Electron gun heating device for electron beam evaporation

Abstract

The utility model relates to the technical field of electron guns, in particular to an electron gun heating device for electron beam evaporation, and adopts the technical scheme that the electron gun heating device comprises a gun head and a clamping ring, a first fixing block is mounted at the bottom of the gun head, a lamp filament is mounted at the top of the first fixing block, and the clamping ring is mounted in the first fixing block; and a clamping groove is formed in the clamping ring, a third clamping head is installed in the clamping groove, a second fixing block is installed at the bottom of the first fixing block, and a first clamping head is installed at the bottom of the gun head. According to the utility model, the electron gun filament structure is designed to realize rapid dismounting and mounting of the filament, and because the filament is relatively slow to mount and dismount in the evaporation process and the maintenance process of the filament of the electron gun, the efficiency of replacing the filament is influenced, so that the filament structure can improve the efficiency of dismounting and mounting the filament of the electron gun, and the production efficiency of the electron gun is improved. Therefore, the production and maintenance cost of the electron gun is saved.

Description

Technical Field

[0001] The utility model relates to the technical field of electron guns, in particular to an electron gun heating device used for electron beam evaporation. Background Art

[0002] The background technology of electron gun evaporation system mainly includes two aspects: electron gun and evaporation source. The electron gun is the key component to realize electron acceleration and control, and is usually composed of cathode, anode and electromagnetic field emitter. A high voltage is applied between the cathode and anode to accelerate the electrons from the cathode to the anode, and its motion trajectory is controlled by the guidance of the electromagnetic field. The evaporation source is a device used to heat and evaporate liquid materials, usually using resistance heating, high-frequency induction heating and other methods.

[0003] The prior art also has the following defects during use:

[0004] In the prior art electron gun, during the evaporation process, the installation and removal of the filament are slow, which affects the efficiency of filament replacement. Therefore, a structure of an electron gun with fast filament replacement is needed to improve the efficiency of filament removal and installation, so as to save the cost of producing and maintaining the electron gun.

[0005] In view of this, we propose an electron gun heating device for electron beam evaporation to solve the existing problems. Utility Model Content

[0006] The utility model aims to provide an electron gun heating device for electron beam evaporation to solve the problems raised in the above background technology.

[0007] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: an electron gun heating device for electron beam evaporation, comprising a gun head and a clamping ring, a first fixing block is installed at the bottom of the gun head, a filament is installed at the top of the first fixing block, a clamping ring is installed inside the first fixing block, a clamping groove is provided inside the clamping ring, a third clamping head is installed inside the clamping groove, a second fixing block is installed at the bottom of the first fixing block, a first clamping head is installed at the bottom of the gun head, a first mounting frame is installed at the bottom of the first clamping head, an elastic card is installed on the inner side of the first mounting frame, a second clamping head is installed on the top of the elastic card, a threaded hole is provided on the side of the first mounting frame, a second mounting frame is installed on one side of the second fixing block, and a ceramic column is installed on the top of the second mounting frame.

[0008] Preferably, a first bolt is installed on a side surface of the first fixing block.

[0009] Preferably, a second bolt is installed on the side surface of the second fixing block.

[0010] Preferably, a gasket is installed between the second bolt and the second fixing block.

[0011] Preferably, electrodes are installed on the side surfaces of the second fixing block.

[0012] Preferably, a ceramic pad is installed on the side of the gun head close to the ceramic column.

[0013] Compared with the prior art, the beneficial effects of the utility model are:

[0014] The utility model designs an electron gun filament structure to realize the rapid disassembly and installation of the filament. During the evaporation process and the maintenance of the electron gun filament, the installation and disassembly of the filament is slow, which affects the efficiency of filament replacement. Therefore, the filament structure can improve the efficiency of disassembly and installation of the electron gun filament, thereby saving the cost of producing and maintaining the electron gun. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a front view structural schematic diagram of the utility model;

[0016] Figure 2 It is a schematic diagram of the top view structure of the utility model;

[0017] Figure 3 It is a schematic diagram of the top view structure of the utility model;

[0018] Figure 4 This is a schematic diagram of the gun head structure of the utility model;

[0019] Figure 5 This is a schematic diagram of the structure of the first mounting frame of the utility model;

[0020] Figure 6 This is a schematic diagram of the structure of the filament assembly of the utility model.

[0021] In the figure: 1, gun tip; 2, ceramic column; 3, filament; 4, ceramic pad; 5, electrode; 6, first mounting bracket; 7, elastic clip; 8, retaining ring; 9, first bolt; 10, second bolt; 11, first clamp; 12, second clamp; 13, third clamp; 14, clamping groove; 15, gasket; 16, threaded hole; 17, first fixing block; 18, second fixing block; 19, second mounting bracket. DETAILED DESCRIPTION

[0022] The technical solution of the utility model is further described below in conjunction with the accompanying drawings and specific embodiments.

