Contact separation mode soft X-ray emission device

Abstract

A contact separation mode triboelectric soft X-ray emission device comprises a motion structure used for providing power for reciprocating linear motion; the contact structure is arranged in a vacuum environment and comprises an active contact unit and a passive contact unit which can move relatively to perform periodic contact and separation, and the active contact unit is connected with the moving structure; the contact surface of the active contact unit and the contact surface of the passive contact unit are respectively covered with materials with different electronegativity. The contact force measuring unit is used for measuring the contact pressure between the active contact unit and the passive contact unit in real time; wherein the motion structure is configured to adjust a driving parameter of the motion structure according to the contact pressure of the contact force measuring unit, so as to control the output characteristic of the soft X-ray.

Description

Technical Field

[0001] This invention relates to the field of X-ray source technology, and in particular to a contact-separation mode triboelectric soft X-ray emitting device. Background Technology

[0002] As the manufacturing industry shifts towards high-end products, the demand for high-quality materials and advanced manufacturing technologies in materials science and industrial manufacturing is growing. X-ray inspection technology, as a non-destructive testing method, plays an irreplaceable role in component analysis and internal defect detection. Currently, miniaturization and portability of X-ray sources are important development directions in this field, which are significant for achieving rapid on-site inspection and reducing inspection costs.

[0003] Existing small X-ray sources are mainly based on the traditional thermionic emission principle. Although structural improvements have achieved a certain degree of miniaturization, they still generally suffer from problems such as high power consumption, the need for bulky high-voltage power supplies, slow response speed, and severe thermal effects. In addition, X-ray sources based on field emission (such as carbon nanotubes) or pyroelectric effects have made breakthroughs in size, but they often face challenges such as unstable emission current, limited lifespan, and high manufacturing costs that make mass production difficult.

[0004] In recent years, the technology of converting mechanical energy into X-rays based on the triboelectric effect has attracted widespread attention. However, existing triboelectric X-ray source technologies still have significant shortcomings. First, the durability of materials used, such as those in peel-off tape structures, makes it difficult to precisely control the X-ray output characteristics. Specifically, key mechanical parameters such as the magnitude of the contact force between materials, the contact frequency, and the separation speed directly affect the surface charge density and electron acceleration energy, thus determining the intensity and energy spectrum of X-rays. However, existing technologies lack mechanisms for real-time monitoring and fine-tuning of these key mechanical parameters.

[0005] Therefore, designing a device with a compact structure that can precisely control contact parameters and achieve stable soft X-ray output is a technical problem that urgently needs to be solved. Summary of the Invention

[0006] To solve the above-mentioned technical problems, the present invention adopts the following solution.

[0007] A contact-separation mode triboelectric soft X-ray emitting device, comprising:

[0008] A motion structure that provides power for reciprocating linear motion;

[0009] A contact structure, disposed in a vacuum environment, includes an active contact unit and a passive contact unit capable of relative movement for periodic contact and separation, wherein the active contact unit is connected to the moving structure;

[0010] The contact surfaces of the active contact unit and the passive contact unit are respectively covered with materials with different electronegativity;

[0011] A contact force measuring unit is used to measure the contact pressure between the active contact unit and the passive contact unit in real time.

[0012] The motion structure is configured to adjust its driving parameters according to the contact pressure of the contact force measuring unit in order to control the output characteristics of the soft X-ray.

[0013] Optionally, the motion structure includes a linear motor, the output end of which is connected to the active contact unit to drive the active contact unit to perform the reciprocating linear motion.

[0014] Optionally, the device further includes a system support and a motor rotating support rotatably connected to the system support, wherein the linear motor is fixedly mounted on the motor rotating support; the emission direction of the soft X-rays is changed by adjusting the angle of the motor rotating support.

[0015] Optionally, the device further includes a positioning block disposed between the output end of the linear motor and the active contact unit to maintain the stability of the reciprocating linear motion.

