High-speed laser scanning method for small-volume structures based on path optimization

Abstract

This invention claims protection for a high-speed laser scanning method for small-volume structures based on path optimization, belonging to the field of high-speed laser scanning and precision optomechanical control technology. The core of this method lies in constructing a complete closed-loop control system encompassing "data acquisition - model building - parameter adjustment - real-time feedback - dynamic suppression - closed-loop verification," focusing on high-order vibration suppression under high-frequency drive of MEMS micromirrors. By accurately acquiring vibration characteristic data to establish a dedicated database, and combining adaptive filtering and dynamic modeling to create a compensation model that fits the characteristics of the micromirror, the driving current adjustment parameters are finely configured. Vibration and trajectory data are acquired in real time during high-speed scanning, and the adjustment current is dynamically output. The suppression effect is simultaneously verified and iteratively optimized, achieving accurate perception and efficient suppression of internal dynamic vibrations. This method stabilizes the scanning trajectory without sacrificing scanning efficiency, overcoming the problem that traditional technologies relying solely on external parameter adjustments cannot simultaneously achieve high speed and accuracy, thus ensuring high-precision point cloud output for small-volume structures.

Description

Technical Field

[0001] This invention relates to the field of high-speed laser scanning and precision optomechanical control technology, specifically to a high-speed laser scanning method for small-volume structures based on path optimization. Background Technology

[0002] With the continuous improvement of scanning speed and system integration, the high-order vibrations generated by MEMS micromirrors under high-frequency drive have gradually become a key factor limiting scanning accuracy and system reliability. How to effectively suppress vibrations and stabilize the scanning trajectory without sacrificing scanning efficiency has become a technical problem that urgently needs to be solved in this field.

[0003] Regarding traditional technologies, a search revealed that application number CN202211519012.6 provides a laser scanning detection method and system for underwater structures, such as... Figure 1 As shown, this scheme utilizes the collaborative work of sonar equipment and a laser scanner to first acquire sonar point cloud data of underwater structures. Then, it determines whether the target is within the laser scanning range through coordinate transformation. Based on the determination result, it adjusts the scanning parameters and robot posture to achieve rapid matching between the scanned object and the scanning field of view. The key technical aspect of this method lies in the scanning range determination and parameter adjustment under multi-sensor fusion, improving detection efficiency through macroscopic pose and scanning parameter control. However, it primarily focuses on object localization and scanning coverage, without addressing the high-speed dynamic stability of the scanner itself during laser scanning.

[0004] While the aforementioned comparative documents can adjust scanning parameters with the aid of external information, their adjustment logic is mainly based on whether the target enters the scanning range, lacking a mechanism for sensing and suppressing the high-speed vibration state inside the scanner. In small-volume high-speed scanning structures such as MEMS micromirrors, high-order vibrations of the micromirrors directly lead to scanning trajectory distortion and a decrease in point cloud accuracy. Traditional methods cannot quantify and suppress such vibrations in real time during scanning, making it difficult to stably output high-precision point clouds under high-speed conditions. This solution addresses the contradiction between high-speed scanning and accuracy stability at the scanning execution level by constructing a vibration feature database, a vibration suppression compensation model, and an adaptive closed-loop control mechanism for the drive current. It overcomes the shortcomings of traditional technologies that rely solely on external parameter adjustments while neglecting internal dynamic vibration control. Summary of the Invention

[0005] This invention aims to solve the problems of the prior art mentioned above. It proposes a high-speed laser scanning method for small-volume structures based on path optimization. The technical solution of this invention is as follows:

[0006] A high-speed laser scanning method for small-volume structures based on path optimization includes the following steps:

[0007] Step 1: Collect high-order vibration characteristic frequency data of MEMS micromirrors, start the laser scanning system preprocessing program, control the MEMS micromirrors to run according to preset high-speed scanning parameters, use a high-precision laser vibrometer to synchronously collect vibration signals of micromirrors at different scanning rates, filter environmental noise and low-frequency interference signals, extract characteristic frequency, amplitude and phase data corresponding to high-order vibration, and establish a vibration characteristic database.

[0008] Step 2: Construct a vibration suppression and compensation model based on characteristic frequencies. Combining the collected high-order vibration characteristic data, an adaptive filtering algorithm and dynamic modeling method are used to construct a vibration suppression and compensation model that fits the operating characteristics of MEMS micromirrors. A vibration threshold range is preset, and the relationship between micromirror driving parameters and vibration response is correlated.

[0009] Step 3: Configure the adaptive adjustment parameters of the micromirror driving current, set the step size, amplitude range and response delay parameters of the driving current adjustment, match the driving characteristics of the MEMS micromirror, build the current adjustment feedback link, set the trigger conditions for parameter adjustment, and ensure that the driving current can be accurately and adaptively adjusted according to the vibration state of the micromirror.

[0010] Step 4: Real-time acquisition of micromirror vibration data and feedback to the compensation model. During the high-speed laser scanning process, the laser vibrometer continuously acquires the vibration data of the MEMS micromirror. After signal amplification and noise reduction, the data is fed back to the vibration suppression compensation model in real time through the high-speed data transmission module. The model synchronously receives the scanning trajectory positioning data, compares and analyzes the deviation between the vibration data and the preset threshold, and generates real-time compensation instructions.

[0011] Step 5: Dynamically output regulating current to suppress higher-order vibrations of the micromirror. Based on the compensation instructions generated by the compensation model, the driving current regulation module dynamically outputs an appropriate regulating current. By changing the amplitude and frequency of the micromirror driving voltage, the displacement deviation caused by higher-order vibrations is offset. The changes in the vibration state of the micromirror are tracked in real time, and the regulating current parameters are dynamically adjusted.

[0012] Step 6: Synchronously collect the running data and scanning point cloud positioning data after micromirror vibration suppression, compare them with the preset standard parameters and vibration threshold, and verify the vibration suppression effect. If the deviation exceeds the allowable range, trigger the second iteration optimization of the compensation model, fine-tune the driving current adjustment parameters until the scanning trajectory is stable.

