Purging waste gas trichlorosilane residual liquid recovery device

Abstract

The utility model provides a trichlorosilane residual liquid recovery device for purging waste gas, which is characterized in that a first branch is connected to the gas outlet end of a purging pipeline, a second branch is connected to the gas outlet end of the purging pipeline, a gas-liquid separation piece is arranged on the second branch, and the gas outlet ends of the first branch and the second branch are both connected to the gas inlet end of a purging driving pipeline; the negative pressure purging mechanism is arranged at the gas outlet end of the purging driving pipeline, the negative pressure purging mechanism is connected with the gas outlet of the first branch and the gas outlet of the second branch, and the gas outlet end of the negative pressure purging mechanism is connected with the purging waste gas treatment mechanism. According to the utility model, the second branch and the gas-liquid separation part are arranged, so that when the purging waste gas mixed with the trichlorosilane residual liquid in the purging pipeline only flows through the second branch, the trichlorosilane residual liquid remains in the gas-liquid separation part; the purging waste gas passes through the purging driving pipeline and the negative pressure purging mechanism and then enters the purging waste gas treatment mechanism to be treated, so that the trichlorosilane residual liquid is effectively prevented from being gathered in the pipeline of the purging waste gas treatment mechanism.

Description

Technical Field

[0001] The utility model belongs to the technical field of pipeline maintenance, and more specifically relates to a device for recovering trichlorosilane residual liquid from purged waste gas. Background Art

[0002] After the use of the trichlorosilane tank truck, the connecting pipeline is purged. During the purging process, a part of the residual liquid trichlorosilane will flow into the purging waste gas treatment mechanism. With the accumulation of long-term use, the residual liquid in the pipeline of the purging waste gas treatment mechanism will continue to accumulate and cannot be discharged, causing corrosion or blockage of the exhaust pipeline, and severely leading to leakage of the exhaust pipeline, which not only brings direct economic losses to the production enterprise, but also causes harm to the staff. Utility Model Content

[0003] The utility model aims to provide a device for recovering residual trichlorosilane liquid from waste purge gas, so as to prevent liquid trichlorosilane from gathering in the exhaust pipe of a waste purge gas treatment mechanism.

[0004] To achieve the above-mentioned purpose, the technical solution adopted by the utility model is: to provide a purge waste gas trichlorosilane residual liquid recovery device, comprising a purge pipeline, a first branch, a second branch, a purge drive pipeline and a negative pressure purge mechanism, wherein the purge pipeline is provided with a first valve; the first branch is connected to the gas outlet end of the purge pipeline, and the first branch is provided with a second valve; the second branch is connected to the gas outlet end of the purge pipeline, and the second branch is provided with a gas-liquid separator, the gas-liquid separator is used to retain the trichlorosilane residual liquid inside, and a third valve is provided on the second branch between the gas-liquid separator and the purge pipeline; the gas outlet ends of the first branch and the second branch are both connected to the gas inlet end of the purge drive pipeline; the negative pressure purge mechanism is arranged at the gas outlet end of the purge drive pipeline, the negative pressure purge mechanism is respectively connected to the gas outlets of the first branch and the second branch, and the gas outlet end of the negative pressure purge mechanism is connected to the purge waste gas treatment mechanism.

[0005] In a possible implementation, the gas-liquid separator includes a recovery tank, the diameter of the recovery tank is larger than the second branch, and both ends of the second branch connected to the recovery tank are arranged on the top of the recovery tank.

[0006] In one possible implementation, the negative pressure purge mechanism includes a venturi tube and a nitrogen supply assembly, the throat of the venturi tube is connected to the outlet end of the purge drive pipeline, the air inlet pipe of the venturi tube is connected to the nitrogen supply assembly, and the outlet end of the venturi tube is connected to the purge exhaust gas treatment mechanism.

[0007] In a possible implementation, a drain pipeline is provided at the bottom of the recovery tank, the other end of the drain pipeline is connected to the second branch, and a fourth valve is provided on the drain pipeline; a fifth valve and a sixth valve are provided on both sides of the connection between the second branch and the drain pipeline; and a seventh valve is provided at the air outlet end of the venturi tube.

[0008] In a possible implementation, an eighth valve is provided between the nitrogen supply assembly and the venturi tube, a pressure sensor is provided on the purge pipeline, the eighth valve is connected to the pressure sensor, and the eighth valve can receive a signal from the pressure sensor and close.

[0009] In a possible implementation, a liquid level detection component is provided in the recovery tank, an alarm component is provided on the outer wall of the recovery tank, the liquid level detection component is connected to the alarm component, and when the liquid level detection component detects that the liquid level in the recovery tank reaches a preset value, the alarm component sounds an alarm.

