Display substrate and manufacturing method thereof

Abstract

A display substrate and a manufacturing method thereof. The display substrate comprises: a substrate substrate; a plurality of first electrodes, the plurality of first electrodes are located on the substrate substrate, and gaps are provided between adjacent first electrodes; a plurality of light-emitting layers, located on a side of the plurality of first electrodes away from the substrate substrate, and corresponding to the plurality of first electrodes one by one, the projection of the first electrode on the substrate substrate is located in the projection of the corresponding light-emitting layer on the substrate substrate, the colors of adjacent light-emitting layers are different and the edges are located in the gaps between the corresponding adjacent first electrodes; a second electrode covering the plurality of light-emitting layers; a compensation column located in the gap between the adjacent first electrodes, the compensation column has a first surface and a second surface extending from the top of the compensation column to both sides, the first surface is covered by a first light-emitting layer in the adjacent light-emitting layers, the second surface is covered by a second light-emitting layer in the adjacent light-emitting layers, the first surface has a first slope angle, and the second surface has a second slope angle, wherein the first slope angle is smaller than the second slope angle.

Description

Display substrate and its manufacturing method Technical Field

[0001] This disclosure relates to the field of display technology, and more specifically to a display substrate and its manufacturing method. Background Technology

[0002] With the development of display technology, the requirements for display devices are becoming increasingly stringent. The display effect of a display device is largely related to the structure of the display substrate, but currently most display substrates cannot meet users' growing demands for display quality. Summary of the Invention

[0003] According to one aspect of this disclosure, a display substrate is provided, comprising: a substrate; a plurality of first electrodes located on the substrate, the plurality of first electrodes having gaps between adjacent first electrodes; a plurality of light-emitting layers located on the side of the plurality of first electrodes away from the substrate and corresponding one-to-one with the plurality of first electrodes, wherein the projection of the first electrode on the substrate lies within the projection of the corresponding light-emitting layer on the substrate, adjacent light-emitting layers have different colors and their edges lie in the gaps between their corresponding adjacent first electrodes; a second electrode covering the plurality of light-emitting layers; and a compensation pillar located in the gaps between adjacent first electrodes, the compensation pillar having a first surface and a second surface extending from the top of the compensation pillar to both sides, the first surface being covered by a first light-emitting layer among adjacent light-emitting layers, the second surface being covered by a second light-emitting layer among adjacent light-emitting layers, the first surface having a first slope angle, and the second surface having a second slope angle, wherein the first slope angle is smaller than the second slope angle.

[0004] In some embodiments, the display substrate further includes a pixel defining layer having openings corresponding one-to-one with the plurality of first electrodes, the edge regions of each first electrode being covered by the pixel defining layer and the central regions being exposed through the corresponding openings, and the compensation pillars being located on the side of the pixel defining layer away from the substrate.

[0005] In some embodiments, the light-emitting layer includes a flat portion located above an opening in the pixel defining layer and a curved portion surrounding the flat portion, wherein in a cross-section perpendicular to the substrate, the width of the curved portion in a direction parallel to the substrate is smaller than the width of the flat portion in the direction parallel to the substrate.

[0006] In some embodiments, at the top position of the compensation column, the surface of the first light-emitting layer away from the substrate has a third slope angle, and the surface of the second light-emitting layer away from the substrate has a fourth slope angle, wherein the difference between the third slope angle and the fourth slope angle is less than the difference between the first slope angle and the second slope angle.

[0007] In some embodiments, the rate of change of the first slope angle is less than the rate of change of the second slope angle.

[0008] In some embodiments, the first and second surfaces of the compensation pillar are curved surfaces that bend toward the substrate.

[0009] In some embodiments, a first surface of the compensation post extends from the top of the compensation post to a first position, and a second surface of the compensation post extends from the top of the compensation post to a second position, wherein the first position has the same or different height in the direction perpendicular to the substrate as the second position.

[0010] In some embodiments, in a direction perpendicular to the substrate, the ratio of the distance from the top of the compensation pillar to the first or second position to the distance from the top of the compensation pillar to the bottom is in the range of 40% to 60%.

[0011] In some embodiments, in a direction perpendicular to the substrate, the top of the compensation pillar is higher than the surface of the first electrode on the side away from the substrate.

[0012] In some embodiments, in the gap between adjacent first electrodes, the first light-emitting layer and the second light-emitting layer overlap, such that the second light-emitting layer covers the edge of the first light-emitting layer, wherein the projection of the overlapping position of the first light-emitting layer and the second light-emitting layer on the substrate does not overlap with the projection of the top of the compensation pillar on the substrate.

[0013] In some embodiments, the display substrate further includes: a hole injection layer, a hole transport layer, an electron transport layer, and an electron injection layer, wherein the hole injection layer and the hole transport layer are located between the plurality of light-emitting layers and the plurality of first electrodes, and the hole transport layer is located on the side of the hole injection layer away from the substrate; the electron transport layer and the electron injection layer are located between the plurality of light-emitting layers and the second electrode, and the electron injection layer is located on the side of the electron transport layer away from the substrate.

[0014] In some embodiments, at least one of the hole injection layer, hole transport layer, electron transport layer and electron injection layer is a continuous layer.

[0015] In some embodiments, at least one of the hole injection layer, hole transport layer, electron transport layer and electron injection layer includes a plurality of discrete units, and the plurality of discrete units correspond one-to-one with the plurality of light-emitting layers.

[0016] In some embodiments, the display substrate further includes a spacer located in the gap between adjacent first electrodes, on the side of the pixel defining layer facing the substrate.

[0017] In some embodiments, the first slope angle and the second slope angle are in the range of 15° to 90°, and the difference between the first slope angle and the second slope angle is in the range of 15° to 75°.

[0018] In some embodiments, the size of the compensation pillar in the direction parallel to the substrate is in the range of 0.3 μm to 0.5 μm.

[0019] In some embodiments, the dimension of the compensation pillar in the direction perpendicular to the substrate is... to Within the range.

[0020] In some embodiments, the compensation column is made of an inorganic insulating material.

[0021] In some embodiments, the surfaces of the plurality of light-emitting layers on the side away from the substrate are substantially flush.

[0022] In some embodiments, at the top position of the supplementary pillar, the spacing between adjacent light-emitting layers is less than 0.2 μm.

[0023] In some embodiments, the gap width between adjacent first electrodes is in the range of 0.2 μm to 1.3 μm.

[0024] In some embodiments, the display substrate further includes an encapsulation layer that covers the second electrode.

[0025] In some embodiments, the display substrate further includes: a planarization layer covering the encapsulation layer; and a plurality of microlenses located on the side of the planarization layer away from the substrate and corresponding one-to-one with the plurality of light-emitting layers.

[0026] According to another aspect of this disclosure, a method for manufacturing a display substrate is also provided, comprising: forming a plurality of first electrodes on a substrate, with gaps between adjacent first electrodes; forming a compensation pillar in the gaps between adjacent first electrodes; forming a plurality of light-emitting layers corresponding one-to-one with the plurality of first electrodes on a side of the plurality of first electrodes away from the substrate, wherein the projection of the first electrode on the substrate is located within the projection of the corresponding light-emitting layer on the substrate, adjacent light-emitting layers have different colors and their edges are located in the gaps between their corresponding adjacent first electrodes; forming a second electrode covering the plurality of light-emitting layers; wherein the compensation pillar has a first surface and a second surface extending from the top of the compensation pillar to both sides, the first surface is covered by a first light-emitting layer in the adjacent light-emitting layers, the second surface is covered by a second light-emitting layer in the adjacent light-emitting layers, the first surface has a first slope angle, and the second surface has a second slope angle, wherein the first slope angle is smaller than the second slope angle.

[0027] In some embodiments, the method further includes: forming a pixel defining layer before forming the compensation pillar, the pixel defining layer having openings corresponding one-to-one with the plurality of first electrodes, the edge regions of each first electrode being covered by the pixel defining layer and the central regions being exposed through the corresponding openings; the forming of the compensation pillar includes: forming a compensation pillar in the gap between adjacent first electrodes on the side of the pixel defining layer away from the substrate.

[0028] In some embodiments, the compensation pillar includes a first compensation pillar and a second compensation pillar, and the formation of a plurality of light-emitting layers corresponding one-to-one with the plurality of first electrodes includes: sequentially forming a first color light-emitting layer, a second color light-emitting layer and a third color light-emitting layer on the plurality of first electrodes using a silicon-based independent vapor deposition (SBS) process, such that in the gap between adjacent first electrodes, the first compensation pillar is covered by the first color light-emitting layer and the second color light-emitting layer, and the second compensation pillar is covered by the second color light-emitting layer and the third color light-emitting layer.