[0013] Furthermore, step one specifically includes:

[0014] The laser scanning system enters high-frequency operation during the preprocessing stage. By controlling the MEMS micromirror to run continuously under multiple preset high-speed scanning parameters, the inherent modes of the MEMS micromirror are fully excited in a complete dynamic working condition. A high-precision laser vibrometer acquires the displacement time series signal of the micromirror's reflective surface in strict synchronization with the scanning control clock, and performs amplitude linear calibration and time reference alignment at the signal front end to ensure the comparability of vibration data at different scanning rates. The acquired raw vibration signal is first processed by a band-stop and band-pass combined filter to suppress environmental coupling noise and low-frequency driving fundamental components. The filtered signal can be expressed as:

[0015]

[0016] in This represents the original displacement signal acquired by the laser vibrometer. This represents the filtered vibration signal. This represents the suppression kernel function designed for low-frequency and ambient noise. This represents the integral variable, indicating the amount of time delay. This represents the suppression kernel function for environmental coupled noise and low-frequency driving fundamental components; based on this, ... Perform time-frequency joint analysis based on scan rate correlation by introducing scan angular velocity. The spectrum is remapped to extract higher-order vibration features directly related to high-speed scanning, including their characteristic frequencies. The following energy-weighted criterion is used to determine the value:

[0017]

[0018] in Indicates the scanning angular velocity The vibration energy spectrum distribution under certain conditions is analyzed. To quantify the influence of vibration phase on trajectory deviation at different scanning rates, a phase consistency index is introduced. Its definition is:

[0019]

[0020] in Indicates the first Within the second scan cycle, the first The instantaneous phase of the first vibration component, This represents the number of scan cycles within the statistical window. Ultimately, the characteristic frequencies corresponding to different scan rates are... ,amplitude and phase consistency Structured storage is performed to form a vibration characteristic database that maps one-to-one with the driving parameters.

[0021] Furthermore, step two specifically includes:

[0022] The vibration suppression and compensation model is constructed using the vibration feature database formed in step one as direct input, and the extracted feature frequencies are used as input. ,amplitude Phase Consistency A unified dynamic description framework is introduced, and the MEMS micromirror driving system is parameterized to ensure that the model is structurally consistent with the actual operating state of the micromirror. Firstly, based on the scanning angular velocity... With drive current The coupling relationship between them defines the equivalent response function of higher-order vibrations:

[0023]

[0024] in Indicates the first The combined response intensity of the step vibration to the scanning trajectory The attenuation coefficient, determined by the damping characteristics of the micromirror structure, is represented by this model. A dynamic correlation model between the driving parameters and the vibration response is introduced. This dynamic correlation model is an important component in constructing the vibration suppression and compensation model for MEMS micromirrors. Based on characteristic frequency, amplitude, and phase consistency data extracted from a vibration feature database, this model connects the intrinsic relationship between the micromirror driving parameters and higher-order vibration responses. The core expression is an adaptive filtering update law. ,in This represents the change in driving current at the next moment. To enable the model to adapt to the update rate, Let be the overall response intensity of the k-th order vibration to the scanning trajectory. The model is based on the change in driving current at the current moment. It can adjust the driving parameters in reverse according to the intensity of vibration response at each order. During the model iteration process, it continuously compresses the high-order vibration energy, avoids new resonance problems caused by single-band compensation, and provides key support for the driving adjustment requirements that match the output of the vibration suppression compensation model with the current scanning state.

[0025] By constructing to drive the change in current The adaptive filter update law for controlling the input:

[0026]

[0027] in The model adaptively updates at a certain rate, introducing a vibration threshold range determination mechanism to determine the vibration threshold range obtained in real time. With preset threshold A comparison is made, and the update rate is constrained by a threshold weighting function:

[0028]

[0029] in This represents the initial learning rate.

[0030] Furthermore, step three specifically includes:

[0031] The configuration of the adaptive adjustment parameters for the drive current is based on the vibration response intensity output in step two. With drive current correction As the core constraint, the continuous output of the compensation model is mapped to an executable current regulation strategy to ensure that the control behavior is consistent with the electromagnetic drive characteristics of the MEMS micromirror. First, based on the current sensitivity characteristics of the micromirror drive circuit, a nonlinear mapping relationship between the current regulation step size and the vibration response is constructed:

[0032]

[0033] in This indicates the maximum allowable current step size for a single adjustment. The scaling factor, related to the equivalent impedance and thermal stability boundary of the drive coil, constrains the actual output amplitude of the drive current. A dynamic limiting mechanism based on historical adjustment trajectories is introduced, and its limiting range is defined as follows:

[0034]

[0035] in This indicates the reference drive current during the current scan cycle. The safety factor, representing the fatigue threshold and long-term stability of the micromirror structure, is introduced. A current response delay control function is then used to adjust the update rate of the compensation model. Response latency of the drive link The relationship for implementing collaborative constraints is expressed as follows:

[0036]

[0037] in This indicates the inherent response delay of the system.

[0038] Furthermore, step four specifically includes:

[0039] The real-time vibration data feedback process is based on the current regulation feedback link constructed in step three. During the high-speed laser scanning process, the laser vibrometer continuously acquires the instantaneous displacement signal of the MEMS micromirror using a clock with the same source as the scanning control system. The signal amplitude is standardized through a pre-amplification and adaptive noise reduction module to maintain uniform dimensions and time resolution in data across different scanning cycles. The processed vibration signal is then mapped to a real-time vibration state quantity. and the angle position data output by the scanning trajectory positioning system. A synchronous input vibration suppression and compensation model is used. By constructing a joint evaluation function for vibration and trajectory deviation, the online quantification of the degree of vibration impact is achieved, which is defined as:

[0040]

[0041] in This indicates the real-time update in step two. First-order vibration response intensity, This indicates the reference angle position under the corresponding ideal scanning trajectory, and the results will be evaluated together. With preset vibration threshold Continuous comparisons are performed, and a compensation trigger value is generated by introducing a normalized deviation function:

[0042]

[0043] in Used to characterize the degree to which the current vibration state exceeds the system's allowable upper limit, when When the value is positive, the compensation model immediately incorporates the step size configured in step three. With response latency Real-time compensation instructions are generated, and their weights are further adjusted through time consistency constraints.

