input XML data is different. The rest of the server-side code logic flow remains consistent.

[0227] Continuing to refer to FIG. 1 and FIG. 2 , FIG. 3 is a flow chart showing the overall operation of a semiconductor manufacturing execution system according to an exemplary embodiment. Referring to FIG. 3 , the flow chart includes steps 31 to 37:

[0228] In step 31, the FactoryModeler client in the system creates basic data through the basic data module in response to the interaction with the user.

[0229] 1. Create factory information; 2. Create user information; 3. Create user group information; 4. Create user group menu permissions; 5. Create equipment type data; 6. Create equipment status data; 7. Create equipment data; 8. Create equipment group information; 9. Create equipment port information; 10. Create fixture type information; 11. Create fixture status information; 12. Create fixture information; 13. Create carrier type information; 14. Create carrier status information; 15. Create carrier information; 16. Create raw material type information; 17. Create raw material status information; 18. Create batch type information; 19. Create batch status information; 20. Create warehouse information; 21. Create storage location information; 22. Create shelf information; 23. Create product type information; 24. Create product information; 25. Create product packaging specification information; 26. Create process step information; 27. Create sub-process information (multiple process steps are connected in series to form a sub-process); 28. Create main process information (multiple sub-processes are connected in series to form a main process); 29. ​​Create recipe information.

[0230] In step 32, the FactoryModeler client concatenates the basic information data into basic business underlying data through the basic data module.

[0231] 1. Create a relationship between equipment and recipes to support the selection of equipment for recipe processing when using equipment processing in the process.

[0232] 2. Create a relationship between products and processes to support the flow of product processes in the manufacturing process. The following port descriptions: (1) If the port involves the relationship between equipment and materials, the port refers to the material loading port on the equipment; (2) If the port involves the relationship between equipment and fixtures, the port refers to the equipment location where the fixture is installed, also known as the station.

[0233] 3. Create a relationship between the equipment port and the material type to support the subsequent material loading business, that is, loading the material into the machine through the corresponding port.

[0234] 4. Create a relationship between the device port and the fixture type to support the subsequent fixture installation business, that is, install the fixture on the machine through the corresponding port.

[0235] 5. Create a binding between material type and carrier type to support the selection of the appropriate carrier based on the raw material type of the batch when binding the subsequent carrier to the batch.

[0236] 6. Production Strategy Configuration: Configure the equipment and associated recipes for this step in the product's process. Production strategies include three modes: Product + Process + Step, Process + Step, and Step.

[0237] During production, if the product, process, and work step all match the product + process + work step model, the equipment and recipes configured in that model are used for processing. If the product, process, or work step does not match the product + process + work step model, the process + work step model is matched. If the process + work step model matches, the equipment and recipes configured in that process + work step model are used for processing. If the process + work step model does not match, the process continues to match the work step model. If the work step model matches, the equipment and recipes configured in that work step model are used. If not, the process will be blocked during processing, and the appropriate equipment cannot be selected for processing.

[0238] In step 33, the OIC client in the system may perform production plan creation and plan execution operations through the production plan module in response to the interaction with the user.

[0239] 1. The system enters the production plan, such as the planned output of a product within a period of time, the planned start time, the planned end time, the priority and the person in charge.

[0240] 2. Plan execution: Create a work order and formulate the work order information based on the actual inventory and production capacity of the workshop, such as the original planned order number, work order number, work order product from the planned order product, work order quantity less than the planned order data, priority and other related information.

[0241] In step 34, the OIC client in the system performs the manufacturing process through the work-in-progress module and the batch management module.

[0242] 1. Create a batch: Use the batch creation function of the batch module to generate a batch (batch creation) based on the work order information to complete the batch creation.

[0243] 2. Batch processing: Use the inbound and outbound operations of the work-in-process module and batch module to perform batch operations

[0244] It can be understood that batch-related businesses include the use of functional modules in the work-in-process module and the batch module, such as batch suspension, batch cancellation suspension, batch scrapping, batch cancellation scrapping, batching, batch merging, batch in and batch out to support process business, etc.

[0245] In step 35 , the OIC client in the system controls the batch outbound operation through the batch outbound function of the work-in-progress module or performs the vehicle binding operation using the vehicle binding function of the vehicle module.

[0246] Batch outbound vehicle binding: When performing outbound operations, select vehicle information and bind the vehicle. Vehicle binding function to bind the vehicle: Enter the vehicle binding function interface, select batch information, select the vehicle information to be bound, and click Bind to bind the vehicle. Involving vehicle-related business: Vehicle cleaning is required before binding. The vehicle status update process involves the use of scenarios such as vehicle suspension, vehicle unpause, vehicle scrapping, and vehicle scrapping cancellation.

[0247] In step 36, the OIC client in the system manages the batch process by batch entry and exit of the work-in-progress module. The process includes the following process stages: dicing - die placement - bonding - packaging - testing.

[0248] In this step, during the process: for process-related business, the process flow management module is used: the batch is in the process route of the inbound and outbound operations, and processing and production are carried out strictly in accordance with the process nodes set by the process flow management module.

[0249] For recipe-related businesses, equipment is used for processing and the process menu management module is used: the equipment selects the appropriate recipe for processing and production based on the configured basic data, equipment and recipe relationship, and combined with the production strategy.