[0010] In a possible implementation, the detection component includes a first guide rail, a slider, a float and a sensing switch, the first guide rail is vertically arranged on the inner wall of the recovery tank, the slider is slidably arranged on the first guide rail, the float is connected to the slider, the float floats on the liquid surface in the recovery tank, and the slider can slide along the first guide rail driven by the float; the sensing switch is connected to the alarm component, and the sensing switch is used to sense the height of the first slider and control the alarm component to alarm.

[0011] In a possible implementation, the induction switch includes a second guide rail, a second slider, a first contact, a second contact and a spring. The second guide rail is horizontally arranged on the inner wall of the recovery tank. The second guide rail is box-shaped. A sliding cavity is arranged inside the second guide rail. The second slider is slidably arranged in the sliding cavity. The first contact and the second contact are both arranged on the side wall of the sliding cavity. The first contact and the second contact are two breakpoints of the circuit of the alarm component. When the first contact and the second contact are turned on, the circuit of the alarm component is turned on, and the alarm component alarms. The spring is arranged between the second slider and the sliding The second slider is arranged between the side walls of the cavity, when the spring is in a natural state, the second slider is arranged on the side of the first contact and the second contact close to the first guide rail, the first slider includes a first permanent magnet, and the second slider includes a second permanent magnet and a conductive block connected to each other, when the first permanent magnet and the second permanent magnet are at the same height, the same magnetic poles are opposite, and the second permanent magnet can slide in a direction away from the first permanent magnet under the drive of the first permanent magnet, and when the repulsive force between the first permanent magnet and the second permanent magnet is balanced with the elastic force of the spring, the first contact and the second contact are connected by the conductive block.

[0012] The beneficial effect of the purge waste gas trichlorosilane residual liquid recovery device provided by the utility model is that: compared with the prior art, the utility model provides a second branch and a gas-liquid separation component, and when the second valve of the first branch is closed, the purge waste gas mixed with trichlorosilane residual liquid in the purge pipeline will flow through the second branch, and after the separation of the gas-liquid separation component, the trichlorosilane residual liquid will remain in the gas-liquid separation component, and the purge waste gas will enter the purge waste gas treatment mechanism for treatment after passing through the purge drive pipeline and the negative pressure purge mechanism, effectively preventing the trichlorosilane residual liquid from accumulating in the pipeline of the purge waste gas treatment mechanism; at the same time, when the second branch needs maintenance, it only needs to close the third valve and open the second valve, so that the purge waste gas can temporarily flow through the first branch, without delaying the purge. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0014] Figure 1 A schematic diagram of the structure of the exhaust gas purge trichlorosilane residual liquid recovery device provided by the embodiment of the utility model during operation;

[0015] Figure 2 A schematic diagram of the structure of a detection assembly provided in an embodiment of the utility model;

[0016] Figure 3 A schematic diagram of the structure of the induction switch provided by the embodiment of the utility model in one state;

[0017] Figure 4 This is a schematic structural diagram of the induction switch provided by an embodiment of the utility model in another state.

[0018] Among them, the reference numerals in the figures are as follows:

[0019] 1. Purge pipeline; 2. First branch; 3. Second branch; 4. Purge and cleaning pipeline; 5. Negative pressure purge mechanism; 6. Purge exhaust gas treatment mechanism;

[0020] 101. a first valve; 102. a pressure sensor;

[0021] 201, second valve;

[0022] 301, gas-liquid separation element; 302, third valve; 303, liquid discharge pipeline; 304, fourth valve; 305, fifth valve; 306, sixth valve; 307, detection component; 308, alarm element; 309, first guide rail; 310, first slider; 311, float; 312, induction switch; 313, second guide rail; 314, second slider; 315, first contact; 316, second contact; 317, spring; 318, second permanent magnet; 319, conductive block;

[0023] 501, venturi tube; 502, nitrogen supply assembly; 503, eighth valve;

[0024] 601. The seventh valve. DETAILED DESCRIPTION

[0025] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0026] It should be further explained that the drawings and implementation modes of the present invention mainly describe the concept of the present invention. On the basis of this concept, some specific forms and settings of connection relationships, positional relationships, power mechanisms, power supply systems, hydraulic systems and control systems may not be fully described. However, on the premise that those skilled in the art understand the concept of the present invention, those skilled in the art can implement the above-mentioned specific forms and settings in a well-known manner.

[0027] When an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it may be directly connected to the other element or indirectly connected to the other element.