[0029] In some embodiments, the method further includes filling the gap between adjacent first electrodes with a spacer before forming the pixel defining layer. Attached Figure Description

[0030] Figure 1 shows a schematic diagram of the structure of a stacked OLED device.

[0031] Figure 2A shows a schematic cross-sectional view of a display substrate according to an embodiment of the present disclosure.

[0032] Figure 2B shows an example of the structure of the display substrate in local region A of Figure 2A.

[0033] Figure 3 shows a schematic cross-sectional view of a display substrate according to another embodiment of the present disclosure.

[0034] Figure 4 shows a schematic cross-sectional view of a display substrate according to another embodiment of the present disclosure.

[0035] Figure 5A shows a schematic cross-sectional view of a display substrate according to another embodiment of the present disclosure.

[0036] Figure 5B shows a schematic cross-sectional view of a display substrate according to another embodiment of the present disclosure.

[0037] Figure 6A shows a schematic cross-sectional view of a display substrate according to another embodiment of the present disclosure.

[0038] Figure 6B shows a schematic cross-sectional view of a display substrate according to another embodiment of the present disclosure.

[0039] Figure 7 shows a schematic cross-sectional view of a display substrate according to another embodiment of the present disclosure.

[0040] Figure 8 shows a schematic diagram of the structure of a display substrate according to an embodiment of the present disclosure.

[0041] Figures 9A to 9G illustrate the manufacturing process of a display substrate according to an embodiment of the present disclosure. Detailed Implementation

[0042] While this disclosure will be fully described with reference to the accompanying drawings containing preferred embodiments, it should be understood before this description that those skilled in the art can modify the disclosure described herein to obtain the technical effects of this disclosure. Therefore, it should be understood that the above description is a broad disclosure to those skilled in the art and is not intended to limit the exemplary embodiments described herein.

[0043] Furthermore, in the following detailed description, numerous specific details are set forth for ease of explanation to provide a thorough understanding of the embodiments disclosed herein. However, it will be apparent that one or more embodiments may be practiced without these specific details. In other instances, well-known structures and apparatuses are illustrated to simplify the figures.

[0044] Silicon-based OLED microdisplays typically use white light-emitting devices combined with CF filters to achieve color display. Since white light-emitting devices usually employ a conductive layer with strong lateral transmission capabilities, lateral separation of the OLED film layer is necessary. This separation can be achieved by isolating the anode, thus dividing the OLED film layer into multiple independent units.

[0045] Figure 1 shows a schematic diagram of the structure of a stacked OLED device.

[0046] As shown in Figure 1, a Tandem OLED comprises a stacked red emissive layer (RML), a green emissive layer (GML), and a blue emissive layer (BML). A charge generation layer (CGL) connects the upper and lower emissive layers, namely the red / green emissive layers RML / GML and the blue emissive layer BML. However, the charge generation layer CGL has strong lateral transport capabilities, which can easily cause color crosstalk between pixels. Therefore, a groove (DOW) is created between the anodes AN to separate the OLED film layers into independent pixels. However, separating the OLED film layers can easily alter the morphology of the cathode CA, for example, causing punctures in the cathode CA. As shown in Figure 1, the distance between the cathode puncture point P and the anode AN is significantly smaller than the distance between the center of the anode AN and the upper cathode CA, the former being approximately 0.7 times the latter. In this case, the lateral resistance of the cathode CA is smaller than that in the forward direction, making it easier for current to flow laterally to the cathode CA. Since the blue light-emitting layer (BML) is located above the red / green light-emitting layers (RML / GML), the blue light-emitting layer (BML) is more susceptible to cathode puncture than the red / green light-emitting layers (RML / GML), forming a leakage path. This reduces the blue light emission efficiency, further widens the light emission differences between different color pixels, reduces product uniformity, and lowers the Gamma yield.

[0047] Figure 2A shows a schematic cross-sectional view of a display substrate according to an embodiment of the present disclosure. Figure 2B shows an example of the structure of the display substrate in Figure 2A at a local region A.

[0048] As shown in FIG. 2A, the display substrate 100 includes a substrate 110, a plurality of first electrodes 120, a plurality of light-emitting layers 140A, 140B and 140C, a second electrode 150, and a compensation pillar 160. The plurality of first electrodes 120 are located on the substrate 110, with gaps between adjacent first electrodes 120. Here, the gap refers to the space between the sidewalls of adjacent first electrodes 120 facing each other. The plurality of light-emitting layers 140A, 140B and 140C are located on the side of the plurality of first electrodes 120 away from the substrate 110, and correspond one-to-one with the plurality of first electrodes 120. The projections of the plurality of first electrodes 120 onto the substrate 110 are respectively located within the projections of the plurality of light-emitting layers 140A, 140B and 140C onto the substrate 110. The second electrode 150 covers the plurality of light-emitting layers 140A, 140B and 140C. The compensation pillar 160 is located in the gap between adjacent first electrodes 120. In some embodiments, the first electrode can be an anode, and the second electrode can be a cathode. However, the embodiments disclosed herein are not limited thereto. In other embodiments, the first electrode may also be a cathode and the second electrode may also be an anode.

[0049] The gap between adjacent first electrodes 120 has a width D1, which in some embodiments ranges from 0.2 μm to 1.3 μm. Here, the width D1 refers to the minimum distance between the sidewalls of adjacent first electrodes 120 facing each other, but the embodiments of this disclosure are not limited to this. The width D1 may also refer to the distance between any two points on the sidewalls of adjacent first electrodes 120 facing each other in a direction parallel to the substrate 110, or the average value of the distances.

[0050] In some embodiments, the display substrate 100 further includes a pixel defining layer 130. The pixel defining layer 130 has openings corresponding one-to-one with a plurality of first electrodes 120, with the edge regions of each first electrode 120 covered by the pixel defining layer 130 and the central regions exposed through the corresponding openings. In this case, as shown in FIG2A, the compensation pillar 160 may be located on the side of the pixel defining layer 130 away from the substrate 110. The pixel defining layer 130 covers the bottom and sidewalls of the gap between the first electrodes 120, and covers the edges of the surfaces of the first electrodes 120 away from the substrate 110, with the central regions of the first electrodes 120 exposed through the opening OP in the pixel defining layer 130. Thus, the pixel defining layer 130 forms a groove in the gap between the first electrodes 120, and the compensation pillar 160 may fill the groove formed by the pixel defining layer 130. As shown in Figure 2A, the light-emitting layer 140A, 140B, or 140C includes a flat portion located above the opening of the pixel defining layer 130 and a curved portion surrounding the flat portion. In a cross-section perpendicular to the substrate 110, the width of the curved portion in the direction parallel to the substrate 110 is smaller than the width of the flat portion in the direction parallel to the substrate 110. Here, "width" can refer to the average value of all widths of the light-emitting layer in the direction parallel to the substrate 110 in a cross-section perpendicular to the substrate 110, or it can refer to any width value of the light-emitting layer in the direction parallel to the substrate 110 in a cross-section perpendicular to the substrate 110.

[0051] Adjacent light-emitting layers 140A, 140B, and 140C have different colors. For example, light-emitting layers 140A, 140B, and 140C may be light-emitting layers of a first color, a second color, and a third color, respectively. In some embodiments, the first color, the second color, and the third color may be red, green, and blue, respectively. However, embodiments of this disclosure are not limited to this, and the first color, the second color, and the third color may be any three colors. In other embodiments, the multiple light-emitting layers may include light-emitting layers of other colors besides red, green, and blue. The multiple light-emitting layers 140A, 140B, and 140C may all be made of organic light-emitting materials. When the light-emitting layer is a red light-emitting layer, the organic light-emitting material used to make the red light-emitting layer is an organic red light-emitting material; when the light-emitting layer is a green light-emitting layer, the organic light-emitting material used to make the green light-emitting layer is an organic green light-emitting material; and when the light-emitting layer is a blue light-emitting layer, the organic light-emitting material used to make the blue light-emitting layer is an organic blue light-emitting material. In some embodiments, the edges of adjacent light-emitting layers 140A and 140B are located in the gap between the corresponding first electrodes 120; the edges of adjacent light-emitting layers 140B and 140C are located in the gap between the corresponding first electrodes 120. In some embodiments, the light-emitting layers 140A, 140B, and 140C may be formed in a certain order by a silicon-based side-by-side (SBS) deposition process. In Figure 2A, the red light-emitting layer 140A is formed before the green light-emitting layer 140B, and the green light-emitting layer 140B is formed before the blue light-emitting layer 140C. However, this is merely an example, and this disclosure does not limit the order in which the various colored light-emitting layers are formed; for example, the red, green, and blue light-emitting layers can be formed in any other order.

