Plasma cleaning machine

Abstract

The utility model discloses a plasma cleaning machine. And a plasma cleaning cavity is formed in the top of the cleaning machine body. By installing the plasma cleaning cavity and the like, when the device is used, a user can place a material box containing products to be cleaned and a material box for collecting cleaned products at the two ends of the cleaning machine body respectively, an automatic feeding and discharging mechanism on the plasma cleaning cavity can be started, the electric sliding rail can be driven, the driving frame is matched, and the cleaning efficiency is improved. According to the plasma cleaning device, the blocking door body is driven to automatically ascend and descend, so that automatic opening and closing control over the two ends of the plasma cleaning cavity can be conveniently achieved, original products can be automatically clamped and placed into the plasma cleaning cavity and cleaned objects are taken out through the two mechanical arms provided with the electric clamps, and therefore automatic feeding and discharging operation of the device is achieved; therefore, automatic continuous machining is conveniently achieved, and the machining efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of plasma cleaning machines, in particular to a plasma cleaning machine. Background Art

[0002] Plasma cleaning machines are widely used in electronics, semiconductors, medical, aerospace, and automotive fields. They apply sufficient energy to the gas to ionize it and turn it into a plasma state, and then use the plasma of these active components to treat the sample surface to achieve the cleaning function.

[0003] Since the plasma cleaning machine often needs to manually open or close the door of the plasma cleaning machine to realize loading and unloading operations during actual operation, it is difficult to realize automatic loading and unloading operations, continuous cleaning processing, affecting work efficiency, and difficult to promote. In addition, it is not easy to collect waste residue during exhaust and filter and purify the gas filled in for generating plasma, which leads to poor use effect of the device and can no longer meet people's needs. For this reason, we propose a new type of plasma cleaning machine to solve the above-mentioned problems. Utility Model Content

[0004] The purpose of the utility model is to provide a plasma cleaning machine to solve the problems raised in the above background technology.

[0005] In order to achieve the above-mentioned purpose, the utility model provides the following technical solution: a plasma cleaning machine, comprising;

[0006] A cleaning machine body, wherein a plasma cleaning chamber is arranged on the top of the cleaning machine body, a deflation pipe and a first inflatable pipe are respectively installed at two ends of one side of the plasma cleaning chamber, a first air pump is installed on the deflation pipe, a purification cylinder and a second inflatable pipe are sequentially installed at the bottom of the first inflatable pipe, and a second air pump is installed on the second inflatable pipe, an air intake filter plate is connected to the bottom of the second inflatable pipe, a pressure gauge is installed on one side of the plasma cleaning chamber, and the pressure gauge is used to automatically monitor the air pressure inside the plasma cleaning chamber, and a radio frequency power supply reaction area matching the first inflatable pipe is installed on the other side of the plasma cleaning chamber;

[0007] A waste residue filter cartridge is installed at the bottom of the venting pipe fitting, and is used to collect impurities in the waste gas discharged from the venting pipe fitting. An automatic loading and unloading mechanism is installed on the plasma cleaning chamber.

[0008] Furthermore, a threaded connection is formed between the air intake filter screen and the second inflatable pipe fitting, and flanges are welded on the waste filter cartridge, the deflation pipe fitting, the first inflatable pipe fitting, the purification cartridge and the second inflatable pipe fitting, so that it is convenient to realize independent disassembly, assembly and maintenance of the air intake filter screen, the waste filter cartridge and the purification cartridge.

[0009] Furthermore, the air intake filter plate and the second air-filling pipe are both provided with filter cloth layers, and the interior of the purification cylinder is evenly provided with activated carbon purification layers, so that the purification cylinder provided with the activated carbon purification layer can filter and purify the gas filled into the RF power source reaction zone, thereby improving the cleanliness.

