Laser testing device and laser testing method for laser selection

Abstract

The invention discloses a laser testing apparatus and a laser testing method for laser selection. The laser testing apparatus for laser selection includes a roller-to-roller unit, a laser irradiation unit, and an inspection unit. The roller-to-roller unit includes a supply roller for unwinding a substrate sheet and a winding roller for rewinding the substrate sheet, and conveys the substrate sheet at a predetermined speed. The laser irradiation unit includes a laser oscillator, a scanner, and an optical system, and irradiates a laser beam for grooving a substrate sheet being conveyed to thereby form a plurality of extended tabs in the substrate sheet. The inspection unit is disposed behind the laser irradiation unit, and obtains a magnified image of the laser grooving region in the substrate sheet being conveyed.

Description

Technical Field

[0001] This disclosure relates to a laser testing apparatus for laser selection, and more specifically, to a laser testing apparatus and laser testing method for manufacturing electrodes for rechargeable batteries. Background Technology

[0002] Rechargeable batteries are used for a variety of purposes, including powering small electronic devices such as mobile phones and laptops, powering transportation devices such as electric vehicles and hybrid vehicles, and serving as energy storage devices in energy storage systems. A rechargeable battery generally comprises an electrode assembly and a casing that houses and seals the electrode assembly.

[0003] The electrode assembly includes two electrodes with different polarities and a diaphragm that insulates the two electrodes. The electrodes include a substrate and an active material layer, and the substrate includes extended terminals for engagement with the electrode terminals. The extended terminals of the substrate can be manufactured by laser cutting. The laser cutting of the substrate needs to be optimized for laser type, laser output, scanning speed, etc., depending on the substrate material and thickness. Summary of the Invention

[0004] This disclosure provides a laser testing apparatus and method for testing laser cutting of a substrate by continuously changing the laser conditions according to the actual process conditions of laser cutting. This apparatus and method help determine the optimal laser conditions suitable for the substrate material and thickness.

[0005] A laser testing apparatus according to an embodiment includes a roll-to-roll unit, a laser irradiation unit, and an inspection unit. The roll-to-roll unit includes a supply roll for unwinding a substrate sheet and a winding roll for rewinding the substrate sheet, and the roll-to-roll unit conveys the substrate sheet at a predetermined speed. The laser irradiation unit includes a laser oscillator, a scanner, and an optical system, and the laser irradiation unit irradiates a laser beam to groove the conveyed substrate sheet, thereby forming a plurality of extended tabs in the substrate sheet. The inspection unit is positioned after the laser irradiation unit in the direction in which the roll-to-roll unit conveys the substrate sheet, and obtains a magnified image of the laser-grooved area in the conveyed substrate sheet.

[0006] The laser testing apparatus may further include a tension control unit having a floating roller that rotates in contact with the substrate sheet being conveyed. The tension control unit can control the tension applied to the substrate sheet to be the same as the tension applied to the substrate sheet when manufacturing the electrodes of a rechargeable battery. The tension control unit may be positioned between the supply roller and the laser irradiation unit in the direction in which the substrate sheet is conveyed by the roller-to-roll unit.

[0007] The roll-to-roll unit may further include a plurality of transport rollers for guiding the transport of the substrate sheet between the supply roller and the winding roller, and the roll-to-roll unit may control the speed of the substrate sheet to be the same as the speed of the substrate sheet when manufacturing the electrodes of a rechargeable battery.

[0008] The laser irradiation unit can be configured to change at least one of the laser beam output, pulse width, pulse energy, and pulse repetition rate during substrate sheet transport. The scanner may include a first galvanometer and a first reflector for scanning the laser beam in the X direction, and a second galvanometer and a second reflector for scanning the laser beam in the Y direction. The optical system may include an F-theta lens. The scanner and the optical system may each be configured to move in the Z direction.

[0009] The inspection unit may include an electron microscope and a display unit. The electron microscope may be positioned above the laser-grooved area in the substrate sheet to obtain a magnified image of the laser-grooved area viewed from above. The electron microscope may be a first electron microscope, and the inspection unit may further include a second electron microscope. The second electron microscope may be positioned in front of the laser-grooved area in the direction in which the substrate sheet is conveyed by the roll-to-roll unit, and the second electron microscope is configured to obtain a magnified image of the cut surface of the substrate sheet viewed from the front.

[0010] The laser testing apparatus may further include a chamber surrounding the laser irradiation unit, and a blower and a suction nozzle disposed within the chamber. The blower blows air toward the area where the laser irradiation unit grooves the substrate sheet to remove foreign matter and smoke. The suction nozzle sucks up the foreign matter and smoke dispersed by the blower.

[0011] According to another embodiment, the laser testing apparatus includes a roll-to-roll unit, a laser irradiation unit, a tension control unit, an inspection unit, and a control unit. The roll-to-roll unit includes a supply roller for unwinding a substrate sheet and a winding roller for rewinding the substrate sheet, and the roll-to-roll unit conveys the substrate sheet at a predetermined speed. The laser irradiation unit includes a laser oscillator, a scanner, and an optical system, and irradiates a laser beam to groove the conveyed substrate sheet, thereby forming a plurality of extended tabs in the substrate sheet. The tension control unit is disposed between the supply roller and the laser irradiation unit in the direction in which the roll-to-roll unit conveys the substrate sheet and is configured to control the tension of the conveyed substrate sheet. The inspection unit is disposed behind the laser irradiation unit in the direction in which the roll-to-roll unit conveys the substrate sheet and obtains a magnified image of the laser-grooved area in the conveyed substrate sheet. The control unit controls the operation of the laser irradiation unit such that the laser irradiation unit changes at least one of the laser beam output, pulse width, pulse energy, and pulse repetition rate while the substrate sheet is being conveyed.

