Evaporation device

Abstract

The evaporation device comprises a crucible main body, a nozzle main body is arranged at an opening in the upper end of the crucible main body, and a heating part is arranged on the outer side of the crucible main body; one end of the nozzle main body is inserted into the crucible main body, the nozzle main body comprises a diffusion plate which is arranged in one end of the crucible main body, a nozzle outlet is formed in one end, far away from the diffusion plate, of the nozzle main body, the periphery of the nozzle outlet extends outwards to form a connecting part, and the connecting part is connected to the opening end of the crucible main body in a pressing manner; a top reflecting plate is arranged at the upper end of the nozzle body, the reflecting plate is further arranged at the upper end of the nozzle and used for conducting heat preservation on the nozzle, reducing heat exchange between the nozzle and the external environment and reducing cooling of the nozzle, solidification of materials at the nozzle can be further avoided, and then the size of a crucible can be increased so that the capacity of evaporation materials can be increased; the single-time working time of the equipment is prolonged, and meanwhile, the problem of nozzle blockage is also avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of evaporation equipment, in particular to an evaporation device. Background Art

[0002] At present, in the manufacturing process of OLED display panels, the preparation of the evaporated film is the most important step. Vacuum evaporation equipment is often used to form the evaporated film on the substrate, and among them, the point-type evaporation source has a wide range of applications due to its convenience in use and operation. The existing point-type evaporation source mainly includes an evaporation source and a crucible located on the evaporation source for carrying organic or metal materials. During the evaporation process, the substrate is arranged above the evaporation source, the evaporation source is heated, the organic or metal is heated to form steam, and the steam evaporating upward forms an evaporated film on the substrate.

[0003] The maximum capacity of the existing mass-produced 6th-generation organic light-emitting diode metal point evaporation source is less than 500cc, and the longest process time is less than 100 hours. The latest 8.6th-generation organic light-emitting diode production line requires a maximum process time of 250 hours. The current mass-produced 6th-generation organic light-emitting diode metal point evaporation source cannot meet the production line requirements, and it is necessary to extend the evaporation time by increasing the capacity. If the structure is the same as the existing metal point evaporation source, simply making the existing heating source thicker and higher, and the crucible size larger to increase the capacity, then the path length from the bottom of the crucible to the nozzle will be increased, which will cause the evaporated material to solidify and aggregate at the nozzle during the rising process. In severe cases, it will cause the nozzle to be blocked. If the blockage is prevented by increasing the temperature of the heating equipment of the evaporation source, the temperature of the ejected material will be too high, resulting in too high a substrate temperature. Utility Model Content

[0004] The purpose of the utility model is to provide an evaporation device to solve the problems raised in the above background technology.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] An evaporation device comprises a crucible body, a nozzle body is arranged at the opening of the upper end of the crucible body, and a heating part is arranged outside the crucible body;

[0007] One end of the nozzle body is inserted into the crucible body, and the nozzle body includes a diffusion plate arranged in one end of the crucible body. The end of the nozzle body away from the diffusion plate is provided with a nozzle outlet, and the periphery of the nozzle outlet extends outward to form a connecting portion and is crimped to the open end of the crucible body. A top reflection plate is provided at the upper end of the nozzle body, and the nozzle outlet passes through the top reflection plate and extends to a side of the top reflection plate away from the crucible body.

[0008] As a further solution of the present invention: the crucible body 1 is a single-layer or multi-layer structure, the diameter of the crucible body is 85-95 mm, and the height is 245-255 mm.

[0009] As a further solution of the utility model: the crucible body comprises an inner crucible and an outer crucible, and the outer crucible is provided with an annular fault at a position close to the diffusion plate.

[0010] As a further solution of the utility model: the diffuser plate has a multi-layer structure, and is provided with diffuser holes, and the aperture of the diffuser holes on the multi-layer diffuser plate gradually decreases from one end away from the top reflector plate to one end close to the top reflector plate.

[0011] As a further solution of the utility model: the heating part includes a first heating part and a second heating part arranged outside the crucible body, the first heating part is located in the middle and lower part of the crucible body, and the second heating part is located in the upper part of the crucible body.

[0012] As a further solution of the utility model: the height of the first heating part is 100-115 mm, the height of the second heating part is 50-65 mm, and the gap between the first heating part and the second heating part is 25-35 mm.

[0013] As a further solution of the utility model: an insulation layer is provided on the outside of the crucible body, and the insulation layer includes a first side reflection plate, a second side reflection plate, and a bottom reflection plate arranged at the lower ends of the first side reflection plate and the second side reflection plate, the first side reflection plate is located inside the second side reflection plate, a connecting ring is provided on the first side reflection plate, the connecting ring is a ceramic structure, and the heating part is connected to the inside of the first side reflection plate through the connecting ring.