[0250] Businesses involving the equipment module: Equipment requires regular inspection and maintenance. Therefore, when selecting equipment for batch processing, the equipment itself also undergoes a series of equipment management. If the equipment is not inspected and maintained by the due date, it cannot process the batch. Therefore, the system requires equipment inspection and maintenance operations.

[0251] At the same time, in addition to the equipment status (IDEL and RUN status can only process batches) being controlled when the batch enters the station, there are many equipment restrictions. The following machine limit management module: Machine limits can be accurately formulated according to products, processes, steps, equipment, raw material types, and batches. The control conditions of the machine limit system can be set in a positive direction (after the batch meets the condition in the process, the batch will be controlled and the equipment cannot be operated in and out of the station) or in a reverse direction (the opposite of the positive setting, only batches that meet the conditions can use the equipment for entry and exit operations).

[0252] In this step, while the equipment is being maintained, it is also necessary to monitor the equipment status. Usually, the factory has two modes: manual and automatic:

[0253] Automatic module: MES acquires data through sensors or reads and collects equipment data, storing it in designated files or other databases. When collecting equipment data, MES needs to parse the equipment data from other databases or files and switch the equipment status within the MES system. Alternatively, the MES system can exchange data with related systems (EAP, SCADA) to accurately and in real time obtain equipment status and instructions for completing certain equipment tasks.

[0254] Manual mode: When users correct and modify equipment, they need to manually enter the MES system to maintain data. At this time, the MES system will centrally manage the equipment status and control the equipment status during the production process.

[0255] Involving equipment and material business: use the relationship between equipment ports and materials in the basic data module, and use the material module to perform material loading and unloading operations.

[0256] Involving equipment and fixture business: use the relationship between the equipment port and fixture in the basic data module, and use the fixture module to perform fixture loading and unloading operations.

[0257] Batch control business: Use the corresponding functions of the project management module, such as the Qtime function, to set the maximum time limit from entry to exit. The Qtime timing is triggered after the batch enters the station. If the exit operation is not performed within the maximum time, the batch will be controlled after the exit. The maximum time limit has been exceeded. Please contact the product engineer for processing.

[0258] Work permit function: This is the employee equipment operation permission management module. Only employees with the corresponding equipment operation permit and the validity period of the permit has not expired can operate the equipment for batch processing, thereby strictly controlling production and placing it on the production work order (MO).

[0259] In step 37, the OIC client in the system controls the batch to enter the packaging stage after the batch process is completed.

[0260] Use the packaging management module to generate batch box codes and corresponding box codes, and then scan the box numbers for storage.

[0261] Based on the semiconductor manufacturing execution system described above, the present disclosure further provides a carrier status update method. FIG4 is a flowchart illustrating a carrier status update method according to an exemplary embodiment. Referring to FIG4 , the carrier status update method includes steps 41 to 42 .

[0262] In step 41 , the use status, detention status, and clean status of the carrier are obtained.

[0263] In this embodiment, there are different types of vehicles on the server side. In one example, the server side can create different types of vehicles according to the preset vehicle model, where the initial state of the vehicle is unavailable (NotAvailable), the clean state is dirty (dirty), and the detained state is not detained (NotOnhold). For example, the user can click the create button in the interactive page (of the FactoryModeler client that appears later), and the created vehicle and the vehicle's specification information will appear in the interactive page, such as the factory name, version number, vehicle type, number of washable times, preset number threshold, preset time threshold, creation time, usage status, clean status, etc., which can be set according to the specific scenario and are not limited here.

[0264] Preset vehicle models are stored in the basic data module, which is used to create preset vehicle models corresponding to various vehicles. The aforementioned specification information can also be stored in the vehicle module and bound to corresponding materials or batches. When a vehicle is bound to a batch, the corresponding vehicle is selected based on the raw material type of the batch.

[0265] In one embodiment, the server can also, in response to detecting an operation to edit the vehicle's specification information, such as clicking a modify button, obtain detection fields within the vehicle's specification information, such as the version number, clean status, and detected status. The detected status is used to indicate that an account is currently editing the specification information. When the detection field of the vehicle is not in the detected state, the server can determine that the vehicle's specification information is in an uneditable state. When the detection field is in the detected state, the server compares the current account and the editing account that edits the specification information (i.e., there is currently an account that edits the vehicle's specification information, referred to as the editing account) to see if they are the same account. When the current account and the editing account are different, the server can determine that the current account is denied access to edit the vehicle's specification information, i.e., the current account cannot edit the vehicle's specification information; when the current account and the editing account are the same, the server can determine that the current account is allowed to edit the vehicle's specification information and freeze the specification information after the editing is completed. In this embodiment, freezing the vehicle's specification information after editing is completed can solidify the specification information, i.e., it cannot be edited or deleted again, thereby preventing the already published specification information from being tampered with.

[0266] In one embodiment, the specification information after freezing can be released to the operator through an activation operation, so that the operator can create and use a carrier of the specification in the production system. For example, the operator can create multiple carriers of the same specification. In one example, the server can generate information to be reviewed in response to a request to activate the specification information of the carrier. Then, in response to the approval of the information to be reviewed, the server can determine to put the carrier into use. It should be noted that the above-mentioned information to be reviewed is usually confirmed by a designated person (such as the operator's leader, etc.) before it can be successfully activated. In this way, by introducing a sign-off mechanism in this embodiment, it is ensured that the specification information released to the production environment is approved, and the approval information is recorded and traceable, thereby improving production efficiency and product yield.