[0010] Furthermore, the bottom of the cleaning machine body is evenly clamped with rubber shock-absorbing feet, and the inner wall of the plasma cleaning chamber is provided with a nano-ceramic anti-sticking layer, which improves the stability of the cleaning machine body and the anti-fouling and wear-resistant performance of the inner wall of the plasma cleaning chamber.

[0011] Furthermore, the automated loading and unloading mechanism comprises a rectangular frame-shaped storage chamber, a top sealing plate and a blocking door body, the rectangular frame-shaped storage chamber being sequentially arranged at both ends of the plasma cleaning chamber, the blocking door body being slidably connected to the interior of the rectangular frame-shaped storage chamber, the top sealing plate being arranged at the top of the blocking door body, and a silicone sealing layer being arranged on the top sealing plate and the rectangular frame-shaped storage chamber, thereby improving the sealing effect of the blocking door body when it is closed relative to the plasma cleaning chamber.

[0012] Furthermore, the automated loading and unloading mechanism also includes a drive frame and an electric slide rail, which are sequentially installed at both ends of the plasma cleaning chamber, and the drive frame is slidably connected to the electric slide rail, and the drive frame and the top sealing plate are welded to facilitate the automatic lifting and lowering of the sealing door body, which facilitates the automatic opening and closing control of both ends of the plasma cleaning chamber.

[0013] Furthermore, the automated loading and unloading mechanism also includes a robotic arm and an electric clamp. The robotic arm is sequentially installed at both ends of the cleaning machine body, and the electric clamp is installed at the output end of the robotic arm by screws, so that it is convenient to use two robotic arms equipped with electric clamps to realize automated loading and unloading operations, which facilitates automated continuous processing and improves processing efficiency.

[0014] Compared with the prior art, the beneficial effects of the utility model are:

[0015] The plasma cleaning machine optimizes its own performance by installing a plasma cleaning chamber and an automatic loading and unloading mechanism. On the one hand, the user can place a material box containing the product to be cleaned and a material box for collecting the cleaned product at both ends of the cleaning machine body, and start the automatic loading and unloading mechanism on the plasma cleaning chamber, which can drive the electric slide rail and cooperate with the driving frame to drive the blocking door to automatically rise and fall, which is convenient for realizing the automatic opening and closing control of both ends of the plasma cleaning chamber. In addition, two mechanical arms equipped with electric clamps can be used to automatically clamp the original product into the plasma cleaning chamber and take out the cleaned items, which enables the device to realize automatic loading and unloading operations, thereby facilitating the realization of automatic continuous processing and improving the processing efficiency. On the one hand, the working efficiency is improved. On the other hand, after cleaning is completed, the polluted gas inside the plasma cleaning chamber is extracted, and the waste residue generated by cleaning will be retained in the waste residue filter cartridge, making it easy for the device to collect waste residue. In addition, a purification cartridge is installed between the first inflatable pipe fitting and the second inflatable pipe fitting. The purification cartridge provided with an activated carbon purification layer can filter and purify the gas filled into the reaction zone of the radio frequency power supply, thereby improving the cleanliness and optimizing the plasma generation effect. Furthermore, a threaded connection is set between the air intake filter mesh plate and the second inflatable pipe fitting, and flanges are welded on the waste residue filter cartridge, the exhaust pipe fitting, the first inflatable pipe fitting, the purification cartridge and the second inflatable pipe fitting, so that the independent disassembly and maintenance of the air intake filter mesh plate, the waste residue filter cartridge and the purification cartridge can be easily realized. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the front view structure of the utility model;

[0017] Figure 2 This is a rear view structural diagram of the utility model;

[0018] Figure 3 This is a schematic diagram of a partial cross-sectional structure of a top sealing plate of the utility model from a rear view;

[0019] Figure 4 It is a schematic diagram of a partial cross-sectional structure of a purification cartridge of the utility model when viewed from above.