[0016] Optionally, the contact surface of the active contact unit or the passive contact unit is provided with a micron- or nano-scale array structure to increase the contact area.

[0017] Optionally, the driving parameters include the operating frequency of the linear motor and / or the contact time between the active contact unit and the passive contact unit.

[0018] Optionally, the contact force measuring unit is configured to feed back the measured contact pressure data to the controller of the moving structure to form closed-loop control.

[0019] A soft X-ray generation method based on contact separation mode triboelectricity includes the following steps:

[0020] Place the device in a vacuum environment;

[0021] The motion structure is activated, driving the active contact unit to periodically contact and separate from the passive contact unit at a set frequency, causing charge transfer and separation on the surfaces of the two materials with different electronegativity, forming an electric field and accelerating electrons, generating bremsstrahlung radiation to emit soft X-rays;

[0022] The contact pressure is monitored in real time by the contact force measurement unit, and the driving parameters of the motion structure are adjusted according to the monitoring results to control the output power of the soft X-ray.

[0023] Compared with the prior art, the present invention has the following beneficial technical effects:

[0024] 1. This invention utilizes a linear motor to drive materials with different electronegativity to perform periodic contact separation in a vacuum environment. It can excite soft X-rays without the need for an external high-voltage power supply and a complex cooling system, which significantly reduces the size and power consumption of the device, eliminates the safety hazards of high-voltage operation, and greatly improves the portability and applicability of the device.

[0025] 2. This invention, by integrating a contact force measurement sensor, can monitor pressure changes during the contact process in real time and feed this data back to adjust the operating frequency and contact time of the linear motor. This closed-loop control mechanism solves the problem of unstable output from existing triboelectric X-ray sources, achieving precise control of soft X-ray output power. Attached Figure Description

[0026] The accompanying drawings illustrate exemplary embodiments of the invention and, together with the description thereof, serve to explain the principles of the invention. These drawings are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification.

[0027] Figure 1 This is a schematic diagram of a contact-separation mode triboelectric soft X-ray emitting device according to an embodiment of the present invention (the contact separation structure is planar contact).

[0028] Figure 2 This is the linear motor structure described in the embodiments of the present invention;

[0029] Figure 3 This is the contact separation mode triboelectric soft X-ray emitting device structure described in the embodiments of the present invention (the contact separation structure is a curved surface contact).

[0030] Figure 4 It is the passive contact unit with epoxy resin on its surface as described in the embodiments of the present invention;

[0031] Figure 5 It is the passive contact unit with acrylic acid surface described in the embodiments of the present invention;

[0032] Figure 6 This is a planar active contact unit with a PVC surface, as described in this embodiment of the invention.

[0033] Figure 7 This is the PDMS planar active contact unit with a microstructured surface as described in the embodiments of the present invention;

[0034] Figure 8 This is an energy spectrum diagram of the X-ray emitting device described in an embodiment of the present invention, showing a comparison of outputs at different contact frequencies;

[0035] Figure 9 This is an energy spectrum diagram of the X-ray generating device described in the embodiments of the present invention, showing a comparison of output under different contact forces;

[0036] Figure 10 It is the PDMS micro / nano structure array with microstructures described in the embodiments of the present invention;

[0037] Reference numerals: 1. Motion structure; 2. System support; 3. Motor rotation support; 4. Linear motor; 5. Active contact unit; 6. Passive contact unit; 7. Contact force measurement sensor; 8. Coupling; 9. Positioning block; 10. Motor support; 11. Planar active contact unit; 12. Planar stage; 13. Limiter; 14. Planar passive contact unit. Detailed Implementation

[0038] The following is in conjunction with the appendix Figures 1 to 10 The present invention will be further described in detail below with reference to the embodiments. It is to be understood that the specific embodiments described herein are for illustrative purposes only and are not intended to limit the scope of the invention. Furthermore, it should be noted that, for ease of description, only the parts relevant to the present invention are shown in the accompanying drawings.

