A piezoelectric pump

Abstract

The application discloses a piezoelectric pump, which comprises a first-stage piezoelectric pump unit, a second-stage piezoelectric pump unit, a third-stage piezoelectric pump unit and a fourth-stage piezoelectric pump unit, and a slope groove is arranged at each of a first output flow channel, a second output flow channel, a third output flow channel and a fourth output flow channel; the slope groove comprises a slope surface guide part and is used for reducing the effective volume of each output flow channel and providing a guide thrust for fluid. The piezoelectric pump has a four-stage series structure and a slope groove design, and the output flow and lift are effectively improved. The piezoelectric effect of piezoelectric ceramics is utilized to drive the expansion and contraction vibration of a metal sheet, and the directional delivery of fluid is realized in cooperation with a one-way valve; the slope groove reduces the volume of the outlet flow channel, guides and improves the water flow speed, further increases the liquid pressure and strengthens the lift effect; the piezoelectric pump has the advantages of compact structure, small size and low power consumption, guarantees the efficient and stable heat dissipation in a high-load environment and has a wide application prospect.

Description

Technical Field

[0001] This invention relates to the field of pump-driven two-phase liquid cooling technology, and more particularly to a piezoelectric pump. Background Technology

[0002] In pump-driven two-phase liquid cooling systems, pump drive technology is a core element, crucial for ensuring stable operation under high heat loads. This system achieves efficient heat dissipation by precisely controlling fluid circulation, utilizing the principle of coolant evaporation and heat absorption in the heat source area and condensation and heat release in the cold area. The pump's performance directly determines the overall system's heat dissipation efficiency and reliability. While traditional centrifugal pumps can provide large flow rates and stable delivery, their large size and weight, weak self-priming capability, slow response speed, and high sensitivity to air bubbles severely limit their application in compact devices such as personal computers (PCs). In contrast, piezoelectric pumps, with their simple structure, small size, lack of independent drive motor, no electromagnetic radiation, and low noise, are considered an ideal miniature refrigerant pump solution for PC liquid cooling systems. However, existing piezoelectric pump technology faces two major bottlenecks: firstly, limited output flow rate, making it difficult to meet the rapid heat dissipation requirements of high-power components; and secondly, insufficient head, resulting in insufficient circulation power of the fluid in complex or long-distance pipelines, affecting overall heat dissipation efficiency and thus limiting their widespread application in high-temperature two-phase flow heat dissipation scenarios. Summary of the Invention

[0003] This invention provides a piezoelectric pump to solve the technical problems of low output flow and low head in existing piezoelectric pumps used in pump-driven two-phase liquid-cooled applications.

[0004] In view of the above technical problems, embodiments of the present invention provide a piezoelectric pump, comprising:

[0005] The first-stage piezoelectric pump unit includes a first piezoelectric vibrator, a first check valve, a first input flow channel, a first-stage first transition flow channel, a first-stage second transition flow channel, a first output flow channel, and a second check valve;

[0006] The second-stage piezoelectric pump unit includes a second piezoelectric vibrator, a third check valve, a second-stage first transition flow channel, a second-stage second transition flow channel, a second output flow channel, and a fourth check valve.

[0007] The third-stage piezoelectric pump unit includes a third piezoelectric vibrator, a fifth check valve, a third input flow channel, a third-stage first transition flow channel, a third-stage second transition flow channel, a third output flow channel, and a sixth check valve.

[0008] The fourth-stage piezoelectric pump unit includes a fourth piezoelectric vibrator, a seventh check valve, a fourth-stage first transition flow channel, a fourth-stage second transition flow channel, a fourth output flow channel, and an eighth check valve;

[0009] The second output channel is connected to the third input channel through a U-shaped tube. The first-stage piezoelectric pump unit, the second-stage piezoelectric pump unit, the third-stage piezoelectric pump unit and the fourth-stage piezoelectric pump unit are arranged in series along the axial direction. Each stage of the channel is connected in sequence through a check valve to form a step-by-step pressurization channel from the first input channel to the fourth output channel.