[0012] The tension control unit may include a floating roller that rotates in contact with the substrate sheet, and the tension control unit may control the tension of the substrate sheet to be the same as the tension applied to the substrate sheet during the manufacture of the electrodes of the rechargeable battery. The roll-to-roll unit may further include a plurality of transport rollers for guiding the transport of the substrate sheet between the supply roller and the winding roller. The roll-to-roll unit may control the travel speed of the substrate sheet to be the same as the travel speed of the substrate sheet during the manufacture of the electrodes of the rechargeable battery.

[0013] The inspection unit may include an electron microscope and a display unit. The electron microscope may be positioned above the laser-grooved area in the substrate sheet to obtain a magnified image of the laser-grooved area viewed from above. The electron microscope may be a first electron microscope, and the inspection unit may further include a second electron microscope. The second electron microscope may be positioned in front of the laser-grooved area in the direction in which the substrate sheet is conveyed by the roll-to-roll unit to obtain a second magnified image of the cut surface of the substrate sheet viewed from the front.

[0014] The laser testing method according to an embodiment includes: conveying a substrate sheet at a predetermined speed while controlling the tension on the substrate sheet; grooving the conveyed substrate sheet by irradiating it with a laser beam to form a plurality of extended terminals in the substrate sheet; and obtaining a magnified image of the laser-grooved area in the conveyed substrate sheet.

[0015] The substrate sheet can be conveyed by a roller-to-roll unit, and the tension on the substrate sheet can be controlled by a tension control unit equipped with floating rollers. During the conveying step, the moving speed of the substrate sheet being conveyed can be controlled to be the same as the moving speed of the substrate sheet when manufacturing the electrodes of the rechargeable battery, and the tension applied to the substrate sheet can be controlled to be the same as the tension applied to the substrate sheet when manufacturing the electrodes of the rechargeable battery.

[0016] The laser beam can be provided by a laser irradiation unit comprising a laser oscillator, a scanner, and an optical system. The laser irradiation unit can change at least one of the laser beam output, pulse width, pulse energy, and pulse repetition rate during substrate sheet transport.

[0017] Magnified images can be obtained through an inspection unit that includes an electron microscope and a display unit. The electron microscope can be positioned above the laser-grooved area in the substrate sheet to provide a magnified image viewed from above. The electron microscope can be a first electron microscope and the magnified image is a first magnified image, and the inspection unit can further include a second electron microscope positioned in front of the grooved area of ​​the substrate sheet. The second electron microscope can provide a second magnified image of the cut surface of the substrate sheet viewed from the front.

[0018] According to the embodiments, optimal laser conditions can be selected based on the thickness and material of the substrate sheet, and the selected laser conditions can be reused in the actual manufacturing process of rechargeable batteries. Furthermore, a large number of tests for laser selection can be performed efficiently within a short period of time. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of a laser testing apparatus according to an embodiment.

[0020] Figure 2 It is shown Figure 1 A schematic diagram of the roller-to-roll unit and a portion of the substrate sheet of the laser testing apparatus shown.

[0021] Figure 3 It is shown Figure 2 The illustration shows an alternative to the embodiment.

[0022] Figure 4 It is along Figure 3 The cross-sectional view taken from line AA.

[0023] Figure 5 It is shown Figure 1 A view of an example of a laser irradiation unit shown.

[0024] Figure 6 It shows the formation Figure 2 The diagram shows a grooving pattern for the extension tabs of the substrate sheet.

[0025] Figure 7 It shows the formation Figure 3 The diagram shows a grooving pattern for the extension tabs of the substrate sheet.

[0026] Figure 8 yes Figure 1 The schematic perspective view of the substrate sheet and electron microscope shown.

[0027] Figure 9 It is shown Figure 1 and Figure 8 The diagram shows a modified embodiment of the inspection unit illustrated in the figure.

[0028] Figure 10 It shows the use Figure 1 The flowchart shows the laser testing method of the laser testing apparatus shown. Detailed Implementation

[0029] The present disclosure will be described more fully below with reference to the accompanying drawings, in which embodiments of the present disclosure are illustrated. As those skilled in the art will recognize, the described embodiments can be modified in various ways without departing from the spirit or scope of the present disclosure.

[0030] Figure 1 This is a schematic diagram of a laser testing apparatus according to an embodiment.

[0031] refer to Figure 1 The laser testing apparatus according to this embodiment may include: a roller-to-roller unit 200 for conveying a substrate sheet 100, a tension control unit 300 for controlling the tension of the conveyed substrate sheet 100, a laser irradiation unit 400 for irradiating the conveyed substrate sheet 100 with a laser beam to perform laser cutting (grooving), and an inspection unit 500 for obtaining a magnified image of the laser-grooved portion. The laser testing apparatus may further include a control unit 600 for controlling the operation of the laser irradiation unit 400 and the inspection unit 500.

