Pressing equipment

Abstract

The invention provides pressing equipment which comprises an upper die device, a lower die device and a pressing device. The upper die device is matched with a lower die below to jointly press a pressed object, and the upper die device is provided with a driving module and a pressing module. The driving module is provided with a plurality of driving pieces, and each driving piece provides driving force; the pressing module is provided with a plurality of pressing die units; the pressing die unit is provided with a pressing rod assembly and a fixing assembly, the pressing rod assembly is provided with a pressing rod, and a pressing die is arranged at the lower end of the pressing rod; the fixing assembly is provided with two opposite fine adjustment parts, and the levelness of the pressing die is adjusted by adjusting the screwing abutting degree of the fine adjustment parts. Therefore, the quality of the pressing process is improved.

Description

Pressing equipment

[0001] This invention is a divisional application of "Application date: December 25, 2020, application number: 202011567805.6, and invention title: Pressing equipment and its upper mold control method, upper mold device". Technical Field

[0002] This invention relates to a pressing apparatus, and more particularly to a pressing apparatus for pressing a substrate having a grain on it and a heat sink covered thereon. Background Technology

[0003] In typical chip packaging processes, adhesive is first applied to a substrate, and then a die is attached to the substrate. A layer of thermal paste must be applied on top of the die, and then a heat sink is attached to the thermal paste and covers the die and the substrate. Recently, this thermal paste has been gradually replaced by a thermal pad with heat dissipation function. However, in the process of attaching the heat sink, the heat sink on the substrate must be pressed together to ensure that the heat sink is firmly positioned on the substrate and covers the thermal pad.

[0004] Background technology involves an upper mold working in conjunction with a lower mold to press together a substrate containing a die and then cover it with a heat sink. While this achieves the pressing effect on the object being pressed, it is difficult to control the pressing quality because the applied pressure is not easy to control and is prone to variation depending on the stability of the output of the drive device. In order to effectively control the pressing quality, it is necessary to develop suitable mechanisms and measurement methods to ensure quality stability in automated pressing operations in mass production processes. Summary of the Invention

[0005] The purpose of this invention is to provide a method for controlling the upper mold of a pressing device that can manage the pressing quality.

[0006] The upper mold control method of the pressing equipment of the present invention includes: providing a driving module, the driving module providing a downward displacement driving force with a driving rod; providing a pressing module, the pressing module having a pressing mold unit set with a mold base, the upper mold control method of the pressing equipment further includes: causing the driving rod to be driven downward to act first on the load measuring unit on the pressing mold unit in the pressing module, the driving force then indirectly driving the pressing mold below the pressing rod of the pressing mold unit to press against the object to be pressed through the load measuring unit.

[0007] The method for controlling the upper mold of the pressing equipment described in this invention involves the mold being temperature-sensing by a temperature sensing element.

[0008] The upper mold control method of the pressing equipment described in this invention uses gas to blow against the object being pressed below the mold, so as to help the mold to smoothly detach from the object when it is about to rise after pressing.

[0009] The upper mold control method of the pressing equipment of the present invention wherein the pressure rod is maintained in a horizontal radial position by the first positioning unit of the fixing component and is pivotally positioned for upper and lower displacement.

[0010] The upper mold control method of the pressing equipment of the present invention wherein the pressure rod is maintained in a vertical longitudinal position by the second positioning unit of the fixing component.

[0011] The upper mold control method of the pressing equipment described in this invention prevents the pressure rod from rotating when it moves up or down; and provides a restoring force when the driving force that drives the pressure rod to move down is eliminated, so that the pressure rod moves up to return to its original position.

[0012] The upper mold control method of the pressing equipment described in this invention adjusts the bottom surface of the pressing mold by adjusting the screw engagement degree of two opposing fine-tuning parts.

[0013] Another object of the present invention is to provide an upper mold device for a pressing equipment that can control the pressing quality.