[0010] Inclined grooves are provided at the first output flow channel, the second output flow channel, the third output flow channel, and the fourth output flow channel. The inclined grooves include slope guides to reduce the effective volume of each output flow channel and provide guiding thrust for the fluid. A notched central ring is provided between two adjacent pump bodies.

[0011] Optionally, the first piezoelectric vibrator, the second piezoelectric vibrator, the third piezoelectric vibrator, and the fourth piezoelectric vibrator have the same structure, each consisting of a piezoelectric ceramic and a metal sheet bonded to the piezoelectric ceramic with epoxy resin.

[0012] Optionally, the piezoelectric pump further includes an O-ring, which is disposed in a U-groove to enhance the sealing performance of the component and prevent fluid leakage.

[0013] Optionally, the piezoelectric pump further includes a wire, with the piezoelectric ceramic and the metal sheet welded to one end of the wire, and the other end of the wire leading out from the notched central ring and connected to a driving power supply to provide an electrical signal to the piezoelectric vibrator.

[0014] Optionally, the piezoelectric pump adopts a 2×2 matrix stacked layout, with the first-stage piezoelectric pump unit and the second-stage piezoelectric pump unit arranged on the upper layer; and the third-stage piezoelectric pump unit and the fourth-stage piezoelectric pump unit arranged on the lower layer.

[0015] In this invention, by axially cascading four-stage piezoelectric pump units and combining them with an innovative design of U-shaped tubes connecting the upper and lower flow channels, multi-stage pressurization is achieved within a limited space, effectively solving the technical problems of low head and difficulty in balancing flow rate and head in piezoelectric pumps. The inclined grooves set at the output flow channels of each stage significantly improve the outlet pressure by reducing the effective volume and providing slope guiding thrust, enabling the four-chamber series structure to achieve ultra-high head output while maintaining high flow rate. The 2×2 matrix stacking layout combined with the sealing design of the notched central ring not only meets the stringent requirements of high-density computing devices for small size, but also avoids the cavitation problem of traditional centrifugal pumps by utilizing the characteristic of piezoelectric drive without rotating parts, providing a reliable pump-driven two-phase liquid cooling solution for high-power heat dissipation of AI chips. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments of the present invention will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the overall structure of a piezoelectric pump according to one embodiment of the present invention;

[0018] Figure 2 This is a cross-sectional view of the overall structure of the piezoelectric pump in one embodiment of the present invention;

[0019] Figure 3 This is a schematic diagram of the inclined groove in one embodiment of the present invention;

[0020] Figure 4 This is a schematic diagram of the structure of the first piezoelectric vibrator in one embodiment of the present invention.

[0021] The reference numerals in the accompanying drawings are as follows:

[0022] 11-First piezoelectric vibrator, 12-First check valve, 13-First input channel, 14-First stage first transition channel, 15-First stage second transition channel, 16-First output channel, 17-Second check valve, 18-First adjacent check valve, 21-Second piezoelectric vibrator, 22-Third check valve, 23-Second stage first transition channel, 24-Second stage second transition channel, 25-Second output channel, 26-Fourth check valve, 27-Second adjacent check valve, 31-Third piezoelectric vibrator, 32-Fifth check valve, 33-Third input channel, 34-Third stage first... 35-Third stage second transition channel, 36-Third output channel, 37-Sixth check valve, 38-Third adjacent check valve, 41-Fourth piezoelectric vibrator, 42-Seventh check valve, 43-Fourth stage first transition channel, 44-Fourth stage second transition channel, 45-Fourth output channel, 46-Eighth check valve, 47-Fourth adjacent check valve, 5-U-tube, 6-Sloping groove, 61-Slope guide, 7-Notched center ring, 8-Piezoelectric ceramic, 9-Metal sheet, 10-Pump body, 111-O-ring seal, 112-U-groove, 113-Wire. Detailed Implementation

[0023] To make the technical problems solved, the technical solutions, and the beneficial effects of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

[0024] In the description of this invention, it should be understood that the terms "longitudinal," "radial," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0025] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0026] like Figures 1 to 4 As shown, one embodiment of the present invention provides a piezoelectric pump, comprising:

[0027] The first-stage piezoelectric pump unit includes a first piezoelectric vibrator 11, a first check valve 12, a first input flow channel 13, a first-stage first transition flow channel 14, a first-stage second transition flow channel 15, a first output flow channel 16, and a second check valve 17.

