Precious metal evaporation crucible convenient to clamp

By designing the placing plate, spring and threaded rod structure of the copper crucible in the vapor deposition equipment, it facilitates the removal of the graphite crucible and improves the sealing property, solving the problem of inconvenient extraction of graphite crucibles in the prior art, improving process efficiency and operation reliability .

CN222139241UActive Publication Date: 2024-12-10YONGXING SUNSHINE NON-FERROUS METAL CO LTD
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Patent Information

Application Number
CN202420877761.4
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-04-25
Publication Date
2024-12-10
Estimated Expiration
2034-04-25

AI Technical Summary

Technical Problem

In the existing evaporation equipment, the graphite crucible is inconvenient to take out after completing the evaporation work, which affects the pick-up and placement efficiency of the crucible.

Method used

A structure including a copper crucible, a placement plate, a spring, abutment plate, a threaded rod and abutment assembly is designed. The rotating of the thread sleeve and the pressing plate is driven by the knob, and the graphite crucible is pushed up by the elastic action of the spring, so as to facilitate removal. And improve sealing through the extrusion connection between the press plate and the cover plate.

Benefits of technology

It realizes the convenient removal and sealing of graphite crucibles, and improves process efficiency and operation reliability.

✦ Generated by Eureka AI based on patent content.

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Abstract

The precious metal evaporation crucible convenient to clamp comprises a copper crucible, a placing plate is fixedly connected to the interior of the copper crucible, a plurality of placing openings are formed in the top of the placing plate, graphite crucibles are placed in the placing openings, a plurality of springs are arranged at the bottom of the inner wall of the copper crucible, and a plurality of clamping grooves are formed in the bottom of the inner wall of the copper crucible. And one end of each spring is fixedly connected with an abutting plate, and the abutting plates movably abut against the bottom of the graphite crucible. Through the arrangement of the spring, the abutting plate, the threaded rod and the abutting assembly, when the rotary knob is rotated to take down the threaded sleeve and the cover plate, the abutting plate is driven through the elasticity of the spring to jack up the graphite crucible from the placing opening, so that a worker can conveniently take out the graphite crucible from the copper crucible, and the graphite crucible can be conveniently taken out from the copper crucible under the action of the pressing plate. The pressing plate which moves downwards abuts against the top of the cover plate and extrudes the cover plate, so that connection between the cover plate and the graphite crucible is tighter, and the sealing performance of the cover plate and the graphite crucible is improved.
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Description

Technical Field

[0001] The utility model relates to the technical field of evaporation equipment, in particular to a noble metal evaporation crucible which is easy to clamp. Background Art

[0002] Metal evaporation is widely used in the LED industry for the evaporation of chip electrodes, in preparation for the subsequent packaging to provide external power terminals. The metal material to be evaporated is stored in a crucible during the metal evaporation process. The amount of metal stored in the crucible will directly affect the normality of the evaporation process. In particular, when the storage amount of the metal material to be evaporated in the crucible is insufficient, the evaporated metal layer will be incomplete, which will directly affect the yield of the chip.

[0003] For example, the utility model patent with application number 201921366837.2 discloses an evaporation device, and in particular, relates to an evaporation crucible assembly. An evaporation crucible assembly with a simple structure and improved work efficiency is provided. It includes a copper crucible, characterized in that it also includes a graphite crucible and a support group, the graphite crucible is arranged in the copper crucible through the support group, the support group includes a support body and four springs, the support body is arranged at the bottom of the copper crucible and is used to support the graphite crucible, the four springs are arranged in a ring shape on the inner wall of the copper crucible, and the graphite crucible is located between the four springs.

[0004] The utility model is convenient to process and reliable to operate.

[0005] In the above patent, the graphite crucible is placed inside the copper crucible by a support group. However, after the graphite crucible completes the evaporation work, it is not convenient to use tools to take out the graphite crucible, which makes it inconvenient to take out the graphite crucible and affects the efficiency of taking and placing the crucible.

[0006] Therefore, it is necessary to provide a precious metal evaporation crucible that is easy to clamp to solve the above technical problems. Utility Model Content

[0007] The utility model aims to solve the shortcomings in the prior art and provides a precious metal evaporation crucible which is easy to clamp.

[0008] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a precious metal evaporation crucible that is easy to clamp, comprising a copper crucible, a placement plate is fixedly connected to the inside of the copper crucible, a plurality of placement openings are opened on the top of the placement plate, graphite crucibles are placed inside the plurality of placement openings, a plurality of springs are arranged at the bottom of the inner wall of the copper crucible, one end of the plurality of springs is fixedly connected to an abutment plate, the abutment plate is movably abutted against the bottom of the graphite crucible, a plurality of insulation components for keeping the graphite crucible warm are arranged at the bottom of the placement plate, a threaded rod is arranged at the bottom of the placement plate, and an abutment component is arranged on the outer surface of the threaded rod.