[0039] It should be noted that, unless otherwise specified, the embodiments and features described in this invention can be combined with each other. The technical solution of this invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0040] Unless otherwise stated, the exemplary embodiments / exemplifications shown are to be understood as providing exemplary features of various details that provide ways in which the technical concept of the invention can be implemented in practice. Therefore, unless otherwise stated, the features of the various embodiments / exemplifications may be additionally combined, separated, interchanged and / or rearranged without departing from the technical concept of the invention.

[0041] The use of crosshairs and / or shading in the accompanying drawings is generally used to clarify the boundaries between adjacent components. Thus, unless otherwise stated, the presence or absence of crosshairs or shading does not convey or indicate any preference or requirement for the specific material, material properties, dimensions, proportions, commonalities between the illustrated components, or any other characteristics, properties, etc., of the components. Furthermore, in the accompanying drawings, the dimensions and relative dimensions of components may be exaggerated for clarity and / or descriptive purposes. When exemplary embodiments can be implemented differently, a specific process sequence may be performed in a different order than that described. For example, two consecutively described processes may be performed substantially simultaneously or in the reverse order of their description. Furthermore, the same reference numerals denote the same components.

[0042] When a component is referred to as being "on" or "above" another component, "connected to," or "joined to" another component, the component may be directly on, directly connected to, or directly joined to the other component, or there may be intermediate components. However, when a component is referred to as being "directly on" another component, "directly connected to," or "directly joined to" another component, there are no intermediate components. Therefore, the term "connection" can refer to a physical connection, an electrical connection, etc., and may or may not have intermediate components.

[0043] For descriptive purposes, the present invention may use spatial relative terms such as “below,” “under,” “below,” “down,” “above,” “above,” “higher,” and “side (e.g., in a “sidewall”)” to describe the relationship between one component and another component as shown in the accompanying drawings. In addition to the orientations depicted in the drawings, the spatial relative terms are also intended to encompass different orientations of the device during use, operation, and / or manufacture. For example, if the device in the drawings is flipped, a component described as “below” or “under” another component or feature would subsequently be positioned “above” said other component or feature. Thus, the exemplary term “below” can encompass both “above” and “below” orientations. Furthermore, the device may be otherwise positioned (e.g., rotated 90 degrees or in other orientations), thus interpreting the spatial relative descriptive terms used herein accordingly.

[0044] The terminology used herein is for the purpose of describing particular embodiments and is not intended to be limiting. As used herein, unless the context clearly indicates otherwise, the singular forms “a” and “the” are intended to include the plural forms as well. Furthermore, when the terms “comprising” and / or “including” and variations thereof are used in this specification, it indicates the presence of the stated features, integrals, steps, operations, parts, components, and / or groups thereof, but does not exclude the presence or addition of one or more other features, integrals, steps, operations, parts, components, and / or groups thereof. It should also be noted that, as used herein, the terms “substantially,” “about,” and other similar terms are used as approximate terms rather than as terms of degree, thus explaining the inherent biases in measurements, calculated values, and / or provided values ​​that would be recognized by one of ordinary skill in the art.

[0045] In one embodiment, the present invention provides a contact-separation mode triboelectric soft X-ray emitting device, comprising:

[0046] A motion structure that provides power for reciprocating linear motion;

[0047] A contact structure, disposed in a vacuum environment, includes an active contact unit and a passive contact unit capable of relative movement for periodic contact and separation, wherein the active contact unit is connected to the moving structure;

[0048] The contact surfaces of the active contact unit and the passive contact unit are respectively covered with materials with different electronegativity;

[0049] A contact force measuring unit is used to measure the contact pressure between the active contact unit and the passive contact unit in real time.

[0050] The motion structure is configured to adjust its driving parameters according to the contact pressure of the contact force measuring unit in order to control the output characteristics of the soft X-ray.