[0267] In one embodiment, the user can modify the published specification information according to business needs, thereby upgrading the specification information of the vehicle. In response to detecting the operation of upgrading the specification information, the server can generate a new version of the specification information. The above-mentioned new version of the specification information is different from the version of the original version of the specification information and the other contents are the same. Then, in response to detecting the operation of editing the new version of the specification information, the server can edit the new version of the specification information and freeze it. Afterwards, in response to detecting the operation of activating the new version of the specification information, the server can activate the new version of the specification information and update the status of the original version of the specification information to an inactivated state. In this way, in this embodiment, by upgrading the specification information, the new version of the specification information can be edited and frozen without affecting the original specification information, thereby not affecting the management of the original vehicle.

[0268] In one embodiment, the user can clone the published specification information according to business needs, thereby cloning the specification information of the vehicle. In response to detecting the operation of cloning the specification information, the server can generate specification information with a new name. The specification information with the new name is different from the specification information with the original name, but the other contents are the same. Then, in response to detecting the operation of editing the specification information with the new name, the server can edit the specification information with the new name and freeze it. Afterwards, in response to detecting the operation of activating the specification information with the new name, the server can activate the specification information with the new name. In this way, by cloning the specification information in this embodiment, the specification information with the new name can be edited and frozen and used as a specification of the vehicle after activation, without affecting the specification information with the original name, thereby not affecting the management of the original vehicle.

[0269] In this embodiment, the server can obtain the cleanliness status of the carrier, as shown in FIG5 , which includes steps 51 to 53 .

[0270] In step 51, the server may obtain the usage time and usage count of the vehicle.

[0271] In this step, the server may obtain the usage time of the vehicle, as shown in FIG6 , which includes steps 61 to 63 .

[0272] In step 61, the server can obtain the binding time and unbinding time of the carrier corresponding to the same batch of products. The binding time refers to the time when the product is placed in the carrier, and the unbinding time refers to the time when the product is removed from the carrier. For example, when an object (raw material, semi-finished product, product, etc.) is placed in the carrier, the carrier is bound to the batch and the binding time t_start is recorded. When the object is removed, the carrier is unbound from the batch and the unbinding time t_end is recorded.

[0273] In step 62, the server can determine the current usage time based on the binding time and the unbinding time. For example, the usage time of this batch is: Tuse=t_end-t_start.

[0274] In step 63, the server can calculate the usage time of the vehicle based on the historical usage time of the vehicle and the current usage time. For example, the usage time of the vehicle is: T = T1 + Tuse. T1 represents the historical usage time.

[0275] In this step, the server can obtain the number of times the vehicle is used. That is, the number of times the vehicle is used increases by 1 after each batch is unbound. That is, the number of times the vehicle is used after unbinding the current batch is: U = U1 + 1. U1 represents the historical number of times used, and U represents the current number of times used.

[0276] In step 52 , when the number of uses is greater than a preset number threshold and / or the usage duration is greater than a preset duration threshold, the server may determine that the clean state of the vehicle is a dirty state.

[0277] In this step, the server stores the preset time threshold corresponding to the usage time, that is, the usable time T of the vehicle after each cleaning. limit In addition, the server stores the preset threshold value corresponding to the number of uses, that is, the number of times the vehicle can be used after each cleaning, U limit In this way, after obtaining the number of uses, the server can compare the number of uses with the preset number threshold to obtain the size relationship between the number of uses and the preset number threshold, that is, the number of uses is greater than the preset number threshold, or the number of uses is less than or equal to the preset number threshold. And after obtaining the usage time, the server can compare the usage time with the preset time threshold to obtain the size relationship between the usage time and the preset time threshold, that is, the usage time is greater than the preset time threshold, or the usage time is less than or equal to the preset time threshold.

[0278] In this embodiment, when the number of times used is greater than the preset number threshold and / or the usage time is greater than the preset time threshold (T>T limit )+(U>U limit )>1, the server can determine that the clean state of the vehicle is dirty, and the vehicle needs to be cleaned.

[0279] In step 53 , when the number of uses is less than or equal to the preset number threshold and the usage duration is less than or equal to the preset duration threshold, the server may determine that the cleanliness state of the vehicle is a clean state.

[0280] In this step, when the number of times used is less than or equal to the preset number threshold and the usage time is less than or equal to the preset time threshold, the server can determine that the clean state of the vehicle is clean. In other words, when the number of times used is greater than the preset number threshold and / or the usage time is greater than the preset time threshold (T>T limit )+(U>U limit )=0, the server can determine that the carrier does not need to be cleaned.

[0281] In this embodiment, the server can obtain the vehicle's usage status, which includes unavailable, empty, in-use, and scrapped. In this step, when it is detected that the vehicle's clean state has changed to dirty, the server can obtain the vehicle's usage status, as shown in Figure 7, including steps 71 and 72.

[0282] In step 71 , the server may obtain the number of cleanings of the carrier and a preset number threshold.