[0014] The upper mold device of the pressing equipment of the present invention includes a driving module and a pressing module. The driving module is provided with a fixed base, and the fixed base is provided with multiple driving components. Each driving component is provided with a driving rod capable of vertical displacement. The pressing module is located below the driving module and is provided with a mold base. The mold base is provided with multiple pressing mold units, each corresponding to one of the driving components above. Each pressing mold unit is provided with a pressure rod assembly. The pressure rod assembly is provided with a pressure rod. The upper end of the pressure rod is provided with a load measuring unit, and the lower end is provided with a pressing mold. The driving rod is driven to move downward and acts on the load measuring unit, which indirectly drives the pressing mold below the pressure rod to press the object to be pressed.

[0015] The upper mold device of the pressing equipment of the present invention has a pressure rod with a pipe and a slot communicating with the outside. The mold is equipped with a temperature sensing element, and the temperature sensing element extends to the outside through the slot via the pipe of the pressure rod with a sensing line.

[0016] The upper mold device of the pressing equipment of the present invention has a pressure rod with a pipe and a pipe wall. The pipe wall has an air hole that communicates with the outside. The lower end of the pipe is connected to the fixed seat at the lower end of the pressure rod to form a chamber located between the fixed seat and the pressing mold. The pressing mold has at least one air passage. One end of the at least one air passage communicates with the chamber and the other end communicates with the area below the pressing mold.

[0017] The upper mold device of the pressing equipment of the present invention has a load measuring unit with a cover covering the top of the upper end of the pressure rod. The upper end of the load measuring device inside the cover has a pressing contact protruding from the cover. The pressure rod has a pipe, and the lower end of the load measuring device has a bottom pad embedded in the upper port of the pipe of the pressure rod.

[0018] The upper mold device of the pressing equipment of the present invention includes a pressing mold unit with a fixing component, the fixing component with a first positioning unit, the first positioning unit with a bushing and a pivot seat; the bushing with a shaft hole for the upper and lower displacement of the pressing rod, the pivot seat with a pivot hole for the bushing to pivot, and a flange seat at the lower end of the pivot seat.

[0019] The upper mold device of the pressing equipment of the present invention includes a second positioning unit in the fixing component, and an elastic component is provided between the first positioning unit and the second positioning unit.

[0020] The upper mold device of the pressing equipment of the present invention includes a second positioning unit with a first positioning seat and a second positioning seat; the first positioning seat clamps and fixes the outer diameter of the pressure rod, the second positioning seat is located below the first positioning seat and is provided with a first support and a second support, which are separate components of each other, and the first support and the second support are radially arranged outside the displacement range outside the outer diameter of the pressure rod; the elastic component is sleeved outside the outer diameter of the pressure rod and is located in the displacement range.

[0021] The upper mold device of the pressing equipment of the present invention has a second support frame whose lower end is fixed to the flange seat of the pivot of the first positioning unit and has a pin protruding from the upper end. The first positioning seat has a first fastener and a second fastener to clamp the outer diameter of the pressing rod. The pin is fixed to the bottom of the second fastener with its upper end face. The upper end of the first support frame forms an arc-shaped section that surrounds the outer ring diameter of the displacement section, and the lower end is fixed to the flange seat of the pivot of the first positioning unit.

[0022] The upper mold device of the pressing equipment of the present invention has a fixing component in which the flange seat of the pivot of the first positioning unit is embedded in the positioning part of the mold base, and is fixed to the upper surface of the mold base by a fixing member, thereby restricting the pivot seat in the positioning part of the mold base.

[0023] The upper mold device of the pressing equipment of the present invention has a fixing member with a sleeve hole whose inner diameter is smaller than the outer diameter of the flange seat of the pivot. The inner edge of the fixing member forms a plurality of fine adjustment intervals. Each fine adjustment interval is provided with a fine adjustment member. The fine adjustment member is screwed onto the upper surface of the flange seat of the pivot of the first positioning unit and abuts down to the upper surface of the bottom pad in the positioning part.

[0024] Another object of the present invention is to provide a pressing device for performing the upper mold control method of the pressing device as described above.

[0025] The present invention provides a pressing device for executing the aforementioned pressing device upper mold control method.