[0028] The second-stage piezoelectric pump unit includes a second piezoelectric vibrator 21, a third check valve 22, a second-stage first transition channel 23, a second-stage second transition channel 24, a second output channel 25, and a fourth check valve 26.

[0029] The third-stage piezoelectric pump unit includes a third piezoelectric vibrator 31, a fifth check valve 32, a third input flow channel 33, a third-stage first transition flow channel 34, a third-stage second transition flow channel 35, a third output flow channel 36, and a sixth check valve 37.

[0030] The fourth-stage piezoelectric pump unit includes a fourth piezoelectric vibrator 41, a seventh check valve 42, a fourth-stage first transition channel 43, a fourth-stage second transition channel 44, a fourth output channel 45, and an eighth check valve 46.

[0031] The second output channel 25 is connected to the third input channel 33 through a U-shaped tube 5. The first stage piezoelectric pump unit, the second stage piezoelectric pump unit, the third stage piezoelectric pump unit and the fourth stage piezoelectric pump unit are arranged in series along the axial direction. Each stage of the channel is connected in sequence through a check valve to form a step-by-step pressurization channel from the first input channel 13 to the fourth output channel 45.

[0032] Inclined grooves 6 are provided at the first output channel 16, the second output channel 25, the third output channel 36, and the fourth output channel 45. The inclined grooves 6 include slope guide parts 61, which are used to reduce the effective volume of each output channel and provide guiding thrust for the fluid. A notched central ring 7 is provided between two adjacent pump bodies 10.

[0033] Understandably, the first-stage piezoelectric pump unit is disposed within the pump body 10, and includes a first piezoelectric vibrator 11, a first input channel 13, a first output channel 16, a first check valve 12 disposed between the first input channel 13 and the first-stage first transition channel 14, and a second check valve 17 disposed between the first-stage second transition channel 15 and the first output channel 16.

[0034] The second-stage piezoelectric pump unit is disposed within the pump body 10 and arranged on the same layer as the first-stage piezoelectric pump unit. It includes a second piezoelectric vibrator 21, a second-stage first transition channel 23, a second-stage second transition channel 24, a second output channel 25, a third check valve 22 disposed between the first output channel 16 and the second-stage first transition channel 23, and a fourth check valve 26 disposed on the second-stage second transition channel 24.

[0035] The third-stage piezoelectric pump unit is disposed within the pump body 10 and arranged in a layer opposite to the first-stage piezoelectric pump unit. It includes a third piezoelectric vibrator 31, a third input channel 33, a third-stage first transition channel 34, a third-stage second transition channel 35, a third output channel 36, a fifth check valve 32 disposed between the third input channel 33 and the third-stage first transition channel 34, and a sixth check valve 37 disposed on the third-stage second transition channel 35.

[0036] The fourth-stage piezoelectric pump unit is disposed within the pump body 10 and arranged on the same layer as the third-stage piezoelectric pump unit. It includes a fourth piezoelectric vibrator 41, a fourth-stage first transition channel 43, a fourth-stage second transition channel 44, a fourth output channel 45, a seventh check valve 42 disposed between the third output channel 36 and the fourth-stage first transition channel 43, and an eighth check valve 46 disposed on the fourth-stage second transition channel 44.

[0037] In this invention, by axially cascading four-stage piezoelectric pump units and combining them with the innovative design of U-shaped tubes 5 connecting the upper and lower flow channels, multi-stage pressurization is achieved within a limited space, effectively solving the technical problems of low piezoelectric pump head and difficulty in balancing flow rate and head. The inclined grooves 6 set at the output flow channels of each stage significantly improve the outlet pressure by reducing the effective volume and providing slope guiding thrust, enabling the four-chamber series structure to increase the piezoelectric pump head while maintaining a high flow rate. The 2×2 matrix stacking layout combined with the sealing design of the notched central ring 7 not only meets the stringent requirements of high-density computing equipment for small size, but also prevents fluid leakage, ensuring the stable operation of the piezoelectric pump.

