Surface treatment device for chip on blue film
By designing an automated blue membrane chip surface treatment device, the limit structure is used to avoid workers' handheld operations and filter structures to prevent impurities from entering the water pump, solving the problem of workers' skin burns caused by chemical solutions, improving the safety of the cleaning process and the durability of the equipment sex.
Patent Information
- Application Number
- CN202420794174.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-17
- Publication Date
- 2024-12-13
- Estimated Expiration
- 2034-04-17
AI Technical Summary
In the prior art, chemical solutions contain corrosive substances, and long-term cleaning of chips can easily burn workers' skin.
A blue membrane chip surface treatment device is designed, including a cleaning box and a limit structure. Through the limit structure, the chip body is automatically placed into the cleaning box to avoid hand-held operations by workers, and a filter structure is set up in the drainage pipe for filtering and cleaning. Impurities in the liquid prevent them from entering the water pump.
It effectively avoids skin burns from workers and improves the service life of the water pump, and improves the safety of the cleaning process and the durability of the equipment through automated operations.
Smart Images
Figure CN222153193U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of chips, in particular to a surface treatment device for chips on a blue film. Background Art
[0002] A chip is an integrated circuit chip, a miniaturized electronic device used to integrate multiple electronic components and circuit functions. Chips are usually manufactured through a series of process steps, including photolithography, deposition, etching, etc. The blue film plays a role in protecting the chip surface, transferring photolithography patterns, and positioning during the manufacturing process.
[0003] The existing related technologies often have the following defects: During the chip manufacturing process, some impurities and dirt will adhere to the surface of the blue film. Using chemical solution cleaning can effectively remove these impurities. The existing cleaning method is that workers hold the chip and directly put it into the cleaning box for soaking and cleaning. Because the chemical solution contains corrosive substances, long-term chip cleaning can easily burn the worker's skin, causing pain, redness, swelling, blisters and other adverse reactions.
[0004] Therefore, the utility model provides a blue film chip surface processing device. Utility Model Content
[0005] The utility model aims to solve the disadvantage in the prior art that the chemical solution contains corrosive substances, so that the worker's skin is easily burned by long-term chip cleaning, and proposes a blue film chip surface treatment device.
[0006] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a surface treatment device for chips on blue film, comprising a cleaning box and a chip body, one side of the cleaning box is connected to a drain pipe, the other end of the drain pipe is connected to a water pump, one side of the cleaning box is connected to a water inlet pipe, the other end of the water inlet pipe is connected to the water pump, the surface of the cleaning box is provided with a limiting structure, the limiting structure comprises a threaded rod, the threaded rod is rotatably connected to the surface of the cleaning box, the arc surface of the threaded rod is threadedly connected to a driving plate, the surface of the driving plate is fixedly connected to a connecting arm, the surface of the connecting arm is fixedly connected to a placement box, and the surface of the placement box is provided with a plurality of rectangular holes.
[0007] The effect achieved by the above components is: by setting the limiting structure, it is easy to put the chip body into the cleaning box with cleaning liquid added, thereby avoiding the need for workers to hold the chip in their hands to put it in, thereby avoiding the cleaning liquid from burning the worker's skin.
[0008] Preferably, both sides of the driving plate are fixedly connected with extension plates, and a round rod slides through the surface of the extension plate, and the round rod is fixedly connected to the surface of the cleaning box.
[0009] The effect achieved by the above components is: when the driving plate rotates, it will drive the extension plate to move, and the extension plate will slide along the arc surface of the round rod. The round rod limits the movement path of the extension plate, and then limits the movement path of the driving plate, thereby preventing the placement box from rotating when moving.
[0010] Preferably, one end of the threaded rod away from the cleaning box is fixedly connected to a turntable, and the cross section of the turntable is in a "cross" shape.
[0011] The effects achieved by the above components are: the rotation of the turntable will drive the threaded rod to rotate, and the turntable can facilitate the rotation of the threaded rod.
[0012] Preferably, a protective pad is fixedly connected to the inner wall of the placement box, and the protective pad is made of rubber.
[0013] The effect achieved by the above components is that the chip body will contact the protective pad in the placement box, and the protective pad can prevent the chip body from colliding with the inner wall of the placement box and causing damage.