[0283] In this step, the server can store the preset number of times threshold C limit , the server can directly read it. After each cleaning of the vehicle, the cleaning count increases by 1, that is, C = C1 + 1, where C1 is the historical cleaning count and C represents the current cleaning count.

[0284] In step 72, when the number of cleanings is equal to the preset number threshold, the server may determine that the current state of the vehicle is an unavailable state; when the number of cleanings is less than the preset number threshold, the server may determine to maintain the current state of the vehicle; the current state is an empty state or an in-use state.

[0285] In step 42 , a next state of the carrier is determined according to the use state, the detention state, and the clean state.

[0286] In this embodiment, the server can determine the next state of the carrier based on the usage status, the detention status, and the clean status, thereby achieving the normal flow of the carrier in the actual production process. The life cycle of the carrier is shown in Figure 8. Referring to Figure 8, during the carrier creation phase, the usage status of the carrier is unavailable, the clean status is dirty, and the detention status is not detained. During the carrier cleaning phase, the usage status of the carrier is empty, the clean status is clean, and the detention status is not detained. During the carrier batch binding phase, the usage status of the carrier is in use, the clean status is clean, and the detention status is not detained. When the user discovers a problem with the carrier or the object in the carrier, they can choose to detain the carrier on the interactive page. At this time, the usage status of the carrier is in use, the clean status is clean, and the detention status is detained (OnHold). When the corresponding problem of the carrier or the object in the carrier is resolved and disappears, they can choose to release the carrier on the interactive page. At this time, the usage status of the carrier is in use, the clean status is clean, and the detention status is not detained (NotOnHold). During the vehicle batch unbinding phase, the vehicle's usage status is unavailable (needs cleaning), the clean status is dirty, and the detained status is not detained. During the vehicle cleaning phase, the vehicle's usage status is empty, the clean status is clean, and the detained status is not detained. During the vehicle scrapping phase, the vehicle's usage status is empty, the clean status is clean, and the detained status is not detained. During the vehicle cancellation and scrapping phase, the vehicle's usage status is unavailable, the clean status is clean, and the detained status is not detained. From vehicle creation to vehicle scrapping and cancellation, a vehicle completes a life cycle. Afterwards, the above stages are cycled, and the vehicle is reused to achieve the effect of managing the vehicle's life cycle.

[0287] In the process of producing semiconductor products, different process sites have different controls on pollution levels. For example, the lithography site has extremely strict environmental requirements. In order to prevent the carrier from not meeting the pollution level requirements of the site, in one embodiment, the cleanliness status of the carrier also includes the pollution level. At this time, the server can obtain the cleanliness status of the carrier, see Figure 9, including: the server can obtain the pollution level of the carrier and the pollution level of the process site. The above pollution levels are pre-set for the carrier and the process site, for example, the dust level is 10,000 or 1 million. When the pollution level of the carrier matches the pollution level of the process site, the server can determine that the carrier has successfully entered the process site. When the pollution level of the carrier does not match the pollution level of the process site, the server can determine whether there is a conversion path between the pollution level of the carrier and the pollution level of the process site. The conversion path refers to a pre-set conversion rule, for example, a carrier with a dust level of 10,000 can enter a process site with a dust level of 1 million. If a transfer path is determined to exist, the server can determine that the carrier has successfully entered the process site; if a transfer path is determined to not exist, the server can determine that the carrier has failed to enter the process site. In this embodiment, carriers are controlled based on contamination levels to ensure that the semiconductor production process is not affected by carrier problems, thereby improving production efficiency.

[0288] Thus, the solution provided by the embodiment of the present disclosure can obtain the carrier's usage status, detention status, and clean status; then, the next status of the carrier is determined based on the usage status, detention status, and clean status. In this way, the solution of this embodiment provides unified management of the lifecycle of different types of carriers, which can improve the accuracy and utilization rate of carriers, thereby facilitating the improvement of the yield and productivity of semiconductor products.

[0289] In conjunction with the semiconductor manufacturing execution system shown in Figures 1 to 3 and the carrier status update method shown in Figures 4 to 9, the following describes each stage of the carrier life cycle in conjunction with various scenarios.

[0290] As shown in Figure 10, the semiconductor manufacturing execution system can maintain and activate carriers based on carrier specifications. Carriers can be entered manually or imported from Excel. Subsequently, the carrier's usage phase can be recorded for lifecycle management. The system can also maintain carrier contamination levels and verify contamination levels and process stations.

[0291] As shown in Figure 11, the vehicle management process includes vehicle specification modeling, vehicle specification freezing, vehicle specification activation, and approval. After vehicle specification freezing, the process can also include vehicle specification archiving, vehicle specification cloning, and vehicle specification upgrades.

[0292] Carrier specification modeling is to save the carrier specification information into the semiconductor manufacturing execution system through the modeling tool. In this step, referring to Figure 12, users can perform modeling by importing through Excel or manually entering. Before the carrier specification is frozen, users can edit the modeling information. In order to avoid multiple users editing at the same time, the editing status of the specification information can be managed using the detection field CheckState. When the detection field value is CheckOut, it can be determined that an account is editing the specification information. This account is called the editing account. At this time, it can be determined whether the current account and the editing account are the same account. If the current account and the editing account are the same account, the current account can edit the specification information; if the current account and the editing account are not the same account, the current account cannot edit the specification information.