[0038] In one embodiment, such as Figure 2 and Figure 4 As shown, the first piezoelectric oscillator 11, the second piezoelectric oscillator 21, the third piezoelectric oscillator 31, and the fourth piezoelectric oscillator 41 have the same structure, each consisting of a piezoelectric ceramic 8 and a metal sheet 9 bonded to the piezoelectric ceramic 8 with epoxy resin. Understandably, the first to fourth piezoelectric oscillators 11 all adopt a structural design where the piezoelectric ceramic 8 and the metal sheet 9 are bonded together with epoxy resin. This achieves standardization and modularity of the oscillator structure, ensuring that the piezoelectric ceramic 8 can effectively drive the metal sheet 9 to vibrate synchronously when deformed under the action of an electric field, and also improving the mechanical strength and durability of the oscillator through the epoxy resin bonding process.

[0039] In one embodiment, such as Figure 2 As shown, the piezoelectric pump also includes an O-ring seal 111, which is disposed within the U-groove 112 to enhance the sealing performance of the components and prevent fluid leakage. Understandably, the placement of the O-ring seal 111 within the U-groove 112 effectively enhances the sealing performance at the connections between the various components of the piezoelectric pump. The elastic deformation of the O-ring seal 111 fills the microscopic gaps between the components, forming a reliable static sealing barrier. This design significantly reduces the risk of fluid leakage under high-pressure conditions.

[0040] In one embodiment, such as Figure 1 and Figure 2As shown, the piezoelectric pump also includes a wire 113. The piezoelectric ceramic 8 and the metal sheet 9 are welded to one end of the wire 113, and the other end of the wire 113 is led out from the notched central ring 7 and connected to the driving power supply to provide an electrical signal to the piezoelectric oscillator. Understandably, by welding the piezoelectric ceramic 8 and the metal sheet 9 together with the wire 113 and leading it out from the notched central ring 7 to the driving power supply, reliable transmission of electrical signals and independent drive control of the oscillator are achieved. The design of the notched central ring 7 ensures both the compactness of the wire 113's structure and prevents fluid leakage through a sealing structure. This layout ensures continuous and stable fluid transmission in the progressively pressurized flow channel, while avoiding electromagnetic interference or short-circuit risks that may be caused by traditional wiring methods, thereby improving the overall electrical performance and operational stability of the piezoelectric pump.

[0041] In one embodiment, such as Figure 1 and Figure 2 As shown, the piezoelectric pump adopts a 2×2 matrix stacking layout, with the first and second stage piezoelectric pump units arranged in the upper layer; and the third and fourth stage piezoelectric pump units arranged in the lower layer. Understandably, by using a 2×2 matrix stacking layout to divide the four-stage piezoelectric pump units into upper and lower layers, a compact integration of multiple pump units is achieved within a limited space, significantly improving the space utilization and overall structural strength of the piezoelectric pump. Simultaneously, it facilitates the balancing of vibration characteristics of each stage pump unit through layered optimization design, ultimately achieving the miniaturization and weight reduction goals of the piezoelectric pump while ensuring high head and large flow output performance.

[0042] The working process of the piezoelectric pump of the present invention is as follows:

[0043] When the piezoelectric ceramic 8 on the first side of the first piezoelectric vibrator 11 undergoes expansion and contraction vibration under the action of an electric field, it drives the metal sheet 9 bonded to it with epoxy resin to expand and contract. When the metal sheet 9 expands and vibrates, the suction force it generates opens the first one-way valve 12, and liquid is drawn into the first-stage first transition channel 14 from the first input channel 13. Subsequently, the metal sheet 9 contracts and vibrates, applying pressure to the liquid in the first-stage first transition channel 14; at the same time, the piezoelectric ceramic 8 on the second side (opposite to the first side) of the first piezoelectric vibrator 11 expands and vibrates under the action of an electric field, applying suction to the liquid in the first-stage first transition channel 14; at this time, the first one-way valve 12 closes, the second one-way valve 17 opens, and the first adjacent one-way valve 18 adjacent to the second one-way valve 17 closes, and the liquid is forced into the first-stage second transition channel 15. Subsequently, the piezoelectric ceramic 8 on the second side of the first piezoelectric vibrator 11 undergoes contraction vibration under the action of the electric field, applying pressure to the liquid in the first stage second transition channel 15, and the first adjacent one-way valve 18 opens, allowing the liquid to flow into the first output channel 16.