[0032] The substrate sheet 100 is conveyed under tension. During the conveying process, the substrate sheet 100 sequentially passes through one side space (e.g., the lower space) of the laser irradiation unit 400 and one side space (e.g., the lower space) of the inspection unit 500. Thus, laser grooving and grooving area inspection are continuously performed on the substrate sheet 100 under tension.

[0033] The substrate sheet 100 is the same as the substrate sheet used to manufacture the electrodes of the rechargeable battery. The roll-to-roll unit 200 can transport the substrate sheet 100 at the same speed as that used when the same type of substrate sheet is actually manufactured as the electrodes of the rechargeable battery. The tension control unit 300 can apply the same tension to the substrate sheet 100 as the tension applied to the substrate sheet during the actual manufacturing of the electrodes of the rechargeable battery.

[0034] The laser testing apparatus can perform laser grooving under conditions identical or similar to the actual manufacturing process of the electrodes in a rechargeable battery, while simultaneously changing the laser conditions. Furthermore, the laser testing apparatus can perform various laser grooving tests by inspecting the grooved area immediately after grooving using the inspection unit 500. Using this laser testing apparatus, optimized laser process conditions can be easily selected based on the material and thickness of the substrate sheet 100.

[0035] Figure 2 It is shown Figure 1 A schematic diagram of the roller-to-roll unit and a portion of the substrate sheet of the laser testing apparatus shown.

[0036] refer to Figure 1 and Figure 2, the substrate sheet 100 can have a thin thickness, a constant width, and a length longer than its width. The substrate sheet 100 can be bent and wound around a roller. The substrate sheet 100 can be made of a thin metal plate with excellent electrical conductivity.

[0037] For example, the substrate sheet 100 can be made of aluminum foil, aluminum mesh, copper foil, copper mesh, nickel foil, or nickel mesh. Aluminum foil and aluminum mesh can be used as the positive electrode substrate of a rechargeable battery. Copper foil, copper mesh, nickel foil, and nickel mesh can be used as the negative electrode substrate of a rechargeable battery.

[0038] Figure 3 is a schematic diagram showing Figure 2 a modified embodiment of the substrate sheet illustrated in Figure 4 is a cross-sectional view taken along Figure 3 line A-A of

[0039] Referring to Figure 3 and Figure 4 , the active material layer 110 can be disposed on at least one surface of the substrate sheet 100a. Figure 4 illustrates the case where the active material layer 110 is disposed on both surfaces of the substrate sheet 100a. The active material layer 110 can include active materials and can further optionally include a binder and / or a conductive material. The positive electrode active material layer includes a positive electrode active material and the negative electrode active material layer includes a negative electrode active material.

[0040] The positive electrode active material can include a lithium transition metal composite oxide. The lithium transition metal composite oxide can include, for example, at least one of lithium nickel oxide, lithium cobalt oxide, lithium manganese oxide, lithium iron phosphate compound, and cobalt-free lithium nickel manganese oxide. The negative electrode active material can include at least one of a carbon-based active material and a silicon-based active material. The carbon-based active material can include at least one of natural graphite and artificial graphite. The silicon-based active material can include at least one of a silicon-carbon composite active material, silicon oxide (SiO x , where 0 < x ≤ 2), and silicon carbide.

[0041] The active material layer 110 can be formed in a process of coating an active material slurry onto a substrate and drying and compressing the slurry. The active material layer 110 can be disposed in any area of the substrate sheet 100a except for one edge. That is, the substrate sheet 100a can include an edge portion not covered by the active material layer 110, and this edge portion can be referred to as an uncoated area 120.

[0042] Referring to Figure 1 and Figure 2The roll-to-roll unit 200 may include a supply roll 210, a winding roll 220, and a plurality of conveying rolls 230. The supply roll 210 may be referred to as an unwinder, and the winding roll 220 may be referred to as a rewinder.

[0043] The supply roller 210 and the winding roller 220 can be positioned at opposite ends of the laser testing apparatus. Multiple conveying rollers 230 can be positioned between the supply roller 210 and the winding roller 220 to guide the substrate sheet 100 through the conveying system of the laser testing apparatus. Specifically, the tension control unit 300, the laser irradiation unit 400, and the inspection unit 500 can be positioned between the supply roller 210 and the winding roller 220.

[0044] The supply roller 210 can wind and store the substrate sheet 100, and the supply roller 210 can unwind the substrate sheet 100 by rotating in one direction. After laser grooving and inspection of the grooved area are completed, the winding roller 220 can rewind the substrate sheet 100. Each of the plurality of transport rollers 230, the supply roller 210 and the winding roller 220 can be rotated by a drive device such as a motor (not shown).

[0045] Multiple conveying rollers 230 can be positioned at predetermined locations along the length direction (conveyance direction) of the substrate sheet 100, and at least two conveying rollers 230 can be positioned at different heights. Figure 1 (Z direction shown). Multiple conveyor rollers 230 may contact the substrate sheet 100 to maintain the tension of the substrate sheet 100 and change the movement path of the substrate sheet 100. Although six conveyor rollers 230 are shown in the figures, the number and position of the conveyor rollers 230 are not limited to the example shown.