[0026] The pressing equipment and its upper mold control method and upper mold device of the present invention, since the driving module provides a downward displacement driving force with a driving rod, and the pressing module is equipped with a mold unit with a mold base, the driving force of the driving rod to move downward first acts on a load measuring unit on the mold unit in the pressing module. The driving force then indirectly drives a mold below a pressure rod of the mold unit to press against a press object through the load measuring unit. Therefore, the driving force of the driving rod of the driving module is first measured by the load measuring unit, so that the driving force is controlled and the quality of the pressing process is improved. Attached Figure Description

[0027] Other features and beneficial effects of the present invention will be clearly presented in the embodiments with reference to the accompanying drawings, wherein:

[0028] Figure 1 is a perspective view illustrating an upper mold device in an embodiment of the present invention;

[0029] Figure 2 is a side view illustrating the upper mold assembly;

[0030] Figure 3 is a perspective view illustrating one of the plurality of molding units in the embodiment described;

[0031] Figure 4 is a side view illustrating one of the molding units; and

[0032] Figure 5 is a cross-sectional view illustrating one of the molding units. Detailed Implementation

[0033] This invention uses the upper mold device of a heat sink pressing equipment in a heat sink manufacturing process as an example for illustration. In actual use, it works in conjunction with the lower mold F below to press the pressing object E. The pressing object E can be an assembly in a semiconductor manufacturing process where a substrate with a die is loaded, coated with a layer of thermal adhesive or a thermal pad is attached, and then covered with a heat sink. The following description focuses only on the upper mold device of this invention as an example.

[0034] Please refer to Figures 1 and 2. In this embodiment of the invention, the upper mold device is provided with:

[0035] The drive module AB has a rectangular fixed base A, and below the fixed base A are multiple drive components B, which are composed of, for example, cylinders and arranged in a matrix. Each drive component B has a drive rod B1 that can be driven independently to move up and down.

[0036] The pressing module CD, located below the drive module AB, has a rectangular mold base C. The mold base C has multiple pressing units D arranged in a matrix, each corresponding to one of the drive components B above it. The drive module AB has multiple rollers A1 spaced apart on its two short sides, and the pressing module CD has multiple rollers C1 spaced apart on its two short sides. When not driven, the bottom end of the drive rod B1 of each drive component B in the drive module AB is separated from the top end of each pressing unit D on the pressing module CD below it, maintaining a distance d. A rectangular mold frame C2 is located below the mold base C of the pressing module CD.

[0037] Please refer to Figure 3. Since the structures of the molding units D are all the same, we will use one of the molding units D as an example. The molding unit D is provided with a pressure rod assembly D1 and a fixing assembly D2, and a load measuring unit D3 is provided at the top of the upper end of the molding unit D.

[0038] Please refer to Figures 3, 4, and 5. The pressure bar assembly D1 is provided with a pressure bar D11. The load measuring unit D3 is provided at the top of the upper end of the pressure bar D11, and a pressure mold D12 is provided at the lower end; wherein:

[0039] The pressure rod D11 is a hollow tube with a pipe D111 in the center. The upper end of the pipe D111, located at the lower end of the load measuring unit D3, has a slot D113 opening through the pipe wall D112 that communicates with the outside. The lower end of the pipe D111 connects to the fixing seat D114 at the lower end of the pressure rod D11, forming a chamber D115 between the fixing seat D114 and the mold D12. The pipe wall D112 has an air hole D116 on the other side opposite to the slot D113 that communicates with the outside. The load measuring unit D3 has a cover D31 that covers the pressure rod. At the top of the upper end of D11, a load measuring device D32 inside the cover D31 has a pressure contact D33 protruding from the cover D31. At the lower end of the load measuring device D32, a bottom pad D34 is embedded in the upper port of the pipe D111 of the pressure rod D11. The driving force of the drive rod B1, which is driven to move downward, first acts on the load measuring unit D3 on the pressing mold unit D in the pressing module CD. The driving force then indirectly drives the pressing mold D12 below the pressure rod D11 of the pressing mold unit D to press against the object E.