[0020] In the figure: 1. Filter screen for air intake; 2. Cleaning machine body; 3. Waste filter cartridge; 4. Flange; 5. First air pump; 6. Pipe fitting for venting; 7. Plasma cleaning chamber; 8. Pressure gauge; 9. Automatic loading and unloading mechanism; 901. Rectangular frame storage chamber; 902. Drive frame; 903. Electric slide rail; 904. Top sealing plate; 905. Robotic arm; 906. Electric clamp; 907. Blocking door; 10. First inflation pipe fitting; 11. Purification cartridge; 12. Second air pump; 13. Second inflation pipe fitting; 14. RF power supply reaction area; 15. Activated carbon purification layer. DETAILED DESCRIPTION

[0021] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application can be combined with each other. The present utility model will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0022] It should be noted that, unless otherwise specified, all technical and scientific terms used in this application have the same meanings as commonly understood by ordinary technicians in the technical field to which this application belongs.

[0023] In the present invention, unless otherwise specified, the directional words used, such as "up, down, top, bottom", usually refer to the directions shown in the drawings, or to the components themselves in the vertical, perpendicular or gravity directions; similarly, for ease of understanding and description, "inside and outside" refer to the inside and outside relative to the outline of each component itself, but the above-mentioned directional words are not used to limit the present invention.

[0024] See also Figure 1-4 , an embodiment provided by the utility model: a plasma cleaning machine, comprising;

[0025] A cleaning machine body 2, a plasma cleaning chamber 7 is arranged on the top of the cleaning machine body 2, a deflation pipe 6 and a first inflatable pipe 10 are respectively installed at both ends of one side of the plasma cleaning chamber 7, a first air pump 5 is installed on the deflation pipe 6, a purification cylinder 11 and a second inflatable pipe 13 are sequentially installed at the bottom of the first inflatable pipe 10, and a second air pump 12 is installed on the second inflatable pipe 13, and an air intake filter plate 1 is connected to the bottom of the second inflatable pipe 13, a pressure gauge 8 is installed on one side of the plasma cleaning chamber 7, and the pressure gauge 8 is used to automatically monitor the air pressure inside the plasma cleaning chamber 7, and a radio frequency power supply reaction area 14 matching the first inflatable pipe 10 is installed on the other side of the plasma cleaning chamber 7;

[0026] The air intake filter plate 1 and the second air-filling pipe 13 are both provided with a filter cloth layer, and the purification cylinder 11 is evenly provided with an activated carbon purification layer 15, so that the purification cylinder 11 provided with the activated carbon purification layer 15 can filter and purify the gas filled into the RF power source reaction area 14, thereby improving the cleanliness;

[0027] The bottom of the cleaning machine body 2 is evenly clamped with rubber shock-absorbing feet, and the inner wall of the plasma cleaning chamber 7 is provided with a nano-ceramic anti-sticking layer, which improves the stability of the cleaning machine body 2 and the anti-fouling and wear-resistant performance of the inner wall of the plasma cleaning chamber 7;

[0028] When in use, the purification cartridge 11 is installed between the first gas-filled pipe 10 and the second gas-filled pipe 13. The purification cartridge 11 provided with the activated carbon purification layer 15 can filter and purify the gas filled into the RF power source reaction zone 14, thereby improving the cleanliness and optimizing the plasma generation effect.

[0029] A waste residue filter cartridge 3 is installed at the bottom of the venting pipe 6. The waste residue filter cartridge 3 is used to collect impurities in the waste gas discharged by the venting pipe 6. An automatic loading and unloading mechanism 9 is installed on the plasma cleaning chamber 7;

[0030] The air intake filter screen 1 and the second air-filling pipe 13 are threadedly connected, and the waste filter cartridge 3, the air-release pipe 6, the first air-filling pipe 10, the purification cartridge 11 and the second air-filling pipe 13 are all welded with flanges 4, so that the air intake filter screen 1, the waste filter cartridge 3 and the purification cartridge 11 can be independently disassembled and maintained.