[0009] As a further description of the above technical solution:

[0010] The top of the graphite crucible is provided with a slot, the interior of the slot is movably connected with a sealing plate, the top of the sealing plate is fixedly connected with a cover plate, the top of the cover plate is provided with a nozzle, and the cover plate is movably connected to the graphite crucible.

[0011] As a further description of the above technical solution:

[0012] The heat preservation component comprises two fixing plates, and fixing rods are fixedly connected to opposite sides of the two fixing plates, and one end of the fixing rods is fixedly connected to a heat conducting plate.

[0013] As a further description of the above technical solution:

[0014] The two heat conducting plates are arranged in a mirror image, and opposite sides of the two heat conducting plates are in contact with the outer surface of the graphite crucible, which can reduce the heat dissipation area of ​​the graphite crucible and reduce the loss of heat.

[0015] As a further description of the above technical solution:

[0016] The abutment assembly comprises a threaded sleeve threadedly sleeved on the outer surface of the threaded rod, a knob is fixedly connected to the top of the threaded sleeve, and a pressure plate is rotatably sleeved on the outer surface of the threaded sleeve.

[0017] As a further description of the above technical solution:

[0018] The pressing plate is provided with a plurality of avoidance openings, and the number of the plurality of avoidance openings is consistent with the number of nozzles and the positions thereof correspond one to one.

[0019] As a further description of the above technical solution:

[0020] The bottom of the pressing plate is movably abutted against the top of the cover plate.

[0021] The utility model has the following beneficial effects:

[0022] Compared with the prior art, the easy-to-clamp precious metal evaporation crucible has a spring, an abutment plate, a threaded rod and an abutment assembly. When the knob is turned to remove the threaded sleeve and the cover plate, the elasticity of the spring drives the abutment plate to lift the graphite crucible from the placement port, thereby making it convenient for the staff to take the graphite crucible out of the copper crucible. Under the action of the pressing plate, the downwardly moved pressing plate abuts against the top of the cover plate and squeezes the cover plate, making the connection between the cover plate and the graphite crucible tighter, thereby improving the sealing of the cover plate and the graphite crucible. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1A schematic diagram of the internal structure of a copper crucible of a precious metal evaporation crucible that is easy to clamp proposed by the utility model;

[0024] Figure 2 This is a schematic diagram of the structure of a pressing plate and a avoidance opening of a precious metal evaporation crucible that is easy to clamp, which is proposed by the utility model;

[0025] Figure 3 This is a schematic diagram of the structure of a heat preservation component of a precious metal evaporation crucible that is easy to clamp, as proposed by the utility model;

[0026] Figure 4 The utility model provides a schematic structural diagram of a sealing plate and a cover plate of a precious metal evaporation crucible which is easy to clamp.

[0027] Legend:

[0028] 1. Copper crucible; 2. Placement plate; 3. Placement port; 4. Graphite crucible; 5. Spring; 6. Abutment plate; 7. Threaded rod; 8. Slot; 9. Sealing plate; 10. Cover plate; 11. Nozzle; 12. Fixing plate; 13. Fixing rod; 14. Heat conduction plate; 15. Threaded sleeve; 16. Knob; 17. Pressure plate; 18. Avoidance port. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0030] Reference Figure 1-4 The utility model provides a precious metal evaporation crucible that is easy to clamp: it includes a copper crucible 1, a placing plate 2 is fixedly connected to the inside of the copper crucible 1, a plurality of placing openings 3 are opened on the top of the placing plate 2, graphite crucibles 4 are placed inside the plurality of placing openings 3, a plurality of springs 5 ​​are arranged at the bottom of the inner wall of the copper crucible 1, one end of the plurality of springs 5 ​​is fixedly connected to abutting plates 6, the abutting plates 6 are movably abutted with the bottom of the graphite crucible 4, when the pressing plate 17 is no longer abutted with the cover plate 10, under the action of the spring 5, the abutting plate 6 will be driven to move up, and the graphite crucible 4 will be pushed up and the graphite crucible 4 will be pushed out from the placing opening 3, so that it is convenient for the staff to clamp the graphite crucible 4 out through the clamp, a plurality of insulation components for keeping the graphite crucible 4 warm are arranged at the bottom of the placing plate 2, a threaded rod 7 is arranged at the bottom of the placing plate 2, and an abutting component is arranged on the outer surface of the threaded rod 7.

[0031] A slot 8 is provided on the top of the graphite crucible 4, a sealing plate 9 is movably connected inside the slot 8, a cover plate 10 is fixedly connected to the top of the sealing plate 9, a nozzle 11 is provided on the top of the cover plate 10, and the cover plate 10 and the graphite crucible 4 are movably connected.