[0052] In some embodiments, the compensation pillar 160 may be made of an inorganic insulating material such as SiO or SiN. The surface (upper surface) of the compensation pillar away from the substrate 110 is covered by adjacent light-emitting layers among the light-emitting layers 140A, 140B, and 140C. One of the adjacent light-emitting layers is formed before the other. For ease of description, the surface of the compensation pillar covered by the first formed light-emitting layer is referred to as the first surface, and the surface of the compensation pillar covered by the later formed light-emitting layer is referred to as the second surface. The slope angle of the first surface is smaller than that of the second surface. As shown in FIG2A, the compensation pillar 160 includes a first compensation pillar (left side in the figure) covered by adjacent light-emitting layers 140A and 140B and a second compensation pillar (right side in the figure) covered by adjacent light-emitting layers 140B and 140C. Taking the first compensation pillar as an example, referring to FIG2B, the compensation pillar 160 has a first surface 1601 and a second surface 1602 extending from the top 1603 of the compensation pillar 160 to both sides. The first surface 1601 of the compensation pillar 160 is covered by the light-emitting layer 140A (first light-emitting layer) in the first electrode gap where the compensation pillar 160 is located, and the second surface 1602 of the compensation pillar 160 is covered by the light-emitting layer 140B (second light-emitting layer) in the first electrode gap where the compensation pillar 160 is located. The above description of the first compensation pillar also applies to the second compensation pillar covered by adjacent light-emitting layers 140B and 140C. In some embodiments, at the top 1603 position of the compensation pillar 160, the spacing between adjacent light-emitting layers may be less than 0.2 μm. In some embodiments, adjacent light-emitting layers may be in contact at the top position of the compensation pillar 160 (i.e., zero spacing). In some embodiments, adjacent light-emitting layers may also overlap in the gap between corresponding adjacent first electrodes 120, such that one light-emitting layer covers the edge of another light-emitting layer. In some embodiments, the overlapping position of adjacent light-emitting layers does not overlap with the top 1603 of the compensation pillar 160 in at least one of the directions perpendicular to or parallel to the substrate 110. For example, the overlapping position of adjacent light-emitting layers does not overlap with the top 1603 of the compensation pillar 160 in the direction perpendicular to the substrate 110, such that the projection of the overlapping position of the adjacent light-emitting layers on the substrate 110 does not overlap with the projection of the top 1603 of the compensation pillar 160 on the substrate 110. Alternatively, the overlapping position of adjacent light-emitting layers overlaps with the top 1603 of the compensation pillar 160 in the direction perpendicular to the substrate 110 but does not overlap in the direction parallel to the substrate 110; or, the overlapping position of adjacent light-emitting layers overlaps with the top 1603 of the compensation pillar 160 in the direction parallel to the substrate 110 but does not overlap in the direction perpendicular to the substrate 110; or, the overlapping position of adjacent light-emitting layers does not overlap with the top 1603 of the compensation pillar 160 in either the direction perpendicular to the substrate 110 or the direction parallel to the substrate 110.In this way, based on the second electrode 150 above being raised by the compensation pillar 160, the second electrode 150 above can be further raised by the overlap of adjacent light-emitting layers, thereby further reducing the undulation of the second electrode 150 in the gap. Correspondingly, the voltage drop caused by the distortion of the shape of the second electrode 150 is further reduced, and the uniformity of light emitted from the display substrate is improved.

[0053] In the embodiments shown in Figures 2A and 2B, the first surface 1601 and the second surface 1602 of the compensation pillar 160 are curved surfaces bent toward the substrate 110. For compensation pillars 160 covered by adjacent light-emitting layers 140A and 140B, the first surface 1601 of the compensation pillar 160 covered by the light-emitting layer 140A has a first slope angle θ1, and the second surface 1602 of the compensation pillar 160 covered by the light-emitting layer 140B has a second slope angle θ2. In some embodiments, the relationship between the first slope angle θ1 of the first surface 1601 and the second slope angle θ2 of the second surface 1602 is related to the formation order of the corresponding light-emitting layers. For example, for adjacent light-emitting layers 140A and 140B, if the light-emitting layer 140A is formed before the light-emitting layer 140B, the first slope angle θ1 of the first surface 1601 of the compensation pillar 160 covered by the light-emitting layer 140A is smaller than the second slope angle θ2 of the second surface 1602 of the compensation pillar 160 covered by the light-emitting layer 140B. The first and second slope angles mentioned above can refer to the slope angles at any point on the first and second surfaces of the compensation pillar. However, the embodiments of this disclosure are not limited to this. The first and second slope angles can also be defined as the average of the slope angles of multiple points, or the maximum or minimum slope angle. In other embodiments, the first and second slope angles can be defined as the slope angles at the same height on the first and second surfaces of the compensation pillar. The slope angle referred to here is the angle between the surface tangent and the direction parallel to the substrate 110. In some embodiments, the first slope angle θ1 and the second slope angle θ2 of the compensation pillar 160 are in the range of 15° to 90°, and the difference between the first slope angle θ1 and the second slope angle θ2 is in the range of 15° to 75°. The above description of the compensation pillar covered by adjacent light-emitting layers 140A and 140B (the left compensation pillar in FIG. 2A) also applies to the compensation pillar covered by adjacent light-emitting layers 140B and 140C (the right compensation pillar in FIG. 2A), and will not be repeated here.

[0054] In some embodiments, the rate of change of the slope angle of the first surface 1601 and the second surface 1602 of the compensation column 160 is related to the formation order of the corresponding light-emitting layers 140A, 140B, and 140C. For example, in the embodiments of Figures 2A and 2B, the light-emitting layer 140A is formed before the light-emitting layer 140B, and the rate of change of the first slope angle θ1 of the first surface 1601 covered by the light-emitting layer 140A is less than the rate of change of the second slope angle θ2 of the second surface 1602 covered by the light-emitting layer 140B. Here, the rate of change of the slope angle can refer to the overall rate of change of the slope angle at each point on the first or second surface, or it can refer to the rate of change of the slope angle of a certain part of the first or second surface.

[0055] The aforementioned slope angle of the compensation pillar 160 facilitates a more uniform morphology of adjacent light-emitting layers covering it on both sides of the gap. Taking adjacent light-emitting layers 140A and 140B shown in FIG. 2B as an example, at the top 1603 position of the compensation pillar 160, the surface of light-emitting layer 140A away from the substrate 110 has a third slope angle θ3, and the surface of light-emitting layer 140B away from the substrate 110 has a fourth slope angle θ4. In some embodiments, the third slope angle θ3 and the fourth slope angle θ4 are in the range of 15° to 90°. In some embodiments, the difference between the third slope angle θ3 and the fourth slope angle θ4 is smaller than the difference between the first slope angle θ1 and the second slope angle θ2. In the embodiment shown in Figure 2B, the third slope angle θ3 and the fourth slope angle θ4 are basically equal. That is, by setting the compensation column 160 with two curved surfaces, targeted compensation of the slope angle of the light-emitting layer covering the two curved surfaces is achieved, thereby making the morphological characteristics of the light-emitting layer on both sides of the gap of the first electrode 120 more consistent and improving the uniformity of light emission from the display substrate.

[0056] Referring again to Figures 2A and 2B, the second electrode 150 can be a continuous layer made of conductive material. The second electrode 150 may have a recess in the gap between the first electrodes 120, and the projection of the recess onto the substrate 110 lies within the projection of the gap between adjacent first electrodes 120 onto the substrate 110. Here, the recess refers to a pit on the surface of the second electrode 150 on the side away from the substrate 110. The bottoms Q1 and Q2 of each recess are marked in Figure 2A. In the gaps between the first electrodes 120 corresponding to the light-emitting layers 140A and 140B, the bottom of the recess of the second electrode 150 is represented by Q1; in the gaps between the first electrodes 120 corresponding to the light-emitting layers 140B and 140C, the bottom of the recess of the second electrode 150 is represented by Q2.