[0051] Optionally, the motion structure includes a linear motor, the output end of which is connected to the active contact unit to drive the active contact unit to perform the reciprocating linear motion.

[0052] Optionally, the device further includes a system support and a motor rotating support rotatably connected to the system support, wherein the linear motor is fixedly mounted on the motor rotating support; the emission direction of the soft X-rays is changed by adjusting the angle of the motor rotating support.

[0053] Optionally, the device further includes a positioning block disposed between the output end of the linear motor and the active contact unit to maintain the stability of the reciprocating linear motion.

[0054] Optionally, the contact surface of the active contact unit or the passive contact unit is provided with a micron- or nano-scale array structure to increase the contact area.

[0055] Optionally, the driving parameters include the operating frequency of the linear motor and / or the contact time between the active contact unit and the passive contact unit.

[0056] Optionally, the contact force measuring unit is configured to feed back the measured contact pressure data to the controller of the moving structure to form closed-loop control.

[0057] In another embodiment, the present invention provides a method for generating soft X-rays based on contact separation mode triboelectricity, comprising the following steps:

[0058] Place the device in a vacuum environment;

[0059] The motion structure is activated, driving the active contact unit to periodically contact and separate from the passive contact unit at a set frequency, causing charge transfer and separation on the surfaces of the two materials with different electronegativity, forming an electric field and accelerating electrons, generating bremsstrahlung radiation to emit soft X-rays;

[0060] The contact pressure is monitored in real time by the contact force measurement unit, and the driving parameters of the motion structure are adjusted according to the monitoring results to control the output power of the soft X-ray.

[0061] In another embodiment, the present invention provides a contact-separation mode triboelectric soft X-ray emitting device, comprising:

[0062] The motion structure includes a system support, a motor rotation support, and a linear motor;

[0063] The contact structure includes an active contact unit connected to the moving structure and a passive contact unit fixed to the system support. The active contact unit periodically contacts and separates from the passive contact unit under the drive of a linear motor.

[0064] A vacuum system is used to provide a vacuum environment for the device;

[0065] The contact surfaces of the active contact unit and the passive contact unit are respectively covered with materials of different electronegativity. During the contact separation process, a triboelectric effect is generated, forming a high electric field, which accelerates free electrons and causes them to collide inelasticly with the positively charged material surface, generating bremsstrahlung radiation and emitting soft X-rays.

[0066] In another embodiment, the present invention provides a contact separation mode triboelectric soft X-ray emitting device, the device comprising: a moving structure, a contact structure, and a contact force measuring sensor;

[0067] The motion structure includes a linear motor 4 and a support assembly, the support assembly being used to support the linear motor;

[0068] The contact structure is set in a vacuum environment and includes an active contact unit 5 and a passive contact unit 6 arranged opposite to each other. The active contact unit 5 is connected to the motion structure and achieves reciprocating contact with the passive contact unit 6 under the action of the motion structure. Specifically, the active contact unit 5 is connected to the output end of the linear motor 4, and the passive contact unit 6 is fixedly set.

[0069] The contact surfaces of the active contact unit 5 and the passive contact unit 6 are respectively covered with materials of different electronegativity.

[0070] The contact force measuring sensor 7 is connected to the contact structure and is used to measure the contact pressure between the active contact unit 5 and the passive contact unit 6 in real time.

[0071] Furthermore, the linear motor 4 is configured to drive the active contact unit to perform reciprocating linear motion, so that the active contact unit and the passive contact unit periodically contact and separate, thereby generating triboelectricity on the contact surface and exciting soft X-rays.

[0072] Furthermore, the support assembly includes a system support 2 and a motor rotating support 3; the system support 2 is fixedly installed, the motor rotating support 3 is rotatably connected to the system support 2, and the linear motor 4 is fixedly installed on the motor rotating support 3; by adjusting the angle of the motor rotating support 3 relative to the system support 2, the emission direction of the soft X-rays can be changed.