[0032] The heat preservation component includes two fixed plates 12, and the opposite sides of the two fixed plates 12 are fixedly connected with fixed rods 13, and one end of the fixed rod 13 is fixedly connected with a heat conducting plate 14. The two heat conducting plates 14 are arranged in a mirror image. Through the arrangement of the heat preservation component, the outer surface of the graphite crucible 4 can be abutted under the action of the two heat conducting plates 14, and the heat can be preserved and transferred to the graphite crucible 4 through the heat conducting plates 14, thereby reducing the heat dissipation area of ​​the graphite crucible 4 and reducing heat loss.

[0033] The abutment assembly includes a threaded sleeve 15 arranged on the outer surface of the threaded rod 7, a knob 16 is fixedly connected to the top of the threaded sleeve 15, a pressure plate 17 is rotatably sleeved on the outer surface of the threaded sleeve 15, a plurality of avoidance openings 18 are opened on the pressure plate 17, and the number of the plurality of avoidance openings 18 is consistent with the number of the plurality of nozzles 11 and the positions correspond one to one. The bottom of the pressure plate 17 is movably abutted with the top of the cover plate 10. Through the setting of the abutment assembly, the pressure plate 17 can abut with the top of the cover plate 10 under the action of the pressure plate 17 and squeeze the cover plate 10, so that the connection between the cover plate 10 and the graphite crucible 4 is tighter, thereby improving the sealing of the cover plate 10 and the graphite crucible 4.

[0034] Working principle: When in use, the rotating knob 16 drives the threaded sleeve 15 to rotate, thereby removing the threaded sleeve 15 from the threaded rod 7 and taking out the pressing plate 17. Then, when the pressing plate 17 is not in contact with the cover plate 10, the spring 5 drives the abutment plate 6 to lift up the graphite crucible 4, thereby pushing the graphite crucible 4 out of the placement port 3, so that it is convenient for the staff to clamp the graphite crucible 4 out through the tool, and then remove the cover plate 10 on the corresponding graphite crucible 4, place the precious metal to be evaporated into the inside of the graphite crucible 4, and insert the sealing plate 9 into the inside of the slot 8 to close the cover plate 10, and place the graphite crucible 4 through the placement port 3. The opening 3 is put back into the copper crucible 1, and the corresponding two heat conducting plates 14 are in contact with the outer surface of the graphite crucible 4, which can reduce the heat dissipation area of ​​the graphite crucible 4 and reduce the heat loss. Then, the threaded sleeve 15 is threadedly connected to the threaded rod 7 again, and the plurality of nozzles 11 are inserted into the plurality of avoidance openings 18 one by one. Under the action of the downward pressing plate 17, the cover plate 10 and the graphite crucible 4 are squeezed, and the spring 5 is compressed, so that the connection between the cover plate 10 and the graphite crucible 4 is tighter, thereby improving the sealing of the cover plate 10 and the graphite crucible 4, thereby completing the assembly and performing the evaporation work.

[0035] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A precious metal evaporation crucible that is easy to clamp, comprising a copper crucible (1), characterized in that: A placement plate (2) is fixedly connected to the inside of the copper crucible (1), a plurality of placement openings (3) are opened on the top of the placement plate (2), graphite crucibles (4) are placed inside the plurality of placement openings (3), a plurality of springs (5) are arranged at the bottom of the inner wall of the copper crucible (1), one end of each of the plurality of springs (5) is fixedly connected to an abutment plate (6), the abutment plate (6) is movably abutted against the bottom of the graphite crucible (4), a plurality of insulation components for keeping the graphite crucible (4) warm are arranged at the bottom of the placement plate (2), a threaded rod (7) is arranged at the bottom of the placement plate (2), and an abutment component is arranged on the outer surface of the threaded rod (7).

2. The easy-to-grasp precious metal evaporation crucible according to claim 1, characterized in that: The top of the graphite crucible (4) is provided with a slot (8), the interior of the slot (8) is movably connected to a sealing plate (9), the top of the sealing plate (9) is fixedly connected to a cover plate (10), and the top of the cover plate (10) is provided with a nozzle (11).

3. The easy-to-grasp precious metal evaporation crucible according to claim 1, characterized in that: The heat preservation component comprises two fixing plates (12), and opposite sides of the two fixing plates (12) are fixedly connected with fixing rods (13), and one end of the fixing rod (13) is fixedly connected with a heat conducting plate (14).

4. The easy-to-grasp precious metal evaporation crucible according to claim 3, characterized in that: The two heat conducting plates (14) are arranged in a mirror image.

5. The easy-to-grasp precious metal evaporation crucible according to claim 1, characterized in that: The abutment assembly comprises a threaded sleeve (15) arranged on the outer surface of the threaded rod (7), a knob (16) is fixedly connected to the top of the threaded sleeve (15), and a pressure plate (17) is rotatably sleeved on the outer surface of the threaded sleeve (15).

6. The easy-to-grasp precious metal evaporation crucible according to claim 5, characterized in that: The pressing plate (17) is provided with a plurality of avoidance openings (18).

7. The easy-to-grasp precious metal evaporation crucible according to claim 5, characterized in that: The bottom of the pressing plate (17) is movably in contact with the top of the cover plate (10).