[0293] In this step, after editing is completed, the vehicle specifications can be frozen to solidify the vehicle specification information, and cannot be edited or deleted again, which can prevent the published specification information from being tampered with.

[0294] In this step, the frozen specification information can be activated. Referring to Figure 13, operators can create and use carriers of this specification in the production system. In order to make the data in the production line more reliable, activation requires confirmation by designated personnel before it can be successfully activated. The semiconductor manufacturing execution system can introduce a sign-off mechanism to ensure that the specification data released to the production environment has been approved, and the approval information is recorded and traceable. If the user modifies the published specification information according to business needs, the semiconductor packaging system can provide two editing methods, namely carrier specification upgrade and carrier specification cloning as shown in Figure 11.

[0295] Upgrading vehicle specifications requires updating the original vehicle specifications. The new version's specifications, except for the version number, are identical to the original. At this point, you can edit the new version's specifications. Then, update the specifications for all vehicles of that specification in the production environment. The new version's specifications are frozen and then activated. The freezing and activation process is shown in Figure 13.

[0296] After the new version of the specification information is activated, the original version of the specification information is automatically changed to an inactive state. At this point, the specifications of all carriers in the semiconductor manufacturing execution system automatically inherit the new version of the specification information. Carrier specification cloning creates carrier specification information with a new name. The cloned specification information (i.e., the specification information with the new name) remains consistent with the original specification information except for the name. Users can edit, freeze, and activate the cloned specification information. After activation, the specification information with the new name can be managed as a new information carrier specification without affecting the management of the original carrier specifications.

[0297] In this embodiment, the entry and use of carriers. Referring to Figures 8 and 12, after completing the maintenance of carrier specification information, the user can create carriers of corresponding specifications in the production operation platform, and sequentially manage the life cycle of the (physical) carrier, such as carrier creation, carrier cleaning, batch binding, batch unbinding, carrier replacement, carrier detention, carrier release, carrier scrapping, and scrap cancellation. In other words, in this embodiment, the carrier status, detention status, and clean status are used to determine that the carrier is at different positions in its life cycle, and its status is also different.

[0298] During the production process, the carrier needs to be cleaned regularly and needs to be scrapped after a certain period of use. Combining these two scenarios, the present embodiment can calculate the validity period of the carrier. The validity period of the carrier after each cleaning can be measured from the two dimensions of usage time and number of uses. When the validity period is reached, the carrier must be cleaned before it can continue to be used; further, the number of times the carrier is cleaned is limited. When the number of times the carrier is cleaned reaches a preset threshold, the carrier cannot be used and the user needs to scrap the carrier.

[0299] Refer to Figure 14. Assume that there is a carrier specification CarrierSpecA. The number of times a carrier can be used after cleaning is U. limit , the vehicle can be used for a period of time T after cleaning limit , the number of times the carrier can be cleaned C limit After the carrier A of this specification is entered and cleaned, the number of times Carrier A is used U is 0, the usage time T is 0, and the number of cleaning times C is 1. During the production process, production batches are constantly put in and taken out of the carrier. This operation is reflected in the carrier's binding and unbinding batches in the carrier's life cycle. When binding a batch, the batch binding event t_start is recorded, and when unbinding the carrier, the unbinding time t_end is recorded. After the carrier is unbound from the production batch, the current usage time is calculated: T use =t_end-t_start

[0300] Then, update the current vehicle usage time: T = T1 + T use ;

[0301] At the same time, the system will update the number of times the vehicle is used: U=U1+1.

[0302] In this embodiment, the following formula is used to determine whether the carrier needs to be cleaned:

[0303]

[0304] In this embodiment, after a carrier is cleaned, each cleaning action is recorded and the carrier's clean status is reset to Clean. At the same time, the number of times the carrier can be used after cleaning, U, and the time it can be used after cleaning, T, are reset to 0. In addition, the system also records the number of times the carrier has been cleaned, C: C = C1 + 1. When the clean status of carrier A changes to Dirty, the system makes the following determinations:

[0305]

[0306] In this embodiment, when the status of a carrier is adjusted to the unavailable status NotAvailable, it can be determined that the carrier has reached the service life set in the carrier specification and can no longer be cleaned or put into the production process. Otherwise, it can continue to be cleaned and used in the production process.

[0307] In this embodiment, referring to FIG. 15 , at the position of the unbinding batch in the vehicle life cycle, the determination of the unbinding batch is triggered only when the vehicle's clean state changes to the dirty state.

[0308] In this embodiment, the carrier pollution level is maintained and verified. During the production process, different process sites have different controls on pollution levels. For example, the lithography site has extremely stringent environmental requirements. In order to prevent the carrier from not meeting the pollution level requirements of the site. At this time, the pollution level of the carrier and the pollution level of the process site can be judged. When the two do not match, the carrier cannot enter the site for normal production. When the two match, the carrier can enter the site for normal production. In addition, when there are sites in the business that require the carrier to enter different pollution levels, the setting of the pollution level conversion path is provided in this embodiment to meet the needs, as shown in Figure 16.