[0057] In some embodiments, the slope angle of the second electrode 150 at the recess is related to the slope angle of the light-emitting layer below the second electrode 150 at the top 1603 position of the compensation pillar 160. As shown in FIG2B, at position Q1, the side of the second electrode 150 near the light-emitting layer 140A has a fifth slope angle θ5, and the side near the light-emitting layer 140B has a sixth slope angle θ6. In some embodiments, the fifth slope angle θ5 and the sixth slope angle θ6 can be in the range of 15° to 90°. Since the third slope angle θ3 of the light-emitting layer 140A below the second electrode 150 is substantially equal to the fourth slope angle θ4 of the light-emitting layer 140B, the fifth slope angle θ5 of the side of the second electrode 150 near the light-emitting layer 140A and the sixth slope angle θ6 of the side of the second electrode 150 near the light-emitting layer 140B are also substantially equal. Thus, the morphological features of the second electrode 150 on both sides of the gap between the first electrode 120 tend to be consistent, and because the second electrode 150 is raised as a whole by the compensation column 160, the undulation of the second electrode 150 in the gap is also reduced, thereby reducing the voltage drop caused by the distortion of the second electrode morphology (e.g., second electrode puncture) and improving the uniformity of light emission from the display substrate.

[0058] In some embodiments, the top 1603 of the compensation pillar 160 overlaps with the centerline of the gap in which the compensation pillar 160 is located. For example, in FIG2A, the gap between the first electrodes 120 corresponding to the light-emitting layers 140A and 140B has a centerline C1, and the top of the compensation pillar 160 in this gap overlaps with the centerline C1; the gap between the first electrodes 120 corresponding to the light-emitting layers 140B and 140C has a centerline C2, and the top of the compensation pillar 160 in this gap overlaps with the centerline C2. Here, the centerline can refer to a virtual straight line perpendicular to the substrate 110 in a cross-sectional view, located in the gap between the first electrodes 120 and equidistant from the first electrodes 120 on both sides of the gap. The equidistant distance between the centerline and the two first electrodes 120 can mean that the centerline and the sidewalls of the two first electrodes 120 facing each other are equidistant in a direction parallel to the substrate 110.

[0059] In some embodiments, the bottom of the recess of the second electrode 150 substantially overlaps with the center line of the gap between adjacent first electrodes 120. For example, as shown in FIG2A, in the gap between the first electrodes corresponding to the light-emitting layers 140A and 140B, the bottom Q1 of the recess of the second electrode 150 substantially overlaps with the center line C1 of the gap; in the gap between the first electrodes corresponding to 140B and 140C, the bottom Q2 of the recess of the second electrode 150 substantially overlaps with the center line C2 of the gap. This makes the distance from the distorted position of the second electrode 150 to the center line of the two first electrodes 120 substantially equal, thereby reducing the difference between the left and right sides of the gap between the first electrodes 120, and thus eliminating the electrical and optical non-uniformity effects caused by the asymmetry of the slope angle of the second electrode on both sides of the gap between the first electrodes 120 and the asymmetry of the second electrode puncture, thereby further improving the uniformity of light emission from the display substrate. Here, the distorted position of the second electrode 150 can refer to the position of the lowest point Q1, Q2 on the surface (lower surface) of the second electrode 150 near the substrate 110. Here, the centerline of the first electrode 120 extends through the geometric center of the first electrode 120 in a direction perpendicular to the substrate 110.

[0060] Referring again to Figures 2A and 2B, the first surface 1601 extends from the top 1603 of the compensation pillar 160 to a first position P1, and the second surface 1602 extends from the top 1603 of the compensation pillar 160 to a second position P2. In the example of Figure 2A, the height h1 of the first position P1 perpendicular to the substrate 110 is the same as the height h2 of the second position P2 perpendicular to the substrate 110. Here, the first position P1 refers to the end point of the extension of the first surface 1601, and the second position P2 refers to the end point of the extension of the second surface 1602. The height of the first position P1 refers to the distance between the first position P1 and the upper surface of the substrate 110 in a direction perpendicular to the substrate 110. The height of the second position P2 refers to the distance between the second position P2 and the upper surface of the substrate 110 in a direction perpendicular to the substrate 110. In some embodiments, in a direction perpendicular to the substrate 110, the ratio of the distance from the top 1603 of the compensation pillar 160 to the first position P1 or the second position P2 to the distance from the top 1603 of the compensation pillar 160 to the bottom of the compensation pillar 160 is in the range of 40% to 60%. Here, the bottom of the compensation pillar 160 may refer to the surface of the compensation pillar 160 near the substrate 110 (the lower surface in the figure).

[0061] In the embodiments of Figures 2A and 2B, the top 1603 of the compensation pillar 160 is higher than the surface of the first electrode 120 on the side away from the substrate 110 (the upper surface in the figures). Here, "height" refers to the distance relative to the substrate 110. By setting the top 1603 of the compensation pillar 160 higher than the surface of the first electrode 120 on the side away from the substrate 110, it is further advantageous to specifically compensate for the slope angle of adjacent light-emitting layers when subsequently forming adjacent light-emitting layers covering the compensation pillar 160, thereby further adjusting the morphology of the light-emitting layers on either side of the gap. In other embodiments, the top 1603 of the compensation pillar 160 may also be at the same height as the surface of the first electrode 120 on the side away from the substrate 110.

[0062] In some embodiments, the dimension of the compensation post 160 in the direction parallel to the substrate 110 is in the range of 0.3 μm to 0.5 μm. Here, the dimension refers to the average of the various dimensions of the compensation post 160 in the direction parallel to the substrate 110. In some embodiments, the dimension of the compensation post 160 in the direction perpendicular to the substrate 110 is... to Within the range. The size here refers to the average of the various dimensions of the compensation post 160 in the direction perpendicular to the substrate 110. In some embodiments, the size of the compensation post 160 in the direction perpendicular to the substrate 110 can be set according to the groove depth formed by the pixel defining layer 130 in the gap between adjacent first electrodes 120. The groove depth here refers to the distance in the direction perpendicular to the substrate 110 between the surface of the first electrode 120 away from the substrate 110 (the upper surface in the figure) and the surface of the pixel defining layer 130 near the substrate 110 (the lower surface in the figure).

[0063] For ease of description, Figure 2A shows three adjacent light-emitting layers 140A, 140B and 140C and a first electrode 120. However, the embodiments of this disclosure are not limited thereto, and the display substrate may have any number of light-emitting layers and a first electrode as needed.

[0064] Figure 3 shows a schematic cross-sectional view of a display substrate according to another embodiment of the present disclosure.

[0065] The display substrate 200 shown in Figure 3 is similar to the display substrate 100 shown in Figure 2A, except that the height relationship between the first and second positions of the compensation pillars is different. For the sake of brevity and clarity, the differences will be described in detail below.

[0066] As shown in Figure 3, similar to the display substrate 100 shown in Figure 2A, the display substrate 200 includes a compensation pillar 160-1 covered by adjacent light-emitting layers 140A-1, 140B-1, and 140C-1. The compensation pillar 160-1 has a first surface 1601 and a second surface 1602 extending from its top 1603 to both sides. The first surface 1601 extends from its top 1603 to a first position P1, and the second surface 1602 extends from its top 1603 to a second position P2. Unlike Figure 2A, the height h1 of the first position P1 in the direction perpendicular to the substrate 110 is different from the height h2 of the second position P2 in the direction perpendicular to the substrate 110. For example, for the compensation pillar 160-1 covered by adjacent light-emitting layers 140A-1 and 140B-1 as shown in FIG. 3, the height h1 of the first position P1 of the first surface 1601 in the direction perpendicular to the substrate 110 is greater than the height h2 of the second position P2 of the second surface 1602 in the direction perpendicular to the substrate 110. Similarly, for the compensation pillar 160-1 covered by adjacent light-emitting layers 140B-1 and 140C-1, the height of the first position of the first surface 1601 in the direction perpendicular to the substrate 110 is also greater than the height of the second position of the second surface 1602 in the direction perpendicular to the substrate 110.