[0044]

[0045] in The final weight of the compensation command is represented by the above-mentioned real-time acquisition, joint evaluation and weight generation mechanism. The compensation model can continuously output reliable adjustment commands during high-speed scanning, providing direct input for the next step of dynamically outputting adjustment current and suppressing higher-order vibrations of the micromirror.

[0046] Furthermore, step five specifically includes:

[0047] The dynamic output of the drive current is weighted by the compensation command generated in step four. To directly control the quantity, the compensation decision is transformed into synchronous modulation of the amplitude and frequency of the micromirror driving voltage, thereby achieving real-time cancellation of high-order vibration displacement deviations; firstly, the... An instantaneous correction model for the driving current is introduced to ensure that the regulating current remains consistent with the vibration evolution on the time axis. Its output form is defined as:

[0048]

[0049] in This represents the actual driving current at the current moment. This represents the reference drive current determined in step three. This indicates the allowable current adjustment step size, which will drive the voltage frequency. With real-time vibration characteristic frequency Establish the anti-phase modulation relationship:

[0050]

[0051] in This represents the nominal drive frequency of the scanning system. Representing the frequency modulation sensitivity coefficient, a current smoothing update mechanism based on the vibration rate of change is introduced, constraining the current change between adjacent time moments as follows:

[0052]

[0053] in Indicates the current smoothing factor. It represents the combined intensity of vibration response at all orders.

[0054] Furthermore, step six specifically includes:

[0055] Real-time verification of the vibration suppression effect uses the drive state after adjustment in step five as input, and synchronously collects the vibration state parameters after vibration suppression by the micromirror. Spatial positioning data corresponding to the scanned point cloud Furthermore, the two are aligned on a unified time axis to directly map vibration decay behavior to point cloud geometric stability. First, a scanning stability index is constructed through a quantitative evaluation of point cloud trajectory continuity, defined as:

[0056]

[0057] in This represents the average trajectory fluctuation amplitude within a unit scan period. Indicates the first Spatial coordinates of each sampling point This indicates the number of point clouds participating in the evaluation. Compared with the preset stability threshold and the overall vibration response intensity after vibration suppression A joint judgment is performed, and a verification bias function is constructed to achieve real-time evaluation of the suppression effect:

[0058]

[0059] in This indicates the upper limit of the system's permissible vibration response, when When the set convergence threshold is exceeded, the system triggers a second-order iterative optimization of the compensation model and refines the drive current adjustment parameters by introducing a verification feedback factor. The adjustment amount is defined as follows:

[0060]

[0061] in This represents the amount of current fine-tuning used for iterative optimization. This represents the calibration gain coefficient, which is related to the system's convergence speed.

[0062] An electronic device includes a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor, when executing the program, implements the path optimization-based high-speed laser scanning method for small-volume structures as described in any one of the claims.

[0063] A non-transitory computer-readable storage medium having a computer program stored thereon, wherein the computer program, when executed by a processor, implements the path optimization-based high-speed laser scanning method for small-volume structures as described in any one of the claims.

[0064] The advantages and beneficial effects of this invention are as follows:

[0065] 1. This invention constructs a vibration feature database, and provides precise quantitative support for vibration suppression by excitation modes, signal acquisition and combined filtering to extract feature frequencies and other data.

[0066] 2. An innovative vibration suppression and compensation model is developed, which combines adaptive filtering and dynamic modeling to quickly respond to dynamic changes in micromirror vibration through a threshold mechanism.

[0067] 3. Fine-tuning the drive current parameters, establishing a nonlinear mapping between step size and vibration, and dynamic limiting, to ensure adjustment accuracy and micromirror safety.

[0068] 4. Establish a real-time vibration feedback mechanism to synchronously collect vibration and trajectory data, generate real-time compensation commands, and improve the timeliness and accuracy of decision-making.

[0069] 5. Dynamically and collaboratively adjust the driving current and frequency, and weaken energy coupling through amplitude adjustment and phase inversion modulation to effectively suppress higher-order vibrations.

[0070] 6. Construct a closed-loop verification and iterative optimization mechanism to jointly evaluate stability and vibration response, trigger secondary optimization of the model, and continuously ensure scanning accuracy and trajectory stability.

[0071] The three core innovative protection points of this invention correspond to the core formulas in step one of the claims, such as the construction of the MEMS micromirror vibration feature database and the calculation formula for the filtered signal, as well as the energy weighting criterion for determining the vibration characteristic frequency; the establishment of the vibration suppression compensation model and the formulas in step two, such as the adaptive filtering update law and threshold weighting function for the high-order vibration equivalent response function; and the construction of the adaptive closed-loop control system for the driving current and the formulas for the nonlinear mapping of the current adjustment step size, the joint evaluation function of vibration and trajectory deviation, and the scanning stability index. These constitute the overall protection of the complete closed-loop control process, including data acquisition model construction, parameter adjustment, real-time feedback, dynamic suppression, closed-loop verification, and more. The steps and formulas corresponding to these innovative points are not conventional technical means because conventional laser scanning technology focuses primarily on external scanning parameter adjustment and scanning object positioning, neglecting the internal high-order vibration problem under high-frequency driving of the MEMS micromirror, and failing to establish a relationship between vibration characteristics and driving parameters. While conventional methods have not yet established a complete vibration suppression closed-loop control system at the scanning execution level, this solution, tailored to the characteristics of small-volume, high-speed scanning of MEMS micromirrors, deeply integrates adaptive filtering algorithms with dynamic modeling methods. It constructs a dedicated vibration feature database for the micromirror and designs multi-dimensional quantization formulas to achieve real-time, accurate vibration quantification. Simultaneously, it integrates vibration suppression with drive current adjustment and scan trajectory verification across the entire process, designing a closed-loop verification mechanism with secondary iteration optimization. This achieves real-time dynamic suppression of high-order vibrations during high-speed scanning. This technical design approach, which starts from internal dynamic vibration control and combines precision optomechanical control with high-speed laser scanning, along with the full-process collaborative control method of vibration feature quantification, drive parameter adjustment, and scan trajectory stability adjustment, is unprecedented in conventional techniques. Conventional techniques also cannot achieve effective suppression of high-order vibrations and stable control of the scan trajectory without sacrificing scanning efficiency. Attached Figure Description

[0072] Figure 1 This is a flowchart of a traditional laser scanning detection method for underwater structures.