[0309] In this embodiment, the specification information is maintained in the modeling tool, and its data is ultimately persisted in the Oracle database. The system architecture of the modeling tool is shown in FIG17 .

[0310] As shown in Figure 17 , the modeling tool includes an Oracle database and a vehicle tool. The vehicle tool includes vehicle modeling, version management, freeze activation, and edit rights control. Vehicle modeling includes vehicle type modeling and vehicle specification modeling. The Oracle database contains vehicle type information, vehicle specification information, and vehicle information. The modeling tool and Oracle database communicate using the TCP / IP protocol.

[0311] Users enter and query production information on the WinForm client, and the results are sent to the server via Tibco. After undergoing relevant logical processing, they are persisted in the Oracle database. The system architecture of the user operation platform is shown in Figure 18. As shown in Figure 18, the system architecture of the user operation platform includes the user operation platform, server, and Oracle database. The user operation platform includes the client interface, vehicle creation, specification information review, vehicle cleaning, batch binding, batch unbinding, vehicle scrapping, and WinForm + Infragistics modules. The server includes QRY services, CNM services, CNX services, and Spring Boot + Spring MVC + Bpei.

[0312] The embodiment of the present disclosure also provides a vehicle status update method, see FIG. 19 , which includes steps 191 to 193 .

[0313] In step 191 , in response to detecting an operation to configure a vehicle, a creation page is displayed; the creation page includes a creation button and specification parameters.

[0314] In this embodiment, users can perform configuration operations through the FactoryModeler client in the semiconductor packaging system. When the user operates the FactoryModeler client, upon detecting the carrier configuration operation, a maintenance page, such as that shown in FIG20 , is displayed. Referring to FIG21 , the Create page displays a Create button (Create) and specification parameters (such as FactoryName, carrierSpecVersion, carrierType, and TimeUsedLimit).

[0315] In step 192, in response to the operation of configuring the specification parameters, the specification information corresponding to the specification parameters is obtained. Referring to FIG20, TimeUserLimit is 2 hours, CleanTimeLimit is 2 hours, etc., which can be set according to specific scenarios and are not limited here.

[0316] In step 193 , in response to detecting an operation of creating a vehicle, the vehicle is created according to the specification information and the life cycle of the vehicle is managed.

[0317] In one embodiment, in response to detecting an operation to display carrier specification information, the semiconductor manufacturing execution system may display carrier specification information as shown in FIG20. Then, in response to detecting an operation to edit carrier specification information, the semiconductor manufacturing execution system may obtain the input specification information and update the specification information.

[0318] In one embodiment, in response to detecting an operation to display carrier specification information, the semiconductor manufacturing execution system may display specification information of a carrier, such as [ ]. Then, in response to detecting an operation to upgrade specification information, the semiconductor manufacturing execution system may generate a new version of specification information; the new version of specification information is different from the original version of specification information but has the same other contents. Thereafter, in response to detecting an operation to edit the new version of specification information, the semiconductor manufacturing execution system may edit the new version of specification information and freeze it. Finally, in response to detecting an operation to activate the new version of specification information, the semiconductor manufacturing execution system may activate the new version of specification information and update the status of the original version of specification information to an inactivated state.

[0319] In one embodiment, in response to detecting an operation of displaying carrier specification information, the semiconductor manufacturing execution system may display the specification information of the carrier; in response to detecting an operation of cloning specification information, the semiconductor manufacturing execution system may generate specification information with a new name; the specification information with the new name has a different name from the specification information with the original name but the other contents are the same; in response to detecting an operation of editing the specification information with the new name, the semiconductor manufacturing execution system may edit the specification information with the new name and freeze it; in response to detecting an operation of activating the specification information with the new name, the semiconductor manufacturing execution system may activate the specification information with the new name.

[0320] In one embodiment, the semiconductor manufacturing execution system may display the carrier's specification information in response to detecting an operation to display carrier specification information. Then, in response to detecting an operation to detain or release the carrier, the carrier's detention status may be adjusted to being detained or not detained, respectively, as shown in FIG. 22 and FIG. 23 .

[0321] In one embodiment, the semiconductor manufacturing execution system may display the specification information of the carrier in response to detecting an operation to display the specification information of the carrier. Then, in response to detecting an operation to scrap the carrier, as shown in FIG. 24 , the semiconductor manufacturing execution system may adjust the use status of the carrier to a scrapped state.

[0322] In one embodiment, the semiconductor manufacturing execution system may bind the carrier to a target lot in response to detecting an operation of binding a carrier to a lot. Then, in response to detecting an operation of unbinding a carrier from a lot, the semiconductor manufacturing execution system may unbind the target lot from the carrier, as shown in FIG. 25 .

[0323] In one embodiment, the semiconductor manufacturing execution system may display the carrier's specification information in response to detecting an operation to display carrier specification information. Then, in response to detecting an operation to adjust the carrier's position, as shown in FIG. 26 , the semiconductor manufacturing execution system may adjust the carrier's position to a target position.

[0324] Based on the vehicle status updating method provided in the embodiment of the present disclosure, this embodiment further provides a vehicle status updating device, as shown in FIG27 , comprising:

[0325] The status acquisition module 271 is used to obtain the use status, detention status and clean status of the vehicle;

[0326] The state determination module 272 is configured to determine a next state of the carrier according to the use state, the detention state, and the clean state.