[0028] The directions or positional relationships indicated by terms such as "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside" and "outside" are based on the directions or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present invention and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they should not be understood as limitations on the present invention.

[0029] The terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, "multiple" means two or more, and "several" means one or more, unless otherwise clearly and specifically defined.

[0030] The device for recovering trichlorosilane residual liquid from purge waste gas provided by the utility model is now described.

[0031] Please also read Figure 1 The purge waste gas trichlorosilane residual liquid recovery device comprises a purge pipeline 1, a first branch 2, a second branch 3, a purge drive pipeline 4 and a negative pressure purge mechanism 5, wherein the purge pipeline 1 is provided with a first valve 101. The first branch 2 is connected to the gas outlet end of the purge pipeline 1, and the first branch 2 is provided with a second valve 201; the second branch 3 is connected to the gas outlet end of the purge pipeline 1, and the second branch 3 is provided with a gas-liquid separator 301, and the gas-liquid separator 301 is used to retain the trichlorosilane residual liquid inside, and the second branch 3 between the gas-liquid separator and the purge pipeline 1 is provided with a third valve 302. The air outlet ends of the first branch 2 and the second branch are both connected to the air inlet end of the purge drive pipeline 4; the negative pressure purge mechanism 5 is arranged at the air outlet end of the purge drive pipeline 4, and the negative pressure purge mechanism 5 is respectively connected to the air outlets of the first branch 2 and the second branch 3, and the air outlet end of the negative pressure purge mechanism 5 is connected to the purge exhaust gas treatment mechanism 6.

[0032] The beneficial effect of the purge waste gas trichlorosilane residual liquid recovery device provided in the present embodiment is as follows: compared with the prior art, the purge waste gas trichlorosilane residual liquid recovery device provided in the present embodiment is provided with a second branch 3 and a gas-liquid separator 301. When the second valve 201 of the first branch 2 is closed, the purge waste gas mixed with trichlorosilane residual liquid in the purge pipeline will flow through the second branch 3. After the separation of the gas-liquid separator 301, the trichlorosilane residual liquid will remain in the gas-liquid separator 301, and the purge waste gas will enter the purge waste gas treatment mechanism 6 for treatment after passing through the purge drive pipeline 4 and the negative pressure purge mechanism 5, effectively preventing the trichlorosilane residual liquid from accumulating in the pipeline of the purge waste gas treatment mechanism 6. At the same time, when the second branch 3 needs maintenance, it is only necessary to close the third valve 302 and open the second valve 201, so that the purge waste gas can temporarily flow through the first branch 2 without delaying the purge.

[0033] In this embodiment, the gas-liquid separator 301 includes a recovery tank, the diameter of the recovery tank is larger than the second branch 3, and both ends of the second branch 3 connected to the recovery tank are arranged at the top of the recovery tank. Since the diameter of the recovery tank is larger than the diameter of the second branch 3, when the purge exhaust gas enters the recovery tank from the second branch 3, the flow rate will decrease, and the residual trichlorosilane in the purge exhaust gas will remain at the bottom of the recovery tank, and the purge exhaust gas will be discharged from the top of the recovery tank.

[0034] like Figure 1 As shown, the negative pressure purge mechanism 5 includes a venturi tube 501 and a nitrogen supply assembly 502, the throat of the venturi tube 501 is connected to the outlet end of the purge drive pipeline 4, the air inlet pipe of the venturi tube 501 is connected to the nitrogen supply assembly 502, and the outlet end of the venturi tube 501 is connected to the purge exhaust gas treatment mechanism 6. When the nitrogen supply assembly 502 supplies nitrogen to the venturi tube 501, a negative pressure is formed between the venturi tube 501 and the purge drive pipeline 4, and the purge exhaust gas in the purge pipeline 1 is sucked into the venturi tube 501 and discharged into the purge exhaust gas treatment mechanism 6 together with the nitrogen.

[0035] As a preferred technical solution, a drainage pipeline 303 is provided at the bottom of the recovery tank, the other end of which is connected to the second branch, and a fourth valve 304 is provided on the drainage pipeline 303. A fifth valve 305 and a sixth valve 306 are provided on both sides of the connection between the second branch and the drainage pipeline 303. A seventh valve 601 is provided at the air outlet end of the venturi tube 501. When the residual liquid trichlorosilane in the recovery tank needs to be discharged, first close the seventh valve 601, the first valve 101, the fifth valve 305, the sixth valve 306 and the fourth valve 304, inject high-pressure nitrogen into the recovery tank, then close the second valve 201, disconnect the connection between the purge drive pipeline 4 and the venturi tube 501, connect the purge drive pipeline 4 to the recovery tank, and finally open the fourth valve 304 and the sixth valve 306 to discharge the residual liquid trichlorosilane under the push of nitrogen until the nitrogen is discharged from the gas outlet end of the purge drive pipeline 4. At this time, the residual liquid trichlorosilane in the recovery tank is completely discharged.