[0073] Figure 2 This is a schematic diagram of the overall process of the high-speed laser scanning method for small-volume structures based on path optimization according to a preferred embodiment of the present invention;

[0074] Figure 3 A schematic diagram of the process for acquiring high-order vibration characteristic data and constructing a database for MEMS micromirrors;

[0075] Figure 4 A schematic diagram of the process for constructing a vibration suppression and compensation model for MEMS micromirrors;

[0076] Figure 5 This is a schematic diagram of the closed-loop feedback process for real-time suppression of high-order vibrations in MEMS micromirrors.

[0077] Figure 6 This is a schematic diagram of the process for verifying the stability of laser scanning trajectory and iteratively optimizing parameters. Detailed Implementation

[0078] The technical solutions of the embodiments of the present invention will be clearly and thoroughly described below with reference to the accompanying drawings. The described embodiments are merely some embodiments of the present invention.

[0079] The technical solution of the present invention to solve the above-mentioned technical problems is:

[0080] This invention proposes a high-speed laser scanning method for small-volume structures based on path optimization, such as... Figures 2-6 As shown, it includes the following steps:

[0081] Step 1: Collect high-order vibration characteristic frequency data of MEMS micromirrors, start the laser scanning system preprocessing program, control the MEMS micromirrors to run according to preset high-speed scanning parameters, use a high-precision laser vibrometer to synchronously collect vibration signals of micromirrors at different scanning rates, filter environmental noise and low-frequency interference signals, extract characteristic frequency, amplitude and phase data corresponding to high-order vibrations, establish a vibration characteristic database, and provide basic data support for subsequent vibration suppression and trajectory correction.

[0082] Step 2: Construct a vibration suppression and compensation model based on characteristic frequencies. Combining the collected high-order vibration characteristic data, an adaptive filtering algorithm and dynamic modeling method are used to construct a vibration suppression and compensation model that fits the operating characteristics of the MEMS micromirror. A vibration threshold range is preset, the relationship between the micromirror driving parameters and the vibration response is correlated, and the model iteration convergence speed is optimized to ensure that the model can quickly respond to the dynamic changes in the vibration state of the micromirror.

[0083] Step 3: Configure the adaptive adjustment parameters of the micromirror driving current. Based on the output requirements of the vibration suppression compensation model, set the step size, amplitude range and response delay parameters of the driving current adjustment, match the driving characteristics of the MEMS micromirror, build a current adjustment feedback link, set the trigger conditions for parameter adjustment, and ensure that the driving current can be accurately and adaptively adjusted according to the vibration state of the micromirror to avoid over-adjustment or under-adjustment.

[0084] Step 4: Real-time acquisition of micromirror vibration data and feedback to the compensation model. During the high-speed laser scanning process, the laser vibrometer continuously acquires the vibration data of the MEMS micromirror. After signal amplification and noise reduction, the data is fed back to the vibration suppression compensation model in real time through the high-speed data transmission module. The model synchronously receives the scanning trajectory positioning data, compares and analyzes the deviation between the vibration data and the preset threshold, and generates real-time compensation commands.

[0085] Step 5: Dynamically output regulating current to suppress higher-order vibrations of the micromirror. Based on the compensation instructions generated by the compensation model, the driving current regulation module dynamically outputs an appropriate regulating current. By changing the amplitude and frequency of the micromirror driving voltage, the displacement deviation caused by higher-order vibrations is offset. The changes in the vibration state of the micromirror are tracked in real time, and the regulating current parameters are dynamically adjusted to continuously suppress the influence of higher-order vibrations on the scanning trajectory.

[0086] Step Six: Real-time verification of vibration suppression effect and stable scanning trajectory. Simultaneously collect the running data and scanning point cloud positioning data after micromirror vibration suppression, and compare them with preset standard parameters and vibration thresholds to verify the vibration suppression effect. If the deviation exceeds the allowable range, trigger the second iteration optimization of the compensation model, fine-tune the drive current adjustment parameters until the scanning trajectory is stable, ensure the point cloud accuracy of small volume structure scanning, and resolve the contradiction between high-speed scanning and positioning accuracy.

[0087] In step one, the laser scanning system enters a high-frequency operating state during the preprocessing stage. By controlling the MEMS micromirror to run continuously under multiple preset high-speed scanning parameters, the micromirror's inherent structural modes are fully excited in a complete dynamic working condition. A high-precision laser vibrometer acquires the displacement time series signal of the micromirror's reflective surface in a manner strictly synchronized with the scanning control clock, and performs amplitude linear calibration and time reference alignment at the signal front end to ensure the comparability of vibration data at different scanning rates. The acquired raw vibration signal is first processed by a band-stop and band-pass combined filter to suppress environmental coupling noise and low-frequency driving fundamental components. The filtered signal can be expressed as:

[0088]

[0089] in This represents the original displacement signal acquired by the laser vibrometer. This represents the filtered vibration signal. This represents the suppression kernel function designed for low-frequency and environmental noise. The purpose of this treatment is to improve the signal-to-noise ratio without weakening higher-order vibrational energy. Based on this, [the following is omitted as the text is incomplete and requires further context]. Perform time-frequency joint analysis based on scan rate correlation by introducing scan angular velocity. The spectrum is remapped to extract higher-order vibration features directly related to high-speed scanning, including their characteristic frequencies. The following energy-weighted criterion is used to determine the value:

[0090]

[0091] in Indicates the scanning angular velocity The vibration energy spectrum distribution under certain conditions is described in this formula. The purpose of this formula is to stably lock the high-order vibration center frequency that has the greatest impact on the scanning trajectory in a complex spectrum, avoiding characteristic distortion caused by single peak drift. Furthermore, to quantify the influence of vibration phase on trajectory offset at different scanning rates, a phase consistency index is introduced. Its definition is:

[0092]

[0093] in Indicates the first Within the second scan cycle, the first The instantaneous phase of the first vibration component, This indicates the number of scan cycles within the statistical window. This indicator is used to characterize whether higher-order vibrations exhibit a stable superposition trend during high-speed scanning, thereby determining their sustained contribution to trajectory error. Finally, the characteristic frequencies corresponding to different scan rates are... ,amplitude and phase consistency The data is structured and stored to form a vibration feature database that maps one-to-one with the driving parameters. This database provides a quantitative basis that can be directly called upon for the subsequent construction of vibration suppression compensation models, and lays the data foundation for the next step of adaptive suppression modeling based on characteristic frequencies.