[0073] By combining the system support with the motor rotation support, the X-ray emission direction can be flexibly adjusted, and the irradiation angle can be changed without moving the entire device, increasing the convenience in practical applications.

[0074] Furthermore, the active contact unit 5 is connected to the linear motor 4 via a coupling 8; the device also includes a positioning block 9 disposed between the linear motor and the active contact unit to maintain the stability of the movement.

[0075] This invention uses a linear motor for direct drive instead of a traditional rotary motor and transmission mechanism. Combined with the design of the positioning block, it not only simplifies the mechanical structure but also significantly improves the stability of the motion and the accuracy of the contact separation action, which helps to obtain a more stable pulsed X-ray signal.

[0076] Furthermore, the material combination of the active contact unit and the passive contact unit surface is selected from one of the following groups: polytetrafluoroethylene and copper, polyvinyl chloride and acrylic acid, or polydimethylsiloxane and acrylic acid.

[0077] Furthermore, the material surface of the active contact unit or the passive contact unit is provided with a micron- or nano-scale array structure, which is used to increase the contact area.

[0078] Furthermore, the device also includes a vacuum pump system that provides a high vacuum environment for the vacuum cryogenic testing system.

[0079] Furthermore, the operating frequency and contact time of the linear motor are adjusted based on the contact pressure data measured by the contact force measurement sensor to control the output power of the soft X-ray.

[0080] This invention utilizes a linear motor to drive an active contact unit and a passive contact unit to periodically contact and separate. This causes charge transfer to occur on the surfaces of two materials with different electronegativity upon contact, and a high electric field is generated upon separation, accelerating the movement of free electrons. These electrons then undergo inelastic collisions with the positively charged material surface, producing bremsstrahlung radiation and ultimately emitting X-rays. This device requires no high-voltage power supply, has a simplified structure, and achieves stable, delay-free soft X-ray output by selecting appropriate contact unit materials, designing surface microstructures, and controlling the magnitude and frequency of the contact force.

[0081] In another embodiment, the present invention provides a contact-separation mode triboelectric soft X-ray emitting device, such as... Figure 1 and Figure 3 As shown. Among them, Figure 1 and Figure 3 The structures of active contact units and passive contact units are different. Figure 1 The structure is planar. Figure 3 The structure is a curved surface.

[0082] The device includes a system support 2, a motor rotation support 3, a linear motor 4, an active contact unit 5, a passive contact unit 6, a contact force measuring sensor 7, a coupling 8, a positioning block 9, a motor support 10, a planar platform 12, and a limiter 13.

[0083] Specifically, the system bracket 2 is fixedly connected to the motor rotation bracket 3 to form a stable support structure; the linear motor 4 is fixed to the system bracket 2 via the motor bracket 10, and its output shaft is connected to the active contact unit 5 via the coupling 8; the active contact unit 5 is a planar active contact unit 11, the surface of which is covered with PVC material (such as...). Figure 6 (as shown) or PDMS materials with microstructures (such as Figure 7 (As shown); the passive contact unit 6 is a planar passive contact unit 14 fixed on the planar stage 12, and its surface can be covered with epoxy resin (such as... Figure 4 (as shown) or acrylic (such as) Figure 5 (As shown); the contact force measuring sensor 7 is installed between the passive contact unit 6 and the planar stage 12 to measure the magnitude of the contact force in real time; the limiter 13 is used to control the movement range of the active contact unit 5.

[0084] In another embodiment, the present invention provides a soft X-ray generation method based on contact separation mode triboelectricity, comprising:

[0085] Step 1: Place the device inside the vacuum chamber and start the vacuum pump system to reduce the pressure inside the chamber to about 1 Pa;

[0086] Start the linear motor 4 to drive the active contact unit 5 to periodically contact and separate from the passive contact unit 6 at a set frequency (e.g., 1-10Hz);

[0087] Step 2: When the PVC material on the surface of the active contact unit 5 comes into contact with the acrylic material on the surface of the passive contact unit 6, charge transfer occurs due to the difference in electronegativity between the two materials, making the PVC surface negatively charged and the acrylic surface positively charged.