[0040] The mold D12 is made of a non-metallic material with pressure and high temperature resistance, such as polyetherimide (PEI). It is equipped with a temperature sensor D121 to sense the temperature conducted from the lower mold F through the object E to the mold D12 when the mold D12 is pressed against the object E. The temperature sensor D121 is linear and extends from the slot D113 through the channel D111 of the pressure rod D11 to the outside. The mold D12 surrounds the temperature sensor D121. Multiple air passages D122 are provided. One end of each air passage D122 is connected to the chamber D115 of the fixed base D114 at the lower end of the pressure rod D11, and the other end is connected to the area below the mold D12. Gas can be introduced through the air hole D116 of the pressure rod D11, through the pipe D111 to the chamber D115, and diffused from the chamber D115 to each air passage D122 to blow gas against the object E under the mold D12, so as to help the mold D12 to smoothly separate from the object E when it is about to rise after pressing.

[0041] The fixing assembly D2 includes a first positioning unit D21 for maintaining the horizontal radial positioning of the pressure rod D11 and pivoting the pressure rod D11 for upward and downward displacement, and a second positioning unit D22 for maintaining the vertical longitudinal positioning of the pressure rod D11; wherein...

[0042] The first positioning unit D21 is provided with a bushing D211 and a pivot seat D212; the bushing D211 is provided with a shaft hole D213 that allows the pressure rod D11 to move up and down and pivot in a direction perpendicular to the Z-axis, and a flange portion D214 with a circular radial cross-section larger than the outer diameter of the bushing D211 is provided at the upper end of the bushing D211; the pivot seat D212 is provided with a pivot hole D215 for the bushing D211 to pivot, and a flange seat D216 that extends radially outward from the lower end of the pivot seat D212; the radial width of the flange seat D216 is greater than the radial width of the pivot seat D212. The second positioning unit D22 includes a first positioning seat D221 and a second positioning seat D222. The first positioning seat D221 is located adjacent to the load measuring unit D3 below and includes a first fastener D2211 and a second fastener D2212, which are separate components. The first fastener D2211 and the second fastener D2212 are radially abutted and screwed together to clamp and fix the outer diameter of the pressure rod D11. The first fastener D2211 has a vent D2213, which corresponds to and communicates with the vent D116 on the pressure rod D11. Positive pressure gas can be input through the vent D2213 and enter the pipe D111 of the pressure rod D11 through the vent D116. The second positioning seat D222 is located below the first positioning seat D221 and includes... A first support frame D2221 and a second support frame D2222 are separate components. The first support frame D2221 and the second support frame D2222 face each other and are radially arranged outside the displacement range D2223 outside the outer diameter of the pressure rod D11. The upper end of the first support frame D2221 forms an arc-shaped range D2224 that surrounds part of the outer diameter of the displacement range D2223, and the lower end is fixed to the flange seat D216 of the pivot seat D212 of the first positioning unit D21. The lower end of the second support frame D2222 is fixed to the flange seat D216 of the pivot seat D212 of the first positioning unit D21, and is provided with a shaft pin D2225 that can move up and down protruding from the upper end. The upper end surface of the shaft pin D2225 is used to fix the bottom of the second fastener D2212.

[0043] An elastic component D23, which is made of a spring, is provided between the first positioning unit D21 and the second positioning unit D22. The elastic component D23 is sleeved on the outside of the pressure rod D11 and is located in the displacement range D2223. The lower end of the elastic component D23 abuts against the upper surface of the flange portion D214 of the bushing D211 of the first positioning unit D21, and the upper end abuts against the lower bottom edge of the first fastener D2211 of the second positioning unit D22.

[0044] When the pressure rod D11 moves up and down in conjunction with the first fastener D2211 and the pin D2225 of the second positioning unit D22, the pin D2225 prevents the pressure rod D11 from rotating. When the driving force that drives the pressure rod D11 to move down is eliminated, the elastic component D23 provides a compressible restoring force to push the first fastener D2211 of the second positioning unit D22, thereby moving the pressure rod D11 up to return to its original position.