[0327] Based on a vehicle status updating method provided in an embodiment of the present disclosure, this embodiment further provides a vehicle status updating device, as shown in FIG28 , comprising:

[0328] A creation page display module 281 is configured to display a creation page in response to detecting a vehicle configuration operation; the creation page includes a creation button and specification parameters;

[0329] A specification information acquisition module 282 is configured to acquire specification information corresponding to the specification parameters in response to an operation of configuring the specification parameters;

[0330] The lifecycle management module 283 is used to create the vehicle according to the specification information and manage the lifecycle of the vehicle in response to detecting the operation of creating the vehicle.

[0331] It should be noted that the device embodiment shown in this embodiment matches the content of the above method embodiment. You can refer to the content of the above method embodiment and will not repeat it here.

[0332] In an exemplary embodiment, a server is further provided, as shown in FIG29 , including:

[0333] Memory 292 and processor 291;

[0334] The memory 292 is used to store computer programs executable by the processor 291;

[0335] The processor 291 is configured to execute the computer program in the memory 292 to implement the above method.

[0336] Other embodiments of the present disclosure will readily occur to those skilled in the art after considering the specification and practicing the disclosure herein. This disclosure is intended to cover any variations, uses, or adaptations that follow the general principles of this disclosure and include common knowledge or customary techniques in the art not disclosed herein. The description and examples are to be considered as exemplary only, with the true scope and spirit of the present disclosure being indicated by the following claims.

[0337] It should be understood that the present disclosure is not limited to the exact structures that have been described above and shown in the drawings, and that various modifications and changes can be made without departing from the scope thereof. The scope of the present disclosure is limited only by the appended claims.

Claims

1. A method for determining a vehicle state, characterized in that: include: Get the vehicle's usage status, detention status, and clean status; A next state of the carrier is determined according to the use state, the detention state, and the clean state.

2. The method according to claim 1, characterized in that Get the vehicle's cleanliness status, including: Obtaining the usage time and usage count of the vehicle; When the number of uses is greater than a preset number threshold and / or the usage time is greater than a preset time threshold, determining that the clean state of the carrier is a dirty state; When the number of uses is less than or equal to the preset number threshold and the usage time is less than or equal to the preset time threshold, it is determined that the clean state of the carrier is a clean state.

3. The method according to claim 2, characterized in that Get the usage time of the vehicle, including: Obtain the binding time and unbinding time of the carrier corresponding to the same batch of products; the binding time refers to the time when the product is placed in the carrier, and the unbinding time refers to the time when the product leaves the carrier; Determine the current usage time based on the binding time and the unbinding time; The usage time of the vehicle is calculated according to the historical usage time of the vehicle and the current usage time.

4. The method according to claim 2, characterized in that When it is detected that the clean state of the carrier changes to the dirty state, obtaining the use state of the carrier includes: Obtaining the number of cleaning times of the carrier and a preset number threshold; When the number of cleanings is equal to the preset number threshold, the current state of the carrier is determined to be an unavailable state; when the number of cleanings is less than the preset number threshold, the current state of the carrier is determined to be maintained; the current state is an empty state or an in-use state.

5. The method according to claim 1, wherein The cleanliness status also includes a pollution level. Obtaining the cleanliness status of the vehicle includes: Obtaining the pollution level of the carrier and the pollution level of the process site; When the contamination level of the carrier matches the contamination level of the process site, it is determined that the carrier has successfully entered the process site.

6. The method according to claim 5, characterized in that Get the clean status of the vehicle, including: When the pollution level of the carrier does not match the pollution level of the process site, determining whether there is a conversion path between the pollution level of the carrier and the pollution level of the process site; When it is determined that a conversion path exists, it is determined that the carrier has successfully entered the process site; when it is determined that no conversion path exists, it is determined that the carrier has failed to enter the process site.

7. The method according to claim 1, characterized in that The method further comprises: The carrier is created according to a preset carrier model; the initial state of the carrier is an unusable state, the clean state is a dirty state, and the detained state is undetained.

8. The method according to claim 7, characterized in that The preset carrier model is stored in a basic data module of the semiconductor manufacturing execution system; the basic data module is used to create preset carrier models corresponding to various carriers and maintain carrier status.

9. The method according to claim 7, characterized in that The method further comprises: In response to detecting an operation of editing the specification information of the carrier, obtaining a detection field in the specification information of the carrier; the detection field includes a detection status; When the detection field is not in the detected state, determining that the specification information of the carrier is in a non-editable state; When the detection field is in the detected state, comparing the current account with the editing account that edited the specification information to see if they are the same account; When the current account and the editing account are different, it is determined that the current account is denied editing the specification information of the vehicle; when the current account and the editing account are the same, it is determined that the current account is allowed to edit the specification information of the vehicle and the specification information is frozen after the editing is completed.

10. The method according to claim 9, characterized in that The specification information of the carrier is stored in a carrier module of the semiconductor manufacturing execution system; the carrier module is used to manage carrier business.

11. The method according to claim 9, characterized in that The specification information of the carrier is stored in the carrier module of the semiconductor manufacturing execution system, and the specification information is used by the carrier module and the work-in-process module; the carrier module is used to manage carrier business; and the work-in-process module is used to batch specify carriers.