[0046] A tension control unit 300 can be positioned between the supply roller 210 and the laser irradiation unit 400. The tension control unit 300 may include a floating roller 310, a sensor, and a feedback control unit. The floating roller 310 can be positioned between the first conveying roller 231 and the second conveying roller 232, and can be positioned at a higher position than the first and second conveying rollers 231 and 232. The substrate sheet 100 is moved via the floating roller 310.

[0047] The floating roller 310 can rotate in contact with the substrate sheet 100 being conveyed and move up and down with the flow of the substrate sheet 100. For example, the floating roller 310 can descend when the tension increases and rise when the tension decreases. A sensor can detect changes in tension based on the up and down movement of the floating roller 310 and transmit the detection signal to the feedback control unit.

[0048] The feedback control unit can analyze the detection signal and execute a control algorithm to maintain the tension of the substrate sheet 100. Specifically, the feedback control unit can control the tension of the substrate sheet 100 by adjusting the position and speed of the floating roller 310 using the control algorithm, and the floating roller 310 can maintain the tension of the substrate sheet 100 at a target level.

[0049] The tension control unit 300 can be positioned in front of the laser irradiation unit 400 so that the tension of the substrate sheet 100 can be precisely controlled before laser grooving occurs. In other words, the optimal position of the tension control unit 300 is between the supply roller 210 and the laser irradiation unit 400, and the tension of the substrate sheet 100 moving toward the laser irradiation unit 400 can always be maintained at the target level to enable accurate laser testing.

[0050] The laser irradiation unit 400 may include a laser oscillator 410, a scanner 420, and an optical system 430. A control unit 600 may be electrically connected to the laser irradiation unit 400 to control the operation of the laser irradiation unit 400. The control unit 600 may be configured as a computer device.

[0051] Figure 5 It is shown Figure 1 A view of an example of a laser irradiation unit shown.

[0052] refer to Figure 1 and Figure 5 The laser irradiation unit 400 may include a laser oscillator 410 for emitting a laser beam, a scanner 420 for moving the laser beam in the X and Y directions, and an optical system 430 for adjusting the focus of the laser beam. Here, the X direction is parallel to the length direction (transport direction) of the substrate sheet 100 and the Y direction is parallel to the width direction of the substrate sheet 100.

[0053] The laser oscillator 410 may include a laser source 411 and a beam expander 412, and can emit a laser beam for cutting (grooving) the substrate sheet 100. The laser oscillator 410 can emit pulsed laser with an output of about 10W to 1000W and can be configured to continuously change the conditions of the laser beam. For example, the laser oscillator 410 can continuously change at least one of the laser beam output, pulse width, pulse energy, and pulse repetition rate.

[0054] For example, the laser oscillator 410 can adjust the output of the laser beam in the range of 10W to 1000W and can modulate the pulse width (pulse duration) of the laser beam in the range of 30ns to 240ns. In addition, the laser oscillator 410 can adjust the pulse energy in the range of greater than 0 and less than or equal to 2mJ and adjust the pulse repetition rate in the range of 100kHz to 4000kHz.

[0055] The scanner 420 may be configured, for example, as a galvanometer scanner. The scanner 420 may include, for example, a first galvanometer 421, a first reflector 422 coupled to the first galvanometer 421, a second galvanometer 423, and a second reflector 424 coupled to the second galvanometer 423. A laser beam may be reflected from the first reflector 422 to the second reflector 424. The laser beam may be reflected from the second reflector 424 to the optical system 430.

[0056] The first galvanometer 421 and the first reflector 422 are configured to scan the laser beam in the X direction. Specifically, the first galvanometer 421 can be rotated by a first motor and the first reflector 422 can be moved to scan the laser beam in the X direction. The second galvanometer 423 and the second reflector 424 are configured to scan the laser beam in the Y direction. Specifically, the second galvanometer 423 can be rotated by a second motor and the second reflector 424 can be moved to scan the laser beam in the Y direction. Therefore, the laser beam is scanned by the micro-movements of the first reflector 422 and the second reflector 424.

[0057] Optical system 430 may include multiple lenses, such as F-theta lenses. An F-theta lens is a scanning lens specifically designed to focus laser beams incident from various directions onto a single plane, and an F-theta lens can achieve a nearly constant spot size within the examination area (scanning field) A10, regardless of the incident direction of the laser beam.

[0058] The entire scanner 420 can move in the Z direction, and the focus of the scanner 420 can be adjusted by moving in the Z direction. The optical system 430 can also move in the Z direction, and the focus of the optical system 430 can also be adjusted by moving in the Z direction. The Z direction can be a direction orthogonal to the X and Y directions, and the Z direction can be parallel to the thickness direction of the substrate sheet 100 passing through the lower space of the laser irradiation unit 400 (e.g., Figure 5 As shown in the image).

[0059] The configuration of the scanner 420 and the optical system 430 is not limited to the examples described above and various alternatives are possible.

[0060] The substrate sheet 100 is cut (grooved) by the laser beam as it passes through the lower space of the laser irradiation unit 400, and multiple extended terminals can be formed in the substrate sheet 100. Figure 6 It is shown Figure 2 A schematic diagram of the machining grooves for the extended wiring tabs in the substrate sheet shown. Figure 7 It is shown Figure 3 A schematic diagram of the machining grooves for the extended wiring tabs in the substrate sheet shown.