[0045] The first positioning unit D21 has two parallel flange sides D217 formed on both sides of the flange portion D214 of the bushing D211; the two sides of the pivot D212 have parallel outer diameter sides D218 formed on both sides of the outer diameter, and the flange sides D217 and the outer diameter sides D218 correspond to each other and are stacked and aligned vertically; the first positioning seat D221 and the second positioning seat D22 of the second positioning unit D22 are respectively clamped on both sides of the stacked flange sides D217 and the outer diameter sides D218, thereby restricting the relative pivoting of the bushing D211 and the pivot D212.

[0046] The fixing component D2 is embedded in a circular groove-shaped positioning part C3 on the upper surface of the mold base C by the flange seat D216 of the pivot seat D212 of the first positioning unit D21. A roughly rectangular ring-shaped fixing member D4 is sleeved on the outside of the second positioning seat D222 of the second positioning unit D22 and the bushing D211 of the first positioning unit D21, and screwed onto the upper surface of the mold base C. The fixing member D4 is plate-shaped and has a hollowed-out sleeve hole D41 with an inner diameter smaller than the outer diameter of the flange seat D216 of the pivot seat D212. The fixing member D4 presses against the upper surface of the flange seat D216 with the inner edge of the sleeve hole D41, thereby restricting the pivot seat D212 in the positioning part C3 of the mold base C.

[0047] The bottom C31 of the positioning part C3 has a circular hollow through hole C32. A ring-shaped gasket D5 is placed on the bottom C31. The center of the gasket D5 has a hollow hole D51 that corresponds to and is approximately the same size as the through hole C32 of the bottom C31 of the positioning part C3. The through hole C32 and the hollow hole D51 are larger than the outer diameter of the bushing D211 of the first positioning unit D21 and allow the bushing D211 to pass through them. The fixed seat D114 at the lower end of the pressure rod D11 and the fixed mold D12 are housed in a mold chamber C21 separated by the mold frame C2 below the mold base C. The mold chamber C21 has a square opening C22 at the bottom and communicates with the through hole C32 at the top. The mold D12 can move up and down in the mold chamber C21 in conjunction with the pressure rod D11.

[0048] The inner diameter of the bushing D41 of the fastener D4 is larger than the outer diameter of the bushing D211. The inner edge of the fastener D4 forms four radially recessed fine-tuning intervals D42 arranged in a 90-degree cross pattern. Each fine-tuning interval D42 contains a fine-tuning element D6 made of a headless screw. The fine-tuning element D6 is screwed onto the upper surface of the flange seat D216 of the pivot seat D212 of the first positioning unit D21, and presses down against the upper surface of the gasket D5. This allows for adjustment... The downward screwing of the two opposing fine-tuning parts D6 against the shim D5 allows the first positioning unit D21 to move the second positioning unit D22 and the lower end of the pressure rod D11, causing the mold D12 to tilt to one side, thereby adjusting the level of the bottom surface of the mold D12. Since the mold base C is made of aluminum, the iron shim D5 is provided to prevent the bottom of the positioning part C3 from being damaged by long-term screwing. In other embodiments of the present invention, the shim D5 can also be omitted.

[0049] The pressing equipment and its upper mold control method and upper mold device of the present invention, since the driving module AB provides the driving force for downward displacement by the driving rod B1, and the pressing module CD sets the pressing mold unit D by the mold base C, the driving force of the driving rod B1 for downward displacement first acts on the load measuring unit D3 on the pressing mold unit D in the pressing module CD. The driving force then indirectly drives the pressing mold D12 below the pressing rod D11 of the pressing mold unit D to press against the object E. Therefore, the driving force of the driving rod B1 of the driving module AB is first measured by the load measuring unit D3, so that the driving force is controlled and the quality of the pressing process is improved.

[0050] The above description is merely a specific embodiment of the present invention and should not be construed as limiting the scope of the claims of the present invention. Equivalent variations made in accordance with the contents of the claims and specification of the present invention should also be covered by the scope of the claims of the present invention.

Claims

1. A pressing device, comprising: An upper mold device is provided to work with a lower mold to press the object being pressed. The upper mold device is provided with a drive module and a pressing module. The driving module is provided with multiple driving components, which provide driving force; the pressing module is provided with multiple pressing mold units, each pressing mold unit is provided with a pressing rod assembly and a fixing assembly, the pressing rod assembly is provided with a pressing rod, and the lower end of the pressing rod is provided with a pressing mold; the characteristic is that: each of the fixing components is provided with two opposing fine-tuning components, and the level of the pressing mold is adjusted by adjusting the screw engagement degree of the fine-tuning components.