[0094] In step two, the vibration suppression compensation model is constructed using the vibration feature database formed in step one as direct input, and the extracted feature frequencies are used as input. ,amplitude Phase Consistency A unified dynamic description framework is introduced, and the MEMS micromirror driving system is parameterized to ensure that the model is structurally consistent with the actual operating state of the micromirror. Firstly, based on the scanning angular velocity... With drive current The coupling relationship between them defines the equivalent response function of higher-order vibrations:

[0095]

[0096] in Indicates the first The combined response intensity of the step vibration to the scanning trajectory This represents the attenuation coefficient determined by the damping characteristics of the micromirror structure. The purpose of this function is to unify the mapping of frequency, amplitude, and phase stability into a single adjustable quantity, providing a clear optimization objective for the compensation model. Based on this, a dynamic correlation model between the driving parameters and the vibration response is introduced, by constructing a model based on the change in driving current. The adaptive filter update law for controlling the input:

[0097]

[0098] in This represents the adaptive update rate of the model. The function of this update law is to adjust the driving parameters in reverse according to the intensity of each vibration response, thereby continuously compressing higher-order vibration energy during model iteration and avoiding new resonance problems caused by single-frequency band compensation. To ensure the stability and rapid convergence of the model under high-speed scanning conditions, a vibration threshold interval determination mechanism is further introduced, which uses the real-time calculated... With preset threshold A comparison is made, and the update rate is constrained by a threshold weighting function:

[0099]

[0100] in The initial learning rate is represented by the design, which aims to improve the model's adjustment sensitivity when the vibration response is strong and automatically reduce the update amplitude when the vibration tends to be suppressed, thereby avoiding overcompensation and improving the overall convergence efficiency. Through the above modeling and adaptive update mechanism, the vibration suppression compensation model can output the drive adjustment requirements that match the current scanning state in real time, providing a clear basis for configuring the adaptive adjustment parameters of the micromirror drive current in the next step.

[0101] In step three, the adaptive adjustment parameters of the driving current are configured based on the vibration response intensity output in step two. With drive current correction As the core constraint, the continuous output of the compensation model is mapped to an executable current regulation strategy to ensure that the control behavior is consistent with the electromagnetic drive characteristics of the MEMS micromirror. First, based on the current sensitivity characteristics of the micromirror drive circuit, a nonlinear mapping relationship between the current regulation step size and the vibration response is constructed:

[0102]

[0103] in This indicates the maximum allowable current step size for a single adjustment. This represents a scaling factor related to the equivalent impedance of the drive coil and the thermal stability boundary. The purpose of this formula is to ensure that the adjustment amplitude maintains sufficient responsiveness under high vibration conditions and automatically converges when the vibration stabilizes, thereby avoiding control jitter caused by frequent fine-tuning. Based on this, the actual output amplitude of the drive current is constrained by introducing a dynamic limiting mechanism based on historical adjustment trajectories. The limiting range is defined as follows:

[0104]

[0105] in This indicates the reference drive current during the current scan cycle. The safety factor represents the fatigue threshold and long-term stability of the micromirror structure. This limiting design ensures that the compensation action always remains within the safe range that the micromirror can withstand, preventing drive overload due to increased instantaneous vibration. Simultaneously, to match the timing requirements under high-speed scanning conditions, a current response delay control function is introduced to adjust the update rate of the compensation model. Response latency of the drive link The relationship for implementing collaborative constraints is expressed as follows:

[0106]

[0107] in This indicates the inherent response delay of the system. The purpose of this design is to compress the current regulation delay when the vibration response is strong, so that the compensation action closely follows the vibration change, and restores a smooth response rhythm when the vibration weakens, thereby improving the overall control stability. Through the above step size setting, amplitude constraint and time delay matching, the current regulation feedback link can accurately execute the compensation model instructions when the trigger conditions are met, creating a controllable execution basis for the next step of real-time acquisition of vibration data and formation of closed-loop feedback during high-speed scanning.

[0108] In step four, the real-time vibration data feedback process is based on the current regulation feedback link constructed in step three. During the high-speed laser scanning process, the laser vibrometer continuously acquires the instantaneous displacement signal of the MEMS micromirror using a clock of the same origin as the scanning control system. The signal amplitude is standardized through a pre-amplification and adaptive noise reduction module to maintain uniform dimensions and time resolution in data across different scanning cycles. The processed vibration signal is then mapped to a real-time vibration state quantity. and the angle position data output by the scanning trajectory positioning system. A synchronous input vibration suppression and compensation model is used. By constructing a joint evaluation function for vibration and trajectory deviation, the online quantification of the degree of vibration impact is achieved, which is defined as:

[0109]

[0110] in This indicates the real-time update in step two. First-order vibration response intensity, This represents the reference angle position under the corresponding ideal scanning trajectory. The purpose of this function is to directly correlate vibration intensity with spatial scanning error, providing a clear quantitative basis for compensation decisions. Based on this, the joint evaluation results will be... With preset vibration threshold Continuous comparisons are performed, and a compensation trigger value is generated by introducing a normalized deviation function:

[0111]

[0112] in This design characterizes the degree to which the current vibration state exceeds the system's allowable upper limit. Its purpose is to avoid relying solely on a single vibration amplitude to determine compensation actions, thereby improving the accuracy of identifying complex vibration modes. When the value is positive, the compensation model immediately incorporates the step size configured in step three. With response latency Real-time compensation instructions are generated, and their weights are further adjusted through time consistency constraints.