[0014] As a further solution of the utility model: a first through hole is provided inside the first side reflector, a second through hole is provided at the bottom of the second side reflector, a reflective cover is provided on the top of the first side reflector and the second side reflector, and the first through hole, the second through hole and the gap between the top of the first side reflector and the second side reflector and the reflective cover form an exhaust flow path.

[0015] As a further solution of the utility model: the outer side of the second side reflector is wrapped with a cooling water jacket, and the cooling water jacket is provided with a cooling water channel or cooling water pipe and a water inlet and a water outlet for circulating cooling water.

[0016] As a further solution of the utility model: the crucible body is detachably connected to the heating part, a base flange is provided below the heating part, a cooling line connected to the cooling water jacket is provided on the base flange, a bottom thermocouple is provided at the bottom of the heating part, a power feedthrough connected to the thermocouple and a power connector connected to the power feedthrough are provided on the base flange.

[0017] Compared with the prior art, the beneficial effects of the utility model are:

[0018] 1. The present application provides heating wires at both ends on the outside of the crucible. The bottom heating wire is used to evaporate the material during heating, and the upper heating wire is used to maintain the temperature of the evaporated material to prevent the evaporated material from solidifying and gathering at the nozzle. In addition, the present application also provides a reflector at the upper end of the nozzle to keep the nozzle warm, reduce the heat exchange between the nozzle and the external environment, reduce the cooling of the nozzle, and further prevent the material from solidifying at the nozzle. The size of the crucible can be increased to increase the capacity of the evaporated material, increase the single working time of the equipment, and avoid the problem of nozzle clogging.

[0019] 2. The present application arranges two layers of insulation on the outside of the heating part, thereby avoiding the outflow of heat from the heating wire, improving the energy utilization efficiency, and not causing the temperature around the crucible to rise too high. In addition, through holes are arranged on the insulation layer to form a gas path with the reflective cover plate to discharge the gas generated by the heating wire. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 is a cross-sectional view of the crucible body of the evaporation source of this embodiment;

[0021] Figure 2 This is a schematic diagram of the base structure of the evaporation source of this embodiment;

[0022] Figure 3 This is a schematic diagram of the structure of the evaporation source nozzle of this embodiment;

[0023] In the figure: 1-crucible body, 2-inner crucible, 3-outer crucible, 4-nozzle body, 5-nozzle outlet, 6-diffuser plate, 7-diffuser hole, 8-reflection cover, 9-top reflector, 10-first heating part, 11-second heating part, 12-reflection part, 13-first side reflector, 14-second side reflector, 15-first through hole, 16-second through hole, 17-connecting ring, 18-cooling water jacket, 19-bottom reflector, 20-bottom thermocouple, 21-power feedthrough, 22-power connector, 23-base flange, 24-cooling line, 25-top thermocouple. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0025] See also Figure 1-3 In an embodiment of the utility model, an evaporation device includes a crucible body 1, a nozzle body 4 is provided at the opening of the upper end of the crucible body 1, one end of the nozzle body 4 is inserted into the crucible body 1, and the nozzle body 4 includes a diffusion plate 6 arranged in one end of the crucible body 1, the diffusion plate 6 has a multi-layer structure, and diffusion holes 7 are provided on the diffusion plate 6. The aperture of the diffusion holes 7 on the multi-layer diffusion plate 6 gradually decreases from the end away from the top reflection plate 9 to the end close to the top reflection plate 9, that is, from the lower right to the top, the inner diameter of the diffusion hole 7 becomes larger and larger, the number of the diffusion holes 7 becomes smaller and smaller, and the diffusion holes 7 on adjacent diffusion plates 6 are dispersedly arranged.

[0026] A nozzle outlet 5 is provided at one end of the nozzle body 4 away from the diffusion plate 6, that is, the nozzle body 4 forms a necking structure at the nozzle outlet 5, and the periphery of the nozzle outlet 5 extends outward to form a connecting portion and is crimped to the open end of the crucible body 1, so that the opening of the crucible body 1 can be sealed to prevent leakage of the material in the crucible body 1, and a top reflecting plate 9 is provided at the upper end of the nozzle body 4. By setting the top reflecting plate 9, the heat energy released to the outside can be reduced and the heat can be gathered into the inside of the crucible body 1, and the top reflecting plate 9 can be set to a multi-layer structure. The top reflecting plate 9 with a multi-layer structure maintains a height interval with the nozzle inlet, is installed on the reflecting cover plate 8 through four-sided contact, and ensures the minimum contact surface to reduce the heat diffusion outward.