[0067] By setting the heights of the first position P1 and the second position P2 of the compensation pillar 160-1 to be different, not only can the slope angles of the upper light-emitting layers 140A-1, 140B-1, and 140C-1 be specifically compensated through the bending structure of the first surface 1601 and the second surface 1602 of the compensation pillar 160-1, but the slope angles of the upper light-emitting layers 140A-1, 140B-1, and 140C-1 can also be compensated through the height difference between the first position P1 and the second position P2. This makes the difference between the slope angles of adjacent light-emitting layers 140A-1, 140B-1, and 140C-1 as small as possible and even more equal. Correspondingly, the distortion position of the second electrode 150-1 in the recess is also more central in the gap of the first electrode 120, thereby further reducing the difference between the second electrode and the light-emitting layer on both sides of the gap of the first electrode 120 and improving the uniformity of light emission from the display substrate.

[0068] Figure 4 shows a schematic cross-sectional view of a display substrate according to another embodiment of the present disclosure.

[0069] The display substrate 300 shown in Figure 4 is similar to the display substrate 100 shown in Figure 2A, except that the display substrate 300 also includes spacers. For the sake of brevity and clarity, the following will focus on the differences.

[0070] As shown in Figure 4, the display substrate 300 includes a substrate 110 and a plurality of first electrodes 120, a pixel defining layer 130, a compensation pillar 160-2, a plurality of light-emitting layers 140A-2, 140B-2, and 140C-2, and a second electrode 150-2 stacked sequentially on the substrate 110, as well as a spacer 170. The spacer 170 is located in the gap between adjacent first electrodes 120 and is located on the side of the compensation pillar 160-2 closest to the substrate 110 and is covered by the pixel defining layer 130. In some embodiments, the spacer 170 is made of an insulating material such as SiO or SiN. The height of the spacer 170 can be set as needed to raise the compensation pillar 160. In the example of Figure 4, the height of the surface of the spacer 170 away from the substrate 110 can be lower than the height of the surface of the first electrode 120 away from the substrate 110.

[0071] By filling the gap of the first electrode 120 with the insulator 170, the light-emitting layers 140A-2, 140B-2, and 140C-2, which are formed later, are further elevated, and the undulation of the second electrode 150-2 in the gap is further reduced. This further reduces the voltage drop caused by the distortion of the second electrode morphology and improves the uniformity of light emission from the display substrate.

[0072] Figure 5A shows a schematic cross-sectional view of a display substrate according to another embodiment of the present disclosure.

[0073] The display substrate 400 shown in Figure 5A is similar to the display substrate 100 shown in Figure 2A, except that the surfaces of the multiple light-emitting layers in the display substrate 400 on the side away from the substrate are substantially flush. For the sake of brevity and clarity, the following will mainly focus on the differences.

[0074] As shown in Figure 5A, similar to Figure 2A, the display substrate 400 includes a substrate 110 and a plurality of first electrodes 120, a pixel defining layer 130, a compensation pillar 160-3, a plurality of light-emitting layers 140A-3, 140B-3, and 140C-3, and a second electrode 150-3, which are sequentially stacked on the substrate 110. The height h1 of the first position P1 of the compensation pillar 160-3 in the direction perpendicular to the substrate 110 is the same as the height h2 of the second position P2 in the direction perpendicular to the substrate 110. Unlike Figure 2A, the surfaces S1, S2, and S3 of the light-emitting layer 140A-3 away from the substrate 110, the light-emitting layer S2, and the light-emitting layer S3 away from the substrate 110 are substantially flush. Here, "substantially flush" means that surfaces S1, S2, and S3 are substantially flat and substantially equidistant from the substrate 110 in the direction perpendicular to the substrate 110.

[0075] In some embodiments, the contact surface between adjacent light-emitting layers in the gap is a plane substantially perpendicular to the substrate. For example, in the embodiment of FIG. 5A, light-emitting layers 140A-3 and 140B-3 have a contact surface M1 in the gap corresponding to the first electrode 120. The contact surface M1 is a plane extending in a direction perpendicular to the paper surface and substantially perpendicular to the substrate 110; light-emitting layers 140B-3 and 140C-3 have a contact surface M2 in the gap corresponding to the first electrode 120. The contact surface M2 is a plane extending in a direction perpendicular to the paper surface and substantially perpendicular to the substrate 110. However, this is merely illustrative. In actual manufacturing, the contact surfaces M1 and M2 will vary depending on the thickness of the light-emitting layers and the manufacturing process. For example, they may be interfaces extending generally in a vertical direction, rather than absolute planes.

[0076] Since the surfaces S1, S2, and S3 of the light-emitting layers 140A-3, 140B-3, and 140C-3 on the side away from the substrate 110 are substantially flush, the second electrode 150-3, which will be formed later, can be vapor-deposited on the flat surface, thus making the second electrode 150-3 also flat, i.e., without any depressions. As shown in Figure 5A, both the surface of the second electrode 150-3 on the side near the substrate 110 (the lower surface in the figure) and the surface on the side away from the substrate 110 (the upper surface in the figure) are flat surfaces.

[0077] By designing the structure of the compensation pillar 160-3, such as setting appropriate height, width, and surface slope angle, the surfaces S1, S2, and S3 of the light-emitting layers 140A-3, 140B-3, and 140C-3 covering the compensation pillar 160-3 on the side away from the substrate 110 are made substantially flush. This effectively eliminates the morphological distortion (e.g., second electrode puncture) of the second electrode 150-3 in the gap of the first electrode 120. This reduces the voltage drop caused by the morphological distortion of the second electrode, lowers the light emission differences between different color light-emitting layers, and improves the uniformity of light emission from the display substrate.

[0078] Figure 5B shows a schematic cross-sectional view of a display substrate according to another embodiment of the present disclosure.

[0079] The display substrate 500 shown in Figure 5B is similar to the display substrate 400 shown in Figure 5A, except that the height relationship between the first and second positions of the compensation pillars is different. The description of the first electrode, the light-emitting layer, and the second electrode with reference to Figure 5A also applies to the embodiment of Figure 5B. For the sake of brevity and clarity, the following will mainly focus on the differences.

[0080] As shown in Figure 5B, similar to Figure 5A, the display substrate 500 includes a substrate 110 and a plurality of first electrodes 120, a pixel defining layer 130, a compensation pillar 160-4, a plurality of light-emitting layers 140A-4, 140B-4 and 140C-4, and a second electrode 150-4, which are sequentially stacked on the substrate 110. Unlike Figure 5A, the height h1 of the first position P1 of the compensation pillar 160-4 in the direction perpendicular to the substrate 110 is greater than the height h2 of the second position P2 of the compensation pillar 160-4 in the direction perpendicular to the substrate 110. In this way, the slope angle of the adjacent light-emitting layers 140A-4, 140B-4 and 140C-4 covering the compensation pillar 160-4 can be further adjusted by the height difference of the compensation pillar 160-4 at the first position P1 and the second position P2. This is more conducive to adjusting the surfaces of the adjacent light-emitting layers 140A-4, 140B-4 and 140C-4 away from the substrate to be flush with each other, and further eliminating the morphological distortion of the second electrode 150-4 in the first electrode gap (e.g., second electrode puncture). This further reduces the voltage drop caused by the morphological distortion of the second electrode, reduces the light emission difference of different color light-emitting layers, and improves the uniformity of light emission from the display substrate.

[0081] Figure 6A shows a schematic cross-sectional view of a display substrate according to another embodiment of the present disclosure.

[0082] The display substrate 600 shown in Figure 6A is similar to the display substrates shown in Figures 2A to 5B, except that the display substrate 600 further includes a hole injection layer, a hole transport layer, an electron transport layer, and an electron injection layer. The description of the substrate, first electrode, light-emitting layer, and second electrode above with reference to Figures 2A to 5B also applies to the embodiment of Figure 6A. For the sake of brevity and clarity, Figure 6A shows the film layer structures in a simplified manner.

[0083] As shown in Figure 6A, the display substrate 600 includes a substrate 110 and a plurality of first electrodes 120, a plurality of light-emitting layers R, G, and B, and a second electrode 150 sequentially stacked on the substrate 110. The light-emitting layers R, G, and B are a red light-emitting layer, a green light-emitting layer, and a blue light-emitting layer, respectively. In addition, the display substrate 600 also includes a hole injection layer 171, a hole transport layer 172, an electron transport layer 173, and an electron injection layer 174. The hole injection layer 171 and the hole transport layer 172 are located between the light-emitting layers R, G, and B and the plurality of first electrodes 120, with the hole transport layer 172 located on the side of the hole injection layer 171 away from the substrate 110. The electron transport layer 173 and the electron injection layer 174 are located between the light-emitting layers R, G, and B and the second electrode 150, with the electron injection layer 174 located on the side of the electron transport layer 173 away from the substrate 110.