[0014] Preferably, a filtering structure is provided on the surface of the drain pipe, and the filtering structure includes a filter plate, and the filter plate is slidably inserted on the surface of the drain pipe, and a limiting hole is opened on the surface of the filter plate. The surface of the drain pipe is fixedly connected to a fixing plate, and a rectangular rod is slidably penetrated through the surface of the fixing plate, and the rectangular rod is fixedly connected to the limiting plate at one end close to the filter plate.
[0015] The effect achieved by the above components is: by setting up a filtering structure, it is convenient to filter the cleaning liquid entering the water pump, thereby preventing impurities contained in the cleaning liquid after cleaning the chip body from entering the water pump, thereby increasing the service life of the water pump.
[0016] Preferably, a groove is provided on the surface of the drain pipe, and a rectangular bar is fixedly connected to a side of the filter plate close to the drain pipe, and the size of the groove matches the size of the rectangular bar.
[0017] The effect achieved by the above components is that the filter plate drives the convex strip to be inserted into the groove, and the convex strip increases the airtightness of the fit between the filter plate and the drain pipe.
[0018] Preferably, a spring is sleeved on the surface of the rectangular rod, and two ends of the spring are fixedly connected to the limiting plate and the fixing plate respectively.
[0019] The effect achieved by the above components is that the limiting plate moves toward the filter plate with the help of the stretching force of the spring, and the spring improves the stability of the limiting plate when inserted into the limiting hole.
[0020] In summary:
[0021] 1. In the utility model, by setting a limiting structure, the chip body is placed in the placement box, and the threaded rod is rotated. The rotation of the threaded rod will drive the driving plate to move with the help of the thread, and the movement of the driving plate will drive the connecting arm to move. The movement of the connecting arm will drive the placement box to move. When the placement box moves, it will drive the chip body to move until the placement box drives the chip body to be completely immersed in the cleaning liquid, so as to immerse and clean the chip body, avoiding the need for workers to hold the chip in their hands, thereby avoiding the cleaning liquid from burning the workers' skin.
[0022] 2. In the utility model, by setting a filtering structure, the filter plate is inserted into the drain pipe, and the rectangular rod is pushed, the rectangular rod will move in the fixed plate, and the movement of the rectangular rod will drive the limit plate to move until the limit plate is inserted into the rectangular hole, thereby limiting the position of the filter plate. When the cleaning liquid passes through the drain pipe, the filter plate will filter the cleaning liquid to prevent impurities contained in the cleaning liquid after cleaning the chip body from entering the water pump, thereby increasing the service life of the water pump. BRIEF DESCRIPTION OF THE DRAWINGS
[0023] Figure 1 It is a three-dimensional structural schematic diagram of the utility model;
[0024] Figure 2 This is a schematic structural diagram of the utility model from another angle;
[0025] Figure 3 This is a schematic diagram of the structure of the placement box of the utility model;
[0026] Figure 4 It is a structural schematic diagram of the water pump of the utility model;
[0027] Figure 5 For this utility model Figure 4 Schematic diagram of the local structure in;
[0028] Figure 6 It is a structural schematic diagram of the filter plate of the utility model.
[0029] Legend: 1. Cleaning box; 2. Chip body; 3. Drain pipe; 4. Water pump; 5. Water inlet pipe; 6. Limiting structure; 61. Threaded rod; 62. Drive plate; 63. Connecting arm; 64. Placement box; 65. Rectangular hole; 66. Extension plate; 67. Round rod; 68. Turntable; 69. Protective pad; 7. Filter structure; 71. Filter plate; 72. Limiting hole; 73. Fixing plate; 74. Rectangular rod; 75. Limiting plate; 76. Groove; 77. Rectangular strip; 78. Spring. DETAILED DESCRIPTION
[0030] Reference Figure 1As shown, the utility model provides a technical solution: a surface treatment device for a chip on a blue film, comprising a cleaning box 1 and a chip body 2, one side of the cleaning box 1 is connected to a drain pipe 3, the other end of the drain pipe 3 is connected to a water pump 4, one side of the cleaning box 1 is connected to a water inlet pipe 5, the other end of the water inlet pipe 5 is connected to the water pump 4, and the surface of the cleaning box 1 is provided with a limiting structure 6, by setting the limiting structure 6, it is convenient to put the chip body 2 into the cleaning box 1 with the cleaning liquid added, so as to avoid the worker holding the chip to put it in, and then avoid the cleaning liquid from burning the worker's skin. The surface of the drain pipe 3 is provided with a filtering structure 7, by setting the filtering structure 7, it is convenient to filter the cleaning liquid entering the water pump 4, so as to avoid the impurities contained in the cleaning liquid after cleaning the chip body 2 from entering the water pump 4, and then improve the service life of the water pump 4.