[0061] refer to Figure 6 and Figure 7 A laser beam can irradiate substrate sheets 100 and 100a to cut the substrate sheets 100 and 100a. By conveying the substrate sheets 100 and 100a and scanning them with the laser beam, multiple extension tabs 150 and 150a can be continuously fabricated at a certain distance from each other. Figure 6 and Figure 7 In this context, CL represents the cutting line formed by the laser beam.

[0062] Multiple extension terminals 150 and 150a can be approximately quadrilateral and can be of the same size. Figure 7 In this case, the laser beam can alternately cut the areas of the substrate sheet 100a covered with the active material layer 110 and the areas not covered with the active material layer 110 (i.e., uncoated areas 120). In this case, the active material layer 110 can be disposed on a portion of the extension tab 150a.

[0063] If the extension terminals of the electrodes of the rechargeable battery to be manufactured do not contact the active material layer, then it can be used. Figure 6 The substrate sheet 100 is shown in the figure. On the other hand, if the active material layer is disposed on a portion of the extension tab of the electrode of the rechargeable battery to be actually manufactured, it can be used. Figure 7 The substrate sheet 100a shown in the figure.

[0064] The scanning speed of the laser beam can be faster than the moving speed of the substrate sheets 100 and 100a. Multiple extension tabs 150 and 150a can be processed separately by scanning the laser beam once on the substrate sheets 100 and 100a. Alternatively, multiple extension tabs 150 and 150a can be processed separately by scanning the laser beam two or more times on the substrate sheets 100 and 100a. That is, laser grooving can be performed by irradiating the same area of ​​the substrate sheets 100 and 100a two or more times with a laser beam.

[0065] Refer again Figure 1The laser testing apparatus may further include a first chamber 710 surrounding the laser irradiation unit 400, and a blower 720 and a suction nozzle 730 disposed within the first chamber 710. The first chamber 710 may be configured to surround the laser irradiation unit 400 or both the tension control unit 300 and the laser irradiation unit 400. Figure 1 The diagram illustrates the latter case as an example.

[0066] During the laser beam cutting process of the substrate sheet 100, foreign matter and fumes may be generated from the substrate sheet 100. Fumes are vapors or dust generated during the cutting of the metal substrate sheet 100 using heat, and may contain a large amount of particulate matter that is harmful to human health. In addition to the inlet through which the substrate sheet 100 enters and the outlet through which the substrate sheet 100 exits, the first chamber 710 also has a sealing structure to prevent foreign matter and fumes generated during laser cutting from spreading to the external environment.

[0067] Blower 720 blows air towards the laser beam irradiation area (i.e., the area where the laser irradiation unit 400 grooves the substrate sheet 100) to remove foreign matter and smoke generated during laser cutting. Suction nozzle 730 can be positioned facing blower 720, with the laser beam irradiation area located between them. Suction nozzle 730 can remove foreign matter and smoke dispersed by blower 720. However, the installation positions of blower 720 and suction nozzle 730 are not limited to... Figure 1 The example shown.

[0068] If foreign objects and smoke remain in the laser irradiation area, they may interfere with the laser beam, leading to a decrease in laser cutting quality. The blower 720 and suction nozzle 730 can improve laser cutting quality by preventing foreign objects and smoke from remaining in the laser irradiation area.

[0069] The suction nozzle 730 can be connected to the dust collector 740 via a pipe. The dust collector 740 can be located outside the first chamber 710 and may include a vacuum pump and a filter. The suction nozzle 730 can use the pressure from the vacuum pump to remove foreign objects and smoke, and the air sucked in along with the foreign objects and smoke can be purified by the filter and then discharged to the outside of the dust collector 740.

[0070] The inspection unit 500 can be positioned behind the laser irradiation unit 400, and the substrate sheet 100, having a plurality of extended connecting pieces formed therein, can pass through the lower space of the inspection unit 500. A third conveyor roller 233, a fourth conveyor roller 234, and a fifth conveyor roller 235 can be positioned between the laser irradiation unit 400 and the inspection unit 500. The substrate sheet 100 can be kept under constant tension by the third conveyor roller 233, the fourth conveyor roller 234, and the fifth conveyor roller 235.

[0071] The inspection unit 500 can acquire magnified images of the laser-grooved area and provide the user with information related to the cutting status of the laser-grooved area. The inspection unit 500 may include an electron microscope 510 and a display unit 520. The control unit 600 may be electrically connected to the electron microscope 510 to control its operation and may store images acquired by the electron microscope 510.

[0072] The electron microscope 510 can be positioned above the laser-grooved area and can produce a magnified image viewed from above the laser-grooved area. The electron microscope 510 can be positioned inside the second chamber 750, and the display unit 520 can be positioned outside the second chamber 750.

[0073] Figure 8 yes Figure 1 The schematic perspective view of the substrate sheet and electron microscope shown.

[0074] refer to Figure 1 and Figure 8 The electron microscope 510 may include a light source, a microscope optical system 511, and an optical system stage 512. The light source can illuminate the laser-cut area of ​​the substrate sheet 100. The microscope optical system 511 may include an imaging element and multiple lenses and can produce a magnified image of the laser-cut area.

[0075] The optical system stage 512 may include a Z-axis driver and a Y-axis driver coupled to the microscope optical system 511. The Z-axis driver can move the microscope optical system 511 in the Z-direction to adjust the focus. The Y-axis driver can move the microscope optical system 511 in the Y-direction to move the examination area. The display unit 520 can display magnified images obtained by the electron microscope 510.