[0088] Step 3: When the two surfaces separate, a high electric field is formed, which accelerates the movement of free electrons. The electrons collide with the acrylic surface inelastically, producing bremsstrahlung radiation and emitting soft X-rays.

[0089] Step 4: Monitor the magnitude of the contact force in real time using the contact force measuring sensor 7, adjust the motion parameters of the linear motor 4, and control the contact force within the range of 0.5-20N to obtain the optimal X-ray output;

[0090] Step 5: Change the X-ray output direction by adjusting the angle between the system bracket 2 and the motor rotating bracket 3.

[0091] Figure 8 The attached diagram shows the X-ray emission device energy spectrum at different contact frequencies. According to the diagram, it can be seen that the blue curve (high frequency) has a certain improvement in X-ray energy spectrum count and energy range compared to the red curve (low frequency). The X-ray output can be controlled by changing the contact frequency. Figure 9 The attached diagram shows the energy spectrum of the X-ray generator under different contact forces. According to the diagram, it can be seen that the red curve (relatively large contact force) outputs better than the blue curve (relatively small contact force). Changing the magnitude of the contact force can optimize the X-ray output. Figure 10 It is a PDMS micro-nano structure array with microstructures. The microstructures are columnar structures, with a height of about 15 micrometers, a diameter of 25 micrometers, and a spacing of 40 micrometers.

[0092] In another embodiment, the present invention provides a contact separation mode triboelectric soft X-ray emitting device, the device comprising a motion structure, a contact structure, and a contact force measuring sensor 7;

[0093] The motion structure 1 includes a system support 2, a motor rotation support 3, and a linear motor 4; the system support 2 and the motor rotation support 3 are fixed; the linear motor 4 provides reciprocating linear motion to achieve material contact separation.

[0094] The contact structure includes an active contact unit 5 and a passive contact unit 6; the active contact unit 5 is connected to the motion structure and achieves reciprocating contact with the passive contact unit 6 under the action of the motion structure.

[0095] The system also includes a vacuum pump system; the vacuum pump system provides a high vacuum environment for the vacuum cryogenic testing system.

[0096] The process of X-ray generation is as follows:

[0097] Within the vacuum system, the system pressure is approximately 1 Pa. The active contact unit 5 is connected to the linear motor 4 via a coupling 8. The linear motor 4 drives the active contact unit 5 and the passive contact unit 6 to periodically contact and separate. The surfaces of the active contact unit 5 and the passive contact unit 6 are covered by two materials with different electronegativity (material combinations include: polytetrafluoroethylene and copper, PVC and acrylic, PDMS and acrylic, etc.). During the contact and separation process, the two surfaces are in full contact, and friction causes the surfaces to become charged, accelerating the movement of free electrons. These electrons then undergo inelastic collisions with the positively charged surface materials, generating bremsstrahlung radiation and emitting X-rays.

[0098] The technical contribution of this invention lies in the fact that by constructing an electromechanical coupling system based on real-time monitoring and feedback control of contact force, the key mechanical parameters in the triboelectric soft X-ray emission process can be controlled and stably output, thereby solving the technical problems of unstable output and difficulty in precise control of existing triboelectric X-ray sources.

[0099] The technical contribution is achieved through the following means: a linear motor is used to directly drive the reciprocating motion of the contact unit, which realizes precise and rapid control of the contact separation frequency and stroke, providing an execution basis for subsequent control of X-ray output by adjusting motion parameters.

[0100] By acquiring pressure data in real time during the contact process through the contact force measurement unit, direct signal evidence is provided for judging the contact state and evaluating the charge transfer efficiency.

[0101] By designing micron / nano-scale array structures on the contact surface, the effective contact area and surface charge density are increased, thereby enhancing the triboelectric effect intensity under the same mechanical conditions and further improving X-ray emission efficiency.

