Dynamic ten-level ultrahigh-cleanliness experiment cabinet

Abstract

The utility model relates to the field of experiment auxiliary equipment, in particular to a dynamic ten-level ultrahigh-cleanliness experiment cabinet which comprises a cabinet body, a junction box is arranged at the top of the cabinet body, an induced draft fan is arranged in the cabinet body and fixed at the top end in the cabinet body, a fresh air inlet ultrahigh-efficiency filtering membrane is arranged at the bottom of the induced draft fan, and a fresh air outlet ultrahigh-efficiency filtering membrane is arranged at the bottom of the induced draft fan. The fresh air inlet ultra-efficient filtering membrane is fixed to the middle position in the cabinet body, a bottom plate with holes is fixed to the bottom end in the cabinet body, an upper glass door and a lower glass door are arranged on the front side of the cabinet body, the front sides of the glass doors are fixedly connected through a plurality of fixing nuts, and an integrated touch screen is fixed to the outer surfaces of the glass doors. According to the dynamic ten-grade cleanliness experiment cabinet provided by the utility model, the experiment cabinet capable of being closed is adopted, so that a high-purity reagent sample is prevented from being polluted by the environment of a laboratory in a sample injection process, and the cleanliness of gas in equipment is further improved.

Description

Technical Field

[0001] The utility model relates to the field of experimental auxiliary equipment, in particular to a dynamic ten-level ultra-high cleanliness experimental cabinet. Background Art

[0002] Ultra-clean high-purity reagents are a type of key basic chemical materials in the production process of ultra-large-scale integrated circuits (ICs). They are mainly used for wafer cleaning, etching, and chip doping and precipitation processes. With the development of the microelectronics industry, there are currently hundreds of ultra-clean high-purity reagents, which have the characteristics of many varieties, large dosage, high technical requirements, short storage validity period and strong corrosiveness. They can be mainly divided into inorganic acids, inorganic bases, organic solvents and other ultra-clean high-purity reagents. Ultra-clean high-purity reagents are produced based on the development needs of semiconductor technology. Each generation of integrated circuit products requires ultra-clean high-purity reagents of corresponding grades to match them. Their purity and cleanliness have a very important impact on the yield, electrical performance and reliability of integrated circuits. With the development of related industrial technologies, the latest developments in advanced semiconductor processes have increasingly higher requirements for impurity control in ultra-clean high-purity reagents.

[0003] The detection of ultra-trace impurity elements in ultra-clean and high-purity reagents used in semiconductor processes is currently mainly carried out using an inductively coupled plasma-triple quadrupole mass spectrometer (ICP-MS / MS) placed in a Class 100 clean environment. During the detection process, due to the extremely low impurity content in the sample, even if the overall cleanliness of the test environment has been improved to Class 100 cleanliness level, the sample will still cause potential data quality risks such as high background values, poor repeatability, and even sample test data distortion during the actual detection process due to the contamination of the test environment.

[0004] The main reason why this issue has not received enough attention before is that the requirements of the first-generation mature processes for high-purity reagents of the corresponding grade are generally relatively low (the impurity level is about ppb level). Because the absolute amount of impurities in such samples is relatively high, the tolerance of the samples to potential contamination in the test environment is also high; while the impurity limit in ultra-clean high-purity reagents used in advanced processes is extremely low (most of the impurity levels are at 1ppt or sub-ppt level), the tolerance of such samples to potential contamination during the test process is sharply reduced. Therefore, how to enhance the overall environmental cleanliness and anti-pollution ability of the sample preservation micro-area environment through purification technology without increasing the overall cleanliness control cost of the existing laboratory has gradually become a key issue that needs to be solved in the testing industry. In this regard, the utility model designs a dynamic ten-level ultra-high cleanliness test cabinet to solve the above problem. Utility Model Content

[0005] In view of the above situation, in order to overcome the defects of the prior art, the utility model provides a dynamic ten-level ultra-high cleanliness test cabinet, which effectively solves the problems of low detection efficiency and low detection accuracy in the above background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a dynamic ten-level ultra-high cleanliness test cabinet, comprising a cabinet body, a junction box is provided on the top of the cabinet body, an induced draft fan is provided inside the cabinet body, the induced draft fan is fixed to the top of the cabinet body, a fresh air inlet ultra-high efficiency filter membrane is provided at the bottom of the induced draft fan, the fresh air inlet ultra-high efficiency filter membrane is fixed at the middle position inside the cabinet body, a perforated bottom plate is fixed at the bottom end of the cabinet body, an upper and lower glass doors are provided on the front side of the cabinet body, the front sides of the glass doors are fixedly connected by a plurality of fixing nuts, and an integrated touch screen is fixed on the outer surface of the glass door.