[0044] In this process, the ramp trough 6 located at the first output channel 16 effectively reduces the volume of the first output channel 16, thereby increasing the pressure of the liquid flowing into the channel under the compression of the piezoelectric ceramic 8. The slope guide portion 61 of the ramp trough 6, under the pressure of the piezoelectric ceramic 8, guides the water flow, increasing the water velocity and further increasing the water pressure. Ultimately, the liquid is output through the first output channel 16 at a higher pressure, achieving an increase in head.

[0045] The liquid output from the first output channel 16 reaches the inlet area associated with the secondary piezoelectric pump unit through the relevant channels. Under the action of an electric field, the piezoelectric ceramic 8 on the first side of the second piezoelectric vibrator 21 drives the metal sheet 9 to vibrate. When the metal sheet 9 extends, the third one-way valve 22 opens, and the liquid is drawn into the second-stage first transition channel 23. When the metal sheet 9 contracts, the third one-way valve 22 closes. Simultaneously, under the action of an electric field, the piezoelectric ceramic 8 on the second side of the second piezoelectric vibrator 21 drives the metal sheet 9 to extend and vibrate. At this time, the fourth one-way valve 26 opens, and the second adjacent one-way valve 27 adjacent to the fourth one-way valve 26 closes, and the liquid is forced into the second-stage second transition channel 24. Subsequently, when the piezoelectric ceramic 8 on the second side of the second piezoelectric vibrator 21 drives the metal sheet 9 to contract and vibrate under the action of an electric field, the second adjacent one-way valve 27 opens, and the liquid is forced into the second output channel 25 by the piezoelectric ceramic 8 on the second side of the second piezoelectric vibrator 21. At this time, the ramp trough 6 at the second output channel 25 also plays a key role in increasing the head.

[0046] The liquid output from the second output channel 25 is connected to the third input channel 33 through the U-tube 5. When the piezoelectric ceramic 8 on the first side of the third piezoelectric vibrator 31 vibrates and causes the metal sheet 9 to extend, the fifth one-way valve 32 opens, and the liquid is drawn from the third input channel 33 into the third-stage first transition channel 34. When the metal sheet 9 contracts, the fifth one-way valve 32 closes. At the same time, the piezoelectric ceramic 8 on the second side of the third piezoelectric vibrator 31 vibrates and causes the metal sheet 9 to extend and vibrate, and the eighth one-way valve 37 opens. The liquid is forced into the third-stage second transition channel 35 by the piezoelectric ceramic 8 on the second side of the third piezoelectric vibrator 31. Subsequently, when the piezoelectric ceramic 8 causes the metal sheet 9 to contract and vibrate under the action of the electric field, the third adjacent one-way valve 38 adjacent to the eighth one-way valve 37 opens, and the liquid is forced into the third output channel 36. The ramp trough 6 at the third output channel 36 begins to function, increasing the pressure of the inflowing liquid by reducing the volume of the third output channel 36, and the ramp guide 61 increases the water flow velocity, further increasing the pressure. The liquid is then output through the third output channel 36 at a higher pressure, achieving another increase in head.

[0047] The liquid output from the third output channel 36 enters the relevant inlet of the fourth-stage piezoelectric pump unit. The piezoelectric ceramic 8 on the first side of the fourth piezoelectric vibrator 41 vibrates, causing the metal sheet 9 to extend, opening the seventh one-way valve 42, and the liquid is drawn into the fourth-stage first transition channel 43; when the metal sheet 9 contracts, the seventh one-way valve 42 closes; at the same time, the piezoelectric ceramic 8 on the second side of the fourth piezoelectric vibrator 41 vibrates, causing the metal sheet 9 to extend, opening the eleventh one-way valve 46, and the liquid is drawn into the fourth-stage second transition channel 44;