12. The method according to claim 7, characterized in that The method further comprises: generating information to be reviewed in response to detecting a request to activate specification information of the vehicle; In response to the pending review information being approved, it is determined that the vehicle will be put into use.

13. The method according to claim 7, characterized in that The method further comprises: In response to detecting an operation of upgrading the specification information, generating a new version of the specification information; the new version of the specification information is different in version from the original version of the specification information but has the same other contents as the original version; In response to detecting an operation of editing the specification information of the new version, editing the specification information of the new version and freezing it; In response to detecting an operation of activating the new version of the specification information, the new version of the specification information is activated and the state of the original version of the specification information is updated to an inactivated state.

14. The method according to claim 7, wherein: The method further comprises: In response to detecting the operation of cloning specification information, generating specification information with a new name; the specification information with the new name is different from the specification information with the original name but has the same other contents; In response to detecting an operation of editing the specification information of the new name, editing the specification information of the new name and freezing it; In response to detecting an operation to activate the specification information of the new name, the specification information of the new name is activated.

15. The method according to claim 1, wherein The method further comprises: Obtain vehicle data in XML format according to the TibcoRV message subscription method. The vehicle data includes the vehicle's usage status, detention status, and clean status. The vehicle data also includes the BPEL name corresponding to the server. A Java file corresponding to the BPEL name is found; the Java file includes a releaseMaterial method; Calling the releaseMaterial method causes the vehicle module to process the service; wherein the processing of the service includes operating the database to update the use status, detention status and clean status of the vehicle; In response to the completion of the business process, a response message in XML format is generated and returned.

16. A vehicle status update method, characterized in that: include: In response to detecting an operation of configuring a vehicle, displaying a creation page; the creation page includes a creation button and specification parameters; In response to an operation of configuring specification parameters, obtaining specification information corresponding to the specification parameters; In response to detecting an operation of creating a vehicle, the vehicle is created according to the specification information and the life cycle of the vehicle is managed.

17. The method according to claim 16, characterized in that The method further comprises: In response to detecting an operation of displaying vehicle specification information, displaying the vehicle specification information; In response to detecting an operation to edit specification information of a vehicle, the input specification information is acquired and updated.

18. The method according to claim 16, characterized in that The method further comprises: In response to detecting an operation of displaying vehicle specification information, displaying the vehicle specification information; In response to detecting an operation of upgrading the specification information, generating a new version of the specification information; the new version of the specification information is different in version from the original version of the specification information but has the same other contents as the original version; In response to detecting an operation of editing the specification information of the new version, editing the specification information of the new version and freezing it; In response to detecting an operation of activating the new version of the specification information, the new version of the specification information is activated and the state of the original version of the specification information is updated to an inactivated state.

19. The method according to claim 16, wherein The method further comprises: In response to detecting an operation of displaying vehicle specification information, displaying the vehicle specification information; In response to detecting the operation of cloning specification information, generating specification information with a new name; the specification information with the new name is different from the specification information with the original name but has the same other contents; In response to detecting an operation of editing the specification information of the new name, editing the specification information of the new name and freezing it; In response to detecting an operation to activate the specification information of the new name, the specification information of the new name is activated.

20. The method according to claim 16, wherein The method further comprises: In response to detecting an operation of displaying vehicle specification information, displaying the vehicle specification information; In response to detecting an operation of detaining a carrier or releasing a carrier, the detention status of the carrier is adjusted to detained or not detained, respectively.

21. The method according to claim 16, wherein The method further comprises: In response to detecting an operation of displaying vehicle specification information, displaying the vehicle specification information; In response to detecting an operation of scrapping a vehicle, the use status of the vehicle is adjusted to a scrapped status.

22. The method according to claim 16, wherein The method further comprises: In response to detecting an operation of binding a carrier to a batch, binding the carrier to a target batch; In response to detecting an operation of unbinding a batch from a carrier, the target batch is unbound from the carrier.

23. The method according to claim 16, wherein The method further comprises: In response to detecting an operation of displaying vehicle specification information, displaying the vehicle specification information; In response to detecting an operation of adjusting the position of the carrier, the position of the carrier is adjusted to a target position.

24. A vehicle status updating device, characterized in that: include: A status acquisition module is used to obtain the use status, detention status and clean status of the vehicle; A state determination module is used to determine a next state of the carrier according to the use state, the detention state and the clean state.

25. A vehicle status updating device, characterized in that: include: A creation page display module, configured to display a creation page in response to detecting an operation of configuring a vehicle; the creation page includes a creation button and specification parameters; A specification information acquisition module, configured to acquire specification information corresponding to the specification parameters in response to an operation of configuring the specification parameters; The lifecycle management module is used to create the vehicle according to the specification information and manage the lifecycle of the vehicle in response to detecting the operation of creating the vehicle.

26. A server, characterized in that: include: Memory and processor; The memory is used to store a computer program executable by the processor; The processor is configured to execute the computer program in the memory to implement the method according to any one of claims 1 to 15 or 16 to 23.

27. A non-transitory computer-readable storage medium, characterized in that When the executable computer program in the storage medium is executed by a processor, the method according to any one of claims 1 to 15 or 16 to 23 can be implemented.

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