[0036] In addition, an eighth valve 503 is provided between the nitrogen supply assembly 502 and the venturi tube 501, a pressure sensor 102 is provided on the purge pipeline, and the eighth valve 503 is connected to the pressure sensor 102. The eighth valve 503 can receive a signal from the pressure sensor 102 and close. When nitrogen is injected into the recovery tank, since the first valve 101 is closed, the pressure in the purge pipeline 1 is the same as the pressure in the recovery tank. When it is detected that the pressure in the purge pipeline 1 reaches the preset pressure, the eighth valve 503 is closed in time, so that the pressure in the recovery tank does not increase any more, thereby preventing danger caused by excessive pressure.

[0037] like Figure 2As shown, a liquid level detection component 307 is provided in the recovery tank, and an alarm 308 is provided on the outer wall of the recovery tank. The liquid level detection component 307 is connected to the alarm 308. When the liquid level detection component 307 detects that the liquid level in the recovery tank reaches a preset value, the alarm 308 sounds an alarm. This facilitates timely discharge of the residual trichlorosilane liquid in the recovery tank, and ensures the ability of the recovery tank to retain the residual trichlorosilane liquid.

[0038] Combination Figure 2 and Figure 3 As shown, the detection assembly 307 includes a first guide rail 309, a slider, a float 311 and a sensor switch 312. The first guide rail 309 is vertically arranged on the inner wall of the recovery tank, the slider is slidably arranged on the first guide rail, the float 311 is connected to the slider, the float 311 is floated on the liquid surface in the recovery tank, and the slider can slide along the first guide rail 309 driven by the float 311; the sensor switch 312 is connected to the alarm 308, and the sensor switch 312 is used to sense the height of the first slider 310 and control the alarm 308 to alarm. The float 311 can effectively detect the height of the liquid level, and has a simple structure and is easy to use.

[0039] Finally, if Figure 3 and Figure 4 As shown, the induction switch 312 includes a second guide rail 313, a second slider 314, a first contact 315, a second contact 316 and a spring 317. The second guide rail 313 is horizontally arranged on the inner wall of the recovery tank, the second guide rail 313 is box-shaped, a sliding cavity is arranged inside the second guide rail 313, the second slider 314 is slidably arranged in the sliding cavity, the first contact 315 and the second contact 316 are both arranged on the side wall of the sliding cavity, and the first contact 315 and the second contact 316 are two breakpoints of the circuit of the alarm member 308. When the first contact 315 and the second contact 316 are turned on, the circuit of the alarm member 308 is turned on, the alarm member 308 alarms, and the spring 317 is arranged between the second slider 314 and the side wall of the sliding cavity. When the spring 317 is in a natural state, the second slider 314 is arranged on the side of the first contact 315 and the second contact 316 close to the first guide rail 309. At this time, the alarm member 308 does not alarm. The first slider 310 includes a first permanent magnet, and the second slider 314 includes a second permanent magnet 318 and a conductive block 319 that are connected to each other. When the first permanent magnet and the second permanent magnet 318 are at the same height, the same magnetic poles are opposite to each other. The second permanent magnet 318 can slide in a direction away from the first permanent magnet under the drive of the first permanent magnet, and when the repulsive force between the first permanent magnet and the second permanent magnet 318 and the elastic force of the spring 317 are balanced with each other, the first contact 315 and the second contact 316 are connected by the conductive block 319, and the alarm element 308 starts to alarm to remind the staff to discharge the residual trichlorosilane in the recovery tank.

[0040] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A device for recovering trichlorosilane residual liquid from waste gas. It is characterized in that include: A purge pipeline (1) provided with a first valve (101); A first branch (2), one end of which is connected to the gas outlet end of the purge pipeline (1), and a second valve (201) is provided on the first branch (2); A second branch (3), one end of which is connected to the gas outlet end of the purge pipeline (1); a gas-liquid separator (301) is provided on the second branch (3); the gas-liquid separator (301) is used to retain trichlorosilane residual liquid inside; and a third valve (302) is provided on the second branch (3) between the gas-liquid separator and the purge pipeline (1); A purge drive pipeline (4), wherein the gas outlet ends of the first branch (2) and the second branch are both connected to the gas inlet end of the purge drive pipeline (4); A negative pressure purge mechanism (5) is arranged at the air outlet end of the purge drive pipeline (4); the negative pressure purge mechanism (5) is connected to the air outlets of the first branch (2) and the second branch (3) respectively; and the air outlet end of the negative pressure purge mechanism (5) is connected to the purge waste gas treatment mechanism (6).