[0023] Embodiment 1

[0024] like Figure 1 , Figure 2 , Figure 3 and Figure 4As shown, the utility model proposes an electron gun heating device for electron beam evaporation, comprising a gun head 1 and a clamping ring 8, a first fixing block 17 is installed at the bottom of the gun head 1, the first fixing block 17 is used to fix and install a filament 3, a filament 3 is installed on the top of the first fixing block 17, the filament 3 is used to emit an electron beam to heat the material in the crucible, a clamping ring 8 is installed inside the first fixing block 17, the clamping ring 8 is used to install the filament 3, a clamping groove 14 is arranged inside the clamping ring 8, the clamping groove 14 is used to install a third clamping head 13, a third clamping head 13 is installed inside the clamping groove 14, the third clamping head 13 is used to be clamped inside the clamping groove 14, a second fixing block 18 is installed at the bottom of the first fixing block 17, the second fixing block 18 is used to install, the bottom of the gun head 1 A first clamp 11 is installed on the top, and the first clamp 11 is used to be installed inside the second clamp 12. A first mounting frame 6 is installed on the bottom of the first clamp 11, and the first mounting frame 6 is used to install the gun head 1. An elastic card 7 is installed on the inner side of the first mounting frame 6, and the elastic card 7 is used to increase the elasticity and facilitate installation. A second clamp 12 is installed on the top of the elastic card 7, and the second clamp 12 is used to clamp the first clamp 11. A threaded hole 16 is provided on the side of the first mounting frame 6, and the threaded hole 16 is used to install the second bolt 10. A second mounting frame 19 is installed on one side of the second fixing block 18, and the second mounting frame 19 is used to install the ceramic column 2. A ceramic column 2 is installed on the top of the second mounting frame 19, and the ceramic column 2 is used to play a supporting role.

[0025] Furthermore, a first bolt 9 is installed on the side of the first fixing block 17 , and the first bolt 9 is used to fix the first fixing block 17 .

[0026] Furthermore, a second bolt 10 is installed on the side of the second fixing block 18 , and the second bolt 10 is used to install the gasket 15 and the electrode 5 .

[0027] Furthermore, a gasket 15 is installed between the second bolt 10 and the second fixing block 18 , and the gasket 15 is used to play a buffering role.

[0028] Furthermore, an electrode 5 is installed on the side of the second fixing block 18 , and the electrode 5 is used to heat the filament 3 .

[0029] Furthermore, a ceramic pad 4 is installed on one side of the gun head 1 close to the ceramic column 2, and the ceramic pad 4 is used to play a supporting and protective role inside.

[0030] The working principle of the electron gun heating device for electron beam evaporation based on the first embodiment is: a ceramic column 2 is installed on the top of the second mounting frame 19, and the ceramic column 2 is used for supporting and fixing. The filament 3 plays a role in generating an electron beam. The third clamp 13 at the bottom of the filament 3 is used to be installed in the groove 14 of the clamping ring 8. The mounting frame 6 is installed with the gun head 1 by plugging and unplugging the buckle, and the gasket 15 and the electrode 5 are installed inside the second bolt 10.

[0031] The above-mentioned specific embodiments are only several preferred embodiments of the present invention. Based on the technical solution of the present invention and the relevant inspiration of the above-mentioned embodiments, those skilled in the art can make various alternative improvements and combinations to the above-mentioned specific embodiments.

Claims

1. An electron gun heating device for electron beam evaporation, comprising a gun head (1) and a clamping ring (8), characterized in that: A first fixing block (17) is mounted at the bottom of the gun head (1), a filament (3) is mounted at the top of the first fixing block (17), a clamping ring (8) is mounted inside the first fixing block (17), a clamping groove (14) is provided inside the clamping ring (8), a third clamping head (13) is mounted inside the clamping groove (14), a second fixing block (18) is mounted at the bottom of the first fixing block (17), a first clamping head (11) is mounted at the bottom of the gun head (1), a first mounting frame (6) is mounted at the bottom of the first clamping head (11), an elastic clamp (7) is mounted on the inner side of the first mounting frame (6), a second clamping head (12) is mounted on the top of the elastic clamp (7), a threaded hole (16) is provided on the side of the first mounting frame (6), a second mounting frame (19) is mounted on one side of the second fixing block (18), and a ceramic column (2) is mounted on the top of the second mounting frame (19).

2. The electron gun heating device for electron beam evaporation according to claim 1, characterized in that: A first bolt (9) is mounted on the side surface of the first fixing block (17).

3. The electron gun heating device for electron beam evaporation according to claim 1, characterized in that: A second bolt (10) is mounted on the side surface of the second fixing block (18).

4. The electron gun heating device for electron beam evaporation according to claim 3, characterized in that: A gasket (15) is installed between the second bolt (10) and the second fixing block (18).

5. The electron gun heating device for electron beam evaporation according to claim 1, characterized in that: The electrode (5) is mounted on the side surface of the second fixing block (18).

6. The electron gun heating device for electron beam evaporation according to claim 1, characterized in that: A ceramic pad (4) is installed on the side of the gun head (1) close to the ceramic column (2).

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