[0007] Preferably, a fresh air inlet is provided at the top rear portion of the cabinet, the fresh air inlet is provided at the middle portion of the induced draft fan, an exhaust air valve is provided at the bottom back portion of the cabinet, and the exhaust air valve is provided between the perforated bottom plate and the bottom surface of the cabinet.

[0008] Preferably, an explosion-proof LED light strip is provided in the middle of the front portion of the cabinet, and the explosion-proof LED light strip is fixed to the inner side of the glass door at the upper end.

[0009] Preferably, the perforated bottom plate is provided with a plurality of exhaust holes, and the diameter of each of the exhaust holes is millimeters.

[0010] Preferably, at least four silent universal wheels are symmetrically provided on the bottom of the cabinet.

[0011] Preferably, the explosion-proof LED light strip, the exhaust air valve and the induced draft fan are connected to the integrated touch screen via signals, and the integrated touch screen is used to control the operation of the explosion-proof LED light strip, the exhaust air valve and the induced draft fan.

[0012] Compared with the prior art, the beneficial effects of the utility model are:

[0013] The utility model further processes the internal air of the dynamic laboratory through the ultra-high efficiency filtering device in the fresh air treatment unit, and the cleanliness level is better than the dynamic level 10 standard. The cleanliness level of the air in the cabinet space can be kept continuously better than the dynamic level 10 standard. The cabinet adopts modular assembly technology to form a larger internal use space to meet the necessary experimental operations such as liquid sample injection and liquid sample dilution by the experimenters. The cabinet realizes modular design, industrialized component production, on-site installation and assembly, and integrated structural decoration, which reduces the sample contamination risk of electronic-grade chemicals during the detection process, improves the overall anti-pollution ability of the microenvironment of the sample storage area during the detection process, and thus ensures the safety of the samples.

[0014] The dynamic ten-level cleanliness test cabinet provided by the utility model adopts a closable test cabinet, which avoids the high-purity reagent samples from being polluted by the laboratory environment during the sample injection process, thereby further increasing the cleanliness of the gas inside the equipment.

[0015] The utility model is provided with an exhaust gas discharge system, the exhaust valve is a double one-way valve, the pipeline behind the valve is directly connected to the exhaust gas pipeline of an inductively coupled plasma-triple quadrupole mass spectrometer (ICP-MS / MS), no additional discharge pipeline is added, and due to the barrier effect of the double one-way valve, the exhaust gas can be discharged, and at the same time, the exhaust gas in the discharge valve can be prevented from backflowing into the experimental cabinet and contaminating the sample, thereby further increasing the safety of the sample.

[0016] The utility model can separate the gas through the ultra-high efficiency filter membrane at the fresh air inlet, so that the organic / irritating odor reagent vapor can be extracted in time, thereby further ensuring the cleanliness of the interior of the cabinet. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. They are used together with the embodiments of the present invention to explain the present invention and do not constitute a limitation to the present invention.

[0018] In the attached picture:

[0019] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0020] Figure 2 This is a schematic diagram of the practical front view;

[0021] Figure 3 It is a schematic diagram of the back of the utility model;

[0022] Figure 4 It is a perspective schematic diagram of the air duct of the utility model.

[0023] In the figure: 1-junction box; 2-cabinet; 3-induced draft fan; 4-integrated touch screen; 5-ultra-high efficiency filter membrane at fresh air inlet; 6-explosion-proof LED light strip; 7-glass door; 8-fixing nut; 9-bottom plate with holes; 10-exhaust hole; 11-silent universal wheel; 12-fresh air inlet; 13-exhaust air valve. DETAILED DESCRIPTION

[0024] The technical solutions in the embodiments of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all of the embodiments; based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model.

[0025] Embodiment 1, by Figure 1 , Figure 4 It is given that the utility model includes a cabinet 2, which adopts a rectangular hollow structure. The cabinet 2 is made of PFA material that is chemically inert to most organic / inorganic process chemicals. The cabinet 2 is used to install and fix the entire equipment. A junction box 1 is provided on the top of the cabinet 2. The junction box 1 adopts a rectangular structure and is embedded in the top of the cabinet 2. The junction box 1 is used to install corresponding wires. An induced draft fan 3 is provided inside the cabinet 2. The induced draft fan 3 is fixed to the top of the cabinet 2. The induced draft fan 3 is made of alloy material or lightweight material. The induced draft fan 3 is used to absorb outside air. An electric air valve and a positive pressure monitoring instrument are provided on the induced draft fan 3, which can maintain a positive pressure of 10Pa inside the cabinet 2 relative to the external environment under any operating condition of the cabinet door opening and closing. A fresh air inlet ultra-high efficiency filter membrane 5 is provided at the bottom of the induced draft fan 3, and the fresh air inlet ultra-high efficiency filter membrane 5 is fixed at the middle position inside the cabinet 2. The ultra-high efficiency filter membrane 5 at the fresh air inlet is made of FFU material, and the ultra-high efficiency filter membrane 5 at the fresh air inlet is used to filter air. A bottom plate 9 with holes is fixed to the bottom end of the cabinet 2, and the bottom plate 9 with holes is made of lightweight material or alloy material. The bottom plate 9 with holes is used to install and fix the exhaust hole 10. The front side of the cabinet 2 is provided with upper and lower glass doors 7, and the glass doors 7 are designed to open and close up and down. The glass doors 7 are made of transparent wired glass with good explosion-proof performance. The glass doors 7 are used to ensure that the interior of the cabinet 2 remains sealed, so as to ensure that air can only enter from the fresh air inlet 12. The front side of the glass door 7 is fixedly connected by a plurality of fixing nuts 8, and the fixing nuts 8 are used to fix the glass door 7, thereby ensuring that the glass door 7 and the cabinet 2 remain sealed. An integrated touch screen 4 is fixed to the outer surface of the glass door 7, and the integrated touch screen 4 is used to control the explosion-proof LED light strip 6, the exhaust air valve 13, and the induced draft fan 3.