[0076] Figure 9 It is shown Figure 1 and Figure 8 The diagram shows another embodiment of the inspection unit illustrated in the figure.

[0077] refer to Figure 9 The inspection unit 500a may include a first electron microscope 540 and a second electron microscope 550 provided at different locations to point in different observation directions. The control unit 600 may be electrically connected to the first electron microscope 540 and the second electron microscope 550. The first electron microscope 540 and the second electron microscope 550 may each include a light source, microscope optical systems 541 and 551, and optical system stages 542 and 552.

[0078] The first electron microscope 540 can be positioned above the laser-grooved area and can obtain a magnified image of the laser-grooved area viewed from above. The second electron microscope 550 can be positioned in front of the laser-grooved area and can obtain a magnified image of the cut surface of the substrate sheet 100 caused by the laser grooving, viewed from the front. In other words, the second electron microscope 550 can obtain a magnified image of the cut surface.

[0079] The optical system stage 542 of the first electron microscope 540 may include a Z-direction actuator for focus adjustment and a Y-direction actuator for moving the examination area. The optical system stage 552 of the second electron microscope 550 may include a Y-direction actuator for focus adjustment and an X-direction actuator for moving the examination area. The configurations of the optical system stages 542 and 552 are not limited to the examples described above and depicted in the figures, and various alternatives are possible.

[0080] Compared to the inspection unit 500 described above, the inspection unit 500a can provide the user with more information related to the cutting state of the laser-grooved portion by using the first electron microscope 540 and the second electron microscope 550. For example, the inspection unit 500a can provide information about the roughness of the cutting line, the roughness of the cut surface, the degree of deformation of the substrate sheet 100, and the detailed shape of the cut surface.

[0081] Refer again Figure 1 The substrate sheet 100, which has passed through the lower space of the inspection unit 500, can be wound onto the winding roller 220 via the sixth conveying roller 236.

[0082] Users can analyze the information provided by the inspection unit 500 to select optimal laser conditions for the thickness and material of the substrate sheet 100. For example, optimal laser conditions can be selected to minimize the roughness of the cutting line, the roughness of the cut surface, and / or the degree of deformation of the substrate sheet 100.

[0083] Conventional laser-etched area inspection involves preparing substrates cut into individual units, cutting the substrates with a laser beam, and then moving the substrates to the location of an electron microscope for inspection of the etched areas. This type of testing method is difficult to perform efficiently on a large number of tests within a short timeframe. Furthermore, because the individual substrate units are in a tension-free state during this conventional inspection method, the laser process conditions used for testing individual substrate units may differ from those used in the actual manufacturing process of rechargeable batteries. In other words, the optimal laser conditions selected for individual substrate units may not be the optimal laser conditions for the actual manufacturing process of rechargeable batteries.

[0084] In the laser testing apparatus of this embodiment, the substrate sheet 100 is conveyed under tension and laser grooving and inspection of the grooved areas are performed continuously. Since this configuration tests the laser conditions of the substrate sheet 100 under the same conditions as the actual manufacturing process of the electrodes of a rechargeable battery, the optimal laser conditions selected using the laser testing apparatus of this disclosure can be equivalently applied to the actual manufacturing process of the electrodes of a rechargeable battery.

[0085] Furthermore, according to the laser testing apparatus of this disclosure, the laser conditions can be changed by controlling the operation of the laser irradiation unit 400 during the transport of the substrate sheet 100, and the laser-grooved area can be inspected in real time using the inspection unit 500 immediately after the laser conditions are changed. Therefore, a large number of tests can be performed efficiently in a short period of time.

[0086] Figure 10 Is using Figure 1 The flowchart shows the laser testing method of the laser testing apparatus shown.

[0087] refer to Figure 10 The laser testing method according to this embodiment may include: a conveying step S10 of conveying a substrate sheet under tension at a predetermined speed; a grooving step S20 of irradiating the substrate sheet with a laser beam during the conveying of the substrate sheet to thereby grooving the substrate sheet; and an inspection step S30 of obtaining a magnified image of the laser-grooved area during the conveying of the substrate sheet.

[0088] refer to Figures 1 to 10 The roller-to-roll unit 200 and the tension control unit 300 can be used in the conveying step S10, and the laser irradiation unit 400 can be used in the grooving step S20. The inspection unit 500, including the electron microscope 510, can be used in the inspection step S30. The grooving step S20 and the inspection step S30 can be performed sequentially, and the time between these two steps is equal to the time taken for the substrate sheet 100 to move from the lower space of the laser irradiation unit 400 to the lower space of the inspection unit 500.

[0089] In the conveying step S10, the substrate sheet 100 can be unwound from the supply roller 210, pass through multiple conveying rollers 230, and then be rewound onto the winding roller 220. A tension control unit 300 can be positioned between the supply roller 210 and the laser irradiation unit 400, and the substrate sheet 100 can be kept under a target tension level by the tension control unit 300. The tension control unit 300 can be, for example, a floating roller type, but this disclosure is not limited to this example.

[0090] The substrate sheet 100 may be, for example, any one of aluminum foil, aluminum mesh, copper foil, copper mesh, nickel foil, and nickel mesh. The active material layer 110 may be disposed on at least one surface of the substrate sheet 100a, and the uncoated area 120 may be disposed along the edge of the substrate sheet 100a.