[0084] In the fabrication process of the aforementioned film layers of the display substrate 600, the light-emitting layers R, G, and B are formed using a silicon-based independent vapor deposition (SBS) process. For example, using a silicon-based mask, a red light-emitting layer R is first deposited on some of the first electrodes 120, then a green light-emitting layer G is deposited on some other first electrodes 120, and finally a blue light-emitting layer B is deposited on the remaining first electrodes 120. The light-emitting layers R, G, and B formed by this SBS process are multiple discrete units. At least one of the hole injection layer 171, hole transport layer 172, electron transport layer 173, and electron injection layer 174 is formed using a full-surface vapor deposition process; therefore, at least one of the hole injection layer 171, hole transport layer 172, electron transport layer 173, and electron injection layer 174 is a continuous layer.

[0085] In other embodiments, as shown in FIG6B, at least one of the hole injection layer 171', hole transport layer 172', electron transport layer 173' and electron injection layer 174' may also include a plurality of discrete units, which correspond one-to-one with a plurality of light-emitting layers R, G and B.

[0086] In some embodiments, the morphology of the surfaces of the hole injection layer and the hole transport layer near the substrate 110 can be substantially the same as the morphology of the surface of the lower first electrode 120 away from the substrate 110. The morphology of the surfaces of the electron transport layer and the electron injection layer near the substrate 110 can be substantially the same as the morphology of the surfaces of the lower light-emitting layers R, G, B away from the substrate 110.

[0087] In some embodiments, the total thickness of the display substrate 600 including the above-described film layers is in the range of 0.05 μm to 0.2 μm.

[0088] Figure 7 shows a schematic cross-sectional view of a display substrate according to another embodiment of the present disclosure.

[0089] The display substrate 700 shown in Figure 7 is similar to the display substrate 600 shown in Figure 6A, except that the display substrate 700 also includes light-emitting layers R2, G2, and B2, a hole injection layer 175, a hole transport layer 176, an electron transport layer 177, an electron injection layer 178, and a charge generation layer CGL. For the sake of brevity and clarity, the following will mainly focus on the differences.

[0090] As shown in Figure 7, the display substrate 700 includes a first light-emitting stack EM1 and a second light-emitting stack EM2. The first light-emitting stack EM1 includes light-emitting layers R1, G1, and B1, a hole injection layer 171, a hole transport layer 172, an electron transport layer 173, and an electron injection layer 174. These structures are identical to those described above with reference to Figure 6A, and will not be repeated here. The second light-emitting stack EM2 includes light-emitting layers R2, G2, and B2, a hole injection layer 175, a hole transport layer 176, an electron transport layer 177, and an electron injection layer 178. Light-emitting layers R1 and R2 can both be a first color, light-emitting layers G1 and G2 can both be a second color, and light-emitting layers B1 and B2 can both be a third color. The first color can be red, the second color can be green, and the third color can be blue.

[0091] The first light-emitting stack EM1 and the second light-emitting stack EM2 are located between the first electrode 120 and the second electrode 150, with the second light-emitting stack EM2 located on the side of the first light-emitting stack EM1 away from the substrate 110. A charge-generating layer CGL is located between the first light-emitting stack EM1 and the second light-emitting stack EM2. The charge-generating layer CGL is used to connect the upper and lower light-emitting layers R1 and R2, the upper and lower light-emitting layers G1 and G2, and the upper and lower light-emitting layers B1 and B2 in series. A hole injection layer 171 and a hole transport layer 172 are located between the light-emitting layers R1, G1, and B1 and the first electrode 120. An electron transport layer 173 and an electron injection layer 174 are located between the light-emitting layers R1, G1, and B1 and the charge-generating layer CGL. A hole injection layer 175 and a hole transport layer 176 are located between the charge-generating layer CGL and the light-emitting layers R2, G2, and B2, with the hole transport layer 176 located on the side of the hole injection layer 175 away from the substrate 110. The electron transport layer 177 and the electron injection layer 178 are located between the light-emitting layers R2, G2 and B2 and the second electrode 150, and the electron injection layer 178 is located on the side of the electron transport layer 177 away from the substrate 110.

[0092] In the fabrication process of the aforementioned film layers of the display substrate 700, similar to the light-emitting layers R1, G1, and B1, the light-emitting layers R2, G2, and B2, and the charge-generating layer CGL are also formed using a silicon-based SBS process. Similar to the hole injection layer 171, hole transport layer 172, electron transport layer 173, and electron injection layer 174, at least one of the hole injection layer 175, hole transport layer 176, electron transport layer 177, and electron injection layer 178 can also be formed using a full-surface evaporation process. Therefore, at least one of the hole injection layer 175, hole transport layer 176, electron transport layer 177, and electron injection layer 178 can be a continuous layer. However, the embodiments of this disclosure are not limited to this. In other embodiments, at least one of the hole injection layer 175, hole transport layer 176, electron transport layer 177, and electron injection layer 178 can also include multiple discrete units as shown in FIG. 6B.

[0093] For example, after forming the light-emitting layers R1, G1, and B1 using the silicon-based SBS process described above, an electron transport layer 173 is formed on the light-emitting layers R1, G1, and B1 by full-surface evaporation, and an electron injection layer 174 is formed on the electron transport layer 173. After forming the electron injection layer 174, a charge generation layer CGL is formed on the electron injection layer 174 by evaporation using the silicon-based SBS process. The charge generation layer CGL includes multiple independent charge generation units, which are located above the light-emitting layers R1, B1, and G1, respectively. Then, a red light-emitting layer R2, a green light-emitting layer G2, and a blue light-emitting layer B2 are formed sequentially using the silicon-based SBS process. The red light-emitting layer R2 is located above the red light-emitting layer R1, the green light-emitting layer G2 is located above the green light-emitting layer G1, and the blue light-emitting layer B2 is located above the blue light-emitting layer B1.

[0094] In this way, multiple light-emitting units arranged side by side are obtained, such as red light-emitting units, green light-emitting units and blue light-emitting units. The red light-emitting unit includes red light-emitting layers R1 and R2 and their corresponding stacked regions in the vertical direction. The green light-emitting unit includes green light-emitting layers G1 and G2 and their corresponding stacked regions in the vertical direction. The blue light-emitting unit includes green light-emitting layers B1 and B2 and their corresponding stacked regions in the vertical direction.

[0095] Figure 8 shows a schematic diagram of the structure of a display substrate according to an embodiment of the present disclosure.

[0096] As shown in FIG8, the display substrate 800 includes a substrate 110 and a plurality of first electrodes 120, a pixel defining layer 130, a compensation pillar 160, a plurality of light-emitting layers R, G and B, and a second electrode 150 sequentially stacked on the substrate 110. The first electrodes 120, pixel defining layers 130, compensation pillars 160, light-emitting layers R, G and B, and the second electrode 150 can adopt the structure of the first electrode, pixel defining layer, compensation pillar, light-emitting layer, and second electrode as described above with reference to any of FIG2A to FIG5B (FIG8 uses the structure of FIG2A). In addition, the display substrate 800 also includes an encapsulation layer 180 located on the side of the second electrode 150 away from the substrate 110. As shown in FIG8, the encapsulation layer 180 covers the second electrode 150. The morphology of the encapsulation layer 180 can be substantially consistent with the morphology of the second electrode 150. In some embodiments, the encapsulation layer 180 can be a continuous layer.

[0097] Figure 8 shows a single-layer encapsulation layer 180, but the embodiments of this disclosure are not limited to this. In other embodiments, the encapsulation layer 180 may also be a multi-layer structure. In some embodiments, the encapsulation layer 180 may be made of organic and / or inorganic materials, for example, it may have a three-layer structure such as SiN+Al2O3+SiN.

[0098] Referring again to FIG8, in some embodiments, the display substrate 800 may further include a planarization layer 190 covering the encapsulation layer 180. The planarization layer 190 may be made of organic and / or inorganic materials, and this disclosure does not limit this. The morphology of the surface of the planarization layer 190 near the substrate 110 may be substantially the same as that of the encapsulation layer 180, and the surface of the planarization layer 190 away from the substrate 110 may be a flat surface, thereby achieving the effect of planarization.