[0102] A strong electric field is generated during the contact separation process in a vacuum environment, which accelerates free electrons. The electrons collide with positively charged materials inelasticly to produce bremsstrahlung radiation, ultimately achieving soft X-ray emission without the need for an external high-voltage power supply.

[0103] The emission angle is adjustable by rotating the bracket with a motor, allowing the irradiation direction to be adjusted without moving the entire device, thus improving the flexibility and convenience of the device in detection applications.

[0104] The force sensor 7 can measure the surface contact force in real time. The magnitude of the contact force reflects the contact condition between the two surfaces and has a significant impact on X-ray output. By adjusting the motion of the linear motor 4, the motion frequency and contact time can be changed, thereby adjusting the X-ray output power. The output direction of the X-ray output device can be changed by adjusting the angle between the system support 2 and the motor rotation support 3.

[0105] In the description of this specification, the references to terms such as "one embodiment / mode," "some embodiments / modes," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment / mode or example is included in at least one embodiment / mode or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment / mode or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments / modes or examples. Furthermore, without contradiction, those skilled in the art can combine and integrate the different embodiments / modes or examples described in this specification, as well as the features of different embodiments / modes or examples.

[0106] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0107] Those skilled in the art should understand that the above embodiments are merely for illustrating the present invention and are not intended to limit the scope of the invention. Those skilled in the art can make other changes or modifications based on the above disclosure, and these changes or modifications still fall within the scope of the present invention.

Claims

1. A contact-separation mode triboelectric soft X-ray emitting device, characterized in that, include: A motion structure that provides power for reciprocating linear motion; A contact structure, disposed in a vacuum environment, includes an active contact unit and a passive contact unit capable of relative movement for periodic contact and separation, wherein the active contact unit is connected to the moving structure; The contact surfaces of the active contact unit and the passive contact unit are respectively covered with materials with different electronegativity; A contact force measuring unit is used to measure the contact pressure between the active contact unit and the passive contact unit in real time. The motion structure is configured to adjust its driving parameters according to the contact pressure of the contact force measuring unit in order to control the output characteristics of the soft X-ray.

2. The apparatus according to claim 1, characterized in that, Preferably, the motion structure includes a linear motor, the output end of which is connected to the active contact unit to drive the active contact unit to perform the reciprocating linear motion.

3. The apparatus according to claim 2, characterized in that, The device also includes a system support and a motor rotating support rotatably connected to the system support, wherein the linear motor is fixedly mounted on the motor rotating support; the emission direction of soft X-rays is changed by adjusting the angle of the motor rotating support.

4. The apparatus according to claim 2, characterized in that, The device also includes a positioning block, which is disposed between the output end of the linear motor and the active contact unit to maintain the stability of the reciprocating linear motion.

5. The apparatus according to claim 1, characterized in that, The contact surface of the active contact unit or the passive contact unit is provided with a micron- or nano-scale array structure to increase the contact area.

6. The apparatus according to claim 2, characterized in that, The driving parameters include the operating frequency of the linear motor and / or the contact time between the active contact unit and the passive contact unit.

7. The apparatus according to claim 1, characterized in that, The contact force measurement unit is configured to feed back the measured contact pressure data to the controller of the moving structure to form a closed-loop control.

8. A method for generating soft X-rays based on contact separation mode triboelectricity, characterized in that, Using the apparatus as described in any one of claims 1-7 includes the following steps: Place the device in a vacuum environment; The motion structure is activated, driving the active contact unit to periodically contact and separate from the passive contact unit at a set frequency, causing charge transfer and separation on the surfaces of the two materials with different electronegativity, forming an electric field and accelerating electrons, generating bremsstrahlung radiation to emit soft X-rays; The contact pressure is monitored in real time by the contact force measurement unit, and the driving parameters of the motion structure are adjusted according to the monitoring results to control the output power of the soft X-ray.

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