[0091] When the substrate sheet 100a is aluminum foil or aluminum mesh, the positive electrode active material layer can be disposed on at least one surface of the substrate sheet 100a. When the substrate sheet 100a is any one of copper foil, copper mesh, nickel foil, and nickel mesh, the negative electrode active material layer can be disposed on at least one surface of the substrate sheet 100a.

[0092] In the transport step S10, the moving speed of the substrate sheet 100 can be the same as the moving speed of the substrate sheet during the actual manufacturing of the electrodes of the rechargeable battery. In the transport step S10, the tension of the substrate sheet 100 can be the same as the tension applied to the substrate sheet during the actual manufacturing of the electrodes of the rechargeable battery.

[0093] In the grooving step S20, the laser irradiation unit 400 can scan the substrate sheet 100 with a laser beam to cut (groove) the substrate sheet 100, thereby forming a plurality of extended terminals 150. The plurality of extended terminals 150 can be formed continuously and spaced apart from each other. When the active material layer 110 is disposed on the substrate sheet 100a, the laser beam can alternately cut the uncoated area 120 and the area covered by the active material layer 110 of the substrate sheet 100a.

[0094] The laser irradiation unit 400 may include a laser oscillator 410, a scanner 420, and an optical system 430. The laser oscillator 410 may change at least one of the laser beam output, pulse width, pulse energy, and pulse repetition rate. Since the scanning speed of the laser beam is faster than the moving speed of the substrate sheet 100, a plurality of extended terminals 150 can be formed by repeatedly scanning the substrate sheet 100 with the laser beam two or more times.

[0095] When the laser conditions are changed in the grooving step S20, the cutting degree of the substrate sheet 100, the roughness of the cutting line, the roughness of the cut surface, and the degree of deformation of the substrate sheet 100 also change. The laser irradiation unit 400 can be housed inside the first chamber 710 together with the blower 720 and the suction nozzle 730. The blower 720 and the suction nozzle 730 can improve the laser cutting quality by removing foreign objects and smoke from the laser irradiation area.

[0096] In inspection step S30, inspection unit 500 can acquire and store a magnified image of the laser-grooved area and provide the user with information about the cutting status of the laser-grooved area. Inspection unit 500 may include at least one electron microscope. Electron microscope 510 may be positioned above the laser-grooved area. In another example, a first electron microscope 540 may be positioned above the laser-grooved area, and a second electron microscope 550 may be positioned in front of the laser-grooved area.

[0097] The first electron microscope 540 can obtain a magnified image of the laser-grooved area from above. The second electron microscope 550 can obtain a magnified image of the cut surface observed from the front. The inspection unit 500 can provide information about the roughness of the cutting line, the roughness of the cut surface, the degree of deformation of the substrate sheet, and the detailed shape of the cut surface.

[0098] The user can change the laser conditions by controlling the laser irradiation unit 400 during the transport of the substrate sheet 100, and the user can inspect the laser-grooved area immediately after changing the laser conditions using the inspection unit 500. According to the method described above, a large number of tests can be performed efficiently in a short period of time, and the optimal laser conditions can be easily selected based on the thickness and material of the substrate sheet 100.

[0099] Although this disclosure has been described in conjunction with exemplary embodiments now considered to be practical, it should be understood that this disclosure is not limited to the disclosed embodiments. Rather, this disclosure covers various modifications and equivalent arrangements.

Claims

1. A laser testing device, comprising: A roll-to-roll unit includes a supply roll for unwinding a substrate sheet and a winding roll for rewinding the substrate sheet, the roll-to-roll unit being configured to convey the substrate sheet at a predetermined speed. A laser irradiation unit includes a laser oscillator, a scanner, and an optical system, and the laser irradiation unit is configured to irradiate a laser beam to groove the substrate sheet being transported, thereby forming a plurality of extended terminals in the substrate sheet. as well as An inspection unit is positioned after the laser irradiation unit in the direction in which the roll-to-roll unit conveys the substrate sheet, and the inspection unit is configured to obtain a magnified image of the laser-grooved area in the substrate sheet being conveyed.

2. The laser testing apparatus according to claim 1, further comprising: The tension control unit has a floating roller configured to rotate in contact with the substrate sheet being conveyed, and The tension control unit is configured to control the tension applied to the substrate sheet to be the same as the tension applied to the substrate sheet when manufacturing the electrodes of the rechargeable battery.

3. The laser testing apparatus according to claim 2, wherein, The tension control unit is positioned between the supply roller and the laser irradiation unit in the direction in which the substrate sheet is conveyed by the roller-to-roll unit.

4. The laser testing apparatus according to claim 1, wherein, The roll-to-roll unit further includes a plurality of transport rollers for guiding the transport of the substrate sheet between the supply roller and the winding roller, and the roll-to-roll unit is configured to control the moving speed of the substrate sheet to be the same as the moving speed of the substrate sheet when manufacturing the electrodes of the rechargeable battery.

5. The laser testing apparatus according to claim 1, wherein, The laser irradiation unit is configured to change at least one of the output, pulse width, pulse energy, and pulse repetition rate of the laser beam during the transport of the substrate sheet.