[0026] Embodiment 2, based on embodiment 1, Figure 2-3 It is given that a fresh air inlet 12 is provided at the top of the rear part of the cabinet 2, and the fresh air inlet 12 adopts a straight slot structure. The fresh air inlet 12 is arranged in the middle of the induced draft fan 3, and the fresh air inlet 12 is used for air to enter. An exhaust air valve 13 is provided at the bottom of the back of the cabinet 2, and the exhaust air valve 13 is arranged between the perforated bottom plate 9 and the bottom surface of the cabinet 2. The exhaust air valve 13 adopts a one-way valve, so that waste can be discharged and air can be prevented from entering from the exhaust air valve 13. At least four silent universal wheels 11 are symmetrically provided at the bottom of the cabinet 2, and the silent universal wheels 11 are made of lightweight materials or alloy materials. The silent universal wheels 11 can facilitate the staff to move the equipment;

[0027] Before using the device, the staff first controls the multiple silent universal wheels 11 to move the entire device into place, and then the staff first connects the device to electricity and fixes the wires inside the junction box 1 to prevent the staff from touching the wires, thereby ensuring the staff's life safety. At this time, the staff controls the glass door 7 to open through the integrated touch screen 4, so as to put the sample to be preserved into the cabinet 2. At this time, the staff adjusts the sample to a suitable position, and further uses the fixing nut 8 to make the glass door 7 and the cabinet 2 fit tightly. At this time, the staff controls the integrated touch screen 4 to start the induced draft fan 3, so that the gas enters the cabinet 2 from the fresh air inlet 12. At this time, the air moves downward due to the action of the induced draft fan 3, and further reaches the fresh air inlet ultra-high efficiency filter membrane 5. Due to the action of the fresh air inlet ultra-high efficiency filter membrane 5, the gas with a cleanliness level exceeding level ten remains above the fresh air inlet ultra-high efficiency filter membrane 5, and the gas with a cleanliness level lower than level ten falls to the bottom of the cabinet 2, and further reaches the perforated bottom plate 9.

[0028] Embodiment 3, based on embodiment 1, Figure 1 It is given that an explosion-proof LED light strip 6 is provided in the middle of the front part of the cabinet 2, and the explosion-proof LED light strip 6 can prevent gas explosion inside the cabinet 2, and the explosion-proof LED light strip 6 is fixed to the inner side of the glass door 7 at the upper end, and a plurality of exhaust holes 10 are penetrated through the perforated bottom plate 9, and the diameter of each of the exhaust holes 10 is 50 mm, and the exhaust holes 10 can extract the exhaust gas filtered by the ultra-high efficiency filter membrane 5 of the fresh air inlet, and then reach the exhaust air valve 13, so as to be excluded from the outside of the cabinet 2, and the explosion-proof LED light strip 6, the exhaust air valve 13 and the induced draft fan 3 are connected with the integrated touch screen 4 through signals, and the integrated touch screen 4 is used to control the operation of the explosion-proof LED light strip 6, the exhaust air valve 13 and the induced draft fan 3;

[0029] When the gas reaches the inside of the cabinet 2, the staff controls the integrated touch screen 4 to make the explosion-proof LED light strip 6 work, thereby preventing the gas inside the cabinet 2 from exploding. When the gas reaches the bottom of the perforated bottom plate 9, the integrated touch screen 4 controls the exhaust hole 10 to start working, and at the same time controls the exhaust gas air valve 13 to start working, so that the exhaust gas is discharged from the outside of the cabinet 2 through the exhaust gas air valve 13, thereby ensuring that the internal pressure of the equipment remains stable, and at the same time ensuring that the cleanliness of the gas inside the equipment is dynamically better than level ten, thereby ensuring that the samples inside the equipment remain clean. During this process, when the sample needs to be diluted or spiked, the staff controls the glass door 7 to move to a certain height, and both hands can be inserted into the laboratory cabinet to complete the corresponding operation. After the operation is completed, the glass door 7 is closed.