[0113]

[0114] in The final weight of the compensation command is used to suppress over-adjustment caused by instantaneous fluctuations, so that the compensation action closely follows the actual vibration evolution trend. Through the above-mentioned real-time acquisition, joint evaluation and weight generation mechanism, the compensation model can continuously output reliable adjustment commands during high-speed scanning, providing direct input for the next step of dynamically outputting adjustment current and suppressing higher-order vibrations of the micromirror.

[0115] In step five, the dynamic output of the drive current is weighted according to the compensation command generated in step four. To directly control the quantity, the compensation decision is transformed into synchronous modulation of the amplitude and frequency of the micromirror driving voltage, thereby achieving real-time cancellation of high-order vibration displacement deviations; firstly, the... An instantaneous correction model for the driving current is introduced to ensure that the regulating current remains consistent with the vibration evolution on the time axis. Its output form is defined as:

[0116]

[0117] in This represents the actual driving current at the current moment. This represents the reference drive current determined in step three. This indicates the permissible current adjustment step size. The purpose of this expression is to ensure that the compensation intensity is strictly controlled within the vibration exceedance level, thereby avoiding the vibration amplification effect caused by fixed gain control. After the current amplitude is determined, in order to further accurately suppress the frequency characteristics of higher-order vibrations, the driving voltage frequency is... With real-time vibration characteristic frequency Establish the anti-phase modulation relationship:

[0118]

[0119] in This represents the nominal drive frequency of the scanning system. This represents the frequency modulation sensitivity coefficient. The purpose of this design is to weaken the energy coupling between higher-order vibrations and the driving signal through dynamic offset on the frequency side, thereby actively dispersing the vibration energy at the driving level. Simultaneously, to ensure the stability of the adjustment process during continuous scanning, a current smoothing update mechanism based on the vibration rate of change is introduced, constraining the current change between adjacent time steps as follows:

[0120]

[0121] in Indicates the current smoothing factor. This represents the combined intensity of vibration response at all orders. The purpose of this constraint is to ensure that the trend of the driving current changes in line with the trend of vibration decay, thereby avoiding lag or superposition of compensation actions. Through the coordinated control of amplitude adjustment, frequency modulation and smooth update, the driving current can continuously track the vibration state of the micromirror during high-speed scanning and effectively suppress the influence of higher-order vibrations, providing a stable operating foundation for the next step of real-time verification of vibration suppression effect and trajectory stability assessment.

[0122] In step six, the real-time verification of the vibration suppression effect uses the drive state after adjustment in step five as the input condition, and simultaneously collects the vibration state parameters after the micromirror vibration suppression. Spatial positioning data corresponding to the scanned point cloud Furthermore, the two are aligned on a unified time axis to directly map vibration decay behavior to point cloud geometric stability. First, a scanning stability index is constructed through a quantitative evaluation of point cloud trajectory continuity, defined as:

[0123]

[0124] in This represents the average trajectory fluctuation amplitude within a unit scan period. Indicates the first Spatial coordinates of each sampling point This indicates the number of point clouds involved in the evaluation. The purpose of this indicator is to directly reflect the actual improvement effect of vibration suppression on the scanning results through geometric continuity; based on this, Compared with the preset stability threshold and the overall vibration response intensity after vibration suppression A joint judgment is performed, and a verification bias function is constructed to achieve real-time evaluation of the suppression effect:

[0125]

[0126] in This indicates the upper limit of the system's allowed vibration response. The purpose of this function is to avoid judging solely from the vibration amplitude or point cloud error, thereby improving the reliability of the verification results. When the set convergence threshold is exceeded, the system triggers a second-order iterative optimization of the compensation model and refines the drive current adjustment parameters by introducing a verification feedback factor. The adjustment amount is defined as follows:

[0127]

[0128] in This represents the amount of current fine-tuning used for iterative optimization. The calibration gain coefficient is related to the system's convergence speed. The purpose of this design is to make the optimization process directly guided by the stability of the scanning results, and to gradually compress residual vibration and trajectory errors. Through the above real-time calibration and iterative optimization mechanism, the system can continuously maintain a stable scanning trajectory and high-precision point cloud output under high-speed scanning conditions, thereby completing the closed-loop vibration suppression control process and entering a long-term stable operating state.

[0129] The core of this technical solution lies in constructing a complete closed-loop control system encompassing "data acquisition, model building, parameter adjustment, real-time feedback, dynamic suppression, and closed-loop verification," focusing on high-order vibration suppression under high-frequency drive of MEMS micromirrors. By accurately acquiring vibration characteristic data to establish a dedicated database, and combining adaptive filtering and dynamic modeling to create a compensation model tailored to the micromirror's characteristics, the driving current adjustment parameters are finely configured. Vibration and trajectory data are acquired in real-time during high-speed scanning, and the adjustment current is dynamically output. The suppression effect is simultaneously verified and iteratively optimized. This achieves precise perception and efficient suppression of internal dynamic vibrations at the scanning execution level, stabilizing the scanning trajectory without sacrificing scanning efficiency. It overcomes the challenge of traditional technologies that rely solely on external parameter adjustments and cannot balance high speed and accuracy, ensuring high-precision point cloud output for small-volume structures.

[0130] Key points and points to be protected in this invention

[0131] 1. By using laser excitation and signal acquisition, a high-precision vibration characteristic database is constructed to provide a quantitative basis for suppression.

[0132] 2. Establish an adaptive compensation model that integrates dynamic modeling and threshold mechanism to achieve a rapid dynamic response to vibration.

[0133] 3. A closed-loop control system for the drive current is formed, which combines real-time feedback and verification iteration to accurately suppress vibration and ensure scanning accuracy and stability.

[0134] It should be noted that the user information (including but not limited to user device information, personal user information, etc.) and data (including but not limited to data used for analysis, data stored, data displayed, etc.) involved in this application are all information and data authorized by the user or fully authorized by all parties, and the collection, use and processing of related data must comply with the laws, regulations and standards of relevant countries and regions.

[0135] The systems, devices, modules, or units described in the above embodiments can be implemented by computer chips or entities, or by products with certain functions.