[0099] In some embodiments, the display substrate 800 may further include a plurality of microlenses LN located on the side of the planarization layer 190 away from the substrate 110. Each of the plurality of microlenses LN corresponds one-to-one with a plurality of light-emitting layers R, G, and B. Here, "one-to-one correspondence" means that each light-emitting layer has a corresponding microlens on its side away from the substrate 110. The arrangement of the plurality of microlenses LN can be consistent with that of the plurality of light-emitting layers R, G, and B, such as a strip arrangement, a dot arrangement, a triangular arrangement, or a mosaic arrangement. In this way, the first electrode, the light-emitting layer, and the second electrode, together with their corresponding microlenses, form a light-emitting structure, and the light emitted by the light-emitting layer is focused by the microlenses to improve brightness. In some embodiments, the microlenses LN may be made of an organic transparent material, and this disclosure does not limit this.

[0100] This disclosure also provides a method for manufacturing a display substrate, comprising: forming a plurality of first electrodes on a substrate, with gaps between adjacent first electrodes; forming a compensation pillar in the gaps between adjacent first electrodes; forming a plurality of light-emitting layers corresponding one-to-one with the plurality of first electrodes on the side of the plurality of first electrodes away from the substrate, wherein the projection of the first electrode on the substrate is located within the projection of the corresponding light-emitting layer on the substrate, and the adjacent light-emitting layers have different colors and their edges are located in the gaps between the corresponding adjacent first electrodes; forming a second electrode covering the plurality of light-emitting layers; wherein the compensation pillar has a first surface and a second surface extending from the top of the compensation pillar to both sides, the first surface is covered by a first light-emitting layer in the adjacent light-emitting layers, the second surface is covered by a second light-emitting layer in the adjacent light-emitting layers, the first surface has a first slope angle, and the second surface has a second slope angle, wherein the first light-emitting layer is formed before the second light-emitting layer, and the first slope angle is smaller than the second slope angle.

[0101] In some embodiments, the method further includes: before forming the compensation pillar, forming a pixel defining layer having openings corresponding one-to-one with a plurality of first electrodes, wherein the edge regions of each first electrode are covered by the pixel defining layer and the central regions are exposed through the corresponding openings; forming the compensation pillar includes: forming a compensation pillar in the gap between adjacent first electrodes on the side of the pixel defining layer away from the substrate.

[0102] In some embodiments, the compensation pillar includes a first compensation pillar and a second compensation pillar. Forming a plurality of light-emitting layers corresponding one-to-one with a plurality of first electrodes includes: sequentially forming a first color light-emitting layer, a second color light-emitting layer and a third color light-emitting layer on a plurality of first electrodes using a silicon-based independent vapor deposition (SBS) process, such that in the gap between adjacent first electrodes, the first compensation pillar is covered by the first color light-emitting layer and the second color light-emitting layer, and the second compensation pillar is covered by the second color light-emitting layer and the third color light-emitting layer.

[0103] In some embodiments, the method further includes filling the gap between adjacent first electrodes with a spacer before forming the pixel defining layer.

[0104] Figures 9A to 9G illustrate the manufacturing process of a display substrate according to an embodiment of the present disclosure.

[0105] As shown in FIG9A, a plurality of first electrodes 120 are formed on a substrate 110, and there are gaps between adjacent first electrodes 120. In some embodiments, the material of the first electrode 120 includes ITO or TiAg / ITO.

[0106] Next, as shown in FIG9B, a pixel defining layer 130 is formed on the side of the plurality of first electrodes 120 away from the substrate 110. The pixel defining layer 130 has an opening OP corresponding to each of the plurality of first electrodes 120. The edge region of each first electrode 120 is covered by the pixel defining layer 130, and the central region is exposed through the corresponding opening OP.

[0107] Next, in the gap between adjacent first electrodes 120, a compensation pillar 160 is formed on the side of the pixel defining layer 130 away from the substrate 110. The compensation pillar 160 can be formed in various possible ways. For example, an insulating material such as SiO or SiN can be filled into the groove of the pixel defining layer 130, and then an organic material layer can be formed on the insulating material. Next, the organic material layer is patterned, and then the insulating material and the patterned organic material layer above it are etched. Through etching, the above organic material layer is stripped away, and the morphology of the organic material layer is transferred to the inorganic material layer, thereby obtaining the compensation pillar 160 as shown in FIG. 9C. In some embodiments, the organic material layer may include organic photoresist. In some embodiments, the etching may be dry etching.

[0108] Next, as shown in Figures 9D to 9F, a first-color light-emitting layer 140A, a second-color light-emitting layer 140B, and a third-color light-emitting layer 140C are sequentially formed on multiple first electrodes 120 using a silicon-based independent vapor deposition (SBS) process. In the SBS process, a silicon-based ultra-fine mask (mask) made of a Si wafer is used to deposit the light-emitting layers. This silicon-based ultra-fine mask is obtained by etching ultra-fine mesh holes on a Si wafer using exposure and dry etching techniques. First, as shown in Figure 9D, a first-color light-emitting layer 140A is formed on the leftmost first electrode 120. Next, as shown in Figure 9E, a second-color light-emitting layer 140B is formed on the middle first electrode 120 using the SBS process. The edges of the formed second-color light-emitting layer 140B and the first-color light-emitting layer 140A are located in the gap between the leftmost first electrode 120 and the middle first electrode 120, and cover the compensation pillar 160 in the gap (the left compensation pillar 160 in the figure). Next, as shown in Figure 9F, a third-color light-emitting layer 140C is formed on the rightmost first electrode 120 of the plurality of first electrodes 120 using a silicon-based independent vapor deposition (SBS) process. The edges of the formed third-color light-emitting layer 140C and the second-color light-emitting layer 140B are located in the gap between the middle first electrode 120 and the rightmost first electrode 120, and cover the compensation pillar 160 in the gap (the right compensation pillar 160 in the figure). At this point, the fabrication of the plurality of light-emitting layers 140A, 140B, and 140C corresponding one-to-one with the plurality of first electrodes 120 is completed.

[0109] Next, as shown in FIG9G, a second electrode 150 covering multiple light-emitting layers 140A, 140B, and 140C is formed, and the formed second electrode 150 has a recess in the gap between adjacent first electrodes 120. Although FIG9G illustrates the structure of a display substrate manufactured by the method of an embodiment of the present disclosure with the structure of FIG2A as an example, this is merely illustrative, and the process described above with reference to FIGS9A to 9G is also suitable for manufacturing display substrates of other embodiments.

[0110] In some embodiments, before forming the pixel defining layer 130 shown in FIG. 9B, an insulating material such as SiO or SiN may be filled in the gap between adjacent first electrodes 120, and then the operations described above with reference to FIG. 9C to 9G are performed to obtain a display substrate structure with separator 170 as shown in FIG. 4.

[0111] In some embodiments, before forming the respective light-emitting layers as shown in FIG9D, a hole injection layer 171 may be formed on the structure shown in FIG9C, and a hole transport layer 172 may be formed on the hole injection layer 171. Next, the operations shown in FIGS9D to 9F are performed to form three different colored light-emitting layers 140A, 140B, and 140C on the hole transport layer 172. Next, before forming the second electrode as shown in FIG9G, an electron transport layer 173 may be formed on the structure shown in FIG9F, and an electron injection layer 174 may be formed on the electron transport layer 173. Then, the operations shown in FIG9G are performed to form the second electrode 150 on the electron injection layer 174. Thus, the display substrate structure shown in FIG6A or FIG6B is obtained.

[0112] In some embodiments, after forming the electron injection layer 174 and before forming the second electrode 150, the charge generation layer CGL, hole injection layer 175, hole transport layer 176, light-emitting layers R2, G2 and B2, electron transport layer 177 and electron injection layer 178 may be formed sequentially as described above. Then, the operation shown in FIG9G is performed to form the second electrode 150. Thus, the display substrate structure shown in FIG7 is obtained.

[0113] Although the above illustration uses three first electrodes and three corresponding light-emitting layers as an example, this is merely for ease of description. The number of first electrodes and light-emitting layers, as well as the color of the light-emitting layers, can be set as needed. For example, red light-emitting layers can be formed on some of the multiple first electrodes, then green light-emitting layers can be formed on some other first electrodes, and finally blue light-emitting layers can be formed on the remaining first electrodes. The color and position of the light-emitting layers can be set so that the light-emitting layers above adjacent first electrodes have different colors.

[0114] This disclosure also provides a display device. The display device includes a display substrate as described above.

[0115] The display device may include any device or product with display functionality. For example, the display device may be a smartphone, mobile phone, e-book reader, desktop computer (PC), laptop PC, netbook PC, personal digital assistant (PDA), portable multimedia player (PMP), digital audio player, mobile medical device, camera, wearable device (e.g., head-mounted device, electronic clothing, electronic bracelet, electronic necklace, electronic accessory, electronic tattoo, or smartwatch), television set, etc.