[0030] The working process of the utility model is as follows: before using the device, the staff first controls the multiple silent universal wheels 11 to move the entire device into place, and further the staff first connects the device to the power supply and fixes the wires inside the junction box 1 to prevent the staff from touching the wires, thereby ensuring the life safety of the staff. At this time, the staff controls the glass door 7 to open through the integrated touch screen 4, so as to put the sample to be preserved into the cabinet 2. At this time, the staff adjusts the sample to a suitable position, and further the staff uses the fixing nut 8 to make the glass door 7 and the cabinet 2 fit tightly. At this time, the staff controls the integrated touch screen 4 to make the induced draft fan 3 start working, so that the gas enters the cabinet 2 from the junction box 1. At this time, the staff controls the integrated touch screen 4 to make the explosion-proof LED light strip 6 work, thereby preventing the gas inside the cabinet 2 from emitting An explosion occurs. At this time, the air moves downward due to the action of the induced draft fan 3, and further reaches the fresh air inlet ultra-high efficiency filter membrane 5. Due to the action of the fresh air inlet ultra-high efficiency filter membrane 5, the gas with a cleanliness level exceeding level ten remains above the fresh air inlet ultra-high efficiency filter membrane 5, and the gas with a cleanliness level lower than level ten falls to the bottom of the cabinet 2, and further reaches the perforated bottom plate 9. The integrated touch screen 4 controls the exhaust hole 10 to start working, and at the same time controls the exhaust gas air valve 13 to start working, so that the exhaust gas is discharged from the outside of the cabinet 2 through the exhaust gas air valve 13, thereby ensuring that the internal pressure of the equipment remains stable, and at the same time ensuring that the internal gas cleanliness of the equipment is dynamically better than level ten, thereby ensuring that the sample inside the equipment remains clean. During this process, when the sample needs to be diluted or spiked, the staff controls the glass door 7 to move to a certain height, and both hands can be inserted into the laboratory cabinet to complete the corresponding operation, and the glass door 7 is closed after the operation is completed.

[0031] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device.

[0032] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A dynamic ten-level ultra-high cleanliness test cabinet, characterized by: The cabinet (2) comprises a cabinet body (2), wherein a junction box (1) is provided at the top of the cabinet body (2), an induced draft fan (3) is provided inside the cabinet body (2), the induced draft fan (3) is fixed to the top of the cabinet body (2), a fresh air inlet ultra-high efficiency filter membrane (5) is provided at the bottom of the induced draft fan (3), the fresh air inlet ultra-high efficiency filter membrane (5) is fixed to the middle position inside the cabinet body (2), a bottom plate (9) with holes is fixed at the bottom end of the cabinet body (2), an upper and lower glass door (7) is provided on the front side of the cabinet body (2), the front side of the glass door (7) is fixedly connected by a plurality of fixing nuts (8), and an integrated touch screen (4) is fixed on the outer surface of the glass door (7).

2. A dynamic ten-level ultra-high cleanliness test cabinet according to claim 1, characterized in that: A fresh air inlet (12) is provided at the top rear portion of the cabinet body (2), and the fresh air inlet (12) is located in the middle of the induced draft fan (3). An exhaust air valve (13) is provided at the bottom back portion of the cabinet body (2), and the exhaust air valve (13) is located between the perforated bottom plate (9) and the bottom surface of the cabinet body (2).

3. A dynamic ten-level ultra-high cleanliness test cabinet according to claim 2, characterized in that: An explosion-proof LED light strip (6) is provided in the middle of the front of the cabinet (2), and the explosion-proof LED light strip (6) is fixed to the inner side of the glass door (7) at the upper end.

4. A dynamic ten-level ultra-high cleanliness test cabinet according to claim 1, characterized in that: The perforated bottom plate (9) is provided with a plurality of exhaust holes (10), and the diameter of each exhaust hole (10) is 50 millimeters.

5. The dynamic ten-level ultra-high cleanliness test cabinet according to claim 3 is characterized in that: At least four silent universal wheels (11) are symmetrically arranged at the bottom of the cabinet (2).

6. A dynamic ten-level ultra-high cleanliness test cabinet according to claim 3, characterized in that: The explosion-proof LED light strip (6), the exhaust air valve (13) and the induced draft fan (3) are connected to the integrated touch screen (4) via signals, and the integrated touch screen (4) is used to control the operation of the explosion-proof LED light strip (6), the exhaust air valve (13) and the induced draft fan (3).

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