[0031] The automatic loading and unloading mechanism 9 includes a rectangular frame-shaped storage chamber 901, a top sealing plate 904 and a blocking door body 907. The rectangular frame-shaped storage chamber 901 is sequentially arranged at both ends of the plasma cleaning chamber 7. The blocking door body 907 is slidably connected to the inside of the rectangular frame-shaped storage chamber 901. The top sealing plate 904 is arranged on the top of the blocking door body 907. A silicone sealing layer is arranged on the top sealing plate 904 and the rectangular frame-shaped storage chamber 901, so that the sealing effect of the blocking door body 907 when it is closed relative to the plasma cleaning chamber 7 is improved.

[0032] The automatic loading and unloading mechanism 9 also includes a driving frame 902 and an electric slide rail 903. The electric slide rail 903 is sequentially installed at both ends of the plasma cleaning chamber 7. The driving frame 902 is slidably connected to the electric slide rail 903. The driving frame 902 and the top sealing plate 904 are welded and connected, so that it is convenient to control the automatic lifting and lowering of the blocking door body 907, which is convenient to realize the automatic opening and closing control of the two ends of the plasma cleaning chamber 7.

[0033] The automated loading and unloading mechanism 9 also includes a robotic arm 905 and an electric clamp 906. The robotic arm 905 is sequentially mounted at both ends of the cleaning machine body 2, and the electric clamp 906 is mounted on the output end of the robotic arm 905 by screws, making it convenient to utilize two robotic arms 905 equipped with electric clamps 906 to realize automated loading and unloading operations, which facilitates automated continuous processing and improves processing efficiency.

[0034] The working principle of the utility model is as follows: firstly, an external power supply and a control device are connected, and the user can place a material box containing the product to be cleaned and a material box for collecting the cleaned product at both ends of the cleaning machine body 2, respectively, and start the automatic loading and unloading mechanism 9 on the plasma cleaning chamber 7, which can drive the electric slide rail 903 and cooperate with the driving frame 902 to drive the blocking door body 907 to automatically rise and fall, which is convenient for realizing the automatic opening and closing control of the two ends of the plasma cleaning chamber 7, and can also use two mechanical arms 905 equipped with electric clamps 906 to respectively realize the automatic clamping of the original product into the other two. The plasma cleaning chamber 7 is filled with cleaned articles, which enables the device to realize automatic loading and unloading operations, thereby facilitating automatic continuous processing and improving processing efficiency. At the same time, the pressure gauge 8 can be used to monitor the air pressure inside the plasma cleaning chamber 7. Before cleaning, the first air pump 5 is started, and the plasma cleaning chamber 7 can be evacuated with the help of the venting pipe 6. Moreover, the venting mechanism can also be used to extract the polluted gas inside the plasma cleaning chamber 7 after cleaning, and the waste residue generated by cleaning will be retained in the waste residue filter cartridge 3. Then, the second air pump 12 is started, and the second gas-filled pipe 13 and the first gas-filled pipe 10 are coordinated to fill the gas into the interior of the RF power source reaction zone 14, and a strong electric field is generated by the RF power source installed on the RF power source reaction zone 14, so that the gas molecules are ionized and plasma is generated. These plasmas used for cleaning will be sent into the interior of the plasma cleaning chamber 7 through the fan on the RF power source reaction zone 14, and the plasma bombards the surface of the cleaned product to achieve the purpose of efficient cleaning. Secondly, the first gas-filled pipe 10 and the second gas-filled pipe 13 are used. A purification cylinder 11 is installed in between. The purification cylinder 11 equipped with an activated carbon purification layer 15 can filter and purify the gas filled into the RF power source reaction zone 14, improve the cleanliness, and optimize the plasma generation effect. In addition, a threaded connection is set between the air intake filter mesh plate 1 and the second inflatable pipe 13, and flanges 4 are welded on the waste residue filter cylinder 3, the exhaust pipe 6, the first inflatable pipe 10, the purification cylinder 11 and the second inflatable pipe 13, so that the independent disassembly, assembly and maintenance of the air intake filter mesh plate 1, the waste residue filter cylinder 3 and the purification cylinder 11 can be easily realized.