2. The pressing equipment according to claim 1, characterized in that: The fixing component is located on the mold base of the pressing module and is provided with a first positioning unit for maintaining the horizontal radial positioning of the pressure rod. The first positioning unit is provided with a bushing and a pivot seat. The bushing is provided with a shaft hole for the pressure rod to move up and down and pivot. The pivot seat is provided with a pivot hole for the bushing to pivot. A flange seat is provided at the lower end of the pivot seat. The fine-tuning component is screwed onto the upper surface of the flange seat of the pivot seat and abuts against the gasket at the bottom of the positioning part of the mold base.

3. The pressing equipment according to claim 1, characterized in that: The fixing component is embedded in the positioning part of the mold base of the pressing module by the flange seat of the pivot seat of the first positioning unit, and is fixed to the upper surface of the mold base by a fastener, thereby restricting the pivot seat in the positioning part of the mold base.

4. The pressing equipment according to claim 3, characterized in that: The fastener has a sleeve hole with an inner diameter smaller than the outer diameter of the flange seat of the pivot. The inner edge of the fastener forms multiple fine-tuning intervals, and each fine-tuning interval is provided with the fine-tuning component.

5. The pressing equipment according to claim 1, characterized in that: The fixing component is located on the mold base of the pressing module and is provided with a second positioning unit to maintain the vertical longitudinal positioning of the pressure rod. The second positioning unit is provided with a first positioning seat and a second positioning seat. The first positioning seat clamps and fixes the outer diameter of the pressure rod. The second positioning seat is located below the first positioning seat and is provided with a first support and a second support, which are separate components, facing each other and radially surrounding the displacement range outside the outer diameter of the pressure rod. An elastic element is provided between the first positioning unit and the second positioning unit. The elastic element is sleeved outside the outer diameter of the pressure rod and located in the displacement range.

6. The pressing equipment according to claim 5, characterized in that: The lower end of the second support frame is fixed to the flange seat of the pivot seat of the first positioning unit, and a pin protrudes from the upper end. The first positioning seat is provided with a first fastener and a second fastener to clamp the outer diameter of the pressure rod. The pin is fixed to the bottom of the second fastener with its upper end face. The upper end of the first support frame forms an arc-shaped section that surrounds the outer ring diameter of the displacement range, and the lower end is fixed to the flange seat of the pivot seat of the first positioning unit.

7. The pressing equipment according to claim 1, characterized in that: The object under pressure is a component with grains mounted on a substrate and covered with heat sinks.

8. The pressing equipment according to claim 1, characterized in that: The fixing component is located on the mold base of the pressing module. A mold frame is provided below the mold base. The mold base is provided with a positioning part. A through hole is provided at the bottom of the positioning part. The mold at the lower end of the pressure rod is housed in a mold chamber separated by the mold frame. The mold chamber is open at the bottom and communicates with the through hole at the top. The mold can be moved up and down in the mold chamber by the pressure rod.

9. The pressing equipment according to claim 1, characterized in that: The pressure rod includes a pipe and a slot that opens from the pipe wall and communicates with the outside. The pressure mold is equipped with a temperature sensing element, which extends to the outside through the slot via a sensing line through the pipe of the pressure rod.

10. The pressing equipment according to claim 1, characterized in that: A load measuring unit is provided above the pressure bar, and the driving force is measured by the load measuring unit.

11. The pressing device according to claim 1, characterized in that: The pressure rod is a hollow tube with a pipe in the center. The tube wall has an air hole that communicates with the outside. The lower end of the pipe is connected to the chamber formed by the lower end fixing seat of the pressure rod and the mold. The mold has an air passage. One end of the air passage communicates with the chamber and the other end communicates with the area below the mold.

12. The pressing equipment according to claim 1, characterized in that: The driving module or the pressing module has multiple rollers spaced apart on both sides.

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