[0136] Computer-readable media includes both permanent and non-permanent, removable and non-removable media that can store information using any method or technology. Information can be computer-readable instructions, data structures, modules of programs, or other data. Examples of computer storage media include, but are not limited to, phase-change memory (PRAM), static random access memory (SRAM), dynamic random access memory (DRAM), other types of random access memory (RAM), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory or other memory technologies, CD-ROM, digital versatile optical disc (DVD) or other optical storage, magnetic tape, magnetic magnetic disk storage or other magnetic storage devices, or any other non-transferable medium that can be used to store information accessible by a computing device. As defined herein, computer-readable media does not include transient computer-readable media, such as modulated data signals and carrier waves.

[0137] It should also be noted that the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0138] The above embodiments should be understood as illustrative only and not as limiting the scope of protection of the present invention. After reading the description of the present invention, those skilled in the art can make various alterations or modifications to the present invention, and these equivalent changes and modifications also fall within the scope defined by the claims of the present invention.

Claims

1. A high-speed laser scanning method for small-volume structures based on path optimization, characterized in that, Includes the following steps: Step 1: Collect high-order vibration characteristic frequency data of MEMS micromirrors, start the laser scanning system preprocessing program, control the MEMS micromirrors to run according to preset high-speed scanning parameters, use a high-precision laser vibrometer to synchronously collect vibration signals of micromirrors at different scanning rates, filter environmental noise and low-frequency interference signals, extract characteristic frequency, amplitude and phase data corresponding to high-order vibration, and establish a vibration characteristic database. Step 2: Construct a vibration suppression and compensation model based on characteristic frequencies. Combining the collected high-order vibration characteristic data, an adaptive filtering algorithm and dynamic modeling method are used to construct a vibration suppression and compensation model that fits the operating characteristics of MEMS micromirrors. A vibration threshold range is preset, and the relationship between micromirror driving parameters and vibration response is correlated. Step 3: Configure the adaptive adjustment parameters of the micromirror driving current, set the step size, amplitude range and response delay parameters of the driving current adjustment, match the driving characteristics of the MEMS micromirror, build the current adjustment feedback link, set the trigger conditions for parameter adjustment, and ensure that the driving current can be accurately and adaptively adjusted according to the vibration state of the micromirror. Step 4: Real-time acquisition of micromirror vibration data and feedback to the compensation model. During the high-speed laser scanning process, the laser vibrometer continuously acquires the vibration data of the MEMS micromirror. After signal amplification and noise reduction, the data is fed back to the vibration suppression compensation model in real time through the high-speed data transmission module. The model synchronously receives the scanning trajectory positioning data, compares and analyzes the deviation between the vibration data and the preset threshold, and generates real-time compensation instructions. Step 5: Dynamically output regulating current to suppress higher-order vibrations of the micromirror. Based on the compensation instructions generated by the compensation model, the driving current regulation module dynamically outputs an appropriate regulating current. By changing the amplitude and frequency of the micromirror driving voltage, the displacement deviation caused by higher-order vibrations is offset. The changes in the vibration state of the micromirror are tracked in real time, and the regulating current parameters are dynamically adjusted. Step 6: Synchronously collect the running data and scanning point cloud positioning data after micromirror vibration suppression, compare them with the preset standard parameters and vibration threshold, and verify the vibration suppression effect. If the deviation exceeds the allowable range, trigger the second iteration optimization of the compensation model, fine-tune the driving current adjustment parameters until the scanning trajectory is stable.

2. The high-speed laser scanning method for small-volume structures based on path optimization according to claim 1, characterized in that, Step one specifically includes: The laser scanning system enters high-frequency operation during the preprocessing stage. By controlling the MEMS micromirror to run continuously under multiple preset high-speed scanning parameters, the inherent modes of the MEMS micromirror are fully excited in a complete dynamic working condition. A high-precision laser vibrometer acquires the displacement time series signal of the micromirror's reflective surface in strict synchronization with the scanning control clock, and performs amplitude linear calibration and time reference alignment at the signal front end to ensure the comparability of vibration data at different scanning rates. The acquired raw vibration signal is first processed by a band-stop and band-pass combined filter to suppress environmental coupling noise and low-frequency driving fundamental components. The filtered signal can be expressed as: in This represents the original displacement signal acquired by the laser vibrometer. This represents the filtered vibration signal. This represents the suppression kernel function designed for low-frequency and ambient noise. This represents the integral variable, indicating the amount of time delay. This represents the suppression kernel function for environmental coupled noise and low-frequency driving fundamental components; based on this, ... Perform time-frequency joint analysis based on scan rate correlation by introducing scan angular velocity. The spectrum is remapped to extract higher-order vibration features directly related to high-speed scanning, including their characteristic frequencies. The following energy-weighted criterion is used to determine the value: in Indicates the scanning angular velocity The vibration energy spectrum distribution under certain conditions is analyzed. To quantify the influence of vibration phase on trajectory deviation at different scanning rates, a phase consistency index is introduced. Its definition is: in Indicates the first Within the second scan cycle, the first The instantaneous phase of the first vibration component, This represents the number of scan cycles within the statistical window. Ultimately, the characteristic frequencies corresponding to different scan rates are... ,amplitude and phase consistency Structured storage is performed to form a vibration characteristic database that maps one-to-one with the driving parameters.

3. The high-speed laser scanning method for small-volume structures based on path optimization according to claim 2, characterized in that, Step two specifically includes: The vibration suppression and compensation model is constructed using the vibration feature database formed in step one as direct input, and the extracted feature frequencies are used as input. ,amplitude Phase Consistency A unified dynamic description framework is introduced, and the MEMS micromirror driving system is parameterized to ensure that the model is structurally consistent with the actual operating state of the micromirror. Firstly, based on the scanning angular velocity... With drive current The coupling relationship between them defines the equivalent response function of higher-order vibrations: in Indicates the first The combined response intensity of the step vibration to the scanning trajectory The attenuation coefficient, determined by the damping characteristics of the micromirror structure, is represented by this model. A dynamic correlation model between the driving parameters and the vibration response is introduced. This dynamic correlation model is an important component in constructing the vibration suppression and compensation model for MEMS micromirrors. Based on characteristic frequency, amplitude, and phase consistency data extracted from a vibration feature database, this model connects the intrinsic relationship between the micromirror driving parameters and higher-order vibration responses. The core expression is an adaptive filtering update law. ,in This represents the change in driving current at the next moment. To enable the model to adapt to the update rate, Let be the overall response intensity of the k-th order vibration to the scanning trajectory. This represents the change in drive current at the current moment; By constructing to drive the change in current The adaptive filter update law for controlling the input: in The model adaptively updates at a certain rate, introducing a vibration threshold range determination mechanism to determine the vibration threshold range obtained in real time. With preset threshold A comparison is made, and the update rate is constrained by a threshold weighting function: in This represents the initial learning rate.