2. The purge waste gas trichlorosilane residual liquid recovery device as claimed in claim 1, Features: The gas-liquid separation element (301) comprises a recovery tank, the diameter of the recovery tank is larger than the second branch (3), and both ends of the second branch (3) connected to the recovery tank are arranged at the top of the recovery tank.

3. The device for recovering trichlorosilane residual liquid from purge waste gas as claimed in claim 2, Features: The negative pressure purge mechanism (5) comprises a venturi tube (501) and a nitrogen supply assembly (502); the throat of the venturi tube (501) is connected to the gas outlet end of the purge drive pipeline (4); the air inlet pipe of the venturi tube (501) is connected to the nitrogen supply assembly (502); and the gas outlet end of the venturi tube (501) is connected to the purge exhaust gas treatment mechanism (6).

4. The device for recovering trichlorosilane residual liquid from purge waste gas as claimed in claim 3, Features: A drainage pipeline (303) is provided at the bottom of the recovery tank, the other end of the drainage pipeline (303) is connected to the second branch, and a fourth valve (304) is provided on the drainage pipeline (303); A fifth valve (305) and a sixth valve (306) are provided on both sides of the connection between the second branch and the liquid discharge pipeline (303); A seventh valve (601) is provided at the gas outlet end of the venturi tube (501).

5. The device for recovering trichlorosilane residual liquid from purge waste gas as claimed in claim 4, Features: An eighth valve (503) is provided between the nitrogen supply assembly (502) and the venturi tube (501), a pressure sensor (102) is provided on the purge pipeline, the eighth valve (503) is connected to the pressure sensor (102), and the eighth valve (503) is capable of receiving a signal from the pressure sensor (102) and closing.

6. The device for recovering trichlorosilane residual liquid from purge waste gas as claimed in claim 5, Features: A liquid level detection component (307) is provided in the recovery tank, and an alarm component (308) is provided on the outer wall of the recovery tank. The liquid level detection component (307) is connected to the alarm component (308). When the liquid level detection component (307) detects that the liquid level in the recovery tank reaches a preset value, the alarm component (308) sounds an alarm.

7. The device for recovering trichlorosilane residual liquid from purge waste gas as claimed in claim 6, Features: The detection assembly (307) comprises a first guide rail (309), a first slider (310), a float (311) and a sensing switch (312); the first guide rail (309) is vertically arranged on the inner wall of the recovery tank; the first slider (310) is slidably arranged on the first guide rail; the float (311) is connected to the first slider (310); the float (311) floats on the liquid surface in the recovery tank; the first slider (310) can slide along the first guide rail (309) driven by the float (311); the sensing switch (312) is connected to the alarm component (308); the sensing switch (312) is used to sense the height of the first slider (310) and control the alarm component (308) to alarm.

8. The device for recovering trichlorosilane residual liquid from purge waste gas as claimed in claim 7, Features: The induction switch (312) comprises a second guide rail (313), a second slider (314), a first contact (315), a second contact (316) and a spring (317); the second guide rail (313) is horizontally arranged on the inner wall of the recovery tank; the second guide rail (313) is box-shaped; a sliding cavity is arranged inside the second guide rail (313); the second slider (314) is slidably arranged in the sliding cavity; the first contact (315) and the second contact (316) are both arranged on the side wall of the sliding cavity; the first contact (315) and the second contact (316) are two breakpoints of the circuit of the alarm element (308); when the first contact (315) and the second contact (316) are connected, the circuit of the alarm element (308) is connected, and the alarm element (308) alarms; the spring (317) is arranged on the second slider (31 4) between the side wall of the sliding cavity, when the spring (317) is in a natural state, the second slider (314) is arranged on the side of the first contact (315) and the second contact (316) close to the first guide rail (309), the first slider (310) includes a first permanent magnet, the second slider (314) includes a second permanent magnet (318) and a conductive block (319) connected to each other, when the first permanent magnet and the second permanent magnet (318) are at the same height, the same magnetic poles are opposite, the second permanent magnet (318) can slide in a direction away from the first permanent magnet under the drive of the first permanent magnet, and when the repulsive force between the first permanent magnet and the second permanent magnet (318) and the elastic force of the spring (317) are balanced, the first contact (315) and the second contact (316) are connected by the conductive block (319).

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