[0035] Obviously, the embodiments described above are only some embodiments of the utility model, not all embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the utility model.

[0036] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0037] It should be noted that the terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the numbers used in this way can be interchanged where appropriate, so that the embodiments of the present application described herein can be implemented in an order other than those illustrated or described herein.

[0038] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention may be subject to various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. Plasma cleaning machine, It is characterized in that The cleaning machine comprises a cleaning machine body (2), the top of the cleaning machine body (2) being provided with a plasma cleaning chamber (7), two ends of one side of the plasma cleaning chamber (7) being respectively provided with a deflation pipe (6) and a first inflatable pipe (10), the deflation pipe (6) being provided with a first air pump (5), the bottom of the first inflatable pipe (10) being provided with a purification cylinder (11) and a second inflatable pipe (13) in sequence, the second inflatable pipe (13) being provided with a second air pump (12), the bottom of the second inflatable pipe (13) being connected with an air intake filter screen ( 1), a pressure gauge (8) is installed on one side of the interior of the plasma cleaning chamber (7), the pressure gauge (8) is used to automatically monitor the air pressure inside the plasma cleaning chamber (7), and a radio frequency power source reaction area (14) matching the first inflation pipe (10) is installed on the other side of the plasma cleaning chamber (7); a waste residue filter cartridge (3), the waste residue filter cartridge (3) is installed at the bottom of the venting pipe (6), the waste residue filter cartridge (3) is used to collect impurities in the waste gas discharged from the venting pipe (6), and an automatic loading and unloading mechanism (9) is installed on the plasma cleaning chamber (7).

2. The plasma cleaning machine according to claim 1, It is characterized in that The air intake filter screen (1) and the second air-filling pipe (13) are threadedly connected, and flanges (4) are welded to the waste filter cartridge (3), the air-release pipe (6), the first air-filling pipe (10), the purification cartridge (11) and the second air-filling pipe (13).

3. The plasma cleaning machine according to claim 1, It is characterized in that The air intake filter screen (1) and the second air-filling pipe (13) are both provided with filter cloth layers, and the purification cylinder (11) is evenly provided with activated carbon purification layers (15).

4. The plasma cleaning machine according to claim 1, It is characterized in that The bottom of the cleaning machine body (2) is evenly clamped with rubber shock-absorbing feet, and the inner wall of the plasma cleaning chamber (7) is provided with a nano-ceramic anti-sticking layer.

5. The plasma cleaning machine according to claim 1, It is characterized in that The automatic loading and unloading mechanism (9) comprises a rectangular frame-shaped storage chamber (901), a top sealing plate (904) and a blocking door body (907); the rectangular frame-shaped storage chamber (901) is arranged at two ends of the plasma cleaning chamber (7) in sequence; the blocking door body (907) is slidably connected to the inside of the rectangular frame-shaped storage chamber (901); the top sealing plate (904) is arranged on the top of the blocking door body (907); and a silicone sealing layer is provided on the top sealing plate (904) and the rectangular frame-shaped storage chamber (901).

6. The plasma cleaning machine according to claim 5, It is characterized in that The automatic loading and unloading mechanism (9) further comprises a driving frame (902) and an electric slide rail (903), wherein the electric slide rail (903) is sequentially mounted at two ends of both sides of the plasma cleaning chamber (7), the driving frame (902) is slidably connected to the electric slide rail (903), and the driving frame (902) and the top sealing plate (904) are welded together.

7. The plasma cleaning machine according to claim 1, It is characterized in that The automatic loading and unloading mechanism (9) further comprises a mechanical arm (905) and an electric clamp (906), wherein the mechanical arm (905) is sequentially mounted on two ends of the cleaning machine body (2), and the electric clamp (906) is mounted on the output end of the mechanical arm (905) by means of screws.

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