4. The high-speed laser scanning method for small-volume structures based on path optimization according to claim 3, characterized in that, Step three specifically includes: The configuration of the adaptive adjustment parameters for the drive current is based on the vibration response intensity output in step two. With drive current correction As the core constraint, the continuous output of the compensation model is mapped to an executable current regulation strategy to ensure that the control behavior is consistent with the electromagnetic drive characteristics of the MEMS micromirror. First, based on the current sensitivity characteristics of the micromirror drive circuit, a nonlinear mapping relationship between the current regulation step size and the vibration response is constructed: in This indicates the maximum allowable current step size for a single adjustment. The scaling factor, related to the equivalent impedance and thermal stability boundary of the drive coil, constrains the actual output amplitude of the drive current. A dynamic limiting mechanism based on historical adjustment trajectories is introduced, and its limiting range is defined as follows: in This indicates the reference drive current during the current scan cycle. The safety factor, representing the fatigue threshold and long-term stability of the micromirror structure, is introduced. A current response delay control function is then introduced to adjust the update rate of the compensation model. Response latency of the drive link The relationship for implementing collaborative constraints is expressed as follows: in This indicates the inherent response delay of the system.

5. The high-speed laser scanning method for small-volume structures based on path optimization according to claim 4, characterized in that, Step four specifically includes: The real-time vibration data feedback process is based on the current regulation feedback link constructed in step three. During the high-speed laser scanning process, the laser vibrometer continuously acquires the instantaneous displacement signal of the MEMS micromirror using a clock with the same source as the scanning control system. The signal amplitude is standardized through a pre-amplification and adaptive noise reduction module to maintain uniform dimensions and time resolution in data across different scanning cycles. The processed vibration signal is then mapped to a real-time vibration state quantity. and the angle position data output by the scanning trajectory positioning system. A synchronous input vibration suppression and compensation model is used. By constructing a joint evaluation function for vibration and trajectory deviation, the online quantification of the degree of vibration impact is achieved, which is defined as: in This indicates the real-time update in step two. First-order vibration response intensity, This indicates the reference angle position under the corresponding ideal scanning trajectory, and the results will be evaluated together. With preset vibration threshold Continuous comparisons are performed, and a compensation trigger value is generated by introducing a normalized deviation function: in Used to characterize the degree to which the current vibration state exceeds the system's allowable upper limit, when When the value is positive, the compensation model immediately incorporates the step size configured in step three. With response latency Real-time compensation instructions are generated, and their weights are further adjusted through time consistency constraints. in The final weight of the compensation command is represented by the above-mentioned real-time acquisition, joint evaluation and weight generation mechanism. The compensation model can continuously output reliable adjustment commands during high-speed scanning, providing direct input for the next step of dynamically outputting adjustment current and suppressing higher-order vibrations of the micromirror.

6. The high-speed laser scanning method for small-volume structures based on path optimization according to claim 5, characterized in that, Step five specifically includes: The dynamic output of the drive current is weighted by the compensation command generated in step four. To directly control the quantity, the compensation decision is transformed into synchronous modulation of the amplitude and frequency of the micromirror driving voltage, thereby achieving real-time cancellation of high-order vibration displacement deviations; firstly, the... An instantaneous correction model for the driving current is introduced to ensure that the regulating current remains consistent with the vibration evolution on the time axis. Its output form is defined as: in This represents the actual driving current at the current moment. This represents the reference drive current determined in step three. This indicates the allowable current adjustment step size, which will drive the voltage frequency. With real-time vibration characteristic frequency Establish the anti-phase modulation relationship: in This represents the nominal drive frequency of the scanning system. Representing the frequency modulation sensitivity coefficient, a current smoothing update mechanism based on the vibration rate of change is introduced, constraining the current change between adjacent time moments as follows: in Indicates the current smoothing factor. It represents the combined intensity of vibration response at all orders.

7. The high-speed laser scanning method for small-volume structures based on path optimization according to claim 6, characterized in that, Step six specifically includes: Real-time verification of the vibration suppression effect uses the drive state after adjustment in step five as input, and synchronously collects the vibration state parameters after vibration suppression by the micromirror. Spatial positioning data corresponding to the scanned point cloud Furthermore, the two are aligned on a unified time axis to directly map vibration decay behavior to point cloud geometric stability. First, a scanning stability index is constructed through a quantitative evaluation of point cloud trajectory continuity, defined as: in This represents the average trajectory fluctuation amplitude within a unit scan period. Indicates the first Spatial coordinates of each sampling point This indicates the number of point clouds participating in the evaluation. Compared with the preset stability threshold and the overall vibration response intensity after vibration suppression A joint judgment is performed, and a verification bias function is constructed to achieve real-time evaluation of the suppression effect: in This indicates the upper limit of the system's permissible vibration response, when When the set convergence threshold is exceeded, the system triggers a second-order iterative optimization of the compensation model and refines the drive current adjustment parameters by introducing a verification feedback factor. The adjustment amount is defined as follows: in This represents the current fine-tuning amount used for iterative optimization. This represents the calibration gain coefficient, which is related to the system's convergence speed.

8. An electronic device comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, characterized in that, When the processor executes the program, it implements the path optimization-based high-speed laser scanning method for small-volume structures as described in any one of claims 1 to 7.

9. A non-transitory computer-readable storage medium having a computer program stored thereon, characterized in that, When the computer program is executed by the processor, it implements the path optimization-based high-speed laser scanning method for small-volume structures as described in any one of claims 1 to 7.

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