[0116] Those skilled in the art will understand that the embodiments described above are exemplary and can be improved upon. The structures described in the various embodiments can be freely combined without causing any conflict in structure or principle.

[0117] After a detailed description of the preferred embodiments of this disclosure, those skilled in the art will clearly understand that various changes and modifications can be made without departing from the scope and spirit of the appended claims, and that this disclosure is not limited to the implementation of the exemplary embodiments described in the specification.

Claims

1. A display substrate, comprising: Substrate; A plurality of first electrodes are located on the substrate, and a gap is provided between adjacent first electrodes; Multiple light-emitting layers are located on the side of the multiple first electrodes away from the substrate, and correspond one-to-one with the multiple first electrodes. The projection of the first electrode on the substrate is located within the projection of the corresponding light-emitting layer on the substrate. Adjacent light-emitting layers have different colors and their edges are located in the gap between their corresponding adjacent first electrodes. The second electrode covers the plurality of light-emitting layers; A compensation post is located in the gap between adjacent first electrodes. The compensation post has a first surface and a second surface extending from the top of the compensation post to both sides. The first surface is covered by a first light-emitting layer in an adjacent light-emitting layer, and the second surface is covered by a second light-emitting layer in an adjacent light-emitting layer. The first surface has a first slope angle, and the second surface has a second slope angle, wherein the first slope angle is smaller than the second slope angle.

2. The display substrate according to claim 1, further comprising: A pixel defining layer has openings that correspond one-to-one with the plurality of first electrodes. The edge regions of each first electrode are covered by the pixel defining layer and the central regions are exposed through the corresponding openings. The compensation pillars are located on the side of the pixel defining layer away from the substrate.

3. The display substrate according to claim 2, wherein, The light-emitting layer includes a flat portion located above the opening of the pixel defining layer and a curved portion surrounding the flat portion. In a cross-section perpendicular to the substrate, the width of the curved portion in the direction parallel to the substrate is smaller than the width of the flat portion in the direction parallel to the substrate.

4. The display substrate according to claim 2 or 3, wherein, At the top position of the compensation column, the surface of the first light-emitting layer away from the substrate has a third slope angle, and the surface of the second light-emitting layer away from the substrate has a fourth slope angle, wherein the difference between the third slope angle and the fourth slope angle is less than the difference between the first slope angle and the second slope angle.

5. The display substrate according to any one of claims 1 to 4, wherein, The rate of change of the first slope angle is less than the rate of change of the second slope angle.

6. The display substrate according to any one of claims 1 to 5, wherein, The first and second surfaces of the compensation pillar are curved surfaces that bend toward the substrate.

7. The display substrate according to any one of claims 1 to 6, wherein, The first surface of the compensation post extends from the top of the compensation post to a first position, and the second surface of the compensation post extends from the top of the compensation post to a second position. The height of the first position in the direction perpendicular to the substrate is the same as or different from that of the second position.

8. The display substrate according to claim 7, wherein, In a direction perpendicular to the substrate, the ratio of the distance from the top of the compensation pillar to the first or second position to the distance from the top of the compensation pillar to the bottom is in the range of 40% to 60%.

9. The display substrate according to any one of claims 1 to 8, wherein, In a direction perpendicular to the substrate, the top of the compensation pillar is higher than the surface of the first electrode on the side away from the substrate.

10. The display substrate according to any one of claims 1 to 9, wherein, In the gap between the adjacent first electrodes, the first light-emitting layer and the second light-emitting layer overlap, such that the second light-emitting layer covers the edge of the first light-emitting layer, wherein the projection of the overlapping position of the first light-emitting layer and the second light-emitting layer on the substrate does not overlap with the projection of the top of the compensation pillar on the substrate.

11. The display substrate according to any one of claims 1 to 10, further comprising: Hole injection layer, hole transport layer, electron transport layer, and electron injection layer. The hole injection layer and the hole transport layer are located between the plurality of light-emitting layers and the plurality of first electrodes, and the hole transport layer is located on the side of the hole injection layer away from the substrate. The electron transport layer and the electron injection layer are located between the plurality of light-emitting layers and the second electrode, with the electron injection layer located on the side of the electron transport layer away from the substrate.

12. The display substrate according to claim 11, wherein, At least one of the hole injection layer, hole transport layer, electron transport layer and electron injection layer is a continuous layer.

13. The display substrate according to claim 11, wherein, At least one of the hole injection layer, hole transport layer, electron transport layer and electron injection layer includes a plurality of discrete units, and the plurality of discrete units correspond one-to-one with the plurality of light-emitting layers.

14. The display substrate according to any one of claims 1 to 13, further comprising a spacer located in the gap between adjacent first electrodes, on the side of the pixel defining layer facing the substrate.

15. The display substrate according to any one of claims 1 to 14, wherein, The first slope angle and the second slope angle are in the range of 15° to 90°, and the difference between the first slope angle and the second slope angle is in the range of 15° to 75°.

16. The display substrate according to any one of claims 1 to 15, wherein, The dimensions of the compensation pillar in the direction parallel to the substrate are in the range of 0.3 μm to 0.5 μm.

17. The display substrate according to any one of claims 1 to 16, wherein, The dimension of the compensation pillar in the direction perpendicular to the substrate is... to Within the range.

18. The display substrate according to any one of claims 1 to 17, wherein, The compensation column is made of inorganic insulating material.

19. The display substrate according to any one of claims 1 to 18, wherein, The surfaces of the plurality of light-emitting layers on the side away from the substrate are substantially flush.

20. The display substrate according to any one of claims 1 to 19, wherein, At the top of the supplementary column, the spacing between adjacent light-emitting layers is less than 0.2 μm.

21. The display substrate according to any one of claims 1 to 20, wherein, The gap width between adjacent first electrodes is in the range of 0.2 μm to 1.3 μm.

22. The display substrate according to any one of claims 1 to 21, further comprising an encapsulation layer covering the second electrode.

23. The display substrate according to claim 22, further comprising: A planarization layer, covering the encapsulation layer; Multiple microlenses are located on the side of the planarization layer away from the substrate, and each corresponds to one of the multiple light-emitting layers.

24. A method for manufacturing a display substrate as described in any one of claims 1 to 23, comprising: Multiple first electrodes are formed on a substrate, with gaps between adjacent first electrodes; A compensation column is formed in the gap between adjacent first electrodes; Multiple light-emitting layers are formed on the side of the plurality of first electrodes away from the substrate, each corresponding to one of the plurality of first electrodes. The projection of the first electrode on the substrate is located within the projection of the corresponding light-emitting layer on the substrate. Adjacent light-emitting layers have different colors and their edges are located in the gap between their corresponding adjacent first electrodes. A second electrode covering the plurality of light-emitting layers is formed; The compensation column has a first surface and a second surface extending from the top of the compensation column to both sides. The first surface is covered by a first light-emitting layer in an adjacent light-emitting layer, and the second surface is covered by a second light-emitting layer in an adjacent light-emitting layer. The first surface has a first slope angle, and the second surface has a second slope angle, wherein the first slope angle is smaller than the second slope angle.

25. The method of claim 24, further comprising: Before forming the compensation pillar, a pixel defining layer is formed, the pixel defining layer having an opening that corresponds one-to-one with the plurality of first electrodes, the edge region of each first electrode being covered by the pixel defining layer and the central region being exposed through the corresponding opening; The formation of the supplementary pillar includes: forming a compensation pillar in the gap between adjacent first electrodes on the side of the pixel defining layer away from the substrate.

26. The method according to claim 24 or 25, wherein, The compensation pillar includes a first compensation pillar and a second compensation pillar, and the formation of multiple light-emitting layers corresponding one-to-one with the plurality of first electrodes includes: A silicon-based independent vapor deposition (SBS) process is used to sequentially form a first color light-emitting layer, a second color light-emitting layer, and a third color light-emitting layer on the plurality of first electrodes, such that in the gap between adjacent first electrodes, the first compensation pillar is covered by the first color light-emitting layer and the second color light-emitting layer, and the second compensation pillar is covered by the second color light-emitting layer and the third color light-emitting layer.

27. The method according to any one of claims 24 to 26, further comprising: Before forming the pixel defining layer, an insulator is filled in the gap between adjacent first electrodes.

Images