[0031] The specific configuration and function of the limiting structure 6 and the filtering structure 7 will be described in detail below.
[0032] Reference Figure 2 and Figure 3 As shown, in this embodiment: the limiting structure 6 includes a threaded rod 61, which is rotatably connected to the surface of the cleaning box 1, and the arc surface of the threaded rod 61 is threadedly connected to a driving plate 62, and the surface of the driving plate 62 is fixedly connected to a connecting arm 63, and the surface of the connecting arm 63 is fixedly connected to a placement box 64, and the surface of the placement box 64 is provided with a plurality of rectangular holes 65. Both sides of the driving plate 62 are fixedly connected to an extension plate 66, and the surface of the extension plate 66 is slidably penetrated by a round rod 67, and the round rod 67 is fixedly connected to the surface of the cleaning box 1. When the driving plate 62 rotates, it will drive the extension plate 66 to move, and the extension plate 66 will slide along the arc surface of the round rod 67 when it moves. The round rod 67 reaches the effect of limiting the moving path of the extension plate 66, and then limiting the moving path of the driving plate 62, thereby preventing the placement box 64 from rotating when it moves. The end of the threaded rod 61 away from the cleaning box 1 is fixedly connected to a rotating disk 68, the cross section of which is in the shape of a cross. The rotation of the rotating disk 68 will drive the threaded rod 61 to rotate, and the rotating disk 68 can facilitate the rotation of the threaded rod 61. The inner wall of the placement box 64 is fixedly connected to a protective pad 69, which is made of rubber. The chip body 2 will contact the protective pad 69 in the placement box 64, and the protective pad 69 can prevent the chip body 2 from colliding with the inner wall of the placement box 64 and causing damage.
[0033] Reference Figure 4 and Figure 5 and Figure 6As shown, specifically, the filter structure 7 includes a filter plate 71, which is slidably inserted on the surface of the drain pipe 3, and a limiting hole 72 is provided on the surface of the filter plate 71. A fixing plate 73 is fixedly connected to the surface of the drain pipe 3, and a rectangular rod 74 is slidably penetrated on the surface of the fixing plate 73. One end of the rectangular rod 74 close to the filter plate 71 is fixedly connected to the limiting plate 75. A groove 76 is provided on the surface of the drain pipe 3, and a rectangular strip 77 is fixedly connected to the side of the filter plate 71 close to the drain pipe 3. The size of the groove 76 matches the size of the rectangular strip 77. The filter plate 71 will drive the convex strip to be inserted into the groove 76, and the convex strip can increase the airtightness of the fit between the filter plate 71 and the drain pipe 3. A spring 78 is sleeved on the surface of the rectangular rod 74, and the two ends of the spring 78 are fixedly connected to the limiting plate 75 and the fixing plate 73 respectively. The limiting plate 75 moves toward the direction close to the filter plate 71 with the help of the stretching force of the spring 78, and the spring 78 can improve the stability of the limiting plate 75 inserted into the limiting hole 72.
[0034] Working principle: when the chip body 2 needs to be soaked and cleaned, first add the cleaning solution into the cleaning box 1, and then put the chip body 2 into the placement box 64. The chip body 2 will contact the protective pad 69 in the placement box 64. After the chip body 2 is placed, turn the turntable 68. The rotation of the turntable 68 will drive the threaded rod 61 to rotate. The rotation of the threaded rod 61 will rotate on the surface of the cleaning box 1. The rotation of the threaded rod 61 will drive the driving plate 62 to move with the help of the thread. When the driving plate 62 rotates, it will drive the extension plate 66 to move. The extension plate 66 will slide along the arc surface of the round rod 67. The round rod 67 reaches the limit of the movement path of the extension plate 66, and then limits the movement path of the driving plate 62, thereby preventing the placement box 64 from rotating when it moves. The movement of the driving plate 62 will drive the connecting arm 63 to move, and the movement of the connecting arm 63 will drive the placement box 64 to move. When the placement box 64 moves, it will drive the chip body 2 to move, and the placement box 64 will move in the direction close to the cleaning liquid until the placement box 64 drives the chip body 2 to be completely immersed in the cleaning liquid. When the immersed chip body 2 needs to be taken out, the turntable 68 is rotated, and the threaded rod 61 rotates with the help of the turntable 68 to drive the driving plate 62 to move, and the movement of the connecting arm 63 with the help of the driving plate 62 will drive the placement box 64 to move, and the placement box 64 will drive the chip body 2 to move out of the cleaning liquid. At this time, the cleaning liquid in the placement box 64 will flow into the cleaning box 1 from the rectangular hole 65, thereby facilitating the chip body 2 to be taken out of the placement box 64.