[0027] The nozzle outlet 5 extends through the top reflective plate 9 to the side of the top reflective plate 9 away from the crucible body 1. The height of the exposed part of the nozzle outlet 5 and the distance from the top reflective plate 9 are within 5 mm. The crucible body 1 is a single-layer or multi-layer structure. The diameter of the crucible body 1 is 85-95 mm and the height is 245-255 mm. The crucible body 1 includes an inner crucible 2 and an outer crucible 3. The outer crucible 3 is provided with an annular fault near the diffuser plate 6. That is, in this embodiment, the crucible body 1 near the diffuser plate 6 is a single-layer structure.

[0028] A heating part is provided on the outside of the crucible body 1, and the heating part includes a first heating part 10 and a second heating part 11 which are arranged on the outside of the crucible body 1. The first heating part 10 is located in the lower middle part of the crucible body 1, and the second heating part 11 is located in the upper part of the crucible body 1. In this embodiment, the height of the first heating part is 100-115 mm, the height of the second heating part is 50-65 mm, the gap between the first heating part 10 and the second heating part 11 is 25-35 mm, and the first heating part 10 is located at the annular fault of the outer crucible 3 in this embodiment.

[0029] An insulation layer is provided on the outside of the crucible body 1, and the insulation layer includes a first side reflection plate 13, a second side reflection plate 14 and a bottom reflection plate 19 arranged at the lower ends of the first side reflection plate 13 and the second side reflection plate 14. The first side reflection plate 13 is located inside the second side reflection plate 14, and a connecting ring 17 is provided on the first side reflection plate 13. The connecting ring 17 is a ceramic structure, and the heating part is connected to the inside of the first side reflection plate 13 through the connecting ring 17. A first through hole 15 is provided on the inside of the first side reflection plate 13, and a second through hole 16 is provided at the bottom of the second side reflection plate 14. A reflection cover plate 8 is provided on the top of the first side reflection plate 13 and the second side reflection plate 14, and the first through hole 15, the second through hole 16 and the gap between the top of the first side reflection plate 13 and the second side reflection plate 14 and the reflection cover plate 8 form an exhaust flow path. The side reflector is used to reflect heat, reduce the heat energy released to the outside and gather heat to the internal components. The first side reflector 13 is provided with a first through hole 15 as a whole. The second side reflector 14 is perforated at the bottom. The reflector forms a flow path through the perforations to facilitate the exhaust of the heating wire of the heating part. The bottom reflector 19 is used to reflect heat, reduce the heat energy released to the outside and gather heat to the internal components. The bottom reflector is applied in multiple layers and minimizes the space for thermocouples and power cords. The second side reflector 14 is wrapped with a cooling water jacket 18 on the outside. The cooling water jacket 18 is provided with a cooling water channel or cooling water pipe and a water inlet and outlet for circulating cooling water. In this embodiment, the cooling component is a water jacket shape that can maximize the contact surface with the PCW and a pipe shape that maintains the temperature of the PCW.

[0030] The crucible body 1 is detachably connected to the heating part, a base flange 23 is provided below the heating part, a cooling line 24 connected to the cooling water jacket 18 is provided on the base flange 23, a bottom thermocouple 20 is provided at the bottom of the heating part, a power feedthrough 21 connected to the thermocouple 20 and a power connector 22 connected to the power feedthrough 21 are provided on the base flange 23.

[0031] When the utility model is in use, firstly, the material to be evaporated is placed in the crucible body 1. The capacity of the crucible body 1 of the present application is 1500CC, which is far more than the 500CC capacity crucible commonly used in the art. After the evaporation material is placed, the crucible body 1 is placed in the equipment. At this time, the outer wall of the crucible body 1 is close to the heating part. Then the nozzle body 4 is inserted into the opening of the crucible body 1, and the nozzle body 4 is pressed on the opening of the crucible body, so that the inside of the crucible body 1 can be sealed, so that the material evaporated from the crucible body 1 can only be discharged through the diffusion hole 7 on the diffusion plate 6 and the nozzle outlet 5. After the nozzle body 4 is installed, the top reflection plate 9 is pressed on the nozzle body 4, so that the assembly of the crucible body 1 can be completed, and then the evaporation equipment is connected to the base together to form an evaporation source device. Then the evaporation source device is placed in the evaporation equipment, and power is turned on so that the heating wires in the first heating part 10 and the second heating part 11 start to emit. Heat is used to heat the crucible body 1 and the material in the crucible body 1. Since an insulating layer is provided on the outside of the heating part of the present application, heat loss can be effectively prevented. The material in the crucible body 1 evaporates after being heated, and then moves upward and is discharged through the diffusion plate 6 and the nozzle outlet 5 in sequence. Since the crucible body of the present application is large in size, the evaporated material rises and reaches the diffusion plate 6 where the temperature drops, and it is easy to condense at the diffusion plate 6. In severe cases, it will block the diffusion hole 7 and even the nozzle outlet. The present application provides a heating part on the outside of the nozzle body 4, which can reheat the rising material to prevent the material from cooling and solidifying. At the same time, the present application also provides a top reflecting plate 9 at the upper end of the nozzle body 4, which can insulate the upper end of the nozzle body 4, reduce the heat exchange between the nozzle body 4 and the outside world, reduce the cooling rate of the nozzle body 4, and thus reduce the cooling of the evaporated material, further avoiding the problem of condensation of the evaporated material at the nozzle body 4.