[0048] Subsequently, when the piezoelectric ceramic 8 on the second side of the fourth piezoelectric vibrator 41 causes the metal sheet 9 to contract and vibrate under the action of the electric field, the fourth adjacent one-way valve 47 opens, and the liquid is forced into the fourth output channel 45 by the piezoelectric ceramic 8 on the second side of the fourth piezoelectric vibrator 41. The ramp trough 6 at the fourth output channel 45 also increases the liquid pressure by reducing the volume and guiding the water flow velocity. The liquid is finally output through the fourth output channel 45 at a higher pressure, completing the entire process of pressurizing and transporting liquid in the four-stage series piezoelectric pump, and each stage achieves an increase in head through the action of the ramp trough.

[0049] Throughout the operation, the O-ring 111 is placed in the U-groove 112 to enhance the sealing performance between components and prevent fluid leakage; the wire 113 connects the piezoelectric ceramic 8 and the metal sheet 9 to the drive power supply to provide electrical signals for the piezoelectric vibrator; the notched central ring 7 plays a certain role in connecting adjacent pump bodies 10 and may provide structural support.

[0050] The above-described embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention, and should all be included within the protection scope of the present invention.

Claims

1. A piezoelectric pump, characterized in that, include: The first-stage piezoelectric pump unit includes a first piezoelectric vibrator (11), a first check valve (12), a first input flow channel (13), a first-stage first transition flow channel (14), a first-stage second transition flow channel (15), a first output flow channel (16), and a second check valve (17). The second-stage piezoelectric pump unit includes a second piezoelectric vibrator (21), a third check valve (22), a second-stage first transition channel (23), a second-stage second transition channel (24), a second output channel (25), and a fourth check valve (26). The third-stage piezoelectric pump unit includes a third piezoelectric vibrator (31), a fifth check valve (32), a third input flow channel (33), a third-stage first transition flow channel (34), a third-stage second transition flow channel (35), a third output flow channel (36), and a sixth check valve (37). The fourth-stage piezoelectric pump unit includes a fourth piezoelectric vibrator (41), a seventh check valve (42), a fourth-stage first transition channel (43), a fourth-stage second transition channel (44), a fourth output channel (45), and an eighth check valve (46). The second output channel (25) is connected to the third input channel (33) through a U-tube (5). The first stage piezoelectric pump unit, the second stage piezoelectric pump unit, the third stage piezoelectric pump unit and the fourth stage piezoelectric pump unit are arranged in series along the axial direction. Each stage of the channel is connected in sequence through a check valve to form a step-by-step pressurization channel from the first input channel (13) to the fourth output channel (45). A ramp groove (6) is provided at the first output channel (16), the second output channel (25), the third output channel (36), and the fourth output channel (45). The ramp groove (6) includes a slope guide (61) to reduce the effective volume of each output channel and provide guiding thrust for the fluid. A notched central ring (7) is provided between two adjacent pump bodies (10).

2. The piezoelectric pump according to claim 1, characterized in that, The first piezoelectric vibrator (11), the second piezoelectric vibrator (21), the third piezoelectric vibrator (31) and the fourth piezoelectric vibrator (41) have the same structure, each consisting of a piezoelectric ceramic (8) and a metal sheet (9) bonded to the piezoelectric ceramic (8) with epoxy resin.

3. The piezoelectric pump according to claim 1, characterized in that, It also includes an O-ring (111), which is disposed in a U-groove (112) to enhance the sealing performance of the component and prevent fluid leakage.

4. The piezoelectric pump according to claim 2, characterized in that, It also includes a wire (113), the piezoelectric ceramic (8) and the metal sheet (9) are welded to one end of the wire (113), and the other end of the wire (113) is led out from the notched central ring (7) to connect to the driving power supply to provide an electrical signal for the piezoelectric vibrator.

5. The piezoelectric pump according to claim 4, characterized in that, The piezoelectric pump adopts a 2×2 matrix stacked layout, with the first-stage piezoelectric pump unit and the second-stage piezoelectric pump unit arranged on the upper layer; and the third-stage piezoelectric pump unit and the fourth-stage piezoelectric pump unit arranged on the lower layer.

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