[0035] When it is necessary to filter the cleaning liquid entering the water pump 4, first pull the rectangular rod 74. The movement of the rectangular rod 74 will slide in the fixed plate 73. The rectangular rod 74 will drive the limit plate 75 to move when it moves. The limit plate 75 will compress the spring 78 when it moves. At this time, the spring 78 is in a compressed state. When the limit plate 75 moves to a suitable position, the filter plate 71 is inserted into the drain pipe 3. The filter plate 71 will drive the convex strip to be inserted into the groove 76. The convex strip can increase the airtightness of the fit between the filter plate 71 and the drain pipe 3. Then release the rectangular rod 74. The limit plate 75 moves in the direction close to the filter plate 71 with the help of the extension force of the spring 78 until the limit plate 75 is inserted into the rectangular hole 65, thereby limiting the position of the filter plate 71.
[0036] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood by specific circumstances.
Claims
1. A blue film chip surface treatment device, comprising a cleaning box (1) and a chip body (2), wherein one side of the cleaning box (1) is connected to a drain pipe (3), and the other end of the drain pipe (3) is connected to a water pump (4), one side of the cleaning box (1) is connected to a water inlet pipe (5), and the other end of the water inlet pipe (5) is connected to the water pump (4), and a limiting structure (6) is provided on the surface of the cleaning box (1), characterized in that: The limiting structure (6) comprises a threaded rod (61), the threaded rod (61) is rotatably connected to the surface of the cleaning box (1), the arc surface of the threaded rod (61) is threadedly connected to a driving plate (62), the surface of the driving plate (62) is fixedly connected to a connecting arm (63), the surface of the connecting arm (63) is fixedly connected to a placement box (64), and the surface of the placement box (64) is provided with a plurality of rectangular holes (65).
2. The blue film chip surface treatment device according to claim 1, characterized in that: Extension plates (66) are fixedly connected to both sides of the driving plate (62), and a round rod (67) slidably penetrates the surface of the extension plate (66), and the round rod (67) is fixedly connected to the surface of the cleaning box (1).
3. The blue film chip surface treatment device according to claim 1, characterized in that: One end of the threaded rod (61) away from the cleaning box (1) is fixedly connected to a rotating disk (68), and the cross section of the rotating disk (68) is in the shape of a cross.
4. The blue film chip surface treatment device according to claim 1, characterized in that: The inner wall of the placement box (64) is fixedly connected with a protective pad (69), and the protective pad (69) is made of rubber.
5. The blue film chip surface treatment device according to claim 1, characterized in that: The surface of the drain pipe (3) is provided with a filter structure (7), the filter structure (7) comprising a filter plate (71), the filter plate (71) being slidably inserted on the surface of the drain pipe (3), a limiting hole (72) being provided on the surface of the filter plate (71), the surface of the drain pipe (3) being fixedly connected with a fixing plate (73), the surface of the fixing plate (73) being slidably penetrated with a rectangular rod (74), and one end of the rectangular rod (74) close to the filter plate (71) being fixedly connected with the limiting plate (75).
6. The blue film chip surface treatment device according to claim 5, characterized in that: A groove (76) is provided on the surface of the drain pipe (3); a rectangular strip (77) is fixedly connected to one side of the filter plate (71) close to the drain pipe (3); and the size of the groove (76) matches the size of the rectangular strip (77).
7. The blue film chip surface treatment device according to claim 5, characterized in that: A spring (78) is sleeved on the surface of the rectangular rod (74), and two ends of the spring (78) are fixedly connected to the limiting plate (75) and the fixing plate (73) respectively.