[0032] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or essential features of the present invention. Therefore, the embodiments should be regarded as exemplary and non-restrictive from any point of view, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims be included in the present invention. Any reference numeral in a claim should not be regarded as limiting the claim to which it relates.

[0033] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. An evaporation device, comprising a crucible body (1), characterized in that: A nozzle body (4) is provided at the opening of the upper end of the crucible body (1), and a heating part is provided on the outer side of the crucible body (1); One end of the nozzle body (4) is inserted into the crucible body (1), and the nozzle body (4) includes a diffusion plate (6) arranged in one end of the crucible body (1). The end of the nozzle body (4) away from the diffusion plate (6) is provided with a nozzle outlet (5), and the periphery of the nozzle outlet (5) extends outward to form a connecting portion and is crimped to the open end of the crucible body (1). A top reflection plate (9) is provided at the upper end of the nozzle body (4), and the nozzle outlet (5) passes through the top reflection plate (9) and extends to the side of the top reflection plate (9) away from the crucible body (1).

2. An evaporation device according to claim 1, characterized in that: The crucible body (1) is a single-layer or multi-layer structure, and the diameter of the crucible body (1) is 85-95 mm, and the height is 245-255 mm.

3. An evaporation device according to claim 1, characterized in that: The crucible body (1) comprises an inner crucible (2) and an outer crucible (3), and the outer crucible (3) is provided with an annular fault at a position close to the diffusion plate (6).

4. An evaporation device according to claim 1, characterized in that: The diffuser plate (6) has a multi-layer structure, and a diffuser hole (7) is provided on the diffuser plate (6). The aperture of the diffuser hole (7) on the multi-layer diffuser plate (6) gradually decreases from an end away from the top reflector plate (9) to an end close to the top reflector plate (9).

5. The evaporation device according to claim 1, characterized in that: The heating part comprises a first heating part (10) and a second heating part (11) which are arranged outside the crucible body (1); the first heating part (10) is located in the middle and lower part of the crucible body (1), and the second heating part (11) is located in the upper part of the crucible body (1).

6. An evaporation device according to claim 5, characterized in that: The height of the first heating part (10) is 100-115 mm, the height of the second heating part (11) is 50-65 mm, and the gap between the first heating part (10) and the second heating part (11) is 25-35 mm.

7. An evaporation device according to claim 1, characterized in that: A heat-insulating layer is provided on the outside of the crucible body (1), and the heat-insulating layer comprises a first side reflection plate (13), a second side reflection plate (14), and a bottom reflection plate (19) arranged at the lower ends of the first side reflection plate (13) and the second side reflection plate (14); the first side reflection plate (13) is located inside the second side reflection plate (14); a connecting ring (17) is provided on the first side reflection plate (13); the connecting ring (17) is a ceramic structure; and the heating part is connected to the inside of the first side reflection plate (13) via the connecting ring (17).

8. An evaporation device according to claim 7, characterized in that: A first through hole (15) is provided inside the first side reflector (13), a second through hole (16) is provided at the bottom of the second side reflector (14), a reflective cover plate (8) is provided on the top of the first side reflector (13) and the second side reflector (14), and the first through hole (15), the second through hole (16) and the gap between the top of the first side reflector (13), the second side reflector (14) and the reflective cover plate (8) form an exhaust flow path.

9. An evaporation device according to claim 7, characterized in that: The second side reflection plate (14) is wrapped with a cooling water jacket (18) on the outside, and the cooling water jacket (18) is provided with a cooling water channel or cooling water pipe as well as a water inlet and a water outlet for circulating cooling water.

10. An evaporation device according to claim 9, characterized in that: The crucible body (1) is detachably connected to the heating part, a base flange (23) is provided below the heating part, a cooling line (24) connected to the cooling water jacket (18) is provided on the base flange (23), a bottom thermocouple (20) is provided at the bottom of the heating part, a power feedthrough (21) connected to the thermocouple (20) and a power connector (22) connected to the power feedthrough (21) are provided on the base flange (23).

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