6. The laser testing apparatus according to claim 5, wherein, The scanner includes a first galvanometer and a first reflector configured to scan the laser beam in the X direction, and a second galvanometer and a second reflector configured to scan the laser beam in the Y direction. The optical system includes an F-theta lens, and The scanner and the optical system are each configured to move in the Z direction.

7. The laser testing apparatus according to claim 1, wherein, The inspection unit includes an electron microscope and a display unit, and The electron microscope is positioned above the laser-grooved area in the substrate sheet to obtain a magnified image of the laser-grooved area as viewed from above.

8. The laser testing apparatus according to claim 7, wherein, The electron microscope is a first electron microscope and the magnified image is a first magnified image. The inspection unit further includes a second electron microscope positioned in front of the laser grooving area in the direction in which the roll-to-roll unit conveys the substrate sheet, and the second electron microscope is configured to obtain a second magnified image of the cut surface of the substrate sheet as observed from the front.

9. The laser testing apparatus according to claim 1, further comprising: A chamber surrounding the laser irradiation unit; A blower is placed inside the chamber and configured to blow air toward the area where the substrate sheet is grooved by the laser irradiation unit to blow away foreign objects and smoke; as well as A suction nozzle is placed inside the chamber and configured to suck away the foreign matter and smoke blown away by the blower.

10. A laser testing device, comprising: A roll-to-roll unit includes a supply roll configured to unwind a substrate sheet and a winding roll configured to rewind the substrate sheet, the roll-to-roll unit being configured to convey the substrate sheet at a predetermined speed. A laser irradiation unit, including a laser oscillator, a scanner, and an optical system, is configured to irradiate a laser beam to groove the substrate sheet being transported, thereby forming a plurality of extended terminal blocks in the substrate sheet. A tension control unit is disposed between the supply roller and the laser irradiation unit in the direction in which the substrate sheet is conveyed by the roller-to-roll unit, and the tension control unit is configured to control the tension of the substrate sheet being conveyed. An inspection unit is positioned behind the laser irradiation unit in the direction in which the roll-to-roll unit conveys the substrate sheet, and the inspection unit is configured to obtain a magnified image of the laser-grooved area in the substrate sheet being conveyed. as well as The control unit is configured to control the operation of the laser irradiation unit such that the laser irradiation unit changes at least one of the output, pulse width, pulse energy, and pulse repetition rate of the laser beam while the substrate sheet is being conveyed.

11. The laser testing apparatus according to claim 10, wherein, The tension control unit includes a floating roller that rotates in contact with the substrate sheet, and the tension control unit is configured to control the tension applied to the substrate sheet to be the same as the tension applied to the substrate sheet when manufacturing the electrodes of a rechargeable battery.

12. The laser testing apparatus according to claim 10, wherein, The roll-to-roll unit further includes a plurality of transport rollers for guiding the transport of the substrate sheet between the supply roller and the winding roller, and the roll-to-roll unit is configured to control the moving speed of the substrate sheet to be the same as the moving speed of the substrate sheet when manufacturing the electrodes of the rechargeable battery.

13. The laser testing apparatus according to claim 10, wherein, The inspection unit includes an electron microscope and a display unit, and The electron microscope is positioned above the laser-grooved area in the substrate sheet to obtain a magnified image of the laser-grooved area as viewed from above.

14. The laser testing apparatus according to claim 13, wherein: The electron microscope is a first electron microscope and the magnified image is a first magnified image. The inspection unit further includes a second electron microscope positioned in front of the laser grooving area in the direction in which the roll-to-roll unit conveys the substrate sheet, and the second electron microscope is configured to obtain a second magnified image of the cut surface of the substrate sheet as observed from the front.

15. A laser testing method, comprising: While controlling the tension on the substrate sheet, the substrate sheet is conveyed at a predetermined speed; Grooves are made in the substrate sheet being transported by irradiating a laser beam to form a plurality of extended terminals in the substrate sheet. as well as Obtain a magnified image of the laser-grooved area in the substrate sheet being transported.

16. The laser testing method according to claim 15, wherein, The substrate sheet is conveyed by a roller-to-roll unit and the tension on the substrate sheet is controlled by a tension control unit including a floating roller.

17. The laser testing method according to claim 16, wherein, The moving speed of the substrate sheet being conveyed is controlled to be the same as the moving speed of the substrate sheet when manufacturing the electrodes of the rechargeable battery, and the tension applied to the substrate sheet is controlled to be the same as the tension applied to the substrate sheet when manufacturing the electrodes of the rechargeable battery.

18. The laser testing method according to claim 15, wherein, The laser beam is provided by a laser irradiation unit comprising a laser oscillator, a scanner, and an optical system, and The laser irradiation unit changes at least one of the laser beam output, pulse width, pulse energy, and pulse repetition rate during the transport of the substrate sheet.

19. The laser testing method according to claim 15, wherein: The magnified image is obtained through an inspection unit including an electron microscope and a display unit, and The electron microscope is positioned above the laser-grooved area in the substrate sheet to provide the magnified image viewed from above.

20. The laser testing method according to claim 19, wherein, The electron microscope is a first electron microscope and the magnified image is a first magnified image. The inspection unit further includes a second electron microscope, which is positioned in front of the laser-grooved area in the substrate sheet in the direction of conveying the substrate sheet, and the second electron microscope provides a second magnified image of the cut surface of the substrate sheet as observed from the front.

Images